CN109338290A - A kind of film temperature sensor for aero engine turbine blades - Google Patents
A kind of film temperature sensor for aero engine turbine blades Download PDFInfo
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- CN109338290A CN109338290A CN201811300429.7A CN201811300429A CN109338290A CN 109338290 A CN109338290 A CN 109338290A CN 201811300429 A CN201811300429 A CN 201811300429A CN 109338290 A CN109338290 A CN 109338290A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/403—Oxides of aluminium, magnesium or beryllium
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
- C23C4/10—Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
- C23C4/11—Oxides
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
Abstract
The invention discloses a kind of film temperature sensors for aero engine turbine blades, including sequentially connected transition zone, thermally grown layer, insulating layer and thermocouple layer, thermocouple layer is formed by overlapping by the first thermocouple and the second thermocouple by one end, its overlap constitutes hot junction, that is, measurement end, extraction wire uses the filament with the first thermocouple and the second thermocouple difference homogeneity, is connect respectively with the first thermocouple and second thermocouple the other end by high-temperature electric conduction glue.The present invention is directed to aero-engine high-temperature severe environment, devise the film layer structure of sensor, optimize the preparation processes such as thin film sputtering, annealing, using ion deposition technology, plural layers are deposited directly to turbine blade surface, prepare function, structure-integrated thin film sensor, improve film ply adhesion strength, solve film layer high-temperature insulation, fall off, signal draw etc. problems, thin film sensor overall thickness of the present invention be less than 25um, 1100 DEG C of highest measurement temperature.
Description
Technical field
The invention belongs to temperature measurement technology and sensor technical fields, and in particular to one kind is used for pyrometric film
Temperature sensor and preparation method thereof.
Background technique
With the development of aviation power technology, the temperature of engine is continuously improved, and is born to cause turbo blade
Temperature increase substantially, the reliably working service life under the turbo blade condition of high temperature is directly affected, so that the hot portion such as turbo blade
The accurate measurement of part temperature becomes critical issue.Precise measurement Turbine Blade Temperature Field helps to verify cooling efficiency and thermal boundary applies
The performance of layer, and prevent the overtemperature of turbo blade from damaging.Accurate measurement hot-end component surface temperature, for correctly evaluating its cooling
Effect, working condition and service life, it is ensured that the safety of engine plays a significant role.
Turbo blade there is no targetedly temp measuring method at present.Traditional thermocouple temperature measurement method can only measure testee
Temperature after reaching thermal balance with temperature transducer, the response time is longer, is not suitable for that measurement transformation temperature is fast or small objects
Temperature occasion, and destruction will cause to the structure of turbo blade, it affects to target temperature field distribution.
Summary of the invention
The object of the present invention is to provide a kind of film temperature sensor for aero engine turbine blades, it can be achieved that boat
Transient temperature measuring under empty engine turbine blade adverse circumstances.
Realizing the technical solution of the object of the invention is: a kind of film temperature sensor, including is arranged in aero-engine whirlpool
Sequentially connected transition zone, thermally grown layer, insulating layer and thermocouple layer on impeller blade, thermocouple layer is by the first thermocouple and the second heat
Galvanic couple is formed by overlapping using head-head, and overlap constitutes hot junction, that is, measurement end, and extraction wire uses and the first thermoelectricity
The second thermocouple of even summation distinguishes the filament of homogeneity, passes through the high-temperature electric conduction glue tail portion with the first thermocouple and the second thermocouple respectively
Connection.
Further, transition zone is NiCrAlY alloy film layer, heavy using magnetic control multi sphere ion with NiCrAlY alloy target material
Product technology is made, thicknesses of layers 10um.
Further, thermally grown layer is the Al by analysing the thick ≈ 50nm that aluminium oxidizing process is formed in transition layer surface2O3Film
Layer.
Further, insulating layer is made of the first insulating layer and second insulating layer, wherein the first insulating layer is using electronics
The Al of beam evaporation method deposition2O3Film layer, with a thickness of 3um, second insulating layer is to be deposited using radio-frequency magnetron sputter method
Al2O3Film layer, with a thickness of 1um, the first insulating layer is connect with thermally grown layer.
Further, Pt90Rh10 material and Pt material is respectively adopted in the first thermocouple and the second thermocouple.
Further, thermocouple layer is prepared using flexible metal mask method.
Further, the diameter of extraction wire is 0.1mm, hot with the first thermocouple and second respectively by high-temperature electric conduction glue
The tail portion of galvanic couple connects, and in the fixed protection of junction spraying high temperature inorganic glue.
Further, protective layer is arranged in thermocouple layer outer surface, and protective layer is made of the first protective layer and the second protective layer,
Wherein, the first protective layer is the Al deposited using electron beam evaporation method2O3Film layer, with a thickness of 3um, the second protective layer is to adopt
The Al deposited with radio-frequency magnetron sputter method2O3Film layer, with a thickness of 1um, the first protective layer is connect with thermocouple layer.
The preparation method of above-mentioned film temperature sensor, step include:
1) clean turbo blade matrix preparation: turbo blade matrix curved surface to be measured being ground, is polished, and spend from
Sub- water ultrasonic cleaning, puts it into vacuum chamber and vacuumizes, and is filled with the argon gas of purity 99.99%, and application -1500V bias carries out
Icon bombardment cleaning, time 30min；
2) multi-arc ion coating membrane technology is used, uses ingredient for Ni62Co6Cr18Al13Y1wt.% target, in clean turbine leaf
Sheet matrix surface deposits transition zone NiCrAlY alloy film layer；
3) at 1000 DEG C, 8*10-4Under the vacuum high-temperature environment of Pa vacuum degree, make the aluminium element in NiCrAlY film layer on surface
Be precipitated, then be passed through at the same temperature purity 99.999% oxygen make surface be precipitated aluminium element be oxidized, thus formed one layer
Fine and close thermally grown layer Al2O3Film layer；
4) Al of 1~3mm partial size is used2O3Particle is steamed as heating source using electron beam as evaporation source material, e type electron gun
Hair technology, in the first insulating layer Al of thermally grown layer surface deposition 3um thickness2O3Film layer；
5) radiofrequency magnetron sputtering technology is used, prepares the Al of the preferable 1um thickness of one layer of compactness again on the first insulating layer2O3It is thin
Film layer improves the flatness of the first surface of insulating layer to fill loose cavity as second insulating layer；
6) after the completion of insulating layer deposition, in annealing furnace, the annealing of 1000 DEG C, 2h is carried out, repairs insulating layer of thin-film growth
The defect generated in the process, and the stress accumulated in thin film growth process is discharged, improve Al2O3The insulation performance and height of insulating layer
Structural strength under warm environment；
7) flexible metal exposure mask is prepared with the molybdenum sheet with a thickness of 200 microns, the blade that exposure mask surrounding is clamped to fixture is different
Shape curved surface；
8) use magnetically controlled DC sputtering technology, respectively using two kinds of materials of Pt90Rh10 and Pt deposit to second insulating layer surface as
First thermocouple and the second thermocouple are realized with mask graphically, in the head lap-joint of the first thermocouple and the second thermocouple
Form hot junction；
9) after the completion of thermoelectricity double-layer deposition, in vacuum drying oven, the annealing of 1000 DEG C, 30min is carried out, it is thin to eliminate thermoelectricity double-layer
The intrinsic stress generated in film growth course；
10) remove mask, in the tail portion of the first thermocouple and the second thermocouple, respectively with the first thermocouple and the second thermocouple
It is separately connected by the identical filament of material as thermocouple wire, with high-temperature electric conduction glue with the first thermocouple and the second thermocouple, and
The fixed protection of spraying high temperature inorganic glue in junction；
11) electron beam evaporation technique is used, with the Al of 1~3mm partial size2O3As evaporation source material, e type electron gun is used as to be added particle
Heat source, in the Al of thermocouple layer surface deposition 3um thickness2O3Film layer is as the first protective layer；
12) radiofrequency magnetron sputtering technology is used, prepares the Al of a layer thickness 1um densification again on the first protective layer2O3Film layer
Improve the antioxygenic property of the first protective layer to fill loose cavity as the second protective layer；
13) after the completion of protective layer deposition, in annealing furnace, the annealing of 1000 DEG C, 4h, the growth of restoration and protection layer film are carried out
The defect generated in the process, and the stress accumulated in release guard layer film growth course；
14) blade surface with spray gun thermal spraying aluminum oxide coating layer makes blade surface at this at turbo blade blade root upper recess
Insulation, lead-out wire is fixed on alumina insulating coating, again the spray aluminum oxide insulating coating by the way of thermal spraying, most
Lead landfill is drawn among the aluminum oxide coating layer of insulation from blade root side at last.
Further, in step 2, multi-arc ion plating film technological parameter are as follows: target current 80A, target voltage -21V sputter gas
Press 2Pa, substrate bias -100V, 200 DEG C of substrate temperature.
Further, in step 8), the sputtering parameter of thermocouple layer is prepared using magnetically controlled DC sputtering technology are as follows: air pressure
1.2Pa, 150 W of power, 200 DEG C of substrate temperature.
Further, in step 8), the first thermocouple (Pt90Rh10) film thickness 3.5um, the second thermocouple (Pt) film thickness
3um。
Compared with prior art, the present invention is directed to aero-engine high-temperature severe environment, devises the film layer knot of sensor
Structure optimizes the preparation processes such as thin film sputtering, annealing, and using ion deposition technology, plural layers are deposited directly to turbine leaf
Piece surface prepares function, structure-integrated thin film sensor, improves film ply adhesion strength, solve film layer high-temperature insulation,
Fall off, signal draw etc. problems, thin film sensor overall thickness of the present invention be less than 25um, 1100 DEG C of highest measurement temperature.
It should be appreciated that as long as aforementioned concepts and all combinations additionally conceived described in greater detail below are at this
It can be viewed as a part of the subject matter of the disclosure in the case that the design of sample is not conflicting.In addition, required guarantor
All combinations of the theme of shield are considered as a part of the subject matter of the disclosure.
Can be more fully appreciated from the following description in conjunction with attached drawing present invention teach that the foregoing and other aspects, reality
Apply example and feature.The features and/or benefits of other additional aspects such as illustrative embodiments of the invention will be below
Description in it is obvious, or learnt in practice by the specific embodiment instructed according to the present invention.
Detailed description of the invention
Attached drawing is not intended to drawn to scale.In the accompanying drawings, identical or nearly identical group each of is shown in each figure
It can be indicated by the same numeral at part.For clarity, in each figure, not each component part is labeled.
Now, example will be passed through and the embodiments of various aspects of the invention is described in reference to the drawings, in which:
Fig. 1 is the structural schematic diagram of film temperature sensor of the present invention.
Fig. 2 is the structural schematic diagram of the stratified film of film temperature sensor of the present invention.
Fig. 3 is film temperature sensor overall schematic.
Fig. 4 is the patterned mask fixture of film temperature sensor thermocouple layer.
In figure, 1- turbo blade matrix, 2- stratified film, 201- transition zone, the thermally grown layer of 202-, 203- insulating layer,
204- thermocouple layer, 205- protective layer, 3- lead-out wire, 4- draw line connection point, 5- alumina insulating coating.
Specific embodiment
In order to better understand the technical content of the present invention, special to lift specific embodiment and institute's accompanying drawings is cooperated to be described as follows.
Film temperature sensor uses ion sputtering and pattern technology, directly makes function, knot in turbine blade surface
The integrated film thermocouple of structure is a kind of advanced temperature measurement technology.Thin film sensor thin, thermal capacity with structure size
The small, response time influences the advantages that small fastly and on test environment, and does not need special processing and fixed side sensor method, no
Test structure can be destroyed, it is small on the influence of test article physical property, have pressure-resistant, heat-resisting, heat shock resistance and antistripping etc. excellent
Performance.
In conjunction with Fig. 1-2, sensor of the present invention includes stratified film 2, draws line connection point 4 and lead-out wire 3.It is described
Stratified film 2 include transition zone 201, thermally grown layer 202, insulating layer 203, thermocouple layer 204 and protective layer 205, pass through figure
Change mask process and is deposited directly to tested high-temperature component i.e. 1 surface of turbo blade matrix.Thermocouple layer 204 is by two kinds of thin film thermoelectric poles
Conductor overlaps to form hot junction-i.e. measurement end.Lead-out wire 3 using and 204 homogeneity of thermocouple layer filament, using high-temperature electric conduction glue with
Thermocouple layer 204 couples, and spraying high temperature inorganic glue fixes, insulate, and prevents thermal current impact from falling off.
Since blade base material is high temperature alloy with good conductivity, if directly film thermocouple (thermocouple layer) is deposited
In blade base surface, film thermocouple output thermoelectrical potential will affect.It needs to deposit between blade base and film thermocouple
One layer of insulating materials avoids the mutual conduction between blade base and film thermocouple as insulating layer.Insulating layer is film heat
The film of high-temperature insulation between galvanic couple and blade base material, is able to maintain higher insulating properties and adhesion under high temperature environment.
By the performance evaluation to high temperature insulating material, silica, four kinds of silicon nitride, zirconium oxide and aluminium oxide insulating materials are chosen,
It is coated on the blade base of NiCrAlY alloy-layer, cvd silicon oxide, silicon nitride, zirconium oxide and alumina insulation film layer, carries out high
Temperature examination, determines Al2O3For insulating film layer material.After determining insulating layer material, the Study on Preparation of insulating layer is carried out, is obtained
Obtain fine and close insulating layer.
Because there is biggish mismatch, film thermocouple work for the thermal expansion coefficient between blade base and insulating layer
Easily there is phenomena such as cracking, falling off when high temperature and pressure adverse circumstances, influences the reliability of film thermocouple.It needs in blade base
Bottom surface first deposits one layer of transition zone, enhances the adhesion property between blade base and insulating layer.Select engine blade thermal boundary
The more mature NiCrAlY multicomponent alloy of coatings art adjusts alloys target according to the structure of turbo blade, ingredient as transition zone
The ingredient of material carries out sputtering technology, annealing process research, determines the ingredient and preparation process of NiCrAlY.NiCrAlY alloy mistake
It is close to cross layer component, structure and turbo blade material, film layer and matrix are tightly combined, securely.NiCrAlY alloy shape at high temperature
At the protective oxide film of a variety of densifications, significantly improve basis material antioxygenic property.NiCrAlY alloy film layer is again simultaneously
Diffusion barrier layer effectively prevents the thermal diffusion of each element between matrix and sensor film layer, prevents the thermal diffusion of element from causing film
Layer failure, can be under 1200 DEG C of hot environments, long-term stable operation.Transition zone is more using magnetic control with NiCrAlY alloy target material
Arc ion deposition technology is made, thicknesses of layers 10um.
NiCrAlY alloy transition layer component, structure and turbo blade material are close, and film layer and matrix are tightly combined, securely.
NiCrAlY alloy forms the protective oxide film of a variety of densifications at high temperature, significantly improves basis material antioxygenic property.Together
When NiCrAlY alloy film layer be diffusion barrier layer again, effectively prevent the thermal diffusion of each element between matrix and sensor film layer, prevent
Only the thermal diffusion of element causes film layer to fail, can be under 1200 DEG C of hot environments, long-term stable operation.
By being heat-treated to NiCrAlY transition zone, Al is obtained2O3Thermally grown layer, Al2O3Thermally grown layer and NiCrAlY
Transition zone is combined as a whole.Al2O3Thermally grown layer and Al2O3Insulating layer material is identical, and thermal expansion coefficient is identical, in thermally grown layer
Upper depositing insulating layer, is firmly combined.It is formed between blade base and insulating layer by Superalloy Substrate, nickel-base alloy
NiCrAlY transition zone, Al2O3Thermally grown layer, Al2O3Insulating layer gradually by the gradient function structure of transition, release because nickel-base alloy with
Coefficient of thermal expansion mismatch between insulating layer and the thermal stress generated, enhanced film thermocouple film layer adhesive strength improve film heat
Galvanic couple operating temperature and reliability.
According to all kinds of thermocouple types and thermoelectricity feature curve analysis, S type thermocouple is a kind of most widely used noble metal
Thermocouple, can be for a long time under high temperature environment using good thermoelectricity capability be still able to maintain, and stability, precision are high.Its anode
Nominal chemical component are as follows: Pt:Rh=90:10, the nominal chemical component of cathode are Pt.Due to film dimensions effect and Composition demixing,
Film conductivity and resistivity change, and cause the variation of film thermocouple pyroelecthc properties, finally influence film thermocouple
Seebeck coefficient.Different sputtering parameters, annealing process need to be carried out to the shadow of Pt10Rh/Pt film resiativity and thermoelectricity capability
It rings, analyzes influence of the sensitive layer film thickness to hot thermocouple electrical property and working life, it is determined that sensitive layer film preparation work
Skill and film thickness improve stability and reliability that film thermocouple works in complicated hot environment.
The single crystal blade main component that film thermocouple need to be prepared is that there are also a small amount of Cr, W, Mo, Ta etc., needles by Ni, Co, Al
To the component of Ni-base Alloy Blades, transition zone adds Co element in right amount, and the characteristics of according to multi sphere ion plating technology, adjustment
NiCrAlY target material composition is Ni62Co6Cr18Al13Y1wt.%.
Using magnetic control multi-arc ion coating, different air pressures, power, substrate temperature are adjusted, makes 10um on blade base surface
The NiCrAlY alloy film layer of left and right carries out the high-temperature process of 1100 DEG C, 300min in atmospheric environment, so to alloy film layer sample
Sample film layer is made point afterwards and Analysis of Surface Topography.Determine that target current 80A, target voltage -21V, sputtering pressure 2Pa, matrix are inclined
Pressure -100V, under the conditions of 200 DEG C of substrate temperature, film surface is smooth, compact structure, and membranous layer ingredient segregation is smaller.
Thermally grown layer is by " analysis aluminium oxidizing process ", in the thickness about 50nm Al that transition layer surface is formed2O3Film layer.It makes
Method is as follows:
After NiCrAlY transition zone completes, in vacuum drying oven under 1000 DEG C of vacuum environments, NiCrAlY film is carried out
The analysis aluminium of 300min is handled, and high purity oxygen gas is then continuously filled under 1000 DEG C of environment and carries out oxidation processes, time about 30min,
NiCrAlY film surface forms alumina layer, that is, thermally grown layer.
Insulating layer is that two kinds of depositing operations of electron beam evaporation and rf magnetron sputtering are made.In NiCrAlY transition zone
Surface forms Al2O3After thermally grown layer, on this thermally grown layer, using electron beam evaporation, (preparation efficiency is high, but film surface phase
To coarse), deposit 3um Al2O3Film layer, in this film layer, using rf magnetron sputtering sputtering, (preparation efficiency is low, but film layer causes
It is close), deposit the Al of the preferable 1um thickness of one layer of compactness2O3Film fills loose cavity, improves the relative coarseness of electron beam deposition
Film surface property.
The present invention is formed between matrix and insulating layer gradually transits to NiCrAlY conjunction by aluminum oxide film layer (thermally grown layer)
The gradient function structure of golden membranous layer (transition zone), discharge because between nickel-base alloy and insulating layer coefficient of thermal expansion mismatch due to generate
Thermal stress reaches and improves film thermocouple structural strength, extends film thermocouple high temperature service life and improve film thermocouple work
The purpose of temperature.
Such as Fig. 3,204 liang of thermode of thermocouple layer (i.e. the first thermocouple and the second thermocouple) are respectively adopted with lead-out wire 3
Pt90Rh10 and Pt material carries out thermocouple tomographic image, 204 hot end of thermocouple layer (lapping ends end) with flexible metal masking method
In the middle part of blade blade, draws line connection point 4 and be arranged at blade root upper recess.
Using magnetron sputtering technique, different sputtering pressures, power, substrate temperature are adjusted, is coated with 1um thermocouple layer film sample
Product carry out resistivity measurement to different film samples, and taking the smallest sputtering parameter of resistivity is best sputtering parameter, determines thermocouple
The sputtering parameter of layer are as follows: air pressure 1.2Pa, 150 W of power, 200 DEG C of substrate temperature.
It is analyzed from film binding force, thicknesses of layers is thinner, and adhesive force is stronger.And small, the film resistor of film thickness event
Rate increases, and output thermoelectrical potential reduces.The Rh in Pt90Rh10 has certain oxidation at high temperature simultaneously, and film layer gradually fails,
Cause thermoelectrical potential unstable.Pt90Rh10 the and Pt thermocouple layer film sample for having manufactured experimently 4um, 3.5um, 3um and 2.5um thickness, big
Compression ring border carries out 1100 DEG C, 300min, 1200 DEG C to different samples respectively, the hot test of 180min, before test sample test
Change in resistance and test rear surface pattern, film thickness 3.5um Pt90Rh10 and 3um Pt sample surfaces afterwards is not opened
Phenomena such as splitting, warp or falling off, and resistivity is relatively stable, 2.1 × 10-5Ω cm or so.
In film deposition process, the film of preparation haves the defects that certain, need to eliminate film by the way of annealing
The defects of.Carry out atmosphere and vacuum environment and 800 DEG C respectively to Pt90Rh10 and Pt film sample, 1000 DEG C of differences are moved back
The annealing test of fiery time detects the resistivity and thermoelectrical potential variation of different annealing time samples, shows in vacuum environment, 1000
DEG C, in the case of 30min, Pt90Rh10 film resiativity drops to 2.5 × 10-5Ω cm, Pt film resiativity drops to 1.6 ×
10-5Ω•cm；Above-mentioned test, discovery film thermocouple output thermoelectrical potential (plug are carried out to Pt90Rh10 and Pt film thermocouple sample
Seebeck coefficient) from 7.5 μ V/ DEG C it is increased to 8.2 μ V/ DEG C.
Linear diameter 0.1mm is drawn, is coupled with high-temperature electric conduction glue, and spraying high temperature inorganic glue insulate, is fixed, from blade root side
It draws.
Film temperature sensor preparation step of the present invention includes:
1) 1 curved surface of turbo blade matrix that need to prepare film ground, polished, and be cleaned by ultrasonic with deionized water.
Turbo blade matrix 1 is put into vacuum chamber and does not have rotational workpieces frame, after reaching vacuum degree, is filled with the argon of purity 99.99%
Gas, workpiece application -1500V bias carry out icon bombardment cleaning, time 30min；
2) multi-arc ion coating membrane technology is used, target material composition Ni62Co6Cr18Al13Y1wt.% controls sputtering function by adjusting
The technological parameters such as rate, sputtering pressure, substrate bias and substrate temperature deposit compact structure, table on 1 surface of turbo blade matrix
The smooth NiCrAlY film in face is as transition zone 201.Nickel be the material main component, therefore with nickel base superalloy (blade base
Body) there is similar thermal expansion coefficient and good adhesion property；
3) at 1000 DEG C, 8*10-4Under the vacuum high-temperature environment of Pa vacuum degree, analyse the aluminium element in NiCrAlY film on surface
Out, then at the same temperature the aluminium element that surface is precipitated in the oxygen for being passed through purity 99.999% is oxidized, to form one layer of cause
Close thermally grown Al2O3Film layer is as thermally grown layer 202；
4) Al of 1~3mm partial size is used2O3Particle is as evaporation source material, and e type electron gun is as heating source, using efficiently quickly
Electron beam evaporation technique, thermally grown 202 surface of layer deposition about 3um thickness Al2O3Film is as the first insulating layer；
5) radiofrequency magnetron sputtering technology is used, prepares the Al of the preferable 1um thickness of one layer of compactness again on the first insulating layer2O3It is thin
Film fills loose cavity, improves the flatness of the first surface of insulating layer；
6) insulating layer 203 is Al2O3After the completion of film deposition, in annealing furnace, the annealing of 1000 DEG C, 2h is carried out, is repaired
The defect generated in thin film growth process, and the stress accumulated in thin film growth process is discharged, improve Al2O3Thin dielectric film
Bond strength under insulation performance and hot environment；
7) flexible metal exposure mask being prepared with a thickness of 200 microns of molybdenum sheet, exposure mask surrounding is clamped to blade surface with fixture,
Such as Fig. 4；
8) magnetically controlled DC sputtering technology is used, using two kinds of materials of Pt90Rh10 and Pt as the first thermocouple material and second
Thermocouple material deposits to second insulating layer surface and forms thermocouple layer 204, is realized with mask graphically, in the connection of two kinds of materials
Place forms hot junction；
9) after the completion of thermocouple layer 204 deposits, in vacuum drying oven, the annealing of 1000 DEG C, 30min is carried out, eliminates film growth
The intrinsic stress generated in the process；
10) mask is removed, in 204 liang of thermode of the thermocouple layer i.e. tail end of the first thermocouple and the second thermocouple, respectively with
One thermocouple and the identical thermocouple wire of the second thermocouple material, with high-temperature electric conduction glue respectively with the first thermocouple and the second thermocouple
Connection, the fixed protection of spraying high temperature inorganic glue in junction；
11) electron beam evaporation technique, the Al of 1~3mm partial size are used2O3As evaporation source material, e type electron gun is used as to be added particle
Heat source, in the Al of the surface of thermocouple layer 204 deposition about 3um thickness2O3Film is as the first protective layer；
12) radiofrequency magnetron sputtering technology is used, prepares the Al of a layer thickness 1um densification again on the first protective layer2O3Film conduct
Second protective layer fills loose cavity, improves the antioxygenic property of the first protective layer；
13) Al2O3After the completion of film, that is, protective layer 205 deposits, in annealing furnace, the annealing of 1000 DEG C, 4h is carried out, is repaired
The defect generated in thin film growth process, and discharge the stress accumulated in thin film growth process.
14) surface with spray gun thermal spraying aluminum oxide coating layer makes table at this at 1 blade root upper recess of turbo blade matrix
Face insulation.Lead-out wire 3 is fixed on aluminum oxide coating layer, the spray aluminum oxide coating by the way of thermal spraying, formation are drawn again
The alumina insulating coating 5 of outlet and blade base, finally by the landfill of lead-out wire 3 among alumina insulating coating 5, from blade root
It draws side.
15) above-mentioned technique is used, prepares film thermocouple in turbine blade surface, thermocouple is tested for the property.To survey
Test result carries out least square method fitting, and the Seebeck coefficient of film thermocouple is S=8.26uV/ DEG C.
16) film thermocouple is heated up to 1100 DEG C from room temperature, keeps the temperature 5h, then cools to room temperature with the furnace, then heat again,
4 circulations are carried out altogether, amount to 20h.Film thermocouple is tested again, the Seebeck coefficient of film thermocouple be S=
8.12uV/ DEG C.Though temperature coefficient is slightly degenerated, thermoelectrical potential output is stablized, and linear preservers are good.
17) on turbine blade cooling effect test device, turbo blade matrix 1 carries out cold effect with other turbo blades
It tests, under identical test state, thermo-electromotive force caused by standard couple is compared with film thermocouple, detection film heat
The thermo-electromotive force of galvanic couple examines actual application environment film thermocouple function with the situation of change of blade surface measuring point temperature.
Test parameters: combustion gas average total pressure 0.6MPa before grid, combustion gas is averaged total temperature 1073K, cold air flow 100g/ before grid
s。
Cold air flow is adjusted, control intermediate blade flow-rate ratio is 5.53%；Controlling remaining four blade total flow ratio is 15%,
Data are adopted after in stable condition 15 minutes.Test period is 3 hours total.
Using Fixed Time Interval, close positions measuring point standard couple and film thermocouple generate thermo-electromotive force into
Row compares.At the same state, the thermo-electromotive force that standard couple generates is higher than film thermocouple, this and film thermocouple
Temperature coefficient is consistent lower than standard couple, and the followability of the test data of two kinds of thermocouples is preferable, and trend is consistent.Thin film thermoelectric
It is even to stablize output thermoelectrical potential under cold effect experimental enviroment, reach the function of temperature measurement, as a result as shown in the table.
Standard hot even summation film thermocouple thermo-electromotive force test data
。
Although the present invention has been disclosed as a preferred embodiment, however, it is not to limit the invention.Skill belonging to the present invention
Has usually intellectual in art field, without departing from the spirit and scope of the present invention, when can be used for a variety of modifications and variations.Cause
This, the scope of protection of the present invention is defined by those of the claims.
Claims (10)
1. a kind of film temperature sensor, which is characterized in that including sequentially connected transition zone, thermally grown layer, insulating layer and heat
Double-layer, thermocouple layer are formed by overlapping by the first thermocouple and the second thermocouple by one end, and overlap constitutes hot junction and is
Measurement end, extraction wire use the filament with the first thermocouple and the second thermocouple difference homogeneity, are distinguished by high-temperature electric conduction glue
It is connect with the first thermocouple and second thermocouple the other end.
2. a kind of film temperature sensor for aero engine turbine blades, which is characterized in that including sequentially connected mistake
Layer, thermally grown layer, insulating layer and thermocouple layer are crossed, thermocouple layer is overlapped by the first thermocouple and the second thermocouple by one end
At overlap constitutes hot junction, that is, measurement end, and extraction wire, which is used, distinguishes homogeneity with the first thermocouple and the second thermocouple
Filament, connect respectively with the first thermocouple and second thermocouple the other end by high-temperature electric conduction glue.
3. film temperature sensor as claimed in claim 1 or 2, which is characterized in that transition zone is that the NiCrAlY of cobalt doped is closed
Golden membranous layer.
4. the film temperature sensor as described in claims 1 or 2 or 3, which is characterized in that transition zone with
Ni62Co6Cr18Al13Y1wt.% alloy is target, is made using magnetic control multi-arc ion deposition technology, thicknesses of layers is
10um。
5. film temperature sensor as claimed in claim 1 or 2, which is characterized in that thermally grown layer is by analysing aluminium oxidizing process
In the Al that the film thickness that transition layer surface is formed is 50 ± 5nm2O3Film layer.
6. such as claim 1 or the film temperature sensor, which is characterized in that insulating layer is exhausted by the first insulating layer and second
Edge layer is constituted, wherein the first insulating layer is the Al deposited using electron beam evaporation method2O3Film layer, with a thickness of 3um, second absolutely
Edge layer is the Al deposited using radio-frequency magnetron sputter method2O3Film layer, with a thickness of 1um, the first insulating layer and thermally grown layer connect
It connects.
7. film temperature sensor as claimed in claim 1 or 2, which is characterized in that the first thermocouple and the second thermocouple point
It Cai Yong not Pt90Rh10 material and Pt material.
8. film temperature sensor as claimed in claim 1 or 2, which is characterized in that the diameter of extraction wire is 0.1mm, is led to
It crosses high temperature conducting resinl to connect with the other end of the first thermocouple and the second thermocouple respectively, and inorganic in junction spraying high temperature
The fixed protection of glue.
9. film temperature sensor as claimed in claim 1 or 2, which is characterized in that protective layer is arranged in thermocouple layer outer surface,
Protective layer is made of the first protective layer and the second protective layer, wherein the first protective layer is to be deposited using electron beam evaporation method
Al2O3Film layer, with a thickness of 3um, the second protective layer is the Al deposited using radio-frequency magnetron sputter method2O3Film layer, thickness
For 1um, the first protective layer is connect with thermocouple layer.
10. the preparation method of film temperature sensor as claimed in claim 1 or 2, which is characterized in that its step includes:
1) multi-arc ion coating membrane technology is used, uses ingredient for Ni62Co6Cr18Al13Y1wt.% target, in clean turbine leaf
Sheet matrix surface deposits transition zone NiCrAlY alloy film layer；
2) at 1000 DEG C, 8*10-4Under the vacuum high-temperature environment of Pa vacuum degree, make the aluminium element in NiCrAlY film layer on surface
Be precipitated, then be passed through at the same temperature purity 99.999% oxygen make surface be precipitated aluminium element be oxidized, thus formed one layer
Thermally grown layer Al2O3Film layer；
3) Al of 1~3mm partial size is used2O3Particle utilizes electron beam evaporation as heating source as evaporation source material, e type electron gun
Technology, in the Al of thermally grown layer surface deposition 3um thickness2O3Film layer is as the first insulating layer；
4) radiofrequency magnetron sputtering technology is used, prepares the Al of one layer of 1um thickness again on the first insulating layer2O3Film layer is as second
Insulating layer；
5) after the completion of insulating layer deposition, in annealing furnace, the annealing of 1000 DEG C, 2h is carried out；
6) flexible metal exposure mask is prepared with the molybdenum sheet with a thickness of 200 microns, the blade that exposure mask surrounding is clamped to fixture is different
Shape curved surface；
7) use magnetically controlled DC sputtering technology, respectively using two kinds of materials of Pt90Rh10 and Pt deposit to second insulating layer surface as
First thermocouple and the second thermocouple are realized graphically, at the lapping ends of the first thermocouple and the second thermocouple with mask
Form hot junction；
8) after the completion of thermoelectricity double-layer deposition, in vacuum drying oven, the annealing of 1000 DEG C, 30min is carried out；
9) mask is removed, in the other end of the first thermocouple and the second thermocouple, respectively with hot with the first thermocouple and second
The identical filament of galvanic couple material connects it with the first thermocouple and the second thermocouple as thermocouple wire, with high-temperature electric conduction glue respectively
It connects, and in the fixed protection of junction spraying high temperature inorganic glue；
10) electron beam evaporation technique is used, with the Al of 1~3mm partial size2O3As evaporation source material, e type electron gun is used as to be added particle
Heat source, in the Al of thermocouple layer surface deposition 3um thickness2O3Film layer is as the first protective layer；
11) radiofrequency magnetron sputtering technology is used, prepares the Al of a layer thickness 1um again on the first protective layer2O3Film layer is as
Two protective layers；
12) after the completion of protective layer deposition, in annealing furnace, the annealing of 1000 DEG C, 4h is carried out；
13) blade surface with spray gun thermal spraying aluminum oxide coating layer makes blade surface at this at turbo blade blade root upper recess
Insulation, lead-out wire is fixed on alumina insulating coating, again the spray aluminum oxide insulating coating by the way of thermal spraying, most
Lead landfill is drawn among the aluminum oxide coating layer of insulation from blade root side at last.
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