CN109323761A - A kind of laser power on-line monitoring method and apparatus - Google Patents
A kind of laser power on-line monitoring method and apparatus Download PDFInfo
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- CN109323761A CN109323761A CN201811289730.2A CN201811289730A CN109323761A CN 109323761 A CN109323761 A CN 109323761A CN 201811289730 A CN201811289730 A CN 201811289730A CN 109323761 A CN109323761 A CN 109323761A
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- 238000000034 method Methods 0.000 title claims abstract description 37
- 238000012544 monitoring process Methods 0.000 title claims abstract description 19
- 238000012545 processing Methods 0.000 claims abstract description 42
- 238000005070 sampling Methods 0.000 claims description 20
- 230000003287 optical effect Effects 0.000 claims description 14
- 238000001514 detection method Methods 0.000 claims description 11
- 230000008569 process Effects 0.000 claims description 9
- 238000012806 monitoring device Methods 0.000 claims description 5
- 238000012360 testing method Methods 0.000 claims description 4
- 238000005259 measurement Methods 0.000 description 6
- 239000000523 sample Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 241000209140 Triticum Species 0.000 description 1
- 235000021307 Triticum Nutrition 0.000 description 1
- 208000027418 Wounds and injury Diseases 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 235000013312 flour Nutrition 0.000 description 1
- 208000014674 injury Diseases 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000003902 lesion Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
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- Spectroscopy & Molecular Physics (AREA)
- Laser Beam Processing (AREA)
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Abstract
In order to solve the stability problem of laser power in laser processing procedure, the present invention provides a kind of laser powers, and method and apparatus are monitored online.For laser power on-line monitoring method comprising steps of 1) establishing comparison data library, which includes different accurate to dimension and the corresponding laser power range close to laser processing endface of each accurate to dimension；2) part light energy is separated from close to laser processing endface；3) laser power of the separated light energy of real-time monitoring step 2)；4) real-time judge: according to the accurate to dimension currently required, corresponding laser power range is searched in comparison data library in step 1), if the laser power that step 3) measures is not being searched within the scope of resulting laser power, enter step 5)；It is searched within the scope of resulting laser power if the laser power that step 3) measures is fallen in, continues to be laser machined by present laser power；5) laser power, return step 3 are adjusted).
Description
Technical field
The invention belongs to technical field of laser processing, are related to a kind of laser power on-line monitoring method and apparatus.
Background technique
Laser processing can be widely applied to the fine meter wheat flour in the fields such as China's aerospace, automobile, photoelectron, mold
It makes, cut, welding, drilling, integrality head-stamp etc., in laser processing procedure, if laser power is unstable, it will cause
The dimensional accuracy of laser manufacture reduces, and therefore, it is the core of urgent need to resolve that laser power stability how is made in laser processing procedure
One of heart problem.
For the stability problem for solving laser power, technical staff mostly uses online power measurement technology to laser function at present
Rate is monitored.There are mainly three types of common online power measurement technologies: the first is the installation sensor at laser exit,
The method can only realize the real-time monitoring of the laser power at laser exit.Second is to carry out spectroscopic measurements, i.e., by laser
It is divided into two-way, is supplied to laser equipment all the way for normally laser machining, another way is used for power monitoring.The third is to utilize
Movement mechanism carries power meter probe and directly detects to power.
However, above-mentioned three kinds online power measurement methods can only realize the on-line monitoring of power, power can not achieve
Feedback and correction.Technical staff also once attempted to increase closed loop adjusting control on the basis of above-mentioned three kinds online power measurement methods
System carries out realtime power adjusting, not can effectively solve laser stability problem not only, causes instead to laser pumping source forever
Long property injury.
Summary of the invention
In order to solve the stability problem of laser power in laser processing procedure, the present invention provides a kind of laser powers to exist
Line monitoring method and device.
The technical scheme is that
A kind of laser power on-line monitoring method, is characterized in that, comprising steps of
1) comparison data library is established, the comparison data library includes different accurate to dimension and each accurate to dimension
The corresponding laser power range close to laser processing endface, method particularly includes:
It determines and shadow is generated to the accurate to dimension by engineer testing according to the accurate to dimension of workpiece to be machined
The upper and lower bound of loud laser power fluctuation value, so that it is determined that laser power range corresponding to the accurate to dimension；
2) from the converging lenses front end of laser process equipment, i.e., part light energy is separated close to laser processing endface；
3) laser power of the separated light energy of real-time monitoring step 2)；
4) real-time judge:
According to the accurate to dimension currently required, corresponding laser power is searched in the comparison data library in step 1)
5) range enters step if the laser power that step 3) measures is not being searched within the scope of resulting laser power；If step 3)
The laser power measured, which is fallen in, searches within the scope of resulting laser power, then continues to be laser machined by present laser power；
5) laser power, return step 3 are adjusted).
It further, is the light energy separated from laser processing endface less than or equal to 5% in step 2).
Further, step 3) is realized using power meter.
Further, while carrying out step 5) or between step 4) and step 5), to laser processing equipment
Control system sends alarm signal.
Further, the laser in step 5) is femtosecond or picosecond laser.
Invention also provides a kind of laser powers for realizing any of the above-described laser power on-line monitoring method to supervise online
Device is controlled, is characterized in that, comprising:
Comparison data library is stored with different accurate to dimension and the corresponding laser power model of each accurate to dimension
It encloses；
Optical spectroscopic sampling mirror, is arranged between the beam expanding lens of laser process equipment and converging lenses, is used for from processing laser
Middle sampling section light energy；
Power detection unit is arranged in wherein all the way on output light path of light splitting sampling mirror, takes for detecting optical spectroscopic
The laser power of the sampled light energy of sample mirror, and the laser power measured is sent to signal processing unit；
Signal processing unit, laser power for measuring power detection unit and corresponding laser in comparison data library
Power bracket is compared, if issuing adjustment signal to laser control unit beyond within the scope of laser power；
Laser control unit, for adjusting the output power of laser according to the adjustment signal.
Further, the sampling rate of the optical spectroscopic sampling mirror is less than or equal to 5%.
Further, power detection unit is less than or equal to 0.3% power meter using precision.
It further, further include the alarm unit being connected with signal processing unit, for being issued according to signal processing unit
Adjustment signal carry out sound and/or light alarm.
Compared with prior art, advantages of the present invention:
1, laser power is frequently adjusted because its price is very expensive for ultrafast laser (femtosecond or picosecond laser)
It will cause the lens lesion in it, therefore the ratio that the present invention is established by the laser power of real-time measurement and in advance by technological experiment
Lookup comparison is carried out to power bracket corresponding in database, it is only necessary to precision be excited fastly optical power influence when to laser into
Row adjustment, on the one hand ensure that the stability of laser power, guarantee to be processed picture size precision, while will not injure
Laser.
2, the present invention considers that the emergent power of laser will receive the suction of optical element in optic path systematic procedure
Receipts, scattering etc. will cause the reduction of power, thus measure to power of the laser processing equipment light path system at terminal,
Actual power value in the performance number energy actual response practical laser process of measurement, to improve laser monitor precision.
3, the light energy less than or equal to 5% is separated in laser processing endface carry out laser power monitor, it is hardly right
Normal laser processing impacts.
4, power detection unit is less than or equal to 0.3% power meter using precision, can guarantee power real-time monitoring precision
≤ 0.5%.
5, using alarm unit, while regulation power or before reconciling power, technical staff can be prompted.
Detailed description of the invention
Fig. 1 is flow chart of the method for the present invention；
Fig. 2 is the signal of the device of the invention principle and the relative positional relationship schematic diagram with device in laser process equipment
(a part that converging lenses, beam expanding lens, laser are laser process equipment).
Marked in the figure: R is sampling light energy accounting (i.e. sampling rate), T is that main optical path processes laser energy accounting.
Specific embodiment
It elaborates below in conjunction with attached drawing to the present invention.
As shown in Figure 1, method is monitored online in laser power provided by the present invention, it is suitable for all lasers, it is especially suitable
For femtosecond or picosecond pulse laser；Method includes the following steps:
Step 1. establishes comparison data library, and the comparison data library includes different accurate to dimension and each processing dimension
The corresponding laser power range of precision, specific method are to select an accurate to dimension, and by engineer testing, determination adds this
The upper and lower bound for the close laser processing endface laser power fluctuation value that work dimensional accuracy has an impact, so that it is determined that should add
Laser power range corresponding to work dimensional accuracy.
Step 2. separates part light energy from laser processing endface；Preferably separate the light energy less than or equal to 5%.
The laser power of the separated light energy of step 3. real-time monitoring step 2, specific available power meter realize laser function
Rate measurement；
Step 4. real-time judge:
According to the accurate to dimension currently required, corresponding laser power is searched in comparison data library in step 1
Range enters step 5 if the laser power that step 3 measures is not being searched within the scope of resulting laser power；
Step 5. adjusts laser power, return step 3 by adjusting the pumping current of laser.
As shown in Fig. 2, the laser power on-line monitoring device provided by the invention for realizing the above method, including optical spectroscopic
Sampling mirror, power detection unit, signal processing unit and laser control unit；
Beam expanding lens and the convergence of laser process equipment is arranged in optical spectroscopic sampling mirror (such as SeZn sampling mirror can be used)
(i.e. close to laser processing endface) between mirror, for the sampling section light energy from processing laser；In order to not influence main optical path
The light energy of laser is processed, the sampling rate R of optical spectroscopic sampling mirror is less than or equal to 5%.
Wherein all the way on output light path of light splitting sampling mirror is arranged in power detection unit, for detecting optical spectroscopic sampling
The laser power of the sampled light energy of mirror, and the laser power measured is sent to signal processing unit；
Signal processing unit is connect simultaneously with power detection unit and laser control unit, is used for power detection unit
The laser power measured is compared with laser power range corresponding in comparison data library, if beyond within the scope of laser power,
Then adjustment signal is issued to laser control unit；
Laser control unit is connected with laser, for adjusting the output power of laser according to the adjustment signal.
Alarm unit, the alarm unit being connected with signal processing unit, the adjusting for being issued according to signal processing unit
Signal carry out sound and/or light alarm.
Concrete application example:
After monitoring device of the invention is matched with laser processing equipment, constitute coaxially in splicing manufacturing device, comprising:
Femto-second laser (pulsewidth 290fs), operation wavelength: 1030nm, light inlet diameter: 25mm, converging lenses f=45mm；
Specific on-line monitoring process:
1) it is required according to the accurate to dimension of workpiece to be machined, processing dimension is had an impact by engineer testing determination
The upper and lower of power swing value be limited to 13 ± 1W；
2) using laser working light path light splitting by the way of, using high-precision power meter to from laser processing endface sample
Light energy power carries out real-time monitoring；
3) it real-time judge: once the currently monitored power swing is more than its corresponding bound (12-14W), can alarm
And send a signal to laser control unit；
4) laser power is adjusted by laser control unit, step 3) is again introduced into after adjusting.
Claims (9)
1. method is monitored online in a kind of laser power, which is characterized in that comprising steps of
1) comparison data library is established, the comparison data library includes that different accurate to dimension and each accurate to dimension are corresponding
Close laser processing endface laser power range, method particularly includes:
According to the accurate to dimension of workpiece to be machined, the accurate to dimension is had an impact by engineer testing, determination
The upper and lower bound of laser power fluctuation value, so that it is determined that laser power range corresponding to the accurate to dimension；
2) from the converging lenses front end of laser process equipment, i.e., part light energy is separated close to laser processing endface；
3) laser power of the separated light energy of real-time monitoring step 2)；
4) real-time judge:
According to the accurate to dimension currently required, corresponding laser power model is searched in the comparison data library in step 1)
It encloses, if the laser power that step 3) measures is not being searched within the scope of resulting laser power, enters step 5)；If step 3) is surveyed
The laser power obtained, which is fallen in, searches within the scope of resulting laser power, then continues to be laser machined by present laser power；
5) laser power, return step 3 are adjusted).
2. method is monitored online in laser power according to claim 1, it is characterised in that: be from laser processing in step 2)
Endface separates the light energy less than or equal to 5%.
3. method is monitored online in laser power according to claim 1, it is characterised in that: step 3) is real using power meter
Existing.
4. method is monitored online in laser power according to claim 1 to 3, it is characterised in that: carrying out step 5)
Simultaneously or between step 4) and step 5), alarm signal is sent to the control system of laser processing equipment.
5. method is monitored online in laser power according to claim 1 to 3, it is characterised in that: the laser in step 5)
Device is femtosecond or picosecond laser.
6. a kind of laser power on-line monitoring dress for realizing any laser power on-line monitoring method of claim 1-5
It sets characterized by comprising
Comparison data library is stored with different accurate to dimension and the corresponding laser power range of each accurate to dimension；
Optical spectroscopic sampling mirror, is arranged between the beam expanding lens of laser process equipment and converging lenses, for adopting from processing laser
Sample part light energy；
Wherein all the way on output light path of light splitting sampling mirror is arranged in, for detecting optical spectroscopic sampling mirror in power detection unit
The laser power of sampled light energy, and the laser power measured is sent to signal processing unit；
Signal processing unit, laser power for measuring power detection unit and corresponding laser power in comparison data library
Range is compared, if issuing adjustment signal to laser control unit beyond within the scope of laser power；
Laser control unit, for adjusting the output power of laser according to the adjustment signal.
7. laser power on-line monitoring device according to claim 6, it is characterised in that: the optical spectroscopic sampling mirror
Sampling rate is less than or equal to 5%.
8. laser power on-line monitoring device according to claim 6 or 7, it is characterised in that: power detection unit uses
Precision is less than or equal to 0.3% power meter.
9. laser power on-line monitoring device according to claim 8, it is characterised in that: further include and signal processing unit
Connected alarm unit, adjustment signal carry out sound and/or light alarm for being issued according to signal processing unit.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811289730.2A CN109323761B (en) | 2018-10-31 | 2018-10-31 | Laser power online monitoring method and device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811289730.2A CN109323761B (en) | 2018-10-31 | 2018-10-31 | Laser power online monitoring method and device |
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| CN109323761A true CN109323761A (en) | 2019-02-12 |
| CN109323761B CN109323761B (en) | 2020-12-25 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110918423A (en) * | 2019-11-25 | 2020-03-27 | 歌尔股份有限公司 | Online UV illumination energy compensation device and method |
| CN110926607A (en) * | 2019-12-09 | 2020-03-27 | 深圳市杰普特光电股份有限公司 | Laser detection alarm system and control method |
| CN111707359A (en) * | 2020-05-12 | 2020-09-25 | 固高科技(深圳)有限公司 | Laser processing detection system and method |
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| US20110260623A1 (en) * | 2010-04-21 | 2011-10-27 | Mitsubishi Electric Corporation | Laser light source device |
| CN104942430A (en) * | 2014-03-27 | 2015-09-30 | 住友重机械工业株式会社 | Laser processing device and laser processing method |
| CN105598582A (en) * | 2016-02-04 | 2016-05-25 | 广东正业科技股份有限公司 | Laser energy adjustment device and laser micromachining equipment |
| CN108057953A (en) * | 2017-12-13 | 2018-05-22 | 广东正业科技股份有限公司 | A kind of laser-processing system and laser power control method |
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2018
- 2018-10-31 CN CN201811289730.2A patent/CN109323761B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20110260623A1 (en) * | 2010-04-21 | 2011-10-27 | Mitsubishi Electric Corporation | Laser light source device |
| CN104942430A (en) * | 2014-03-27 | 2015-09-30 | 住友重机械工业株式会社 | Laser processing device and laser processing method |
| CN105598582A (en) * | 2016-02-04 | 2016-05-25 | 广东正业科技股份有限公司 | Laser energy adjustment device and laser micromachining equipment |
| CN108057953A (en) * | 2017-12-13 | 2018-05-22 | 广东正业科技股份有限公司 | A kind of laser-processing system and laser power control method |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110918423A (en) * | 2019-11-25 | 2020-03-27 | 歌尔股份有限公司 | Online UV illumination energy compensation device and method |
| CN110926607A (en) * | 2019-12-09 | 2020-03-27 | 深圳市杰普特光电股份有限公司 | Laser detection alarm system and control method |
| CN111707359A (en) * | 2020-05-12 | 2020-09-25 | 固高科技(深圳)有限公司 | Laser processing detection system and method |
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