CN109318061A - A kind of magnetorheological fluid abrasive polishing method of alternating electromagnetic field control - Google Patents
A kind of magnetorheological fluid abrasive polishing method of alternating electromagnetic field control Download PDFInfo
- Publication number
- CN109318061A CN109318061A CN201811271846.3A CN201811271846A CN109318061A CN 109318061 A CN109318061 A CN 109318061A CN 201811271846 A CN201811271846 A CN 201811271846A CN 109318061 A CN109318061 A CN 109318061A
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- China
- Prior art keywords
- magnetic field
- magnetorheological fluid
- grinding
- alternating magnetic
- field control
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
- B24B29/005—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents using brushes
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention discloses a kind of novel magnetorheological fluid abrasive polishing methods based on alternating magnetic field control.Workpiece is placed between two electromagnetic control panels, and two electromagnetic control panels generate alternating magnetic field by alternating current, and the magnetic brush that alternating magnetic field control magnetorheological fluid is formed carries out movement and realizes grinding, and grinding rate and abrasive power size are adjusted by the frequency and voltage swing of power supply.Magnetorheological fluid abrasive polishing method proposed by the present invention by alternating magnetic field control has the prominent advantages that do not have kinematic mechanisms in process of lapping, and grinding rate and abrasive power are easy to adjust.
Description
Technical field
The invention belongs to Precision Machining manufacturing technology fields, and in particular to a kind of to control magnetorheological fluid using alternating electromagnetic field
Two sides milling and polishing method.
Background technique
With the development of chip fabrication techniques and photoelectric technology, the surface grinding of semiconductor crystal wafer and optical glass is polished
It is required that higher and higher.And wafer and glass belong to hard brittle material, traditional abrasive polishing method is difficult to meet its production requirement, magnetic
The grinding of rheology liquid is a kind of effective hard brittle material grinding and polishing processing method.
Magnetorheological fluid grinding is to become class solid under magnetic fields using magnetorheological fluid, and class solid constrains abrasive particle
The grinding to workpiece is completed with workpiece relative motion.
Permanent magnetism grinding head is generally driven by motor in existing magnetorheological fluid burnishing device or the grinding head of DC coil excitation is inhaled
Grinding is completed in attached magnetorheological fluid, opposite piece movement.Two kinds as shown in patent document 200610132495.9, CN107424720A
The Magnetic-Fluid Grinding burnishing device of type.
The deficiency of existing magnetorheological abrasive polishing method and equipment: operation of the grinding rate mainly by grinding head spindle motor
Speed is adjusted, and there are inertia when mechanical transmission structure complexity, equipment high-speed cruising to easily cause vibration noise greatly；It is ground
The fixed controlled abrasive grain locations of magnetic field strength and direction are basically unchanged in journey, as obtained after this part abrasive wear in process of lapping
It will cause grinding efficiency reduction less than timely replacement；Adjust the magnetic field inconvenience etc. of abrasive power adjustment magnetorheological fluid.
Summary of the invention
It is an object of the present invention to be provided a kind of novel for technical problem present in existing magnetorheological grinding method
Magnetorheological fluid abrasive polishing method, for overcoming the several deficiencies mentioned in [0005].The present invention is motivated using alternating source
Magnetic field generates mobile alternating magnetic field, and the magnetic brush for forming magnetic fluid is moved with magnetic field, completes the grinding and polishing to workpiece
Function.Magnetic field strength can be adjusted by supply voltage size, and magnetic field movement speed can be controlled by ac power frequency.The present invention
Realize that grinding method is not necessarily to mechanical motion mechanism, when High-speed machining, does not have mechanical shock, it regulates the speed very convenient with abrasive power,
Deficiency existing for above-mentioned conventional magnetic fluid grinding method can effectively be overcome.
Technical solution
The present invention proposes a kind of method ground by alternating magnetic field control magnetorheological fluid movement.In order to realize alternation magnetic
Field control magnetorheological fluid forms the movement of magnetic brush, and using upper and lower two electromagnetic control panels, control panel is wound with multiple excitation windings；
Workpiece is placed between upper and lower electromagnetic control panel, and magnetorheological fluid is full of among electromagnetic control panel；Upper and lower electromagnetic control panel winding
Magnetic pole is opposite two-by-two；When upper and lower electromagnetic control panel generates magnetic field, upper and lower magnetic pole, which forms high-intensity magnetic field, makes magnetorheological fluid in magnetic linkage
Upper formation magnetic abrasive grain magnetic brush, the intensity of the adjustable abrasive grain magnetic brush of the excitation voltage size of upper and lower magnetic pole；When Electromagnetic Control is coiled
When group alternating current excitation, moving magnetic field is formed between two electromagnetic control panels, the magnetic brush formed between upper and lower control panel
Follow magnetic field to move together to complete to the grinding and polishing of workpiece, change field power supply frequency and the adjustable grinding rate of voltage and
Abrasive power.
The present invention is shown with existing Magnetic-Fluid Grinding method fundamental difference: 1) without motion mechanical mechanism, the fortune of magnetic fluid
It is dynamic to be realized by alternating magnetic field；2) grinding rate and abrasive power are adjusted by the frequency and voltage of field power supply.
Detailed description of the invention
Fig. 1 is magnetorheological fluid grinding and polishing processing method working principle of the present invention；
Fig. 2 is upper and lower Electromagnetic Control coiling group wiring schematic diagram；
In Fig. 1: electromagnetic control panel on 1.；2. lower electromagnetic control panel；The integrated magnetic field that Electromagnetic Control disc electrode is formed on 3.；
4. the integrated magnetic field that lower electromagnetic control panel is formed；5. winding；6. workpiece.
Specific embodiment
The following describes the present invention in detail with reference to the accompanying drawings and specific embodiments.
The present invention is a kind of magnetorheological fluid abrasive polishing method lower based on moving magnetic field effect, basic schematic diagram such as figure
Shown in 1: 1,2 be upper and lower electromagnetic control panel, and centre is full of magnetorheological fluid；3, the 4 magnetic field strength distribution formed for electromagnetic control panel
Schematic diagram；5 be winding；6 be workpiece (for non magnetic permeability magnetic material, such as Si, SiC, glass and ceramic material).Upper and lower electromagnetism
Control panel is formed by stacking by silicon steel sheet, and wire casing is provided on silicon steel sheet, winding 5 is wound in slot, winding is according to linear AC motor
Principle connects each terminal of winding, and A-X, B-Y, tri- winding connections of C-Z are as shown in Figure 2；The winding of upper and lower electromagnetic control panel is mutual
It is independent, by same power supply power supply.After A, B, C terminal access three phase sine alternating current, movement is formed on upper and lower pole plate
Integrated magnetic field, at a time for intensity distribution as shown in curve 3 and 4, lower section is the pole S of magnetic pole；The top of lower electromagnetic control panel
It is the pole N of magnetic pole, the magnetic field among this two control panel of moment is most strong, and the magnetic brush grainding capacity that magnetorheological fluid is formed is most strong；
Upper and lower magnetic field can change mobile according to certain speed with sine power supply simultaneously, and shifting magnetic field drives magnetic brush to move together realization
Grinding function.Magnetic field movement speed is proportional to supply frequency.
The present invention is illustrated its working principle so that electromagnetic control panel forms a pole pair by three windings as an example, practical
Using when can according to workpiece size increase winding quantity, form multiple pole pairs.
In the present invention by taking star-like connection as an example, practical application may be upper and lower electromagnetic control panel winding connection
Triangle connection.
Grinding rate and grinding dynamics can be very easily adjusted by adjusting supply frequency and voltage, overcomes current machine
The shortcomings that tool formula magnetorheological grinding method.
The above is only basic principle of the invention, is not intended to limit the invention, all with the principle of the invention and original
Done within then it is any modify or improve, be all contained within claims of the invention.
Claims (3)
1. a kind of method being polished directly based on alternating magnetic field control magnetorheological fluid, is generated by alternating current control electromagnetic disc
Alternating magnetic field controls Particles Moving in magnetorheological fluid and completes grinding function.
2. alternating magnetic field magnetorheological fluid grinding method according to claim 1, it is wound with winding in electromagnetic disc, winding passes through friendship
Time-dependent current generates alternating magnetic field control magnetorheological fluid movement.
3. alternating magnetic field magnetorheological fluid grinding method according to claim 1, workpiece, which is placed among two electromagnetic discs, realizes work
The grinding and polishing on part two sides.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811271846.3A CN109318061A (en) | 2018-10-29 | 2018-10-29 | A kind of magnetorheological fluid abrasive polishing method of alternating electromagnetic field control |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811271846.3A CN109318061A (en) | 2018-10-29 | 2018-10-29 | A kind of magnetorheological fluid abrasive polishing method of alternating electromagnetic field control |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109318061A true CN109318061A (en) | 2019-02-12 |
Family
ID=65259754
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811271846.3A Pending CN109318061A (en) | 2018-10-29 | 2018-10-29 | A kind of magnetorheological fluid abrasive polishing method of alternating electromagnetic field control |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006524587A (en) * | 2003-04-28 | 2006-11-02 | マイクロン・テクノロジー・インコーポレーテッド | Polishing machine and method including an underpad for mechanically and / or chemically mechanically polishing a micro-shaped workpiece |
| CN103252686A (en) * | 2013-06-06 | 2013-08-21 | 青岛理工大学 | Titanium alloy artificial knee joint magnetorheological polishing device |
| CN102632434B (en) * | 2012-05-10 | 2014-07-02 | 河南科技大学 | Magnetorheological polishing system for cylindrical workpiece |
| CN204075883U (en) * | 2014-09-02 | 2015-01-07 | 衢州启程机械设备有限公司 | A kind of magnetorheological finishing device based on alternating magnetic field |
| CN204935271U (en) * | 2015-08-17 | 2016-01-06 | 宇环数控机床股份有限公司 | A kind of field generator for magnetic of MRF equipment |
| CN105458839A (en) * | 2015-08-17 | 2016-04-06 | 宇环数控机床股份有限公司 | Magnetorheological polishing method and device |
| CN106938407A (en) * | 2017-02-21 | 2017-07-11 | 广东工业大学 | The dynamic magnetorheological finishing device and its polishing method of a kind of controllable moving field |
-
2018
- 2018-10-29 CN CN201811271846.3A patent/CN109318061A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006524587A (en) * | 2003-04-28 | 2006-11-02 | マイクロン・テクノロジー・インコーポレーテッド | Polishing machine and method including an underpad for mechanically and / or chemically mechanically polishing a micro-shaped workpiece |
| CN102632434B (en) * | 2012-05-10 | 2014-07-02 | 河南科技大学 | Magnetorheological polishing system for cylindrical workpiece |
| CN103252686A (en) * | 2013-06-06 | 2013-08-21 | 青岛理工大学 | Titanium alloy artificial knee joint magnetorheological polishing device |
| CN204075883U (en) * | 2014-09-02 | 2015-01-07 | 衢州启程机械设备有限公司 | A kind of magnetorheological finishing device based on alternating magnetic field |
| CN204935271U (en) * | 2015-08-17 | 2016-01-06 | 宇环数控机床股份有限公司 | A kind of field generator for magnetic of MRF equipment |
| CN105458839A (en) * | 2015-08-17 | 2016-04-06 | 宇环数控机床股份有限公司 | Magnetorheological polishing method and device |
| CN106938407A (en) * | 2017-02-21 | 2017-07-11 | 广东工业大学 | The dynamic magnetorheological finishing device and its polishing method of a kind of controllable moving field |
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Application publication date: 20190212 |
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