CN109295421B

CN109295421B - Evaporation plating equipment and magnetic adjusting device thereof

Info

Publication number: CN109295421B
Application number: CN201811256677.6A
Authority: CN
Inventors: 杨涛
Original assignee: Wuhan China Star Optoelectronics Semiconductor Display Technology Co Ltd
Current assignee: Wuhan China Star Optoelectronics Semiconductor Display Technology Co Ltd
Priority date: 2018-10-26
Filing date: 2018-10-26
Publication date: 2020-10-27
Anticipated expiration: 2038-10-26
Also published as: CN109295421A

Abstract

The invention discloses an evaporation plating device and a magnetic adjusting device thereof, wherein the magnetic adjusting device comprises: a plate body; the electromagnetic pieces are uniformly distributed on one surface of the plate body; and the plurality of electric drive components are movably combined with the plate body so that each electromagnetic component moves along a two-dimensional direction on a plane.

Description

Evaporation plating equipment and magnetic adjusting device thereof

Technical Field

The present invention relates to a vapor deposition apparatus, and more particularly to a vapor deposition apparatus capable of adjusting magnetic force distribution and a magnetic adjustment device thereof.

Background

Nowadays, evaporation equipment is widely applied, for example, a vacuum evaporation process is adopted in an Organic Light Emitting Diode (OLED) production technology to produce an OLED display having many advantages of bright color, high contrast, low power consumption, flexibility and the like, and the quality of an evaporation link directly affects the production capacity and the cost of a product.

In the production process of the OLED display, a substrate (Mask base) is attached to a Metal Mask (Metal Mask) by a magnetic force provided by a magnetic Plate (Magnet Plate) in an evaporation apparatus, so that an evaporation material (e.g., an organic electroluminescent material) is accurately plated at a corresponding position on the substrate to form a light emitting layer. If a gap is present at the joint of the substrate and the metal mask, the quality of the vapor deposition on the substrate is poor, and the yield is reduced. In particular, in the case of a large glass substrate and a large deposition line of an advanced generation, a high demand is placed on the magnetic force and uniformity of the magnetic plate.

However, in the current practical application, after the magnetic plate (for example, the permanent magnets are arranged, assembled and positioned) is installed, the strength and uniformity of the magnetic force of the magnetic plate are already fixed, and the magnetic force distribution cannot be adjusted according to the requirements of different product sizes, yield optimization and the like in production.

Therefore, the prior art has defects and needs to be improved urgently.

Disclosure of Invention

In view of this, the present invention provides an evaporation apparatus and a magnetic adjustment device thereof, which can adjust magnetic force distribution to solve the problem that the magnetic force distribution after the evaporation apparatus is installed in the prior art cannot be adjusted.

One aspect of the present invention provides a magnetic tuning device for an evaporation apparatus, the magnetic tuning device comprising: a plate body; the electromagnetic pieces are uniformly distributed on one surface of the plate body; and the plurality of electric drive components are movably combined with the plate body so that each electromagnetic component moves along a two-dimensional direction on a plane.

In some embodiments, the magnetic tuning device further comprises: the controller is electrically connected with the electromagnetic pieces and the electric drive assembly and transmits a plurality of magnetic control signals to the electromagnetic pieces, and the magnetic control signals are adjusted by software.

In some embodiments, the controller transmits a plurality of displacement signals to the plurality of electrically driven components, the displacement signals being regulated by the software.

In some embodiments, the plurality of electromagnetic elements are distributed on the surface of the board body.

In some embodiments, each of the electric driving components is an electric two-dimensional moving platform, and the electric two-dimensional moving platform is combined between one of the electromagnetic pieces and the plate body.

In some embodiments, the electric two-dimensional moving platform has a fixing base, two screws, two motors and a sliding platform, the fixing base is combined with the plate body, the two screws are disposed on the fixing base and respectively extend along the two-dimensional directions, the two motors are respectively and rotationally coupled with the two screws, the two screws are in threaded coupling with the sliding platform, and the sliding platform is combined with one of the electromagnetic members.

In some embodiments, a distance between one of the plurality of electromagnetic members and another adjacent electromagnetic member, and one of the plurality of electromagnetic members has a location point on the plane, a maximum travel distance of the location point moving toward the another adjacent electromagnetic member is less than the distance.

In some embodiments, the electromagnetic element has a core and a plurality of coil windings wound around the core.

In some embodiments, the plate body is a yoke plate used in the evaporation apparatus.

The invention also provides evaporation equipment which comprises a cavity and the magnetic regulating device, wherein the magnetic regulating device is arranged in the cavity.

Compared with the prior art, the evaporation equipment and the magnetic adjusting device thereof have the advantages that the plurality of electromagnetic pieces are movably combined on the plate body through the electric driving assembly, so that the position and the magnetic force characteristics of each electromagnetic piece can be changed. Compared with the magnetic plates (such as fixing the positions of all magnets) of other evaporation equipment, the evaporation equipment and the magnetic adjusting device thereof can adjust the magnetic force distribution in real time to meet the production requirement, and can avoid low yield caused by the fact that the magnetic force distribution cannot be adjusted.

Drawings

Fig. 1 is a schematic plan view of a magnetic tuning device according to an embodiment of the present invention.

Fig. 2 is a schematic side view of a magnetic tuning device according to an embodiment of the invention.

Fig. 3 is a schematic view of a magnetic tuning device applied to an evaporation apparatus according to an embodiment of the present invention.

Detailed Description

The following description of the embodiments refers to the accompanying drawings for illustrating the specific embodiments in which the invention may be practiced. Furthermore, directional phrases used herein, such as, for example, upper, lower, top, bottom, front, rear, left, right, inner, outer, lateral, peripheral, central, horizontal, lateral, vertical, longitudinal, axial, radial, uppermost or lowermost, etc., refer only to the orientation of the attached drawings. Accordingly, the directional terms used are used for explanation and understanding of the present invention, and are not used for limiting the present invention.

Referring to fig. 1 and fig. 2, a magnetic tuning device M according to an embodiment of the present invention may include a board M1, a plurality of electromagnetic elements M2, and a plurality of electric driving assemblies M3. The plurality of electromagnetic elements M2 may be uniformly distributed on a surface of the board M1; a plurality of electric drive assemblies M3 may movably couple the plurality of electromagnetic elements M2 to the plate M1 (as shown in fig. 2, wherein M2 and M3 are illustrated as examples), so that each of the plurality of electromagnetic elements M2 moves in two dimensions (as shown in fig. 1) on a plane, wherein the plane on which the electromagnetic element M2 moves is parallel to the surface of the plate M1.

In some embodiments, the plate M1 is a yoke plate (yoke plate) that can be used in the evaporation apparatus, such as: the board M1 has two opposite surfaces, the electromagnetic element M2 and the electric driving module M3 can be disposed on one of the two opposite surfaces, but not limited thereto, and the electromagnetic element M2 and the electric driving module M3 can also be disposed on each of the two opposite surfaces to meet the requirements of actual production or optimization.

In some embodiments, the plurality of electromagnetic pieces M2 are distributed on the surface of the board body M1, such as: the several electromagnetic pieces M2 may be arranged in a square array, for example: the row spacing and the column spacing between two adjacent electromagnetic elements M2 are set to a specific value to ensure high uniformity of magnetic distribution. Without being limited thereto, the plurality of electromagnetic pieces M2 may also be arranged in other forms, such as: circular, polygonal, star-shaped or irregular shapes to meet the requirements of practical application.

In some embodiments, the electromagnetic member M2 may have a core (e.g., silicon steel) and coil windings (e.g., superconductors) wound around the core for energizing to generate different magnetic force characteristics, such as: the iron core can be formed into different shapes according to requirements; the coil winding can be made of a conducting wire with good conductivity; the magnetic force characteristics may include magnetic force magnitude, magnetism, and the like.

In some embodiments, each of the electric driving modules M3 may be an electric two-dimensional moving platform combined between one of the plurality of electromagnetic elements M2 and the board M1, such as: electronic two-dimensional moving platform can have a fixing base, two screw rods, two motors and a slip table, the fixing base combine in plate body M1, two screw rods set up the fixing base just follows respectively the two-dimensional direction extends, two motors couple with rotating respectively two screw rods, two screw rods with slip table threaded ground coupling, the slip table combines one among several electromagnetism spare M2.

In some embodiments, the magnetic tuning device may further include a controller electrically connected to the electromagnetic element M2 and the electric driving component M3, the controller may transmit a plurality of magnetic control signals (such as different current signals) to the plurality of electromagnetic elements M2, the magnetic control signals being adjusted by a software to generate different magnetic force characteristics; in addition, the controller may also transmit a plurality of shift control signals (e.g., pulse width modulation signals, etc.) to the plurality of electrically driven components M3, which may also be adjusted by the software to control the movement patterns of the different electrically driven components M3.

In some embodiments, a spacing between one of the plurality of electromagnetic pieces M2 and another adjacent electromagnetic piece M2, and one of the plurality of electromagnetic pieces M2 has a point on the plane that has a maximum travel distance toward the other adjacent electromagnetic piece M2 that is less than the spacing. Therefore, the adjacent two electromagnetic members M2 can be prevented from colliding with each other during the movement.

Referring to fig. 3, the magnetic tuning device M according to the above embodiment of the present invention can be applied as an evaporation apparatus, for example: the apparatus for implementing a vacuum evaporation process required for Organic Light Emitting Diode (OLED) production may include a cavity and the magnetic tuning device M as described above, where the magnetic tuning device M may be disposed in the cavity, for example: the magnetic adjusting device M can be used as a magnetic plate in the evaporation equipment.

For example, as shown in fig. 3, a chamber C may be formed in the cavity of the evaporation apparatus for accommodating materials or modules required for the evaporation process, such as: the evaporation material, the magnetic adjusting device M, a panel T, a substrate G, a mask (Musk) K and a mask base (Musk base) B, in the chamber C, the magnetic adjusting device M can be moved up and down, the panel (e.g. touch panel, TP) T and the substrate (e.g. Glass substrate, Glass) G can be placed under the magnetic adjusting device M, the mask (e.g. metal mask) K and the mask base B carrying the mask K can be placed under the substrate G, the mask K is opposite to the magnetic adjusting device M, the magnetic adjusting device M can be electrified to generate a magnetic force, in this case, the magnetic force can be an attractive force, but not limited thereto, if the relative position of the mask K and the mask base B is changed, the magnetic force can also be a repulsive force, so that the mask K is tightly attached to the substrate G by the magnetic force, and a gap between the substrate G and the mask K is avoided, so as to accurately plate the evaporation material on the corresponding position on the substrate G.

It is understood that, in order to avoid a gap between the substrate G and the mask K, the entire mask K attached to the substrate G should be uniformly applied with the magnetic force.

Importantly, if the magnetic force distribution needs to be adjusted in the production process of the oled due to different product sizes and yield optimization, the position and magnetic force characteristics of the electromagnetic member M2 in the above embodiment can be changed. For example: software may be utilized to cause the control signal to change the magnetic force characteristics (e.g., intensity, polarity, uniformity, time, etc.) of the electromagnet M2, which may also cause the control signal to shift the position of the electromagnet M2.

Compared with the magnetic plates (such as fixing the positions of all magnets) of other evaporation equipment, the evaporation equipment and the magnetic adjusting device thereof provided by the embodiment of the invention can adjust the magnetic force distribution in real time to meet the production requirement, and can avoid low yield caused by the fact that the magnetic force distribution cannot be adjusted.

The present invention has been described in relation to the above embodiments, which are only exemplary of the implementation of the present invention. It must be noted that the disclosed embodiments do not limit the scope of the invention. Rather, modifications and equivalent arrangements included within the spirit and scope of the claims are included within the scope of the invention.

Claims

1. The utility model provides a magnetic adjusting device for an evaporation equipment which characterized in that: the magnetic adjusting device comprises:

a plate body;

the electromagnetic pieces are uniformly distributed on one surface of the plate body; and

the electric driving components are movably combined on the plate body, each electric driving component is an electric two-dimensional moving platform, and the electric two-dimensional moving platform is combined between one of the electromagnetic components and the plate body, so that each electromagnetic component moves on a plane along a two-dimensional direction.

2. The magnetic tuning device of claim 1, wherein: the magnetic adjustment device further comprises:

the controller is electrically connected with the electromagnetic pieces and the electric drive assembly and transmits a plurality of magnetic control signals to the electromagnetic pieces, and the magnetic control signals are adjusted by software.

3. The magnetic tuning device of claim 2, wherein: the controller transmits a plurality of shift control signals to the plurality of electrically driven components, the shift control signals being regulated by the software.

4. The magnetic tuning device of claim 1, wherein: the plurality of electromagnetic elements are distributed on the surface of the plate body in an array mode.

5. The magnetic tuning device of claim 1, wherein: electronic two-dimensional moving platform has a fixing base, two screw rods, two motors and a slip table, the fixing base combine in the plate body, two screw rods set up the fixing base just follows respectively the two-dimensional direction extends, two motors couple with rotating respectively two screw rods, two screw rods with the coupling of slip table screw thread ground, the slip table combines one in the several electromagnetism piece.

6. The magnetic tuning device of claim 1, wherein: a spacing between one of the plurality of electromagnetic members and another adjacent electromagnetic member, and one of the plurality of electromagnetic members has a location point on the plane, a maximum travel distance of the location point moving toward the another adjacent electromagnetic member being less than the spacing.

7. The magnetic tuning device of claim 1, wherein: the electromagnetic part is provided with an iron core and a plurality of coil windings, and the coil windings are wound on the iron core.

8. The magnetic tuning device of claim 1, wherein: the plate body is a yoke plate used in the evaporation equipment.

9. The utility model provides an evaporation equipment, includes a cavity, its characterized in that: comprising a device according to any one of claims 1 to 8, said device being arranged in said cavity.