CN109932666A - Mgnetic observations jig and the method that mgnetic observations are carried out using the jig - Google Patents
Mgnetic observations jig and the method that mgnetic observations are carried out using the jig Download PDFInfo
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- CN109932666A CN109932666A CN201910242774.8A CN201910242774A CN109932666A CN 109932666 A CN109932666 A CN 109932666A CN 201910242774 A CN201910242774 A CN 201910242774A CN 109932666 A CN109932666 A CN 109932666A
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Abstract
The present invention provides a kind of mgnetic observations jig and the method using jig progress mgnetic observations.The jig includes: carrier；Instrument mounting base is configurable for installation mgnetic observations instrument；The instrument mounting base and the carrier are cooperatively connected, and can move in the first plane relative to the carrier；Connection structure, it is configurable for connecting the carrier and magnetic element to be measured, wherein the magnetic element is arranged along the second plane, the connection structure is additionally configured to that levelness of the carrier relative to the magnetic element can be adjusted, and first plane is made to be parallel to second plane.Mgnetic observations are carried out to the indoor magnetic sheet of vapor deposition chamber using the mgnetic observations jig, mgnetic observations instrument can be made to be maintained on a horizontal position and carry out mgnetic observations, without hand-held mgnetic observations instrument operation, to guarantee accuracy, the convenience of measurement.
Description
Technical field
The present invention relates to display fabrication techniques field, refers in particular to a kind of mgnetic observations jig and carried out using the jig
The method of mgnetic observations.
Background technique
In Organic Light Emitting Diode (Organic Light-Emitting Diode, referred to as OLED) display manufacturing
In, evaporation process is essential technical process.
If Fig. 1 is the schematic illustration that evaporated device is deposited, wherein evaporated device includes: to distinguish from the bottom to top successively
Evaporation source 5, mask plate 4, substrate 3, coldplate 2 and the magnetic sheet 1 of setting, wherein magnetic sheet 1 is fitted and connected with coldplate 2, and magnetic sheet 1 is used
In generating magnetic field, mask plate 4 by the metal material that magnetic field is adsorbed using that can be made, using magnetic field produced by magnetic sheet 1 to exposure mask
The suction-operated of plate 4 avoids the sagging of mask plate 4.In addition, substrate 3 to be deposited is set between mask plate 4 and coldplate 2,
It needs to align the substrate 3 of evaporation material to be formed with metal mask plate 4 when being deposited, makes to evaporate material across mask plate
Correspondence figure area deposition on 4 on the substrate 3, required material layer is made.
According to the above, important component of the magnetic sheet 1 as the vapor deposition chamber of evaporated device, the direct shadow of the size of magnetic force
The yield of product is rung, therefore needs to carry out mgnetic observations before being applied to vapor deposition.
The mgnetic observations method of current existing magnetic sheet, is usually placed in vapor deposition chamber using by mask plate and substrate to be deposited
Mode that is interior, directly being measured on substrate to be deposited with mgnetic observations meter.Using which, the measurement of manual operation mgnetic observations meter
Apart from the same size of magnetic sheet, but when the magnitude of field intensity of different location point, the inaccurate of measurement can be caused due to human error
Really；And the measurement of different operation personnel can also have very large deviation, therefore be unable to get accurate magnetic force size.
Summary of the invention
The purpose of technical solution of the present invention is to provide a kind of mgnetic observations jig and carries out mgnetic observations using the jig
Method, for solving the problems, such as the prior art to the mgnetic observations inaccuracy of the vapor deposition indoor magnetic sheet of chamber.
The embodiment of the present invention provides a kind of mgnetic observations jig, wherein includes:
Carrier；
Instrument mounting base is configurable for installation mgnetic observations instrument；The instrument mounting base and the carrier cooperate
Connection, can move in the first plane relative to the carrier；
Connection structure is configurable for connecting the carrier and magnetic element to be measured, wherein the magnetic member
Part is arranged along the second plane, and the connection structure is additionally configured to adjust the carrier relative to the magnetic element
Levelness makes first plane be parallel to second plane.
Optionally, the mgnetic observations jig, wherein the carrier includes:
Pedestal is provided with two opposite sliding rails；
Sliding bar, both ends are cooperatively connected with wherein one sliding rail respectively；
Wherein, the instrument mounting base is slidingly arranged on the sliding bar, by the sliding bar along the sliding
Track is mobile, and the instrument mounting base is moved along the sliding bar, and the instrument mounting base can exist relative to the carrier
It is moved in first plane.
Optionally, the mgnetic observations jig, wherein the pedestal includes the framework of quadrangle, two slidings
Track is arranged along opposite two sides of the framework respectively.
Optionally, the mgnetic observations jig, wherein be provided with jack in the instrument mounting base, pass through the cunning
Lever is arranged in the jack, and the instrument mounting base can be moved along the sliding bar.
Optionally, the mgnetic observations jig, wherein one end that the connection structure is connected with the carrier is set
It is equipped with bolt, the carrier is worn by the bolt, and be arranged nut, the connection structure is connected with the carrier
It connects；
Wherein, by adjusting the nut, levelness of the carrier relative to the magnetic element can be adjusted.
Optionally, the mgnetic observations jig, wherein the connection structure includes multiple support columns being parallel to each other
Body, each support cylinder pass through the bolt with the carrier respectively and are connected.
Optionally, the mgnetic observations jig, wherein the connection structure further includes being used to support the magnetic element
Support substrate, each one end of the support cylinder far from the carrier is fixedly connected with the support substrate.
Optionally, the mgnetic observations jig, wherein when the magnetic element is vapor deposition intracavitary magnetic sheet, the branch
Support group bottom includes in the intracavitary mask plate support plate set gradually from the bottom to top of the vapor deposition, mask plate, substrate to be steamed and cold
But plate；
Wherein, each one end of the support cylinder far from the carrier is fixed with the mask plate support plate and is connected
It connects.
Optionally, the mgnetic observations jig, wherein the mgnetic observations jig further includes being installed on the instrument peace
The mgnetic observations instrument on seat is filled, the mgnetic observations instrument includes for detecting the probe of magnetic field strength, for showing the probe
First display dial of magnetic field strength detected and the second display dial for showing the probe extension elongation.
The embodiment of the present invention also provides a kind of using in as above described in any item mgnetic observations jigs progress evaporated devices
The method of mgnetic observations, wherein include:
The intracavitary mask plate that is deposited that the connection structure is separately connected the carrier and the evaporated device is supported
Plate；It wherein, is the magnetic element positioned at the intracavitary magnetic sheet of the vapor deposition；
The connection between the connection structure and the carrier is adjusted, so that first plane is parallel to described second flat
Face；
Mgnetic observations instrument is installed in the instrument mounting base, and makes the instrument mounting base relative to the carrier in institute
It states and is moved in the first plane, carry out mgnetic observations.
At least one of specific embodiment of the invention above-mentioned technical proposal has the advantages that
Mgnetic observations jig described in the embodiment of the present invention can connect magnetism to be measured by connection structure and carrier
Element, the instrument mounting base for being used in installation mgnetic observations instrument can be parallel to magnetic element movement to be measured, can lead to
Cross the magnitude of field intensity of different location point of the mgnetic observations instrument accurately measure apart from magnetic element same interval distance.Its
In the magnetic element can be the intracavitary magnetic sheet of vapor deposition of evaporated device, using the mgnetic observations jig to the vapor deposition indoor magnetic of chamber
Plate carries out mgnetic observations, and mgnetic observations instrument can be made to be maintained on a horizontal position and carry out mgnetic observations, surveys without hand-held magnetic force
Instrument operation is measured, to guarantee accuracy, the convenience of measurement.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of usual evaporated device；
Fig. 2 is the schematic perspective view of mgnetic observations jig described in the embodiment of the present invention；
Fig. 3 is the overlooking structure diagram of mgnetic observations jig described in the embodiment of the present invention；
Fig. 4 is that mgnetic observations jig described in the embodiment of the present invention shows for the first side view structure of intracavitary mgnetic observations to be deposited
It is intended to；
Fig. 5 is that mgnetic observations jig described in the embodiment of the present invention shows for the second side view structure of intracavitary mgnetic observations to be deposited
It is intended to.
Specific embodiment
To keep the technical problem to be solved in the present invention, technical solution and advantage clearer, below in conjunction with attached drawing and tool
Body embodiment is described in detail.
The embodiment of the present invention provides a kind of mgnetic observations jig, which passes through connection structure and carrier energy
Magnetic element to be measured is enough connected, the instrument mounting base for being used in installation mgnetic observations instrument can be parallel to magnetism to be measured
Element is mobile, to be capable of the magnetic of different location point by mgnetic observations instrument accurately measure apart from the same distance of magnetic element
Field intensity size.
Refering to shown in Fig. 2 and Fig. 3, a wherein embodiment for mgnetic observations jig described in the embodiment of the present invention, comprising:
Carrier 100；
Instrument mounting base 200 is configurable for installation mgnetic observations instrument 400；The instrument mounting base 200 and carrier
100 are cooperatively connected, and can move in the first plane relative to carrier 100；
Connection structure 300 is configurable for connection carrier 100 and magnetic element to be measured, wherein magnetic element
It is arranged along the second plane, connection structure 300 is additionally configured to that levelness of the carrier 100 relative to magnetic element can be adjusted,
The first plane is set to be parallel to the second plane.
Using mgnetic observations jig described in the embodiment of the present invention, mgnetic observations are made by connection structure 300 and carrier 100
Instrument 400 keeps a spacing distance compared to magnetic element, and can be formed by plane in the same interval distance (first is flat
Face) in move, which does not need hand-held mgnetic observations instrument, to avoid error caused by manual measurement, guarantees the accurate of measurement
Property.
Specifically, which can be for the intracavitary magnetic sheet that is deposited of evaporated device, magnetic force described in the embodiment of the present invention
Measurement jig can measure the magnetic field strength of the different location point apart from magnetic sheet same interval distance, for monitoring at mask plate
When in the plane corresponding to the spacing distance, magnetic adsorptive power of the magnetic sheet to mask plate.
In the embodiment of the present invention, as shown in Figures 2 and 3, the carrier 100 includes:
Pedestal 110, including two opposite sliding rails 111；
Sliding bar 120, both ends are cooperatively connected with a wherein sliding rail 111 respectively；
Wherein, instrument mounting base 200 is slidingly arranged on sliding bar 120, by sliding bar 120 along sliding rail 111
Mobile, instrument mounting base 200 is moved along sliding bar 120, and instrument mounting base 120 can be relative to carrier 100 in first surface
Interior movement.
Specifically, in conjunction with shown in Fig. 2 and Fig. 3, the both ends of sliding bar 120 cooperate with a wherein sliding rail 111 connect respectively
It connects, when sliding bar 120 is slided along sliding rail 111, sliding bar 120 can be integrally relative to pedestal 110 along sliding rail 111
Length direction it is mobile；Optionally, for sliding bar 120 perpendicular to the length direction of sliding rail 111, instrument mounting base 200 can
It moves along sliding bar 120, namely is moved along the direction of the length direction perpendicular to sliding rail 111.Based on the move mode, with
The length direction of sliding rail 111 is X-direction, for the length direction of sliding bar 120 is Y-direction, is set to sliding bar 120
Mgnetic observations instrument 400 in instrument mounting base 200 can move in X direction, while can also move along Y-direction, namely one
It is moved in a plane.
In addition, the measurement position in order to clearly illustrate mgnetic observations instrument 400, in the embodiment of the present invention, in 120 phase of sliding bar
During and instrument mounting base 200 mobile for pedestal 110 is relative to the movement of sliding bar 120, on mgnetic observations instrument 400
For detecting measurement position of the location point as mgnetic observations instrument 400 of the probe of magnetic field strength.It is understood that due to cunning
Lever 120 is translational motion, magnetic force relative to the movement of sliding bar 120 relative to the movement of pedestal 110 and instrument mounting base 200
The movement of probe on measuring instrument 400 is also movement in a plane.Wherein, based on sliding bar 120 relative to pedestal
Movement of 110 movement and instrument mounting base 200 relative to sliding bar 120, the probe of the mgnetic observations instrument 400 is by each
Plane where location point can be defined as the first plane mentioned by the present invention.
In the embodiment of the present invention, as shown in Figures 2 and 3, optionally, pedestal 110 includes the framework of quadrangle, two slidings
Track 111 is arranged along opposite two sides of framework respectively.Sliding bar 120 is formed as the rod-shaped of strip, and instrument mounting base
It is provided with jack on 200, is arranged in jack by sliding bar 120, instrument mounting base 200 can be moved along sliding bar 120.Separately
Outside, the bottom surface of instrument mounting base 200 also can be set the first fluting with jack perforation, the sliding bar 120 can by this
One fluting is arranged in the jack of instrument mounting base 200.
Optionally, the top surface setting of instrument mounting base 200 is used for for installing the second fluting 410 of mgnetic observations instrument 400
Mgnetic observations instrument 400 is arranged in instrument mounting base 200, and can be detachably connected with instrument mounting base 200.
Optionally, the sliding rail 111 on pedestal 110 can be formed as sliding slot form, and the both ends of sliding bar 120 can be set
The lug boss with sliding slot cooperation is set, is inserted in sliding slot by lug boss, for realizing sliding bar 120 relative to pedestal 110
It is mobile.
It should be noted that structure and instrument mounting base 200 and sliding that sliding bar 120 and pedestal 110 are slidably matched
The structure that bar 120 is slidably matched, however it is not limited to only can be above-mentioned form, as long as can be realized sliding bar 120 relative to pedestal
110 move and instrument mounting base 200 can be moved relative to sliding bar 120 along Y-direction in X direction.It is no longer right herein
Each implementation structure is described in detail.
In the embodiment of the present invention, optionally, at least two sliding bars 120 and sliding bar can be set on pedestal 110
Also at least two instrument mounting bases 200 can be set on 120, be used for while carrying out magnetic field by multiple mgnetic observations instrument 400 is strong
Degree measurement, to be measured simultaneously to multiple location points.
In mgnetic observations jig described in the embodiment of the present invention, pedestal 110 uses the structure type of the framework of quadrangle, entirely
The bottom surface of the framework of quadrangle is located at a plane, to realize the purpose steadily placed, can guarantee the accuracy of measurement.
In the embodiment of the present invention, one end that connection structure 300 is connected with carrier 100 is provided with bolt, wherein bolt
Carrier 100 is worn, and is arranged nut, connection structure 300 is connected with carrier 100；
Wherein, by adjusting nut, levelness of the carrier 100 compared to magnetic element can be adjusted.
Specifically, as shown in Fig. 2, connection structure 300 includes multiple support cylinders 310 being parallel to each other, each support column
Body 310 is connected by a bolt respectively with carrier 100.
Optionally, connection structure 300 further includes being used to support the support substrate (not shown) of magnetic element, Mei Yizhi
The one end of dagger body 310 far from carrier 100 is fixedly connected with support substrate.
In the embodiment of the present invention, the support substrate for being used to support magnetic element places magnetic element by plane, to guarantee
Flatness when magnetic element is placed in support substrate.
Mgnetic observations jig described in the embodiment of the present invention can directly be placed magnetic element by the way that support substrate is arranged
In in support substrate, and the connection of connection structure and carrier is adjusted, makes the plane that instrument mounting base is mobile relative to carrier
(the first plane) is parallel to the plane (the second plane) where magnetic element, and keeps instrument mounting base mobile relative to carrier,
It can realize the measurement of the magnetic field strength of the different location point below magnetic element apart from one spacing distance of magnetic element.The survey
Amount process can be detached from the use environment of magnetic element, realize the real-time of measurement.
Optionally, in the embodiment of the present invention, the magnetic element can be the magnetic intracavitary applied to the vapor deposition of evaporated device
Plate, it is to be understood that when the magnetic element is magnetic sheet, magnetic sheet is arranged along a plane, and the shape of magnetic sheet and vapor deposition chamber
The shape of interior mask plate is identical, for adsorbing mask plate.
Optionally, when magnetic element is the intracavitary magnetic sheet of vapor deposition, in the embodiment of the present invention, referring to Fig.2, and combining as schemed
Shown in 4 and Fig. 5, the support substrate of connection structure 300 includes that the intracavitary mask plate support plate set gradually from the bottom to top is being deposited
320, mask plate 330, substrate to be steamed 340 and coldplate 350；Wherein, each support cylinder 310 far from carrier 100 one
End is fixedly connected with mask plate support plate 320, and the magnetic sheet for carrying out mgnetic observations 360 is needed to be set on coldplate 350.
Directly the mgnetic observations are controlled using the intracavitary component of the vapor deposition of evaporated device based on above-mentioned set-up mode
Each support cylinder 310 of tool is connected with mask plate support plate 320, and adjusts support cylinder 310 and be connected with carrier 100
Levelness, when instrument mounting base 200 and carrier 100 being made to be cooperatively connected, plane that can be mobile relative to carrier 100
(the first plane) is parallel to magnetic sheet 360, then the magnetic field that can measure each position point on 360 1 spacing distance of magnetic sheet is strong
Degree, to measure the magnetic field strength for obtaining magnetic sheet 360 when being applied particularly to be deposited intracavitary.
In the embodiment of the present invention, optionally, one end of support cylinder 310 can pass through screw with mask plate support plate 320
Connection.Wherein, it is provided with threaded hole in mask plate support plate 320, by wearing screw in threaded hole and being inserted in support cylinder
310 inside, realization support cylinder 310 are fixedly connected with mask plate support plate 320；In addition, as shown in Figure 4 and Figure 5, support
The other end of cylinder 310 is provided with bolt, wherein carrier 100 is worn by bolt, and stretched out after wearing carrier 100
It is twisted on bolt and sets nut, realization support cylinder 310 is fixedly connected with carrier 100, and when relative to bolt adjusting nut,
It can be realized the Level-adjusting of carrier 100.
Optionally, support cylinder 310 is arranged multiple, as shown in Fig. 2, multiple support cylinders 310 can be about carrier 100
A wherein center line symmetrical setting, for guaranteeing the connective stability of carrier 100 Yu mask plate support plate 320.
Optionally, in the embodiment of the present invention, as shown in Figures 2 and 3, the mgnetic observations jig further includes being installed on instrument
Mgnetic observations instrument 400 in mounting base 200, the mgnetic observations instrument 400 include for detecting the probe of magnetic field strength, for showing
First display dial of probe magnetic field strength detected and the second display dial for showing the probe extension elongation.
Specifically, which is formed as dual-purpose type consolidated statement, the shape that the extension elongation of probe passes through amesdial
Formula adjusts, and the extension elongation of probe is intuitively shown using the second display dial；Further, the mgnetic observations instrument 400 is logical
The Gauss value of the magnitude of field intensity in magnetic field locating for probe in detecting is crossed, and intuitively shows the Gauss using the first display dial
Value.
As shown in figure 5, using mgnetic observations instrument 400 described in the embodiment of the present invention, when probe and the mask plate of top support
When plate 320 connects, the movement and instrument mounting base 200 by sliding bar 120 relative to pedestal 110 are relative to sliding bar
120 movement keeps mgnetic observations instrument 400 mobile, the probe of mgnetic observations instrument 400 and the different location of mask plate support plate 320
It connects, is able to detect the plane of motion of detection location point of probe on mgnetic observations instrument 400 compared to mask plate support plate
320 levelness.
In addition, showing that the extension elongation of probe and the first display dial show institute's detection magnetic by the second display dial
The Gauss value of field intensity size, being capable of accurately measure difference on the fixed spacing distance of mask plate support plate 320 1
The Gauss value of the magnetic field strength of location point.
Optionally, in the embodiment of the present invention, on carrier 100, along the length direction and sliding bar of sliding rail 111
120 length direction is marked with scale respectively, so that movement and instrument installation when sliding bar 120 relative to pedestal 110
Seat 200 is mobile relative to sliding bar 120, when carrying out magnetic force detection by mgnetic observations instrument 400, can accurately determine magnetic force survey
Measure position of the instrument 400 on carrier 100.
Using mgnetic observations jig described in the embodiment of the present invention, when needing to carry out mgnetic observations to the magnetic sheet in evaporated device
When, detailed process is as follows:
Wherein one end of support cylinder 310 is fixedly connected with mask plate support plate 320 respectively, the other end and carrier
100 are fixedly connected；
The nut that adjustment is located at the bottom surface of carrier 100 and is arranged on the bolt of the support cylinder 310, makes mgnetic observations
The plane of motion of instrument 400 is parallel with mask plate support plate 320, it is to be understood that mask plate support plate 320 is parallel to magnetic sheet
360, therefore the plane of motion of the mgnetic observations instrument 400 is also parallel with magnetic sheet 360；
Mgnetic observations instrument 400 is installed in instrument mounting base 200, the probe of adjustment mgnetic observations instrument 400 stretches out default
Length；And by making the moving and/or make instrument mounting base 200 relative to sliding bar 120 relative to pedestal 110 of sliding bar 120
It is mobile, the detection location point of the probe of mgnetic observations instrument 400 is adjusted, reads mgnetic observations instrument 400 in the magnetic field of each position point
The Gauss value of intensity size obtains the magnetic force size apart from 360 same interval of magnetic sheet apart from upper each position point.
Mgnetic observations jig described in the embodiment of the present invention can connect carrier by support cylinder and mask plate supports
Plate, and make to be able to carry out levelness adjusting between support cylinder and carrier, to adjust the instrument for installing mgnetic observations instrument
Mounting base can be parallel to magnetic sheet movement, measure the magnetic field strength of the different location point apart from magnetic sheet same interval distance, use
The jig can guarantee the accuracy of measurement, convenience, and can measure the magnetic field strength of multiple location points the same time, into one
Step achievees the purpose that save time of measuring.
On the other hand the embodiment of the present invention also provides a kind of using mgnetic observations jig as described above progress evaporated device
The method of interior mgnetic observations, wherein the described method includes:
The intracavitary mask plate that is deposited that the connection structure is separately connected the carrier and the evaporated device is supported
Plate；It wherein, is the magnetic element positioned at the intracavitary magnetic sheet of the vapor deposition；
The connection between the connection structure and the carrier is adjusted, so that first plane is parallel to described second flat
Face；
Mgnetic observations instrument is installed in the instrument mounting base, and makes the instrument mounting base relative to the carrier in institute
It states and is moved in the first plane, carry out mgnetic observations.
Wherein, the specific structure of the mgnetic observations jig can in conjunction with Fig. 2 to Fig. 5 and refering to above detailed description,
Details are not described herein.
Wherein, using the mgnetic observations jig, the vapor deposition that connection structure is separately connected carrier and evaporated device is intracavitary
The mode of mask plate support plate can be with are as follows: wherein one end of support cylinder is fixed with mask plate support plate by screw respectively
Connection, the other end are bolted to connection with carrier；
The connection between the connection structure and the carrier is adjusted, so that first plane is parallel to described second flat
Mask body can be with are as follows: adjustment is located at the bottom surface of carrier and is arranged in the nut on the bolt of the support cylinder, makes mgnetic observations
The plane of motion of instrument is parallel with mask plate support plate；
The mode for moving the instrument mounting base in first plane relative to the carrier can be with are as follows: passes through
Make sliding bar moving and/or keep instrument mounting base mobile relative to sliding bar relative to pedestal, make instrument mounting base relative to
Carrier moves in the first plane.
Based on above-mentioned process, capable of adjusting mgnetic observations instrument, to be parallel to magnetic sheet mobile, with measurement apart from magnetic sheet it is same between
Gauge from different location point magnetic field strength, which can be such that mgnetic observations instrument is maintained on a horizontal position to carry out
Mgnetic observations, without hand-held mgnetic observations instrument operation, to guarantee accuracy, the convenience of measurement.
Above-described is the preferred embodiment of the present invention, it should be pointed out that the ordinary person of the art is come
It says, under the premise of not departing from principle of the present invention, can also make several improvements and retouch, these improvements and modifications should also regard
For protection scope of the present invention.
Claims (10)
1. a kind of mgnetic observations jig characterized by comprising
Carrier；
Instrument mounting base is configurable for installation mgnetic observations instrument；The instrument mounting base and the carrier are cooperatively connected,
It can be moved in the first plane relative to the carrier；
Connection structure is configurable for connecting the carrier and magnetic element to be measured, wherein the magnetic element edge
The setting of second plane, the connection structure are additionally configured to that level of the carrier relative to the magnetic element can be adjusted
Degree, makes first plane be parallel to second plane.
2. mgnetic observations jig according to claim 1, which is characterized in that the carrier includes:
Pedestal is provided with two opposite sliding rails；
Sliding bar, both ends are cooperatively connected with wherein one sliding rail respectively；
Wherein, the instrument mounting base is slidingly arranged on the sliding bar, by the sliding bar along the sliding rail
Mobile, the instrument mounting base is moved along the sliding bar, and the instrument mounting base can be relative to the carrier described
It is moved in first plane.
3. mgnetic observations jig according to claim 2, which is characterized in that the pedestal includes the framework of quadrangle, and two
A sliding rail is arranged along opposite two sides of the framework respectively.
4. mgnetic observations jig according to claim 2, which is characterized in that it is provided with jack in the instrument mounting base,
It is arranged in the jack by the sliding bar, the instrument mounting base can be moved along the sliding bar.
5. mgnetic observations jig according to claim 1, which is characterized in that the connection structure is connected with the carrier
The one end connect is provided with bolt, wears the carrier by the bolt, and be arranged nut, the connection structure is held with described
Carrier is connected；
Wherein, by adjusting the nut, levelness of the carrier relative to the magnetic element can be adjusted.
6. mgnetic observations jig according to claim 5, which is characterized in that the connection structure includes multiple is parallel to each other
Support cylinder, each support cylinder passes through the bolt with the carrier respectively and is connected.
7. mgnetic observations jig according to claim 6, which is characterized in that the connection structure further includes being used to support institute
The support substrate of magnetic element is stated, each one end of the support cylinder far from the carrier is fixed with the support substrate
Connection.
8. mgnetic observations jig according to claim 6, which is characterized in that the magnetic element is the intracavitary magnetic sheet of vapor deposition
When, the support substrate includes in the intracavitary mask plate support plate set gradually from the bottom to top of the vapor deposition, mask plate, bottom to be steamed
Substrate and coldplate；
Wherein, each one end of the support cylinder far from the carrier is fixedly connected with the mask plate support plate.
9. mgnetic observations jig according to claim 1, which is characterized in that the mgnetic observations jig further includes being installed on
Mgnetic observations instrument in the instrument mounting base, the mgnetic observations instrument include for detecting the probe of magnetic field strength, for showing
Show the first display dial of probe magnetic field strength detected and the second display for showing the probe extension elongation
Dial plate.
10. a kind of side for carrying out mgnetic observations in evaporated device using the described in any item mgnetic observations jigs of claim 1 to 9
Method characterized by comprising
The connection structure is separately connected the carrier mask plate support plate intracavitary with the vapor deposition of the evaporated device；Its
In, the magnetic sheet intracavitary positioned at the vapor deposition is the magnetic element；
The connection between the connection structure and the carrier is adjusted, first plane is made to be parallel to second plane；
Mgnetic observations instrument is installed in the instrument mounting base, and makes the instrument mounting base relative to the carrier described the
It is moved in one plane, carries out mgnetic observations.
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| CN201910242774.8A CN109932666A (en) | 2019-03-28 | 2019-03-28 | Mgnetic observations jig and the method that mgnetic observations are carried out using the jig |
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| CN201910242774.8A CN109932666A (en) | 2019-03-28 | 2019-03-28 | Mgnetic observations jig and the method that mgnetic observations are carried out using the jig |
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