CN109285964A - Flexible display panels and preparation method thereof, flexible display apparatus - Google Patents
Flexible display panels and preparation method thereof, flexible display apparatus Download PDFInfo
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- CN109285964A CN109285964A CN201811141122.7A CN201811141122A CN109285964A CN 109285964 A CN109285964 A CN 109285964A CN 201811141122 A CN201811141122 A CN 201811141122A CN 109285964 A CN109285964 A CN 109285964A
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/844—Encapsulations
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/1201—Manufacture or treatment
Abstract
The invention discloses a kind of flexible display panels and preparation method thereof, flexible display apparatus, the flexible display panels, comprising: flexible substrate;Multiple pixel isolation columns and multiple organic light-emitting units are formed in the flexible substrate, each organic light-emitting units are between two adjacent pixel isolation columns;The side far from the flexible substrate of each pixel isolation column and each organic light-emitting units is formed with the first inorganic thin film layer;Organic thin film layer is formed in the side far from the flexible substrate of the first inorganic thin layer with each organic light-emitting units corresponding region;The second inorganic thin film layer is formed in the side far from the flexible substrate of the first inorganic thin layer with each pixel isolation column corresponding region.The flexible display panels packaging effect is good, is conducive to the service life for improving the OLED device being formed in flexible display panels.
Description
Technical field
The present invention relates to field of display technology more particularly to flexible display panels and preparation method thereof, flexible display apparatus.
Background technique
Organic Light Emitting Diode OLED (Organic light-emitting diodes, OLED) has self-luminous, visual angle
The advantages that wide and low in energy consumption, display panel can be used OLED device as light-emitting component, be fabricated to OLED display panel, OLED is aobvious
Show that flexible substrates can be used in the substrate in panel, is fabricated to display panel flexible.
Due in OLED device electrode material and luminescent material to oxygen and water vapor sensitive, OLED device is needed
Effectively encapsulated, make OLED device in atmosphere steam and the ingredients such as oxygen be sufficiently spaced from, OLED can be extended and shown
The service life of panel.
For flexible OLED display panel, thin-film package (Thin FilmEncapsulation, abbreviation can be used
TFE mode), thin-film package, which refers to, covers what a flood was combined by inorganic thin film layer and organic thin film layer on OLED device surface
Thin-film encapsulation layer, so that steam and oxygen are difficult to penetrate into inside OLED device.
Thin-film package mode is due to being to be packaged with the thin-film encapsulation layer of a flood, and inorganic thin film layer therein is elastic
It is lower, it is unfavorable for dispersing mechanical stress, during long-time crimps or folds bending, organic thin film layer and inorganic thin film layer
Easily separated or fracture, causes thin-film encapsulation layer package failure, enters inside OLED device so as to cause steam and oxygen, cause
The failure of OLED device.
Summary of the invention
The present invention provides a kind of flexible display panels and preparation method thereof, flexible display apparatus, to solve in the related technology
Deficiency.
According to a first aspect of the embodiments of the present invention, a kind of flexible display panels are provided, comprising:
Flexible substrate;
Multiple pixel isolation columns and multiple organic light-emitting units, each organic light emission list are formed in the flexible substrate
Member is between two adjacent pixel isolation columns;
The side far from the flexible substrate of each pixel isolation column and each organic light-emitting units is formed with the
One inorganic thin film layer;
In one far from the flexible substrate of the first inorganic thin layer with each organic light-emitting units corresponding region
Side is formed with organic thin film layer;
In the side far from the flexible substrate of the first inorganic thin layer with each pixel isolation column corresponding region
It is formed with the second inorganic thin film layer.
Optionally, first inorganic thin film layer and second inorganic thin film layer are also formed in close to the flexible substrate
Marginal position each pixel isolation column side.
Optionally, the surface far from the flexible substrate side of each organic thin film layer and each described second inorganic thin
The surface far from the flexible substrate side of film layer is in same plane.
Optionally, protection diaphragm is also covered on each organic thin film layer and each second inorganic thin layer.
Optionally, the protection diaphragm is organic diaphragm or glass membrane.
According to a second aspect of the embodiments of the present invention, a kind of preparation method of flexible display panels is provided, comprising:
One flexible substrate is provided;
Multiple pixel isolation columns and multiple organic light-emitting units, each organic light emission list are formed in the flexible substrate
Member is between two adjacent pixel isolation columns;
The first nothing is formed in the side far from the flexible substrate of the pixel isolation column and the organic light-emitting units
Machine film layer;
In one far from the flexible substrate of the first inorganic thin layer with each organic light-emitting units corresponding region
Side forms organic thin film layer;
In the side far from the flexible substrate of the first inorganic thin layer with each pixel isolation column corresponding region
Form the second inorganic thin film layer.
Optionally, first inorganic thin film layer and second inorganic thin film layer are also formed in close to the flexible substrate
Marginal position each pixel isolation column side.
Optionally, further includes:
It is formed and is protected in the side far from the flexible substrate of each organic thin film layer and each second inorganic thin layer
Cuticula piece.
Optionally, under the conditions of being lower than set temperature, the protection diaphragm and each second inorganic thin layer are bonded.
According to a third aspect of the embodiments of the present invention, a kind of flexible display apparatus is provided, comprising: soft described in any of the above-described
Property display panel.
According to the above technical scheme it is found that the flexible display panels, it is formed on each organic light-emitting units by the first nothing
The double-layer film structure of machine film layer and organic thin film layer composition, can be effectively prevented steam in air and oxygen enter it is organic
Luminescence unit, also, it is thin that the bilayer being made of the first inorganic thin film layer and the second thin film phosphor layer is formed on pixel isolation column
Membrane structure can further prevent water oxygen from entering organic light-emitting units from the both sides of the edge of organic light-emitting units, to organic light emission
Unit plays preferable encapsulation effect.
Also, when flexible display panels crimp or bend, organic thin film layer can play the role of stress release, due to organic
Film layer is not the structure of flood covering, can effectively prevent organic thin film layer and the first inorganic thin film layer caused by crimping or bending
Between separate, avoid thin-film encapsulation layer package failure that OLED device is caused to fail;Further, respectively on each organic light-emitting units
It is rectangular at organic thin film layer, when an organic film fault rupture or when separating with the first organic thin film layer, will not influence other
Partial organic thin film layer is conducive to improve packaging effect, improves the service life of OLED device.
It should be understood that above general description and following detailed description be only it is exemplary and explanatory, not
It can the limitation present invention.
Detailed description of the invention
The drawings herein are incorporated into the specification and forms part of this specification, and shows and meets implementation of the invention
Example, and be used to explain the principle of the present invention together with specification.
Fig. 1 is the cross section structure schematic diagram of the flexible display panels shown in one embodiment of the invention;
Fig. 2 is the cross section structure schematic diagram of the flexible display panels shown in another embodiment of the present invention;
Fig. 3 is the work flow diagram of the preparation method of the flexible display panels shown in one embodiment of the invention.
Specific embodiment
Example embodiments are described in detail here, and the example is illustrated in the accompanying drawings.Following description is related to
When attached drawing, unless otherwise indicated, the same numbers in different drawings indicate the same or similar elements.Following exemplary embodiment
Described in embodiment do not represent all embodiments consistented with the present invention.On the contrary, they be only with it is such as appended
The example of device and method being described in detail in claims, some aspects of the invention are consistent.
The flexible display panels of thin-film package are used at present, and flexible display panels are curved by repeatedly crimping or folding repeatedly
It rolls over, the organic thin film layer and inorganic thin film in thin-film encapsulation layer are easily separated, cause thin-film encapsulation layer package failure.
Accordingly, the embodiment of the present invention provides a kind of flexible display panels, and shown referring to Fig.1, which includes:
Flexible substrate 10;
Multiple pixel isolation columns 20 and multiple organic light-emitting units 30, each organic light-emitting units are formed in flexible substrate 10
30 between two adjacent pixel isolation columns 20;
It is inorganic that the side of the separate flexible substrate 10 of each pixel isolation column 20 and each organic light-emitting units 30 is formed with first
Film layer 41;
In the side of the separate flexible substrate 10 of the first inorganic thin layer 41 with each 30 corresponding region of organic light-emitting units
It is formed with organic thin film layer 42;
In the side shape of the separate flexible substrate 10 of the first inorganic thin layer 41 with each 20 corresponding region of pixel isolation column
At there is the second inorganic thin film layer 43.
Flexible substrate is the substrate made of flexible material, and flexible material is, for example, polyimides PI
(Polyimide, abbreviation PI) polymer, polycarbonate (Polycarbonate, abbreviation PC) resin, also referred to as
PC plastic, poly terephthalic acid class PET (Polyethylene terephthalate, abbreviation PET) plastics etc..
Above-mentioned flexible substrate is disposed thereon each structure for carrying, for example, each pixel isolation column, each organic light-emitting units,
First inorganic thin film layer, organic thin film layer and second inorganic thin film layer etc..
Organic light-emitting units are the minimum luminescence unit to be formed on flexible substrates, and each organic light-emitting units can emit list
The light of one color can be different by multiple luminescent colors for for carrying out the flexible display panels that colour picture is shown
Organic light-emitting units form a pixel unit, and being shone by one or more organic light-emitting units in control pixel unit can
Color needed for display, can realize that colour picture is shown accordingly.
As shown in Figure 1, organic light-emitting units 30 may include each layer of Organic Light Emitting Diode OLED 31, can also wrap
Thin film transistor array layer 32 is included, thin film transistor array layer is the thin film transistor (TFT) for controlling organic light-emitting diode
Each layer, for Organic Light Emitting Diode for example including anode, organic luminous layer and cathode etc., organic luminous layer may include shining
Layer, can also include hole injection layer, hole transmission layer, electronic barrier layer, hole blocking layer, electron transfer layer, electron injection
Layer in one layer or multilayer combination;Thin film transistor array layer is for example including grid layer, gate insulation layer, active layer, source and drain
Pole layer and flatness layer etc..
Pixel isolation column is formed between every two adjacent pixel isolation columns for limiting organic light-emitting units region
There are an organic light-emitting units, organic light-emitting units region is light emitting region.
The first inorganic thin film layer is covered on pixel isolation layer and organic light-emitting units, the first inorganic thin film layer is formed in picture
The surface of plain separation layer and organic light-emitting units far from flexible substrate side, the first inorganic thin film layer are covered on each pixel isolation
On layer and organic light-emitting units, the first inorganic thin film layer is flood cover type structure, is formed in entire flexible substrate.
Organic thin film layer be located at on the first inorganic thin film of each organic light-emitting units corresponding region, i.e. organic thin film layer position
In a side surface of first inorganic thin film far from flexible substrate, and it is located at each organic light-emitting units region.
Second inorganic thin film layer is located at on the first inorganic thin film of each pixel isolation column corresponding region, i.e., second is inorganic thin
Film layer is located at a side surface of first inorganic thin film far from flexible substrate, and is located at each pixel isolation column region.
For Organic Light Emitting Diode OLED, organic luminous layer therein is more sensitive to steam and oxygen, and nothing
Machine film layer, which has, preferably to block water oxygen performance, therefore, a flood the is covered on pixel isolation column and organic light-emitting units
One inorganic thin film layer plays the role of obstructing steam and oxygen, to protect OLED device.
Organic thin film layer has preferable toughness and elasticity, is conducive to deformational stress when dispersion curling or bending, and rise
To release stress and the effect of dust is swept along, therefore further forms organic thin film layer above each organic light-emitting units, and
And organic thin film layer is not the structure of flood covering, only above organic light-emitting units;And in pixel isolation column corresponding region
Top is formed with the second inorganic thin film layer, due to two adjacent organic light-emitting units by pixel isolation intercolumniation every, the
Two inorganic thin film layers and organic thin film layer form the structure being spaced apart, and are carried out by the second inorganic thin film layer to organic thin film layer
Segmentation.
Seen from the above description, the flexible display panels of the present embodiment are formed with by first on each organic light-emitting units
The double-layer film structure of inorganic thin film layer and organic thin film layer composition, steam and the oxygen entrance that can be effectively prevented in air have
Machine luminescence unit, also, the bilayer being made of the first inorganic thin film layer and the second thin film phosphor layer is formed on pixel isolation column
Membrane structure can further prevent water oxygen from entering organic light-emitting units from the both sides of the edge of organic light-emitting units, to organic hair
Light unit plays preferable encapsulation effect.
Also, when flexible display panels crimp or bend, organic thin film layer can play the role of stress release, due to organic
Film layer is not the structure of flood covering, can effectively prevent organic thin film layer and the first inorganic thin film layer caused by crimping or bending
Between separate, and organic thin film layer is not easy to break, avoids thin-film encapsulation layer package failure that OLED device is caused to fail;Further,
Form organic thin film layer above each organic light-emitting units respectively, when an organic film fault rupture or with the first organic film
When layer separation, the organic thin film layer of other parts will not influence, be conducive to improve packaging effect, that improves OLED device uses the longevity
Life.
It is shown referring to Fig.1 in an optional embodiment, the first inorganic thin film layer 41 and the second inorganic thin film layer 43
It is also formed in the side of each pixel isolation column 20 of the marginal position close to flexible substrate 10.
Each pixel isolation column close to the edge of flexible substrate, finger-type in all insulated columns on flexible substrates at being located at
The pixel isolation column of outermost peripheral edge, for example, each pixel shown in Fig. 1, positioned at 10 leftmost side of flexible substrate and the rightmost side
Insulated column 20, the material of these pixel isolation columns 20 are usually organic material, although rising to a certain extent to steam and oxygen
To barrier effect, but the organic material oxygen effect that blocks water is limited, passes through each pixel isolation column side at the edge close to flexible substrate
Face forms the first inorganic thin film layer and the second inorganic thin film layer, and steam and oxygen can be effectively prevent through the side of flexible display panels
Edge enters inside OLED device and OLED device is caused to fail, and further improves packaging effect.
The surface of the separate flexible substrate side of pixel isolation column can be can be described as upper surface, the side of pixel isolation column refers to
Positioned at the surface of pixel isolation column side, as shown in Figure 1, other pixels other than outermost peripheral edge pixel isolation column 20 every
Side from column 20 can be contacted with each layer of Organic Light Emitting Diode 31, and it is inorganic not will form the first inorganic thin film layer 41 and second
Therefore film layer 43 is only formed with the first nothing in the side of each pixel isolation column 20 of the marginal position close to flexible substrate 10
Machine film layer 41 and the second inorganic thin film layer 43.
The side close to the pixel isolation column 20 of the marginal position of flexible substrate 10 is closer to 10 edge of flexible substrate
The surface of side, such as the side are position shown in dotted line frame A in Fig. 1.
Above-mentioned the first inorganic thin film layer and the second inorganic thin film layer material can for example be selected from aluminium oxide, zinc oxide, oxygen
Change the combination of one or more of titanium, silica, silicon nitride and zirconium oxide;The material of organic thin film layer can be for example selected from
The combination of one or more of polyvinyl alcohol, urethane acrylate polymer, polyimide resin.
In some instances, as shown in Fig. 2, the separate flexible substrate of each organic thin film layer 42 and each second inorganic thin layer 43
10 side is also covered with protection diaphragm 50.
The first inorganic thin film layer is covered on pixel isolation layer and organic light-emitting units, the first inorganic thin film layer is located at pixel
The surface of separation layer and organic light-emitting units far from flexible substrate side, the first inorganic thin film layer are covered on each pixel isolation layer
On each organic light-emitting units, the first inorganic thin film layer is flood cover type structure, is formed in entire flexible substrate.
It is formed with organic thin film layer in the region that the first inorganic thin film layer corresponds to each organic light-emitting units, it is inorganic first
The region that film layer corresponds to each pixel isolation column is formed with the second inorganic thin film layer, in each organic thin film layer and each second inorganic
Covering protection diaphragm in film layer, protection diaphragm are flood cover type structure, are formed in entire flexible substrate, and protective film is arranged
Piece can play a protective role to organic light-emitting units, further prevent steam and oxygen enters inside OLED device.
Protecting diaphragm can be organic diaphragm or glass membrane (for example, ultra-thin glass), protect the thickness of diaphragm usual
It is relatively thin, it is the micron order of magnitude, it is ensured that the flexible effect of flexible display panels can omit cover board by setting protection diaphragm
Glass simplifies the preparation process of display panel, reduces cost.
Can be under the conditions of being lower than set temperature (such as less than 100 degrees Celsius), i.e., it, will be certain by the way of low temperature engagement
The protection diaphragm of thickness and the surface of each second inorganic thin film layer are bonded, shadow of the temperature to OLED device when reducing bonding
It rings.
In an optional embodiment, as shown in Fig. 2, 10 side of separate flexible substrate of each organic thin film layer 42
The surface of surface and 10 side of separate flexible substrate of each second inorganic thin film layer 43 is in same plane.
In the present embodiment, referring to shown in Fig. 2, the upper surface of each organic thin film layer 42 and each second inorganic thin film layer 43 it is upper
Surface is in same plane, i.e., the upper surface of each organic thin film layer 42 and the upper surface of each second inorganic thin film layer 43 are to flush
, flat surfaces are formed, helps to ensure that and forms the effect of other film layer structures in flat surfaces, for example, guaranteeing each second nothing
Bonding effect between machine thin layer 43 and protection diaphragm 50.
Several pixel isolation columns and several organic light emissions are shown it should be noted that being only illustrative in Fig. 1 and Fig. 2
Unit is conventionally formed with the large number of pixel isolation column of matrix arrangement and organic in practical applications on underlay substrate
Luminescence unit does not limit the particular number present invention of pixel isolation column and organic light-emitting units.
It can also include other necessary film layers in flexible display panels, referring to shown in Fig. 2, for example, in flexible substrate 10
Can also be formed with other film layers 60 between each organic light-emitting units and each pixel isolation column, the film layer be, for example, cache layer or
Other film layers.
The embodiment of the invention also provides a kind of preparation methods of flexible display panels, as shown in figure 3, this method comprises:
Step S10, a flexible substrate is provided;
Step S20, multiple pixel isolation columns and multiple organic light-emitting units, each organic light emission list are formed on flexible substrates
Member is between two adjacent pixel isolation columns;
Specifically, pixel isolation layer can be formed on flexible substrates, then pixel isolation layer is patterned, is removed
The pixel isolation layer in pre-formed each organic light-emitting units region, retains the pixel isolation layer of other parts, forms each pixel isolation
Column;
Organic light-emitting units may include each layer of Organic Light Emitting Diode OLED, can also include thin film transistor (TFT) array
Layer, the step of forming each organic light-emitting units, can realize that step repeats herein using existing method and technique.
Step S30, the first nothing is formed in the side of the separate flexible substrate of each pixel isolation column and each organic light-emitting units
Machine film layer;
Specifically, the mode of coating or printing etc. the shape on each pixel isolation column and each organic light-emitting units can be used
At one layer of inorganic material layer, then inorganic material layer is solidified, forms the first inorganic thin film layer.
Step S40, the one of the separate flexible substrate of the first inorganic thin layer with each organic light-emitting units corresponding region
Side forms organic thin film layer;
Specifically, organic material layer can be formed on the first inorganic thin layer, then organic material layer is patterned,
Retain the organic material layer on the first inorganic thin layer with each organic light-emitting units corresponding region, removes the organic of other regions
Material layer makes to form organic thin film layer on the first inorganic thin layer of each organic light-emitting units corresponding region.
Or organic film directly is being formed with printing on the first inorganic thin layer of each organic light-emitting units corresponding region
Layer.
Step S50, in the side of the separate flexible substrate of the first inorganic thin layer with each pixel isolation column corresponding region
Form the second inorganic thin film layer;
Specifically, inorganic material layer can be formed on each first inorganic thin layer and each organic thin film layer, then to inorganic
Material layer is patterned, and retains the inorganic material layer on the first inorganic thin layer with each pixel isolation column corresponding region,
The inorganic material layer for removing other regions makes to form the second nothing on the first inorganic thin layer of each pixel isolation column corresponding region
Machine film layer.
Or directly inorganic thin with printing formation second on the first inorganic thin layer of each pixel isolation column corresponding region
Film layer.
Optionally, first inorganic thin film layer and second inorganic thin film layer are also formed in close to the flexible substrate
Marginal position each pixel isolation column side.
In some instances, this method further include:
It is formed and is protected in the side far from the flexible substrate of each organic thin film layer and each second inorganic thin layer
Cuticula piece.
Further, under the conditions of being lower than set temperature, the protection diaphragm and each second inorganic thin layer are bonded.
It is above-mentioned to form pixel isolation column, organic light-emitting units, the first inorganic thin film layer, organic thin film layer on flexible substrates
Existing technique can be used with the technique of the second inorganic thin film layer to realize, for example, for forming pixel isolation column, first inorganic thin
For anode and cathode in film layer, organic thin film layer, the second inorganic thin film layer and organic light-emitting units, patterning processes can be used
Or printing technology etc., patterning processes for example, the coating of photoresist, exposure, development, the removing of etching and/or photoresist
Process;Vacuum evaporation process or printing etc. can be used in the technique of organic luminous layer for being formed in organic light-emitting units, specifically
Details are not described herein again for process.
The embodiment of the invention also provides a kind of flexible display apparatus, comprising: flexibility described in any of the above-described embodiment is aobvious
Show panel.
OLED display described above includes flexible display panels described in above-described embodiment.The display device can be made
For Electronic Paper, mobile phone, tablet computer, television set, display, laptop, Digital Frame, navigator, wearable device etc.
Any products or components having a display function.
Those skilled in the art are considering specification and after practicing disclosure disclosed herein, will readily occur to of the invention its
Its embodiment.The present invention is directed to cover any variations, uses, or adaptations of the invention, these modifications, purposes or
Person's adaptive change follows general principle of the invention and including the undocumented common knowledge in the art of the present invention
Or conventional techniques.The description and examples are only to be considered as illustrative, and true scope and spirit of the invention are by following
Claim is pointed out.
Claims (10)
1. a kind of flexible display panels characterized by comprising
Flexible substrate;
Multiple pixel isolation columns and multiple organic light-emitting units, each organic light-emitting units position are formed in the flexible substrate
Between two adjacent pixel isolation columns;
The side far from the flexible substrate of each pixel isolation column and each organic light-emitting units is formed with the first nothing
Machine film layer;
In the side shape far from the flexible substrate of the first inorganic thin layer with each organic light-emitting units corresponding region
At there is organic thin film layer;
It is formed in the side far from the flexible substrate of the first inorganic thin layer with each pixel isolation column corresponding region
There is the second inorganic thin film layer.
2. panel according to claim 1, which is characterized in that
First inorganic thin film layer and second inorganic thin film layer are also formed in the marginal position close to the flexible substrate
Each pixel isolation column side.
3. panel according to claim 1, which is characterized in that the separate flexible substrate one of each organic thin film layer
The surface of side and the surface far from the flexible substrate side of each second inorganic thin film layer are in same plane.
4. panel according to claim 1, which is characterized in that
The side far from the flexible substrate of each organic thin film layer and each second inorganic thin layer is also covered with protection
Diaphragm.
5. panel according to claim 3, which is characterized in that
The protection diaphragm is organic diaphragm or glass membrane.
6. a kind of preparation method of flexible display panels characterized by comprising
One flexible substrate is provided;
Multiple pixel isolation columns and multiple organic light-emitting units, each organic light-emitting units position are formed in the flexible substrate
Between two adjacent pixel isolation columns;
It is inorganic thin that first is formed in the side far from the flexible substrate of the pixel isolation column and the organic light-emitting units
Film layer;
In the side shape far from the flexible substrate of the first inorganic thin layer with each organic light-emitting units corresponding region
At organic thin film layer;
It is formed in the side far from the flexible substrate of the first inorganic thin layer with each pixel isolation column corresponding region
Second inorganic thin film layer.
7. preparation method according to claim 6, it is characterised in that:
First inorganic thin film layer and second inorganic thin film layer are also formed in the marginal position close to the flexible substrate
Each pixel isolation column side.
8. preparation method according to claim 6, which is characterized in that further include:
Protective film is formed in the side far from the flexible substrate of each organic thin film layer and each second inorganic thin layer
Piece.
9. preparation method according to claim 8, which is characterized in that
Under the conditions of being lower than set temperature, the protection diaphragm and each second inorganic thin layer are bonded.
10. a kind of flexible display apparatus characterized by comprising the described in any item flexible display panels of claim 1-5.
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CN110993655A (en) * | 2019-11-26 | 2020-04-10 | 武汉华星光电半导体显示技术有限公司 | Flexible display panel, flexible display device and manufacturing method of flexible display panel |
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US11374185B2 (en) * | 2019-11-26 | 2022-06-28 | Wuhan China Star Optoelectronics Semiconductor Display Technologies Co., Ltd. | Flexible display panel, flexible display device, and manufacturing method of flexible display panel |
CN114758586A (en) * | 2022-04-22 | 2022-07-15 | 京东方科技集团股份有限公司 | Test element group, display panel, preparation method of display panel and test method |
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