CN109285801B - Method for solving graphite boat pollution of PERC battery with double-sided alumina structure - Google Patents

Method for solving graphite boat pollution of PERC battery with double-sided alumina structure Download PDF

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Publication number
CN109285801B
CN109285801B CN201810724522.4A CN201810724522A CN109285801B CN 109285801 B CN109285801 B CN 109285801B CN 201810724522 A CN201810724522 A CN 201810724522A CN 109285801 B CN109285801 B CN 109285801B
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graphite boat
film layer
pollution
controlling
radio frequency
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CN109285801A (en
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孙涌涛
彭兴
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Hengdian Group DMEGC Magnetics Co Ltd
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Hengdian Group DMEGC Magnetics Co Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating

Abstract

The invention relates to the technical field of PERC solar cell production, in particular to a method for solving the problem of graphite boat pollution of a PERC cell with a double-sided alumina structure, which comprises the following steps: firstly, a silicon nitride film layer is deposited on the surface of the graphite boat, and then a silicon oxide film layer is deposited on the surface of the silicon nitride film layer. The invention utilizes the excellent passivation performance and blocking performance of metal impurities of silicon oxide as the contact isolation layer between the battery piece and the graphite boat, can effectively enhance the passivation and isolation effect of the graphite boat surface film layer on the graphite boat surface metal ions, and prevents the pollution of the graphite boat surface impurities on the silicon chip front side aluminum oxide during back side coating under high temperature condition.

Description

Method for solving graphite boat pollution of PERC battery with double-sided alumina structure
Technical Field
The invention relates to the technical field of PERC solar cell production, in particular to a method for solving the problem of graphite boat pollution of a PERC cell with a double-sided alumina structure.
Background
The PERC battery is taken as an industrial mass production efficient mainstream technology, and the technical core is that aluminum oxide and silicon nitride are deposited on the back surface of a silicon wafer to play the roles of passivating the surface and improving long-wave response, so that the conversion efficiency of the battery is improved.
There are two existing alumina deposition methods: the present invention is directed to an ALD apparatus of NCD company, a korean equipment supplier, which has advantages of high productivity, better film formation uniformity, long maintenance period, etc. The process route is as follows: the method comprises the steps of texturing, diffusing, etching/back polishing, depositing a front silicon nitride film, depositing a back ALD (atomic layer deposition) double-sided aluminum oxide film, depositing a back silicon nitride film (PECVD), grooving by laser, printing by silk screen printing and sintering, wherein the ALD equipment deposits aluminum oxide on two sides, namely, an aluminum oxide film layer is deposited on the back and the front of a silicon wafer simultaneously, when the back of a back procedure is coated, the front aluminum oxide can be in direct contact with a graphite boat, and the aluminum oxide on the layer is not annealed, so that the structural stability is poor, and the battery piece is easily polluted by metal ions and carbon powder particles on the graphite boat under the high-temperature condition during back coating, and the EL pollution of the battery piece is poor.
Disclosure of Invention
The invention provides a method for solving the problem of pollution of impurities on the surface of a graphite boat to aluminum oxide on the front surface of a silicon wafer during back surface coating under a high-temperature condition, and provides a method for solving the problem of pollution of the graphite boat of a PERC battery with a double-sided aluminum oxide structure.
In order to achieve the purpose, the invention adopts the following technical scheme:
a method for solving the problem of graphite boat pollution of a PERC battery with a double-sided alumina structure comprises the following steps: firstly, a silicon nitride film layer is deposited on the surface of the graphite boat, and then a silicon oxide film layer is deposited on the surface of the silicon nitride film layer.
The invention discloses a method for solving the pollution problem of a PERC battery graphite boat with a double-sided alumina structure, namely a novel graphite boat saturation process, which is characterized in that: the excellent metal impurity passivation performance and blocking performance of the silicon oxide are used as an isolation layer in contact between the battery piece and the graphite boat, so that the passivation and isolation effects of a graphite boat surface film layer on metal ions on the graphite boat surface are effectively enhanced, and the pollution of the graphite boat surface impurities on the front side aluminum oxide of the silicon chip during back side coating under a high-temperature condition is prevented.
(1) Feeding the cleaned and dried graphite boat into a PECVD furnace tube, vacuumizing and heating to a process set temperature;
(2) introducing ammonia gas and silane under low pressure, starting a radio frequency power supply, and finishing the deposition of the silicon nitride film layer on the surface layer of the graphite boat within a set time;
(3) introducing laughing gas and silane under low pressure, starting a radio frequency power supply, and finishing the deposition of the silicon oxide film layer on the surface layer of the graphite boat within a set time;
(4) vacuumizing, filling nitrogen for back pressure, and taking out the boat to finish the whole process.
Preferably, in the step (1), the temperature is set to 400 to 500 ℃.
Preferably, in the step (2), the pressure is controlled to be 1300-1800 mT; controlling the flow of ammonia gas to be 4000-8000 sccm; controlling the flow of silane within 400-1000 sccm; controlling the radio frequency power to be 4000-10000W; the setting time is controlled to be 4000-7000 s.
Preferably, in the step (3), the pressure is controlled to be 1300-1800 mT; the flow of the laughing gas is controlled to be 4000-8000 sccm; controlling the flow of silane within 400-1000 sccm; controlling the radio frequency power to be 3000-6000W; the setting time is controlled to be 100-600 s.
After the graphite boat is subjected to saturation treatment by the process, the graphite boat is put into back coating production according to a normal process flow, and data of the graphite boat with bad pollution under the PERC battery piece EL are tracked.
Therefore, the invention has the following beneficial effects: the excellent metal impurity passivation performance and blocking performance of the silicon oxide are used as an isolation layer in contact between the battery piece and the graphite boat, so that the passivation and isolation effects of a graphite boat surface film layer on metal ions on the graphite boat surface are effectively enhanced, and the pollution of the graphite boat surface impurities on the front side aluminum oxide of the silicon chip during back side coating under a high-temperature condition is prevented.
Drawings
FIG. 1 is a schematic view of the structure of the surface film layer of the graphite boat of the present invention.
Detailed Description
The technical solution of the present invention is further specifically described below by using specific embodiments and with reference to the accompanying drawings.
In the present invention, all the equipment and materials are commercially available or commonly used in the art, and the methods in the following examples are conventional in the art unless otherwise specified.
Example 1
(1) Feeding the cleaned and dried graphite boat into a PECVD furnace tube, vacuumizing and heating to 450 ℃;
(2) introducing ammonia gas with the flow rate of 8000sccm and silane with the flow rate of 1000sccm into the tube at the pressure of 1700mT, starting a radio frequency power supply, wherein the radio frequency rate is 10000W, and the time is 4000s, so as to finish the deposition of the silicon nitride film layer on the surface layer of the graphite boat;
(3) under the pressure in the 1700mT tube, introducing laughing gas with the flow rate of 8000sccm and silane with the flow rate of 1000sccm, starting a radio frequency power supply, wherein the emitting frequency is 6000W, and the time is 100s, so that the deposition of the silicon oxide film layer on the surface layer of the graphite boat is completed;
(4) vacuumizing, filling nitrogen for back pressure, and taking out the boat to finish the whole process.
The structure of the surface film layer of the graphite boat is shown in figure 1, after the graphite boat is subjected to saturation treatment by the process, the graphite boat is put into back surface coating production according to a normal process flow, the EL performance of the battery piece is tracked, and the pollution of the graphite boat does not occur in the whole boat 308.
Example 2
(1) Feeding the cleaned and dried graphite boat into a PECVD furnace tube, vacuumizing and heating to 500 ℃;
(2) introducing ammonia gas with the flow rate of 6000sccm and 600sccm silane under the pressure in a 1700mT tube, starting a radio frequency power supply, wherein the radio frequency rate is 8000W, and the time is 5500s, so as to finish the deposition of the silicon nitride film layer on the surface layer of the graphite boat;
(3) under the pressure in the 1700mT tube, introducing laughing gas with the flow rate of 6000sccm and 600sccm silane, starting a radio frequency power supply, wherein the radio frequency rate is 5000W, and the time is 300s, so that the deposition of the silicon oxide film layer on the surface layer of the graphite boat is completed;
(4) vacuumizing, filling nitrogen for back pressure, and taking out the boat to finish the whole process.
The structure of the surface film layer of the graphite boat is shown in figure 1, after the graphite boat is subjected to saturation treatment by the process, the graphite boat is put into back surface coating production according to a normal process flow, the EL performance of the battery piece is tracked, and the pollution of the graphite boat does not occur in the whole boat 308.
Example 3
(1) Feeding the cleaned and dried graphite boat into a PECVD furnace tube, vacuumizing and heating to 400 ℃;
(2) introducing ammonia gas with the flow rate of 4000sccm and silane with the flow rate of 600sccm into the 1700mT tube under the pressure, starting a radio frequency power supply, wherein the radio frequency power supply has the radio frequency of 6000W, and the time is 5500s, so that the deposition of the silicon nitride film layer on the surface layer of the graphite boat is completed;
(3) under the pressure in the 1700mT tube, introducing laughing gas with the flow rate of 4000sccm and 600sccm silane, starting a radio frequency power supply, wherein the radio frequency power is 4000W, and the time is 500s, so that the deposition of the silicon oxide film layer on the surface layer of the graphite boat is completed;
(4) vacuumizing, filling nitrogen for back pressure, and taking out the boat to finish the whole process.
The structure of the surface film layer of the graphite boat is shown in figure 1, after the graphite boat is subjected to saturation treatment by the process, the graphite boat is put into back surface coating production according to a normal process flow, the EL performance of the battery piece is tracked, and the pollution of the graphite boat does not occur in the whole boat 308.
Comparative example
(1) Feeding the cleaned and dried graphite boat into a PECVD furnace tube, vacuumizing and heating to 450 ℃;
(2) introducing ammonia gas with the flow rate of 8000sccm and silane with the flow rate of 1000sccm into the tube at the pressure of 1700mT, starting a radio frequency power supply, wherein the radio frequency rate is 10000W, and the time is 5500s, so as to finish the deposition of the silicon nitride film on the surface layer of the graphite boat;
(3) vacuumizing, filling nitrogen for back pressure, and taking out the boat to finish the whole process.
The comparative example does not have the step of depositing and manufacturing a silicon oxide film on the surface of the graphite boat, after the process is finished, the back coating production is carried out according to the normal process flow, the EL performance of the battery piece is tracked, and 200 graphite boat print pollution pieces appear in 308 whole boat.
Through comparison between examples 1-3 and a comparative example, the invention further proves that the excellent passivation performance and barrier performance of metal impurities of silicon oxide are used as an isolation layer in contact between the battery piece and the graphite boat, the passivation and isolation effects of the surface film layer of the graphite boat on the metal ions on the surface of the graphite boat can be effectively enhanced, and the pollution of the impurities on the surface of the graphite boat on the aluminum oxide on the front surface of the silicon piece during back surface coating under a high-temperature condition is prevented.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention in any way, and other variations and modifications may be made without departing from the spirit of the invention as set forth in the claims.

Claims (1)

1. A method for solving the problem of graphite boat pollution of a PERC battery with a double-sided alumina structure is characterized by comprising the following steps: firstly, depositing a silicon nitride film on the surface of the graphite boat, and then depositing a silicon oxide film on the surface of the silicon nitride film;
the method comprises the following steps:
(1) feeding the cleaned and dried graphite boat into a PECVD furnace tube, vacuumizing and heating to the process set temperature of 400-500 ℃;
(2) introducing ammonia gas and silane under low pressure, starting a radio frequency power supply, and finishing the deposition of the silicon nitride film layer on the surface layer of the graphite boat within a set time; controlling the pressure to be 1300-1800 mT; controlling the flow of ammonia gas to be 4000-8000 sccm; controlling the flow of silane within 400-1000 sccm; controlling the radio frequency power to be 4000-10000W; setting time to be controlled at 4000-7000 s;
(3) introducing laughing gas and silane under low pressure, starting a radio frequency power supply, and finishing the deposition of the silicon oxide film layer on the surface layer of the graphite boat within a set time; controlling the pressure to be 1300-1800 mT; the flow of the laughing gas is controlled to be 4000-8000 sccm; controlling the flow of silane within 400-1000 sccm; controlling the radio frequency power to be 3000-6000W; setting time to be controlled within 100-600 s;
(4) vacuumizing, filling nitrogen for back pressure, and taking out the boat to finish the whole process.
CN201810724522.4A 2018-07-04 2018-07-04 Method for solving graphite boat pollution of PERC battery with double-sided alumina structure Active CN109285801B (en)

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CN113481487A (en) * 2021-07-06 2021-10-08 横店集团东磁股份有限公司 Solar cell and back surface PECVD method and application thereof
CN114038937A (en) * 2021-10-09 2022-02-11 天合光能(宿迁)光电有限公司 Graphite boat saturation process for improving click printing of perc single crystal battery
CN114107955B (en) * 2021-11-18 2022-12-20 横店集团东磁股份有限公司 Graphite boat pretreatment process for improving back passivation uniformity of two-in-one equipment

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Denomination of invention: A Method for Solving the Pollution of Graphite Boats in Double sided Alumina Structure PERC Batteries

Effective date of registration: 20230522

Granted publication date: 20210514

Pledgee: Dongyang Branch of China Construction Bank Co.,Ltd.

Pledgor: HENGDIAN GROUP DMEGC MAGNETICS Co.,Ltd.

Registration number: Y2023330000949