CN109276976A - A kind of recyclable device and method of sulfur hexafluoride and nitrogen mixed gas - Google Patents

A kind of recyclable device and method of sulfur hexafluoride and nitrogen mixed gas Download PDF

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Publication number
CN109276976A
CN109276976A CN201811479346.9A CN201811479346A CN109276976A CN 109276976 A CN109276976 A CN 109276976A CN 201811479346 A CN201811479346 A CN 201811479346A CN 109276976 A CN109276976 A CN 109276976A
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sulfur hexafluoride
gas
outlet
solenoid valve
processing device
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CN109276976B (en
Inventor
马凤翔
祁炯
王刘芳
袁小芳
俞登洋
朱峰
刘子恩
陈英
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State Grid Corp of China SGCC
Electric Power Research Institute of State Grid Anhui Electric Power Co Ltd
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State Grid Corp of China SGCC
Electric Power Research Institute of State Grid Anhui Electric Power Co Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
    • B01D53/228Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion characterised by specific membranes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
    • B01D53/225Multiple stage diffusion
    • B01D53/226Multiple stage diffusion in serial connexion
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
    • B01D53/229Integrated processes (Diffusion and at least one other process, e.g. adsorption, absorption)
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004Gaseous mixtures, e.g. polluted air
    • G01N33/0009General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
    • G01N33/0044Sulphides, e.g. H2S
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2256/00Main component in the product gas stream after treatment
    • B01D2256/10Nitrogen
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2257/00Components to be removed
    • B01D2257/30Sulfur compounds

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Food Science & Technology (AREA)
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  • General Health & Medical Sciences (AREA)
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  • Treating Waste Gases (AREA)

Abstract

The present invention discloses the recyclable device and method of a kind of sulfur hexafluoride and nitrogen mixed gas.The apparatus structure is as follows: the entrance access sulfur hexafluoride and nitrogen mixed gas, the first outlet of separator of separator are connect with the entrance of sulfur hexafluoride liquefying plant, and the outlet of sulfur hexafluoride liquefying plant is connect with sulfur hexafluoride storage device;The second outlet of separator and the entrance of exhaust gas processing device connect;The outlet of exhaust gas processing device is connect with offgas outlet, the first solenoid valve and tail gas recycle access are provided on the connecting path of exhaust gas processing device and offgas outlet, tail gas monitoring device is set to the exit of exhaust gas processing device, for monitoring the concentration of sulfur hexafluoride in exit, and according to the on off operating mode of concentration of sulfur hexafluoride adjusting the first solenoid valve and second solenoid valve.The present invention can be with pernicious gas content in accurate measurements tail gas, it is ensured that exhaust emissions reaches safety standard, avoids the personal injury and environmental pollution of field personnel.

Description

A kind of recyclable device and method of sulfur hexafluoride and nitrogen mixed gas
Technical field
The present invention relates to gas recycling fields, more particularly to the recyclable device of a kind of sulfur hexafluoride and nitrogen mixed gas And method.
Background technique
Sulfur hexafluoride (SF6) gas because of its excellent insulation arc extinction performance, is widely used in power industry.However hexafluoro The greenhouse effects for changing sulphur are significant, are to be prohibited one of 6 kinds of greenhouse gases of discharge, thus need to be subject in use stringent Control.To adapt to new International Environmental Protection requirement, greenhouse gas emission is reduced, domestic and international power grid enterprises start using SF6/N2Mixing The pure six-component force balance gas of gas instead, to reduce sulfur hexafluoride gas dosage.
In the application, work as SF6/N2When mixed gas electrical equipment is overhauled, disintegrates or is retired, it is necessary to in equipment SF6Mixed gas is recycled.Pure SF6Gas is easy liquefaction, SF6Gas is generally canned in liquid form when recycling Storage.And because containing and SF in the mixed gas6Considerable amount of N2When, because of N2It is difficult to liquefy under normal conditions, it is difficult to direct liquid Change recycling, it is necessary to use dedicated SF6/N2Mixed gas recyclable device.SF6/N2Mixed gas recyclable device quickly will at the scene SF6And N2Separation, SF after separation6The recycling of direct liquefaction filling bottle, N2Wherein remaining SF after processing6Less than safety limit It can directly be discharged when (1000ppm).Standard GB/T/T 28534-2012 is " six in high-tension switch gear and control equipment Sulfur fluoride (SF6) gas release to environment and health influence " in require SF in working environment6The maximum allowable limit value of gas For 1000ppm.
Existing SF6/N2The separative efficiency of mixed gas recyclable device is by items such as polymeric membrane two sides gas pressure, temperature Part influences very big.It under complicated work on the spot environment, often will appear the fluctuation of gaseous mass after separation, or even tail gas occur Middle SF6The exceeded phenomenon of content, to the tail gas (N of discharge2) in SF6Content can not determine, not can guarantee discharged N2Meet peace Full discharge standard endangers Field Force's safety, influences atmospheric environment.
Summary of the invention
The object of the present invention is to provide the recyclable devices and method of a kind of sulfur hexafluoride and nitrogen mixed gas, to guarantee to arrange The N put2Meet safety dumping standard.
To achieve the above object, the present invention provides following schemes:
A kind of recyclable device of sulfur hexafluoride and nitrogen mixed gas, comprising: separator, sulfur hexafluoride liquefying plant, Sulfur hexafluoride storage device, exhaust gas processing device, tail gas monitoring device, the first solenoid valve, offgas outlet, second solenoid valve and One compressor;
The entrance access sulfur hexafluoride and nitrogen mixed gas of the separator, the first outlet of the separator with The entrance of the sulfur hexafluoride liquefying plant connects, and the outlet of the sulfur hexafluoride liquefying plant and sulfur hexafluoride storage fill Set connection;The second outlet of the separator is connect with the entrance of the exhaust gas processing device;The exhaust gas processing device Outlet is connect with the offgas outlet, and the exhaust gas processing device exporting and being provided on the connecting path of the offgas outlet First solenoid valve;The separator is used to separate the sulfur hexafluoride gas in the sulfur hexafluoride and nitrogen mixed gas Body, the sulfur hexafluoride gas after separation enters the sulfur hexafluoride liquefying plant by the first outlet, remaining after separation Mixed gas enters the exhaust gas processing device by the second outlet;
The exhaust gas processing device is for handling the sulfur hexafluoride gas in mixed gas;The vent gas treatment dress Tail gas recycle access, the entrance of the tail gas recycle access are additionally provided on the connecting path of the outlet and the offgas outlet set It accesses between the outlet of the exhaust gas processing device and first solenoid valve, described in the outlet access of the tail gas recycle access Between the second outlet of separator and the entrance of the exhaust gas processing device;The entrance of the tail gas recycle access and outlet Between be disposed with the second solenoid valve and first compressor;
The tail gas monitoring device is set to the exit of the exhaust gas processing device, for monitoring the vent gas treatment dress The concentration of sulfur hexafluoride in exit is set, and adjusts described first according to the concentration of sulfur hexafluoride in the exhaust gas processing device exit The on off operating mode of solenoid valve and the second solenoid valve;The on off operating mode phase of first solenoid valve and the second solenoid valve Instead.
Optionally, the separator is hollow-fibre membrane.
Optionally, the sulfur hexafluoride liquefying plant specifically includes: the second compressor and refrigeration machine;Six after the separation Sulfur fluoride gas is successively liquefied as liquid by the compressor and the refrigeration machine.
Optionally, the exhaust gas processing device is seperation film or adsorption tanks;The seperation film is big to the infiltration rate of nitrogen In the infiltration rate to sulfur hexafluoride;The adsorption tanks are for adsorbing sulfur hexafluoride gas.
Optionally, the tail gas monitoring device obtains the to be measured of the exhaust gas processing device exit by bypassing pump suction type Gas.
Optionally, the tail gas monitoring device includes electric air pump, gas sample cell, gas sensor, data communication network Network and host;The electric air pump is used to the under test gas in the exhaust gas processing device exit being pumped into the gas sample cell In;The gas sensor is set in the gas sample cell, for the concentration to sulfur hexafluoride in the under test gas into Row detection;The host receives the concentration numbers of the sulfur hexafluoride of the gas sensor detection by the data communication network According to;The host is used to adjust first solenoid valve and the second solenoid valve according to the concentration data of the sulfur hexafluoride On off operating mode.
Optionally, the recyclable device of the sulfur hexafluoride and nitrogen mixed gas further includes display screen, the display screen Data control terminal is connect with the host, concentration data of the display screen for sulfur hexafluoride described in real-time display.
The present invention also provides the recovery methods of a kind of sulfur hexafluoride and nitrogen mixed gas, comprising:
Sulfur hexafluoride is separated with the sulfur hexafluoride gas in nitrogen mixed gas;
Sulfur hexafluoride gas after separation is liquefied, and the sulfur hexafluoride after liquefaction is stored to sulfur hexafluoride and is stored Device;
Mixed gas remaining after separation is subjected to vent gas treatment in exhaust gas processing device, obtains that treated wait be vented Body;
Obtain the concentration of sulfur hexafluoride wait be vented in body;
Whether the judgement concentration of sulfur hexafluoride wait be vented in body is greater than given threshold;
If it is, closing the first solenoid valve at offgas outlet, the second solenoid valve on tail gas recycle access is opened, it will The body further progress vent gas treatment to be vented;
If it is not, then opening the first solenoid valve at offgas outlet, the body to be vented is arranged by the offgas outlet Out, and the second solenoid valve on the tail gas recycle access is closed.
Optionally, the concentration of sulfur hexafluoride wait be vented in body is obtained, later further include:
The concentration of sulfur hexafluoride wait be vented in body is shown on display screen.
The specific embodiment provided according to the present invention, the invention discloses following technical effects:
The invention firstly uses separators and exhaust gas processing device to SF6/N2Sulfur hexafluoride gas in mixed gas into Row processing, and then utilize tail gas monitoring device accurate measurements SF6/N2Mixed gas after processing wait be vented pernicious gas in body The content of sulfur hexafluoride, and then discharge and reprocessing process can be automatically controlled according to monitoring data, it is ensured that exhaust emissions can Reach safety standard, avoids the personal injury and environmental pollution of field personnel.
Detailed description of the invention
It in order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, below will be to institute in embodiment Attached drawing to be used is needed to be briefly described, it should be apparent that, the accompanying drawings in the following description is only some implementations of the invention Example, for those of ordinary skill in the art, without any creative labor, can also be according to these attached drawings Obtain other attached drawings.
Fig. 1 is the structural schematic diagram of the recyclable device of sulfur hexafluoride of the present invention and nitrogen mixed gas;
Fig. 2 is the structural representation of tail gas monitoring device in the recyclable device of sulfur hexafluoride of the present invention and nitrogen mixed gas Figure;
Fig. 3 is the flow diagram of the recovery method of sulfur hexafluoride of the present invention and nitrogen mixed gas.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other Embodiment shall fall within the protection scope of the present invention.
In order to make the foregoing objectives, features and advantages of the present invention clearer and more comprehensible, with reference to the accompanying drawing and specific real Applying mode, the present invention is described in further detail.
Fig. 1 is the structural schematic diagram of the recyclable device of sulfur hexafluoride of the present invention and nitrogen mixed gas.As shown in Figure 1, packet Include: separator 1, sulfur hexafluoride liquefying plant 2, sulfur hexafluoride storage device 3, exhaust gas processing device 4, tail gas monitoring device 5, First solenoid valve 6, offgas outlet 7, second solenoid valve 8 and the first compressor 9.
The entrance of the separator 1 accesses sulfur hexafluoride (SF6) and nitrogen (N2) mixed gas;The separator 1 is used In to SF6/N2SF in mixed gas6Gas is separated.Separator carries out SF by polymeric membrane6And N2Separation, point From rear SF6Concentration is greater than 95%.SF in the present invention6Gas and N2Separator using nonporous membrane (also known as homogeneous membrane) Penetration mechanism.Gas component under pressure, is dissolved in the surface of film in the high-pressure side of film first, then along dense in film Gradient absorption, dissolution, diffusion, precipitation, evolution are spent, the other side (infiltration 13 side of mouth) of film is transmitted to, realizes two kinds of component gas Separation.
Table 1 divides perforated membrane gas separation membrane characteristic
From above-mentioned table 1 as it can be seen that in order to improve the gas transit dose of organic nonporous membrane, it is necessary to increase infiltration coefficient, pressure Difference and film surface product and reduction film thickness.Herein, it in order to improve the separative efficiency of mixed gas, has to select infiltration coefficient The biggish film of difference, that is, wish that film has higher selectivity and biggish permeability to component A a certain in gaseous mixture, and to another group B only has lower selectivity and lesser permeability, could obtain relatively satisfactory purification effect in this way.
In order to increase UF membrane surface area, membrane separator (assembly unit) structure mountain plate and frame is increased to spiral wound, pipe Formula is so that hollow fiber form, and every to improve a kind of structure, separation surface area increases in geometric progression amount, with hollow fiber form seperation film Largest surface area.
Select hollow-fibre membrane in the present invention, material is polycarbonate, the membrane in use, predominant gas with The gas separation factor α that need to be separated, which is greater than 3, to be separated, (the unit 10 of seepage velocity parameter list 2 of predominant gas- 6scc/cm2CmHgsec):
2 predominant gas infiltration rate table of table
Gas H2O_V SO2 H2 He H2S CO2 MeOH O2 Ar
Infiltration rate 2000 400 210 150 110 81 20.8 18 6.9
Gas C2H4 CO CH4 N2 C2H6 Xe SF6
Infiltration rate 4 4.17 2.4 2.4 1.4 0.5 0.04
When mix insulation gas quickly recycles, predominant gas is by SF6And N2Composition, there are also some other educt gas or Impurity, these gases and SF6Separation factor α such as table 3:
3 SF of table6The separation factor of gas and relevant gaseous components
Gas H2O_V SO2 H2S CO2 CO N2
Separation factor 50000 10000 2750 2025 104.25 60
As shown in Table 3, these gas separation factors are much larger than 3, can using the membrane separator with the hollow-fibre membrane High-efficient purification separates SF6With other foreign gases.
The first outlet of the separator 1 is connect with the entrance of the sulfur hexafluoride liquefying plant 2, the sulfur hexafluoride The outlet of liquefying plant 2 is connect with the sulfur hexafluoride storage device 3.Sulfur hexafluoride gas after separation by first outlet into Enter sulfur hexafluoride liquefying plant 2 to liquefy, then be stored by sulfur hexafluoride storage device 3.Sulfur hexafluoride liquefying plant 2 includes Second compressor and refrigeration machine;Concentration is greater than 95% SF after separation6Gas successively passes through compressor and refrigeration machine, through being overpressurized Freezing can liquefy, stored in sulfur hexafluoride storage device 3 with liquid, when run up to it is a certain amount of after be transferred in steel cylinder.
The second outlet of the separator 1 is connect with the entrance of the exhaust gas processing device 4, after separator 1 separates Remaining mixed gas enters the exhaust gas processing device 4 by second outlet.Remaining mixed gas (is largely after separation N2) in SF6Residual volume is higher, is unable to direct emission, is reprocessed in exhaust gas processing device 4.Exhaust gas processing device 4 is separation Film or adsorption tanks.Seperation film increases level-one macromolecule membrane, using seperation film to SF6And N2Infiltration rate difference (seperation film It is greater than the infiltration rate to sulfur hexafluoride to the infiltration rate of nitrogen), by SF6It is retained down, to make tail gas N2Middle SF6Contain Amount is greatly reduced, and reaches processing intent.Adsorption tanks, i.e., using adsorbent to SF6Selective absorption, by SF6It removes, it is also reachable To vent gas treatment purpose.
The outlet of the exhaust gas processing device 4 is connect with the offgas outlet 7, the outlet of the exhaust gas processing device 4 with First solenoid valve 6 is provided on the connecting path of the offgas outlet 7.The outlet of the exhaust gas processing device 4 with it is described Tail gas recycle access is additionally provided on the connecting path of offgas outlet 7, the entrance of the tail gas recycle access accesses the tail gas Between the outlet of processing unit 4 and first solenoid valve 6, the outlet of the tail gas recycle access accesses the separator 1 Second outlet and the exhaust gas processing device 4 entrance between;Between the entrance and outlet of the tail gas recycle access successively It is provided with the second solenoid valve 8 and first compressor 9.The tail gas monitoring device 5 is set to the vent gas treatment dress The exit for setting 4, for monitoring the concentration of sulfur hexafluoride in 4 exit of exhaust gas processing device, and according to the vent gas treatment The concentration of sulfur hexafluoride in 4 exit of device adjusts the on off operating mode of first solenoid valve 6 and the second solenoid valve 8;It is described First solenoid valve 6 is opposite with the on off operating mode of the second solenoid valve 8.
The exit of exhaust gas processing device 4 is arranged in tail gas monitoring device 5, obtains vent gas treatment dress by bypass pump suction type The under test gas in 4 exits is set, does not influence the pressure and flow of main gas circuit.Under test gas enters the inspection in tail gas monitoring device 5 It surveys device (such as infrared sensor or halogen sensor), obtains N2Middle SF6Gas concentration, and real time data is shown on a display screen.When The SF of detection6When concentration is greater than given threshold, recyclable device automatically cuts off the first solenoid valve 6, opens second solenoid valve 8 and compression Machine 9, tail gas returns to exhaust gas processing device 4 and is reprocessed, until SF in tail gas6Content is opened again when being down to given threshold or less First solenoid valve 6 closes second solenoid valve 8 and the first compressor 9, continues to continue tail gas emptying.Tail gas monitoring device 5 uses mould Blockization design transmits Real-time Monitoring Data by connection, can also integrally remove, facilitate the regular of entire tail gas monitoring device It calibrates or metrological service is sent to verify.
The specific structure of tail gas monitoring device 5 in the present invention is illustrated below with reference to Fig. 2, Fig. 2 is hexafluoro of the present invention Change the structural schematic diagram of tail gas monitoring device in the recyclable device of sulphur and nitrogen mixed gas.As shown in Fig. 2, tail gas monitoring device It include: electric air pump, gas sample cell, gas sensor, data communication network and host;The electric air pump is used for will be described The under test gas in exhaust gas processing device exit is pumped into the gas sample cell;The gas sensor is set to the gas In sample cell, detected for the concentration to sulfur hexafluoride in the under test gas;The host passes through the data communication Network receives the concentration data of the sulfur hexafluoride of the gas sensor detection;The host is used for according to the sulfur hexafluoride Concentration data adjusts the on off operating mode of first solenoid valve and the second solenoid valve.
Tail gas monitoring device carries out bypass sampling after exhaust gas processing device.This sampling and measuring mode does not influence main gas circuit Pressure and flow, avoid influence prime separative efficiency;On the other hand flow and the pressure for entering gas sample cell are constant, can Guarantee the accuracy of gas sensor detection.It drives gas to enter sample cell by electric air pump, gas is set in gas sample cell Body sensor is to SF in tail gas6Gas is detected, and infrared sensor, halogen sensor etc. can be used in gas sensor.Pass through Data transmission network will test data and upload to host.Entire recyclable device can automatically control exhaust emissions according to detection data With reprocessing process, it is ensured that exhaust emissions is attained by safety standard, avoids the personal injury of field personnel and environment dirty Dye.
Recyclable device of the present invention further includes display screen, and the data control terminal of the display screen is connect with the host, described Concentration data of the display screen for sulfur hexafluoride described in real-time display.
The invention has the following advantages that
1, in SF6/N2Tail gas monitoring device is arranged in mixed gas recyclable device, to SF in tail gas6Residual volume is supervised in real time It surveys, detection data can be shown in recyclable device control flow, and staff is facilitated to obtain tail-gas quality information.
2, the SF that recyclable device is detected according to tail gas monitoring device6Content data carries out exhaust emissions and recycles reprocessing Gas circuit control.Work as SF6When residual volume is big, the first solenoid valve is cut off, opens second solenoid valve and the first compressor, tail gas returns to tail Flash Gas Compression Skid System is reprocessed;As SF in tail gas6After content is down to safety dumping standard, the first solenoid valve is opened, closes the Two solenoid valves and the first compressor carry out tail gas emptying.
3, tail gas monitoring device includes that pump suction type sampling part and detection part are not influenced using bypass pump suction type sampling The pressure and flow of main gas circuit.On the other hand bypass sampling guarantees that the flow for entering sample cell and pressure are constant, avoids influencing gas The accuracy in detection of body sensor.SF6Detection part can select infrared sensor, halogen sensor etc..
4, tail gas monitoring device uses modularized design, can integrally remove from recyclable device, facilitate detector regular It calibrates or metrological service is sent to verify.
The recovery method of above-mentioned recyclable device progress sulfur hexafluoride and nitrogen mixed gas is used as shown in figure 3, Fig. 3 is this The flow diagram of the recovery method of invention sulfur hexafluoride and nitrogen mixed gas.Specifically includes the following steps:
Step 100: sulfur hexafluoride is separated with the sulfur hexafluoride gas in nitrogen mixed gas.
Step 200: the sulfur hexafluoride gas after separation being liquefied, and the sulfur hexafluoride after liquefaction is stored to hexafluoro Change sulphur storage device.
Step 300: mixed gas remaining after separation being subjected to vent gas treatment in exhaust gas processing device, after obtaining processing Body to be vented.
Step 400: obtaining the concentration of sulfur hexafluoride wait be vented in body;
Step 500: judging whether the concentration of sulfur hexafluoride wait be vented in body is greater than given threshold;If so, executing step 600;If not, executing step 700.
Step 600: the first solenoid valve at offgas outlet is closed, the second solenoid valve on tail gas recycle access is opened, it will Body further progress vent gas treatment to be vented.
Step 700: opening the first solenoid valve that offgas outlet goes out, body to be vented is discharged by offgas outlet, and closes Second solenoid valve on tail gas recycle access.
In above-mentioned steps, the execution sequence of step 200 and step 300- step 700 can operate simultaneously without successively.In step After 400 further include: the concentration of sulfur hexafluoride wait be vented in body is shown on display screen.
Specific implementation process of the invention approximately as:
SF6/N2Mixed gas (volume fraction 30%SF6/ 70%N2) enter recyclable device, pass through high score in separator Sub- film carries out SF6And N2Separation, SF after separation6Concentration is greater than 95%, into SF6Liquefying plant is filling to SF after being liquefied6 In storage device.N after separation2Into exhaust gas processing device, N at this time2Middle SF6Residual volume is higher, is unable to direct emission, in tail gas Processing unit is reprocessed by seperation film or adsorption tanks.Tail gas monitoring device is arranged in processing unit exit, passes through side The sampling of road pump suction type, does not influence the pressure and flow of main gas circuit.Gas enters detector (such as infrared biography in tail gas monitoring device Sensor or halogen sensor), obtain N2Middle SF6Gas concentration, and in the control screen display real time data of recyclable device.Work as inspection The SF of survey6When concentration is greater than given threshold (such as 800ppm), recyclable device automatically cuts off the first solenoid valve, opens the second electromagnetism Valve and the first compressor, tail gas returns to exhaust gas processing device and is reprocessed, until SF in tail gas6Content be down to given threshold with The first solenoid valve will be opened when lower again, closes second solenoid valve and the first compressor, continues to continue tail gas emptying.It is each in this specification A embodiment is described in a progressive manner, and each embodiment focuses on the differences from other embodiments, respectively Same and similar part may refer to each other between a embodiment.
Used herein a specific example illustrates the principle and implementation of the invention, and above embodiments are said It is bright to be merely used to help understand method and its core concept of the invention;At the same time, for those skilled in the art, foundation Thought of the invention, there will be changes in the specific implementation manner and application range.In conclusion the content of the present specification is not It is interpreted as limitation of the present invention.

Claims (9)

1. the recyclable device of a kind of sulfur hexafluoride and nitrogen mixed gas characterized by comprising separator, sulfur hexafluoride Liquefying plant, sulfur hexafluoride storage device, exhaust gas processing device, tail gas monitoring device, the first solenoid valve, offgas outlet, second Solenoid valve and the first compressor;
The entrance access sulfur hexafluoride and nitrogen mixed gas of the separator, the first outlet of the separator with it is described The entrance of sulfur hexafluoride liquefying plant connects, and the outlet of the sulfur hexafluoride liquefying plant and the sulfur hexafluoride storage device connect It connects;The second outlet of the separator is connect with the entrance of the exhaust gas processing device;The outlet of the exhaust gas processing device It connect, is provided in the outlet of the exhaust gas processing device and the connecting path of the offgas outlet described with the offgas outlet First solenoid valve;The separator is used to separate the sulfur hexafluoride gas in the sulfur hexafluoride and nitrogen mixed gas, point Sulfur hexafluoride gas from after enters the sulfur hexafluoride liquefying plant, remaining gaseous mixture after separation by the first outlet Body enters the exhaust gas processing device by the second outlet;
The exhaust gas processing device is for handling the sulfur hexafluoride gas in mixed gas;The exhaust gas processing device Tail gas recycle access, the entrance access of the tail gas recycle access are additionally provided in outlet and the connecting path of the offgas outlet Between the outlet of the exhaust gas processing device and first solenoid valve, the outlet of the tail gas recycle access accesses the separation Between the second outlet of device and the entrance of the exhaust gas processing device;Between the entrance and outlet of the tail gas recycle access according to It is secondary to be provided with the second solenoid valve and first compressor;
The tail gas monitoring device is set to the exit of the exhaust gas processing device, goes out for monitoring the exhaust gas processing device Concentration of sulfur hexafluoride at mouthful, and first electromagnetism is adjusted according to the concentration of sulfur hexafluoride in the exhaust gas processing device exit The on off operating mode of valve and the second solenoid valve;First solenoid valve is opposite with the on off operating mode of the second solenoid valve.
2. the recyclable device of sulfur hexafluoride according to claim 1 and nitrogen mixed gas, which is characterized in that the separation Device is hollow-fibre membrane.
3. the recyclable device of sulfur hexafluoride according to claim 1 and nitrogen mixed gas, which is characterized in that the hexafluoro Change sulphur liquefying plant to specifically include: the second compressor and refrigeration machine;Sulfur hexafluoride gas after the separation successively passes through described Compressor and the refrigeration machine are liquefied as liquid.
4. the recyclable device of sulfur hexafluoride according to claim 1 and nitrogen mixed gas, which is characterized in that the tail gas Processing unit is seperation film or adsorption tanks;The seperation film is greater than the infiltration rate to sulfur hexafluoride to the infiltration rate of nitrogen; The adsorption tanks are for adsorbing sulfur hexafluoride gas.
5. the recyclable device of sulfur hexafluoride according to claim 1 and nitrogen mixed gas, which is characterized in that the tail gas Monitoring device obtains the under test gas in the exhaust gas processing device exit by bypassing pump suction type.
6. the recyclable device of sulfur hexafluoride according to claim 1 and nitrogen mixed gas, which is characterized in that the tail gas Monitoring device includes electric air pump, gas sample cell, gas sensor, data communication network and host;The electric air pump is used It is pumped into the gas sample cell in by the under test gas in the exhaust gas processing device exit;The gas sensor is set to In the gas sample cell, detected for the concentration to sulfur hexafluoride in the under test gas;The host passes through described Data communication network receives the concentration data of the sulfur hexafluoride of the gas sensor detection;The host is used for according to described six The concentration data of sulfur fluoride adjusts the on off operating mode of first solenoid valve and the second solenoid valve.
7. the recyclable device of sulfur hexafluoride according to claim 6 and nitrogen mixed gas, which is characterized in that the hexafluoro The recyclable device for changing sulphur and nitrogen mixed gas further includes display screen, and the data control terminal of the display screen and the host connect It connects, concentration data of the display screen for sulfur hexafluoride described in real-time display.
8. the recovery method of a kind of sulfur hexafluoride and nitrogen mixed gas characterized by comprising
Sulfur hexafluoride is separated with the sulfur hexafluoride gas in nitrogen mixed gas;
Sulfur hexafluoride gas after separation is liquefied, and the sulfur hexafluoride after liquefaction is stored to sulfur hexafluoride to store and is filled It sets;
Mixed gas remaining after separation is subjected to vent gas treatment in exhaust gas processing device, the body to be vented that obtains that treated;
Obtain the concentration of sulfur hexafluoride wait be vented in body;
Whether the judgement concentration of sulfur hexafluoride wait be vented in body is greater than given threshold;
If it is, closing the first solenoid valve at offgas outlet, the second solenoid valve on tail gas recycle access is opened, it will be described Body further progress vent gas treatment to be vented;
If it is not, then opening the first solenoid valve at offgas outlet, the body to be vented is discharged by the offgas outlet, and Close the second solenoid valve on the tail gas recycle access.
9. the recovery method of sulfur hexafluoride according to claim 8 and nitrogen mixed gas, which is characterized in that described in acquisition Concentration of sulfur hexafluoride wait be vented in body, later further include:
The concentration of sulfur hexafluoride wait be vented in body is shown on display screen.
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