CN108355461A - Sulfur hexafluoride and nitrogen mixed gas purification separation purifying plant and its reclaiming clean purify sulfur hexafluoride method - Google Patents

Sulfur hexafluoride and nitrogen mixed gas purification separation purifying plant and its reclaiming clean purify sulfur hexafluoride method Download PDF

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Publication number
CN108355461A
CN108355461A CN201810339359.XA CN201810339359A CN108355461A CN 108355461 A CN108355461 A CN 108355461A CN 201810339359 A CN201810339359 A CN 201810339359A CN 108355461 A CN108355461 A CN 108355461A
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China
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gas
sulfur hexafluoride
mixed gas
nitrogen
liquefied pot
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CN201810339359.XA
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彭学院
刘畅
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Xian Jiaotong University
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Xian Jiaotong University
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Priority to CN201810339359.XA priority Critical patent/CN108355461A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/047Pressure swing adsorption
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B17/00Sulfur; Compounds thereof
    • C01B17/45Compounds containing sulfur and halogen, with or without oxygen
    • C01B17/4507Compounds containing sulfur and halogen, with or without oxygen containing sulfur and halogen only
    • C01B17/4515Compounds containing sulfur and halogen, with or without oxygen containing sulfur and halogen only containing sulfur and fluorine only
    • C01B17/453Sulfur hexafluoride
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00Nitrogen; Compounds thereof
    • C01B21/04Purification or separation of nitrogen
    • C01B21/0405Purification or separation processes
    • C01B21/0433Physical processing only
    • C01B21/045Physical processing only by adsorption in solids
    • C01B21/0455Physical processing only by adsorption in solids characterised by the adsorbent
    • C01B21/0466Zeolites
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00Technologies relating to chemical industry
    • Y02P20/10Process efficiency
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00Technologies relating to chemical industry
    • Y02P20/151Reduction of greenhouse gas [GHG] emissions, e.g. CO2

Abstract

A kind of sulfur hexafluoride of present invention offer and nitrogen mixed gas purification separation purifying plant and its reclaiming clean purify sulfur hexafluoride method, liquid nitrogen fluid reservoir liquid outlet connects nitrogen gas outlet through the second cooling medium channel, the first cooling medium channel, dry type shell-and-tube heat exchanger successively, liquid nitrogen is as cooling medium, after being flowed out by liquid nitrogen fluid reservoir, successively by solidification tank, liquefied pot and dry type shell-and-tube heat exchanger, finally it is discharged with gaseous state, the high-temperature gas of compressor discharge forces cooling, SF with pressure in dry type shell-and-tube heat exchanger6Gas can relatively easily liquefy, rear to flow into solidification tank low-temperature setting.The present invention realizes SF6/N2Purification, separation and the SF of mixed gas6Purification, SF6The rate of recovery is high, and can further be utilized to the nitrogen come out from solidification tank, and liquid nitrogen cold makes full use of, and process environmental protection, energy-saving and emission-reduction have high economical and environmentally friendly benefit.

Description

Sulfur hexafluoride and nitrogen mixed gas purification separation purifying plant and its reclaiming clean carry Pure sulfur hexafluoride method
Technical field
The invention belongs to sulfur hexafluoride gas recycling, separation, purification technique field, more particularly to a kind of sulfur hexafluoride and nitrogen Oxygen mixture purification separation purifying plant and its reclaiming clean purify sulfur hexafluoride method.
Background technology
Sulfur hexafluoride (SF6) gas is a kind of gas that chemical property is sufficiently stable, because of its excellent insulation performance and go out Arc performance is widely used in high voltage electric equipment.In the about 8500t sulfur hexafluoride gas that the whole world produces every year now, about There is more than half for power industry.SF in practical applications6There is also some shortcomingss for gas:(1)SF6By the United Nations's ring Border administration is set to greenhouse gases, its greenhouse effects are 23900 times of equivalent carbon dioxide, quilt《The Kyoto Protocol》Being classified as is restricted One of six kinds of greenhouse gases;(2)SF6Molecular weight is larger, and the more general common gases of condensing temperature are high, pressure is larger, temperature It crosses under low environment, is easy liquefaction;(3)SF6Gas price is higher, is not suitable for the big electrical equipment of gas consumption.Therefore, it is solution SF6The problems such as gas greenhouse effects high and low temperature easily liquefies and is expensive starts to use SF in industry6Mixed gas replaces pure SF6Gas, relatively the replacement gas with development prospect is SF at present6/N2And SF6/CF4.Because of N2Nontoxic, pollution-free and price It is cheap, SF6/N2Mixed gas, which has, gradually substitutes SF6Trend of the gas as dielectric in electrical equipment.
For using SF6/N2High voltage electric equipment of the mixed gas as insulation and arc-extinguishing medium, when overhaul of the equipments, failure When handling and is retired, it is still to the mixed gas reclaiming clean in electrical equipment, by SF6It is recycled after gas purification.
SF at present6/N2Mixed gas separation method mainly has liquefaction process, solidification method, pressure swing adsorption method (PSA methods) and polymerization Object membrane separation process.Liquefaction process is suitable for handling the SF of high mixing ratio6/N2Mixed gas, in the SF for handling low mixing ratio6/N2It is mixed Due to required hypertonia when closing gas, should not directly use;PSA law technology comparative maturities, but in processing SF6Gas content When relatively low mixed gas, the SF that recycles6Gas concentration is not high;It is suitable that polymer thin membrane separation process can obtain content High SF6Gas, but use the cost of thin polymer film higher.SF6The corresponding temperature of three phase point be -50.8 DEG C, pressure is 0.23MPa, therefore for the SF of low mixing ratio6/N2The problem of separation of mixed gas, hypertonia is not present in solidification method, and profit With solidification method, solid-state SF6With gaseous state N2It can be easily separated, by solid-state SF6The SF of acquisition6Gas purity is up to 99.9% More than.But due to SF6Still there is higher vapour pressure at low temperature, therefore in vacuum refrigeration purification process, cryogenic temperature Have a significant impact product recovery rate (according to pertinent literature, the rate of recovery:- 80 DEG C/60.9%, -90 DEG C/71.4%, -100 DEG C/ 87.4%).In the technology of existing solidification method, the temperature difficulty that industrial freezing equipment will reach -100 DEG C is larger.In addition, existing Vacuum freezing technology, during vacuumizing, some is in SF6The SF of saturated vapor pressure6Also it is pumped, causes SF6 Gas wastes, and the rate of recovery reduces.
Invention content
The purpose of the present invention is to provide a kind of sulfur hexafluoride and nitrogen mixed gas purification separation purifying plant and its return Receive purification sulfur hexafluoride method.By carrying out circulation and stress, purification to uncured sulfur hexafluoride gas, solidification method is improved The rate of recovery of sulfur hexafluoride is recycled, liquid nitrogen can be utilized further after curing tank, production environmental protection.
In order to achieve the above objectives, present invention employs following technical schemes:
A kind of sulfur hexafluoride and nitrogen mixed gas purification separation purifying plant, including mixed gas air inlet, gaseous mixture Body conveyance conduit, dry type shell-and-tube heat exchanger, liquefied pot, liquefied pot gas exhausting valve, the first cooling medium channel, is consolidated compressor Change tank, sulfur hexafluoride conveyance conduit, solidification tank gas exhausting valve, the second cooling medium channel, liquid nitrogen source, nitrogen gas outlet, tail Letter shoot road, tail gas gas outlet, sulfur hexafluoride filling exit and circularly purifying air accumulator;The mixed gas air inlet passes through mixed Gas transmission pipeline is closed with the suction end of compressor to be connected, the exhaust end of compressor is connected with the shell of dry type shell-and-tube heat exchanger, The shell of dry type shell-and-tube heat exchanger is connected by being provided with the pipeline of precooling mixed gas control valve with the import of liquefied pot, is liquefied The first outlet of tank with solidification tank import be connected, sulfur hexafluoride conveyance conduit respectively with sulfur hexafluoride filling exit and be set to consolidate The sulfur hexafluoride control valve changed in the first outlet of tank is connected;First cooling medium channel is set in liquefied pot, the second cooling Medium channel be set to solidification tank in, the second cooling medium channel respectively with one end of the first cooling medium channel and liquid nitrogen source phase Even, the heat exchanger tube of dry type shell-and-tube heat exchanger is connected with the other end of the first cooling medium channel and nitrogen gas outlet respectively;Tail gas Gas outlet is connected with one end of liquefied pot gas exhausting valve and solidification tank gas exhausting valve respectively by exhaust pipe road, is liquefied The other end of tank gas exhausting valve is connected with the second outlet of liquefied pot (mainly as gas vent), cures tank gas exhausting valve The other end be connected (mainly as gas vent) with the second outlet of solidification tank, the input terminal of circularly purifying air accumulator, which accesses, to exist On exhaust pipe road, the output end of circularly purifying air accumulator accesses on mixed gas delivery pipeline, in exhaust pipe road The side of close tail gas gas outlet of circularly purifying air accumulator on-position be provided with tail gas control valve.
Preferably, the liquefied pot is arranged in the top of solidification tank, and the second outlet of liquefied pot is by being provided with connection control The pipeline of valve processed is connected with the second outlet of solidification tank;The first outlet of liquefied pot by be provided with drainage control valve pipeline with The import for curing tank is connected.
Preferably, first pressure gauge, first pressure regulating valve are provided on the mixed gas delivery pipeline and with side Road form accesses the first vacuum pump of the pipeline.
Preferably, gas cleaning plant is provided on the mixed gas delivery pipeline, gas cleaning plant includes series connection Mixed gas device for drying and filtering, the molecular sieve for adsorbing sulfur hexafluoride decomposition product and the mixed gas particle filtering of setting Device.
Preferably, it is provided with second pressure gauge, the first thermometer and the first safety valve on the liquefied pot, cures and is set on tank It is equipped with third pressure gauge, second temperature meter, the second safety valve and heating device, the 4th pressure is provided on circularly purifying air accumulator Table and third thermometer are provided with input control valve, the output of circularly purifying air accumulator on the input terminal of circularly purifying air accumulator Output control valve is provided on end.
Preferably, the 5th pressure gauge, second pressure regulating valve are provided on the exhaust pipe road and to bypass shape Formula accesses the second vacuum pump of the separate tail gas gas outlet side of the circularly purifying air accumulator on-position on the pipeline, and second is true The inlet end of sky pump is connected by being disposed with the pipeline of control valve A and control valve B with exhaust pipe road, described lithium Be disposed with control valve C and control valve D on sulphur conveyance conduit, one end access of control valve E control valve C and control valve D it Between piping connection portion on, other end access is on piping connection portion between control valve A and control valve B.
Preferably, it is provided with topping-up pump on the sulfur hexafluoride conveyance conduit;The heat exchanger tube of the dry type shell-and-tube heat exchanger Pipeline by being provided with nitrogen gas control valve is connected with nitrogen gas outlet;It is provided with to go out positioned at tail gas on the exhaust pipe road Exhaust gas processing device between gas port and tail gas control valve or/and the separate tail gas positioned at circularly purifying air accumulator on-position go out The pressure-swing absorption apparatus for removing nitrogen of gas port side.
Using above-mentioned sulfur hexafluoride and nitrogen mixed gas purification separation purifying plant to sulfur hexafluoride and nitrogen mixture The method that body was recycled, and purified and purified sulfur hexafluoride, includes the following steps:
1) solidification tank and liquefied pot are vacuumized before recycling;
2) mixed gas is recycled
Using the cooling medium channel being arranged in solidification tank and liquefied pot, liquid nitrogen is made to pass sequentially through solidification tank and liquefaction Tank;It is passed through liquefied pot after the mixed gas of sulfur hexafluoride and nitrogen is compressed successively, precooling to cool down, will be passed through in liquefied pot Cooling obtained sulfur hexafluoride liquid is passed through solidification tank and is cooled down, and makes sulfur hexafluoride liquid curing;
3) when the quantity of sulfur hexafluoride of solidification in-tank-solidification reaches to threshold value, alternatively, the mixed gas has been returned Harvest complete, then mixed gas stopping is passed through liquefied pot, and continues in cooling medium channel to be passed through liquid nitrogen, waits for that sulfur hexafluoride is abundant Stop being passed through liquid nitrogen after solidification;
4) after step 3), liquefied pot and solidification tank are carried out respectively after adjusting the pressure at expulsion of liquefied pot and solidification tank Exhaust is emitted into air with the gas for curing tank by liquefied pot is discharged after harmless treatment, alternatively, by discharge liquefied pot and admittedly The gas for changing tank is stored after pressure-swing absorption apparatus carries out removing nitrogen treatment in input circularly purifying air accumulator;
5) after step 4), liquefied pot and solidification tank are vacuumized respectively, until reach certain vacuum degree, In, circularly purifying gas storage is directly inputted or inputted after pressure-swing absorption apparatus is handled from the gas of liquefied pot and solidification tank extraction It is stored in tank;
6) after step 5), the sulfur hexafluoride to curing in-tank-solidification heats, then by sulfur hexafluoride self-curing It is injected into tank in external returnable, the gas being stored in circularly purifying air accumulator participates in recycling mixed gas next time Flow.
Preferably, in the step 2), the mixed gas is derived from the SF of the electrical equipment by purification6/N2Mix insulation Medium, the purification include dry, absorption SF6Decomposition product and filtration of particulate matters step, the SF6/N2Mix insulation is situated between The admission pressure control of matter before cleaning is 0.1~0.2MPa, when admission pressure is less than 0.1MPa, to be formed using vacuumizing Negative pressure continues to recycle the SF of electrical equipment6/N2Mix insulation medium;In the step 3), time for continuing to be passed through liquid nitrogen is 30~ 40min, temperature control are -90 DEG C~-100 DEG C;In the step 4), the pressure at expulsion control of liquefied pot and solidification tank is 0.2 ~0.4MPa;In the step 5), liquefied pot and solidification tank vacuum degree be controlled as 20~80Pa and 0.06~ 0.08MPa;In the step 6), the heating temperature of sulfur hexafluoride is -5 DEG C~10 DEG C.
Preferably, the nitrogen that pressure-swing absorption apparatus adsorbs is desorbed, by being expelled to air after harmless treatment;Liquid Nitrogen enters dry pipe shell heat exchanger after passing sequentially through solidification tank and liquefied pot, using dry type shell-and-tube heat exchanger to the mixed gas It is pre-chilled, nitrogen made of changing to liquid nitrogen is recycled after dry type shell-and-tube heat exchanger is discharged.
Beneficial effects of the present invention are embodied in:
The present invention can carry out the nitrogen come out from solidification tank further using liquid nitrogen as cooling medium in liquefied pot It utilizes, while can be to uncured SF using circularly purifying air accumulator6Circulation and stress and purification, improve SF6Gas reclaiming rate, Production environmental protection, energy-saving and emission-reduction have high economical and environmentally friendly benefit, are suitble to extensive promote.The present invention may be implemented to SF6/N2Mixed gas is insulation and the gas purification in the electrical equipment of arc-extinguishing medium, separation, purification processes, is suitable for SF6Body Product overcomes liquefaction process and is not suitable for handling SF than the mixed gas for being 20%-100%6The mixed gas of low volume accounting Problem, relative to polymer thin embrane method, of the invention is of low cost, compared to PSA methods, the SF of acquisition6Content is high, and purity is reachable 99.9% or more.
Further, liquid nitrogen can make the temperature in solidification tank relatively easily reach -100 DEG C~-90 DEG C as cooling medium Solidification temperature, the corresponding sulfur hexafluoride vapour pressure of the temperature is relatively low, be conducive to improve sulfur hexafluoride yield, and heat exchanger be pre-chilled Introducing liquid nitrogen cold is made full use of.
Further, by introducing pressure-swing absorption apparatus improved structure and technique, SF6The rate of recovery is almost up to 100%.
Description of the drawings
Fig. 1 is the schematic diagram of sulfur hexafluoride and nitrogen mixed gas purification separation purifying plant in the embodiment of the present invention 1;
Fig. 2 is the schematic diagram of sulfur hexafluoride and nitrogen mixed gas purification separation purifying plant in the embodiment of the present invention 2;
In figure:1- mixed gas air inlets;2- gas cleaning plants;3- compressors;4- dry type shell-and-tube heat exchangers;5- liquefies Tank;The first cooling medium channels of 6-;7- cures tank;The second cooling medium channels of 8-;9- heating tubes;10- topping-up pumps;11- hexafluoros Change sulphur filling exit;12- liquid nitrogen fluid reservoirs;13- nitrogen gas outlet;The first vacuum pumps of 14-;The second vacuum pumps of 15-;At 16- tail gas Manage device;17- tail gas gas outlet;18- circularly purifying air accumulators;19- first pressure regulating valves;20- first switch valves;21- One pressure gauge;22- second switch valves;23- third switch valves;The first check valves of 24-;The 4th switch valves of 25-;26- second pressures Table;The first thermometers of 27-;The first safety valves of 28-;The 5th switch valves of 29-;30- third pressure gauges;31- second temperature meters;32- Second safety valve;The 6th switch valves of 33-;The second check valves of 34-;The 7th switch valves of 35-;The 8th switch valves of 36-;37- the 9th is opened Close valve;The 11st switch valves of 38-;The first vacuum meters of 39-;The 12nd switch valves of 40-;The 13rd switch valves of 41-;42- the 14th Switch valve;The second vacuum meters of 43-;The 15th switch valves of 44-;45- sixteenmos close valve;The 17th switch valves of 46-;47- the tenth Eight switch valves;48- second pressure regulating valves;The 19th switch valves of 49-;The 20th switch valves of 50-;The 24th switch valves of 51-; The 25th switch valves of 52-;The 21st switch valves of 53-;The 22nd switch valves of 54-;The tenth switch valves of 55-;56- the 4th is pressed Power table;57- third thermometers;58- weighing devices;The 23rd switch valves of 59-;The 5th pressure gauges of 60-;The second sixteenmos of 61- Close valve;The 27th switch valves of 62-;63- third check valves;64- pressure-swing absorption apparatus.
Specific implementation mode
The invention will be further described with reference to the accompanying drawings and examples.
Embodiment 1
As shown in Figure 1, a kind of sulfur hexafluoride and nitrogen mixed gas purification separation purifying plant, including mixed gas air inlet The 1, first vacuum pump 14 of mouth, gas cleaning plant 2, compressor 3, dry type shell-and-tube heat exchanger 4, liquefied pot 5, first cool down medium and lead to Road 6, solidification tank 7, the second cooling medium channel 8, weighing device 58, topping-up pump 10, sulfur hexafluoride filling exit 11, liquid nitrogen fluid reservoir 12 (i.e. liquid nitrogen sources), nitrogen gas outlet 13, the second vacuum pump 15, exhaust gas processing device 16, tail gas gas outlet 17 and circularly purifying Air accumulator 18;Wherein:
The mixed gas air inlet 1 through being equipped with first switch valve 20,19 (pressure-regulating valve of first pressure regulating valve successively Specially pressure reducing valve), it is second switch valve 22, gas cleaning plant 2, third switch valve 23, compressor 3, the first check valve 24, dry Formula shell-and-tube heat exchanger 4 (shell), the 4th switch valve 25 (mixed gas control valve is pre-chilled), liquefied pot 5, the 5th switch valve 29 (draining control valve), solidification tank 7, the 6th switch valve 33 (i.e. sulfur hexafluoride control valve), topping-up pump 10, the second check valve 34, The main pipeline of 7th switch valve 35 (i.e. control valve C) and the 8th switch valve 36 (i.e. control valve D) connects sulfur hexafluoride filling exit 11, main It is filling that mixed gas purification in electrical equipment, liquefaction, solidifying refinement and product may be implemented in pipeline;
The liquid outlet of the liquid nitrogen fluid reservoir 12 through being equipped with the second cooling medium channel 8, the first cooling medium channel successively 6, the cooling medium pipeline of dry type shell-and-tube heat exchanger 4 (heat exchanger tube) and the tenth switch valve 55 (i.e. nitrogen gas control valve) connects nitrogen outlet Mouth 13, liquid nitrogen is as cooling medium, after being flowed out by liquid nitrogen fluid reservoir 12, successively by curing tank 7, liquefied pot 5 and dry type shell Heat exchanger 4, is finally discharged with gaseous state, and the high-temperature gas (pressure is no more than 3MPa, 80~120 DEG C of temperature) that compressor 3 is discharged exists Cooling (50~60 DEG C), SF with pressure are forced in dry type shell-and-tube heat exchanger 46Gas continues to force cooling in liquefied pot, can be with It relatively easily liquefies, rear to flow into solidification 7 low-temperature setting of tank, liquid nitrogen fluid reservoir 12 uses volume for the Dewar bottle of 175L;
The liquefied pot 5 is placed on 7 top of solidification tank, and end interface (is connected to through being equipped with sixteenmo pass valve 45 on liquefied pot 5 Control valve) pipeline connect end interface on solidification tank 7, liquefied pot 5 is placed with about 7 tank of solidification, and two tank upper ends are provided with interface, logical Piping connection facilitates gas to flow, so that the SF after liquefaction6It can flow down naturally under gravity and enter solidification tank 7;
The junction of the first pressure regulating valve 19 and second switch valve 22 through being equipped with the 11st switch valve 38, the successively The pipeline of one vacuum pump 14 and the 12nd switch valve 40 connects entrance (second switch valve 22 and the gas purification of gas cleaning plant 2 The on-position of device 2), the first vacuum pump uses oil-free scroll vacuum pump, and (oil-free is to ensure the gas of compression discharge not Band oil), after gas in the electrical apparatus recycling a period of time, pressure declines, and needs to continue to extract gas using vacuum pump, It can guarantee that the gas in electrical equipment is persistently flowed out and recycled completely;
End interface through being equipped with the 17th switch valve 46 (i.e. liquefied pot gas exhausting valve), second successively on the liquefied pot 5 The tail of pressure-regulating valve 48, the 19th switch valve 49, the 20th switch valve 50 (i.e. tail gas control valve) and exhaust gas processing device 16 Gas disposal pipeline connects tail gas gas outlet 17, and the upper end interface of solidification tank 7, which passes through, is equipped with (the i.e. solidification tank exhaust control of eighteenmo pass valve 47 Valve processed) pipeline connect the junction of the 17th switch valve 46 and second pressure regulating valve 48, liquefied pot 5 and solidification tank 7 connect respectively Enter vent gas treatment pipeline, is used to extract impure gas to two tanks respectively when tail gas recycle;
The junction of 17th switch valve 46 and second pressure regulating valve 48 through being equipped with the 13rd switch valve 41 successively The pipeline of (i.e. control valve B), the 14th switch valve 42 (i.e. control valve A), the second vacuum pump 15 and the 15th switch valve 44 connects The junction of 19 switch valves 49 and the 20th switch valve 50, the junction of the 7th switch valve 35 and the 8th switch valve 36 is through being equipped with The pipeline of 23rd switch valve 59 (i.e. control valve E) connects the junction of the 13rd switch valve 41 and the 14th switch valve 42, the Two vacuum pumps use oil-free scroll vacuum pump, the vacuum pump to be on the one hand used to extract liquefied pot and solidification tank after curing flow out In impure gas, be on the other hand used to recycle before operation solidification tank 7, liquefied pot 5 and sulfur hexafluoride external pipeline are taken out it is true Sky ensures the purity for obtaining product;
The junction of 19th switch valve 49 and the 20th switch valve 50 through being equipped with the 24th switch valve 51 successively (i.e. input control valve), third check valve 63, circularly purifying air accumulator 18 and the 25th switch valve 52 (i.e. output control valve) Pipeline connect the junction of first switch valve 20 and first pressure regulating valve 19, after curing flow, because of SF6Have higher Vapour pressure, curing in tank and liquefied pot still has the uncured SF in part6Gas needs as far as possible to improve product recovery rate It is more to recycle this part SF6Gas;
Valve 61 is closed on pipeline between the first pressure regulating valve 19 and second switch valve 22 by the second sixteenmo to connect It is equipped with first pressure gauge 21, passes through the 27th switch valve 62 between second pressure regulating valve 48 and the 19th switch valve 49 Equipped with the 5th pressure gauge 60, the inlet of the first vacuum pump 14 is equipped with the first vacuum meter 39, in the inlet of the second vacuum pump 15 Equipped with the second vacuum meter 43;
The liquefied pot 5 is provided with the first thermometer 27, the first safety valve 28 and is connected by the 21st switch valve 53 Second pressure gauge 26, solidification tank 7 be provided with second temperature meter 31, the second safety valve 32, heating tube 9 (i.e. heating device) and lead to The third pressure gauge 30 of the 22nd switch valve 54 connection is crossed, 9 power of heating tube is 3kW, and solidification tank 7 is placed on weighing device 58 On (for example, electronic weighing instrument), circularly purifying air accumulator 18 is provided with the 4th pressure gauge 56 and third thermometer 57, passes through reading The registration of pressure gauge and thermometer on each tank, can grasp SF in real time6State in links, liquefied pot, solidification tank Stainless steel material is used with circularly purifying air accumulator, operating pressure 5MPa, liquefied pot and solidification tank volume are 600L, and cycle is net Change air accumulator is 120L;
First cooling medium channel, 6 and second cooling medium channel 8 is all made of one group of end to end U-shaped stainless steel Pipe, the first cooling medium channel 6 are positioned in liquefied pot 5, and the second cooling medium channel 8 is positioned in solidification tank 7, the second cooling The medium inlet of medium channel 8 is connect by the 9th switch valve 37 with the liquid outlet of liquid nitrogen fluid reservoir 12, and the second cooling medium is logical 8 media outlet of road is connect with the medium inlet of the first cooling medium channel 6, the media outlet of the first cooling medium channel 6 with it is dry The heat exchanger tube medium inlet of formula shell-and-tube heat exchanger 4 connects, and the heat exchanger tube media outlet of dry type shell-and-tube heat exchanger 4 passes through the tenth switch Valve 55 is connect with nitrogen gas outlet 13, and liquid nitrogen is as cooling medium, successively by solidification tank, liquefied pot and the heat exchange of dry type shell Device, cryogenic energy utilization are abundant;
The compressor 3 uses the special oil-free piston compressor of sulfur hexafluoride;
The gas cleaning plant 2 is gone here and there successively is equipped with device for drying and filtering, KDHF-03 types molecular sieve and particulate filter, does Dry filter is adsorbed for dry, and molecular sieve is for adsorbing SF in electrical equipment6Decomposition product, particulate filter is for adsorbing Particulate matter in mixed gas and prevent broken sorbent particles from entering compressor.
The reclaiming clean of above-mentioned sulfur hexafluoride and nitrogen mixed gas purification separation purifying plant purifies sulfur hexafluoride method, Include the following steps:
One, it is vacuumized before recycling
By exhaust outlet and the mixed gas using sulfur hexafluoride and nitrogen mixed gas as the electrical equipment of insulating gas into Gas port 1 connects, and the air inlet of sulfur hexafluoride external pipeline is connect with sulfur hexafluoride filling exit 11.The 20th switch is opened successively Valve 50, the 15th switch valve 44, the 14th switch valve 42, the 13rd switch valve 41, eighteenmo close valve 47, the 17th switch valve 46, the 23rd switch valve 59 and the 8th switch valve 36 start the second vacuum pump 15, to solidification tank 7, liquefied pot 5 and hexafluoro Change sulphur external pipeline to vacuumize, when vacuum degree reaches 20Pa (the second vacuum meter 43), the second vacuum pump 15 of stopping transport closes second Ten switch valves 50, the 15th switch valve 44, the 14th switch valve 42, the 13rd switch valve 41, eighteenmo close valve the 47, the 17th Switch valve 46, the 23rd switch valve 59 and the 8th switch valve 36, it is external to solidification tank 7, liquefied pot 5 and sulfur hexafluoride before recycling Pipeline vacuumizes, and ensures the purity of product (sulfur hexafluoride);
Two, recycling with pressure
The 5th switch valve 29 of opening, sixteenmo pass valve 45, the 4th switch valve 25, third switch valve 23, second open successively Valve 22, first switch valve 20, the second sixteenmo pass valve 61, the 9th switch valve 37, the 21st switch valve the 53, the 22nd is closed to open Valve 54 and the tenth switch valve 55 are closed, 12 liquid outlet valve of liquid nitrogen fluid reservoir is opened, liquid nitrogen passes sequentially through the second cooling medium channel 8, the first cooling medium channel 6 and dry type shell-and-tube heat exchanger 4 are discharged through the tenth switch valve 55 by nitrogen gas outlet 13;
The burp valve of electrical equipment is opened, compressor 3 is started, using first pressure regulating valve 19, it is net to adjust gas 2 admission pressure is set in makeup (admission pressure of gas cleaning plant is generally 0.1MPa~0.2MPa, first pressure gauge 21).Gas The mixed gas (predominantly sulfur hexafluoride and nitrogen) of 2 gas outlet of body purifier enters compressor 3 and compresses, compressed gas Enter liquefied pot 5 after the cooling of dry type shell-and-tube heat exchanger 4, sulfur hexafluoride gas liquefies in liquefied pot 5, gained sulfur hexafluoride liquid Body naturally flows into solidification tank 7 under the effect of gravity, and sulfur hexafluoride cures in curing tank 7.
Three, negative pressure recycles
When 19 standard-sized sheet of first pressure regulating valve, when admission pressure is less than 0.1MPa, the 12nd switch valve 40, the are opened successively 11 switch valves 38 start the first vacuum pump 14, close second switch valve 22 and the second sixteenmo and close valve 61, mixed gas via First vacuum pump 14 enters gas cleaning plant 2 (when gas pressure reduces, first, gas flow is influenced, second is that it cannot be guaranteed that electricity Gas in gas equipment is all recycled, therefore continues to extract using vacuum pump).
Four, electrical equipment/shutdown is replaced
The liquid volume of general SF6 maximums recycling is to cure the volume half of tank, and the solidification tank in this example is 600L, according to This can be evaluated whether corresponding maximum recycling quality, and be monitored in real time using weighing device 58.
When vacuum degree reaches 20Pa (the first vacuum meter 39), the mixed gas in the electrical equipment is recovered completely, Electrical equipment or the shutdown of gas to be recycled, stoppage in transit compressor 3 and the first vacuum pump 14 are needed to change, the 12nd is closed successively and opens Valve 40, the 11st switch valve 38, first switch valve 20, third switch valve 23 and the 4th switch valve 25 are closed, mixed gas stream is recycled Journey terminates, if replacing the electrical equipment of gas to be recycled, new electrical equipment exhaust outlet is connect with mixed gas air inlet 1, Mixed gas is recycled according to step 2 and step 3.
Five, continue to cool and solidify
Stop (recycling mixed gas flow terminate) after air inlet, and cures when 7 temperature of tank reaches -90 DEG C~-100 DEG C (such as Fruit is not up to the temperature, then is down to the temperature first with liquid nitrogen), continue to be passed through liquid nitrogen 30min by the second cooling medium channel 8, Solid volume no longer changes in solidification tank, under this temperature condition so that sulfur hexafluoride has obtained abundant solidification, solidification stream Journey terminates, and closes 12 liquid outlet valve of liquid nitrogen fluid reservoir, closes the 9th switch valve 37, the tenth switch valve 55.
Six, the extraction of partial impurities gas and vent gas treatment
Cure flow after, liquefied pot 5 and solidification tank 7 in mixed gas be mainly nitrogen (major impurity gas) and A small amount of uncured sulfur hexafluoride saturated vapor, closes the 5th switch valve 29 and sixteenmo closes valve 45, liquefied pot 5 and solidification tank 7 become two mutually independent containers, because during extracting foreign gas out, SF6Partial pressure reduces, and will have part SF6Gu Body is sublimed into SF6Gas, and distillation amount depends on vessel space, so during extracting foreign gas, make liquefied pot with Solidification tank is no longer connected to, SF6Solid is all stored in solidification tank 7, it is possible to reduce extracts foreign gas process SF6Distillation amount improves Product recovery rate;
The 17th switch valve 46, the 27th switch valve 62, the 19th switch valve 49 and the 20th switch valve are opened successively 50, the impure gas discharge in liquefied pot 5 utilizes second pressure regulating valve 48, adjusts gas exhaust pressure (the 5th pressure gauge 60) it is that (on the one hand on the other hand control controls at the end of exhaust in tank 0.2MPa into the gas pressure of exhaust gas processing device Sulfur hexafluoride gas volume ratio), impure gas through exhaust gas processing device 16 handle it is up to standard (control discharge tail gas in SF6It is dense Degree reach discharging standards, such as less than 1000ppm) after discharged by exhaust port 17, when second pressure regulating valve 48 Standard-sized sheet when pressure at expulsion is less than 0.2MPa, closes the 17th switch valve 46;
It opens eighteenmo and closes valve 47, the impure gas discharge cured in tank 7 is adjusted using second pressure regulating valve 48 Throttle body pressure at expulsion be 0.2MPa, impure gas through exhaust gas processing device 16 handle it is up to standard after by 17 row of exhaust port It puts, when 48 standard-sized sheet of second pressure regulating valve, when pressure at expulsion is less than 0.2MPa, closes eighteenmo and close valve 47;
SF6Molecular weight be about N25 times of molecular weight, therefore during cooling and solidifying 30min, SF6Gas can occur Natural subsidence, the N extracted out in this step2Only contain micro SF in gas6Gas;
Seven, sulfur hexafluoride recycles circularly purifying in residual impurity gas
Close the 20th switch valve 50, the 19th switch valve 49, the 27th switch valve 62, the 21st switch valve 53 and 22nd switch valve 54 opens the 24th switch valve 51, the 15th switch valve 44, the 14th switch valve the 42, the tenth successively Three switch valves 41 and the 17th switch valve 46 start the second vacuum pump 15, the gaseous mixture of sulfur hexafluoride and nitrogen in liquefied pot 5 Body enters circularly purifying air accumulator 18 via the second vacuum pump 15, participates in sulfur hexafluoride purification flow (this cycle next time For example same electrical equipment of air accumulator is purified, when carrying out gas recycling in the tank, closes first switch valve 20, mixed gas air inlet Mouth 1 stops air inlet, opens the 25th switch valve 52, and the recycling of with pressure and negative pressure is carried out according to air pressure in tank), when vacuum degree reaches When 20Pa, the 17th switch valve 46 is closed, the second vacuum pump 15 of stopping transport;
It opens eighteenmo and closes valve 47, start the second vacuum pump 15, cure the gaseous mixture of the sulfur hexafluoride and nitrogen in tank 7 Body enters circularly purifying air accumulator 18 via the second vacuum pump 15, participates in sulfur hexafluoride purification flow next time, works as vacuum When degree is less than 0.07MPa (liquefied pot is vacuumized, there was only gas in tank, the degree of 20Pa can be extracted into, to the gas in solidification tank Body is extracted out, at any temperature, SF6All there are one vapour pressures for solid, are a gas-solid coexistence state, have certain pressure (steam Pressure) SF6The presence of gas), it closes eighteenmo and closes valve 47, the 13rd switch valve 41, the 14th switch valve the 42, the 15th Switch valve 44 and the 24th switch valve 51, the second vacuum pump 15 of stopping transport;
Most of N2Gas is after previous step is extracted, SF6Volume ratio of the gas in residual gas increases, this part Mixed gas can be recycled to circularly purifying air accumulator, sulfur hexafluoride reclaiming clean purification schemes next time be participated in, to improve Product recovery rate.
Eight, it is filling to cure sulfur hexafluoride heating in tank
Start the heating tube 9 in solidification tank 7, (0 DEG C of corresponding steam pressure is when sulfur hexafluoride temperature reaches 0 DEG C It is 1.25MPa, easily controllable) when stop heating, open the 6th switch valve 33, the 7th switch valve 35 and the 8th switch valve 36, start Topping-up pump 10 (it is coexistence of gas and liquid state to cure at this time in tank), sulfur hexafluoride is successively via sulfur hexafluoride filling exit 11, sulfur hexafluoride Steel cylinder progress in external pipeline is filling, after filling, closes the 6th switch valve 33, the 7th switch valve 35 and the 8th switch valve 36, stoppage in transit topping-up pump 10;
Nine, sulfur hexafluoride detects
The sulfur hexafluoride being recovered to purification is detected, if sampling result is unqualified (as with reference to GB/T 12022-2006 Industrial sulfur hexafluoride technical standard), step 1 is repeated to step 8, until up-to-standard, the SF obtained using solidification method6Purity Up to 99.9% or more.
Switch valve in the present embodiment can make solenoid valve into, pass through each valve of programming Control, compressor and vacuum Pump realizes automation control.
Embodiment 2
Referring to Fig. 2, as the improvement project to embodiment 1, in the company of the 19th switch valve 49 and the 15th switch valve 44 The centre of junction between the place of connecing and the 24th switch valve 51 and the 20th switch valve 50 can add a pressure-variable adsorption dress 64 are set, it is adsorbent that Ca-A type artificial zeolites are equipped in pressure-swing absorption apparatus 64;
The reclaiming clean of the improvement project purifies sulfur hexafluoride method, includes the following steps:
Step 1 is identical to step 5 as the step of embodiment 1 one to step 5;
Six, the sulfur hexafluoride in foreign gas recycles circularly purifying
After curing flow, the mixed gas in liquefied pot 5 and solidification tank 7 is mainly nitrogen and a small amount of uncured six Sulfur fluoride saturated vapor, closes the 5th switch valve 29 and sixteenmo closes valve 45;
The 17th switch valve 46, the 27th switch valve 62, the 19th switch valve 49 and the 24th switch are opened successively Valve 51, the impure gas discharge in liquefied pot 5, using second pressure regulating valve 48, adjustings gas exhaust pressure is 0.2MPa, When impure gas is by pressure-swing absorption apparatus 64, artificial zeolite adsorbent absorption nitrogen, sulfur hexafluoride gas not to be adsorbed Into circularly purifying air accumulator 18, sulfur hexafluoride reclaiming clean purification schemes next time are participated in, when second pressure regulating valve 48 is complete It opens, when pressure at expulsion is less than 0.2MPa, closes the 27th switch valve 62, the 19th switch valve 49 and the 21st switch valve 53, the 13rd switch valve 41, the 14th switch valve 42 and the 15th switch valve 44 are opened successively, start the second vacuum pump 15, liquid The mixed gas for changing the sulfur hexafluoride and nitrogen in tank 5 enters cycle only via the second vacuum pump 15 by pressure-swing absorption apparatus 64 Change air accumulator 18, when vacuum degree reaches 20Pa, closes the 17th switch valve 46, the 13rd switch valve 41, the 14th switch valve 42, the 15th switch valve 44, the second vacuum pump 15 of stopping transport;
Eighteenmo is opened successively and closes valve 47, the 27th switch valve 62 and the 19th switch valve 49, cures containing in tank 7 Foreign gas is discharged, and using second pressure regulating valve 48, adjusting gas exhaust pressure is 0.2MPa, and impure gas passes through transformation When adsorbent equipment 64, artificial zeolite adsorbent absorption nitrogen, sulfur hexafluoride gas not to be adsorbed enters circularly purifying air accumulator 18, sulfur hexafluoride reclaiming clean purification schemes next time are participated in, when 48 standard-sized sheet of second pressure regulating valve, pressure at expulsion is less than When 0.2MPa, the 27th switch valve 62, the 19th switch valve 49 and the 22nd switch valve 54 are closed, opens the 13rd successively Switch valve 41, the 14th switch valve 42 and the 15th switch valve 44 start the second vacuum pump 15, cure the sulfur hexafluoride in tank 7 Enter circularly purifying air accumulator 18 by pressure-swing absorption apparatus 64 via the second vacuum pump 15 with the mixed gas of nitrogen, works as vacuum When degree is less than 0.07MPa, closes eighteenmo and close valve 47, the 13rd switch valve 41, the 14th switch valve 42, the 15th switch valve 44 and the 24th switch valve 51, the second vacuum pump 15 of stopping transport;
The nitrogen that pressure-swing absorption apparatus 64 desorbs after 16 harmless treatment of exhaust gas processing device by being discharged;
It is adsorbent that pressure-swing absorption apparatus, which selects Ca-A type artificial zeolites, adsorbs N2Without adsorbing SF6, therefore the gas extracted out SF in body6Gas can enter circularly purifying air accumulator through pressure-swing absorption apparatus, participate in sulfur hexafluoride reclaiming clean next time and carry Pure flow, thus product recovery rate is up to 100%.
Step 7: eight is identical as the method and step eight, nine in embodiment 1.
Embodiment 3
As the improvement project to embodiment 1, embodiment 2,13 external nitrogen recycling pipeline of nitrogen gas outlet, to from dry type The nitrogen that shell-and-tube heat exchanger 4 is discharged is recycled, for recharging in electrical equipment.

Claims (10)

1. a kind of sulfur hexafluoride and nitrogen mixed gas purification separation purifying plant, it is characterised in that:Including mixed gas air inlet Mouth (1), mixed gas delivery pipeline, compressor (3), dry type shell-and-tube heat exchanger (4), liquefied pot (5), liquefied pot gas exhaust inspecting Valve, the first cooling medium channel (6), solidification tank (7), sulfur hexafluoride conveyance conduit, solidification tank gas exhausting valve, the second cooling are situated between Matter channel (8), liquid nitrogen source, nitrogen gas outlet (13), exhaust pipe road, tail gas gas outlet (17), sulfur hexafluoride filling exit (11) and circularly purifying air accumulator (18);The mixed gas air inlet (1) passes through mixed gas delivery pipeline and compressor (3) Suction end be connected, the exhaust end of compressor (3) is connected with the shell of dry type shell-and-tube heat exchanger (4), dry type shell-and-tube heat exchanger (4) Shell by be provided with precooling mixed gas control valve pipeline be connected with the import of liquefied pot (5), the first of liquefied pot (5) Outlet with solidification tank (7) import be connected, sulfur hexafluoride conveyance conduit respectively with sulfur hexafluoride filling exit (11) and be set to consolidate The sulfur hexafluoride control valve changed in the first outlet of tank (7) is connected;First cooling medium channel (6) is set in liquefied pot (5), Second cooling medium channel (8) is set in solidification tank (7), and the second cooling medium channel (8) is logical with the first cooling medium respectively The one end in road (6) and liquid nitrogen source are connected, the heat exchanger tube of dry type shell-and-tube heat exchanger (4) respectively with the first cooling medium channel (6) The other end and nitrogen gas outlet (13) are connected;Tail gas gas outlet (17) by exhaust pipe road respectively with liquefied pot gas exhaust inspecting Valve and the one end for curing tank gas exhausting valve are connected, the second outlet of the other end and liquefied pot (5) of liquefied pot gas exhausting valve Be connected, cure tank gas exhausting valve the other end with cure tank (7) second outlet be connected, circularly purifying air accumulator (18) it is defeated Entering and terminates on exhaust pipe road, the output end of circularly purifying air accumulator (18) accesses on mixed gas delivery pipeline, The side of the close tail gas gas outlet (17) of circularly purifying air accumulator (18) on-position in exhaust pipe road is provided with tail Gas control valve.
2. a kind of sulfur hexafluoride and nitrogen mixed gas purification separation purifying plant according to claim 1, it is characterised in that: Liquefied pot (5) setting is in the top of solidification tank (7), and the second outlet of liquefied pot (5) is by being provided with connection control valve Pipeline is connected with the second outlet of solidification tank (7);The first outlet of liquefied pot (5) by be provided with drainage control valve pipeline with The import for curing tank (7) is connected.
3. a kind of sulfur hexafluoride and nitrogen mixed gas purification separation purifying plant according to claim 1, it is characterised in that: It is provided with first pressure gauge (21), first pressure regulating valve (19) on the mixed gas delivery pipeline and is connect in the form of bypass Enter the first vacuum pump (14) of the pipeline.
4. a kind of sulfur hexafluoride and nitrogen mixed gas purification separation purifying plant according to claim 1, it is characterised in that: Gas cleaning plant (2) is provided on the mixed gas delivery pipeline, gas cleaning plant (2) includes the mixing being arranged in series Gas dry filter, the molecular sieve for adsorbing sulfur hexafluoride decomposition product and mixed gas particulate filter.
5. a kind of sulfur hexafluoride and nitrogen mixed gas purification separation purifying plant according to claim 1, it is characterised in that: Second pressure gauge (26), the first thermometer (27) and the first safety valve (28), solidification tank (7) are provided on the liquefied pot (5) On be provided with third pressure gauge (30), second temperature meter (31), the second safety valve (32) and heating device, circularly purifying air accumulator (18) it is provided with the 4th pressure gauge (56) and third thermometer (57) on, is provided on the input terminal of circularly purifying air accumulator (18) Input control valve is provided with output control valve on the output end of circularly purifying air accumulator (18).
6. a kind of sulfur hexafluoride and nitrogen mixed gas purification separation purifying plant according to claim 1, it is characterised in that: It is provided with the 5th pressure gauge (60), second pressure regulating valve (48) on the exhaust pipe road and access should in the form of bypassing The second vacuum pump (15) of separate tail gas gas outlet (17) side of circularly purifying air accumulator (18) on-position on pipeline, the The inlet end of two vacuum pumps (15) is connected by being disposed with the pipeline of control valve A and control valve B with exhaust pipe road, institute It states and is disposed with control valve C and control valve D on sulfur hexafluoride conveyance conduit, one end access of control valve E is in control valve C and control On piping connection portion between valve D processed, other end access is on the piping connection portion between control valve A and control valve B.
7. a kind of sulfur hexafluoride and nitrogen mixed gas purification separation purifying plant according to claim 1, it is characterised in that: Topping-up pump (10) is provided on the sulfur hexafluoride conveyance conduit;The heat exchanger tube of the dry type shell-and-tube heat exchanger (4) passes through setting There is the pipeline of nitrogen gas control valve to be connected with nitrogen gas outlet (13);It is provided with positioned at tail gas gas outlet on the exhaust pipe road (17) exhaust gas processing device between tail gas control valve (16) or/and remote positioned at circularly purifying air accumulator (18) on-position From tail gas gas outlet (17) side for the pressure-swing absorption apparatus (64) except nitrogen.
8. the recycling of a kind of sulfur hexafluoride and nitrogen mixed gas, purification and the method for purifying sulfur hexafluoride, it is characterised in that:Packet Include following steps:
1) solidification tank (7) and liquefied pot (5) are vacuumized before recycling;
2) mixed gas is recycled
Using setting solidification tank (7) and liquefied pot (5) in cooling medium channel, make liquid nitrogen pass sequentially through solidification tank (7) and Liquefied pot (5);Liquefied pot (5) is passed through after the mixed gas of sulfur hexafluoride and nitrogen is compressed successively, precooling to cool down, it will Solidification tank (7) is passed through through cooling sulfur hexafluoride to be cooled down, sulfur hexafluoride is made to cure in liquefied pot (5);
3) when the quantity of cured sulfur hexafluoride in solidification tank (7) reaches to threshold value, alternatively, the mixed gas is recovered It finishes, then mixed gas stopping is passed through liquefied pot, and continues in cooling medium channel to be passed through liquid nitrogen, waits for that sulfur hexafluoride is fully solid Stop being passed through liquid nitrogen after change;
4) after step 3), respectively to liquefied pot (5) and solidification after the pressure at expulsion of adjusting liquefied pot (5) and solidification tank (7) Tank (7) is exhausted, and the gas that liquefied pot (5) and solidification tank (7) is discharged is emitted into air after harmless treatment, alternatively, The gas that liquefied pot (5) and solidification tank (7) is discharged is carried out by pressure-swing absorption apparatus (64) except input cycle after nitrogen treatment It is stored in purification air accumulator (18);
5) after step 4), liquefied pot (5) and solidification tank (7) are vacuumized respectively, until reach certain vacuum degree, Wherein, it is stored from the gas input circularly purifying air accumulator (18) that liquefied pot (5) and solidification tank (7) are extracted out;
6) after step 5), cured sulfur hexafluoride in solidification tank (7) is heated, then by sulfur hexafluoride self-curing tank (7) it is injected into external returnable in, the gas being stored in circularly purifying air accumulator is recycling mixed gas mistake next time It is passed through liquefied pot (5) after compressed in journey, precooling.
9. according to the method described in claim 8, it is characterized in that:In the step 1), also the returnable is taken out Vacuum;In the step 2), the mixed gas is derived from the SF of the electrical equipment by purification6/N2Mix insulation medium, it is described Purification includes dry, absorption SF6Decomposition product and filtration of particulate matters step, the SF6/N2Mix insulation medium is purifying Preceding admission pressure control is 0.1~0.2MPa, when admission pressure is less than 0.1MPa, is continued using the negative pressure to be formed is vacuumized Recycle the SF of electrical equipment6/N2Mix insulation medium;In the step 3), the time for continuing to be passed through liquid nitrogen is 30~40min, temperature Degree control is -90 DEG C~-100 DEG C;In the step 4), the pressure at expulsion control of liquefied pot (5) and solidification tank (7) for 0.2~ 0.4MPa;In the step 5), liquefied pot (5) and solidification tank (7) vacuum degree be controlled as 20~80Pa and 0.06~ 0.08MPa;In the step 6), the heating temperature of sulfur hexafluoride is -5 DEG C~10 DEG C.
10. according to the method described in claim 8, it is characterized in that:The nitrogen that pressure-swing absorption apparatus (64) is desorbed is logical It is expelled to air after crossing harmless treatment;Liquid nitrogen passes sequentially through solidification tank (7) and liquefied pot (5) and enters dry pipe shell heat exchanger afterwards (4), the mixed gas is pre-chilled using dry type shell-and-tube heat exchanger (4), nitrogen made of changing to liquid nitrogen, it is dry in discharge Formula shell-and-tube heat exchanger is recycled after (4).
CN201810339359.XA 2018-04-16 2018-04-16 Sulfur hexafluoride and nitrogen mixed gas purification separation purifying plant and its reclaiming clean purify sulfur hexafluoride method Pending CN108355461A (en)

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CN114007723A (en) * 2019-07-22 2022-02-01 Dilo配件和设备有限公司 Method for separating substitute gas mixtures used as insulating media
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CN113984612A (en) * 2021-10-30 2022-01-28 福州大学 Particulate matter detects integrated device in GIS
CN113984612B (en) * 2021-10-30 2023-08-04 福州大学 Particulate matter detects integrated device in GIS
CN114620691A (en) * 2022-04-21 2022-06-14 重庆渝能滤油机制造有限公司 Sulfur hexafluoride purification device and method
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