CN109270540A - Continuous ultrasound Wave ranging device and method based on micro electronmechanical piezoelectric ultrasonic transducer array - Google Patents
Continuous ultrasound Wave ranging device and method based on micro electronmechanical piezoelectric ultrasonic transducer array Download PDFInfo
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- CN109270540A CN109270540A CN201811308071.2A CN201811308071A CN109270540A CN 109270540 A CN109270540 A CN 109270540A CN 201811308071 A CN201811308071 A CN 201811308071A CN 109270540 A CN109270540 A CN 109270540A
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- 238000000034 method Methods 0.000 title claims abstract description 17
- 238000002604 ultrasonography Methods 0.000 title claims abstract description 15
- 238000005259 measurement Methods 0.000 claims abstract description 27
- 238000002955 isolation Methods 0.000 claims abstract description 7
- 239000000463 material Substances 0.000 claims description 13
- 230000003321 amplification Effects 0.000 claims description 8
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 8
- 230000005540 biological transmission Effects 0.000 claims description 6
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 4
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 4
- 229910052750 molybdenum Inorganic materials 0.000 claims description 4
- 239000011733 molybdenum Substances 0.000 claims description 4
- 229910017083 AlN Inorganic materials 0.000 claims description 3
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 239000004411 aluminium Substances 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 238000003491 array Methods 0.000 claims description 2
- 230000000903 blocking effect Effects 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 claims description 2
- 239000011787 zinc oxide Substances 0.000 claims description 2
- QNZFKUWECYSYPS-UHFFFAOYSA-N lead zirconium Chemical compound [Zr].[Pb] QNZFKUWECYSYPS-UHFFFAOYSA-N 0.000 claims 1
- 239000000758 substrate Substances 0.000 abstract description 5
- 230000000644 propagated effect Effects 0.000 abstract description 2
- 230000005284 excitation Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- IWXBAFPAYLDYOJ-UHFFFAOYSA-N [Pb].[Zr].[Ti] Chemical compound [Pb].[Zr].[Ti] IWXBAFPAYLDYOJ-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 235000019504 cigarettes Nutrition 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
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- 239000002574 poison Substances 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
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- 239000007787 solid Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S15/00—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
- G01S15/02—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems using reflection of acoustic waves
- G01S15/06—Systems determining the position data of a target
- G01S15/08—Systems for measuring distance only
- G01S15/32—Systems for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
- G01S15/36—Systems for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated with phase comparison between the received signal and the contemporaneously transmitted signal
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Acoustics & Sound (AREA)
- Computer Networks & Wireless Communication (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
Abstract
The invention discloses a kind of continuous ultrasound Wave ranging device and method based on micro electronmechanical piezoelectric ultrasonic transducer array.Transmitting and receiving module in the present invention are independent two chips respectively, can effectively reduce the crosstalk signal propagated along substrate, be separated between the two with one block of isolation plate, can further prevent the interference of transverse sound wave signal.And transmitting and receiving module are located at the same end, convenient for integrated.The present invention successively emits three different continuous waves of frequency by micro electronmechanical piezoelectric ultrasonic transducer array, and can be different according to the range of measurement, the frequency of the continuous wave of transmitting is adjusted, to achieve the purpose that take into account measurement range and measurement accuracy.
Description
Technical field
Present invention relates to a kind of, and the continuous ultrasonic ranging based on micro electronmechanical piezoelectric ultrasonic transducer array fills
It sets and method.
Background technique
Ultrasonic wave is a kind of mechanical wave of the vibration frequency higher than 20kHz.The course of work of ultrasonic transducer is exactly voltage
Mutual conversion process between ultrasonic wave emits the probe of ultrasonic wave for voltage when ultrasonic transducer emits ultrasonic wave
The ultrasonic wave of conversion is launched, and when ultrasonic transducer receives ultrasonic wave, receives the probe of ultrasonic wave for Ultrasonic transformation
Voltage be transmitted back to microcontroller chip.Ultrasonic wave is high with vibration frequency, wavelength is short, diffraction phenomenon is small and good directionality etc. is excellent
Point.Have using the advantages of ultrasonic distance measurement: it is insensitive to extraneous color and electromagnetic field, can be used for dark have dust or cigarette poison,
The strong place of electromagnetic interference.Conventional ultrasonic wave energy converter is bulky, power consumption is high, is unfavorable for integrating, micro electronmechanical piezoelectric ultrasonic
Energy converter has then well solved these problems.It is traditional based on the flight time since the aerial decaying of ultrasonic wave is larger
Distance measuring method there are biggish errors on determining the echo time.Realize that measurement distance is surveyed using the phase information of continuous wave
Amount can reduce random error, to improve measurement progress.Micro electronmechanical piezoelectric ultrasonic transducer array is utilized in the present invention
Transmitting and the continuous wave signal for receiving three sections of different frequencies near resonance frequency, and can be changed according to the variation of ranging range
The frequency for becoming transmitting signal, to take into account measurement range and measurement accuracy.
Summary of the invention
It is poor it is an object of the invention to solve measurement accuracy existing for existing ultrasonic transducer ranging, it is difficult to integrated
Problem, and a kind of continuous ultrasound Wave ranging device based on micro electronmechanical piezoelectric ultrasonic transducer array is provided.
The technical solution adopted by the present invention to solve the technical problems is:
Based on the continuous ultrasound Wave ranging device of micro electronmechanical piezoelectric ultrasonic transducer array, it includes fixture, the folder
Mutually independent ultrasonic wave transmitting module and ultrasonic wave receiving module are installed, and ultrasonic wave transmitting module and ultrasonic wave connect on tool
It receives and is equipped with one block of isolation plate for blocking the transmission of transverse sound wave signal between module；The ultrasonic wave transmitting module and ultrasonic wave connect
It receives module and is all made of micro electronmechanical piezoelectric ultrasonic transducer array module；The micro electronmechanical piezoelectric ultrasonic transducer array module
Bottom is basal layer, and basal layer is equipped with transducer unit, and transducer unit is successively superimposed by hearth electrode, piezoelectric layer and top electrode
It forms, hearth electrode and top electrode pass through connecting line respectively and be connected from different terminals.
Preferably, in the micro electronmechanical piezoelectric ultrasonic transducer array module, transducer unit have it is multiple, and
Rectangular array is arranged on basal layer, and each transducer unit is connected on terminals in parallel.
Further, the rectangular array is 5 × 5 rectangular arrays.
Further, the material of top electrode and hearth electrode is molybdenum；The material of piezoelectric layer is aluminium nitride, zinc oxide or zirconium titanium
Lead plumbate piezoelectric ceramics；The material of connecting line is aluminium；The material of basal layer is silicon.
Further, the resonance frequency of the micro electronmechanical piezoelectric ultrasonic transducer array module is 492kHz ,-
Three dB bandwidth > 10kHz.
Preferably, the isolation plate is plastic septum.
Preferably, the ultrasonic wave transmitting module connects external signal driving source by terminals.
Another object of the present invention is to provide a kind of being changed based on micro electronmechanical piezoelectric ultrasonic using above-mentioned range unit
The step of continuous ultrasonic distance measuring method of energy device array, this method, is as follows:
Step 1: emitting three sections of different frequencies near resonance frequency to testee using the ultrasonic wave transmitting module
Rate continuous wave signal, and received by ultrasonic wave receiving module by the reflected ultrasonic signal of testee；
Step 2: calculating three sections of transmitting sound waves and receiving the phase difference of sound wave, the phase between adjacent two band frequencies section is generated
The distance of testee is calculated further according to multifrequency continuous ultrasonic range measurement principle for poor and corresponding difference on the frequency.
Preferably, calculating three sections of transmitting sound waves when the transducer unit has multiple and receiving the phase of sound wave
Before difference, need first to carry out charge amplification to the ultrasonic signal that ultrasonic wave receiving module receives.
Preferably, the ultrasonic wave transmitting module emits the frequency of three sections of continuous wave signals to testee, it can basis
The range of ranging is adjusted；Long range ranging for 10~30cm, the frequency that need to adjust three sections of continuous wave signals make it more
Expand measurement range close to the resonance frequency of micro electronmechanical piezoelectric ultrasonic transducer array module to improve acoustic pressure in transmission；It is right
In the short distance ranging for being less than 10cm, need to adjusting the frequencies of three sections of continuous wave signals, to expand its frequency band poor, to improve measurement essence
Degree.
The transmitting of range unit and receiving module are independent two chips respectively in the present invention, can effectively reduce in this way
The crosstalk signal propagated along substrate, is separated with one block of isolation plate between the two, can further prevent the dry of transverse sound wave signal
It disturbs.And transmitting and receiving module are located at the same end, convenient for integrated.The present invention passes through micro electronmechanical piezoelectric ultrasonic transducer array
The successively different continuous wave of three frequencies of transmitting, another micro electronmechanical piezoelectric ultrasonic array received chip is utilized at the same time
Reflected ultrasonic wave is received, is reached by the phase difference and corresponding difference on the frequency of determining three groups of transmitting sound waves and reception sound wave
To the purpose of ranging.And can be different according to the range of measurement, the frequency of the continuous wave of transmitting is adjusted, to reach simultaneous
Care for the purpose of measurement range and measurement accuracy.
Detailed description of the invention
Present invention will be further explained below with reference to the attached drawings and examples
Fig. 1 is the continuous ultrasound Wave ranging device schematic diagram based on micro electronmechanical piezoelectric ultrasonic transducer array；
Fig. 2 is 5 × 5 micro electronmechanical piezoelectric ultrasonic transducer array schematic diagrames；
Fig. 3 is multifrequency continuous ultrasonic range measurement principle figure；
Fig. 4 is range-measurement system module flow diagram.
Specific embodiment
The present invention is described in further detail with reference to the accompanying drawings and examples.It is understood that this place is retouched
The specific example stated is used only for explaining the present invention rather than limiting the invention.It is further to note that retouching for convenience
It states, part related to the present invention is just shown in attached drawing rather than entire infrastructure.
As shown in Figure 1, the continuous ultrasonic ranging dress based on micro electronmechanical piezoelectric ultrasonic transducer array in the present invention
It sets, with one for carrying the fixture of other component, fixture is in " king " font in the present embodiment, the horizontal stripe shape among fixture
Plane two sides is separately installed with mutually independent ultrasonic wave transmitting module 11 and ultrasonic wave receiving module 12, advantageously reduces along base
Propagate crosstalk signal in bottom.There is mounting hole in the horizontal stripe-shape plane of fixture two other.And it is vertically solid in the perpendicular stripe-shape plane of fixture
Surely there is one block of isolation plate 13, which is located just between ultrasonic wave transmitting module 11 and ultrasonic wave receiving module 12, energy
The transverse sound wave signal transmission between two modules is enough blocked, avoids interfering.
In the present embodiment, ultrasonic wave transmitting module 11 and ultrasonic wave receiving module 12 are all made of micro electronmechanical piezoelectric ultrasonic
Transducer array module, specific structure are as shown in Figure 2.The micro electronmechanical piezoelectric ultrasonic transducer array module bottom is substrate
Layer 05, basal layer 05 are equipped with 25 transducer units, and 25 transducer units are in the uniform rectangular that upper surface of substrate is in 5 × 5
Array arrangement.Each transducer unit is successively formed by stacking by hearth electrode 03, piezoelectric layer 02 and top electrode 01,03 He of hearth electrode
Top electrode 01 is connected by connecting line 04 from different terminals respectively.In the present embodiment, each transducer unit is with parallel connection
Mode is connected on terminals, and the top electrode 01 of all units is all connected with a terminals in same module, all units
Hearth electrode 03 is all connected with another terminals.Ultrasonic wave transmitting module 11 connects external signal excitation module by terminals, right
Each transducer unit applies pumping signal, and ultrasonic wave receiving module 12 exports the signal received by terminals outward.
In the micro electronmechanical piezoelectric ultrasonic transducer array module of the present embodiment, the material of top electrode 01 is molybdenum, radius
It is 140 μm, with a thickness of 0.2 μm；The material of piezoelectric layer 02 is aluminium nitride, and radius is 200 μm, with a thickness of 1 μm；Hearth electrode 03
Material is also molybdenum, and radius is 200 μm, with a thickness of 0.2 μm；The material of connecting line 04 is aluminium, with a thickness of 1 μm；The material of substrate 05
For silicon, with a thickness of 5 μm.Completely cutting off plate 13 is the plastic septum with a thickness of 1mm.The micro electronmechanical piezoelectric ultrasonic transducer array module
Resonance frequency be 492kHz ,-three dB bandwidth > 10kHz, can be with continuous wave of the tranmitting frequency in 492 ± 5kHz, thus significantly
Improve the resolution ratio of ranging.
The range unit is formed in 5 × 5 matrix form of combination as continuous wave signal when in use, by transducer unit
Transmitting module and receiving module, rather than rely on an independent unit, transmitting signal can be improved in this way and receive the strong of signal
Degree.5 × 5 units are connected by way of in parallel, to reduce the complexity of driving, detection circuit.Moreover, relative to other
Receiving module is separately set in the device on testee, transmitting of the invention and receiving module are positions relative to testee
In the same end, this greatly facilitates the integrated of range unit.
The continuous ultrasonic ranging side based on micro electronmechanical piezoelectric ultrasonic transducer array is carried out using above-mentioned range unit
Method, its step are as follows:
Step 1: emitting three sections of differences near resonance frequency to testee using the ultrasonic wave transmitting module 11
Frequency continuous wave signal, and received by ultrasonic wave receiving module 12 by the reflected ultrasonic signal of testee；
Step 2: calculating three sections of transmitting sound waves and receiving the phase difference of sound wave, the phase between adjacent two band frequencies section is generated
The distance of testee is calculated further according to multifrequency continuous ultrasonic range measurement principle for poor and corresponding difference on the frequency.
Fig. 1 is multifrequency continuous ultrasonic range measurement principle figure, is explained in detail below and is calculated according to multifrequency continuous ultrasonic range measurement principle
Obtain the process of the distance of testee.The frequency for 3 frequency range continuous waves that ultrasonic wave transmitting module 11 emits is respectively f1, f2
And f3, f1> f2> f3, after ultrasonic wave receiving module 12 obtains three sections of received waves, calculate three sections of received waves and corresponding transmitted wave
Phase difference is denoted asWithThen the phase difference of different frequency sections is generatedIf (calculating
's360 ° are then added, i=1,2), while seeking corresponding frequency difference Δ f1=f1-f2, Δ f2=f1-f3.In known sound
Under fast c, the distance L of object can be calculated according to following formula:
Int [] is to be rounded symbol, indicates to be rounded [] interior calculated result.By above-mentioned calculation formula it is found that the distance measuring method
A class resolution ratio be c/ Δ f2, two class resolution ratios are c/f1。
In addition, due to the device ultrasonic wave tranmitting frequency have biggish adjustable extent, transmitting continuous wave into
When row ranging, the cw frequency of transmitting can be adjusted according to the range of ranging, take into account measurement range and measurement to reach
The purpose of precision.For (10-30cm) ranging over long distances, the frequency for needing to adjust three sections of continuous wave signals makes it closer to micro-
The resonance frequency of electromechanical piezoelectric ultrasonic transducer array module may be implemented more with three sections of continuous waves closer to resonance frequency
Big acoustic pressure in transmission, to expand measurement range；For short distance (10cm) ranging, the frequency of three sections of continuous wave signals need to be adjusted
It is poor to expand its frequency band, high-acruracy survey may be implemented with the biggish three sections of continuous waves of frequency band difference.For example, micro electronmechanical in the present embodiment
The resonance frequency of piezoelectric ultrasonic transducer array module is 492kHz, therefore the long range ranging for 10~30cm is optional
Tri- frequency band transmitting continuous waves of 492k, 491.8k, 490kHz are selected, realizes and tests over long distances, for being less than the short distance of 10cm
From ranging, tri- frequency bands of 497k, 496.8k, 487kHz may be selected and emit continuous wave, to improve measurement accuracy.
Above-mentioned continuous ultrasonic distance measuring method can be calculated manually, can also be realized by several functional modules, Fig. 4
Illustrate a kind of form that each module is realized.Within the system, including signal excitation module 20, transmitting and receiving module 21, charge
Amplification module 22, phase-contrast module 23 and data processing module 24, each module can be by can be realized the electricity of its function
Road, electronic component, software etc. realized, without limitation.Wherein, transmitting and receiving module 21 is using above-mentioned base shown in Fig. 1 and 2
In the continuous ultrasound Wave ranging device of micro electronmechanical piezoelectric ultrasonic transducer array, and signal excitation module 20 is then used as driving source
Connect the terminals of ultrasonic wave transmitting module 11.The signal that ultrasonic wave receiving module 12 receives is delivered to charge amplification module 22
In, charge amplification is carried out to signal, the signal input phase contrast module 23 of amplification is then calculated into phase information again.Most
In whole signal input data processing module, the distance of object under test is calculated.Detailed process is as follows for it:
Step 20: providing three sections of continuous waves of different frequency to ultrasonic wave transmitting module 11 by signal excitation module 20
Pumping signal.For long range three sections of continuous waves of the resonance frequency closer to micro electronmechanical piezoelectric ultrasonic transducer array
(such as: 492k, 491.8k, 490kHz) realizes bigger acoustic pressure in transmission, tests over long distances to realize；Short distance is used
Frequency band biggish three sections of continuous waves (such as: 497k, 496.8k, 487kHz) of difference realize high-acruracy survey.
Step 21: in transmitting and receiving module 21, successively emitting above-mentioned excitation to measured object from ultrasonic wave transmitting module 11
The continuous ultrasonic signal of the corresponding three sections of different frequencies of signal is received from measured object by ultrasonic wave receiving module 12 and is reflected
Signal.
Step 22: ultrasonic wave receiving module for ultrasonic wave receiving module 12 signal carry out charge amplification rather than it is electric
It presses greatly, to embody the multiple amplification advantage of parallel connected array.
Step 23: will be received and be emitted signal in phase-contrast module 23 from amplified signal obtained in step 22
Phase bit comparison, obtain corresponding phase informationWithAnd then it obtains
Step 24: on the basis of step 23 obtains phase information, in conjunction with corresponding frequency information Δ f1、Δf2And velocity of sound c
The distance L (calculation formula is as previously described) of object is calculated, realizes ranging.
Above-mentioned embodiment is only a preferred solution of the present invention, so it is not intended to limiting the invention.Have
The those of ordinary skill for closing technical field can also make various changes without departing from the spirit and scope of the present invention
Change and modification.Therefore all mode technical solutions obtained for taking equivalent substitution or equivalent transformation, all fall within guarantor of the invention
It protects in range.
Claims (10)
1. a kind of continuous ultrasound Wave ranging device based on micro electronmechanical piezoelectric ultrasonic transducer array, which is characterized in that including
Fixture is equipped with mutually independent ultrasonic wave transmitting module (11) and ultrasonic wave receiving module (12), and ultrasound on the fixture
One block of isolation plate for blocking the transmission of transverse sound wave signal is equipped between wave transmitting module (11) and ultrasonic wave receiving module (12)
(13)；The ultrasonic wave transmitting module (11) and ultrasonic wave receiving module (12) is all made of micro electronmechanical piezoelectric supersonic wave transducer
Array module；The micro electronmechanical piezoelectric ultrasonic transducer array module bottom is basal layer (05), and basal layer (05) is equipped with
Transducer unit, transducer unit are successively formed by stacking by hearth electrode (03), piezoelectric layer (02) and top electrode (01), hearth electrode
(03) it is connected respectively by connecting line (04) from different terminals with top electrode (01).
2. the continuous ultrasound Wave ranging device as described in claim 1 based on micro electronmechanical piezoelectric ultrasonic transducer array,
Be characterized in that, in the micro electronmechanical piezoelectric ultrasonic transducer array module, transducer unit have it is multiple, and in basal layer
(05) rectangular array is arranged on, and each transducer unit is connected on terminals in parallel.
3. the continuous ultrasound Wave ranging device as claimed in claim 2 based on micro electronmechanical piezoelectric ultrasonic transducer array,
It is characterized in that, the rectangular array is 5 × 5 rectangular arrays.
4. the continuous ultrasound Wave ranging device as claimed in claim 3 based on micro electronmechanical piezoelectric ultrasonic transducer array,
It is characterized in that, the material of top electrode (01) and hearth electrode (03) is molybdenum；The material of piezoelectric layer (02) is aluminium nitride, zinc oxide or zirconium
Lead titanate piezoelectric ceramics；The material of connecting line (04) is aluminium；The material of basal layer (05) is silicon.
5. the continuous ultrasound Wave ranging device as claimed in claim 3 based on micro electronmechanical piezoelectric ultrasonic transducer array,
It is characterized in that, the resonance frequency of the micro electronmechanical piezoelectric ultrasonic transducer array module is 492kHz.
6. the continuous ultrasound Wave ranging device as described in claim 1 based on micro electronmechanical piezoelectric ultrasonic transducer array,
It is characterized in that, the isolation plate (13) is plastic septum.
7. the continuous ultrasound Wave ranging device as described in claim 1 based on micro electronmechanical piezoelectric ultrasonic transducer array,
It is characterized in that, the ultrasonic wave transmitting module (11) connects external signal driving source by terminals.
8. a kind of utilize the continuous super based on micro electronmechanical piezoelectric ultrasonic transducer array of range unit as described in claim 1
Sound ranging method, which is characterized in that steps are as follows:
Step 1: emitting three sections of different frequencies near resonance frequency to testee using the ultrasonic wave transmitting module (11)
Rate continuous wave signal, and received by ultrasonic wave receiving module (12) by the reflected ultrasonic signal of testee；
Step 2: calculate three sections of transmitting sound waves and receive the phase differences of sound wave, generate the phase difference between adjacent two band frequencies section with
And corresponding difference on the frequency, the distance of testee is calculated further according to multifrequency continuous ultrasonic range measurement principle.
9. distance measuring method as claimed in claim 8, which is characterized in that when the transducer unit has multiple, calculating three
Before section transmitting sound wave and the phase difference for receiving sound wave, need the ultrasonic signal that first ultrasonic wave receiving module (12) is received into
The amplification of row charge.
10. distance measuring method as claimed in claim 8, which is characterized in that the ultrasonic wave transmitting module (11) is to testee
Emit the frequency of three sections of continuous wave signals, can be adjusted according to the range of ranging；Long range ranging for 10~30cm needs
The frequency for adjusting three sections of continuous wave signals makes it closer to the resonance frequency of micro electronmechanical piezoelectric ultrasonic transducer array module,
To improve acoustic pressure in transmission, expand measurement range；For being less than the short distance ranging of 10cm, the frequency of three sections of continuous wave signals need to be adjusted
It is poor that rate expands its frequency band, to improve measurement accuracy.
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| CN110118943A (en) * | 2019-04-11 | 2019-08-13 | 华中科技大学 | A kind of broadband ultrasonic probe, ultrasonic receiver and its application |
| CN111822316A (en) * | 2020-07-09 | 2020-10-27 | 上海思立微电子科技有限公司 | Packaging structure and packaging method of ultrasonic flight sensor and distance measurement electronic device |
| CN114631847A (en) * | 2022-05-20 | 2022-06-17 | 之江实验室 | Time-sharing multiplexing method for inhibiting crosstalk of medical ultrasonic transducer array |
| WO2022252227A1 (en) * | 2021-06-04 | 2022-12-08 | Abb Schweiz Ag | Sensing assembly for use in piezoelectric liquid level sensor |
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