CN209166556U - Flowmeter transition time measuring device based on micromechanics piezoelectric supersonic wave transducer - Google Patents
Flowmeter transition time measuring device based on micromechanics piezoelectric supersonic wave transducer Download PDFInfo
- Publication number
- CN209166556U CN209166556U CN201822187893.1U CN201822187893U CN209166556U CN 209166556 U CN209166556 U CN 209166556U CN 201822187893 U CN201822187893 U CN 201822187893U CN 209166556 U CN209166556 U CN 209166556U
- Authority
- CN
- China
- Prior art keywords
- ultrasonic wave
- transducer
- ultrasonic
- transition time
- module
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000007704 transition Effects 0.000 title claims abstract description 34
- 239000012530 fluid Substances 0.000 claims abstract description 26
- 238000012360 testing method Methods 0.000 claims abstract description 5
- 238000003491 array Methods 0.000 claims abstract description 3
- 239000000463 material Substances 0.000 claims description 14
- 238000002604 ultrasonography Methods 0.000 claims description 6
- 238000011156 evaluation Methods 0.000 claims description 5
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 4
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 4
- 229910052750 molybdenum Inorganic materials 0.000 claims description 4
- 239000011733 molybdenum Substances 0.000 claims description 4
- 229910017083 AlN Inorganic materials 0.000 claims description 3
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 239000004411 aluminium Substances 0.000 claims description 3
- 238000009434 installation Methods 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 2
- 239000011787 zinc oxide Substances 0.000 claims description 2
- QNZFKUWECYSYPS-UHFFFAOYSA-N lead zirconium Chemical compound [Zr].[Pb] QNZFKUWECYSYPS-UHFFFAOYSA-N 0.000 claims 1
- 230000000644 propagated effect Effects 0.000 abstract description 2
- 230000002411 adverse Effects 0.000 description 9
- 238000005259 measurement Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 230000005284 excitation Effects 0.000 description 3
- 238000005086 pumping Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000002457 bidirectional effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Abstract
The utility model discloses a kind of flowmeter transition time measuring devices based on micromechanics piezoelectric supersonic wave transducer.Mutually independent ultrasonic wave transmitting and receiving module are installed in the radial tiltedly opposite side of pipe under test, and two modules are separated by fluid to be measured；The ultrasonic wave transmitting module and ultrasonic wave receiving module is all made of micromechanics piezoelectric ultrasonic transducer array module；The micromechanics piezoelectric ultrasonic transducer array module bottom is basal layer, basal layer is equipped with transducer unit, transducer unit is successively formed by stacking by hearth electrode, piezoelectric layer and top electrode, and hearth electrode and top electrode pass through connecting line respectively and be connected from different terminals.By being arranged in, pipeline is radial tiltedly successively to be emitted mutually respectively along the downbeam of fluid and countercurrent direction to two pieces of independent micromechanics piezoelectric ultrasonic transducer arrays in direction and receives ultrasonic pulse the utility model, the transition time that ultrasonic wave concurrent-countercurrent is propagated is measured, for calculating fluid flow rate and flow.
Description
Technical field
The utility model relates to be it is a kind of based on micromechanics piezoelectric supersonic wave transducer the flowmeter transition time survey
Measure device.
Background technique
Ultrasonic wave is a kind of mechanical wave of the vibration frequency higher than 20kHz.The course of work of ultrasonic transducer is exactly voltage
Mutual conversion process between ultrasonic wave emits the probe of ultrasonic wave for voltage when ultrasonic transducer emits ultrasonic wave
The ultrasonic wave of conversion is launched, and when ultrasonic transducer receives ultrasonic wave, receives the probe of ultrasonic wave for Ultrasonic transformation
Voltage be transmitted back to microcontroller chip.Ultrasonic wave is high with vibration frequency, wavelength is short, diffraction phenomenon is small and good directionality etc. is excellent
Point.Have using the advantages of ultrasonic measurement flow: may be implemented non-contact measurement, at the same range it is big, without crushing, without resistive portion
Part, and can be with bidirectional measurement.Conventional ultrasonic wave energy converter is bulky, power consumption is high, is unfavorable for integrating, micromechanics piezoelectric ultrasonic
Energy converter has then well solved these problems.The key component of flowmeter is transition time measuring device therein, passes through survey
The fair current transition time and adverse current transition time of ultrasonic wave in a fluid are measured, fluid velocity can be measured by traditional time difference method
And flow.Therefore, how by micromachined ultrasonic transducers be applied to flowmeter transition time measuring device in, be one urgently
Technical problem to be solved.The transmitting of micromechanics piezoelectric ultrasonic transducer array is utilized in the utility model and receives ultrasonic wave
Pulse, and fluid velocity is measured according to currently used time difference method.
Summary of the invention
Utility model aims to solve volumes existing for existing flowmeter greatly, is difficult to the problems such as integrated, and mentions
For a kind of flowmeter transition time measuring device based on micromechanics piezoelectric supersonic wave transducer.
The technical scheme adopted by the utility model to solve the technical problem is as follows:
Flowmeter transition time measuring device based on micromechanics piezoelectric supersonic wave transducer, it includes being installed on to test tube
Ultrasonic wave transmitting module and ultrasonic wave receiving module on road side wall, ultrasonic wave transmitting module and ultrasonic wave receiving module are mutually only
It is vertical and radial tiltedly to installation along pipeline, it is separated between the two by fluid to be measured；The ultrasonic wave transmitting module and ultrasonic wave receive
Module is all made of micromechanics piezoelectric ultrasonic transducer array module, and the ultrasound transducer array module bottom is substrate
Layer, basal layer are equipped with transducer unit, transducer unit be successively superimposed by hearth electrode, piezoelectric layer and top electrode from top to bottom and
At hearth electrode and top electrode pass through connecting line respectively and be connected from different terminals.
Preferably, in the ultrasound transducer array module, the transducer unit have it is multiple, and in basal layer
Upper rectangular array arrangement, each transducer unit are connected on terminals in parallel.
Further, the rectangular array is 10 × 10 rectangular arrays.
Preferably, the material of top electrode and hearth electrode is molybdenum；The material of piezoelectric layer is aluminium nitride, zinc oxide or zirconium metatitanic acid
Lead piezoelectric ceramics；The material of connecting line is aluminium；The material of basal layer is silicon.
Preferably, the ultrasonic wave transmitting module, which passes through terminals with ultrasonic wave receiving module, connect external signal
Driving source and ultrasonic time of flight evaluation board.
Preferably, the ultrasonic wave transmitting module and ultrasonic wave receiving module size are smaller, size only 3.5 ×
3.5mm2。
The ultrasonic wave transmitting module Yu ultrasonic wave receiving module of flowmeter transition time measuring device, diameter in the utility model
To tiltedly to pipe ends are mounted on, being separated by detected fluid, can successively distinguish along the downbeam of fluid and countercurrent direction
The transition time that transmitting is propagated with reception ultrasonic pulse, measurement ultrasonic wave concurrent-countercurrent mutually, for calculating fluid flow rate and stream
Amount.Ultrasonic wave transmitting module and ultrasonic wave receiving module small volume can emit in the pipeline of small diameter tube super with reception respectively
Sound wave is realized in the complex environments such as small diameter tube or crooked pipeline and measures fluid flow rate.
Detailed description of the invention
The present invention will be further described with reference to the accompanying drawings and examples
Fig. 1 is the flowmeter transition time measuring device schematic diagram based on micromechanics piezoelectric supersonic wave transducer；
Fig. 2 is 10 × 10 micromechanics piezoelectric ultrasonic transducer array schematic diagrames.
Specific embodiment
The utility model is described in further detail with reference to the accompanying drawings and examples.It is understood that herein
Described specific example is used only for explaining the utility model, rather than the restriction to the utility model.It is related in the utility model
And device commercially available existing product otherwise can be used unless specifically indicated.
As shown in Figure 1, the flowmeter transition time based on micromechanics piezoelectric supersonic wave transducer in the utility model surveys
Device is measured, primary structure includes the ultrasonic wave transmitting module and ultrasonic wave receiving module being installed on pipe under test side wall, is surpassed
Sound wave transmitting module and ultrasonic wave receiving module are spatially mutually indepedent.Two modules are radial tiltedly to installation along pipeline, wherein
The heart is respectively positioned on a symmetrical vertical section of pipeline radial direction.Two modules are respectively connected to pipe under test, and between the two by be measured
Fluid separates, and ultrasonic wave transmitting module T1 and ultrasonic wave receiving module T2 can emit and receive ultrasonic wave, a module hair
Another module will be as receiving when penetrating, therefore its function and nisi.Wherein ultrasonic wave transmitting module T1 is suitable along fluid
It flows direction and emits ultrasonic wave, while the ultrasonic wave that ultrasonic wave receiving module T2 emits along fluid countercurrent current direction can be received；It is super
Acoustic receiver module T2 emits ultrasonic wave along fluid countercurrent current direction, while can receive ultrasonic wave transmitting module T1 along fluid
The ultrasonic wave of downbeam transmitting.
Ultrasonic wave transmitting module is identical as the structure type of ultrasonic wave receiving module, is all made of micromechanics piezoelectric ultrasonic and changes
It can device array module.As shown in Fig. 2, the ultrasound transducer array module bottom is basal layer 05, basal layer 05 is equipped with 100
A transducer unit, 100 transducer units are in the uniform rectangular array arrangement that upper surface of substrate is in 10 × 10.Each energy converter
Unit is successively formed by stacking by hearth electrode 03, piezoelectric layer 02 and top electrode 01 from top to bottom, and hearth electrode 03 and top electrode 01 are distinguished
It is connected by connecting line 04 from different terminals.In the present embodiment, each transducer unit is to be connected to connect in parallel
On line end.In same module, the top electrode 01 of all units is all connected with a terminals, and the hearth electrode 03 of all units connects
Connect another terminals.Since two modules are required to emit and receive ultrasonic wave, two modules are connected by terminals
External signal excitation module and ultrasonic time of flight evaluation board are connect, the specific mode of connection can be carried out according to actual model
Adjustment, without limitation.Ultrasonic wave transmitting module connects external signal excitation module by terminals, applies to each transducer unit
Pumping signal provides ultrasonic pulse pumping signal to ultrasonic wave transmitting module by signal excitation module, is emitted by ultrasonic wave
Module emits above-mentioned pumping signal.And ultrasonic wave receiving module exports the signal received by terminals outward, in ultrasonic wave
This transition time is measured in transition time evaluation board.Ultrasonic time of flight evaluation board can be crossed using any can be realized
The more equipment that measures of time, its model Texas Instrument Ti, TDC1000-TDC7200EVM in the present embodiment.The utility model
In addition, the material of top electrode 01 is molybdenum in the micromechanics piezoelectric ultrasonic transducer array module of the present embodiment,
Diameter is 196 μm, with a thickness of 0.2 μm；The material of piezoelectric layer 02 is aluminium nitride, and diameter is 200 μm, with a thickness of 1 μm；Hearth electrode 03
Material be also molybdenum, diameter is 200 μm, with a thickness of 0.2 μm；The material of connecting line 04 is aluminium, with a thickness of 1 μm；The material of substrate 05
Material is silicon, with a thickness of 5 μm.The resonance frequency of the micromechanics piezoelectric ultrasonic transducer array module is 980kHz ,-three dB bandwidth
> 20kHz, can be with ultrasonic wave of the tranmitting frequency in 980 ± 10kHz.The size of two array modules is smaller, only 3.5 ×
3.5mm2。
The range unit is formed in 10 × 10 matrix form of combination as ultrasonic signal when in use, by transducer unit
Transmitting module and receiving module, rather than rely on an independent unit, transmitting signal can be improved in this way and receive the strong of signal
Degree.10 × 10 units are connected by way of in parallel, to reduce the complexity of driving, detection circuit.In addition, energy converter list
When member has multiple, calculate transmitting sound wave and receive sound wave get over difference before, first ultrasonic wave receiving module can be received
Ultrasonic signal carries out charge amplification.
Utilize the flow measurement of the above-mentioned flowmeter transition time measuring device based on micromechanics piezoelectric supersonic wave transducer
Steps are as follows:
Step 1: emitting ultrasonic pulse along fluid downbeam using the ultrasonic wave transmitting module T1, then utilize
Ultrasonic wave receiving module T2 receives ultrasonic pulse, and records fair current transition time T at this time12；
Step 2: emitting ultrasonic pulse along fluid countercurrent current direction using ultrasonic wave transmitting module T2, ultrasound is then utilized
Wave receiving module T1 receives ultrasonic pulse, and records adverse current transition time T at this time21；
Step 3: the fair current transition time T measured using step 1 and step 212With adverse current transition time T21Difference, base
Fluid being measured flow velocity and flow are calculated in time difference method.
Fig. 1 is the measuring principle figure based on time difference method, and underdraw its measuring principle below.Ultrasonic direction of wave travel and stream
When body flow direction is identical (fair current), spread speed can be accelerated, and the corresponding propagation time can shorten；And work as the propagation side of ultrasonic wave
To it is opposite with fluid flow direction when (adverse current), spread speed can be slack-off, and the corresponding propagation time also can be elongated, passes through measurement
Propagation transition time of the ultrasonic wave under fair current state and reverse flow state can calculate to obtain fluid flow rate.
The fair current transition time of ultrasonic wave in a fluid are as follows:
The adverse current transition time of ultrasonic wave in a fluid are as follows:
Wherein L is sound channel length, and c is the spread speed of ultrasonic wave, and θ is sound channel and pipeline axial angle, T12It is crossed for fair current
More time, T21For the adverse current transition time, v is fluid flow rate.
Fair current and adverse current transit time difference are as follows:
Usually when carrying out gas flow measurement, there are c > > v, therefore fair current and adverse current transit time difference calculation formula can
With simplification are as follows:
And fluid flow rate can be calculated by the following formula and obtain:
It can be seen that the above-mentioned flowmeter transition time measuring device based on micromechanics piezoelectric supersonic wave transducer is actually
It is a flow sensor, it can be obtained in pipeline for calculating the critical data (fair current and adverse current transition time) of flow.
When needing to calculate flow, can be realized according to these data combination time difference methods.This calculating can be artificial calculating, can also be with
It is realized by the functional modules such as single-chip microcontroller, PLC, DCS.
Embodiment described above is a kind of preferable scheme of the utility model, and so it is not practical to limit
It is novel.Those of ordinary skill in related technical field can be in the case where not departing from the spirit and scope of the utility model
It makes a variety of changes and modification.Therefore all mode technical solutions obtained for taking equivalent substitution or equivalent transformation, all fall within
In the protection scope of the utility model.
Claims (6)
1. a kind of flowmeter transition time measuring device based on micromechanics piezoelectric supersonic wave transducer, which is characterized in that including
The ultrasonic wave transmitting module and ultrasonic wave receiving module being installed on pipe under test side wall, ultrasonic wave transmitting module connect with ultrasonic wave
It is mutually indepedent to receive module, and radial tiltedly to installation along pipeline, is separated between the two by fluid to be measured；The ultrasonic wave transmitting module
Micromechanics piezoelectric ultrasonic transducer array module, the ultrasound transducer array module are all made of with ultrasonic wave receiving module
Bottom is basal layer (05), and basal layer (05) is equipped with transducer unit, and transducer unit is from top to bottom by hearth electrode (03), pressure
Electric layer (02) and top electrode (01) are successively formed by stacking, hearth electrode (03) and top electrode (01) respectively by connecting line (04) with not
Same terminals are connected.
2. as described in claim 1 based on the flowmeter transition time measuring device of micromechanics piezoelectric supersonic wave transducer,
It is characterized in that, in the ultrasound transducer array module, the transducer unit has multiple, and is on basal layer (05)
Rectangular array arrangement, each transducer unit are connected on terminals in parallel.
3. as claimed in claim 2 based on the flowmeter transition time measuring device of micromechanics piezoelectric supersonic wave transducer,
It is characterized in that, the rectangular array is 10 × 10 rectangular arrays.
4. as described in claim 1 based on the flowmeter transition time measuring device of micromechanics piezoelectric supersonic wave transducer,
It is characterized in that, the material of top electrode (01) and hearth electrode (03) is molybdenum；The material of piezoelectric layer (02) is aluminium nitride, zinc oxide or zirconium
Lead titanate piezoelectric ceramics；The material of connecting line (04) is aluminium；The material of basal layer (05) is silicon.
5. as described in claim 1 based on the flowmeter transition time measuring device of micromechanics piezoelectric supersonic wave transducer,
Be characterized in that, the ultrasonic wave transmitting module and ultrasonic wave receiving module pass through terminals connect external signal driving source with
And ultrasonic time of flight evaluation board.
6. as described in claim 1 based on the flowmeter transition time measuring device of micromechanics piezoelectric supersonic wave transducer,
It is characterized in that, the ultrasonic wave transmitting module and ultrasonic wave receiving module size are 3.5 × 3.5mm2。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822187893.1U CN209166556U (en) | 2018-12-25 | 2018-12-25 | Flowmeter transition time measuring device based on micromechanics piezoelectric supersonic wave transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822187893.1U CN209166556U (en) | 2018-12-25 | 2018-12-25 | Flowmeter transition time measuring device based on micromechanics piezoelectric supersonic wave transducer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209166556U true CN209166556U (en) | 2019-07-26 |
Family
ID=67344819
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822187893.1U Active CN209166556U (en) | 2018-12-25 | 2018-12-25 | Flowmeter transition time measuring device based on micromechanics piezoelectric supersonic wave transducer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209166556U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109798944A (en) * | 2018-12-25 | 2019-05-24 | 浙江大学 | Flowmeter and transition time measuring device based on micromechanics piezoelectric supersonic wave transducer |
| CN112083188A (en) * | 2020-07-24 | 2020-12-15 | 南京航空航天大学 | Wind speed sensing actuator and working method thereof |
| CN112097843A (en) * | 2020-09-17 | 2020-12-18 | 浙江大学 | High-sensitivity ultrasonic flowmeter based on ultrasonic transducer and method thereof |
-
2018
- 2018-12-25 CN CN201822187893.1U patent/CN209166556U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109798944A (en) * | 2018-12-25 | 2019-05-24 | 浙江大学 | Flowmeter and transition time measuring device based on micromechanics piezoelectric supersonic wave transducer |
| CN112083188A (en) * | 2020-07-24 | 2020-12-15 | 南京航空航天大学 | Wind speed sensing actuator and working method thereof |
| CN112083188B (en) * | 2020-07-24 | 2021-06-22 | 南京航空航天大学 | Wind speed sensing actuator and working method thereof |
| CN112097843A (en) * | 2020-09-17 | 2020-12-18 | 浙江大学 | High-sensitivity ultrasonic flowmeter based on ultrasonic transducer and method thereof |
| CN112097843B (en) * | 2020-09-17 | 2021-11-30 | 浙江大学 | High-sensitivity ultrasonic flowmeter based on ultrasonic transducer and method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109798944A (en) | Flowmeter and transition time measuring device based on micromechanics piezoelectric supersonic wave transducer | |
| CN108704827B (en) | Air coupling type capacitive micro-processing ultrasonic transducer, preparation method and application | |
| CN209166556U (en) | Flowmeter transition time measuring device based on micromechanics piezoelectric supersonic wave transducer | |
| CN103591975B (en) | A kind of ultrasonic sensor index detection method and device | |
| CN109141731A (en) | A kind of flexible base microsensor can be used for underwater turbulent boundary layer wall surface surging pressure test and its manufacturing method | |
| CN109270540B (en) | Continuous ultrasonic ranging device and method based on micro-electromechanical voltage ultrasonic transducer array | |
| CN109029602A (en) | Flow-measuring method and flowmeter based on ultrasound | |
| WO2021036861A1 (en) | High-sensitivity magnetoresistive acoustic wave sensor and array device | |
| CN110168319A (en) | Flight time generation circuit and related chip, flowmeter and method | |
| Eovino et al. | A single-chip flow sensor based on bimorph PMUTs with differential readout capabilities | |
| CN114111927B (en) | High-frequency ultrasonic sensor suitable for gas flow detection | |
| CN114111928B (en) | High-frequency ultrasonic sensor suitable for gas flow detection | |
| Gao et al. | A miniaturized transit-time ultrasonic flowmeter based on ScAlN piezoelectric micromachined ultrasonic transducers for small-diameter applications | |
| CN103776497A (en) | Ultrasonic wave sensor for flowmeter | |
| US20080163691A1 (en) | Ultrasonic Receiver | |
| CN210075580U (en) | Acoustic vector sensor sensitivity measuring device and system | |
| Liu et al. | Airborne Rangefinding With pMUTs Array Using Differential Structure | |
| CN104655211B (en) | Ultrasonic measuring device | |
| CN116295149A (en) | Pipeline bubble size measurement system based on time difference type ultrasonic flowmeter | |
| CN207036218U (en) | Ultrasonic level gage | |
| CN105738651A (en) | Ultrasonic wave wind speed measurement apparatus with temperature compensation | |
| CN112097843B (en) | High-sensitivity ultrasonic flowmeter based on ultrasonic transducer and method thereof | |
| Chen et al. | A high accuracy transit-time airflow volumetric flowmeter based on pMUTs arrays | |
| US10031010B2 (en) | Ultrasonic measurement device and a method for operating the same | |
| CN108917866A (en) | A kind of ultrasonic sensor and its installation method for compound pipeline complex pipeline flow detection |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |