CN109270540B - Continuous ultrasonic ranging device and method based on micro-electromechanical voltage ultrasonic transducer array - Google Patents
Continuous ultrasonic ranging device and method based on micro-electromechanical voltage ultrasonic transducer array Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 24
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- 238000005259 measurement Methods 0.000 claims description 16
- 230000005284 excitation Effects 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 6
- 230000003321 amplification Effects 0.000 claims description 5
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 5
- 230000008569 process Effects 0.000 claims description 5
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 4
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 4
- 229910052750 molybdenum Inorganic materials 0.000 claims description 4
- 239000011733 molybdenum Substances 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 3
- 230000008054 signal transmission Effects 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 230000000903 blocking effect Effects 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 claims description 2
- 238000010030 laminating Methods 0.000 claims description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 claims description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 claims description 2
- 125000006850 spacer group Chemical group 0.000 claims description 2
- 239000011787 zinc oxide Substances 0.000 claims description 2
- 230000010354 integration Effects 0.000 abstract description 5
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S15/00—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
- G01S15/02—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems using reflection of acoustic waves
- G01S15/06—Systems determining the position data of a target
- G01S15/08—Systems for measuring distance only
- G01S15/32—Systems for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
- G01S15/36—Systems for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated with phase comparison between the received signal and the contemporaneously transmitted signal
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Acoustics & Sound (AREA)
- Computer Networks & Wireless Communication (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
Abstract
The invention discloses a continuous ultrasonic ranging device and method based on a micro-electromechanical voltage ultrasonic transducer array. The transmitting and receiving modules are respectively two independent chips, so that crosstalk signals propagating along the substrate can be effectively reduced, the two chips are separated by the isolation plate, and interference of transverse acoustic signals can be further prevented. And the transmitting and receiving modules are positioned at the same end, so that the integration is convenient. According to the invention, three continuous waves with different frequencies are sequentially emitted through the micro-electromechanical piezoelectric ultrasonic transducer array, and the frequency of the emitted continuous waves can be regulated according to different measuring ranges, so that the purposes of taking the measuring range and the measuring precision into consideration are achieved.
Description
Technical Field
The invention relates to a continuous ultrasonic ranging device and method based on a micro-electromechanical ultrasonic transducer array.
Background
Ultrasonic waves are mechanical waves with vibration frequencies higher than 20 kHz. The working process of the ultrasonic transducer is a mutual conversion process between voltage and ultrasonic waves, when the ultrasonic transducer transmits ultrasonic waves, the probe transmitting the ultrasonic waves transmits the ultrasonic waves converted by the voltage, and when the ultrasonic transducer receives the ultrasonic waves, the probe receiving the ultrasonic waves returns the voltage converted by the ultrasonic waves to the micro control chip. The ultrasonic wave has the advantages of high vibration frequency, short wavelength, small diffraction phenomenon, good directivity and the like. The advantages of using ultrasonic ranging are: is insensitive to external color and electromagnetic field, and can be used in dark places with dust or smoke toxicity and strong electromagnetic interference. The traditional ultrasonic transducer has huge volume, high power consumption and unfavorable integration, and the micro-electromechanical ultrasonic transducer well solves the problems. Due to the greater attenuation of ultrasonic waves in air, conventional time-of-flight based ranging approaches have a large error in determining echo time. The random error can be reduced by using the phase information of the continuous wave to realize the measurement of the measurement distance, thereby improving the measurement progress. The invention utilizes the micro-electromechanical ultrasonic transducer array to transmit and receive three sections of continuous wave signals with different frequencies near the resonant frequency, and can change the frequency of the transmitted signals according to the change of the ranging range, thereby taking the measuring range and the measuring precision into account.
Disclosure of Invention
The invention aims to solve the problems of poor measurement accuracy and difficult integration of the conventional ultrasonic transducer ranging, and provides a continuous ultrasonic ranging device based on a micro-electromechanical ultrasonic transducer array.
The technical scheme adopted for solving the technical problems is as follows:
the continuous ultrasonic ranging device based on the microcomputer voltage electric ultrasonic transducer array comprises a clamp, wherein an ultrasonic transmitting module and an ultrasonic receiving module which are mutually independent are arranged on the clamp, and an isolation plate for blocking transverse acoustic signal transmission is arranged between the ultrasonic transmitting module and the ultrasonic receiving module; the ultrasonic transmitting module and the ultrasonic receiving module are microcomputer voltage electric ultrasonic transducer array modules; the bottom of the micro-electromechanical ultrasonic transducer array module is a basal layer, the basal layer is provided with a transducer unit, the transducer unit is formed by laminating a bottom electrode, a piezoelectric layer and an upper electrode layer by layer, and the bottom electrode and the upper electrode are respectively connected with different wiring terminals through connecting wires.
Preferably, in the mems ultrasonic transducer array module, a plurality of transducer units are arranged in a rectangular array on the substrate layer, and each transducer unit is connected to the terminal in parallel.
Further, the rectangular array is a 5×5 rectangular array.
Further, the upper electrode and the bottom electrode are made of molybdenum; the piezoelectric layer is made of aluminum nitride, zinc oxide or lead zirconate titanate piezoelectric ceramic; the connecting wire is made of aluminum; the material of the substrate layer is silicon.
Furthermore, the resonance frequency of the micro-electromechanical ultrasonic transducer array module is 492kHz, and the bandwidth of-3 dB is more than 10kHz.
Preferably, the isolation plate is a plastic partition plate.
Preferably, the ultrasonic wave transmitting module is connected with an external signal excitation source through a wiring terminal.
Another object of the present invention is to provide a continuous ultrasonic ranging method based on a mems ultrasonic transducer array using the ranging apparatus, which includes the following steps:
step one, transmitting three sections of continuous wave signals with different frequencies near the resonant frequency to a measured object by utilizing the ultrasonic wave transmitting module, and receiving ultrasonic wave signals reflected by the measured object by utilizing an ultrasonic wave receiving module;
and step two, calculating the phase difference between the three-section transmitted sound wave and the received sound wave, generating the phase difference between two adjacent sections of frequency sections and the corresponding frequency difference, and calculating the distance of the measured object according to the multi-frequency continuous ultrasonic ranging principle.
Preferably, when there are a plurality of transducer units, before calculating the phase difference between the three transmitting sound waves and the receiving sound waves, the electric charge amplification is required to be performed on the ultrasonic signal received by the ultrasonic receiving module.
Preferably, the ultrasonic wave transmitting module transmits the frequency of three sections of continuous wave signals to the measured object, and the frequency can be adjusted according to the range of distance measurement; for long distance ranging of 10-30cm, the frequency of the three sections of continuous wave signals needs to be adjusted to be closer to the resonance frequency of the micro-electromechanical ultrasonic transducer array module so as to improve the emission sound pressure and enlarge the measurement range; for short distance ranging less than 10cm, the frequency of the three-section continuous wave signal is adjusted to enlarge the frequency band difference of the three-section continuous wave signal so as to improve the measurement accuracy.
The transmitting and receiving modules of the distance measuring device are respectively two independent chips, so that crosstalk signals propagating along a substrate can be effectively reduced, the two chips are separated by the isolation plate, and interference of transverse acoustic signals can be further prevented. And the transmitting and receiving modules are positioned at the same end, so that the integration is convenient. According to the invention, three continuous waves with different frequencies are sequentially emitted through the micro-electromechanical piezoelectric ultrasonic transducer array, meanwhile, the reflected ultrasonic waves are received by the other micro-electromechanical piezoelectric ultrasonic transducer array receiving chip, and the distance measurement purpose is achieved by determining the phase difference and the corresponding frequency difference of the three groups of emitted sound waves and the received sound waves. And the frequency of the emitted continuous wave can be adjusted according to different measuring ranges, so that the purposes of considering the measuring range and the measuring precision are achieved.
Drawings
The invention will be further described with reference to the accompanying drawings and examples
FIG. 1 is a schematic diagram of a continuous ultrasonic ranging device based on a microelectromechanical ultrasonic transducer array;
FIG. 2 is a schematic diagram of a 5×5 MEMS ultrasonic transducer array;
FIG. 3 is a schematic diagram of a multi-frequency continuous ultrasonic ranging;
fig. 4 is a flow chart of a ranging system module.
Detailed Description
The invention is described in further detail below with reference to the drawings and examples. It is to be understood that the specific examples described herein are intended to illustrate the invention only and are not to be limiting. It should be further noted that, for convenience of description, only some, but not all of the structures related to the present invention are shown in the drawings.
As shown in fig. 1, the continuous ultrasonic ranging device based on the mems ultrasonic transducer array in the present invention has a fixture for carrying other components, in this embodiment, the fixture is in a shape of a king, and two sides of a horizontal bar-shaped plane in the middle of the fixture are respectively provided with an ultrasonic transmitting module 11 and an ultrasonic receiving module 12 which are independent of each other, so as to facilitate reducing crosstalk signals propagating along a substrate. The other two transverse strip-shaped planes of the clamp are provided with mounting holes. And an isolation plate 13 is vertically fixed on the vertical strip-shaped plane of the clamp, and the isolation plate 13 is just positioned between the ultrasonic wave transmitting module 11 and the ultrasonic wave receiving module 12, so that the transverse acoustic wave signal transmission between the two modules can be blocked, and the interference is avoided.
In this embodiment, the ultrasonic transmitting module 11 and the ultrasonic receiving module 12 are respectively a micro-electromechanical piezoelectric ultrasonic transducer array module, and the specific structure of the array module is shown in fig. 2. The bottom of the micro-electromechanical ultrasonic transducer array module is a basal layer 05, 25 transducer units are arranged on the basal layer 05, and the 25 transducer units are uniformly distributed on the upper surface of the basal layer in a rectangular array of 5 multiplied by 5. Each transducer unit is formed by stacking a bottom electrode 03, a piezoelectric layer 02 and an upper electrode 01 layer by layer, and the bottom electrode 03 and the upper electrode 01 are respectively connected with different terminals through connecting wires 04. In this embodiment, each transducer unit is connected to the terminal in parallel, and the upper electrodes 01 of all units on the same module are connected to one terminal, and the bottom electrodes 03 of all units are connected to the other terminal. The ultrasonic wave transmitting module 11 is connected to an external signal exciting module through a terminal, an exciting signal is applied to each transducer unit, and the ultrasonic wave receiving module 12 outputs a received signal to the outside through the terminal.
In the micro electromechanical ultrasonic transducer array module of the embodiment, the upper electrode 01 is made of molybdenum, the radius is 140 μm, and the thickness is 0.2 μm; the piezoelectric layer 02 is made of aluminum nitride, has a radius of 200 mu m and a thickness of 1 mu m; the material of the bottom electrode 03 is molybdenum, the radius is 200 μm, and the thickness is 0.2 μm; the material of the connecting wire 04 is aluminum, and the thickness is 1 mu m; the material of the substrate 05 is silicon with a thickness of 5 μm. The insulating plate 13 is a plastic spacer plate having a thickness of 1 mm. The resonant frequency of the micro-electromechanical ultrasonic transducer array module is 492kHz, the bandwidth of-3 dB is more than 10kHz, and continuous waves with the frequency within 492+/-5 kHz can be emitted, so that the resolution of distance measurement is greatly improved.
When the distance measuring device is used, the transducer units are combined into a transmitting module and a receiving module which are used as continuous wave signals in a 5 multiplied by 5 matrix form, and the single unit is not relied on, so that the strength of the transmitted signals and the received signals can be improved. The 5×5 units are connected in parallel, thereby reducing the complexity of the driving and detecting circuits. Moreover, compared with other devices which are used for independently arranging the receiving module on the measured object, the transmitting and receiving modules are positioned at the same end relative to the measured object, so that the integration of the distance measuring device is greatly facilitated.
The continuous ultrasonic ranging method based on the micro-electromechanical ultrasonic transducer array is carried out by utilizing the ranging device, and comprises the following steps:
step one, transmitting three sections of continuous wave signals with different frequencies near the resonant frequency to a measured object by utilizing the ultrasonic wave transmitting module 11, and receiving ultrasonic wave signals reflected by the measured object by utilizing the ultrasonic wave receiving module 12;
and step two, calculating the phase difference between the three-section transmitted sound wave and the received sound wave, generating the phase difference between two adjacent sections of frequency sections and the corresponding frequency difference, and calculating the distance of the measured object according to the multi-frequency continuous ultrasonic ranging principle.
Fig. 1 is a schematic diagram of multi-frequency continuous ultrasonic ranging, and a process of calculating a distance of a measured object according to the multi-frequency continuous ultrasonic ranging principle is described in detail. The frequencies of the 3 frequency band continuous waves transmitted by the ultrasonic wave transmitting module 11 are f respectively 1 ，f 2 And f 3 ，f 1 ＞f 2 ＞f 3 The ultrasonic wave receiving module 12 obtains three sections of received waves, calculates the phase difference between the three sections of received waves and the corresponding transmitted waves, and marks the phase difference asAnd->Then generating phase differences of different frequency bands>(if calculated->Then 360 ° is added, i=1, 2) while obtaining the corresponding frequency difference Δf 1 ＝f 1 -f 2 ，Δf 2 ＝f 1 -f 3 . At a known sound velocity c, the distance L of the target object can be calculated according to the following formula:
Int[]to take the whole symbol, represent the pair [ []The internal calculation results are rounded. As can be seen from the above calculation formula, the primary resolution of the ranging method is c/Δf 2 The secondary resolution is c/f 1 。
In addition, because the ultrasonic wave transmitting frequency of the device has a larger adjustable range, when continuous waves are transmitted for ranging, the transmitted continuous wave frequency can be adjusted according to the range of ranging, thereby achieving the purpose of taking the measuring range and the measuring precision into consideration. For long-distance (10-30 cm) ranging, the frequency of the three-section continuous wave signal needs to be adjusted to be closer to the resonance frequency of the micro-electromechanical ultrasonic transducer array module, and the three-section continuous wave which is closer to the resonance frequency can realize larger emission sound pressure, so that the measurement range is enlarged; for short distance (10 cm) ranging, the frequency of the three-section continuous wave signal is adjusted to enlarge the frequency band difference, and high-precision measurement can be realized by using the three-section continuous wave with larger frequency band difference. For example, in this embodiment, the resonant frequency of the mems ultrasonic transducer array module is 492kHz, so three frequency bands of 492k, 491.8k, 490kHz can be selected to emit continuous waves for long distance ranging from 10cm to 30cm, long distance testing can be implemented, and three frequency bands of 497k, 496.8k, 487kHz can be selected to emit continuous waves for short distance ranging less than 10cm, so as to improve measurement accuracy.
The continuous ultrasonic ranging method can be manually calculated or realized by a plurality of functional modules, and fig. 4 shows a form of realizing each module. The system includes a signal excitation module 20, a transmitting and receiving module 21, a charge amplifying module 22, a phase contrast module 23, and a data processing module 24, where each module may be implemented by a circuit, an electronic component, software, etc. capable of implementing its functions, without limitation. The transmitting and receiving module 21 adopts the continuous ultrasonic ranging device based on the micro-electromechanical ultrasonic transducer array shown in fig. 1 and 2, and the signal excitation module 20 is connected with the terminal of the ultrasonic transmitting module 11 as an excitation source. The signal received by the ultrasonic receiving module 12 is sent to the charge amplifying module 22, the signal is amplified in charge, and then the amplified signal is input to the phase contrast module 23, so as to calculate the phase difference information. And finally, inputting the signals into a data processing module, and calculating the distance of the object to be measured. The specific process is as follows:
step 20: the ultrasonic wave transmitting module 11 is supplied with excitation signals of three continuous waves of different frequencies through the signal excitation module 20. For long distance, realizing larger emission sound pressure by three continuous waves (such as 492k, 491.8k and 490 kHz) which are closer to the resonance frequency of the micro-electromechanical ultrasonic transducer array, thereby realizing long distance test; high-precision measurement is realized by three continuous waves with large band differences (such as 497k, 496.8k and 487 kHz) for short distances.
Step 21: in the transmitting and receiving module 21, the ultrasonic transmitting module 11 transmits three sections of continuous ultrasonic signals with different frequencies corresponding to the excitation signals to the object to be detected, and the ultrasonic receiving module 12 receives the signals reflected from the object to be detected.
Step 22: the signal of the ultrasonic receiving module 12 is subjected to charge amplification instead of voltage amplification in the ultrasonic receiving module, so that the multiple amplification advantage of the parallel array is realized.
Step 23: the amplified signal obtained in step 22 is subjected to phase comparison of the received and transmitted signals in a phase comparison module 23 to obtain corresponding phase informationAnd->And get->
Step 24: on the basis of the phase information obtained in step 23, the corresponding frequency information Δf is combined 1 、Δf 2 And calculating the sound velocity c to obtain the distance L of the target object (the calculation formula is as described above), thereby realizing distance measurement.
The above embodiment is only a preferred embodiment of the present invention, but it is not intended to limit the present invention. Various changes and modifications may be made by one of ordinary skill in the pertinent art without departing from the spirit and scope of the present invention. Therefore, all the technical schemes obtained by adopting the equivalent substitution or equivalent transformation are within the protection scope of the invention.
Claims (9)
1. A continuous ultrasonic ranging method based on micro-electromechanical ultrasonic transducer array by using a ranging device is characterized in that,
the distance measuring device comprises a clamp, an ultrasonic transmitting module (11) and an ultrasonic receiving module (12) which are mutually independent are arranged on the clamp, and an isolation plate (13) for blocking transverse sound wave signal transmission is arranged between the ultrasonic transmitting module (11) and the ultrasonic receiving module (12); the ultrasonic transmitting module (11) and the ultrasonic receiving module (12) are microcomputer voltage electric ultrasonic transducer array modules; the bottom of the micro-electromechanical ultrasonic transducer array module is a basal layer (05), a transducer unit is arranged on the basal layer (05), the transducer unit is formed by laminating a bottom electrode (03), a piezoelectric layer (02) and an upper electrode (01) layer by layer, and the bottom electrode (03) and the upper electrode (01) are respectively connected with different wiring terminals through connecting wires (04);
the method comprises the following steps:
step one, transmitting three sections of continuous wave signals with different frequencies near the resonant frequency to a measured object by utilizing the ultrasonic wave transmitting module (11), and receiving ultrasonic wave signals reflected by the measured object by utilizing an ultrasonic wave receiving module (12);
step two, calculating the phase difference between the three sections of transmitted sound wave and received sound wave, generating the phase difference between the two adjacent sections of frequency sections and the corresponding frequency difference, and then according to the phase differenceThe distance of the measured object is calculated by the multi-frequency continuous ultrasonic ranging principle, and the specific process is as follows: the frequencies of the 3 frequency band continuous waves transmitted by the ultrasonic wave transmitting module (11) are f respectively 1 ，f 2 And f 3 ，f 1 ＞f 2 ＞f 3 The ultrasonic receiving module (12) obtains three sections of received waves, calculates the phase difference between the three sections of received waves and corresponding transmitted waves, and marks the phase difference asAndthen generating phase differences of different frequency bands>If it is calculated->Then 360 ° is added, i=1, 2, and the corresponding frequency difference Δf is found at the same time 1 ＝f 1 -f 2 ，Δf 2 ＝f 1 -f 3 The method comprises the steps of carrying out a first treatment on the surface of the At a known sound velocity c, the distance L of the target object can be calculated according to the following formula:
int is a rounding symbol, representing rounding of the result of the calculation within [ ].
2. The ranging method according to claim 1, wherein in the mems ultrasonic transducer array module, a plurality of transducer units are arranged in a rectangular array on the substrate layer (05), and each transducer unit is connected to the terminal in parallel.
3. The ranging method according to claim 2, wherein the rectangular array is a 5 x 5 rectangular array.
4. A distance measuring method according to claim 3, characterized in that the material of the upper electrode (01) and the bottom electrode (03) is molybdenum; the piezoelectric layer (02) is made of aluminum nitride, zinc oxide or lead zirconate titanate piezoelectric ceramic; the connecting wire (04) is made of aluminum; the material of the substrate layer (05) is silicon.
5. A ranging method according to claim 3 wherein the mems ultrasonic transducer array module has a resonant frequency of 492kHz.
6. A distance measuring method as claimed in claim 1, characterized in that the insulating plate (13) is a plastic spacer.
7. A distance measuring method according to claim 1, wherein the ultrasonic wave emitting module (11) is connected to an external signal excitation source through a terminal.
8. A distance measuring method according to claim 1, wherein when there are a plurality of transducer units, the electric charge amplification is performed on the ultrasonic signal received by the ultrasonic receiving module (12) before the phase difference between the three transmitted and received sound waves is calculated.
9. The ranging method according to claim 1, wherein the frequency of the ultrasonic wave transmitting module (11) transmitting three continuous wave signals to the object to be measured is adjustable according to the range of the ranging; for long distance ranging of 10-30cm, the frequency of the three sections of continuous wave signals needs to be adjusted to be closer to the resonance frequency of the micro-electromechanical ultrasonic transducer array module so as to improve the emission sound pressure and enlarge the measurement range; for short distance ranging less than 10cm, the frequency of the three-section continuous wave signal is adjusted to enlarge the frequency band difference of the three-section continuous wave signal so as to improve the measurement accuracy.
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| CN110118943B (en) * | 2019-04-11 | 2020-05-19 | 华中科技大学 | Broadband ultrasonic receiving device and application thereof |
| CN111822316B (en) * | 2020-07-09 | 2021-11-19 | 上海思立微电子科技有限公司 | Packaging structure and packaging method of ultrasonic flight sensor and distance measurement electronic device |
| CN117063047A (en) * | 2021-06-04 | 2023-11-14 | Abb瑞士股份有限公司 | Sensing assembly for use in a piezoelectric level sensor |
| CN114631847B (en) * | 2022-05-20 | 2022-09-09 | 之江实验室 | Time-sharing multiplexing method for inhibiting crosstalk of medical ultrasonic transducer array |
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