CN109270000B - Elliptical polarized light measuring device and measuring method - Google Patents
Elliptical polarized light measuring device and measuring method Download PDFInfo
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J4/00—Measuring polarisation of light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J4/00—Measuring polarisation of light
- G01J4/04—Polarimeters using electric detection means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
- G01N21/211—Ellipsometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
Abstract
The invention provides an elliptical polarized light measuring device, which comprises a light source, a polarizer, a sample frame, an integrated analyzer and a detector component which are sequentially connected through a light path; the sample rack is used for placing a sample to be detected, light emitted by the light source irradiates the sample to be detected through the polarizer, and the sample to be detected reflects the light to the integrated analyzer; the integrated analyzer comprises a plurality of polarizers, the azimuth angle of each polarizer is distributed between 0-180 degrees, and light reflected from a sample to be measured enters the polarizer; the detector assembly comprises a plurality of detectors, the detectors are arranged in one-to-one correspondence with the polarizers, and the detectors are used for independently detecting the optical signals of each polarizer. The high-speed elliptical polarized light measuring system provided by the invention has the advantages of higher sampling efficiency and capability of quickly acquiring high-speed dynamic parameters of the polarizer close to nanosecond level.
Description
[ technical field ] A method for producing a semiconductor device
The invention relates to the field of material optical performance measurement, in particular to an elliptical polarized light measuring device and a measuring method.
[ background of the invention ]
The transport properties of a material are fundamental parameters of the material, the relevant physical quantities of which consist essentially of the zero-frequency conductivity σ0Concentration of carriers neRelaxation time τ, electron effective mass
Mobility μ, etc. Obtaining these parameters typically requires the use of various measurement techniques, such as four-electrode measurement of zero-frequency conductivity, hall measurement of carrier concentration, and calculation of mobility therefrom. However, the relaxation time and the electron effective mass cannot be independently obtained only by the four-electrode method and the hall method.
Therefore, the zero-frequency conductivity sigma of the target material is obtained by the elliptical polarization measurement technology0Relaxation time τ, plasma frequency ωpThe method of (a) has been applied as in [ w.noun et al, j.appl.phys.102,063709(2007) ], [ m.dressel et al, electro dynamics of Solids (2003) ], but the existing ellipsometry techniques have slow speed of acquiring optical information of a target material, and thus cannot rapidly analyze the transport properties of the material.
In addition, the effective mass of the electrons in the k-dimensional space can be extracted by measuring the three-dimensional electronic structure by utilizing the angle-resolved photoelectron spectroscopy
Relaxation time τ (k), carrier concentration ne(k) Etc., from which transport-related physical quantities such as macroscopic carrier concentration, average relaxation time, electron effective mass, and average mobility can be calculated. The method is mentioned in [ c.kittel, Introduction to Solid State Physics (2004) ], but this technique is only applicable to single crystal samples, and is surface sensitive and not widely applicable.
[ summary of the invention ]
The method aims to solve the problem that the conventional elliptical polarized light measuring system cannot obtain nanosecond-level high-speed optical dynamic parameters of materials. The invention provides an elliptical polarized light measuring device and a measuring method.
The invention provides an elliptical polarized light measuring device for solving the technical problems, which comprises a light source, a polarizer, a sample frame, an integrated analyzer and a detector component which are sequentially connected through an optical path; the sample rack is used for placing a sample to be detected, light emitted by the light source irradiates the sample to be detected through the polarizer, and the sample to be detected reflects the light to the integrated analyzer; the integrated analyzer comprises a plurality of polarizers, the azimuth angle of each polarizer is distributed between 0-180 degrees, and light reflected from a sample to be measured enters the polarizer; the detector assembly comprises a plurality of detectors, the detectors are arranged in one-to-one correspondence with the polarizers, and the detectors are used for independently detecting the optical signals of each polarizer.
Preferably, the detector assembly further comprises an electronic reader electrically connected to the detector.
Preferably, the electronic readout devices are connected to the detectors in a one-to-one correspondence, and independently acquire the signal output by each detector corresponding to the electronic readout device.
Preferably, the analyzer further comprises an expander lens, the expander lens is arranged on a light path between the sample holder and the integrated analyzer, and light reflected by a sample to be measured enters the integrated analyzer after being expanded by the expander lens.
Preferably, the detector assembly further comprises a controller electrically connected with the detector assembly.
Preferably, the device further comprises an optoelectronic coupler, and the optoelectronic coupler is electrically connected with the detector and the electronic readout.
Preferably, the detector is a photoelectric detector, the highest sampling frequency of the photoelectric detector is 40GHz, and the shortest measurement time is 25 ps.
Preferably, the electronic reader is an oscilloscope.
The invention also provides an elliptical polarized light measuring method, which comprises the following steps:
step S1: the light source emits light, the light is emitted into the polarizer to be converted into polarized light, and the polarized light irradiates the sample to be measured and is reflected; step S2: the reflected polarized light enters an integrated analyzer, a plurality of polarizers are arranged in the integrated analyzer, and the reflected light is changed into polarized light in a plurality of directions by the polarizers; step S3: the plurality of detectors are connected with the plurality of polarizers in a one-to-one correspondence mode, each detector correspondingly acquires an optical signal of the polarizer connected with the detector, and the optical signal is converted into a first electric signal.
Preferably, the method further comprises the step S4: the electronic reader reads the first electric signal output by the detector of the detector, and analyzes and displays and/or outputs the first electric signal to the controller.
Compared with the prior art, the elliptical polarized light measuring device provided by the invention has the following advantages:
1. an independent detector is correspondingly configured for each polarizer through the elliptical polarization measuring device, so that the detector can only acquire polarized light in a single direction output by a single polarizing plate, the sampling efficiency of optical data is higher, and high-speed dynamic parameters of the polarizers close to nanosecond level are quickly acquired.
2. An electronic reader is correspondingly configured on each detector through the elliptical polarization measuring device, namely the electronic readers are connected with the detectors in a one-to-one corresponding mode, so that the electronic readers only need to read optical data information acquired by detection of the matched detectors corresponding to the electronic readers, the optical data information is converted into electric signals, the novel conversion efficiency of the optical data is higher, the measurement speed of the elliptical polarization instrument is increased to a nanosecond level, and dynamic measurement of a large number of physical quantities is achieved.
3. The beam expanding lens is arranged between the sample stage and the integrated analyzer through the elliptical polarization measuring device, and polarized light passing through the polarizer is expanded to expand the diameter of the laser beam, reduce the divergence angle of the laser beam and facilitate the collection of polarized light signals.
[ description of the drawings ]
Fig. 1 is a schematic diagram of a material transport property measurement system according to the present invention.
Fig. 2 is a schematic structural diagram of a sample stage of a material transport performance measurement system according to the present invention.
Fig. 3A is a schematic diagram of an integrated analyzer and detector assembly configuration for a material transport performance measurement system of the present invention.
FIG. 3B is a schematic view of the polarization orientation of a polarizer in an integrated analyzer of a material transport property measurement system of the present invention.
FIG. 4 is a schematic diagram of the configuration of the detector assembly and controller of a material transport performance measurement system of the present invention.
FIG. 5 is a schematic diagram of a modified configuration of the probe assembly and controller of a material transport performance measurement system of the present invention.
Fig. 6 is a schematic diagram of a modified configuration of a material transport property measurement system of the present invention.
Fig. 7 is a flow chart of a method for measuring material transport performance according to the present invention.
Fig. 8 is a detailed flowchart of step S1 of the method for measuring material transportation performance according to the present invention.
[ detailed description ] embodiments
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
It should be particularly noted that when an element is referred to as being "disposed on" or "provided on" another element, it can be directly on the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," and "lower," and similar expressions, as used herein, are for purposes of illustration only and are not intended to limit the invention.
Referring to fig. 1, a material transport performance measurement system 100 according to a first embodiment of the present invention includes an elliptical polarization measurement device 101 and a heat capacity measurement device 103 electrically connected to each other. The elliptical polarization measuring device 101 comprises a light source 20, a polarizer 30, a sample stage 40, an expanded beam lens 50, an integrated analyzer 60, a detector assembly 70 and a controller 80. The heat capacity measuring device 103 includes a temperature measuring instrument 10 and a temperature adjusting instrument 90.
Wherein, the light source 20, the polarizer 30, the sample stage 40, the beam expanding lens 50, the integrated analyzer 60 and the detector component 70 are arranged in turn through an optical path. The controller 80 is electrically connected with the light source 20, the sample stage 40, the integrated analyzer 60, the detector assembly 70, the temperature measuring instrument 10 and the temperature regulator 90, and is programmed and controlled by labview and the like to realize automatic control and data acquisition and analysis in the measuring process.
Referring to fig. 2, the sample stage 40 is used for placing a sample M to be tested, one or more vacuum adsorption tanks 401 are disposed on the sample stage 40, the sample M to be tested is placed on the vacuum adsorption tanks 401, a vacuum pump (not shown) is connected to the vacuum adsorption tanks 401, and when the vacuum pump works, the sample M is adsorbed and fixed on the sample stage 40 by the negative pressure in the vacuum adsorption tanks 401. In order to enhance the vacuum adsorption force, the contact surface between the vacuum adsorption groove 401 and the sample M to be detected may be in the shape of a ring, a "loop" shape, an "H" shape, or a "meter" shape, so as to increase the contact area between the sample M to be detected and the vacuum adsorption groove 401.
The thermodetector 10 and the thermoregulator 90 may be disposed around the sample stage 40 or on the sample stage 40, and the thermodetector 10 and the thermoregulator 90 are used to detect the temperature of the sample M to be measured and/or the temperature of the environment around the sample M to be measured, so as to obtain the function c (T) of the functional relationship between the heat capacity of the sample M to be measured and the change of the sample M with the temperature T. The heat capacity of the sample M to be measured includes the electronic heat capacity CeAnd phonon heat capacity Cp. Preferably, the thermometer 10 is an infrared thermometer, for example a TeGeHg infrared thermometer. The temperature regulator 90 is preferably a pulse laser, for example, a laser with a wavelength of 1064nm and a pulse width of 5 ns-1 us is used, and the pulse laser can realize rapid heating of the material.
The light source 20 is a laser light source, preferably a He-Ne gas laser light source having a wavelength of 632.8 nm. Polarizer 30 is preferably a Glan-Foucault polarizing prism made of calcite material.
The light emitted from the light source 20 is incident on the polarizer 30 and then becomes polarized light, and the polarized light is incident on the sample M to be measured. The polarized light incident on the sample M to be detected is reflected by the sample M to be detected, the reflected polarized light enters the integrated analyzer 60 after being expanded by the beam expanding lens 50, the light emitted by the integrated analyzer 60 is captured and analyzed by the detector assembly 70 and a signal is output, and the output signal is sent to the controller 80 for analysis and processing, so that the corresponding optical constant is obtained.
By arranging the beam expanding lens 50 between the sample stage 40 and the integrated analyzer 60, the polarized light passing through the polarizer 30 is expanded to expand the diameter of the laser beam, and simultaneously, the divergence angle of the laser beam is reduced, thereby facilitating the collection of the polarized light signal. Preferably, the beam expansion magnification of the beam expansion lens 50 is about 5 to 10 times.
Referring to fig. 3A-3B and fig. 4, the integrated analyzer 60 includes a holder 601 and a polarizer 603. The support 601 is an aluminum support with a diameter of 9.5mm and a thickness of about 2mm, N polarizers 603 are disposed on the support 601, N is a positive integer greater than zero, for example, 1, 2, or 3 or more polarizers, preferably 10 polarizers 603 may be disposed. The azimuth angles α of the polarizers 603 are substantially uniformly distributed within a range of 0 to 180 °. It is understood that the azimuthal distribution of the polarizer 603 may be non-uniform.
Specifically, the integrated analyzer 60 is formed by disposing N small holes (e.g., square holes) on the bracket 601, wherein the square holes have different orientations and have azimuth angles approximately uniformly distributed within a range of 0 to 180 °, processing the polarizers 603 to have sizes matched with the sizes of the small holes, and then placing them into the small holes according to the transmission directions of the polarizers 603, so that the polarizers 603 in each small hole have different transmission directions and have azimuth angles approximately uniformly distributed within a range of 0 to 180 °, and have uniform distribution at multiple angles, thereby the emergent light has different polarization states after passing through the integrated analyzer 60.
The data of the polarization states of the emergent light obtained by the integrated analyzer 60 at a time is determined by setting the number of the polarizers 603, the data of the polarization states obtained by each polarizer 603 is determined by adjusting the azimuth angle alpha of each polarizer 603, the azimuth angles of the polarizers 603 are uniformly distributed to obtain the data difference of the polarization states of different azimuth angles, the magnitude of the data difference of the polarization states is determined by the magnitude of the azimuth angles of the polarizers 603, the magnitude of the azimuth angles can be adjusted by increasing or decreasing the polarizers 603, and when the number of the polarizers 603 uniformly distributed is small, the difference between the azimuth angles of each polarizer 603 is larger, and vice versa.
Each polarizer 603 is correspondingly connected with an independent detector assembly 70, the detector assembly 70 can rapidly detect and acquire light polarization state data of the polarizer 603 corresponding to the polarizer, convert the detected optical data into electric signals and output the electric signals to the controller 80, and the controller 80 analyzes and processes the electric signals output by the detector assembly 70 to obtain one or more optical parameters of the sample M to be detected.
Specifically, the detector assembly 70 includes a detector 703 and an electronic reader 705. The detector 703 is preferably a Newport Phototectors 1014 photodetector, the highest sampling frequency of which can reach 40GHz, the shortest measurement time is 25ps, and high-speed dynamic parameters of the polarizer 603 close to nanosecond level can be rapidly acquired.
While an electronic reader 705 may read the acquired data signals of the detector 703 and display and/or transmit them to the controller 80. The electronic reader 705 is preferably an oscilloscope with a sampling rate of 10GHz and the electronic reader 705 is connected to the detector 703 to increase all signal measurement speeds above 1 GHz.
Because each polarizer 603 can only pass polarized light in a specific direction, and an independent detector 703 is configured corresponding to each polarizer 603, the detector 703 can only acquire polarized light in a single direction output by a single polarizing plate, and convert the polarized light data into an electric signal corresponding to the polarized light data for output, so that the sampling and conversion efficiency of optical data is higher, and high-speed dynamic parameters of the polarizer 603 close to nanosecond level are quickly acquired.
Meanwhile, the detector 703 is an optical detector, and can preferably collect the optical data output by the polarizer 603 and convert the optical data into an electrical signal.
Furthermore, each detector 703 is correspondingly provided with one electronic reader 705, that is, the electronic readers 705 are correspondingly connected with the detectors 703 one to one, so that the electronic readers 705 only need to read the electric signals output by the corresponding matched detectors 703 and analyze and output the electric signals and/or analyze and display the electric signals, thereby the capturing and converting efficiency of the optical signals is higher, the measuring speed of the ellipsometer is increased to nanosecond level, and finally, more comprehensive morphological distribution of elliptically polarized light can be obtained, thereby realizing dynamic measurement of a large amount of physical quantities.
Provide better technical data for further understanding the optical characteristics of the material.
In this embodiment, the detector 703 is in communication with the corresponding polarizer 603 through the fiber coupler 701 to collect the optical signal output from the polarizer 603. The fiber coupler 701, the detector 703 and the electronic reader 705 constitute a detection channel for detecting the optical signal of the polarizer 603 corresponding to the channel.
It is understood that in this embodiment, each detector 703 acquires an optical signal transmitted by the single polarizer 603 and converts the optical signal into an electrical signal; electronic readers 705 are in one-to-one correspondence with the detectors 703, and each electronic reader 705 interprets the corresponding electrical signal and outputs it for display and/or transmission to the controller 80 for integrated processing. Therefore, the optical signal acquisition and analysis capability transmitted by the polarizer 603 is more outstanding, the measurement speed is increased to nanosecond level, and deeper optical performance of a sample to be measured can be obtained. Therefore, the polarizer 603, the detector 703 and the electronic reader 705 are preferably connected in a one-to-one correspondence, so that the optical signal acquired by the polarizer 603 can be read out more quickly.
It is understood that the number of controllers 80 may also be arranged in a one-to-one correspondence with the electronic readers 705, corresponding to reading the electrical signals transmitted and/or interpreted by the electronic readers 705.
Referring to fig. 5, as a modified embodiment of the present invention, it is different from the first embodiment in that the electronic reader 705 is not connected to the detectors 703 in a one-to-one correspondence, but the plurality of detectors 703 are commonly connected to one, two, or more electronic readers 705, and the electronic readers 705 simultaneously analyze information transmitted by the plurality of detectors 703. Meanwhile, the electronic reader 705 is connected to the controller 80, and the controller 80 may or may not correspond to the electronic readers 705 one by one, and only the controller 80 has a sufficiently strong data reading capability to read and/or record the data signal of the electronic reader 705.
Referring to fig. 6, as another modified embodiment of the present invention, the present embodiment provides a material transport performance measurement system 100', which is different from the first embodiment in that the beam expanding lens 50 is not provided in the present embodiment. Light emitted from the light source 20 is incident on a sample M to be detected placed on the sample stage 40 through the polarizer 30, the light reflected from the sample M to be detected enters the integrated analyzer 60, and then is detected by the detector assembly 70 to obtain optical information and converted into a point signal, and the point signal is output to the controller 80, and the controller 80 processes the electrical signal.
The method for determining the optical performance parameters of the sample to be measured by the material transport performance measurement system comprises the following steps:
the ellipsometry technology is an important means for representing the optical constant spectrum of the material, and the ellipsometry device 101 is used for measuring the dielectric constant spectrum of the sample M to be measured so as to obtain the plasma frequency omega of the sample M to be measuredpZero frequency conductivity sigma0And relaxation time τ, etc.
Obtaining the material plasma frequency omega by utilizing the elliptical polarization measurement technologypThen, the spectrum epsilon of the imaginary part of the dielectric constant of the sample to be measuredi(ω) is as follows:
wherein gamma is damping frequency, the light source 20 is changed into a deep ultraviolet light source, and the frequency omega of the light source 20 is equal to or approximately equal to the material plasma frequency omega of the sample M to be measuredpThen, the Lorentz term sigma L can be eliminatedn(ω) while simplifying the spectrum of the imaginary part of the dielectric constant εi(ω)。
Thereby quickly and accurately obtaining the zero-frequency conductivity sigma of the sample M to be measured0。
The differential scanning calorimetry can measure the dependence C (T) of the heat capacity and the temperature of the sample M to be measured, and the heat capacity measuring device 103 is utilized to change the temperature T to obtain the dependence C (T) of the heat capacity and the temperature, so that the Fermi temperature T of the sample M to be measured is obtainedFThe dependence C (T) of the heat capacity of the sample M to be measured on the temperature has been applied in [ C.Kittel, Introduction to Solid State Physics (2004) ], which is not limited theretoAnd will be described in detail.
Carrier concentration n of sample M to be measuredeElectron effective mass
The transport properties such as mobility mu and the like, and the calculation formula of the transport properties satisfies the equations (1), (2) and (3):
wherein epsilon0Is the dielectric constant, k, of a medium in a vacuum environmentBIs the boltzmann constant of the signal,
is the approximate planck constant.
To this end, the zero-frequency conductivity σ of the material M to be measured0Plasma frequency omegapRelaxation time tau, carrier concentration neElectron effective mass
The material transport property parameters such as mobility mu and the like can be simultaneously obtained at one time.
Above, the zero-frequency conductivity σ of the material M to be measured can be obtained from the dielectric constant spectrum of the material M to be measured0Plasma frequency omegapRelaxation time tau, function C (T) of the variation of the heat capacity with time, Fermi temperature T of the sample M to be measuredFConcentration of carriers neElectron effective mass
And the mobility mu can be measured by the controller 80And (6) calculating to obtain.
The invention can nondestructively obtain the zero-frequency conductivity sigma of the material M to be measured through the non-contact measurement of the elliptical polarization measuring device 101 and the heat capacity measuring device 103 with the sample M to be measured0Relaxation time τ, plasma frequency ωpConcentration of carriers neElectron effective mass
And the material transport performance parameters such as the mobility mu and the like avoid the damage to the sample to be measured caused by the contact of the measuring device and the sample to be measured, so that the material transport performance measuring device has smaller limitation on the material of the sample to be measured and has wider adaptability.
Meanwhile, the problems of surface sensitivity and low measurement speed of the measurement part of material transportation performance parameters are solved through the non-contact measurement of the elliptical polarization measurement device 101, the heat capacity measurement device 103 and the sample M to be measured.
Further, the elliptical polarization measurement device 101 can acquire optical signal parameters in the nanosecond level, thereby realizing dynamic measurement of a large amount of physical quantities.
Referring to fig. 7, the present invention further provides a second embodiment of a method for measuring material transport performance, which includes the following steps:
step S1: irradiating the material to be detected with a plurality of polarized light rays; the optical signals reflected from the material to be detected are respectively detected and collected, and the optical signals are converted into a plurality of first electric signals corresponding to the optical signals and output.
Referring to fig. 8, step S1 specifically includes the following steps:
step S11: the light source emits light, the light penetrates into the polarizer to be converted into polarized light to be emitted, and the polarized light irradiates on a sample to be measured and is reflected.
Step S12: the reflected polarized light enters the integrated analyzer, a plurality of polarizers are arranged in the integrated analyzer, and the reflected light is changed into polarized light in a plurality of directions by the polarizers.
Step S13: the plurality of detectors are connected with the plurality of polarizers in a one-to-one correspondence mode, each detector correspondingly acquires an optical signal of the polarizer connected with the detector, and the optical signal is converted into a first electric signal.
Step S14: the electronic reader reads the first electric signal output by the detector of the detector, and analyzes and displays and/or outputs the first electric signal to the controller.
Further, step S111 is further included between step S11 and step S12:
step S111: and the polarized light reflected by the sample to be detected enters the integrated analyzer after being subjected to beam expanding treatment by the beam expanding lens.
Preferably, the light source in step S11 is a laser light source of He — Ne gas having a wavelength of 632.8 nm.
Preferably, the detector in step S12 is a photodetector, the highest sampling frequency of the photodetector can reach 40GHz, and the shortest measurement time is 25 ps.
Preferably, the electronic readers in step S14 are disposed in one-to-one correspondence with the detectors, and read the detected signal of each detector independently.
Step S2: and measuring the temperature parameter of the sample to be measured in a non-contact manner, and converting the temperature parameter into a second electric signal to be output.
Specifically, the heat capacity measuring device includes a temperature measuring instrument 10 and a temperature adjusting instrument 90, the temperature adjusting instrument 90 emits laser pulses to the sample to be measured, and the temperature measuring instrument 10 detects temperature data of the sample to be measured by using infrared rays, converts the temperature data into a second electrical signal, and transmits the second electrical signal to the controller 80.
Step S3: and analyzing the second electric signals and the plurality of first electric signals and calculating to obtain material transport performance parameters.
The material transport performance parameter in step S3 includes the zero-frequency conductivity σ0Relaxation time τ, plasma frequency ωpConcentration of carriers neElectron effective mass
And a mobility μ.
In step S3, the plasma frequency ω of the sample M to be measured is obtained by the ellipsometry apparatuspThen by adjusting the light source frequency omega of the elliptical polarization measuring device to be equal or approximately equal to the plasma frequency omegapSimplifying the dielectric constant imaginary part spectrum epsilon of the sample to be testedi(omega) to rapidly and accurately obtain the zero-frequency conductivity sigma of the sample M to be measured0。
Compared with the prior art, the material transportation performance measuring device 10 provided by the invention has the following advantages:
1. through the non-contact measurement of the elliptical polarization measuring device and the heat capacity measuring device and the sample to be measured, the material transport performance parameters of the material M to be measured are acquired nondestructively, and the damage to the sample to be measured caused by the contact of the measuring device and the sample to be measured is avoided, so that the material transport performance measuring device has smaller limitation on the material of the sample to be measured, and the adaptability is wider.
Meanwhile, the problems of surface sensitivity and low measurement speed of the transport performance parameters of the measured materials are solved.
Furthermore, the plurality of optical signals detected by the integrated polarizer are correspondingly analyzed into a plurality of first electric signals through the detector assembly, so that each first electric signal is attached with single polarized light information, and the signal analysis speed is higher.
2. An independent detector is correspondingly configured for each polarizer through the elliptical polarization measuring device, so that the detector can only acquire polarized light in a single direction output by a single polarizing plate, the sampling efficiency of optical data is higher, and high-speed dynamic parameters of the polarizers close to nanosecond level are quickly acquired.
3. An electronic reader is correspondingly configured on each detector through the elliptical polarization measuring device, namely the electronic readers are connected with the detectors in a one-to-one corresponding mode, so that the electronic readers only need to read optical data information acquired by detection of the matched detectors corresponding to the electronic readers, the optical data information is converted into electric signals, the novel conversion efficiency of the optical data is higher, the measurement speed of the elliptical polarization instrument is increased to a nanosecond level, and dynamic measurement of a large number of physical quantities is achieved.
4. The beam expanding lens is arranged between the sample stage and the integrated analyzer through the elliptical polarization measuring device, and polarized light passing through the polarizer is expanded to expand the diameter of the laser beam, reduce the divergence angle of the laser beam and facilitate the collection of polarized light signals.
The material transport performance measuring method provided by the invention has the same advantages as the material transport performance measuring device provided by the invention. And will not be described in detail herein.
The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the invention, and any modifications, equivalents and improvements made within the spirit of the present invention should be included in the scope of the present invention.
Claims (8)
1. A measuring device for detecting a transport performance parameter of a sample to be measured, comprising: the device comprises a light source, a polarizer, an integrated analyzer, a detector component, a heat capacity measuring device and a controller which are sequentially connected through an optical path;
light emitted by the light source irradiates a sample to be detected through the polarizer, and the sample to be detected reflects the light to the integrated analyzer;
the integrated analyzer comprises a plurality of polarizers, the azimuth angle of each polarizer is distributed between 0-180 degrees, and light reflected from a sample to be measured enters the polarizer;
the controller is electrically connected with the detector assembly, the detector assembly comprises a plurality of detectors, the detectors are arranged in one-to-one correspondence with the polarizers, independently detect optical signals of each polarizer, correspondingly convert the optical signals into a plurality of first electric signals and output the first electric signals to the controller;
the heat capacity measuring device measures the temperature parameter of the sample to be measured in a non-contact mode, converts the temperature parameter into a second electric signal and outputs the second electric signal to the controller;
the controller analyzes the second electric signal and the plurality of first electric signals to obtain the transport performance parameters of the sample to be detected.
2. A measuring device for measuring a transport performance parameter of a sample to be tested according to claim 1, characterized in that: the detector assembly also includes an electronic reader electrically connected to the detector.
3. A measuring device for measuring a transport performance parameter of a sample to be tested according to claim 2, characterized in that: the electronic readers are connected with the detectors in a one-to-one correspondence mode, and the electronic readers independently acquire signals output by each detector corresponding to the electronic readers.
4. A measuring device for measuring a transport performance parameter of a sample to be tested according to claim 2, characterized in that: the integrated analyzer is characterized by further comprising a beam expanding lens, wherein the beam expanding lens is arranged on a light path between the sample frame and the integrated analyzer, and light reflected by a sample to be detected enters the integrated analyzer after being expanded by the beam expanding lens.
5. The measurement device for detecting the transport performance parameter of a sample to be tested according to claim 4, wherein: the photoelectric coupler is electrically connected with the detector and the electronic reader.
6. The measurement device for detecting transport performance parameters of a sample to be tested according to any one of claims 1 to 5, characterized in that: the detector is a photoelectric detector, the highest sampling frequency of the photoelectric detector is 40GHz, and the shortest measurement time is 25 ps.
7. The measurement device for detecting transport performance parameters of a sample to be tested according to any of claims 2-5, characterized in that: the electronic reader is an oscilloscope.
8. A method for measuring a material transport performance parameter is characterized by comprising the following steps:
step S1: the light source emits light, the light is emitted into the polarizer to be converted into polarized light, and the polarized light irradiates the sample to be measured and is reflected;
step S2: the reflected polarized light enters an integrated analyzer, a plurality of polarizers are arranged in the integrated analyzer, and the reflected light is changed into polarized light in a plurality of directions by the polarizers;
step S3: the plurality of detectors are connected with the plurality of polarizers in a one-to-one correspondence mode, each detector correspondingly acquires an optical signal of the polarizer connected with the detector and converts the optical signal into a first electric signal corresponding to the optical signal
Step S4: the electronic reader reads the first electric signal output by the detector of the detector, analyzes and displays the first electric signal and/or outputs the first electric signal to the controller,
the heat capacity measuring device measures the temperature parameter of the sample to be measured in a non-contact mode, converts the temperature parameter into a second electric signal and outputs the second electric signal to the controller;
the controller analyzes the second electric signal and the plurality of first electric signals to obtain the transport performance parameters of the sample to be detected.
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| CN109283158A (en) | 2019-01-29 |
| CN109283158B (en) | 2021-10-01 |
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