CN105466887B - The detecting system and method for thin-walled closed glass chamber optical parameter - Google Patents
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Abstract
本发明公开了一种薄壁封闭玻璃腔室光学参数的检测系统，包括光源、锁相放大器、光学斩波器、光电探测器、分光片、透镜、光阑和计算机；光源产生激光进入主光路，经两个透镜调节光斑尺寸，再经光阑整形光斑、控制光强；输入光经分光片形成参考光路和测量光路，测量光路的激光经过腔室的表面，反射到光电探测器中，其输出信号经锁相放大器调制，连接计算机；参考光路的激光直接由光电探测器检测，其输出信号经另一锁相放大器调制，连接计算机。本发明还提出一种与之相应的检测方法。本发明解决了薄壁封闭玻璃腔室光学参数(物理壁厚、折射率)无损检测的问题，为超高灵敏惯性与磁场测量装置后续的深入研究提供了基础。
The invention discloses a detection system for optical parameters of a thin-walled closed glass chamber, which includes a light source, a lock-in amplifier, an optical chopper, a photoelectric detector, a beam splitter, a lens, a diaphragm and a computer; the laser light generated by the light source enters the main optical path , the size of the spot is adjusted by two lenses, and then the spot is shaped by the diaphragm to control the light intensity; the input light passes through the beam splitter to form a reference light path and a measurement light path, and the laser light in the measurement light path passes through the surface of the chamber and is reflected into the photodetector. The output signal is modulated by a lock-in amplifier and connected to a computer; the laser in the reference optical path is directly detected by a photodetector, and its output signal is modulated by another lock-in amplifier and connected to a computer. The invention also proposes a corresponding detection method. The invention solves the problem of non-destructive detection of optical parameters (physical wall thickness, refractive index) of a thin-walled closed glass chamber, and provides a basis for subsequent in-depth research on ultra-high sensitivity inertial and magnetic field measurement devices.
Description
技术领域technical field
本发明属于光谱分析及激光测量技术领域，尤其是一种超高灵敏惯性与磁场测量装置敏感表头(薄壁封闭玻璃腔室)光学参数的检测系统和方法。The invention belongs to the technical field of spectral analysis and laser measurement, in particular to a detection system and method for the optical parameters of the sensitive head (thin-walled closed glass chamber) of an ultra-high-sensitivity inertial and magnetic field measuring device.
背景技术Background technique
基于SERF效应原子自旋惯性与磁场测量装置，利用原子的角动量特性和原子的拉莫尔进动特性，进行惯性和磁场测量，测量灵敏度远高于传统装置。超高灵敏惯性与磁场测量装置，可服务于化学物质成份与结构分析和生物分子结构分析、原子自旋陀螺仪\磁强计等领域。内含碱金属和惰性气体的薄壁封闭玻璃腔室是超高灵敏磁场和惯性测量装置的敏感表头，腔室的性能从本质上决定了仪器灵敏度的极限。因此，对薄壁封闭玻璃腔室自身光学参数的研究，是超高灵敏惯性与磁场测量装置必不可少的一部分。Based on the SERF effect atomic spin inertia and magnetic field measurement device, the angular momentum characteristics of atoms and the Larmor precession characteristics of atoms are used to measure inertia and magnetic field, and the measurement sensitivity is much higher than that of traditional devices. Ultra-high sensitive inertial and magnetic field measurement devices can serve the fields of chemical composition and structure analysis, biomolecular structure analysis, atomic spin gyroscope\magnetometer and other fields. The thin-walled closed glass chamber containing alkali metal and inert gas is the sensitive head of the ultra-high sensitive magnetic field and inertial measurement device, and the performance of the chamber essentially determines the limit of the sensitivity of the instrument. Therefore, the research on the optical parameters of the thin-walled closed glass chamber is an indispensable part of the ultra-high sensitivity inertial and magnetic field measurement device.
目前，对于薄壁封闭玻璃腔室自身光学参数的检测主要通过破坏性实验，将腔室敲碎，利用游标卡尺测量其厚度，另外通过化学实验检测腔室材料的折射率；这种方法简单易行，但是会对腔室造成永久性损伤，无法复原。At present, the detection of the optical parameters of the thin-walled closed glass chamber is mainly through destructive experiments, breaking the chamber, using a vernier caliper to measure its thickness, and testing the refractive index of the chamber material through chemical experiments; this method is simple and easy , but will cause permanent damage to the chamber and cannot be restored.
发明内容Contents of the invention
发明目的：针对现有技术中存在的问题，本发明提供一种薄壁封闭玻璃腔室光学参数的检测系统，实现对腔室的无损检测，并进一步提供一种能够实现上述系统的方法。Purpose of the invention: Aiming at the problems existing in the prior art, the present invention provides a detection system for the optical parameters of a thin-walled closed glass chamber to realize the non-destructive detection of the chamber, and further provides a method capable of realizing the above system.
技术方案：本发明提出一种薄壁封闭玻璃腔室光学参数的检测系统，包括：用于产生输入光的光源，用于信号调制解调的锁相放大器、光学斩波器和光电探测器，用于光路调节的元器件分光片、透镜、光阑，以及计算机；Technical solution: The present invention proposes a detection system for optical parameters of a thin-walled closed glass chamber, including: a light source for generating input light, a lock-in amplifier for signal modulation and demodulation, an optical chopper and a photodetector, Components used for optical path adjustment beam splitter, lens, diaphragm, and computer;
光源产生激光进入主光路，经两个透镜调节光斑尺寸，再经光阑整形光斑、控制光强；输入光经过分光片后形成参考光路和测量光路，测量光路的激光经过腔室的表面，反射到光电探测器中，其输出信号经锁相放大器调制后，连接计算机；参考光路的激光直接由光电探测器检测，其输出信号经另一锁相放大器调制后，连接计算机。The laser light generated by the light source enters the main optical path, the size of the spot is adjusted by two lenses, and then the spot is shaped by the diaphragm to control the light intensity; the input light passes through the beam splitter to form a reference optical path and a measurement optical path, and the laser light in the measurement optical path passes through the surface of the chamber and is reflected Into the photodetector, its output signal is modulated by a lock-in amplifier, and then connected to the computer; the laser in the reference optical path is directly detected by the photodetector, and its output signal is modulated by another lock-in amplifier, and then connected to the computer.
本发明还提出一种薄壁封闭玻璃腔室光学参数的检测方法，包括如下步骤：The present invention also proposes a method for detecting optical parameters of a thin-walled closed glass chamber, comprising the following steps:
1)对实验所用激光器进行标定；1) Calibrate the laser used in the experiment;
2)改变激光器的控制温度调节激光的频率，并通过相关实验设备记录原始数据，包括测量信号的幅值和频率、调制信号的幅值和频率；2) Change the control temperature of the laser to adjust the frequency of the laser, and record the original data through relevant experimental equipment, including the amplitude and frequency of the measurement signal and the amplitude and frequency of the modulation signal;
3)对待测信号进行方波调制，设置光学斩波器的频率，如式(1)；并利用正交的两路信号来解调待测信号，如式(3)和式(4)；根据多通道交叉调制的原理，调制信号与待测信号通过相敏感器相互作用，如式(5)和式(6)；其输出经过低通滤波器之后，大部分高频信号被去除，如式(7)和式(8)；两路解调信号经过矢量加法器，输出信号Uout，如式(9)；3) Carry out square wave modulation on the signal to be tested, set the frequency of the optical chopper, such as formula (1); and use two orthogonal signals to demodulate the signal to be tested, such as formula (3) and formula (4); According to the principle of multi-channel cross modulation, the modulated signal and the signal to be measured interact through the phase sensor, such as formula (5) and formula (6); after the output passes through the low-pass filter, most of the high-frequency signals are removed, such as Equation (7) and Equation (8); the two-way demodulated signal passes through the vector adder, and the output signal U out is shown in Equation (9);
Sig(t)＝Vr·Sq(ωt) (1)Sig(t)＝V r Sq(ωt) (1)
式中，Sig(t)表示待测信号，Vr表示待测信号的幅值，Sq(ωt)表示方波调制函数，ω表示角频率；In the formula, Sig(t) represents the signal to be measured, V r represents the amplitude of the signal to be measured, Sq(ωt) represents the square wave modulation function, and ω represents the angular frequency;
Ref1(t)＝Vicos(ωt+θ) (3)Ref 1 (t)＝V i cos(ωt+θ) (3)
Ref2(t)＝Visin(ωt+θ) (4)Ref 2 (t)＝V i sin(ωt+θ) (4)
式中，Ref1(t)表示调制信号1，Ref2(t)表示调制信号2，它与调制信号1有90°相位差，Vi表示调制信号的幅值，θ表示调制信号的偏置相位角；In the formula, Ref 1 (t) represents the modulation signal 1, Ref 2 (t) represents the modulation signal 2, which has a 90° phase difference with the modulation signal 1, V i represents the amplitude of the modulation signal, θ represents the offset of the modulation signal phase angle;
式中，表示待测信号与调制信号1进行调制的结果，表示待测信号与调制信号2进行调制的结果，T表示积分时间，Uout表示待测信号的幅值；In the formula, Indicates the result of modulation between the signal to be tested and the modulation signal 1, Indicates the result of the modulation between the signal to be tested and the modulation signal 2, T indicates the integration time, and U out indicates the amplitude of the signal to be tested;
4)参考步骤3，获取反射光信号和入射光信号，进行相关数据拟合，得到薄壁封闭玻璃腔室光学参数，即壁厚和折射率，具体如式(10)所示：4) Referring to step 3, obtain the reflected light signal and the incident light signal, and perform related data fitting to obtain the optical parameters of the thin-walled closed glass chamber, that is, the wall thickness and the refractive index, as shown in formula (10):
式中，Iin表示入射激光的光强，IR表示反射激光的光强，It表示透射激光的光强，R0表示测量样品表面的反射率，λ表示激光器的波长，n表示待测样品的折射率，d表示待测样品的物理厚度，α表示激光的入射角，β表示激光的出射角。In the formula, I in represents the light intensity of the incident laser, I R represents the light intensity of the reflected laser, I t represents the light intensity of the transmitted laser, R 0 represents the reflectivity of the measured sample surface, λ represents the wavelength of the laser, and n represents the measured The refractive index of the sample, d represents the physical thickness of the sample to be measured, α represents the incident angle of the laser, and β represents the exit angle of the laser.
有益效果：提出基于多通道交叉检测的惯性与磁场测量装置敏感表头光学参数的检测方法和系统，本发明解决了薄壁封闭玻璃腔室光学参数(物理壁厚、折射率)无损检测的问题，为超高灵敏惯性与磁场测量装置后续的深入研究提供了基础。Beneficial effects: the detection method and system of the optical parameters of the sensitive head of the inertial and magnetic field measuring device based on the multi-channel cross detection are proposed, and the invention solves the problem of nondestructive detection of the optical parameters (physical wall thickness, refractive index) of the thin-walled closed glass chamber , which provides a basis for the follow-up in-depth research on ultra-high sensitive inertial and magnetic field measurement devices.
附图说明Description of drawings
图1为本发明检测方法的原理图；Fig. 1 is the schematic diagram of detection method of the present invention;
图中的附图标记为：调制信号1、锁相环2、晶振3、相位调制器4、相敏感器5、低通滤波器6、X向直流分量7、矢量加法器8、输出信号9、Y向直流分量10、运算放大器11、方波调制器12、带通滤波器13、测量信号14；The reference signs in the figure are: modulation signal 1, phase-locked loop 2, crystal oscillator 3, phase modulator 4, phase sensor 5, low-pass filter 6, X-direction DC component 7, vector adder 8, output signal 9 , Y-direction DC component 10, operational amplifier 11, square wave modulator 12, bandpass filter 13, measurement signal 14;
图2为本发明的系统结构示意图；Fig. 2 is a schematic structural diagram of the system of the present invention;
图中的附图标记为：锁相放大器15、测量样品16、光电探测器17、分光片18、透镜19、光学斩波器20、光阑21、透镜22、激光器23、计算机24；Reference numerals in the figure are: lock-in amplifier 15, measurement sample 16, photodetector 17, beam splitter 18, lens 19, optical chopper 20, aperture 21, lens 22, laser 23, computer 24;
图3为本发明实施例的DFB激光器标定结果图；Fig. 3 is the DFB laser calibration result figure of the embodiment of the present invention;
图4为本发明实施例的实验测试原始记录图。Fig. 4 is an original recording diagram of the experimental test of the embodiment of the present invention.
具体实施方式Detailed ways
结合图1和图2描述本发明。The present invention is described with reference to FIGS. 1 and 2 .
图1为本发明检测方法的原理图，首先分析测量信号14的运行路线，测量信号14进入检测系统，经过带宽滤波器13，去除工频信号对测量的影响，通过方波函数12对测量信号进行调制，经过运算放大器11之后通过相敏感器与调制信号进行相互作用；下面分析参考信号的运行路线，参考信号1经过锁相环2和内部晶振3之后，相位和频率信息被准确获取，然后一部分参考信号直接通过相敏感器5与测量信号相互作用，另外一部分参考信号经过相位调制器4发生90°相移之后通过相敏感器5与测量信号相互作用；两路输出信号7和10分别经过Butterworth低通滤波器6之后，经过矢量加法器8进行矢量和运算便得到，需要的输出信号9。Fig. 1 is the schematic diagram of detection method of the present invention, at first analyze the running path of measurement signal 14, measurement signal 14 enters detection system, passes through bandwidth filter 13, removes the impact of power frequency signal to measurement, passes through square wave function 12 to measurement signal Modulation is carried out, and after passing through the operational amplifier 11, the phase sensor interacts with the modulation signal; the following analyzes the operation route of the reference signal, after the reference signal 1 passes through the phase-locked loop 2 and the internal crystal oscillator 3, the phase and frequency information is accurately obtained, and then A part of the reference signal directly interacts with the measurement signal through the phase sensor 5, and another part of the reference signal interacts with the measurement signal through the phase sensor 5 after undergoing a 90° phase shift through the phase modulator 4; the two output signals 7 and 10 respectively pass through After the Butterworth low-pass filter 6, the required output signal 9 is obtained through a vector adder 8 for vector sum operation.
图2为本发明的系统结构示意图，激光从光源23中导出，通过两个透镜19和22调节光斑的尺寸，用光阑21对输入光进行整形，控制光的强度；输入光经过分光片18之后由一束激光变成两束激光，其中一束激光经过腔室的表面，反射到光电探测器17当中，光电探测器的输出信号接到锁相放大器15进行调制，输出信号进入计算机24，另外一束激光直接用光电探测器17进行检测，输出信号通过锁相放大器15调制，最后进入计算机24。Fig. 2 is a schematic diagram of the system structure of the present invention, the laser is derived from the light source 23, the size of the light spot is adjusted by two lenses 19 and 22, the input light is shaped with the diaphragm 21, and the intensity of the control light is controlled; the input light passes through the beam splitter 18 Afterwards, one beam of laser light becomes two beams of laser beams, wherein one beam of laser light passes through the surface of the chamber and is reflected into the photodetector 17. The output signal of the photodetector is received by the lock-in amplifier 15 for modulation, and the output signal enters the computer 24. The other laser beam is directly detected by the photodetector 17 , the output signal is modulated by the lock-in amplifier 15 , and finally enters the computer 24 .
所述主光路经分光片连接参考光路和测量光路；参考信号光路入射激光由光电探测器检测，锁相放大器调制该输出信号，最后连接计算机；测量信号光路入射激光经腔室表面反射到光电探测器，另一锁相放大器调制该输出信号，最后连接计算机。The main light path is connected to the reference light path and the measurement light path through the beam splitter; the incident laser light on the reference signal light path is detected by the photoelectric detector, and the lock-in amplifier modulates the output signal, and finally connected to the computer; the incident laser light on the measurement signal light path is reflected by the chamber surface to the photoelectric detector device, another lock-in amplifier modulates the output signal, and finally connects to a computer.
下面以Cs单质封闭薄壁玻璃腔室(单质Cs、600torr4He、50torrN2，方形气室，边长2.5cm)为例。首先，对实验所用的DFB激光器进行标定，标定结果如图3所示。The following is an example of a simple Cs closed thin-walled glass chamber (single Cs, 600torr 4 He, 50torrN 2 , square air chamber, side length 2.5cm). First, calibrate the DFB laser used in the experiment, and the calibration results are shown in Figure 3.
第二步，通过改变激光器的控制温度，来调节激光的频率；以1℃为步长改变激光器的温度，并通过相关实验设备记录原始数据，如图4所示。The second step is to adjust the frequency of the laser by changing the control temperature of the laser; change the temperature of the laser with a step of 1 °C, and record the original data through the relevant experimental equipment, as shown in Figure 4.
第三步，对待测信号进行方波调制，设置光学斩波器的频率为65Hz，如式(1)所示；并利用正交的两路信号来解调待测信号，如式(3)和式(4)；根据多通道交叉调制的原理，调制信号与待测信号通过相敏感器相互作用，如式(5)和式(6)；其输出经过低通滤波器之后，大部分高频信号被去除，如式(7)和式(8)；两路解调信号经过矢量加法器，输出信号Uout，如式(9)。The third step is to perform square wave modulation on the signal to be tested, and set the frequency of the optical chopper to 65 Hz, as shown in formula (1); and use two orthogonal signals to demodulate the signal to be tested, as shown in formula (3) and formula (4); according to the principle of multi-channel cross modulation, the modulated signal and the signal to be tested interact through the phase sensor, such as formula (5) and formula (6); after the output passes through the low-pass filter, most of the high The frequency signal is removed, as shown in formula (7) and formula (8); the two demodulated signals pass through the vector adder, and the output signal U out is shown in formula (9).
Sig(t)＝Vr·Sq(ωt) (1)Sig(t)＝V r Sq(ωt) (1)
式中，Sig(t)表示待测信号，Vr表示待测信号的幅值，Sq(ωt)表示方波调制函数，ω表示角频率。根据傅立叶级数，将公式(1)展开为如下表达式：In the formula, Sig(t) represents the signal to be measured, V r represents the amplitude of the signal to be measured, Sq(ωt) represents the square wave modulation function, and ω represents the angular frequency. According to the Fourier series, formula (1) is expanded into the following expression:
Ref1(t)＝Vicos(ωt+θ) (3)Ref 1 (t)＝V i cos(ωt+θ) (3)
Ref2(t)＝Visin(ωt+θ) (4)Ref 2 (t)＝V i sin(ωt+θ) (4)
式中，Ref1(t)表示调制信号1；Ref2(t)表示调制信号2，它与调制信号1有90°相位差；Vi表示调制信号的幅值，θ表示调制信号的偏置相位角；In the formula, Ref 1 (t) represents the modulation signal 1; Ref 2 (t) represents the modulation signal 2, which has a 90° phase difference with the modulation signal 1; V i represents the amplitude of the modulation signal, θ represents the offset of the modulation signal phase angle;
式中，表示待测信号与调制信号1进行调制的结果，表示待测信号与调制信号2进行调制的结果，T表示积分时间，Uout表示待测信号的幅值。In the formula, Indicates the result of modulation between the signal to be tested and the modulation signal 1, Indicates the result of the modulation between the signal to be tested and the modulation signal 2, T indicates the integration time, and U out indicates the amplitude of the signal to be tested.
第四步，参考步骤三，可以准确获取反射光信号IR和入射光信号Iin，进行相关数据拟合，便可得到薄壁封闭玻璃腔室光学参数(物理壁厚、折射率)，如式(10)所示：The fourth step, referring to step three, can accurately obtain the reflected light signal I R and the incident light signal I in , and perform related data fitting to obtain the optical parameters (physical wall thickness, refractive index) of the thin-walled closed glass chamber, such as Formula (10) shows:
式中，λ表示激光器的波长；n表示待测样品的折射率；d表示待测样品的物理厚度；α表示激光的入射角；β表示激光的出射角；R0表示测量样品表面的反射率；Iin表示入射激光的光强；IR表示反射激光的光强；It表示透射激光的光强。In the formula, λ represents the wavelength of the laser; n represents the refractive index of the sample to be measured; d represents the physical thickness of the sample to be measured; α represents the incident angle of the laser; β represents the exit angle of the laser ; ; I in represents the light intensity of the incident laser; I R represents the light intensity of the reflected laser; I t represents the light intensity of the transmitted laser.
以上详细描述了本发明的优选实施方式，但是，本发明并不限于上述实施方式中的具体细节，在本发明的技术构思范围内，可以对本发明的技术方案进行多种等同变换，这些等同变换均属于本发明的保护范围。The preferred embodiments of the present invention have been described in detail above, but the present invention is not limited to the specific details in the above embodiments. Within the scope of the technical concept of the present invention, various equivalent transformations can be carried out to the technical solutions of the present invention. These equivalent transformations All belong to the protection scope of the present invention.
另外需要说明的是，在上述具体实施方式中所描述的各个具体技术特征，在不矛盾的情况下，可以通过任何合适的方式进行组合。为了避免不必要的重复，本发明对各种可能的组合方式不再另行说明。In addition, it should be noted that the various specific technical features described in the above specific implementation manners may be combined in any suitable manner if there is no contradiction. In order to avoid unnecessary repetition, various possible combinations are not further described in the present invention.
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