CN109269489A - A kind of detection device and method of resonator gyroscope intrinsic rigidity axis - Google Patents
A kind of detection device and method of resonator gyroscope intrinsic rigidity axis Download PDFInfo
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- CN109269489A CN109269489A CN201811301944.7A CN201811301944A CN109269489A CN 109269489 A CN109269489 A CN 109269489A CN 201811301944 A CN201811301944 A CN 201811301944A CN 109269489 A CN109269489 A CN 109269489A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
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Abstract
The invention discloses a kind of detection devices of resonator gyroscope intrinsic rigidity axis comprising: drive seat；Power supply device；Two excitation electrodes are set in drive seat；Two X sensing electrodes are set in drive seat and are located between two excitation electrodes；Two Y sensing electrodes are set in drive seat and are 45 ° with the angle of two X sensing electrodes to two Y sensing electrode Relative distributions；Fixed station is used to install shell；The surfaces externally and internally of shell is provided with one layer of metal layer；Capacitive displacement conversion equipment is used to the capacitance signal of the metal layer of X sensing electrode and Y sensing electrode and shell inner surface be converted to displacement signal；And oscillograph, the variation of four displacement signals can be shown by Lie groupoid.Energy making the grade of the present invention, accurately and efficiently determine axis rotational symmetry structure resonator gyroscope shell intrinsic rigidity axis position, so as to greatly improve the manufacture success rate of resonator gyroscope.
Description
Technical field
The present invention relates to resonator gyroscope field, in particular to the detection device of a kind of resonator gyroscope intrinsic rigidity axis and
Method.
Background technique
Gyroscope is a kind of sensor for being widely used in moving object attitude measurement, and dual-use aspect has its
Figure.From aerospace, guided weapon to smart phone, intelligent robot, gyroscope is all indispensable important component.And
The hemispherical Shell resonator gyroscope for belonging to axis rotational symmetry structure resonator gyroscope in solid-state resonator gyroscope is a kind of novel vibration
Dynamic gyroscope, it has the characteristics that, and small in size, the service life is long, simple structure, stability are good and measurement accuracy is high, is especially powered off
It is still able to maintain the Inertia information of a period of time afterwards.These features and advantages make it in aerospace, inertial navigation, oil drilling etc.
Aspect is widely used.Hemispherical resonant gyro most principle research and is ground by u s company early in the sixties in last century
System, late nineteen seventies american system produce hemispherical resonant gyro model machine, cause international very big concern and interest, Russia sieve
This, Britain, the states such as France also gradually started the development of hemispherical resonant gyro.Currently, the U.S. is in hemispherical resonant gyro side
The research in face comes into business model, and hemispherical resonant gyro has been used in their space probation task by the U.S.
In up to as long as the several years, do not occur any problem so far.The country originates in the research of hemispherical resonant gyro 80 years
In generation, by researchs in more than 30 years, there has also been the achievements of some stages.Early interim electric 26, which introduce Russian technical research, goes out
The hemispherical resonant gyro of 60mm diameter, and some core manufacturing process have been grasped, the half of the present smaller volume developed
Ball resonator gyroscope has been successfully applied in weapon and aerospace vehicle.
Resonator gyroscope has developed into ripe to certain stage at present, but the density flaw of its blank material and manufacture
Technologic geometrical imperfections are still inevitable, and the especially presence of density flaw can make the resonance of axis rotational symmetry structure
The shell of gyroscope generates frequency cracking, and (natural reonant frequency of i.e. original ideal indefectible shell can be cracked because of density flaw
There are the very big intrinsic frequency and minimum intrinsic frequency of nuance with ideal natural reonant frequency at two).The two differences are solid
The axis in orientation, referred to as intrinsic rigidity axis where having frequency, and the orientation of the intrinsic rigidity axis of shell and axis rotational symmetry structure are humorous
The vibration vibration of gyroscope, the position distribution of electrode sensor, amendment of frequency cracking etc. have substantial connection.But about hemisphere
The cylinder of the resonator gyroscope of shell or other axis rotational symmetry structures, the measurement of the intrinsic rigidity axis of the shell of circular ring shape are domestic
All rarely has specific theoretical and experimental measurement method outside.
The leveling of frequency difference about frequency cracking, the country, which has, to be estimated using ion etching technology with approximate formula
The spherical shell quality for needing to remove, and chemical treatment technology and ion beam leveling technology are studied to harmonic oscillator Specifeca tion speeification and frequency
Difference optimization.The shell of the resonator gyroscope of other axis rotational symmetry structures either uses cylindrical or circular ring shape, shell
And shell can be made to generate frequency cracking because of the presence of density flaw as the hemispherical Shell of hemispherical resonator instrument, to exist intrinsic
Stiff shaft.Intrinsic rigidity axis shares 2 pairs, and each pair of includes that two vibration shapes are identical and orthogonal intrinsic rigidity axis, and two pairs solid
Have and differ 45 degree between stiff shaft, is i.e. the adjacent intrinsic rigidity axis of any two differs 45 degree.Still lack rigorous theory at present
Analysis is difficult to where determination is etching to determine the position of intrinsic rigidity axis, and need to remove how many quality could be by frequency
In the range of difference narrows down to expectation, to affect with hemispherical resonant gyro and with hemispherical resonant gyro with similar
The manufacture success rate of the resonator gyroscope of other axis rotational symmetry structures of structure.Therefore, for simultaneously contain density flaw and
How the resonator gyroscope for damping the axis rotational symmetry structure of flaw, find the intrinsic rigidity axis of its shell, be urgent need to resolve
Technical problem.
The information disclosed in the background technology section is intended only to increase the understanding to general background of the invention, without answering
When being considered as recognizing or imply that the information constitutes the prior art already known to those of ordinary skill in the art in any form.
Summary of the invention
The purpose of the present invention is to provide the detection devices and method of a kind of resonator gyroscope intrinsic rigidity axis, can mark
The position of the intrinsic rigidity axis of the shell of resonator gyroscope that is quasi-, accurately and efficiently determining axis rotational symmetry structure, thus greatly
The big manufacture success rate for improving resonator gyroscope.
To achieve the above object, the present invention provides a kind of detection devices of resonator gyroscope intrinsic rigidity axis, wherein packet
It includes: drive seat；Power supply device；Two excitation electrodes are set in the drive seat to two excitation electrode Relative distributions；Two
A excitation electrode provides alternating voltage and pulse voltage by the power supply device；Two X sensing electrodes, two X sensings
It is set in the drive seat to electrode Relative distribution；And two X sensing electrodes are located between two excitation electrodes；Two
A X sensing electrode provides DC voltage by the power supply device；Two Y sensing electrodes, opposite point of two Y sensing electrodes
It is set to cloth in the drive seat, and the straight line where two Y sensing electrodes is straight where with two X sensing electrodes
Angle between line is 45 °；Two Y sensing electrodes provide DC voltage by the power supply device；Fixed station is used to pacify
Fill the shell of resonator gyroscope；The surfaces externally and internally of the shell is provided with one layer of gold as pole plate in a manner of it can dismantle
Belong to layer；The drive seat can be rotated relative to the fixed station；When the shell is installed on the fixed station, two institutes
The outside that excitation electrode is located at the shell is stated, two X sensing electrodes and two Y sensing electrodes are located at the shell
The inside；Capacitive displacement conversion equipment, two X sensing electrodes and two Y sensing electrodes turn with the capacitive displacement
Changing device connection；The capacitive displacement conversion equipment is used for the metal each X sensing electrode and the inner surface of the shell
Capacitance signal between the metal layer of the inner surface of capacitance signal and each Y sensing electrode between layer and the shell turns
It is changed to displacement signal；And oscillograph, it is connect with the capacitive displacement conversion equipment, which turns the capacitive displacement
Displacement signal conduct between the metal layer of the inner surface of changing device two X sensing electrodes being converted to and the shell
The displacement of the X-direction of Lie groupoid inputs, and two Y sensing electrodes that the capacitive displacement conversion equipment is converted to
Displacement signal between the metal layer of the inner surface of the shell is inputted as the displacement of the Y-direction of Lie groupoid, so as to
It is enough that the variation of four displacement signals is shown by Lie groupoid.
Preferably, in above-mentioned technical proposal, the metal layer is metal paste layer or metal film.
Preferably, in above-mentioned technical proposal, the capacitive displacement conversion equipment is the AMCM measurement of model PCAP02AE
Chip.
In addition, the present invention also provides a kind of detection methods of resonator gyroscope intrinsic rigidity axis, wherein use claim
The detection device of resonator gyroscope intrinsic rigidity axis described in 1 is detected, and specific steps include:
Step 1 is installed on the shell of resonator gyroscope on the fixed station；
Step 2 provides direct current by the power supply device for two X sensing electrodes and two Y sensing electrodes
Voltage；
Step 3 applies of short duration pulse voltage, of short duration energization to two excitation electrodes by the power supply device
Metal layer on the excitation electrode of two afterwards and the housing outer surface generates an electric field exciting force, so that the shell
Free vibration is damped since the shell exists, and free vibration can gradually decay to static；In the process of the hull vibration
In, the capacitor between the metal layer of the inner surface of each X sensing electrode and the shell can change, and each described
Capacitor between the metal layer of the inner surface of Y sensing electrode and the shell can also change；
Step 4, the capacitive displacement conversion equipment is in the two X sensing electrodes and the shell detected
Capacitor between the metal layer on surface is converted to the displacement of X-direction；And the two Y sensing electrodes and the shell detected
Capacitor between the metal layer of the inner surface of body is converted to the displacement of Y-direction；In the shell free vibration, two X
Capacitance variations and two Y sensing electrodes and the shell between the metal layer of the inner surface of sensing electrode and the shell
Inner surface metal layer between capacitance variations just can be converted to by the capacitive displacement conversion equipment X-direction displacement become
Change the change in displacement with Y-direction；
Step 5, the oscillograph receive the change in displacement for the X-direction that the capacitive displacement conversion equipment is converted to
After the change in displacement of Y-direction, shown by Lie groupoid；If an approximate parallelogram is presented in Lie groupoid
Figure, the section at the round and smooth diagonal place of this approximate parallelogram are the azimuth of the intrinsic rigidity axis of the shell
The section at place is on the housing several equal angular forced vibration angles this interval division, and described in two
Excitation electrode is turned to some forced vibration angle to just, then carries out step 6；If what Lie groupoid was presented is one and X-axis
The straight line of coincidence illustrates that the azimuth at this time where two excitation electrodes is one of intrinsic rigidity of the shell
Angle where axis；
Step 6 applies lasting alternating voltage to two excitation electrodes by the power supply device, so that described
Shell carries out forced vibration；Equally, during the shell carries out forced vibration, in the capacitive displacement conversion equipment two
Capacitance variations between the metal layer of the inner surface of a X sensing electrode and the shell and two Y sensing electrodes with
Capacitance variations between the metal layer of the inner surface of the shell are respectively converted into the displacement of the change in displacement and Y-direction of X-direction
After variation, shown by the oscillograph by Lie groupoid；
Step 7, if after the Lie groupoid that the oscillograph described in step 6 obtains tends towards stability, obtained figure is simultaneously
Inclination angle without respect to X-axis is 0 degree or 90 degree of occluded ellipse figure, where illustrating two excitation electrodes at this time
Azimuth is not the position where intrinsic rigidity axis, just needs to make two excitation electrodes and another forced vibration angle pair
Just, and return step six；If the track after the Lie groupoid that the oscillograph described in step 6 obtains tends towards stability is in one
Occluded ellipse figure, and ellipse figure is 0 degree or 90 degree relative to the inclination angle of X-axis, illustrates two excitation electricity at this time
Azimuth where pole is the angle where one of intrinsic rigidity axis of the shell.
Compared with prior art, the invention has the following beneficial effects:
The present invention first passes through power supply device and provides of short duration pulse voltage to excitation electrode, makes shell free vibration, thus
The minizone range of orientation angles where determining intrinsic rigidity axis by the Lie groupoid of oscilloscope display, then in this section
Each position in range provides alternating voltage to excitation electrode by power supply device, makes shell forced vibration, by forcing vibration
Lie groupoid formation to judge flaw containing density and damps the humorous of flaw at the ellipse at 0 degree or 90 degree of inclination angle with X-axis when dynamic
Orientation angles where one of intrinsic rigidity axis of the shell of Vibration Meter, to obtain the intrinsic rigidity in interval range in front
Axis accurate angle, then by the positional relationship of 45 degree adjacent of intrinsic rigidity axis difference of any two, all consolidate just can be found
There is the position of stiff shaft.The present invention being capable of rigorous, standard, accurate and efficiently detect hemispherical resonant gyro and with half
Ball resonator gyroscope other axis with similar structure rotatably claim the intrinsic rigidity axis of the shell of the resonator gyroscope of structure
Position, so as to greatly improve the manufacture success rate of gyroscope.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the detection device of resonator gyroscope intrinsic rigidity axis according to the present invention；
Fig. 2 is the distribution schematic diagram of each electrode of the detection device of resonator gyroscope intrinsic rigidity axis according to the present invention；
Fig. 3 is the structural schematic diagram after shell according to the present invention is installed in fixing seat.
Fig. 4 is the simple flow diagram of the detection method of resonator gyroscope intrinsic rigidity axis according to the present invention；
Fig. 5 is that the Lie groupoid that oscillograph according to the present invention is obtained in shell free vibration is approximate parallelogram
Figure when schematic diagram；
The ellipse figure for the Lie groupoid that Fig. 6, which is oscillograph according to the present invention, to be obtained in shell forced vibration is relative to X
The schematic diagram when inclination angle of axis is not 0 degree or 90 degree；
The ellipse figure for the Lie groupoid that Fig. 7, which is oscillograph according to the present invention, to be obtained in shell forced vibration is relative to X
The schematic diagram when inclination angle of axis is 0 degree.
Main appended drawing reference explanation:
1- drive seat, 2-PCB plate, 3- motivate electrode, 4-X sensing electrode, 5-Y sensing electrode, 6- fixed station, 7- oscillography
Device, 8- shell.
Specific embodiment
With reference to the accompanying drawing, specific embodiments of the present invention will be described in detail, it is to be understood that guarantor of the invention
Shield range is not limited by the specific implementation.
Unless otherwise explicitly stated, otherwise in entire disclosure and claims, term " includes " or its change
Changing such as "comprising" or " including " etc. will be understood to comprise stated element or component, and not exclude other members
Part or other component parts.
Embodiment 1
Fig. 1 to Fig. 3 shows a kind of detection of resonator gyroscope intrinsic rigidity axis according to the preferred embodiment of the present invention
The structural schematic diagram of device, the detection device of the resonator gyroscope intrinsic rigidity axis include drive seat 1, power supply device, excitation electricity
Pole 3, X sensing electrode 4, Y sensing electrode 5, fixed station 6, capacitive displacement conversion equipment (figure does not regard) and oscillograph 7, with reference to Fig. 1
And Fig. 2, drive seat 1 can rotate, and can be to be driven by motor and rotated.Power supply device is capable of providing DC voltage, hands over
Galvanic electricity pressure and pulse voltage, can be and be made of three DC voltage source, alternating-current voltage source and pulse voltage source modules,
And the present invention is preferably, power supply device includes the AC-DC power module of model WA3-220S05A3.Two excitation 3 phases of electrode
Distribution is set in drive seat 1, two excitation electrodes 3 provide alternating voltage and pulse voltage by power supply device.Two X
It is set to 1 in drive seat to 4 Relative distribution of sensing electrode, and two X sensing electrodes 4 are located between two excitation electrodes 3, two
X sensing electrode 4 and two excitation electrodes 3 are located along the same line.Two X sensing electrodes 4 provide direct current by power supply device
Pressure.It is set in drive seat 1 to two 5 Relative distributions of Y sensing electrode, and straight line and two X where two Y sensing electrodes 5
The angle between straight line where sensing electrode 4 is 45 °, and two Y sensing electrodes 5 provide DC voltage by power supply device.
Two annulus seats being coaxially distributed can be set in drive seat 1, two excitation electrodes 3 are fixed on biggish annulus seat, and two
A X sensing electrode 4 and two Y sensing electrodes 5 are fixed on lesser annulus seat.Furthermore it is possible to which PCB is arranged in drive seat 1
Plate 2, power supply device provide corresponding voltage by pcb board 2 for each electrode.
Continue to refer to figure 1 and Fig. 2, fixed station 6 is used for the shell 8 of fixing resonance gyroscope, the surfaces externally and internally of shell 8 with
The mode that can be dismantled is provided with one layer of metal layer as pole plate, it is preferable that metal layer is metal paste layer or metal film.Metal
Layer is to add up required for detection process, can be removed after the completion of detection.Drive seat 1 can relative to fixed station 1 into
Row rotation；A through-hole can be set in the intermediate of drive seat 1, fixed station 6 is located in through-hole, and shell 8 is installed on fixed station 6
It not can rotate afterwards, and drive seat 1 can be rotated relative to fixed platform 6 and shell 8.With reference to Fig. 3, when shell 8 is installed on fixation
When on platform 6, two excitation electrodes 3 are located at the outside of shell, and two X sensing electrodes 4 and two Y sensing electrodes 5 are located at shell 8
The inside, the i.e. side wall of shell 8 are in the gap between ipsilateral X sensing electrode 4 and Y sensing electrode 5.When drive seat 1 rotates,
Each electrode is just rotated relative to shell 8, makes the side wall of each electrode and shell 8 to positive angle so as to change.Respectively
The lower end of a electrode is fixed, and upper end is free end, and each electrode can be in shape corresponding with the side wall bus of shell 8.
It continues to refer to figure 1 and Fig. 2, two X sensing electrodes 4 and two are stated Y sensing electrode 5 and connected with capacitive displacement conversion equipment
It connects, capacitive displacement conversion equipment is used for the capacitance signal between each X sensing electrode 4 and the metal layer of the inner surface of shell 8
Capacitance signal between the metal layer of the inner surface of each Y sensing electrode 5 and shell 8 is converted to displacement signal.Capacitive displacement
Conversion equipment can be the AMCM measurement chip of model PCAP02AE.Oscillograph 7 is connect with capacitive displacement conversion equipment, capacitor
The analog signal (capacitor) measured in sensing electrode is mainly converted to digital signal (displacement) output and existed by displacement converter device
On oscillograph 7.The inner surface of two X sensing electrodes 4 and shell 8 that oscillograph 7 is converted to capacitive displacement conversion equipment
Displacement signal between metal layer is inputted as the displacement of the X-direction of Lie groupoid, and capacitive displacement conversion equipment is converted
The Y-direction of displacement signal between the metal layer of the inner surface of the two Y sensing electrodes 5 arrived and shell 8 as Lie groupoid
Displacement input, so as to which the variation of four displacement signals is shown by Lie groupoid.
In the detection process, shell 8 is installed on fixed station 1, is first two X sensing electrodes 4 and two by power supply device
A Y sensing electrode 5 provides DC voltage, and DC voltage can be constant 5V DC voltage；It is again excitation electricity by power supply device
Pole 3 provides an of short duration transient pulse voltage, and pulse voltage applies the of short duration time can be for 0.1~0.2 second.Due to shell
8 outer surface is also equipped with metal layer, thus after two excitation electrodes 3 are applied pulse voltage, excitation electrode 3 and shell 8
Metal layer on outer surface generates an electric field exciting force, so that 8 free vibration of shell；Change excitation electrode 3 and shell 8 to just
Position, when the figure of the Lie groupoid occurred on oscillograph 7 is the figure of approximate parallelogram, then less parallel four
Side shape it is round and smooth it is diagonal where interval division be several equal angular forced vibration angles, make to motivate electrode 3 and each strong
Compel angle of throw to just, and alternating voltage is continuously applied to excitation electrode 3 by power supply device, shell 8 is made to carry out forced vibration；When
Occurs an occluded ellipse figure on oscillograph 7, and the long axis of ellipse figure is 0 degree or 90 degree relative to the inclination angle of X-axis
When, the azimuth where two excitation electrodes 3 is the accurate angle where one of intrinsic rigidity axis of shell 8, then is led to
The positional relationship that the adjacent intrinsic rigidity axis of any two differs 45 degree is crossed, the position of all intrinsic rigidity axis just can be found,
Due to the vibration shape of orthogonal intrinsic rigidity axis be it is the same, generally after obtaining one of intrinsic rigidity axis, only need again
The intrinsic rigidity axis that another differs from it by 45 degree is found to be analyzed.
Embodiment 2
Fig. 1 to Fig. 7 shows a kind of detection method of resonator gyroscope intrinsic rigidity axis, uses above-mentioned resonant gyroscope
The detection device of instrument intrinsic rigidity axis is detected, and is the simple flow diagram of entire detection process with reference to Fig. 4, and
Specific steps then include:
Step 1 is installed on the shell of resonator gyroscope on fixed station 1, and shell 8 is grounded by fixed station 1.Shell 8
Surfaces externally and internally is provided with metal layer in a manner of it can dismantle, and is located at two excitation electrodes 3 except shell 8, two X sensing electricity
Pole 4 and two Y sensing electrodes 5 are located in shell 8, but shell 8 and each electrode are not in contact with but big with same gap
It is small.After shell 8 installs, two excitation electrodes 3 are just with an azimuth of the side wall of shell 8 to just.
Step 2 is that two X sensing electrodes 4 and two Y sensing electrodes 5 provide DC voltage, direct current by power supply device
Voltage can be constant 5V DC voltage, thus when shell 8 does not vibrate, each sensing electrode 5 and the inner surface of shell 8
There is constant electromotive force between metal layer.
Step 3 applies of short duration pulse voltage to two excitation electrodes 3 by power supply device, and application time can be
0.1~0.2 second, two excitation electrodes 3 after of short duration energization and the metal layer on 8 outer surface of shell generated an electric field exciting
Power, so that 8 free vibration of shell, and damped since shell 8 exists, free vibration can gradually decay to static.It is vibrated in shell 8
During, since voltage is constant, the spacing between the metal layer of the inner surface of shell 8 and each sensing electrode can become
Change, change so as to cause electric field strength between each sensing electrode and the metal layer of the inner surface of shell 8, electric field strength becomes
Change can make the quantity of electric charge of sensing electrode change so that the metal layer of the inner surface of each sensing electrode and shell 8 it
Between capacitor can change, and the change in displacement sensed when capacitance variations and shell 8 vibrate forms corresponding relationship.Cause
This, during the free vibration of shell 8 is subjected to displacement variation, the gold of each X sensing electrode 4 and the inner surface of shell 8
The capacitor belonged between layer can change, and the capacitor between the metal layer of the inner surface of each Y sensing electrode 5 and shell 8
It can change.
Step 4, metal of the capacitive displacement conversion equipment the two X sensing electrodes 4 detected and the inner surface of shell 8
Capacitor between layer is converted to the displacement of X-direction；And the metal of the inner surface the two Y sensing electrodes 5 and shell 8 detected
Capacitor between layer is converted to the displacement of Y-direction；In 8 free vibration of shell, the inner surface of two X sensing electrodes 4 and shell 8
Metal layer between capacitance variations and two Y sensing electrodes 5 and shell 8 inner surface metal layer between capacitance variations just
The change in displacement of X-direction and the change in displacement of Y-direction can be converted to by capacitive displacement conversion equipment；
Step 5, oscillograph 7 receive the change in displacement and Y-direction for the X-direction that capacitive displacement conversion equipment is converted to
Change in displacement after, shown by Lie groupoid.With reference to Fig. 5, if an approximate parallelogram is presented in Lie groupoid
Figure, this approximate parallelogram it is round and smooth it is diagonal where section be shell 8 one of intrinsic rigidity axis
Azimuth where section, it is round and smooth in Fig. 5 diagonally to refer to two obtuse angles, due to its be have round and smooth transition, rather than
Wedge angle, therefore the angular range where entire round and smooth transition, as where the azimuth of one of intrinsic rigidity axis of shell 8
Interval range.Being improved on shell 8 this interval division is several equal angular forced vibration angles, and two are motivated
Electrode 3 is turned to some forced vibration angle to just, then carries out step 6.The round and smooth curved angle area of approximate parallelogram
Between appearance, be due to damping flaw magnitude and frequency disagreement magnitude difference it is little when it is generated.This is arc-shaped
Size depends on size of the size compared to frequency disagreement of damping flaw to a certain extent, when damp flaw it is smaller when, can be with
When ignoring, the diagonal of the parallelogram of Lie groupoid is just entirely wedge angle, then can directly pass through free vibration
Mode find intrinsic rigidity shaft position.But as long as damping disagreement cannot be ignored, then the arc chord angle presented is exactly a section,
Therefore be only often by free vibration cannot correctly find the position of specific intrinsic rigidity axis, thus need with subsequently through
The mode of forced vibration further correctly finds the position of intrinsic rigidity axis.In addition, if Lie groupoid presentation is one
The straight line that item and X-axis are overlapped, illustrate the azimuth at this time where two excitation electrodes 3 be shell 8 one of them is inherently rigid
Property axis where angle, then differ by the adjacent intrinsic rigidity axis of any two 45 degree of positional relationship, just can find all
Intrinsic rigidity axis position, detection process terminates, and during atual detection, such case is also to be difficult directly to occur.
Step 6 is turned to some forced vibration angle two excitation electrodes 3 to just, then by power supply device to two
A excitation electrode 3 applies lasting alternating voltage, under the action of the metal layer of the outer surface of shell 8, carries out shell 8 forced
Vibration；Equally, during shell 8 carries out forced vibration, in capacitive displacement conversion equipment two X sensing electrodes 4 and shell 8
Inner surface metal layer between capacitance variations and two Y sensing electrodes 5 and shell 8 inner surface metal layer between electricity
After appearance variation is respectively converted into the change in displacement of X-direction and the change in displacement of Y-direction, Lie groupoid is passed through by oscillograph 7 and is carried out
Display.
Step 7, if after the Lie groupoid that oscillograph 7 obtains in step 6 tends towards stability, obtained figure is not
The occluded ellipse figure that inclination angle relative to X-axis is 0 degree or 90 degree illustrates two 3 places of excitation electrodes at this time with reference to Fig. 6
Azimuth be not position where one of intrinsic rigidity axis, just need to make two excitation electrodes 3 and another force vibration
Dynamic angle is to just, and return step six；If the track after the Lie groupoid that oscillograph 7 obtains in step 6 tends towards stability is in one
A occluded ellipse figure, and ellipse figure is 0 degree or 90 degree relative to the inclination angle of X-axis, with reference to Fig. 7, illustrates two at this time
Azimuth where excitation electrode 3 is the accurate angle where one of intrinsic rigidity axis of shell 8, passes through any two
Adjacent intrinsic rigidity axis differs 45 degree of positional relationship, just can find the position of all intrinsic rigidity axis.
The present invention first passes through power supply device and provides of short duration pulse voltage to excitation electrode 3, makes 8 free vibration of shell, from
And the minizone range of orientation angles where determining intrinsic rigidity axis by Lie groupoid that oscillograph 7 is shown, then at this
Each position in interval range provides alternating voltage to excitation electrode 3 by power supply device, so that the shell Final 8 is compeled vibration, passes through
Lie groupoid formation to judge flaw containing density and damps the flaw at the ellipse at 0 degree or 90 degree of inclination angle with X-axis when forced vibration
Orientation angles where the intrinsic rigidity axis of the shell 8 of defect, to obtain the accurate angle of intrinsic rigidity axis in interval range in front
Degree, the present invention being capable of rigorous, standards, accurate and efficiently detect hemispherical resonant gyro and and hemispherical resonant gyro
The position of the intrinsic rigidity axis of the shell 8 of other resonator gyroscopes with similar structure facilitates the subsequent frequency to shell 8 to split
Solution carries out the leveling of frequency difference, so as to greatly improve the manufacture success rate for wiping vibration gyroscope.
The aforementioned description to specific exemplary embodiment of the invention is in order to illustrate and illustration purpose.These descriptions
It is not wishing to limit the invention to disclosed precise forms, and it will be apparent that according to the above instruction, can much be changed
And variation.The purpose of selecting and describing the exemplary embodiment is that explaining specific principle of the invention and its actually answering
With so that those skilled in the art can be realized and utilize a variety of different exemplary implementation schemes of the invention and
Various chooses and changes.The scope of the present invention is intended to be limited by claims and its equivalents.
Claims (4)
1. a kind of detection device of resonator gyroscope intrinsic rigidity axis characterized by comprising
Drive seat；
Power supply device；
Two excitation electrodes are set in the drive seat to two excitation electrode Relative distributions；Two excitation electrodes are logical
It crosses the power supply device and alternating voltage and pulse voltage is provided；
Two X sensing electrodes are set in the drive seat to two X sensing electrode Relative distributions；And two X sensing electricity
Pole is located between two excitation electrodes；Two X sensing electrodes provide DC voltage by the power supply device；
Two Y sensing electrodes are set in the drive seat to two Y sensing electrode Relative distributions, and two Y sensing electricity
The angle between the straight line where straight line and two X sensing electrodes where pole is 45 °；Two Y sensing electrodes pass through
The power supply device provides DC voltage；
Fixed station is used for the shell of fixing resonance gyroscope；The surfaces externally and internally of the shell is set in a manner of it can dismantle
It is equipped with one layer of metal layer as pole plate；The drive seat can be rotated relative to the fixed station；When the shell is installed
When on the fixed station, two excitation electrodes are located at the outsides of the shell, described in two X sensing electrodes and two
Y sensing electrode is located at the inside of the shell；
Capacitive displacement conversion equipment, two X sensing electrodes and two Y sensing electrodes with the capacitive displacement converting means
Set connection；The capacitive displacement conversion equipment be used for the metal layer of each X sensing electrode and the inner surface of the shell it
Between capacitance signal and each Y sensing electrode and the shell inner surface metal layer between capacitance signal be converted to
Displacement signal；And
Oscillograph is connect with the capacitive displacement conversion equipment, which converts the capacitive displacement conversion equipment
X of the displacement signal as Lie groupoid between the metal layer of the inner surface of two arrived the X sensing electrode and the shell
The displacement in direction inputs, and two Y sensing electrodes that the capacitive displacement conversion equipment is converted to and the shell
Inner surface metal layer between displacement signal as Lie groupoid Y-direction displacement input, so as to four positions
The variation of shifting signal is shown by Lie groupoid.
2. the detection device of resonator gyroscope intrinsic rigidity axis according to claim 1, which is characterized in that the metal layer
For metal paste layer or metal film.
3. the detection device of resonator gyroscope intrinsic rigidity axis according to claim 1, which is characterized in that the capacitor position
Transfer changing device is the AMCM measurement chip of model PCAP02AE.
4. a kind of detection method of resonator gyroscope intrinsic rigidity axis, which is characterized in that use resonance top described in claim 1
The detection device of spiral shell instrument intrinsic rigidity axis is detected, and specific steps include:
Step 1 is installed on the shell of resonator gyroscope on the fixed station；
Step 2 provides direct current by the power supply device for two X sensing electrodes and two Y sensing electrodes
Pressure；
Step 3 applies of short duration pulse voltage to two excitation electrodes by the power supply device, after of short duration energization
Metal layer on two excitation electrodes and the housing outer surface generates an electric field exciting force, so that the shell is free
Vibration is damped since the shell exists, and free vibration can gradually decay to static；During the hull vibration, often
Capacitor between the metal layer of the inner surface of a X sensing electrode and the shell can change, and each Y sensing
Capacitor between the metal layer of the inner surface of electrode and the shell can also change；
Step 4, inner surface of the capacitive displacement conversion equipment two the X sensing electrodes and the shell detected
Metal layer between capacitor be converted to the displacement of X-direction；And the two Y sensing electrodes and the shell detected
Capacitor between the metal layer of inner surface is converted to the displacement of Y-direction；In the shell free vibration, two X sensings
Capacitance variations and two Y sensing electrodes between the metal layer of the inner surface of electrode and the shell are interior with the shell
Capacitance variations between the metal layer on surface just can be converted to by the capacitive displacement conversion equipment X-direction change in displacement and
The change in displacement of Y-direction；
Step 5, the oscillograph receive change in displacement and the side Y for the X-direction that the capacitive displacement conversion equipment is converted to
To change in displacement after, shown by Lie groupoid；If the figure of an approximate parallelogram is presented in Lie groupoid,
The section at the round and smooth diagonal place of this approximate parallelogram is the azimuth place of the intrinsic rigidity axis of the shell
Section, be on the housing several equal angular forced vibration angles this interval division, and two excitations
Electrode is turned to some forced vibration angle to just, then carries out step 6；If what Lie groupoid was presented is that one and X-axis are overlapped
Straight line, illustrate at this time two it is described excitation electrodes where azimuth be the shell one of intrinsic rigidity axis institute
Angle；
Step 6 applies lasting alternating voltage to two excitation electrodes by the power supply device, so that the shell
Carry out forced vibration；Equally, during the shell carries out forced vibration, in the capacitive displacement conversion equipment two institutes
State capacitance variations between the metal layer of the inner surface of X sensing electrode and the shell and two Y sensing electrodes with it is described
Capacitance variations between the metal layer of the inner surface of shell are respectively converted into the change in displacement of X-direction and the change in displacement of Y-direction
Afterwards, it is shown by the oscillograph by Lie groupoid；
Step 7, if after the Lie groupoid that the oscillograph described in step 6 obtains tends towards stability, obtained figure is not
The occluded ellipse figure that inclination angle relative to X-axis is 0 degree or 90 degree illustrates the orientation at this time where two excitation electrodes
Angle is not the position where intrinsic rigidity axis, just needs to make two excitation electrodes and another forced vibration angle to just, and
Return step six；If the track after the Lie groupoid that the oscillograph described in step 6 obtains tends towards stability is closed in one
Ellipse figure, and ellipse figure is 0 degree or 90 degree relative to the inclination angle of X-axis, illustrates two excitation electrodes places at this time
Azimuth be angle where one of intrinsic rigidity axis of the shell.
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| CN111998841A (en) * | 2020-09-04 | 2020-11-27 | 中国电子科技集团公司第二十六研究所 | Hemisphere harmonic oscillator dabber vibration detection circuitry and device |
| CN112710869A (en) * | 2020-12-09 | 2021-04-27 | 华中光电技术研究所（中国船舶重工集团公司第七一七研究所） | Harmonic oscillator rigid shaft identification device and method based on additional electrostatic rigidity principle |
| CN112815964A (en) * | 2020-12-29 | 2021-05-18 | 华中光电技术研究所（中国船舶重工集团公司第七一七研究所） | Harmonic oscillator vibration characteristic detection device and method based on planar interdigital electrode |
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| CN112710869B (en) * | 2020-12-09 | 2023-04-21 | 华中光电技术研究所（中国船舶重工集团公司第七一七研究所） | Harmonic oscillator rigid shaft identification device and method based on additional static stiffness principle |
| CN112815964A (en) * | 2020-12-29 | 2021-05-18 | 华中光电技术研究所（中国船舶重工集团公司第七一七研究所） | Harmonic oscillator vibration characteristic detection device and method based on planar interdigital electrode |
| CN112815964B (en) * | 2020-12-29 | 2023-10-13 | 华中光电技术研究所（中国船舶重工集团公司第七一七研究所） | Harmonic oscillator vibration characteristic detection device and method based on plane interdigital electrode |
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