CN109261998A - The cutter and processing method of target as sputter face processing - Google Patents
The cutter and processing method of target as sputter face processing Download PDFInfo
- Publication number
- CN109261998A CN109261998A CN201710580563.6A CN201710580563A CN109261998A CN 109261998 A CN109261998 A CN 109261998A CN 201710580563 A CN201710580563 A CN 201710580563A CN 109261998 A CN109261998 A CN 109261998A
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- Prior art keywords
- cutter
- face
- knife bar
- processed
- target
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B29/00—Holders for non-rotary cutting tools; Boring bars or boring heads; Accessories for tool holders
- B23B29/02—Boring bars
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B29/00—Holders for non-rotary cutting tools; Boring bars or boring heads; Accessories for tool holders
- B23B29/03—Boring heads
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physical Vapour Deposition (AREA)
- Milling Processes (AREA)
Abstract
The cutter and processing method, the cutter of a kind of target as sputter face processing include: knife bar, have the first face and the second face being oppositely arranged；Cutter head on first face is fixed on the knife bar along one end of extending direction, and the cutter head includes: fixing seat, is fixedly linked with the knife bar；Blade is connected with the fixing seat, and the cutting edge of the blade protrudes from the fixed seating face.The cutter is when treating machined surface and being processed, a continuous lines can be only formed on the face to be processed, and formed lines is not in intersect, so continuously and the not formation of cross cut, the uniformity of formed target as sputter texture can be effectively improved, the quality for being conducive to improve formed target as sputter face texture, improves the roughness in target as sputter face, formed product is made to reach quality requirement.
Description
Technical field
The present invention relates to target manufacture field, in particular to a kind of the cutter and processing method of the processing of target as sputter face.
Background technique
Magnetron sputtering is a kind of using charged particle bombardment target, makes target atom from surface spilling and uniform deposition is in base
The coating process of on piece.Magnetron sputtering has that sputtering raste is high, substrate temperature is low, binding force is good and excellent between substrate and film layer
The advantages such as membrane uniformity.Magnetron sputtering technique has been widely used in integrated circuit, information storing device, liquid crystal display
In the manufacturing process of the electronics such as screen, laser memory, electronic control device and information industry.
With electronic industry high speed development, in ic manufacturing process, chip substrate size is continuously improved, and electronics
Device size constantly reduces, and integrated circuit electronic device integration increases accordingly, technique of the manufacturing technology to magnetron sputtering technique
It is required that being increasingly stringenter.
The quality of target used in magnetron sputtering process is to influence one of the key factor of magnetron sputtering film quality.Institute
It is higher than the quality requirement of traditional material industry with the quality requirement for sputtering target material.The run-of-the-mill of sputtering target material requires main
Including for size, flatness, purity, component content, density, the requirement of crystallite dimension and powder injection molding etc.；In addition,
Surface roughness, resistance value, even grain size, ingredient and structural homogenity, foreign matter (oxide) content and size, magnetic conduction
Rate, ultra high density and ultra-fine grain etc., sputtering target material have higher quality requirement or special quality requirement.And
With the development of technology, target as sputter face is only no longer planar structure, and target with texture in sputter face is also been developed
Material.
But the prior art on target as sputter face formed texture it is second-rate, it is difficult to the quality for meeting product is wanted
It asks.
Summary of the invention
Problems solved by the invention is to provide the cutter and processing method of a kind of target as sputter face processing, to improve target
The lines quality of formed texture in sputter face.
To solve the above problems, the present invention provides a kind of cutter of target as sputter face processing, comprising:
Knife bar has the first face and the second face being oppositely arranged；Cutter head on first face, is fixed on the knife
Bar includes: fixing seat along one end of extending direction, the cutter head, is fixedly linked with the knife bar；Blade, with the fixing seat phase
Even, and the cutting edge of the blade protrudes from the fixed seating face.
Optionally, the quantity of the cutter head is 1.
Optionally, the material of the knife bar is 45# steel.
Optionally, the knife bar is quenched processing.
Optionally, the hardness of the knife bar is in 255HB or more.
Optionally, the cutter further include: the first fixing groove in first face is set to the knife bar edge and prolongs
Stretch the one end in direction；The cutter head is fixed in first fixing groove and the cutting edge of at least described blade protrudes from described the
On one side.
Optionally, the cutter head is Boring head.
Optionally, the fixing seat includes: the fixed part for being fixedly linked with the knife bar；It is raised in the fixed part
The operation portion on surface, along the vertical knife bar extending direction, the operation portion is set to the fixed part in the knife bar
The side of the heart；The blade is connected with the operation portion.
Optionally, along the knife bar extending direction, the blade is located at the operation portion of the fixing seat far from the knife bar
The one end at center.
Optionally, there are multiple first fixation holes on the knife bar, the direction referred to along vertical first face, described first
Fixation hole at least runs through the segment thickness of the knife bar；There are multiple first connecting holes on the fixed part of the fixing seat, it is described
First connecting hole runs through the fixed part；The cutter head further include: multiple first connectors are located at first connecting hole and institute
It states in the first fixation hole, for connecting first fixation hole and first connecting hole.
Optionally, first fixation hole is screw hole, and first connector is bolt.
Optionally, first fixation hole is through-hole, and first connector includes bolt and nut.
Optionally, the cutter further include: the second fixing groove in first face is set to the knife bar edge and prolongs
The one end for stretching direction is oppositely arranged with first fixing groove.
Optionally, the cutter further include: counterweight is fixed in second fixing groove.
Optionally, the second fixing groove bottom has multiple second fixation holes, the direction referred to along vertical first face, described
Second fixation hole at least runs through the segment thickness of the knife bar
Optionally, the blade nose radius is in 0.7mm to 0.9mm range.
Optionally, the cutter further include: knife handle is connected with the knife bar.
Optionally, the knife bar center has a mounting hole, the mounting hole along vertical second face direction extremely
Run through the segment thickness of the knife bar less；The knife handle has the connecting pin and opposite with the connecting pin being connected with the knife bar
Installation end, the connecting pin of the knife handle is located in the mounting hole.
Optionally, the mounting hole is screw hole, and the connection end surfaces of the knife handle are provided with and the mounting hole internal screw thread
Adaptable external screw thread.
Optionally, the mounting hole is through-hole；There is blind hole in the end face of the connecting pin, there is spiral shell inside the blind hole
Line；The knife handle further include: the connection bolt being adapted with the blind hole internal thread.
Optionally, there is limiting slot, the limiting slot is parallel described in second face in the second face of the knife bar
Knife bar extending direction is arranged and runs through the mounting hole；The knife handle further include: be at least partly raised in the knife handle side
Limited bolt, for being set in the limiting slot.
Correspondingly, the present invention also provides a kind of processing methods in target as sputter face, comprising: target to be processed is provided, it is described
Target to be processed has face to be processed；Make the target to be processed in the plane internal rotation in the parallel face to be processed；Knife is provided
Tool, the cutter are the cutter that target as sputter face of the invention processes；While the target to be processed rotation, make the knife
The cutting edge of piece is in contact with the face to be processed and the cutter is made to do unidirectional fortune along the radial direction of the target rotation to be processed
It is dynamic.
Optionally, described to be processed horizontally disposed up；The target to be processed rotates in the horizontal plane；The cutter
Knife bar it is horizontally disposed.
Optionally, the target to be processed is by the axis rotation at the face center to be processed and the vertical face to be processed
Turn.
Optionally, during being processed, the cutter is moved in a straight line.
Compared with prior art, technical solution of the present invention has the advantage that
The cutter includes knife bar and the cutter head positioned at the knife bar side of an end, and the cutter head includes: fixing seat,
It is fixedly linked with the knife bar；Blade is connected with the fixing seat, and the cutting edge of the blade protrudes from the fixing seat table
Face；When being processed using the cutter, the cutting edge of the blade is made to be in contact with the face to be processed and along described to be added
The radial direction of work target rotation does one-way movement to be processed, therefore when processing to the target to be processed, the knife
Tool can only form a continuous lines on the face to be processed, and formed lines is not in intersection, so
Continuously and the not formation of cross cut, the uniformity of formed target as sputter texture can be effectively improved, is conducive to improve institute's shape
At the quality of target as sputter face texture, improves the roughness in target as sputter face, formed product is made to reach quality requirement.
In optinal plan of the present invention, the blade nose radius is the blade point of a knife half in 0.7mm to 0.9mm range
If diameter is too small, using the blade processed when, will affect it is residual cut discharge, it is possible that the problem of collapsing angle, tipping；
If the blade nose radius is too big, when being processed using the blade, burr on formed lines can be made excessive, shadow
The quality for ringing formed texture is unfavorable for improving formed product quality.
In optinal plan of the present invention, the knife bar is quenched processing；The knife bar is quenched, can effectively be mentioned
The hardness of the high knife bar reduces the knife bar and deformation occurs to improve the yield limit of the knife bar, reduce plastic deformation
Probability, improve the quality of the cutter, improve the stability that the cutter carries out process.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of one embodiment of target as sputter face of the present invention process tool；
Fig. 2 is the overlooking structure diagram in the first face of knife bar in embodiment illustrated in fig. 1；
Fig. 3 is the overlooking structure diagram in the second face of knife bar in embodiment illustrated in fig. 1；
Fig. 4 be in embodiment illustrated in fig. 1 cutter head along the structural schematic diagram in the direction A；
Fig. 5 is in embodiment illustrated in fig. 4 along the structural schematic diagram in the direction B；
Fig. 6 is the flow diagram of one embodiment of target as sputter method for processing surface of the present invention.
Specific embodiment
It can be seen from background technology that, the prior arts on target as sputter face formed texture it is second-rate, it is difficult to meet and produce
The quality requirement of product.
It in mechanical processing process, generallys use dise knife and treats machined surface and be surface-treated, thus on face to be processed
Form texture.But the quality that the texture for using dise knife to be formed in the sputter face of target is often difficult to meet target as sputter face is wanted
It asks.
It has been investigated that since dise knife generally includes the multiple cutter heads being in the same plane, using dise knife to target
Sputter face when being processed, multiple cutter heads can simultaneously cut target as sputter face, and each cutter head can form one solely
Vertical lines；And dise knife be other than entire blade can move in the same plane, it can also be in the parallel target as sputter
It is rotated in the plane in face, therefore each cutter head can form an independent helical form lines, so using dise knife to institute
State target as sputter face carry out processing will form it is a plurality of have intersect lines；The intersection of the target material surface lines, influences lines
Uniformity influence the roughness in target as sputter face to influence the quality of texture on target as sputter face, to cause product difficult
The problem of to reach quality requirement.
To solve the technical problem, the present invention provides a kind of cutter of target as sputter face processing, and the cutter is being treated
When machined surface is processed, a continuous and Uncrossed lines can be only formed on the face to be processed, can effectively be mentioned
The uniformity of high formed target as sputter texture is conducive to the quality for improving formed target as sputter face texture, improves target and splashes
The roughness for penetrating face makes formed product reach quality requirement.
To make the above purposes, features and advantages of the invention more obvious and understandable, with reference to the accompanying drawing to the present invention
Specific embodiment be described in detail.
With reference to Fig. 1, the structural schematic diagram of one embodiment of target as sputter face of the present invention process tool is shown.
The cutter of target as sputter face processing includes:
Knife bar 110 has the first face 111 and the second face 112 being oppositely arranged；Cutter head on first face 111
120, the knife bar 110 is fixed on along one end of extending direction, and the cutter head 120 includes: fixing seat 121, with the knife bar 110
It is fixedly linked；Blade 122 is connected with the fixing seat 121, and the blade 122 includes the cutting backwards to first face 111
Sword.
In the present embodiment, the cutter further include: knife handle 130 is connected with the knife bar 110.Specifically, passing through lathe
140 pairs of cutters apply feeding, thus make the cutting edge 122a of the blade 122 treat machined surface carry out cutting realize plus
Work, the knife handle 130 is exactly the connection for realizing the cutter and lathe, to realize the feeding of the cutter.
During processing, it treats machined surface by the blade 122 of the cutter head 120 to be cut, thus to be processed
A texture is formed in face；And formed texture is identical as the track of cutter relative motion on face to be processed, so
When the cutter makees one-way movement on face to be processed, the cutter can only form one continuously on the face to be processed
And Uncrossed lines.Continuously and the not formation of cross cut, the uniformity of formed target as sputter texture can be effectively improved,
The quality for being conducive to improve formed target as sputter face texture, improves the roughness in target as sputter face, reaches formed product
Quality requirement.
With reference to Fig. 1, in conjunction with referring to figs. 2 and 3, wherein Fig. 2 is the vertical view knot in the first face of knife bar in embodiment illustrated in fig. 1
Structure schematic diagram, Fig. 3 are the overlooking structure diagrams in the second face of knife bar in embodiment illustrated in fig. 1.
The knife bar 110 controls the movement of the cutter head 120 for fixing the cutter head 120.
In the present embodiment, the knife bar 110 is in long strip.Specifically, the knife bar 110 is 400mm*80mm*30mm's
Strip.The knife bar 110 has the first face 111 and the second face 120 opposite and disposed in parallel.During processing, described
First face 111 is towards the face to be processed of target to be processed, and second face 112 is backwards to target to be processed.
The fixation and motion control of the cutter head 120 are realized by the knife bar 110, can effectively expand the cutter
Working (finishing) area enables the cutter to process large-sized target as sputter face, to be conducive to expand the cutter
The scope of application is conducive to improve product quality.
It should be noted that the material of the knife bar 110 is 45# steel, and the knife bar 110 is through quenching in the present embodiment
Fire processing.Quenching treatment can effectively improve the hardness of the knife bar 110, to improve the yield limit of the knife bar 110, subtract
Small plastic deformation reduces the knife bar 110 and the probability of deformation occurs, improves the quality of the cutter, improves the cutter and carries out
The stability of process.
Specifically, for the hardness of the knife bar 110 in 255HB or more, i.e., the Bu Shi of the described knife bar 110 is hard in the present embodiment
Angle value is 255 or more.If the hardness of the knife bar 110 is too small, the yield limit of the possible knife bar 110 is smaller, described
Deformation may occur in process in knife bar 110, to be unfavorable for improving the technology stability of process, and be unfavorable for
Extend the service life of the cutter.
As shown in Fig. 2, the cutter further include: the first fixing groove 113 in first face 111 is set to institute
Knife bar 110 is stated along one end of extending direction.
First fixing groove 113 is used to provide space for the cutter head 120 fixation, is also used to limit the cutter head 120
Position improve assembly precision to reduce the technology difficulty of cutter assembling.
Projection of shape of first fixing groove 113 in first face 110 is rectangle, to adapt to the cutter head
120 shape.In other embodiments of the invention, the shape of first fixing groove can also be that other adapt to the tip shapes
Regularly or irregularly shape.
There are multiple first fixation holes 114, for realizing the cutter head 120 and the knife bar 110 on the knife bar 110
Connection, and the quantity of first fixation hole 114 be it is multiple, so first fixation hole 114 is also used to fix the knife
First 120 position.
In the present embodiment, the cutter head 120 is fixed in first fixing groove 113, so first fixation hole 114
Positioned at 113 bottom of the first fixing groove；The quantity of first fixation hole 114 described in first fixing groove, 113 bottom is 2.
In the present embodiment, first fixation hole 114 is to run through the knife bar 110 along vertical first face, 111 direction
Screw hole.In other embodiments of the invention, first fixation hole is also possible to along vertical first face direction through described
The through-hole of knife bar, or along vertical first face direction through the screw hole of the shaft portion thickness.
As described in Figure 2, the cutter further include: the second fixing groove 115 in first face 111 is set to institute
Knife bar 111 is stated along the other end of extending direction, is oppositely arranged with first fixing groove 113.In addition, in the present embodiment, it is described
Cutter further include: counterweight (not shown) is fixed in second fixing groove 115.
In the present embodiment, during processing, the knife bar 110 is horizontally disposed, and the cutter also needs for the cutter
It to move in the horizontal plane, therefore the use of the counterweight, the weight of the cutter can be balanced, especially balance is located at institute
The weight of cutter head 120 is stated, to improve the stability of the knife bar 110, improves the uniformity for processing formed texture.
It should be noted that, by the setting of counterweight, the stability when cutter uses is improved in the present embodiment,
This way is only an example.In other embodiments of the invention, the weight of the knife bar is much larger than the weight of the cutter head, so
The omission of the counterweight will not influence the stability in use of the cutter.
Second fixing groove 115 is used to provide space for the counterweight, is also used to limit the position of the counterweight,
To reduce the technology difficulty of the cutter assembling, assembly precision is improved；The counterweight is limited using second fixing groove 115
The position of part can be effectively improved the stability of the cutter during processing, be conducive to improve the uniform of formed texture
Property.
In the present embodiment, projection of shape of second fixing groove 115 in first face 110 is rectangle, with suitable
Answer the shape of the counterweight.In other embodiments of the invention, the shape of second fixing groove can also be that other adapt to institute
State counterweight regular shape or irregular shape.
In the present embodiment, the knife bar 110 is strip, so second fixing groove 115 is located at first face 111
It is interior, and be centrosymmetric setting with first fixing groove 113 with the symmetrical centre of the knife bar 110；Second fixing groove
The quantity of 115 the second fixation holes of bottom 116 is 2.
Specifically, 115 bottom of the second fixing groove has multiple second fixation holes 116, for realizing the counterweight
With the connection of the knife bar 110, and the quantity of second fixation hole 116 be it is multiple, so second fixation hole 116 also
For fixing the position of the counterweight.
In the present embodiment, second fixation hole 116 is to run through the knife bar 110 along vertical first face, 111 direction
Screw hole.In other embodiments of the invention, second fixation hole is also possible to along vertical first face direction through described
The through-hole of knife bar, or along vertical first face direction through the screw hole of the shaft portion thickness.
As shown in figure 3,110 center of knife bar has a mounting hole 117, the mounting hole 117 is along vertical described the
The segment thickness of the knife bar 110 is at least run through in the direction in two faces 112.
The mounting hole 117 provides space for the installation of the knife handle 130, to realize the knife handle 130 and the knife
The connection of bar 110.In the present embodiment, the mounting hole 117 is through-hole, and the direction along vertical second face 112 is through described
Knife bar 110；The part knife handle 130 runs through the mounting hole 117, and the connection with the knife handle 110 is realized by connection bolt.
In addition, being additionally provided in the second face 112 of the knife bar 110 with limiting slot 118, the limit in the present embodiment
Slot 118 parallel 110 extending direction of knife bar in second face 112 in position is arranged and runs through the mounting hole 117.
The limiting slot 118 realizes the knife bar 110 and institute for matching with the limited bolt on the knife handle 130
The fixation for stating relative positional relationship between knife handle 130 prevents the knife bar 110 from rotating with the knife handle 130 for axis, improves
The technology stability when cutter is processed advantageously forms the lines of high evenness.
With reference to Fig. 1, in conjunction with reference Fig. 4 and Fig. 5, wherein Fig. 4 is that structure of the cutter head along the direction A is shown in embodiment illustrated in fig. 1
It is intended to, Fig. 5 is in embodiment illustrated in fig. 4 along the structural schematic diagram in the direction B.
The cutter head 120 is processed for treating processing target, to form lines on face to be processed.
In the present embodiment, 110 first face 111 of knife bar is provided with first fixing groove along one end of extending direction
113, so the cutter head 120 is fixed in first fixing groove 113.The side wall and the knife of first fixing groove 113
First 120 side wall contacts with each other, and can effectively prevent the cutter head 120 and be subjected to displacement in process, is conducive to raising and adds
Work technology stability help to obtain the lines of high uniformity.
The quantity of the cutter head 120 be 1, therefore on the cutter head 120 only have 1 blade 122 can treat machined surface into
Row cutting, so the cutter forms 1 continuous lines, the shape of the lines and institute on face to be processed in processing
It is identical to state relative motion of the cutter head 120 on face to be processed.
In the present embodiment, the cutter head 120 is Boring head, including the blade 122 and the fixing seat 121；It is described
Blade 122 is cut for treating machined surface to form lines；The fixing seat 121 is located at the blade 122 and the knife
Between bar 110, for making the blade 122 be fixed on the knife bar 110.
The blade 122 includes the cutting edge 122a backwards to first face 111, therefore the cutting edge 122a can be convex
For first face 111, thus with the face contact to be processed, and then realize the cutting to the face to be processed；And institute
State cutter during processing, the knife bar 110 is horizontally disposed, so first face 111 is parallel to the horizontal plane, therefore backwards
The cutting edge 122a in first face 111 is parallel to the horizontal plane or less parallel, so as to be conducive to be produced in process
The raw useless exclusion cut, is conducive to the progress of processing, is conducive to extend cutting-tool's used life, is conducive to improve processing quality.
As shown in Figure 4 and Figure 5, the fixing seat 121 is L-shaped, comprising: for consolidating with what the knife bar 110 was fixedly linked
Determine portion 123；It is raised in the operation portion 124 on 123 surface of fixed part, along vertical 110 extending direction of knife bar, the operation
Portion 124 is set to the fixed part 123 close to the side at the knife bar center；The blade 122 and 124 phase of operation portion
Even.
The fixed part 123 is for realizing the connection with the knife bar 110；The operation portion 124 is for fixing the knife
Piece 122.The operation portion 124 is raised in the surface of the fixed part 123, to enable the cutting edge 122a of the blade 122
The cutting edge 122a for being enough raised in 123 surface of fixed part and the blade can be raised in first face 111.
In the present embodiment, as shown in Figure 1, the blade 122 is located at the fixing seat along 110 extending direction of knife bar
The one end of 121 operation portion 123 far from 110 center of knife bar, therefore the cutting edge 122a of the blade 122 is not only raised in
First face 111, and along 110 extending direction of knife bar, the cutting edge 122a of the blade 121 also protrudes from the knife
The end of bar 110.So that the cutting edge 122a of the blade 121 is raised in first face 111 and protrudes from the knife bar 110
The way of end can be such that the cutting edge 122a of the blade 121 is exposed to outer, to be conducive to observe institute in process
The position for stating blade 121 Yu face contact to be processed is conducive to the accurate control in process to the cutter, is conducive to improve
Machining accuracy.
As shown in Figure 4 and Figure 5, on the fixed part 123 of the fixing seat 121 there are multiple first connecting holes (not show in figure
Out), first connecting hole runs through the fixed part 123；The cutter head 120 further include: multiple first connectors 125 are located at
In first connecting hole and first fixation hole, for connecting first fixation hole and first connecting hole.
In the present embodiment, first fixation hole 114 is screw hole, so first connector 125 is bolt.Described
The screw thread of 125 bolt of a connection piece and the screw thread of 114 inner wall of the first fixation hole are mutually twisted.Other embodiments of the invention
In, first fixation hole may be through-hole, so first connector includes bolt and nut, the bolt and nut
Screw thread be mutually twisted.
In the present embodiment, first connecting hole and first fixation hole 114 are corresponded, so described first connection
The quantity in hole is also 2.
The cutting edge 122a of the blade 122 is in contact with face to be processed, cuts the face to be processed, to be formed
Lines.
In the present embodiment, the 122 nose radius R of blade is in 0.7mm to 0.9mm range.Specifically, the blade
122 nose radius R are 0.8mm.
The 122 nose radius R of blade should not it is too big also should not be too small.If 122 nose radius of blade is too small,
When being processed using the blade 122, will affect it is residual cut discharge, it is possible that the problem of collapsing angle, tipping；The blade
If 122 nose radius are too big, when being processed using the blade 122, burr on formed lines can be made excessive, influenced
The quality of formed texture is unfavorable for improving formed product quality.
In the present embodiment, the normal relief angle of the blade 122 is 7 °.The normal relief angle of the blade 122 should not be too big.Institute
If the normal relief angle for stating blade 122 is too big, the film layer between the blade 122 and surface to be treated will increase, weaken institute
The problem of stating the radiating condition and intensity of 122 cutting edge 122a of blade, reducing tool life, be easy to appear tipping.
In addition, the blade shapes of the blade 122 are the diamond shape that interior angle is 80 °；Tolerance is the non-standard de-sign of ± 0.13mm
Blade, cutting edge 122a length is 12mm, with a thickness of 4.76mm.So the blade 122 is CCGX in the present embodiment
The blade of 120408 models.
It should be noted that same as the prior art to the specific descriptions of 120408 blade of model CCGX, the present invention exists
This is repeated no more.
It continues to refer to figure 1, for the knife handle 130 for connecting the knife bar 110 and lathe 140, the lathe 140 passes through institute
It states knife handle 130 and applies feeding to the cutter, the blade of the blade 122 is enable to process the target as sputter face.
The knife handle 130 has the connecting pin 131 being connected with the knife bar 110 and the peace opposite with the connecting pin 131
End 132 is filled, the connecting pin 133 of the knife handle 130 is located in the mounting hole 117.
Specifically, the mounting hole 117 is through-hole in the present embodiment, i.e., the side wall of the described mounting hole 117 does not have screw thread.
There is blind hole 134 in the end face of the connecting pin 131, there is screw thread inside the blind hole 134；The knife handle 130 further include: with
The adaptable connection bolt 135 of 134 internal screw thread of blind hole.
In other embodiments of the invention, the mounting hole can also be screw hole, so the connection end surfaces of the knife handle are set
It is equipped with external screw thread, the external screw thread is mutually twisted with the screw thread in the mounting hole, to realize the knife bar and the knife handle
Connection.
It should be noted that as shown in Figure 1, the knife handle further include: be at least partly raised in the limit of the knife handle side
Position bolt 133, for being set in the limiting slot 118.
After mounting hole 117 are run through in the connecting pin of the knife handle 130, the limited bolt 133 is located at the limiting slot
In 118, so as to prevent the knife bar 110 from rotating with the knife handle 130 for axis, when improving the cutter and being processed
Technology stability, advantageously form the lines of high evenness.
Correspondingly, the present invention also provides a kind of processing methods in target as sputter face.
With reference to Fig. 6, the flow diagram of one embodiment of target as sputter method for processing surface of the present invention is shown.
The target as sputter method for processing surface comprises the following steps that
Step S100, provides target to be processed, and the target to be processed has face to be processed；
Step S200 makes the target to be processed in the plane internal rotation in the parallel face to be processed；
Step S300, provides cutter, and the cutter is the cutter of target as sputter face of the present invention processing；
Step S400 makes the cutting edge of the blade and the face to be processed while the target to be processed rotation
It is in contact and does one-way movement along the radial direction of the target rotation to be processed to be processed.
Step S100 is first carried out in conjunction with reference Fig. 1 with reference to Fig. 6, target 200 to be processed, the target to be processed are provided
200 have face 210 to be processed；Later, step S200 is executed, makes the target to be processed 210 in the parallel face 210 to be processed
Plane internal rotation.
In the present embodiment, the shape of the target 200 to be processed is cuboid.In other embodiments of the invention, it is described to
The shape of processing target may be that other adapt to sputtering technology environmental planning or irregular shape.
The face to be processed 210 of the target to be processed 200 is used to form sputter face, needs shape on the face 210 to be processed
At texture, so as to be formed by sputter face with certain roughness, to improve the performance of formed target, sputtering work is improved
Skill quality.In the present embodiment, the target 200 to be processed face 210 to be processed it is larger.Specifically, the face to be processed 210
Size is greater than 100mm × 100mm.
In the present embodiment, due to it is subsequent the face 210 to be processed is processed when, the target 200 to be processed needs
Rotation, and 210 area of face to be processed of the target to be processed 200 is larger, therefore the target to be processed 200 is to be processed
Face 210 is horizontally arranged upward, to improve the rotational stabilization of target 200 to be processed described in the process of target as sputter face, with
Craft precision is improved, the acquisition of high evenness texture is conducive to.
Rotate the target to be processed 200 so that the face to be processed 210 of the target to be processed 200 with it is described
Relative displacement occurs for cutter, to realize processing.
In the present embodiment, the target 200 to be processed is by 210 center of face to be processed and vertical described to be processed
The axis in face 210 rotates, to reduce the control difficulty of 200 rotary motion of target to be processed, can effectively improve it is described to
The stability that target 200 rotates is processed, the raising of machining accuracy is conducive to, is conducive to improve texture quality.
Specifically, the face 210 to be processed is horizontally disposed with upward in the present embodiment, so the target to be processed 200 exists
Rotation in horizontal plane.Therefore the rotation axis of the target 200 to be processed is the vertical line by 210 center of face to be processed.
In addition, being processed in the present embodiment by lathe 140, so making the target to be processed by opening lathe
200 rotate.So executing step S100, after target 200 to be processed is provided, the target 200 to be processed is fixed on
On lathe 140.
With continued reference to Fig. 6 and Fig. 1, step S300 is executed, cutter is provided, the cutter is target as sputter face of the present invention processing
Cutter.
The cutter is the cutter in target as sputter face of the present invention, so the specific technical solution of the cutter, reference are aforementioned
The embodiment of target as sputter face process tool, details are not described herein by the present invention.
In order to make the cutter realize the processing to the face 210 to be processed, the first face 111 of the cutter and cutter bar 110
Towards the face 210 to be processed.In the present embodiment, the face 210 to be processed is horizontally disposed with upward, so the knife bar of the cutter
Also it is horizontally disposed with, first face 111 is vertically downward.
In the present embodiment, processed by lathe 140, so after the step S300 offer cutter is provided, by institute
It states on Cutting tool installation manner to the lathe 140.It should be noted that in order to guarantee in process, the safety of operator, this
In embodiment, the cutter is provided executing step S300, and by after on the Cutting tool installation manner to the lathe 140, is opened
The lathe 140 is so that the target to be processed 200 rotates.
In addition, being horizontally disposed with the way of the cutter and cutter bar, additionally it is possible to make the cutting edge of 120 cutter 122 of cutter head
122a is parallel to the face to be processed 210 as far as possible, when so as to process convenient for the cutter to the face 210 to be processed
The useless discharge cut is conducive to extend cutting-tool's used life to be conducive to the progress of processing, is conducive to improve processing quality.
Later, step S400 makes the cutting edge 122a of the blade 122 while the target 200 to be processed rotation
It is in contact with the face 210 to be processed and the cutter is made to do one-way movement along the radial direction of the target rotation to be processed to carry out
Processing.
The rotation of the target to be processed 200 makes the cutter and the face to be processed that relative displacement, the blade occur
When 122 cutting edge 122a and the face 210 to be processed contact with each other, the cutting edge 122a of the blade 122 can to it is described to
Material in machined surface 210 is cut, to form continuous lines in the face 210 to be processed.
The cutter rotates radial direction along the target 200 to be processed and does one-way movement, therefore so the blade 122 and institute
Stating the motion profile mutually moved between face 210 to be processed can't intersect, so the blade 122 is described to be processed
Formed lines will not intersect on face 210, continuously and the not formation of cross cut, can effectively improve formed target
The uniformity for sputtering texture is conducive to the quality for improving formed target as sputter face texture, improves the roughness in target as sputter face,
Formed product is set to reach quality requirement.
Specifically, in carrying out process, the cutter is moved in a straight line in the present embodiment.The straight line of the cutter
Movement and the rotary motion of the target to be processed are superimposed, and the cutter forms continuous helical on the face 210 to be processed
Lines.The way for moving in a straight line the cutter can reduce the control difficulty of the tool motion, advantageously reduce technique
Difficulty improves machining accuracy, is conducive to the raising of yield, is conducive to the raising of processing quality.
Although present disclosure is as above, present invention is not limited to this.Anyone skilled in the art are not departing from this
It in the spirit and scope of invention, can make various changes or modifications, therefore protection scope of the present invention should be with claim institute
Subject to the range of restriction.
Claims (26)
1. a kind of cutter of target as sputter face processing characterized by comprising
Knife bar has the first face and the second face being oppositely arranged；
Cutter head on first face is fixed on the knife bar along one end of extending direction, and the cutter head includes: fixation
Seat, is fixedly linked with the knife bar；Blade is connected with the fixing seat, and the blade includes the cutting backwards to first face
Sword.
2. cutter as described in claim 1, which is characterized in that the quantity of the cutter head is 1.
3. cutter as described in claim 1, which is characterized in that the material of the knife bar is 45# steel.
4. cutter as described in claim 1, which is characterized in that the knife bar is quenched processing.
5. cutter as described in claim 1, which is characterized in that the hardness of the knife bar is in 255HB or more.
6. cutter as described in claim 1, which is characterized in that the cutter further include: first in first face
Fixing groove is set to the knife bar along one end of extending direction；
The cutter head is fixed in first fixing groove and the cutting edge of at least described blade protrudes from first face.
7. cutter as described in claim 1, which is characterized in that the cutter head is Boring head.
8. cutter as claimed in claim 1 or 7, which is characterized in that the fixing seat include: for the knife bar stationary phase
Fixed part even；It is raised in the operation portion on the fixed part surface, along the vertical knife bar extending direction, the operation portion setting
In the fixed part close to the side at the knife bar center；
The blade is connected with the operation portion.
9. cutter as claimed in claim 8, which is characterized in that along the knife bar extending direction, the blade is located at described solid
The one end of the operation portion of reservation far from the knife bar center.
10. cutter as claimed in claim 8, which is characterized in that there are multiple first fixation holes, along vertical institute on the knife bar
The direction that the first face refers to is stated, first fixation hole at least runs through the segment thickness of the knife bar；
There are multiple first connecting holes, first connecting hole runs through the fixed part on the fixed part of the fixing seat；
The cutter head further include: multiple first connectors are located in first connecting hole and first fixation hole, for connecting
Connect first fixation hole and first connecting hole.
11. cutter as claimed in claim 10, which is characterized in that first fixation hole is screw hole, first connector
For bolt.
12. cutter as claimed in claim 10, which is characterized in that first fixation hole is through-hole, first connector
Including bolt and nut.
13. cutter as claimed in claim 6, which is characterized in that the cutter further include: second in first face
Fixing groove is set to the knife bar along the other end of extending direction, is oppositely arranged with first fixing groove.
14. cutter as claimed in claim 13, which is characterized in that the cutter further include: counterweight is fixed on described second
In fixing groove.
15. cutter as claimed in claim 13, which is characterized in that the second fixing groove bottom has multiple second fixation holes, edge
The direction that vertical first face refers to, second fixation hole at least run through the segment thickness of the knife bar.
16. cutter as described in claim 1, which is characterized in that the blade nose radius is within the scope of 0.8mm.
17. cutter as described in claim 1, which is characterized in that the cutter further include: knife handle is connected with the knife bar.
18. cutter as claimed in claim 17, which is characterized in that the knife bar center has mounting hole, the installation
The segment thickness of the knife bar is at least run through in hole along the direction in vertical second face；
The knife handle has the connecting pin being connected with the knife bar and the installation end opposite with the connecting pin, the company of the knife handle
End is connect to be located in the mounting hole.
19. cutter as claimed in claim 18, which is characterized in that the mounting hole is screw hole, the connecting pin table of the knife handle
Face is provided with the external screw thread being adapted with the mounting hole internal screw thread.
20. cutter as claimed in claim 18, which is characterized in that the mounting hole is through-hole；In the end face of the connecting pin
With blind hole, there is screw thread inside the blind hole；The knife handle further include: the connection spiral shell being adapted with the blind hole internal thread
Bolt.
21. cutter as claimed in claim 20, which is characterized in that have limiting slot, the limit in the second face of the knife bar
Slot parallel knife bar extending direction in second face in position is arranged and runs through the mounting hole；
The knife handle further include: the limited bolt of the knife handle side is at least partly raised in, for being set in the limiting slot.
22. a kind of processing method in target as sputter face characterized by comprising
Target to be processed is provided, the target to be processed has face to be processed；
Make the target to be processed in the plane internal rotation in the parallel face to be processed；
Cutter is provided, the cutter is as described in claim 1 to claim 21 any one claim；
While the target to be processed rotation, so that the cutting edge of the blade is in contact with the face to be processed and make described
Cutter does one-way movement along the radial direction of the target rotation to be processed.
23. processing method as claimed in claim 22, which is characterized in that described to be processed horizontally disposed up；
The target to be processed rotates in the horizontal plane；The knife bar of the cutter is horizontally disposed.
24. processing method as claimed in claim 22, which is characterized in that the target to be processed is to pass through the face to be processed
The axis rotation at center and the vertical face to be processed.
25. processing method as claimed in claim 22, which is characterized in that the size in the face to be processed be greater than 100mm ×
100mm。
26. processing method as claimed in claim 22, which is characterized in that during being processed, the cutter is done directly
Line movement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710580563.6A CN109261998B (en) | 2017-07-17 | 2017-07-17 | Cutter and machining method for machining sputtering surface of target material |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710580563.6A CN109261998B (en) | 2017-07-17 | 2017-07-17 | Cutter and machining method for machining sputtering surface of target material |
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| CN109261998A true CN109261998A (en) | 2019-01-25 |
| CN109261998B CN109261998B (en) | 2021-04-02 |
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| CN201710580563.6A Active CN109261998B (en) | 2017-07-17 | 2017-07-17 | Cutter and machining method for machining sputtering surface of target material |
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| CN111687440A (en) * | 2020-04-30 | 2020-09-22 | 武汉船用机械有限责任公司 | Machining tool for centrifugal pump shell |
| CN112091251A (en) * | 2020-09-11 | 2020-12-18 | 合肥江丰电子材料有限公司 | Machining tool for integrally forming R angle and peripheral surface of target and machining method adopting machining tool |
| CN114799944A (en) * | 2022-03-04 | 2022-07-29 | 宜昌船舶柴油机有限公司 | Cutter assembly and method for machining plane water lines |
| CN116900343A (en) * | 2023-08-22 | 2023-10-20 | 吴忠仪表有限责任公司 | Reducing water line processing cutter |
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| CN116900343A (en) * | 2023-08-22 | 2023-10-20 | 吴忠仪表有限责任公司 | Reducing water line processing cutter |
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| CN109261998B (en) | 2021-04-02 |
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