CN107790745A - The processing method of target - Google Patents
The processing method of target Download PDFInfo
- Publication number
- CN107790745A CN107790745A CN201610808285.0A CN201610808285A CN107790745A CN 107790745 A CN107790745 A CN 107790745A CN 201610808285 A CN201610808285 A CN 201610808285A CN 107790745 A CN107790745 A CN 107790745A
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- China
- Prior art keywords
- face
- processing
- cutter
- blade
- processed
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B5/00—Turning-machines or devices specially adapted for particular work; Accessories specially adapted therefor
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Milling Processes (AREA)
Abstract
A kind of processing method of target, including：Target is provided, the target has face to be processed；Cutter is provided, the cutter includes blade, on the blade there is row to cut groove；The cutter is used to carry out turnery processing to the face to be processed to form sputter face, caused useless cut is cut groove by the row on the blade and discharged in turning process.In the turning process of technical solution of the present invention, caused useless cut can cut groove discharge by the row on the blade, therefore caused heat can dissipate in time in turning process, be advantageous to improve the heat-sinking capability for using cutter, heat accumulation is reduced, the temperature of cutter in turning process is advantageously reduced, advantageously reduces blade abrasion, so as to reduce the number for changing cutter, be advantageous to improve processing efficiency.In addition, in the process of target as sputter face, the reduction of cutter changing number can also reduce change after cutter to knife number, so as to be also beneficial to improve process efficiency.
Description
Technical field
The present invention relates to target manufacturing field, more particularly to a kind of processing method of target.
Background technology
Magnetron sputtering is that one kind utilizes charged particle bombardment target, makes target atom from surface spilling and uniform deposition is in base
Coating process on piece.Magnetron sputtering has that sputtering raste is high, substrate temperature is low, adhesion is good and excellent between substrate and film layer
The advantages such as membrane uniformity.Magnetron sputtering technique has been widely used in integrated circuit, information storing device, liquid crystal display
In the manufacturing process of the electronics such as screen, laser memory, electronic control device and information industry.
With electronic industry high speed development, in ic manufacturing process, chip substrate size improves constantly, and electronics
Device size constantly reduces, and integrated circuit electronic device integration improves therewith, technique of the manufacturing technology to magnetron sputtering technique
It is required that more and more stricter.
The quality of target is one of key factor for influenceing magnetron sputtering film quality used in magnetron sputtering process.Institute
To be higher than the quality requirement of traditional material industry for the quality requirement of sputtering target material.The run-of-the-mill requirement of sputtering target material is main
Including for size, flatness, purity, component content, density, the requirement of crystallite dimension and powder injection molding etc.；In addition,
Surface roughness, resistance value, even grain size, composition and structural homogenity, foreign matter (oxide) content and size, magnetic conduction
Rate, VHD and ultra-fine grain etc., sputtering target material have higher quality requirement or special quality requirement.And
With the development of technology, target as sputter face is only no longer planar structure, also been developed the target that sputter face offers V-groove
Material.
But existing machinery process technology has the target processing efficiency of V-groove relatively low for sputter face.
The content of the invention
The present invention solves the problems, such as to be to provide a kind of processing method of target have the target of V-groove to improve sputter face
Processing efficiency.
To solve the above problems, the present invention provides a kind of processing method of target, including：
Target is provided, the target has face to be processed；Cutter is provided, the cutter includes blade, had on the blade
There is row to cut groove；The cutter is used to carry out turnery processing to the face to be processed to form sputter face, produced by turning process
It is useless cut by the row on the blade cut groove discharge.
Optionally, there is provided in the step of cutter, the blade has rake face, and the row cuts groove and is located at the rake face
On；In the step of turnery processing being carried out using the cutter to the face to be processed, the part rake face and the target
Material is in contact to carry out turnery processing.
Optionally, there is provided in the step of blade, the rake face assumes diamond in shape, side the cutting for the blade of the rake face
Sword is cut, the row cuts the parallel cutting edge of groove and set；The step of turnery processing is carried out to the face to be processed using the cutter
Suddenly include, turnery processing is carried out to the face to be processed by the cutting edge.
Optionally, there is provided in the step of cutter, the material of the blade is H210T alloys.
Optionally, there is provided in the step of cutter, the cutter also includes being used for the knife bar for fixing the blade；Described in offer
Include to the step of cutter：The blade is fixed on the knife bar.
Optionally, the step of carrying out turnery processing to the face to be processed using cutter includes：The face to be processed is entered
The rough turn processing of row, to form roughing face；Finishing processing is carried out to the roughing face, to form sputter face.
Optionally, the step of rough turn processing and the step of the finishing processing in one or two step include：
It is processed using Digit Control Machine Tool.
Optionally, in the step of rough turn processing, the rotating speed of the Digit Control Machine Tool is at 450 revs/min to 550 revs/min
In the range of clock, the amount of feeding 0.27 mm/min to 0.33 millimeter/turn in the range of, bite is at 0.45 millimeter to 0.55 millimeter
In the range of.
Optionally, in the finishing processing step, the rotating speed of the Digit Control Machine Tool is at 720 revs/min to 880 revs/min
In the range of, the amount of feeding 0.135 mm/min to 0.165 millimeter/turn in the range of, bite is at 0.09 millimeter to 0.11 millimeter
In the range of.
Optionally, in the step of rough turn processing, on the direction in the vertical face to be processed, the rough turn processing it is remaining
Amount is in the range of 0.45 millimeter to 0.55 millimeter.
Optionally, in the step of rough turn processing, on the direction of the parallel facial plane to be processed, the rough turn processing
Surplus in the range of 0.45 millimeter to 0.55 millimeter.
Optionally, using the cutter face to be processed is machined the step of in, the blade with
The contact position addition cooling agent in the face to be processed.
Optionally, in the step of cooling agent is added in the contact position in the blade Yu the face to be processed, the cooling agent
To include the aqueous solution of 3380 emulsifying agents.
Optionally, there is provided in the step of target, the material of the target is copper.
Optionally, the step of carrying out turnery processing includes：Turnery processing is carried out to the face to be processed using the cutter,
V-type groove is formed on the face to be processed, to form sputter face.
Compared with prior art, technical scheme has advantages below：
In technical solution of the present invention, turning is carried out to the face to be processed of the target using the blade that groove is cut with row and added
Work, so as to form sputter face；Caused useless cut cuts groove discharge by the row on the blade in Tutrning Process.Turning
Cheng Zhong, caused useless cut can cut groove discharge by the row on the blade, therefore caused heat energy in turning process
Enough dissipation in time, is advantageous to improve the heat-sinking capability for using blade, reduces heat accumulation, advantageously reduces knife in turning process
The temperature of piece, advantageously reduces blade abrasion, so as to reduce the number for changing cutter, is advantageous to improve processing efficiency.In addition,
In the process of target as sputter face, the reduction of cutter changing number can also reduce change after cutter to knife number, from
And it is also beneficial to improve process efficiency.
In alternative of the present invention, the cutter includes blade and the knife bar for fixing blade forms, so working as knife
When pad wear needs to change, it is only necessary to more allowing blade replacement, without mobile knife bar, therefore advantageously reduce after more allowing blade replacement to the difficulty of knife
Degree, reduces the time to knife, improves processing efficiency.
Brief description of the drawings
Fig. 1 is the cross-sectional view that a kind of sputter face has V-groove target；
Fig. 2 is the structural representation of target processing method shown in Fig. 1；
Fig. 3 is the schematic flow sheet of the embodiment of target processing method one of the present invention；
Fig. 4 to Fig. 6 is the structural representation corresponding to each step of embodiment illustrated in fig. 3；
Fig. 7 is the schematic flow sheet of step S300 in embodiment illustrated in fig. 3.
Embodiment
From background technology, there is the problem of processing efficiency is low in target processing method of the prior art.In conjunction with existing
There is the reason for there is sputter face the process of the target of V-shaped groove to analyze to its processing efficiency low problem in technology：
With reference to figure 1, show that a kind of sputter face has the cross-sectional view of V-groove target.
As shown in figure 1, the target 10 has sputter face 11, multiple V-grooves 12 are offered in the sputter face 11；It is described
There are V-groove 12 two side wall 12a being oppositely arranged, two side wall 12a to be connected in the V-groove bottom, form " V " shape.
With reference to the structural representation for reference to figure 2, showing target processing method shown in Fig. 1.
In the target shown in manuscript 1, the V-groove 12 in the sputter face 11 is formed by turning process.Specifically,
As shown in Fig. 2 the V-shaped groove 12 carries out turnery processing by using cutter 20 to the face 11a to be processed of the target 10, in institute
State and form V-groove on face 11a to be processed, so as to form sputter face.
During turning process is carried out, the cutter 20 is the cutter formed using wire cutting, including with it is described
The blade 21 that face 11a to be processed is in contact and the knife bar 22 for fixing the blade 21.
Because the cutter 20 is formed by wire cutting technology, therefore the surface of the blade 21 is plane.Institute
So that in turning process is carried out, caused useless cut can accumulate in the blade 21 and the face 11a to be processed contact position, nothing
Method is smoothly discharged.
The useless accumulation cut can influence the radiating rate of cutter 20 and target 10 in turning process, so as to cause the blade 21
Raised with the temperature of the face 11a to be processed.The rise of the temperature of blade 21 can influence the anti-wear performance of blade 21, or even meeting
Blade 21 is caused to melt, so as to shorten the service life of the blade 21.Therefore carried out using the cutter 20 in turning process,
Need frequently to change cutter, have impact on processing efficiency.
To solve the technical problem, the present invention provides a kind of processing method of target, including：
Target is provided, the target has face to be processed；Cutter is provided, the cutter includes blade, had on the blade
There is row to cut groove；The cutter is used to carry out turnery processing to the face to be processed to form sputter face, produced by turning process
It is useless cut by the row on the blade cut groove discharge.
In technical solution of the present invention, turning is carried out to the face to be processed of the target using the blade that groove is cut with row and added
Work, so as to form sputter face；Caused useless cut cuts groove discharge by the row on the blade in Tutrning Process.Turning
Cheng Zhong, caused useless cut can cut groove discharge by the row on the blade, therefore caused heat energy in turning process
Enough dissipation in time, is advantageous to improve the heat-sinking capability for using cutter, reduces heat accumulation, advantageously reduces knife in turning process
The temperature of tool, advantageously reduces blade abrasion, so as to reduce the number for changing cutter, is advantageous to improve processing efficiency.In addition,
In the process of target as sputter face, the reduction of cutter changing number can also reduce change after cutter to knife number, from
And it is also beneficial to improve process efficiency.
It is understandable to enable the above objects, features and advantages of the present invention to become apparent, below in conjunction with the accompanying drawings to the present invention
Specific embodiment be described in detail.
With reference to figure 3, the schematic flow sheet of the embodiment of target processing method one of the present invention is shown.
With reference to reference to figure 4 to Fig. 6, the structural representation corresponding to each step of target processing method shown in Fig. 3 is shown.
With reference to figure 3, with reference to reference to figure 4, step S100 is performed, there is provided target 100, the target 100 have face to be processed
110。
The face to be processed 110 of the target 100 is used to provide artistic face for follow-up turnery processing.In the present embodiment,
Groove is formed on the face 110 to be processed subsequently through turnery processing, so as to form the sputter face of the target 110.
In the present embodiment, the material of the target 100 is copper, and purity is more than or equal to 99.99%.Due to the target
The purity of 100 materials is higher, and the ductility of copper is preferable.Therefore in subsequent turning process, it is caused it is useless cut for
Continuous give up is cut, easily accumulation.
As shown in figure 4, the target 100 is shaped as cylinder, so the bottom surface of the target 100 is circle.It is described
Face 110 to be processed is the bottom surface of the target 100, therefore the face to be processed 110 is circle.
With reference to figure 3, with reference to reference to figure 5, step S200 is performed, there is provided cutter 200, the cutter 200 include blade 210,
On the blade 210 there is row to cut groove 211.
The cutter 200 is used for progress turnery processing (as shown in Figure 4) to the face 110 to be processed, on the blade 210
Row cut groove 211 and be used to discharge useless cut in follow-up turning process.
As shown in figure 5, the blade 210 has rake face 210a, the row cuts groove 211 and is located at the rake face 210a
On.Groove 211 is cut by the row of being provided with the rake face 210a.
The rake face 210a refers to directly act on the metal level being cut, and controls caused useless in working angles
Cut the knife face along its discharge.So the way of groove 211 is cut by the row of setting on the rake face 210a, it is possible to increase useless to cut discharge
Efficiency, be advantageous to improve the heat-sinking capability of the blade 210, improve the wearability of the blade 210, be advantageous to improve production effect
Rate.
In the present embodiment, as shown in figure 5, the rake face 210a assumes diamond in shape, the side of the rake face 210a is the knife
The cutting edge 210b of piece 210.The row cuts groove 211 and set parallel to the cutting edge 210b.
The cutting edge 210b is used to shear the target material, to realize turning.So the row cuts groove 211
Parallel to the setting of the cutting edge 210b, useless cut can be made to cut groove 211 along the row when being formed and discharge, so as to
Be advantageous to improve the useless efficiency for cutting discharge.
The material of the blade 210 is H210T alloys.Compared with the blade formed using white steel, H210T alloys it is hard
Degree is bigger, and wearability is more preferable, is advantageous to extend the service life of the blade 210, reduces and changes number, improves processing efficiency.
Specifically, the blade 210 is the blade of VCGT160404FN-25P types.
It should be noted that in the present embodiment, the cutter 200 also includes being used for the knife bar 220 for fixing blade 210.Cause
The step of this offer described cutter 200, includes：The blade 210 is fixed on the knife bar 220.Therefore ground in blade 210
When damage needs to change, it is only necessary to more allowing blade replacement 210, without more changing knife rod 220.So after the replacing of blade 210, Neng Gouyou
The reduction of effect is shortened to the knife time to the technology difficulty of knife, improves process efficiency.Specifically, in the present embodiment, the knife bar
220 be the knife bar of SVVBN2525M16 types.
With reference to figure 3, with reference to reference to figure 6, step S300 is performed, the face 110 to be processed is carried out using the cutter 200
Turnery processing is to form sputter face, and caused useless cut cuts (such as Fig. 5 of groove 211 by the row on the blade 210 in turning process
It is shown) discharge.
The step of turnery processing, is used to be processed to form sputter face the face 110 to be processed.
In the present embodiment, carry out turnery processing the step of include, the face 110 to be processed is entered using the cutter 200
Row turnery processing, V-type groove (with reference to reference to figure 1) is formed on the face 110 to be processed, so as to form sputter face.Namely
Say, it is formed with V-type groove, i.e., described recessed in the section of perpendicular grooves bearing of trend in the sputter face after turnery processing
Groove is shaped as V-arrangement.
Specifically, in the step of carrying out turnery processing to the face 110 to be processed using the cutter 200, described in part
Rake face 210a (as shown in Figure 5) is in contact with the material of the target to carry out turnery processing.In the present embodiment, the preceding knife
Face 210a tip (part shown in such as in Fig. 5 centre circles 210c) is in contact with the material of the target, so that turning process
In it is caused it is useless cut to give up along on the rake face 210a cut groove discharge.
In addition, the step of carrying out turnery processing to the face 110 to be processed using the cutter 200 includes, by described
Cutting edge 210b carries out turnery processing to the face 110 to be processed.Specifically, the cutting edge 210b is to the target material that is contacted
Material is cut, so that part target material separates, so as to realize that turning is handled.
With reference to figure 7, the schematic flow sheet of step S300 in Fig. 3 is shown.
Specifically, the step of carrying out turnery processing to the face to be processed using cutter includes：Rough turn processing and smart car add
Two steps of work.It should be noted that one or two in the step of the step of rough turn processing and finishing processing
Step includes：It is processed using Digit Control Machine Tool, to improve craft precision, improves processing efficiency.So providing target and knife
After tool, by the target and tool assembly to the Digit Control Machine Tool to carry out turnery processing.
It should be noted that heat caused by turnery processing can cause the face to be processed and the blade temperature liter
Height, the service life of blade can be shortened, target face atomic arrangement structure to be processed can be influenceed so as to influence target quality, so being
The further temperature for reducing blade and face to be processed, in the step being machined using the cutter to the face to be processed
In rapid, cooling agent is added in the contact position in the blade Yu the face to be processed.Specifically, the cooling agent is to include 3380
The aqueous solution of emulsifying agent.
As shown in fig. 7, the step of carrying out turnery processing to the face to be processed using cutter includes：
Step S310 is performed, rough turn processing is carried out to the face to be processed, to form roughing face.
It is described it is rough turn be processed as forming the groove close to design requirement, so as to for follow-up finishing processing provide technique table
Face.
In the present embodiment, the rough turn procedure of processing is carried out by Digit Control Machine Tool.So by the target and the cutter
After being assembled to Digit Control Machine Tool, the Digit Control Machine Tool can control the axis of the target along the vertical face to be processed to do to rotate.
Specifically, the setting of the shape and size of the groove and the Digit Control Machine Tool technological parameter is determined to described
Face to be processed carries out the efficiency of rough turn processing.So during rough turn processing is carried out, according to the shape and chi of the groove
Requirement very little and to yield, set the technological parameter of the Digit Control Machine Tool.
So the rotating speed of the Digit Control Machine Tool, in the range of 450 revs/min to 550 revs/min, the amount of feeding is in 0.27 milli
For rice/going to 0.33 millimeter/in the range of turning, bite is in the range of 0.45 millimeter to 0.55 millimeter.
In rough turn process, if the rotating speed of Digit Control Machine Tool is too fast, the blade and the face to be processed during turning
Temperature can rise therewith, the service life of blade can be influenceed, can also influence the quality of target；If the rotating speed mistake of Digit Control Machine Tool
Slowly, then processing efficiency can be influenceed, reduces yield.
In the present embodiment, the amount of feeding refers to the rotation with target, and the cutter and the target are in direction of feed
On relative displacement.Specifically, the direction of feed is the radial direction along the face to be processed.In rough turn process,
If the amount of feeding is too small, the efficiency of the rough turn processing can be influenceed, reduces yield；If the amount of feeding is too big,
Machining accuracy declines therewith, can influence the yields of formed target.
The bite refers on the vertical face direction to be processed, displacement of the cutter towards the target.Thick
During Vehicle Processing, if the bite is too small, turnery processing efficiency can be reduced, influences yield；If the bite
Excessive, then the power that blade is subject to is larger, easily causes blade damage, shortens blade service life.
It should be noted that the step of rough turn processing is in order to which follow-up finishing processing provides artistic face.So
, it is necessary to leave surplus for follow-up finishing processing after rough turn processing.Specifically, in the step of rough turn processing, hanging down
On the direction in the straight face to be processed, the surplus of the rough turn processing is in the range of 0.45 millimeter to 0.55 millimeter；In parallel institute
On the direction for stating facial plane to be processed, the surplus of the rough turn processing is in the range of 0.45 millimeter to 0.55 millimeter.
Because in the present embodiment, the rough turn processing is carried out by Digit Control Machine Tool, so Digit Control Machine Tool progress is rough turn
During processing, in the range of 0.45 millimeter to 0.55 millimeter, the surplus (W) in Z-direction exists the surplus (U) in X-direction
In the range of 0.45 millimeter to 0.55 millimeter.
Afterwards, step S320 is performed, finishing processing is carried out to the roughing face, to form sputter face.
The finishing processing be used for the roughing face carry out retrofit, with improve formation groove precision, carry
Height forms the quality of target.
In the present embodiment, the finishing processing step is also to be carried out by Digit Control Machine Tool.So in finishing processing process
In, the target can also be done along the axis in the vertical face to be processed to be rotated.
Specifically, the setting of the surplus and the Digit Control Machine Tool technological parameter in the rough turn process is determined to institute
State the efficiency of finishing processing.Specifically, during finishing processing is carried out, the rotating speed of the Digit Control Machine Tool is at 720 revs/min
To in the range of 880 revs/min, the amount of feeding is at 0.135 millimeter/going to 0.165 millimeter/, and in the range of turning, bite is at 0.09 millimeter
To in the range of 0.11 millimeter.
If the rotating speed of Digit Control Machine Tool is too fast, the temperature in blade described in turning process and the face to be processed can rise therewith
Height, the service life of the blade can be shortened；If the rotating speed of Digit Control Machine Tool is too slow, processing efficiency can be influenceed, reduces yield.
If the amount of feeding is too big, the precision of finishing processing can be influenceed, causes the reduction of target yields；If the amount of feeding
It is too small, then finishing processing efficiency can be influenceed, reduces yield.If bite is too big, it is likely that the precision of finishing processing is made
Into influence, blade can also be caused to damage, influence the service life of blade；If bite is too small, processing efficiency can be influenceed.
It should be noted that because target is higher to the requirement of target constituent mass using process, but to the target
Face to be processed be machined during, the surface of the target may be oxidized to form oxide.So to institute
State after face to be processed carries out the step of machining forms sputter face, the processing method also includes：To the target material surface
It is processed by shot blasting, to remove oxide.
The polishing is that all surface of the target is processed by shot blasting.In the present embodiment, at the polishing
Reason is carried out by using 800# scouring pad.
To sum up, in technical solution of the present invention, driving is entered to the face to be processed of the target using the blade that groove is cut with row
Processing is cut, so as to form sputter face；Caused useless cut cuts groove discharge by the row on the blade in Tutrning Process.Car
During cutting, caused useless cut can cut groove discharge by the row on the blade, therefore caused heat in turning process
Amount can dissipate in time, be advantageous to improve the heat-sinking capability for using blade, reduce heat accumulation, advantageously reduce turning process
The temperature of middle blade, advantageously reduces blade abrasion, so as to reduce the number for changing cutter, is advantageous to improve processing efficiency.
In addition, in the process of target as sputter face, the reduction of cutter changing number can also reduce change after cutter to knife
Number, so as to be also beneficial to improve process efficiency.And in alternative of the present invention, the cutter includes blade and for fixing
The knife bar composition of blade, so when blade abrasion needs to change, it is only necessary to more allowing blade replacement, without mobile knife bar, therefore be advantageous to
To the difficulty of knife after reduction more allowing blade replacement, the time to knife is reduced, improves processing efficiency.
Although present disclosure is as above, the present invention is not limited to this.Any those skilled in the art, this is not being departed from
In the spirit and scope of invention, it can make various changes or modifications, therefore protection scope of the present invention should be with claim institute
The scope of restriction is defined.
Claims (15)
- A kind of 1. processing method of target, it is characterised in that including：Target is provided, the target has face to be processed；Cutter is provided, the cutter includes blade, on the blade there is row to cut groove；The cutter is used to carry out turnery processing to the face to be processed to form sputter face, it is caused in turning process useless to cut Groove is cut by the row on the blade to discharge.
- 2. processing method as claimed in claim 1, it is characterised in that in the step of providing cutter, the blade has preceding knife Face, the row cut groove and are located on the rake face；In the step of turnery processing being carried out using the cutter to the face to be processed, the part rake face and the target Material is in contact to carry out turnery processing.
- 3. processing method as claimed in claim 2, it is characterised in that in the step of providing blade, the rake face assumes diamond in shape, The side of the rake face is the cutting edge of the blade, and the row cuts the parallel cutting edge of groove and set；The step of carrying out turnery processing to the face to be processed using the cutter includes, by the cutting edge to described to be added Work face carries out turnery processing.
- 4. processing method as claimed in claim 1, it is characterised in that in the step of providing cutter, the material of the blade is H210T alloys.
- 5. processing method as claimed in claim 1, it is characterised in that in the step of providing cutter, the cutter also includes using In the knife bar of the fixation blade；Include described in providing to the step of cutter：The blade is fixed on the knife bar.
- 6. processing method as claimed in claim 1, it is characterised in that turnery processing is carried out to the face to be processed using cutter The step of include：Rough turn processing is carried out to the face to be processed, to form roughing face；Finishing processing is carried out to the roughing face, to form sputter face.
- 7. processing method as claimed in claim 6, it is characterised in that the step of the rough turn processing and the finishing processing One or two step in step includes：It is processed using Digit Control Machine Tool.
- 8. processing method as claimed in claim 7, it is characterised in that in the step of the rough turn processing, the Digit Control Machine Tool Rotating speed in the range of 450 revs/min to 550 revs/min, the amount of feeding 0.27 mm/min to 0.33 millimeter/turn scope Interior, bite is in the range of 0.45 millimeter to 0.55 millimeter.
- 9. processing method as claimed in claim 7, it is characterised in that in the finishing processing step, the Digit Control Machine Tool Rotating speed in the range of 720 revs/min to 880 revs/min, the amount of feeding 0.135 mm/min to 0.165 millimeter/turn scope Interior, bite is in the range of 0.09 millimeter to 0.11 millimeter.
- 10. processing method as claimed in claim 7, it is characterised in that vertical described to be added in the step of the rough turn processing On the direction in work face, the surplus of the rough turn processing is in the range of 0.45 millimeter to 0.55 millimeter.
- 11. processing method as claimed in claim 7, it is characterised in that parallel described to be added in the step of the rough turn processing On the direction of work facial plane, the surplus of the rough turn processing is in the range of 0.45 millimeter to 0.55 millimeter.
- 12. processing method as claimed in claim 1, it is characterised in that carried out using the cutter to the face to be processed In the step of machining, cooling agent is added in the contact position in the blade Yu the face to be processed.
- 13. processing method as claimed in claim 12, it is characterised in that in the contact position in the blade Yu the face to be processed In the step of adding cooling agent, the cooling agent is the aqueous solution for including 3380 emulsifying agents.
- 14. processing method as claimed in claim 1, it is characterised in that in the step of providing target, the material of the target is Copper.
- 15. processing method as claimed in claim 1, it is characterised in that the step of carrying out turnery processing includes：Using the knife Tool carries out turnery processing to the face to be processed, V-type groove is formed on the face to be processed, to form sputter face.
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| CN201610808285.0A CN107790745A (en) | 2016-09-07 | 2016-09-07 | The processing method of target |
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| CN201610808285.0A CN107790745A (en) | 2016-09-07 | 2016-09-07 | The processing method of target |
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| CN109894629A (en) * | 2019-04-12 | 2019-06-18 | 东莞市欧莱溅射靶材有限公司 | Cylindrical target increase sputtering area processing method |
| CN113042974A (en) * | 2021-02-18 | 2021-06-29 | 宁波江丰电子材料股份有限公司 | Titanium target processing method, processed titanium target and application |
| CN113579647A (en) * | 2021-07-08 | 2021-11-02 | 先导薄膜材料有限公司 | Processing method of silver rotary target material |
| CN114442573A (en) * | 2021-12-31 | 2022-05-06 | 安徽天航机电有限公司 | Efficient milling process suitable for 1J50 soft magnetic alloy magnetizer |
| CN114888535A (en) * | 2022-05-12 | 2022-08-12 | 宁波江丰电子材料股份有限公司 | Machining method for end face sealing groove of molybdenum target material |
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| CN114442573A (en) * | 2021-12-31 | 2022-05-06 | 安徽天航机电有限公司 | Efficient milling process suitable for 1J50 soft magnetic alloy magnetizer |
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Application publication date: 20180313 |