CN109256483A - Display panel and its manufacturing method - Google Patents
Display panel and its manufacturing method Download PDFInfo
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- CN109256483A CN109256483A CN201811014893.XA CN201811014893A CN109256483A CN 109256483 A CN109256483 A CN 109256483A CN 201811014893 A CN201811014893 A CN 201811014893A CN 109256483 A CN109256483 A CN 109256483A
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/844—Encapsulations
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
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- Microelectronics & Electronic Packaging (AREA)
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- Optics & Photonics (AREA)
- Manufacturing & Machinery (AREA)
- Electroluminescent Light Sources (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
This application discloses a kind of display panel, which includes: substrate;Array of light emitting cells layer, is set on substrate;First inorganic layer is set on array of light emitting cells layer and substrate;Barrier layer is set on substrate, and is set to side of first inorganic layer far from array of light emitting cells layer, and barrier layer and the first inorganic layer are spaced setting on substrate, so that barrier layer, the first inorganic layer, forming groove between substrate;Organic layer is set on the first inorganic layer, on barrier layer, on substrate of on the substrate of the groove corresponding position and barrier layer far from array of light emitting cells layer side;Second inorganic layer, is set on organic layer and substrate, and the second inorganic layer is at least partially disposed in groove.
Description
Technical field
The present invention relates to field of display technology, more particularly to a kind of display panel and its manufacturing method.
Background technique
With the development of science and technology, display panel is that all big enterprises fall over each other increasingly at necessity for people's lives
The focus of research and development.
Due to the advantages that frivolous, soft, it has been widely used in fields such as mobile phone, TV commercializations based on flexible panel, and
Gradually penetrate into the fields such as automobile, virtual reality and Healthy Lighting.However in the reliability test of flexible panel, with bending
The increase of the reduction of radius and bending number, the encapsulated layer of display device will occur to be broken or crack, and seriously affect user
Use.
Summary of the invention
The invention mainly solves the technical problem of providing a kind of display panel and its manufacturing methods, can increase display surface
The bending tolerance and moisture barrier ability of the encapsulation film layer of plate.
In order to solve the above technical problems, the technical solution that the embodiment of the present application uses is: a kind of display panel is provided,
The display panel includes: substrate;Array of light emitting cells layer, is set on substrate;First inorganic layer, is set to array of light emitting cells
On layer and substrate;Barrier layer is set on substrate, and is set to side of first inorganic layer far from array of light emitting cells layer, resistance
Barrier and the first inorganic layer are spaced setting on substrate, so that barrier layer, the first inorganic layer, forming groove between substrate;Have
Machine layer, be set on the first inorganic layer, on barrier layer, on the substrate of groove corresponding position and barrier layer is far from luminescence unit battle array
On the substrate of column layer side;Second inorganic layer, is set on organic layer and substrate, and the second inorganic layer is at least partially disposed at groove
In.
Wherein, the first inorganic layer is flushed with barrier layer backwards to the surface of substrate backwards to the surface of substrate.
Wherein, barrier layer is arranged around the first inorganic layer and array of light emitting cells layer.
Wherein, substrate includes flexible substrate and the tft array layer that is set in flexible substrate.
Wherein, organic layer is organic glue-line.
Wherein, array of light emitting cells layer is OLED light emitting unit array layer.
Wherein, barrier layer is identical as the first inorganic layer material.
Wherein, the thickness on barrier layer is equal to the thickness of array of light emitting cells layer and the first inorganic layer is located at array of light emitting cells
The sum of thickness of part on layer.
In order to solve the above technical problems, another technical solution that the embodiment of the present application uses is: providing a kind of display surface
The manufacturing method of plate, the manufacturing method include: offer substrate;Array of light emitting cells layer is formed on substrate;In luminescence unit battle array
Inorganic material layer is formed on column layer and substrate;It is located at the part on substrate to inorganic material layer to be etched to form groove, groove
The first inorganic layer and barrier layer are divided into through inorganic material layer and by inorganic material layer;On the first inorganic layer, barrier layer with
And organic layer is formed on substrate;Wherein organic layer is formed on the substrate of groove corresponding position and barrier layer is single far from shining
On the substrate of element array layer side;The second inorganic layer is formed on organic layer and substrate, wherein the second inorganic layer at least partly position
In groove.
Wherein, organic layer is organic glue-line
The embodiment of the present application includes array of light emitting cells layer by setting display panel, is set on substrate;First is inorganic
Layer, is set on array of light emitting cells layer and substrate;Barrier layer is set on substrate, and is set to the first inorganic layer far from hair
The side of light unit array layer, barrier layer and the first inorganic layer are spaced setting on substrate, so that barrier layer, first inorganic
Groove is formed between layer, substrate;Organic layer, be set on the first inorganic layer, on barrier layer, on the substrate of groove corresponding position with
And on substrate of the barrier layer far from array of light emitting cells layer side;Second inorganic layer, is set on organic layer and substrate, the second nothing
Machine layer is at least partially disposed in groove.Since barrier layer and the first inorganic layer interval are arranged, groove is formed between, it is organic
Layer a part is formed in a groove, and the second inorganic layer also has part in the grooves, so that organic layer and the first inorganic layer, second
It is mutually embedded between inorganic layer, to improve organic layer, the first inorganic layer, the adhesion strength between the second inorganic layer, avoids film layer
Between fall off, and due to organic layer, the second inorganic layer part setting in a groove so that organic layer non-display area formed bend
The structure of extension bends between the first inorganic layer and the second inorganic layer and extends, and so as to discharge folding s tress, promotes bending
Tolerance, and the path of steam invasion can be increased, improve moisture barrier ability.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the display panel of first embodiment of the invention;
Fig. 2 is the structural schematic diagram of the embodiment of the present application substrate, barrier layer, the first inorganic layer and array of light emitting cells;
Fig. 3 is the overlooking structure diagram on the embodiment of the present application barrier layer, the first inorganic layer, groove;
Fig. 4 is the flow diagram of the manufacturing method of the display panel of the embodiment of the present application.
Specific embodiment
Below in conjunction with the attached drawing in the embodiment of the present application, technical solutions in the embodiments of the present application carries out clear, complete
Site preparation description.It is understood that specific embodiment described herein is only used for explaining the application, rather than to the limit of the application
It is fixed.It also should be noted that illustrating only part relevant to the application for ease of description, in attached drawing and not all knot
Structure.Based on the embodiment in the application, obtained by those of ordinary skill in the art without making creative efforts
Every other embodiment, shall fall in the protection scope of this application.
In the description of the present application, the meaning of " plurality " is at least two, such as two, three etc., unless otherwise clearly having
The restriction of body.The directional instruction (such as up, down, left, right, before and after, top, bottom ...) of institute is only used in the embodiment of the present application
It explains in relative positional relationship, the motion conditions etc. under a certain particular pose (as shown in the picture) between each component, if the spy
When determining posture and changing, then directionality instruction also correspondingly changes correspondingly.
Term " first ", " second " in the application etc. be for distinguishing different objects, rather than it is specific suitable for describing
Sequence.In addition, term " includes " and " having " and their any deformations, it is intended that cover and non-exclusive include.Such as comprising
The process, method, system, product or equipment of a series of steps or units are not limited to listed step or unit, and
It is optionally further comprising the step of not listing or unit, or optionally further comprising for these process, methods, product or equipment
Intrinsic other step or units.
Referenced herein " embodiment " is it is meant that a particular feature, structure, or characteristic described can wrap in conjunction with the embodiments
It is contained at least one embodiment of the application.Each position in the description occur the phrase might not each mean it is identical
Embodiment, nor the independent or alternative embodiment with other embodiments mutual exclusion.Those skilled in the art explicitly and
Implicitly understand, embodiment described herein can be combined with other embodiments.
Fig. 1, Fig. 2 and Fig. 3 are please referred to, Fig. 1 is the structural schematic diagram of the display panel of the embodiment of the present application.Fig. 2
It is the structural schematic diagram of the embodiment of the present application substrate, barrier layer, the first inorganic layer and array of light emitting cells.Fig. 3 is the application
Embodiment barrier layer, the first inorganic layer, groove overlooking structure diagram.
In this example it is shown that panel includes substrate 10, array of light emitting cells layer 11, the first inorganic layer 12, barrier layer
13, organic layer 14 and the second inorganic layer 15.
Display panel can be OLED (Organic Light-Emitting Diode, Organic Light Emitting Diode) display surface
Plate.
Substrate 10 include flexible substrate 101 and be set in flexible substrate 101 TFT (Thin Film Transistor,
Thin film transistor (TFT)) array layer 102.Tft array layer 102 includes multiple array arrangements in the TFT in flexible substrate 101.
Flexible substrate 101 can be made of PI (Kapton, Polyimide Film).It should be understood that flexible substrate 101
It can be made of other flexible transparent materials.The substrate of substrate can also be using hard material such as glass substrate, plastic base etc..
The embodiment of the present application does not limit this.
Array of light emitting cells layer 11 is set on substrate 10.Array of light emitting cells layer 11 can be OLED light emitting unit array
Layer.
First inorganic layer 12 is set on array of light emitting cells layer 11 and substrate 10.
Barrier layer 13 is set on substrate 10, and is set to the first side of the inorganic layer 12 far from array of light emitting cells layer 11
Side, barrier layer 13 and the first inorganic layer 12 are spaced setting on the substrate 10, so that barrier layer 13, the first inorganic layer 12, substrate
Groove a is formed between 10.
Barrier layer 13 is set on the non-display area of display panel.Optionally, the side of substrate 10 is arranged in barrier layer 13
Edge region.For example, the distance at the edge nearest apart from substrate 10 of barrier layer 13 is between 0.1-0.5mm.
Optionally, barrier layer 13 is identical with the material of the first inorganic layer 12.Forming barrier layer 13 and the first inorganic layer 12
When, barrier layer 13 and the first inorganic layer 12 are formed in same procedure, save processing procedure, such as first in array of light emitting cells layer
11 and substrate 10 on form inorganic material layer, then to the inorganic material layer be located at the part on substrate 10 be etched to be formed it is recessed
Inorganic material layer through inorganic material layer and is divided into the first inorganic layer 12 and barrier layer 13 by slot a, groove a.
Optionally, barrier layer 13 and the first inorganic layer 12 are all made of the good inorganic material of water preventing ability, so that the first inorganic layer
12 and barrier layer 13 have preferable water oxygen barriering effect.Inorganic material can be silicon nitride (SiNx), silica (SiO2) or
Aluminium oxide (Al2O3)。
Optionally, barrier layer 13 is arranged around the first inorganic layer 12 and array of light emitting cells layer 11.In other words, barrier layer 13
It is arranged around viewing area.
Four sides of the first inorganic layer 12 and array of light emitting cells layer 11 are provided with barrier layer 13.Barrier layer 13 is in substrate 10
Upper is in close-shaped extension.This is close-shaped to be not limited to annular, rectangle, circle or ellipse etc..
It can be appreciated that in the case where barrier layer 13 is arranged around the first inorganic layer 12 and array of light emitting cells layer 11, resistance
Groove between barrier 13 and the first inorganic layer 12 is arranged also around the first inorganic layer 12 and array of light emitting cells layer 11, and formation is in
The groove of close-shaped extension.
In other embodiments, barrier layer 13 can be only arranged at the side, two sides or three sides of display area, i.e., only set
It is placed in the side, two sides or three sides of the first inorganic layer 12 and array of light emitting cells layer 11, and may not necessarily be formed in enclosed shape
The barrier layer 13 that shape extends, the embodiment of the present application does not limit this.
Organic layer 14 is set on the first inorganic layer 12, on barrier layer 13, on the substrate 10 of groove a corresponding position and hinder
On substrate 10 of the barrier 13 far from 11 side of array of light emitting cells layer.
Organic layer 14 can be organic gel layer.For example, the organic material that organic glue-line is good using flexibility, so that organic layer
14 have the function of that preferable flexible buffer, organic material can be polyvinyl alcohol, urethane acrylate polymer and polyamides
The combination of one or more of imide resin.
Second inorganic layer 15 is set on organic layer 14 and substrate 10, and the second inorganic layer 15 is at least partially disposed in groove a.
Optionally, the second inorganic layer 15 inorganic material good using water preventing ability, so that the second inorganic layer 15 has preferably
Water oxygen barriering effect.Inorganic material can be silicon nitride (SiNx), silica (SiO2) or aluminium oxide (Al2O3)。
First inorganic layer 12 is flushed with barrier layer 13 backwards to the surface of substrate 10 backwards to the surface of substrate 10.
Optionally, the thickness and the first inorganic layer 12 that the thickness on barrier layer 13 is equal to array of light emitting cells layer 11 are positioned at luminous
The sum of the thickness of part in cell array layer 11.
The embodiment of the present application is by using the first inorganic layer 12 and second spaced on display panel thickness direction
Inorganic layer 15, and organic layer 14 is filled between the first inorganic layer 12 and the second inorganic layer 15, is formed organic layer-inorganic layer and is handed over
For the structure of setting, the stress that can disperse inorganic layer increases the bending resistance of device.
The embodiment of the present application can stop the invasion of steam on the non-display area setting barrier layer 13 of substrate 10;Due to stopping
Layer 13 and the first inorganic layer 12 are spaced setting on the substrate 10, so that being formed between barrier layer 13 and the first inorganic layer 12 fluted
A, groove a, barrier layer 13, the first inorganic layer 12 form the structure that height rises and falls, and after forming organic layer 14, organic layer 14 exists
It bends and extends in the structure that height rises and falls, increase the intrusion path of steam, steam is avoided to influence OLED light-emitting device array layer
In light-emitting component performance, simultaneously because organic layer and inorganic layer are embedded each other, so that adhering between organic layer and inorganic layer
Power increase, avoid film layer by fall off;Extend since organic layer 14 is bent in non-display area, folding s tress can be discharged, improves
Bending resistance;Since barrier layer 13 and the first inorganic layer 12 are formed in same procedure, it is initially formed the inorganic of a flood
Then material layer forms groove on inorganic material layer, can save processing procedure, is realized by simple technique above-mentioned a variety of
Beneficial effect.
Referring to Fig. 4, Fig. 4 is the flow diagram of the manufacturing method of the display panel of the embodiment of the present application.
In this example it is shown that the manufacturing method of panel may comprise steps of:
Step S101: substrate is provided.
Wherein, substrate 10 includes flexible substrate 101 and TFT (the Thin Film being set in flexible substrate 101
Transistor, thin film transistor (TFT)) array layer 102.Tft array layer 102 includes multiple array arrangements in flexible substrate 101
TFT。
Step S102: array of light emitting cells layer is formed on substrate.
Wherein, array of light emitting cells layer 11 can be OLED light emitting unit array layer.OLED light emitting unit array layer includes
The OLED light emitting unit of multiple array arrangements.
Step S103: inorganic material layer is formed on array of light emitting cells layer and substrate.
Wherein, the inorganic material layer of a flood is deposited on array of light emitting cells layer 11 and substrate 10.The technique of deposition can
Think physical vapour deposition (PVD) (Physical Vapor Deposition, PVD), chemical vapor deposition (Chemical Vapor
Deposition abbreviation CVD) etc..
Step S104: being located at the part on substrate to inorganic material layer and be etched to form groove, and groove runs through inorganic material
Inorganic material layer is simultaneously divided into the first inorganic layer and barrier layer by the bed of material.
Wherein, it is located at the part on substrate 10 to inorganic material layer to be etched to form groove a, groove a runs through inorganic material
Inorganic material layer is simultaneously divided into the first inorganic layer 12 and barrier layer 13 by the bed of material
Step S105: organic layer is formed on the first inorganic layer, barrier layer and on substrate;Wherein organic layer is formed in recessed
On substrate of on the substrate of the slot corresponding position and barrier layer far from array of light emitting cells layer side.
Wherein, depositing organic 14 on the first inorganic layer 12, barrier layer 13 and on substrate 10.Organic layer 14 is in substrate
Part on 10 is specifically to be deposited on the substrate 10 of groove a corresponding position, and be deposited on barrier layer 13 far from luminescence unit
On the substrate 10 of 11 side of array layer.
Step S106: forming the second inorganic layer on organic layer and substrate, wherein the second inorganic layer be at least partially disposed at it is recessed
In slot.
Wherein, the second inorganic layer 15 is formed on organic layer 14 and substrate 10, wherein the second inorganic layer 15 at least partly position
In groove a.
The embodiment of the present application includes array of light emitting cells layer by setting display panel, is set on substrate;First is inorganic
Layer, is set on array of light emitting cells layer and substrate;Barrier layer is set on substrate, and is set to the first inorganic layer far from hair
The side of light unit array layer, barrier layer and the first inorganic layer are spaced setting on substrate, so that barrier layer, first inorganic
Groove is formed between layer, substrate;Organic layer, be set on the first inorganic layer, on barrier layer, on the substrate of groove corresponding position with
And on substrate of the barrier layer far from array of light emitting cells layer side;Second inorganic layer, is set on organic layer and substrate, the second nothing
Machine layer is at least partially disposed in groove.Since barrier layer and the first inorganic layer interval are arranged, groove is formed between, it is organic
Layer a part is formed in a groove, and the second inorganic layer also has part in the grooves, so that organic layer and the first inorganic layer, second
It is mutually embedded between inorganic layer, to improve organic layer, the first inorganic layer, the adhesion strength between the second inorganic layer, avoids film layer
Between fall off, and due to organic layer, the second inorganic layer part setting in a groove so that organic layer non-display area formed bend
The structure of extension bends between the first inorganic layer and the second inorganic layer and extends, and so as to discharge folding s tress, promotes bending
Tolerance, and the path of steam invasion can be increased, improve moisture barrier ability.
The foregoing is merely presently filed embodiments, are not intended to limit the scope of the patents of the application, all to utilize this
Equivalent structure or equivalent flow shift made by application specification and accompanying drawing content, it is relevant to be applied directly or indirectly in other
Technical field similarly includes in the scope of patent protection of the application.
Claims (10)
1. a kind of display panel, which is characterized in that the display panel includes:
Substrate;
Array of light emitting cells layer is set on the substrate;
First inorganic layer is set on the array of light emitting cells layer and the substrate;
Barrier layer is set on the substrate, and is set to side of first inorganic layer far from the array of light emitting cells layer
Side, the barrier layer and the first inorganic layer are spaced setting on the substrate, so that the barrier layer, described first inorganic
Groove is formed between layer, the substrate;
Organic layer, be set on first inorganic layer, on the barrier layer, on the substrate of the groove corresponding position with
And on the substrate of side of the barrier layer far from the array of light emitting cells layer;
Second inorganic layer is set on the organic layer and the substrate, and second inorganic layer is at least partially disposed at described recessed
In slot.
2. display panel according to claim 1, which is characterized in that first inorganic layer is backwards to the surface of the substrate
It is flushed with the barrier layer backwards to the surface of the substrate.
3. display panel according to claim 1, which is characterized in that the barrier layer surrounds first inorganic layer and institute
State the setting of array of light emitting cells layer.
4. display panel according to claim 1, which is characterized in that the substrate includes flexible substrate and is set to flexibility
Tft array layer on substrate.
5. display panel according to claim 1, which is characterized in that the organic layer is organic glue-line.
6. display panel according to claim 1, which is characterized in that the array of light emitting cells layer is OLED light emitting unit
Array layer.
7. display panel according to claim 1, which is characterized in that the barrier layer and the first inorganic layer material phase
Together.
8. display panel according to claim 1, which is characterized in that the thickness on the barrier layer is equal to the luminescence unit
The thickness of array layer and first inorganic layer are located at the sum of the thickness of part on the array of light emitting cells layer.
9. a kind of manufacturing method of display panel, which is characterized in that the manufacturing method includes:
Substrate is provided;
Array of light emitting cells layer is formed on substrate;
Inorganic material layer is formed on the array of light emitting cells layer and the substrate;
It is located at the part on the substrate to the inorganic material layer to be etched to form groove, the groove is through described inorganic
The inorganic material layer is simultaneously divided into the first inorganic layer and barrier layer by material layer;
Organic layer is formed on first inorganic layer, the barrier layer and on the substrate;Wherein the organic layer is formed
In on the substrate of the groove corresponding position and substrate of the barrier layer far from array of light emitting cells layer side
On;
Form the second inorganic layer on the organic layer and the substrate, wherein second inorganic layer be at least partially disposed at it is described
In groove.
10. manufacturing method according to claim 9, which is characterized in that the organic layer is organic glue-line.
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Cited By (4)
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CN111063820A (en) * | 2019-12-02 | 2020-04-24 | 武汉华星光电半导体显示技术有限公司 | Display device and manufacturing method thereof |
CN111129347A (en) * | 2019-12-23 | 2020-05-08 | 武汉华星光电半导体显示技术有限公司 | Display panel and manufacturing method thereof |
CN111180489A (en) * | 2019-12-31 | 2020-05-19 | 武汉天马微电子有限公司 | Display panel and display device |
CN111739415A (en) * | 2020-06-17 | 2020-10-02 | 昆山国显光电有限公司 | Display panel and display device |
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CN108346755A (en) * | 2018-02-09 | 2018-07-31 | 京东方科技集团股份有限公司 | Flexible display panels and preparation method |
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CN111739415A (en) * | 2020-06-17 | 2020-10-02 | 昆山国显光电有限公司 | Display panel and display device |
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