CN109252218A - A kind of silicon core ingot furnace with mobile lifting device - Google Patents
A kind of silicon core ingot furnace with mobile lifting device Download PDFInfo
- Publication number
- CN109252218A CN109252218A CN201811415994.8A CN201811415994A CN109252218A CN 109252218 A CN109252218 A CN 109252218A CN 201811415994 A CN201811415994 A CN 201811415994A CN 109252218 A CN109252218 A CN 109252218A
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- CN
- China
- Prior art keywords
- furnace body
- shaft
- elevating mechanism
- silicon core
- output shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 39
- 230000007246 mechanism Effects 0.000 claims abstract description 82
- 230000003028 elevating effect Effects 0.000 claims description 52
- 230000005540 biological transmission Effects 0.000 claims description 30
- 239000003638 chemical reducing agent Substances 0.000 claims description 23
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 18
- 230000008878 coupling Effects 0.000 claims description 14
- 238000010168 coupling process Methods 0.000 claims description 14
- 238000005859 coupling reaction Methods 0.000 claims description 14
- 238000009434 installation Methods 0.000 claims description 6
- 241000237858 Gastropoda Species 0.000 claims 1
- 230000008450 motivation Effects 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 10
- 238000005266 casting Methods 0.000 abstract description 9
- 238000000034 method Methods 0.000 abstract description 6
- 230000008569 process Effects 0.000 abstract description 5
- 239000000377 silicon dioxide Substances 0.000 abstract description 5
- 238000011017 operating method Methods 0.000 abstract description 3
- 230000000694 effects Effects 0.000 abstract description 2
- 235000021050 feed intake Nutrition 0.000 abstract description 2
- 239000000463 material Substances 0.000 description 5
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 5
- 229920005591 polysilicon Polymers 0.000 description 4
- 230000008859 change Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000002210 silicon-based material Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B28/00—Production of homogeneous polycrystalline material with defined structure
- C30B28/04—Production of homogeneous polycrystalline material with defined structure from liquids
- C30B28/06—Production of homogeneous polycrystalline material with defined structure from liquids by normal freezing or freezing under temperature gradient
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Silicon Compounds (AREA)
Abstract
The invention discloses a kind of silicon core ingot furnace with mobile lifting device, including bracket are fixedly installed with upper furnace body on bracket;Lower furnace body upper furnace body and lower furnace body are split type structure;Driving mechanism, driving mechanism is for driving the lower furnace body to be moved to immediately below upper furnace body and with upper furnace body from the either side of bracket.Silicon core ingot casting furnace body is as follows using the effect of driving mechanism namely lifting and moving device: in silicon core ingot furnace operation process, by going up and down and moving silicon core ingot furnace lower furnace body, facilitate and takes out the good silicon core of ingot casting and feed intake into silica crucible, simple and fast operating method is provided for operation, while improving the timeliness of operation.
Description
Technical field
The present invention relates to silicon core ingot furnaces, and in particular to a kind of silicon core ingot furnace with mobile lifting device.
Background technique
Silicon core ingot furnace is the necessary equipment that polysilicon is converted into polysilicon core technical process, and polysilicon is photovoltaic
Basic material in power generation and semicon industry.Critical support material of the polysilicon as advanced information society, is the current world
One of upper most important polycrystalline material, it is not only to develop computer and the major function material and photovoltaic of integrated circuit are sent out
Electricity utilizes the major function material of solar energy.
General silicon core ingot furnace does not all have furnace body lifting and moving device, is all certain using directly furnace body is dropped to
Furnace body cannot be removed operating platform by position, and the silicon core for be easy to causeing ingot casting good takes out difficulty, influence to put into silica crucible
Phenomena such as silicon material.
Summary of the invention
In view of the above technical problems, the present invention provides a kind of silicon core ingot furnace with mobile lifting device, in silicon core
In ingot furnace operation process, by going up and down and mobile silicon core ingot furnace lower furnace body, facilitates and take out the good silicon core of ingot casting and to stone
It feeds intake in English crucible, simple and fast operating method is provided for operation, while improving the timeliness of operation.
In order to solve the above technical problems, one technical scheme adopted by the invention is that: a kind of band has mobile lifting device
Silicon core ingot furnace, including
Bracket is fixedly installed with upper furnace body on bracket;
Lower furnace body;
Upper furnace body and lower furnace body are split type structure;
Driving mechanism, driving mechanism for drive the lower furnace body by the either side of bracket move to immediately below upper furnace body with
Furnace body cooperation.
Silicon core ingot casting furnace body is as follows using the effect of driving mechanism namely lifting and moving device: in silicon core ingot furnace operation
Cheng Zhong, by facilitating the lifting of silicon core ingot furnace lower furnace body and movement and taking out the good silicon core of ingot casting and feed intake into silica crucible,
Simple and fast operating method is provided for operation, while improving the timeliness of operation.
On the basis of above scheme, preferably, driving mechanism includes mobile mechanism, mobile mechanism includes by bracket one
The linear guide of the bracket other side is extended to outside side, and the lifting pedestal being slidably matched with the linear guide is installed in linear guide,
Elevating mechanism is installed, elevating mechanism includes screw rod, screw rod sliding block, and screw rod sliding block is fixedly connected with lower furnace body on lifting pedestal.
On the basis of above scheme, preferably, linear guide includes track base, track base upper surface is set parallel
There are guide rail, rack gear, linear guide has two, and parallel setting, and rack gear is arranged in the opposite side of two guide rails, consolidates on lifting pedestal
Surely there are motor, the output axis connection commutator of motor, commutator has input shaft, rotates synchronously and two coaxial output shafts,
Two output shafts are located at the opposite sides of commutator, and two output shafts connect transmission connection axis, transmission connection by shaft coupling
Axis connection transmission shaft, the gear of installation and rack gear cooperation on transmission shaft.
On the basis of above scheme, preferably, at least installing a bearing block, bearing on any bar transmission connection axis
Bearing is set in seat, and transmission connection axis passes through bearing and is fixedly connected with bearing inner race.
On the basis of above scheme, preferably, elevating mechanism further includes guiding mechanism, guiding mechanism includes being fixed on
Lifting guide pillar on lifting pedestal and the leader casing being arranged on lifting guide pillar, leader casing are fixedly connected with lower furnace body.
On the basis of above scheme, preferably, lifting pedestal upper surface is equipped with two column and rises on guide rail width direction
Descending mechanism, two column elevating mechanisms are symmetrical arranged, and each column elevating mechanism includes at least two elevating mechanisms.
On the basis of above scheme, preferably, the quantity of each column elevating mechanism is two, elevating mechanism includes first
Elevating mechanism, the second elevating mechanism, third elevating mechanism, the 4th elevating mechanism further include decelerating motor, the driving of decelerating motor
The input shaft of axis connection the first T-type commutator, the first T-type commutator have the first output shaft one, the first output shaft two, and first is defeated
Shaft one connects first shaft coupling one, and first shaft coupling one connects the first transmission shaft one, and the first transmission shaft one connects the second T-type and changes
To the input shaft of device, the second T-type commutator has the second output shaft one, the second output shaft two, the second output shaft one connection first
The input shaft of turbine worm reducer, the screw rod of the first elevating mechanism of output axis connection of the first turbine worm reducer, second
Output shaft two connects the input shaft of the second turbine worm reducer, and the output axis connection second of the second turbine worm reducer is gone up and down
The screw rod of mechanism;First output shaft two connects first shaft coupling two, and first shaft coupling two connects the first transmission shaft two, the first transmission
Axis two connects the input shaft of third T-type commutator, and third T-type commutator has third output shaft one, third output shaft two, third
Output shaft one connects the input shaft of third turbine worm reducer, the output axis connection third lifting of third turbine worm reducer
The screw rod of mechanism, third output shaft two connect the 4th turbine worm reducer input shaft, the 4th turbine worm reducer it is defeated
The screw rod of the 4th elevating mechanism of axis connection out.
The beneficial effects of the present invention are:
1, in silicon core ingot furnace operation process, using furnace body lifting and moving device, the simplification of operation is effectively raised, is dropped
Low labor intensity and cost thoroughly solve the silicon core that former technical operation generates and take out phenomenon difficult, that charging is difficult;
2, silicon core ingot casting furnace body lifting and moving device reduces the time for taking out silicon core and labor intensity, improves operating efficiency
Reliability;
3, silicon core ingot casting furnace body lifting and moving device drives the lifting of control lower furnace body, a motor using a motor
It drives lower furnace body to move horizontally, reduces the factors such as the mobile synchronism for damaging to people and guaranteeing lifting and movement of weight to setting
Standby influence, meanwhile, because of its less investment, convenient for promoting.
Detailed description of the invention
Fig. 1 is structural schematic diagram of the invention;
Fig. 2 is the perspective view of Fig. 1;
Fig. 3 is the structural schematic diagram of elevating mechanism and lifting pedestal;
Fig. 4 is the structural scheme of mechanism (containing bottom frame in figure) of driving mechanism;
Fig. 5 is the top view of Fig. 4;
Fig. 6 is the perspective view of Fig. 4.
Specific embodiment
It should be noted that in the absence of conflict, the feature in embodiment and embodiment in the present invention can phase
Mutually combination.
It is to be appreciated that "center", " longitudinal direction ", " transverse direction ", "upper", "lower", "front", "rear", "left", "right", " perpendicular
Directly ", the term of the orientation or positional relationship of the instructions such as "horizontal", "top", "bottom", "inner", "outside", in the description of the present invention,
Be to be based on the orientation or positional relationship shown in the drawings, be merely for convenience of description of the present invention and simplification of the description, rather than indicate or
It implies that signified device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore should not be understood as
Limitation of the present invention.In addition, term " first ", " second " etc. are used for description purposes only, it is not understood to indicate or imply
Relative importance or the quantity for implicitly indicating indicated technical characteristic.The feature of " first ", " second " etc. is defined as a result,
It can explicitly or implicitly include one or more of the features.In the description of the present invention, unless otherwise indicated, " more
It is a " it is meant that two or more.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected;It can
To be mechanical connection, it is also possible to be electrically connected;It can be directly connected, can also can be indirectly connected through an intermediary
Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood by concrete condition
Concrete meaning in the present invention.
As shown in figures 1 to 6, including
Silicon core ingot furnace with mobile lifting device, including bracket 2 are fixedly installed with upper furnace body 1 on bracket;Lower furnace body 3;On
Furnace body and lower furnace body are split type structure;Driving mechanism, driving mechanism is for driving the lower furnace body by the either side of bracket
It moves to immediately below upper furnace body and cooperates with upper furnace body, bracket includes bottom frame and top frame, and upper furnace body is fixed in top frame.
Driving mechanism includes mobile mechanism, and mobile mechanism includes being led by the straight line for extending to the bracket other side outside bracket side
Rail 4, the lifting pedestal 5 that installation is slidably matched with the linear guide in linear guide,
Elevating mechanism is installed, elevating mechanism includes screw rod 6, screw rod sliding block 7, and screw rod sliding block is fixedly connected with lower furnace on lifting pedestal
Body.
Linear guide includes track base 41, and track base upper surface is arranged parallel is equipped with guide rail 42, rack gear 43, and linear guide has
Two, and parallel setting, rack gear are arranged in the opposite side of two guide rails, motor 44, the output of motor are fixed on lifting pedestal
Axis connection commutator 441, commutator has input shaft, rotates synchronously and two coaxial output shafts, and two output shafts, which are located at, to be changed
To the opposite sides of device, two output shafts pass through the connection transmission connection axis 443 of shaft coupling 442, transmission connection axis connection transmission
Axis 444, the gear 445 of installation and rack gear cooperation on transmission shaft, commutator is T-type commutator.
One T-type commutator is combined using a motor, realizes two gear synchronous rotations, moving process of improving the standard
Consistency.
Wherein, a bearing block 446 is at least installed on any bar transmission connection axis, bearing is set in bearing block, transmission connects
Spindle passes through bearing and is fixedly connected with bearing inner race, to guarantee the intensity of transmission connection axis.
Elevating mechanism further includes guiding mechanism 8, guiding mechanism include the lifting guide pillar 81 being fixed on lifting pedestal and
Leader casing 82 on lifting guide pillar is set, leader casing is fixedly connected with lower furnace body, with guarantee lower furnace body on elevating mechanism
Assembly precision and improve elevating mechanism intensity guarantee lifting stationarity, consistency.
On guide rail width direction, lifting pedestal upper surface is equipped with two column elevating mechanisms, and two column elevating mechanisms are symmetrical arranged,
Each column elevating mechanism includes at least two elevating mechanisms.
The quantity of each column elevating mechanism is two, and elevating mechanism includes the first elevating mechanism, the second elevating mechanism, third liter
Descending mechanism, the 4th elevating mechanism further include decelerating motor 9, the input of the first T-type of driving axis connection commutator 10 of decelerating motor
Axis, the first T-type commutator have the first output shaft one, the first output shaft two, and the first output shaft one connects first shaft coupling 1,
First shaft coupling one connects the first transmission shaft 1, and the first transmission shaft one connects the input shaft of the second T-type commutator 13, the 2nd T
Type commutator has the second output shaft one, the second output shaft two, and the second output shaft one connects the first turbine worm reducer 14
Input shaft, the screw rod of the first elevating mechanism of output axis connection of the first turbine worm reducer, the second output shaft two connection second
The input shaft of turbine worm reducer 15, the screw rod of the second elevating mechanism of output axis connection of the second turbine worm reducer;The
One output shaft two connects first shaft coupling 2 16, and first shaft coupling two connects the first transmission shaft 2 17, the connection of the first transmission shaft two
The input shaft of third T-type commutator, third T-type commutator have third output shaft one, third output shaft two, third output shaft one
The input shaft of third turbine worm reducer 18 is connected, the output axis connection third elevating mechanism of third turbine worm reducer
Screw rod, third output shaft two connect the input shaft of the 4th turbine worm reducer 19, the output shaft of the 4th turbine worm reducer
Connect the screw rod of the 4th elevating mechanism.
Four elevating mechanisms, three commutators with a decelerating motor realize synchronization lifting, avoid subtracting using multiple
When speed motor drives, the asynchronous problem of lifting caused by the problems such as starting inconsistent, part motor damage because of decelerating motor.
After silicon core ingot casting, need to take out silicon core, specific practice is that now lower furnace body is lowered by elevating mechanism, is made
It obtains the intracorporal silica crucible of furnace and silicon core drops to certain position together, be moved to lower furnace body centainly by motor-driven gear
Position, facilitate take out silicon core;After taking out silicon core, need after having cleared up impurity, to be put into furnace body and the intracorporal thermal field cleaning of furnace
New silica crucible is then charged into virgin polycrystalline silicon material, and lower furnace body is moved in rack by motor driven, and elevating mechanism will
Lower furnace body rises, and is closed with upper furnace body.
In the above-described embodiments, because lower furnace body bottom be section be it is arc-shaped, for save occupied space, save the cost, can
Using as follows: lifting pedestal include first square tube 20, second square tube 21, third party tube 22, the 4th square tube 23, the 5th square tube 24,
6th square tube 25, the 7th square tube 26, eighth pipe 27, first square tube, second square tube, third party tube, the 4th square tube head and the tail are successively
It is connected to form rectangular frame structure, the 5th square tube, the 6th square tube, the 7th side are installed in the lower end surface of first square tube, third party tube
Pipe, eighth pipe, the 5th square tube, the 6th square tube, the 7th square tube, eighth pipe one end are fixedly connected with first square tube, the other end
It is fixedly connected with third party tube, the 5th square tube, the 6th square tube are to be mounted on the inside of the 4th square tube, the 7th square tube, eighth pipe
Be mounted on the inside of second square tube, second square tube, the 4th square tube upper end center at installation be used to support the arc branch of lower furnace body
Seat 28 is supportted, avoids lower furnace body from directly contacting with second square tube, the 4th square tube, leads to its deformation, influences to go up and down precision.
Lower furnace body bottom axis direction is the direction that second square tube is directed toward the 4th square tube, therefore is that section is in lower furnace body bottom
On the basis of arc-shaped, decelerating motor is fixed on the inside of third party tube or first square tube, can effectively reduce decelerating motor, lifting
The whole occupied space of pedestal, lower furnace body can drop to minimum.Meanwhile mode is moved horizontally based on rack and pinion cooperation,
It is poor that there are certain altitudes between lifting bottom plate lower end surface and track base, therefore uses and pacify in the lower end surface of first square tube, third party tube
The 5th square tube, the 6th square tube, the 7th square tube, the technical solution of eighth pipe are filled, can effectively reduce occupied space.
For those skilled in the art, technical solution documented by foregoing embodiments can still be repaired
Change or equivalent replacement of some of the technical features, it is all within the spirits and principles of the present invention, made any to repair
Change, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
Claims (7)
1. a kind of silicon core ingot furnace with mobile lifting device, including
Bracket is fixedly installed with upper furnace body on bracket;
Lower furnace body;
Upper furnace body and lower furnace body are split type structure;
Driving mechanism, driving mechanism for drive the lower furnace body by the either side of bracket move to immediately below upper furnace body with
Furnace body cooperation.
2. having the silicon core ingot furnace of mobile lifting device as described in claim 1, which is characterized in that driving mechanism includes moving
Motivation structure, mobile mechanism include the linear guide by extending to the bracket other side outside bracket side, install and are somebody's turn to do in linear guide
The lifting pedestal that linear guide is slidably matched,
Elevating mechanism is installed, elevating mechanism includes screw rod, screw rod sliding block, and screw rod sliding block is fixedly connected with lower furnace body on lifting pedestal.
3. having the silicon core ingot furnace of mobile lifting device as claimed in claim 2, which is characterized in that linear guide includes leading
Rail chair, track base upper surface is arranged parallel is equipped with guide rail, rack gear, and linear guide has two, and parallel setting, rack gear are arranged two
The opposite side of guide rail, is fixed with motor, the output axis connection commutator of motor on lifting pedestal, commutator have input shaft,
It rotates synchronously and two coaxial output shafts, two output shafts is located at the opposite sides of commutator, two output shafts pass through connection
Axis device connection transmission connection axis, be sequentially connected axis connection transmission shaft, the gear of installation and rack gear cooperation on transmission shaft.
4. having the silicon core ingot furnace of mobile lifting device as claimed in claim 3, which is characterized in that any bar transmission connection
One bearing block is at least installed on axis, bearing is set in bearing block, transmission connection axis, which passes through bearing and fixes with bearing inner race, to be connected
It connects.
5. having the silicon core ingot furnace of mobile lifting device as described in any of claims 3, which is characterized in that elevator
Structure further includes guiding mechanism, and guiding mechanism includes the lifting guide pillar being fixed on lifting pedestal and is arranged on lifting guide pillar
Leader casing, leader casing are fixedly connected with lower furnace body.
6. the silicon core ingot furnace that band as claimed in claim 5 has mobile lifting device, which is characterized in that in guide rail width side
Upwards, lifting pedestal upper surface is equipped with two column elevating mechanisms, and two column elevating mechanisms are symmetrical arranged, and each column elevating mechanism includes at least
Two elevating mechanisms.
7. having the silicon core ingot furnace of mobile lifting device as claimed in claim 6, which is characterized in that each column elevating mechanism
Quantity is two, and elevating mechanism includes the first elevating mechanism, the second elevating mechanism, third elevating mechanism, the 4th elevating mechanism, is gone back
Including decelerating motor, the input shaft of driving axis connection the first T-type commutator of decelerating motor, the first T-type commutator has first
Output shaft one, the first output shaft two, the first output shaft one connect first shaft coupling one, and first shaft coupling one connects the first transmission shaft
One, the first transmission shaft one connects the input shaft of the second T-type commutator, and the second T-type commutator has the second output shaft one, second defeated
Shaft two, the second output shaft one connect the input shaft of the first turbine worm reducer, the output shaft of the first turbine worm reducer
The screw rod of the first elevating mechanism is connected, the second output shaft two connects the input shaft of the second turbine worm reducer, the second turbine snail
The screw rod of the second elevating mechanism of output axis connection of bar speed reducer;First output shaft two connects first shaft coupling two, the first shaft coupling
Device two connects the first transmission shaft two, and the first transmission shaft two connects the input shaft of third T-type commutator, and third T-type commutator has
Third output shaft one, third output shaft two, third output shaft one connect the input shaft of third turbine worm reducer, third turbine
The screw rod of the output axis connection third elevating mechanism of worm decelerating machine, third output shaft two connect the 4th turbine worm reducer
Input shaft, the screw rod of the 4th elevating mechanism of output axis connection of the 4th turbine worm reducer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201811415994.8A CN109252218A (en) | 2018-11-26 | 2018-11-26 | A kind of silicon core ingot furnace with mobile lifting device |
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Application Number | Priority Date | Filing Date | Title |
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CN201811415994.8A CN109252218A (en) | 2018-11-26 | 2018-11-26 | A kind of silicon core ingot furnace with mobile lifting device |
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Family
ID=65042164
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CN201811415994.8A Pending CN109252218A (en) | 2018-11-26 | 2018-11-26 | A kind of silicon core ingot furnace with mobile lifting device |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113106545A (en) * | 2021-03-29 | 2021-07-13 | 浙江晶阳机电股份有限公司 | Silicon core ingot furnace equipment and using method thereof |
CN113776331A (en) * | 2021-09-16 | 2021-12-10 | 嘉兴市利富通新材料科技有限公司 | Energy-saving smelting furnace for smelting and regenerating copper bars by using copper-zinc alloy waste materials |
CN115559001A (en) * | 2022-09-06 | 2023-01-03 | 上海汉虹精密机械有限公司 | Rotatory elevating system of crucible convenient to loading and unloading material |
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US5032079A (en) * | 1988-12-29 | 1991-07-16 | Sumitomo Electric Industries, Ltd. | Furnace for producing high purity quartz glass preform |
CN102127809A (en) * | 2011-03-16 | 2011-07-20 | 常州市万阳光伏有限公司 | Polycrystalline silicon ingot furnace |
CN201962403U (en) * | 2011-01-11 | 2011-09-07 | 西安华恒新能科技有限公司 | Movable discharge polysilicon ingot furnace |
CN204918848U (en) * | 2015-07-24 | 2015-12-30 | 北京京运通科技股份有限公司 | Silicon core furnace's furnace body and silicon core furnace |
-
2018
- 2018-11-26 CN CN201811415994.8A patent/CN109252218A/en active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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US5032079A (en) * | 1988-12-29 | 1991-07-16 | Sumitomo Electric Industries, Ltd. | Furnace for producing high purity quartz glass preform |
CN201962403U (en) * | 2011-01-11 | 2011-09-07 | 西安华恒新能科技有限公司 | Movable discharge polysilicon ingot furnace |
CN102127809A (en) * | 2011-03-16 | 2011-07-20 | 常州市万阳光伏有限公司 | Polycrystalline silicon ingot furnace |
CN204918848U (en) * | 2015-07-24 | 2015-12-30 | 北京京运通科技股份有限公司 | Silicon core furnace's furnace body and silicon core furnace |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113106545A (en) * | 2021-03-29 | 2021-07-13 | 浙江晶阳机电股份有限公司 | Silicon core ingot furnace equipment and using method thereof |
CN113106545B (en) * | 2021-03-29 | 2021-12-28 | 浙江晶阳机电股份有限公司 | Silicon core ingot furnace equipment and using method thereof |
CN113776331A (en) * | 2021-09-16 | 2021-12-10 | 嘉兴市利富通新材料科技有限公司 | Energy-saving smelting furnace for smelting and regenerating copper bars by using copper-zinc alloy waste materials |
CN115559001A (en) * | 2022-09-06 | 2023-01-03 | 上海汉虹精密机械有限公司 | Rotatory elevating system of crucible convenient to loading and unloading material |
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Application publication date: 20190122 |
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