CN109252218A - A kind of silicon core ingot furnace with mobile lifting device - Google Patents

A kind of silicon core ingot furnace with mobile lifting device Download PDF

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Publication number
CN109252218A
CN109252218A CN201811415994.8A CN201811415994A CN109252218A CN 109252218 A CN109252218 A CN 109252218A CN 201811415994 A CN201811415994 A CN 201811415994A CN 109252218 A CN109252218 A CN 109252218A
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CN
China
Prior art keywords
furnace body
shaft
elevating mechanism
silicon core
output shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201811415994.8A
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Chinese (zh)
Inventor
唐凌翔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhejiang Jingyang Electromechanical Co Ltd
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Zhejiang Jingyang Electromechanical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhejiang Jingyang Electromechanical Co Ltd filed Critical Zhejiang Jingyang Electromechanical Co Ltd
Priority to CN201811415994.8A priority Critical patent/CN109252218A/en
Publication of CN109252218A publication Critical patent/CN109252218A/en
Pending legal-status Critical Current

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    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02Elements
    • C30B29/06Silicon
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B28/00Production of homogeneous polycrystalline material with defined structure
    • C30B28/04Production of homogeneous polycrystalline material with defined structure from liquids
    • C30B28/06Production of homogeneous polycrystalline material with defined structure from liquids by normal freezing or freezing under temperature gradient

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Silicon Compounds (AREA)

Abstract

The invention discloses a kind of silicon core ingot furnace with mobile lifting device, including bracket are fixedly installed with upper furnace body on bracket;Lower furnace body upper furnace body and lower furnace body are split type structure;Driving mechanism, driving mechanism is for driving the lower furnace body to be moved to immediately below upper furnace body and with upper furnace body from the either side of bracket.Silicon core ingot casting furnace body is as follows using the effect of driving mechanism namely lifting and moving device: in silicon core ingot furnace operation process, by going up and down and moving silicon core ingot furnace lower furnace body, facilitate and takes out the good silicon core of ingot casting and feed intake into silica crucible, simple and fast operating method is provided for operation, while improving the timeliness of operation.

Description

A kind of silicon core ingot furnace with mobile lifting device
Technical field
The present invention relates to silicon core ingot furnaces, and in particular to a kind of silicon core ingot furnace with mobile lifting device.
Background technique
Silicon core ingot furnace is the necessary equipment that polysilicon is converted into polysilicon core technical process, and polysilicon is photovoltaic Basic material in power generation and semicon industry.Critical support material of the polysilicon as advanced information society, is the current world One of upper most important polycrystalline material, it is not only to develop computer and the major function material and photovoltaic of integrated circuit are sent out Electricity utilizes the major function material of solar energy.
General silicon core ingot furnace does not all have furnace body lifting and moving device, is all certain using directly furnace body is dropped to Furnace body cannot be removed operating platform by position, and the silicon core for be easy to causeing ingot casting good takes out difficulty, influence to put into silica crucible Phenomena such as silicon material.
Summary of the invention
In view of the above technical problems, the present invention provides a kind of silicon core ingot furnace with mobile lifting device, in silicon core In ingot furnace operation process, by going up and down and mobile silicon core ingot furnace lower furnace body, facilitates and take out the good silicon core of ingot casting and to stone It feeds intake in English crucible, simple and fast operating method is provided for operation, while improving the timeliness of operation.
In order to solve the above technical problems, one technical scheme adopted by the invention is that: a kind of band has mobile lifting device Silicon core ingot furnace, including
Bracket is fixedly installed with upper furnace body on bracket;
Lower furnace body;
Upper furnace body and lower furnace body are split type structure;
Driving mechanism, driving mechanism for drive the lower furnace body by the either side of bracket move to immediately below upper furnace body with Furnace body cooperation.
Silicon core ingot casting furnace body is as follows using the effect of driving mechanism namely lifting and moving device: in silicon core ingot furnace operation Cheng Zhong, by facilitating the lifting of silicon core ingot furnace lower furnace body and movement and taking out the good silicon core of ingot casting and feed intake into silica crucible, Simple and fast operating method is provided for operation, while improving the timeliness of operation.
On the basis of above scheme, preferably, driving mechanism includes mobile mechanism, mobile mechanism includes by bracket one The linear guide of the bracket other side is extended to outside side, and the lifting pedestal being slidably matched with the linear guide is installed in linear guide,
Elevating mechanism is installed, elevating mechanism includes screw rod, screw rod sliding block, and screw rod sliding block is fixedly connected with lower furnace body on lifting pedestal.
On the basis of above scheme, preferably, linear guide includes track base, track base upper surface is set parallel There are guide rail, rack gear, linear guide has two, and parallel setting, and rack gear is arranged in the opposite side of two guide rails, consolidates on lifting pedestal Surely there are motor, the output axis connection commutator of motor, commutator has input shaft, rotates synchronously and two coaxial output shafts, Two output shafts are located at the opposite sides of commutator, and two output shafts connect transmission connection axis, transmission connection by shaft coupling Axis connection transmission shaft, the gear of installation and rack gear cooperation on transmission shaft.
On the basis of above scheme, preferably, at least installing a bearing block, bearing on any bar transmission connection axis Bearing is set in seat, and transmission connection axis passes through bearing and is fixedly connected with bearing inner race.
On the basis of above scheme, preferably, elevating mechanism further includes guiding mechanism, guiding mechanism includes being fixed on Lifting guide pillar on lifting pedestal and the leader casing being arranged on lifting guide pillar, leader casing are fixedly connected with lower furnace body.
On the basis of above scheme, preferably, lifting pedestal upper surface is equipped with two column and rises on guide rail width direction Descending mechanism, two column elevating mechanisms are symmetrical arranged, and each column elevating mechanism includes at least two elevating mechanisms.
On the basis of above scheme, preferably, the quantity of each column elevating mechanism is two, elevating mechanism includes first Elevating mechanism, the second elevating mechanism, third elevating mechanism, the 4th elevating mechanism further include decelerating motor, the driving of decelerating motor The input shaft of axis connection the first T-type commutator, the first T-type commutator have the first output shaft one, the first output shaft two, and first is defeated Shaft one connects first shaft coupling one, and first shaft coupling one connects the first transmission shaft one, and the first transmission shaft one connects the second T-type and changes To the input shaft of device, the second T-type commutator has the second output shaft one, the second output shaft two, the second output shaft one connection first The input shaft of turbine worm reducer, the screw rod of the first elevating mechanism of output axis connection of the first turbine worm reducer, second Output shaft two connects the input shaft of the second turbine worm reducer, and the output axis connection second of the second turbine worm reducer is gone up and down The screw rod of mechanism;First output shaft two connects first shaft coupling two, and first shaft coupling two connects the first transmission shaft two, the first transmission Axis two connects the input shaft of third T-type commutator, and third T-type commutator has third output shaft one, third output shaft two, third Output shaft one connects the input shaft of third turbine worm reducer, the output axis connection third lifting of third turbine worm reducer The screw rod of mechanism, third output shaft two connect the 4th turbine worm reducer input shaft, the 4th turbine worm reducer it is defeated The screw rod of the 4th elevating mechanism of axis connection out.
The beneficial effects of the present invention are:
1, in silicon core ingot furnace operation process, using furnace body lifting and moving device, the simplification of operation is effectively raised, is dropped Low labor intensity and cost thoroughly solve the silicon core that former technical operation generates and take out phenomenon difficult, that charging is difficult;
2, silicon core ingot casting furnace body lifting and moving device reduces the time for taking out silicon core and labor intensity, improves operating efficiency Reliability;
3, silicon core ingot casting furnace body lifting and moving device drives the lifting of control lower furnace body, a motor using a motor It drives lower furnace body to move horizontally, reduces the factors such as the mobile synchronism for damaging to people and guaranteeing lifting and movement of weight to setting Standby influence, meanwhile, because of its less investment, convenient for promoting.
Detailed description of the invention
Fig. 1 is structural schematic diagram of the invention;
Fig. 2 is the perspective view of Fig. 1;
Fig. 3 is the structural schematic diagram of elevating mechanism and lifting pedestal;
Fig. 4 is the structural scheme of mechanism (containing bottom frame in figure) of driving mechanism;
Fig. 5 is the top view of Fig. 4;
Fig. 6 is the perspective view of Fig. 4.
Specific embodiment
It should be noted that in the absence of conflict, the feature in embodiment and embodiment in the present invention can phase Mutually combination.
It is to be appreciated that "center", " longitudinal direction ", " transverse direction ", "upper", "lower", "front", "rear", "left", "right", " perpendicular Directly ", the term of the orientation or positional relationship of the instructions such as "horizontal", "top", "bottom", "inner", "outside", in the description of the present invention, Be to be based on the orientation or positional relationship shown in the drawings, be merely for convenience of description of the present invention and simplification of the description, rather than indicate or It implies that signified device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore should not be understood as Limitation of the present invention.In addition, term " first ", " second " etc. are used for description purposes only, it is not understood to indicate or imply Relative importance or the quantity for implicitly indicating indicated technical characteristic.The feature of " first ", " second " etc. is defined as a result, It can explicitly or implicitly include one or more of the features.In the description of the present invention, unless otherwise indicated, " more It is a " it is meant that two or more.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected;It can To be mechanical connection, it is also possible to be electrically connected;It can be directly connected, can also can be indirectly connected through an intermediary Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood by concrete condition Concrete meaning in the present invention.
As shown in figures 1 to 6, including
Silicon core ingot furnace with mobile lifting device, including bracket 2 are fixedly installed with upper furnace body 1 on bracket;Lower furnace body 3;On Furnace body and lower furnace body are split type structure;Driving mechanism, driving mechanism is for driving the lower furnace body by the either side of bracket It moves to immediately below upper furnace body and cooperates with upper furnace body, bracket includes bottom frame and top frame, and upper furnace body is fixed in top frame.
Driving mechanism includes mobile mechanism, and mobile mechanism includes being led by the straight line for extending to the bracket other side outside bracket side Rail 4, the lifting pedestal 5 that installation is slidably matched with the linear guide in linear guide,
Elevating mechanism is installed, elevating mechanism includes screw rod 6, screw rod sliding block 7, and screw rod sliding block is fixedly connected with lower furnace on lifting pedestal Body.
Linear guide includes track base 41, and track base upper surface is arranged parallel is equipped with guide rail 42, rack gear 43, and linear guide has Two, and parallel setting, rack gear are arranged in the opposite side of two guide rails, motor 44, the output of motor are fixed on lifting pedestal Axis connection commutator 441, commutator has input shaft, rotates synchronously and two coaxial output shafts, and two output shafts, which are located at, to be changed To the opposite sides of device, two output shafts pass through the connection transmission connection axis 443 of shaft coupling 442, transmission connection axis connection transmission Axis 444, the gear 445 of installation and rack gear cooperation on transmission shaft, commutator is T-type commutator.
One T-type commutator is combined using a motor, realizes two gear synchronous rotations, moving process of improving the standard Consistency.
Wherein, a bearing block 446 is at least installed on any bar transmission connection axis, bearing is set in bearing block, transmission connects Spindle passes through bearing and is fixedly connected with bearing inner race, to guarantee the intensity of transmission connection axis.
Elevating mechanism further includes guiding mechanism 8, guiding mechanism include the lifting guide pillar 81 being fixed on lifting pedestal and Leader casing 82 on lifting guide pillar is set, leader casing is fixedly connected with lower furnace body, with guarantee lower furnace body on elevating mechanism Assembly precision and improve elevating mechanism intensity guarantee lifting stationarity, consistency.
On guide rail width direction, lifting pedestal upper surface is equipped with two column elevating mechanisms, and two column elevating mechanisms are symmetrical arranged, Each column elevating mechanism includes at least two elevating mechanisms.
The quantity of each column elevating mechanism is two, and elevating mechanism includes the first elevating mechanism, the second elevating mechanism, third liter Descending mechanism, the 4th elevating mechanism further include decelerating motor 9, the input of the first T-type of driving axis connection commutator 10 of decelerating motor Axis, the first T-type commutator have the first output shaft one, the first output shaft two, and the first output shaft one connects first shaft coupling 1, First shaft coupling one connects the first transmission shaft 1, and the first transmission shaft one connects the input shaft of the second T-type commutator 13, the 2nd T Type commutator has the second output shaft one, the second output shaft two, and the second output shaft one connects the first turbine worm reducer 14 Input shaft, the screw rod of the first elevating mechanism of output axis connection of the first turbine worm reducer, the second output shaft two connection second The input shaft of turbine worm reducer 15, the screw rod of the second elevating mechanism of output axis connection of the second turbine worm reducer;The One output shaft two connects first shaft coupling 2 16, and first shaft coupling two connects the first transmission shaft 2 17, the connection of the first transmission shaft two The input shaft of third T-type commutator, third T-type commutator have third output shaft one, third output shaft two, third output shaft one The input shaft of third turbine worm reducer 18 is connected, the output axis connection third elevating mechanism of third turbine worm reducer Screw rod, third output shaft two connect the input shaft of the 4th turbine worm reducer 19, the output shaft of the 4th turbine worm reducer Connect the screw rod of the 4th elevating mechanism.
Four elevating mechanisms, three commutators with a decelerating motor realize synchronization lifting, avoid subtracting using multiple When speed motor drives, the asynchronous problem of lifting caused by the problems such as starting inconsistent, part motor damage because of decelerating motor.
After silicon core ingot casting, need to take out silicon core, specific practice is that now lower furnace body is lowered by elevating mechanism, is made It obtains the intracorporal silica crucible of furnace and silicon core drops to certain position together, be moved to lower furnace body centainly by motor-driven gear Position, facilitate take out silicon core;After taking out silicon core, need after having cleared up impurity, to be put into furnace body and the intracorporal thermal field cleaning of furnace New silica crucible is then charged into virgin polycrystalline silicon material, and lower furnace body is moved in rack by motor driven, and elevating mechanism will Lower furnace body rises, and is closed with upper furnace body.
In the above-described embodiments, because lower furnace body bottom be section be it is arc-shaped, for save occupied space, save the cost, can Using as follows: lifting pedestal include first square tube 20, second square tube 21, third party tube 22, the 4th square tube 23, the 5th square tube 24, 6th square tube 25, the 7th square tube 26, eighth pipe 27, first square tube, second square tube, third party tube, the 4th square tube head and the tail are successively It is connected to form rectangular frame structure, the 5th square tube, the 6th square tube, the 7th side are installed in the lower end surface of first square tube, third party tube Pipe, eighth pipe, the 5th square tube, the 6th square tube, the 7th square tube, eighth pipe one end are fixedly connected with first square tube, the other end It is fixedly connected with third party tube, the 5th square tube, the 6th square tube are to be mounted on the inside of the 4th square tube, the 7th square tube, eighth pipe Be mounted on the inside of second square tube, second square tube, the 4th square tube upper end center at installation be used to support the arc branch of lower furnace body Seat 28 is supportted, avoids lower furnace body from directly contacting with second square tube, the 4th square tube, leads to its deformation, influences to go up and down precision.
Lower furnace body bottom axis direction is the direction that second square tube is directed toward the 4th square tube, therefore is that section is in lower furnace body bottom On the basis of arc-shaped, decelerating motor is fixed on the inside of third party tube or first square tube, can effectively reduce decelerating motor, lifting The whole occupied space of pedestal, lower furnace body can drop to minimum.Meanwhile mode is moved horizontally based on rack and pinion cooperation, It is poor that there are certain altitudes between lifting bottom plate lower end surface and track base, therefore uses and pacify in the lower end surface of first square tube, third party tube The 5th square tube, the 6th square tube, the 7th square tube, the technical solution of eighth pipe are filled, can effectively reduce occupied space.
For those skilled in the art, technical solution documented by foregoing embodiments can still be repaired Change or equivalent replacement of some of the technical features, it is all within the spirits and principles of the present invention, made any to repair Change, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.

Claims (7)

1. a kind of silicon core ingot furnace with mobile lifting device, including
Bracket is fixedly installed with upper furnace body on bracket;
Lower furnace body;
Upper furnace body and lower furnace body are split type structure;
Driving mechanism, driving mechanism for drive the lower furnace body by the either side of bracket move to immediately below upper furnace body with Furnace body cooperation.
2. having the silicon core ingot furnace of mobile lifting device as described in claim 1, which is characterized in that driving mechanism includes moving Motivation structure, mobile mechanism include the linear guide by extending to the bracket other side outside bracket side, install and are somebody's turn to do in linear guide The lifting pedestal that linear guide is slidably matched,
Elevating mechanism is installed, elevating mechanism includes screw rod, screw rod sliding block, and screw rod sliding block is fixedly connected with lower furnace body on lifting pedestal.
3. having the silicon core ingot furnace of mobile lifting device as claimed in claim 2, which is characterized in that linear guide includes leading Rail chair, track base upper surface is arranged parallel is equipped with guide rail, rack gear, and linear guide has two, and parallel setting, rack gear are arranged two The opposite side of guide rail, is fixed with motor, the output axis connection commutator of motor on lifting pedestal, commutator have input shaft, It rotates synchronously and two coaxial output shafts, two output shafts is located at the opposite sides of commutator, two output shafts pass through connection Axis device connection transmission connection axis, be sequentially connected axis connection transmission shaft, the gear of installation and rack gear cooperation on transmission shaft.
4. having the silicon core ingot furnace of mobile lifting device as claimed in claim 3, which is characterized in that any bar transmission connection One bearing block is at least installed on axis, bearing is set in bearing block, transmission connection axis, which passes through bearing and fixes with bearing inner race, to be connected It connects.
5. having the silicon core ingot furnace of mobile lifting device as described in any of claims 3, which is characterized in that elevator Structure further includes guiding mechanism, and guiding mechanism includes the lifting guide pillar being fixed on lifting pedestal and is arranged on lifting guide pillar Leader casing, leader casing are fixedly connected with lower furnace body.
6. the silicon core ingot furnace that band as claimed in claim 5 has mobile lifting device, which is characterized in that in guide rail width side Upwards, lifting pedestal upper surface is equipped with two column elevating mechanisms, and two column elevating mechanisms are symmetrical arranged, and each column elevating mechanism includes at least Two elevating mechanisms.
7. having the silicon core ingot furnace of mobile lifting device as claimed in claim 6, which is characterized in that each column elevating mechanism Quantity is two, and elevating mechanism includes the first elevating mechanism, the second elevating mechanism, third elevating mechanism, the 4th elevating mechanism, is gone back Including decelerating motor, the input shaft of driving axis connection the first T-type commutator of decelerating motor, the first T-type commutator has first Output shaft one, the first output shaft two, the first output shaft one connect first shaft coupling one, and first shaft coupling one connects the first transmission shaft One, the first transmission shaft one connects the input shaft of the second T-type commutator, and the second T-type commutator has the second output shaft one, second defeated Shaft two, the second output shaft one connect the input shaft of the first turbine worm reducer, the output shaft of the first turbine worm reducer The screw rod of the first elevating mechanism is connected, the second output shaft two connects the input shaft of the second turbine worm reducer, the second turbine snail The screw rod of the second elevating mechanism of output axis connection of bar speed reducer;First output shaft two connects first shaft coupling two, the first shaft coupling Device two connects the first transmission shaft two, and the first transmission shaft two connects the input shaft of third T-type commutator, and third T-type commutator has Third output shaft one, third output shaft two, third output shaft one connect the input shaft of third turbine worm reducer, third turbine The screw rod of the output axis connection third elevating mechanism of worm decelerating machine, third output shaft two connect the 4th turbine worm reducer Input shaft, the screw rod of the 4th elevating mechanism of output axis connection of the 4th turbine worm reducer.
CN201811415994.8A 2018-11-26 2018-11-26 A kind of silicon core ingot furnace with mobile lifting device Pending CN109252218A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201811415994.8A CN109252218A (en) 2018-11-26 2018-11-26 A kind of silicon core ingot furnace with mobile lifting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201811415994.8A CN109252218A (en) 2018-11-26 2018-11-26 A kind of silicon core ingot furnace with mobile lifting device

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Publication Number Publication Date
CN109252218A true CN109252218A (en) 2019-01-22

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113106545A (en) * 2021-03-29 2021-07-13 浙江晶阳机电股份有限公司 Silicon core ingot furnace equipment and using method thereof
CN113776331A (en) * 2021-09-16 2021-12-10 嘉兴市利富通新材料科技有限公司 Energy-saving smelting furnace for smelting and regenerating copper bars by using copper-zinc alloy waste materials
CN115559001A (en) * 2022-09-06 2023-01-03 上海汉虹精密机械有限公司 Rotatory elevating system of crucible convenient to loading and unloading material

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5032079A (en) * 1988-12-29 1991-07-16 Sumitomo Electric Industries, Ltd. Furnace for producing high purity quartz glass preform
CN102127809A (en) * 2011-03-16 2011-07-20 常州市万阳光伏有限公司 Polycrystalline silicon ingot furnace
CN201962403U (en) * 2011-01-11 2011-09-07 西安华恒新能科技有限公司 Movable discharge polysilicon ingot furnace
CN204918848U (en) * 2015-07-24 2015-12-30 北京京运通科技股份有限公司 Silicon core furnace's furnace body and silicon core furnace

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5032079A (en) * 1988-12-29 1991-07-16 Sumitomo Electric Industries, Ltd. Furnace for producing high purity quartz glass preform
CN201962403U (en) * 2011-01-11 2011-09-07 西安华恒新能科技有限公司 Movable discharge polysilicon ingot furnace
CN102127809A (en) * 2011-03-16 2011-07-20 常州市万阳光伏有限公司 Polycrystalline silicon ingot furnace
CN204918848U (en) * 2015-07-24 2015-12-30 北京京运通科技股份有限公司 Silicon core furnace's furnace body and silicon core furnace

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113106545A (en) * 2021-03-29 2021-07-13 浙江晶阳机电股份有限公司 Silicon core ingot furnace equipment and using method thereof
CN113106545B (en) * 2021-03-29 2021-12-28 浙江晶阳机电股份有限公司 Silicon core ingot furnace equipment and using method thereof
CN113776331A (en) * 2021-09-16 2021-12-10 嘉兴市利富通新材料科技有限公司 Energy-saving smelting furnace for smelting and regenerating copper bars by using copper-zinc alloy waste materials
CN115559001A (en) * 2022-09-06 2023-01-03 上海汉虹精密机械有限公司 Rotatory elevating system of crucible convenient to loading and unloading material

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Application publication date: 20190122

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