CN102760674A - Push-boat movement executing device for soft-landing diffusion furnace - Google Patents
Push-boat movement executing device for soft-landing diffusion furnace Download PDFInfo
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- CN102760674A CN102760674A CN2012102367660A CN201210236766A CN102760674A CN 102760674 A CN102760674 A CN 102760674A CN 2012102367660 A CN2012102367660 A CN 2012102367660A CN 201210236766 A CN201210236766 A CN 201210236766A CN 102760674 A CN102760674 A CN 102760674A
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- horizontal
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- base plate
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention discloses a push-boat movement executing device for a soft-landing diffusion furnace mainly comprises a baseplate, a connecting plate, lifting slide blocks, a lifting guide bar, a lifting reducer, a lift, a lifting motor, horizontal guide rails, a synchronizing wheel, a synchronous belt, a horizontal motor, a horizontal reducer and other components. The whole push-boat baseplate slides vertically along the lifting guide bar, so that push boats among different pipes are in the same plane to facilitate improving the automation degree of equipment. The work and gear lift is adopted to complete lifting, so that the characteristics of smooth movement, large lifting force, compact structure and the like are achieved, and the push-boat baseplate can smoothly lift and is free from impacts. The synchronizing belt wheel and the synchronous belt are used together for horizontal movement, so that the push-boat movement executing device has the characteristics of high movement speed, low noise, light weight and the like, reduces the load of the push-boat baseplate and improved the equipment security and reliability.
Description
Technical field
The present invention relates to the visual plant field that solar cell is made, relate in particular to a kind of be used for the soft landing diffusion furnace push away boat motion final controlling element.
Background technology
Solar cell become the countries in the world common concern as reproducible eco-friendly power source and give priority to new industry, for it can be in every field uses widely, it is imperative to reduce its production cost.PN junction is the core of crystal silicon solar energy battery, and photoelectric conversion efficiency is had decisive action.The soft landing diffusion furnace is the key processing equipment of the present high quality P N knot of accomplishing scale production in the world.The soft landing diffusion furnace has that the thermal field disturbance is little, thermal field is evenly distributed, the quartz ampoule maintenance period is long, the SiC oar life-span is long, reaction tube pollutes less, automaticity high-technology characteristics, in area of solar cell, has a very wide range of applications.Pushing away the boat movement control technology is the essential distinction of soft landing diffusion furnace and traditional open pipe or stopped pipe diffusion furnace, is the automatic degree of raising equipment, the key technology that realizes equipment automatic loading and unloading boat.Soft landing pushes away the boat control technology must realize SiC oar vertical lift and horizontal movement; The boat function is put, is got in realization; Avoid the SiC oar to pollute reaction tube, prolong SiC oar useful life, realize that the SiC oar is non-maintaining etc.; Improve the operating efficiency and the utilance of equipment greatly, improve product yield, reduce production costs.
Summary of the invention
The present invention aim to provide a kind of be used for the soft landing diffusion furnace push away boat motion final controlling element; This device can accomplish connecting plate vertical with 2 directions of level on the two dimensional surface motion, conventional horizontal is sent the boat motion to expand to into oar, is descended, moves back oar (get boat move expand to into oar, rise, move back oar) three steps.After will sending boat (getting boat) motion to decompose, can realize loading the quartz boat and the disengaging of SiC oar of silicon chip, so can in technical process, the SiC oar be withdrawed from quartz ampoule and quartz boat is stayed in the quartz ampoule.
To achieve these goals, the technical scheme that the present invention adopted is:
A kind of be used for the soft landing diffusion furnace push away boat motion final controlling element, its design feature is to comprise the horizontal movement parts and move both vertically parts;
The structure of said horizontal movement parts does, comprises base plate, is contained in the horizontal guide rail on the base plate, and the connecting plate that this horizontal guide rail relatively slides is housed on this horizontal guide rail; The belt wheel mount pad is housed on the said base plate, in this belt wheel mount pad the synchronous pulley that links with a drive unit is housed, the synchronous band that is installed on the synchronous pulley is fixedly connected with said connecting plate;
The structure of the said parts that move both vertically does, comprises the supporting seat that is fixed on the frame, and the riser guide that passes supporting seat and be fixed as one with it is sleeved on the riser guide and can be along the vertical lifting slider that slides of riser guide;
Said lifting slider and said base plate are fixedly linked, and the fuselage of a said base plate and a lift is fixedly linked.
Further, said lift of the present invention is fixed on the lift support, and said lift links through a lifting decelerator and a up-down drive motors through power transmission shaft.
Said drive unit comprises the horizontal drive motor, the horizontal reductor that links to each other with the horizontal drive motor through shaft coupling; The output of said horizontal reductor and said synchronous pulley link.
According to embodiments of the invention, said lift is the worm and gear lift.
As a kind of concrete version of the connecting plate of this horizontal guide rail slip relatively is housed on the horizontal guide rail, be fixedly connected with two horizontal guide rails on the said base plate, every horizontal guide rail links to each other with said connecting plate through the cross sliding clock that is contained on the horizontal guide rail.
Said structure is all arranged, and the boat motion final controlling element that pushes away that is used for the soft landing diffusion furnace according to the invention comprises compositions such as back-up block, up-down guide post, horizontal guide rail, synchronous band, synchronous pulley, connecting plate, base plate, synchronous pulley seat, slide block, reductor, drive motors, lift, drive link, shaft coupling.
Said invention will push away boat motion and be decomposed into two motions of advancing of vertical lift and level.These two motions are guiding with guide post and slide block all, rely on motor that drive force is provided.
Pushing away boat vertical displacement movement device is made up of base plate, back-up block, up-down guide post, lifting slider, lifting decelerator, lift, lifting motor, shaft coupling, power transmission shaft, lifting support.Through lift rotatablely moving of motor is transformed into rectilinear motion, thereby accomplishes the elevating function of base plate in vertical direction.
Pushing away the boat horizontal movement device is made up of horizontal guide rail, cross sliding clock, horizontal reductor, synchronous band, synchronous pulley, belt wheel mount pad, shaft coupling, shaft coupling.Through synchronous pulley and synchronous band rotatablely moving of motor changed into the rectilinear motion of connecting plate, thereby accomplish the connecting plate motion that moves forward and backward in the horizontal direction.
Two horizontal guide rails are fixed under the base plate, and through slide block connecting plate being fixed on also can be along the horizontal guide rail horizontal slip on the horizontal guide rail.Compositions such as drive motors, synchronous pulley, synchronous band, worm-gear speed reducer push away the horicontal motion mechanism of boat.
The present invention adopts synchronous band, synchronous pulley that motor is rotatablely moved to be transformed into the horizontal movement of connecting plate.
All actuators of horizontal movement are installed on the base plate along with base plate rigid motion together, and the elevating movement of base plate is promoted to accomplish by lift.
Consistency between each parts also is a key character of the present invention.Characteristics in view of the work of soft landing diffusion furnace; Every equipment is furnished with four pipes and pushes away boat motion final controlling element; All boat motion final controlling elements that push away all move in the plane of being made up of the up-down guide post; So the automatic loading and unloading device for equipment has very important influence, guarantees the consistency between each tube apparatus.
Compared with prior art, the invention has the beneficial effects as follows:
The present invention adopts and to push away boat base plate integral body and vertically slide along the up-down guide post, guarantees pushing away boat and can in same plane, be convenient to improve automation degree of equipment between the different pipes.The present invention adopts the worm and gear lift to accomplish elevating movement, has characteristics such as motion is steady, lifting force is big, compact conformation, realizes that pushing away the boat base plate steadily goes up and down, and does not have and impacts.The motion mode of synchronous pulley+synchronous band is adopted in horizontal movement of the present invention, has characteristics such as movement velocity is fast, noise is low, light weight, reduces to push away boat base plate load, improves the fail safe and the reliability of equipment.
After the present invention will push away boat motion and decompose, the refinement more of its function, stability is greatly enhanced with reliability, and then reduces the equipment operation maintenance cost, for raising manufacture of solar cells line automation degree and production efficiency are established technical foundation.
Description of drawings
Fig. 1 is the front view of an embodiment of the present invention;
Fig. 2 is the left view of Fig. 1;
Fig. 3 is the rearview of Fig. 1.
In the drawings:
1-up-down supporting guide; The 2-supporting seat; The 3-horizontal guide rail; 4-is with synchronously;
The 5-connecting plate; 6-belt wheel mount pad; The 7-base plate; The 8-synchronous pulley;
The horizontal reductor of 9-; 10-horizontal drive motor; The 11-shaft coupling; The 12-lifting slider;
The 13-lift; 14-up-down drive motors; The 15-lifting decelerator;
The 16-power transmission shaft; 17-lift support; The 18-cross sliding clock.
Embodiment
Specify embodiments of the invention below in conjunction with accompanying drawing.Need to prove that figure number only representes the main parts size of present embodiment, other not one by one example go out.
The present invention pushes away the boat movement executing mechanism can be divided into the horizontal movement and the two parts that move both vertically.Horizontal movement part by horizontal drive motor 10, shaft coupling 11, horizontal reductor 9, belt wheel mount pad 6, synchronous pulley 8, be with 4 synchronously, base plate 7, horizontal guide rail 3, cross sliding clock 18, connecting plate 5 form.With screw horizontal guide rail 3 is fixed on the base plate 7, connecting plate 5 and horizontal guide rail 3 is coupled together, and connecting plate 5 can endwisely slip along it along horizontal guide rail 3 through cross sliding clock 18.Be fixed together with 4 junction and connecting plate 5 synchronously.Belt wheel mount pad 6 installs and fixes with base plate 7 and screw, and synchronous pulley 8 is installed in the belt wheel mount pad 6.Horizontal drive motor 10 is connected through shaft coupling 11 with horizontal reductor 9; And be connected with synchronous pulley 8 through horizontal reductor 9 output shafts; Rotatablely moving of horizontal drive motor 10 is transformed into rotatablely moving of synchronous pulley; And drive synchronously formation rectilinear motion, thereby realize the horizontal movement of connecting plate with 4.The part that moves both vertically is made up of up-down supporting guide 1, supporting seat 2, lifting slider 12, base plate 7, lift support 17, lift 13, power transmission shaft 16, lifting decelerator 15, up-down drive motors 14.Supporting seat 2 is fixed on the equipment rack, and riser guide 1 passes supporting seat 2 and is fixed into one with it.Lifting slider 12 is sleeved on the riser guide 1 and can vertically slides along riser guide 1, simultaneously lifting slider 12 is connected with base plate 7 usefulness bolt, forms an integral body, thereby realizes that base plate 7 moves both vertically along riser guide 1.Up-down drive motors 14, lifting decelerator 15, power transmission shaft 16, lift 13, lift support 17 are connected in turn according to the input and output principle, and the strong point of lift 13 drops on the equipment rack.Through deceleration device and transmission device with transmission of power behind lift 13; Lift 13 rotatablely moves the level input and is transformed into the rectilinear motion of output shaft; Because lift 13 fuselages and base plate link into an integrated entity, so after the support end of lift 13 was fixed, fuselage drove base plate 7 and accomplishes elevating movements.
The horizontal movement device of this invention and vertical movement device are two to overlap independently controlling organization, form an entity through base plate 7, have good function interlocking and relative independence, improve the reliability of equipment.
The above is merely embodiments of the invention, is not to be used to limit protection scope of the present invention, but is used to explain the present invention.All within spirit of the present invention and principle, any modification of being done, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (5)
- One kind be used for the soft landing diffusion furnace push away boat motion final controlling element, it is characterized in that, comprise the horizontal movement parts and move both vertically parts;The structure of said horizontal movement parts does, comprises base plate, is contained in the horizontal guide rail on the base plate; The connecting plate of this horizontal guide rail slip relatively is housed on this horizontal guide rail; The belt wheel mount pad is housed on the said base plate; In this belt wheel mount pad the synchronous pulley that links with a drive unit is housed, the synchronous band that is installed on the synchronous pulley is fixedly connected with said connecting plate;The structure of the said parts that move both vertically does, comprises the supporting seat that is fixed on the frame, and the riser guide that passes supporting seat and be fixed as one with it is sleeved on the riser guide and can be along the vertical lifting slider that slides of riser guide;Said lifting slider and said base plate are fixedly linked, and the fuselage of a said base plate and a lift is fixedly linked.
- 2. according to claim 1 be used for the soft landing diffusion furnace push away boat motion final controlling element, it is characterized in that said lift is fixed on the lift support, said lift links through a lifting decelerator and a up-down drive motors through power transmission shaft.
- 3. according to claim 1 be used for the soft landing diffusion furnace push away boat motion final controlling element, it is characterized in that said drive unit comprises the horizontal drive motor, the horizontal reductor that links to each other with the horizontal drive motor through shaft coupling; The output of said horizontal reductor and said synchronous pulley link.
- 4. according to claim 1 be used for the soft landing diffusion furnace push away boat motion final controlling element, it is characterized in that said lift is the worm and gear lift.
- 5. according to claim 1 be used for the soft landing diffusion furnace push away boat motion final controlling element, it is characterized in that be fixedly connected with two horizontal guide rails on the said base plate, every horizontal guide rail links to each other with said connecting plate through the cross sliding clock that is contained on the horizontal guide rail.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012102367660A CN102760674A (en) | 2012-07-10 | 2012-07-10 | Push-boat movement executing device for soft-landing diffusion furnace |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012102367660A CN102760674A (en) | 2012-07-10 | 2012-07-10 | Push-boat movement executing device for soft-landing diffusion furnace |
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| CN102760674A true CN102760674A (en) | 2012-10-31 |
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| CN2012102367660A Pending CN102760674A (en) | 2012-07-10 | 2012-07-10 | Push-boat movement executing device for soft-landing diffusion furnace |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104328502A (en) * | 2014-11-06 | 2015-02-04 | 北京七星华创电子股份有限公司 | Automatic feeding device of horizontal diffusion furnace |
| CN107283402A (en) * | 2017-08-04 | 2017-10-24 | 深圳市捷佳伟创新能源装备股份有限公司 | Accurately control boat system on the manipulator and multitube reative cell of stroke |
| CN107738993A (en) * | 2017-11-02 | 2018-02-27 | 上海沃敉奥机电设备有限公司 | Gantry synchronously follows drive device |
| CN109659401A (en) * | 2019-01-09 | 2019-04-19 | 湖南红太阳光电科技有限公司 | A kind of clean bench of high-temperature service |
| CN110289338A (en) * | 2019-06-28 | 2019-09-27 | 彭伶铭 | Diffusion furnace is used in a kind of manufacture of solar-energy photo-voltaic cell |
| CN111326439A (en) * | 2018-12-14 | 2020-06-23 | 中国电子科技集团公司第四十八研究所 | Push away boat position control device |
| CN111621847A (en) * | 2020-06-10 | 2020-09-04 | 湖南艾科威智能装备有限公司 | Horizontally adjustable boat pushing system and low-pressure diffusion furnace |
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| US20010041118A1 (en) * | 1999-07-07 | 2001-11-15 | Martin John M. | Wafer boat support and method for twin tower wafer boat loader |
| CN200967836Y (en) * | 2006-11-24 | 2007-10-31 | 中国电子科技集团公司第四十八研究所 | Silicon carbide soft landing loader |
| CN102061456A (en) * | 2010-10-29 | 2011-05-18 | 华南理工大学 | Cantilever-type push-pull boat system for plasma enhanced chemical vapor deposition (PECVD) device |
| CN202042470U (en) * | 2011-04-25 | 2011-11-16 | 青岛赛瑞达电子科技有限公司 | Angle adjusting mechanism of soft landing push-pull boat of diffusion furnace |
| CN102386282A (en) * | 2011-11-18 | 2012-03-21 | 青岛赛瑞达设备制造有限公司 | Integral lift-type soft-landing push-pull boat |
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2012
- 2012-07-10 CN CN2012102367660A patent/CN102760674A/en active Pending
Patent Citations (5)
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| US20010041118A1 (en) * | 1999-07-07 | 2001-11-15 | Martin John M. | Wafer boat support and method for twin tower wafer boat loader |
| CN200967836Y (en) * | 2006-11-24 | 2007-10-31 | 中国电子科技集团公司第四十八研究所 | Silicon carbide soft landing loader |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104328502A (en) * | 2014-11-06 | 2015-02-04 | 北京七星华创电子股份有限公司 | Automatic feeding device of horizontal diffusion furnace |
| CN107283402A (en) * | 2017-08-04 | 2017-10-24 | 深圳市捷佳伟创新能源装备股份有限公司 | Accurately control boat system on the manipulator and multitube reative cell of stroke |
| CN107283402B (en) * | 2017-08-04 | 2024-02-06 | 深圳市捷佳伟创新能源装备股份有限公司 | Manipulator capable of accurately controlling expansion and contraction amount and boat loading system of multi-tube reaction chamber |
| CN107738993A (en) * | 2017-11-02 | 2018-02-27 | 上海沃敉奥机电设备有限公司 | Gantry synchronously follows drive device |
| CN111326439A (en) * | 2018-12-14 | 2020-06-23 | 中国电子科技集团公司第四十八研究所 | Push away boat position control device |
| CN111326439B (en) * | 2018-12-14 | 2022-11-11 | 中国电子科技集团公司第四十八研究所 | Push away boat position control device |
| CN109659401A (en) * | 2019-01-09 | 2019-04-19 | 湖南红太阳光电科技有限公司 | A kind of clean bench of high-temperature service |
| CN109659401B (en) * | 2019-01-09 | 2020-07-10 | 湖南红太阳光电科技有限公司 | Clean bench of high temperature equipment |
| CN110289338A (en) * | 2019-06-28 | 2019-09-27 | 彭伶铭 | Diffusion furnace is used in a kind of manufacture of solar-energy photo-voltaic cell |
| CN110289338B (en) * | 2019-06-28 | 2020-12-22 | 赣州佳广智能装备科技有限公司 | Diffusion furnace for manufacturing solar photovoltaic cell |
| CN111621847A (en) * | 2020-06-10 | 2020-09-04 | 湖南艾科威智能装备有限公司 | Horizontally adjustable boat pushing system and low-pressure diffusion furnace |
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Application publication date: 20121031 |