CN109250502B

CN109250502B - Substrate conveying device

Info

Publication number: CN109250502B
Application number: CN201811212397.5A
Authority: CN
Inventors: 胡亮亮
Original assignee: Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd
Current assignee: Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd
Priority date: 2018-10-18
Filing date: 2018-10-18
Publication date: 2020-08-11
Anticipated expiration: 2038-10-18
Also published as: WO2020077902A1; CN109250502A

Abstract

The invention provides a substrate conveying device. The substrate conveying device comprises a base, a bearing seat, a transmission mechanism and a positioning mechanism. The bearing seat is movably arranged on the base and used for bearing the substrate, and the bearing seat is provided with a first side edge and a second side edge opposite to the first side edge. The transmission mechanism is abutted against the bearing seat and used for transmitting the bearing seat to enter and exit the base. The positioning mechanism comprises at least one blocking element and at least one lifting element, the blocking element is arranged on the base and close to the first side edge of the bearing seat, the lifting element is arranged on the base and close to the second side edge of the bearing seat, and the lifting element is used for moving the bearing seat so as to abut against the blocking element and moving the bearing seat so as to abut against the transmission mechanism.

Description

Substrate conveying device

Technical Field

The invention relates to the field of substrate conveying, in particular to a substrate conveying device.

Background

Currently, the manufacture of electronic products such as liquid crystal display panels, semiconductor devices or solar cells requires multiple processes to be performed on various substrates, such as: etching, Sputtering, and cleaning processes, which may be performed by a single processing tool, respectively. Due to the multiple processes that must be performed, the substrates must be handled and transported from one process tool to the next. The substrate Carrier (Carrier) on the processing machine is easy to wear or deform due to long-term use, so that the position of the substrate Carrier on the processing machine deviates from the originally set position. When the substrate, especially the glass substrate, is taken and placed, the substrate bearing seat may be deviated to cause fragment, which not only affects the productivity, but also increases the manufacturing cost.

Therefore, it is necessary to provide a substrate transportation apparatus to solve the above-mentioned problem of substrate chipping.

Disclosure of Invention

The invention aims to provide a substrate conveying device which can improve the accuracy of taking and placing a substrate and reduce the chance of substrate fragment.

In order to achieve the above object, the present invention provides a substrate conveying apparatus, comprising a base; the bearing seat is movably arranged on the base and used for bearing a substrate, and the bearing seat is provided with a first side edge and a second side edge opposite to the first side edge; the transmission mechanism is abutted against the bearing seat and is used for transmitting the bearing seat to enter and exit the base; and a positioning mechanism comprising: the blocking element is arranged on the base and is close to the first side edge of the bearing seat; and at least one lifting element which is arranged on the base and close to the second side edge of the bearing seat and is used for moving the bearing seat so as to abut against the blocking element and moving the bearing seat so as to abut against the transmission mechanism.

In some embodiments, the at least one lifting element is configured to move the susceptor upward to abut against the blocking element.

In some embodiments, the at least one lifting element is configured to move the carriage downward to abut against the transmission mechanism.

In some embodiments, the transmission mechanism includes a plurality of rollers disposed at intervals, and the plurality of rollers abut against the second side of the carrier seat.

In some embodiments, the lifting element comprises a pneumatic cylinder.

In some embodiments, the carrier is a metal frame.

In some embodiments, the substrate is a glass substrate.

In some embodiments, the positioning mechanism includes two blocking members, and the two blocking members are respectively disposed at two corners of the base near the first side of the carrying seat.

In some embodiments, the lifting element abuts against the second side of the carrier.

In some embodiments, the positioning mechanism includes two lifting members, and the two lifting members respectively abut against two opposite ends of the second side edge of the carrier.

In order to make the features and technical contents of the present invention comprehensible, please refer to the following detailed description of the present invention and the accompanying drawings, which are provided for reference and not for limiting the present invention.

Drawings

Fig. 1 is a schematic structural diagram of a substrate conveying apparatus according to an embodiment of the present invention;

fig. 2 is a schematic structural view of the substrate conveying apparatus in fig. 1 in a first use state;

FIG. 3 is a schematic structural view of the substrate transport apparatus shown in FIG. 1 in a second use state;

fig. 4 is a schematic structural view of the substrate transport apparatus in fig. 1 in a third use state.

Detailed Description

In order to make the objects, technical means and effects of the present invention more clear and definite, the present invention will be further explained with reference to the accompanying drawings. It is to be understood that the embodiments described herein are only a few embodiments of the present invention, not all embodiments, and are not intended to limit the present invention.

Referring to fig. 1, which shows a schematic structural diagram of a substrate transportation device according to an embodiment of the present invention, the substrate transportation device 1 includes a base 10, a carrying base 12, a transmission mechanism 14, and a positioning mechanism 16. The susceptor 12 is movably disposed on the base 10 for supporting the substrate 20 (as shown in fig. 3 and 4). For ease of understanding and illustration, the carrier 12 is schematically represented in phantom in its area. As shown in fig. 1, the carrier 12 has a first side 121 and a second side 122 opposite to the first side 121. In some embodiments, the carrier 12 is a metal frame.

As shown in fig. 1, the driving mechanism 14 abuts against the carrier 12 for driving the carrier 12 into and out of the base 10. In the embodiment of the invention, the transmission mechanism 14 includes a plurality of rollers 140 disposed at intervals, and the plurality of rollers 140 abut against the second side 122 of the carrier 12.

With continued reference to fig. 1, the positioning mechanism 16 includes: at least one blocking element 160 and at least one lifting element 162. The blocking element 160 is disposed on the base 10 and close to the first side 121 of the carrier 12. In the embodiment of the invention, the positioning mechanism 16 includes two blocking members 160 respectively disposed at two corners 100 of the base 10 close to the first side 121 of the carrying seat 12, and the two blocking members 160 are both located on the positioning line a-a. The alignment line A-A also represents the originally set position of the susceptor 12. FIG. 1 shows that the current position of the susceptor 12 is deviated from the alignment line A-A, i.e. the position of the susceptor 12 needs to be corrected to the alignment line A-A. The lifting element 162 is disposed on the base 10 near the second side 122 of the carrier 12 for moving the carrier 12 upward to abut against the stopping element 160 and for moving the carrier 12 downward to abut against the transmission mechanism 14. In some embodiments, the lifting member 162 comprises a pneumatic Cylinder (Cylinder), and the lifting member 162 abuts against the second side 122 of the carrier 12. In the present embodiment, the positioning mechanism 16 includes two lifting elements 162, and the two lifting elements 162 respectively abut against two opposite ends of the second side 122 of the carrier 12. However, the application of the present invention is not limited to the above examples, and the lifting element 162 may not abut against the second side 122 of the susceptor 12.

Fig. 2 is a schematic structural view of the substrate transport apparatus in fig. 1 in a first use state. Referring to fig. 2 in conjunction with fig. 1, the lifting element 162 is driven to move the susceptor 12 upward to abut against the stopping element 160, such that the susceptor 12 is aligned with the positioning line a-a, which represents that the susceptor 12 is returned to the original position. At the same time, the carrier 12 and the transmission 14 are observed to be separated.

Fig. 3 is a schematic structural view of the substrate transport apparatus in fig. 1 in a second use state. Referring to fig. 3 in conjunction with fig. 2, since the susceptor 12 is located at the position originally set on the base 10, when a robot (not shown) picks and places the substrate 20 on the susceptor 12, the substrate 20 is prevented from interfering with the susceptor 12 to form fragments. In some embodiments, the substrate 20 may be a glass substrate.

Fig. 4 is a schematic structural view of the substrate transport apparatus in fig. 1 in a third use state. Referring to fig. 4 in conjunction with fig. 3, when the substrate 20 is placed on the susceptor 12 completely, the lifting device 162 is driven to move the susceptor 12 downward to abut against the transmission mechanism 14 since the substrate 20 is to be transported to the next processing machine. At the same time, it can be observed that the carrier 12 has separated from the blocking element 160.

In summary, the substrate conveying apparatus provided by the present invention returns the carrying seat to the original set position mainly through the arrangement of the positioning mechanism, so that the accuracy of picking and placing the substrate can be improved, the chance of substrate fragment can be reduced, the productivity can be improved, and the manufacturing cost can be reduced.

It is to be understood that the invention is not limited to the examples described above, but that modifications and variations may be effected thereto by those of ordinary skill in the art in light of the foregoing description, and that all such modifications and variations are intended to be within the scope of the invention as defined by the appended claims.

Claims

1. A substrate transport apparatus, comprising:

a base;

the bearing seat is movably arranged on the base and used for bearing a substrate, and the bearing seat is provided with a first side edge and a second side edge opposite to the first side edge;

the transmission mechanism is abutted against the second side edge of the bearing seat and is used for transmitting the bearing seat to enter and exit the base; and

a positioning mechanism, comprising:

the blocking element is arranged on the base and is close to the first side edge of the bearing seat; and

at least one lifting element, set up in on the base and be close to the second side of bearing the weight of the seat, be used for moving the bearing the weight of the seat from the drive mechanism separation so as to lean on in block element, and be used for moving the bearing the weight of the seat from block element separation so as to the butt in drive mechanism.

2. The substrate transport apparatus according to claim 1, wherein: the at least one lifting element is used for moving the bearing seat upwards to abut against the blocking element.

3. The substrate transport apparatus according to claim 1, wherein: the lifting element is used for moving the bearing seat downwards to abut against the transmission mechanism.

4. The substrate transport apparatus according to claim 1, wherein: the transmission mechanism comprises a plurality of rollers arranged at intervals, and the rollers are abutted to the second side edge of the bearing seat.

5. The substrate transport apparatus according to claim 1, wherein: the lifting element comprises a pneumatic cylinder.

6. The substrate transport apparatus according to claim 1, wherein: the bearing seat is a metal frame body.

7. The substrate transport apparatus according to claim 1, wherein: the substrate is a glass substrate.

8. The substrate transport apparatus according to claim 1, wherein: the positioning mechanism comprises two blocking elements, and the two blocking elements are respectively arranged at two corners of the base, which are close to the first side of the bearing seat.

9. The substrate transport apparatus according to claim 1, wherein: the lifting element is abutted against the second side edge of the bearing seat.

10. The substrate transport apparatus according to claim 9, wherein: the positioning mechanism comprises two lifting elements which are respectively abutted against two opposite ends of the second side edge of the bearing seat.