CN109244159A - A kind of production line of flexible base board elemental oxygen protective layer - Google Patents
A kind of production line of flexible base board elemental oxygen protective layer Download PDFInfo
- Publication number
- CN109244159A CN109244159A CN201710561510.XA CN201710561510A CN109244159A CN 109244159 A CN109244159 A CN 109244159A CN 201710561510 A CN201710561510 A CN 201710561510A CN 109244159 A CN109244159 A CN 109244159A
- Authority
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- China
- Prior art keywords
- base board
- flexible base
- protective layer
- elemental oxygen
- cleaning
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 63
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 title claims abstract description 55
- 239000001301 oxygen Substances 0.000 title claims abstract description 52
- 229910052760 oxygen Inorganic materials 0.000 title claims abstract description 52
- 239000011241 protective layer Substances 0.000 title claims abstract description 44
- 238000004140 cleaning Methods 0.000 claims abstract description 44
- 238000012545 processing Methods 0.000 claims abstract description 30
- 238000002444 silanisation Methods 0.000 claims abstract description 25
- 238000001514 detection method Methods 0.000 claims abstract description 19
- 238000000034 method Methods 0.000 claims abstract description 19
- 239000007788 liquid Substances 0.000 claims abstract description 18
- 238000001035 drying Methods 0.000 claims abstract description 17
- 230000005540 biological transmission Effects 0.000 claims abstract description 16
- 230000008569 process Effects 0.000 claims abstract description 16
- 238000011084 recovery Methods 0.000 claims abstract description 15
- 230000004913 activation Effects 0.000 claims abstract description 12
- 238000009434 installation Methods 0.000 claims abstract description 9
- 230000000087 stabilizing effect Effects 0.000 claims abstract description 9
- 239000002699 waste material Substances 0.000 claims abstract description 9
- 230000006641 stabilisation Effects 0.000 claims abstract description 7
- 238000011105 stabilization Methods 0.000 claims abstract description 6
- 230000003213 activating effect Effects 0.000 claims abstract description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 10
- 239000010703 silicon Substances 0.000 claims description 10
- 229910052710 silicon Inorganic materials 0.000 claims description 10
- 238000001816 cooling Methods 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 claims description 8
- 239000010410 layer Substances 0.000 claims description 8
- 239000002243 precursor Substances 0.000 claims description 8
- 230000001681 protective effect Effects 0.000 claims description 8
- 230000032683 aging Effects 0.000 claims description 7
- 238000001914 filtration Methods 0.000 claims description 7
- 238000000746 purification Methods 0.000 claims description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 7
- 235000019441 ethanol Nutrition 0.000 claims description 6
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims description 6
- 229910052753 mercury Inorganic materials 0.000 claims description 6
- 239000010453 quartz Substances 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 238000003860 storage Methods 0.000 claims description 5
- 239000008367 deionised water Substances 0.000 claims description 3
- 229910021641 deionized water Inorganic materials 0.000 claims description 3
- 239000012530 fluid Substances 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims description 3
- 238000004064 recycling Methods 0.000 claims description 2
- 230000008901 benefit Effects 0.000 abstract description 4
- 230000009471 action Effects 0.000 abstract description 3
- 230000000694 effects Effects 0.000 abstract description 3
- 239000000243 solution Substances 0.000 description 17
- 238000002360 preparation method Methods 0.000 description 10
- 238000011161 development Methods 0.000 description 7
- 230000018109 developmental process Effects 0.000 description 7
- 230000007246 mechanism Effects 0.000 description 6
- 238000002791 soaking Methods 0.000 description 5
- 230000005855 radiation Effects 0.000 description 4
- 238000010079 rubber tapping Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000007654 immersion Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000004513 sizing Methods 0.000 description 3
- 238000012876 topography Methods 0.000 description 3
- 239000002253 acid Substances 0.000 description 2
- 239000012670 alkaline solution Substances 0.000 description 2
- 230000003139 buffering effect Effects 0.000 description 2
- 230000003628 erosive effect Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 230000009347 mechanical transmission Effects 0.000 description 2
- 238000003032 molecular docking Methods 0.000 description 2
- 238000005728 strengthening Methods 0.000 description 2
- 230000007306 turnover Effects 0.000 description 2
- 239000004952 Polyamide Substances 0.000 description 1
- 238000012356 Product development Methods 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 208000002925 dental caries Diseases 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000007306 functionalization reaction Methods 0.000 description 1
- 238000002329 infrared spectrum Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000006193 liquid solution Substances 0.000 description 1
- 239000010808 liquid waste Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 238000011112 process operation Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 239000002912 waste gas Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/041—Provisions for preventing damage caused by corpuscular radiation, e.g. for space applications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
- H01L31/1868—Passivation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Manufacturing Of Printed Wiring (AREA)
Abstract
The present invention provides a kind of production lines of flexible base board elemental oxygen protective layer, have: for the fixed installation provisioned systems of flexible base board to be fixedly mounted；Cleaning, drying processing system for cleaning and drying；For carrying out the activation processing system of activating pretreatment；For carrying out the silanization treatment system of silanization treatment；Stabilizing treatment system for stabilization processes；Autonomous detection system for detection；Mead-Bauer recovery system for being recycled to waste liquid；For being driven the transmission system of flexible base board between each system；With the control system for control action；Linear array is used between each system.According to the present invention, it can pipelining in an automated manner, the flexible base board elemental oxygen protective layer product produced has many advantages, such as that product large-area uniformity is good, lot stability is good, high yield rate, and atomproof oxygen significant effect is suitable for the production and application of flexible base board elemental oxygen protective layer.
Description
Technical field
The present invention relates to flexible base board elemental oxygen protective layer production equipment technologies, more particularly to a kind of flexible base board
The production line of elemental oxygen protective layer.
Background technique
Flexible base board is the critical component of the low orbit spacecraft flexible solar cell wing.Due in low orbit spacecraft running environment
There are the elemental oxygen of a large amount of high activities, it can make the flexible base board surfacing for being exposed to space environment that strong oxidation occur and invade
Erosion, directly results in component failure, it is therefore necessary to have flexible base board under the premise of not influencing original service performance atomproof
Oxygen function is just able to satisfy the growth requirement of growing low orbit spacecraft.For the above demand, applicant is in early-stage study
On the basis of, carry out the development work of low orbit spacecraft flexible base board elemental oxygen protective layer.
The result shows that the atomic oxygen erosion rate for the flexible base board elemental oxygen protective layer sample developed is sub- by original polyamides
The 3.0 × 10 of amine-24 cm3/ atom is reduced to 10-26 cm3/ atom hereinafter, and through 100 times -100 DEG C~+100 DEG C it is cold and hot
Flawless occurs after circulation, and elemental oxygen protective layer is without obvious removing after 610 tape-stripping of 3M, it is seen then that its do not influence it is original
Under the premise of service performance, atomproof oxygen function is realized.
However, in practical applications, low orbit spacecraft is generally large-size substrate, such as space station with greatly with flexible base board
The length of size flexible base board component is up to 2.5 meters, and width is close to 0.5 meter, this uniformity for manufacturing and controlling to plant machinery
Propose very high requirement.According to the current low orbit spacecraft production technology of flexible base board elemental oxygen protective layer, existing equipment
It is unable to satisfy the development of large scale flexible base board elemental oxygen protective layer.
Specifically, on the one hand, because being related to technological principle complexity, technique particularity and to control precision and large scale
The characteristics such as uniformity requirement height, the production line of low orbit spacecraft flexible base board elemental oxygen protective layer include multiple nonstandard developments
System function module.On the other hand, because of process operation long flow path and must meet the needs of mass production, it is therefore desirable to have
Automatic control system also needs to include that film frame automatic flow calculates, automatic fault identifies, servo to carry out PLC or PAC control
Mechanism running precision and feedback control, waste gas and waste liquid automatic processing etc..
Currently, there is no the production lines of complete flexible base board elemental oxygen protective layer product in the market, and by different component
The experimental rig of assembling does not have the necessary process of production large scale flexible base board elemental oxygen protective layer product, the production produced
Product are difficult to ensure quality, or are difficult to use in pipelining, at high cost, and yield rate is low, and performance is unstable etc..Therefore, it is necessary to needle
Building of production line is carried out to large scale flexible base board elemental oxygen protective layer product development, is protected for above-mentioned flexible base board elemental oxygen
The production of layer, meets the development need of low orbit spacecraft.
Summary of the invention
In view of the above, technical problem to be solved by the present invention lies in provide a kind of flexible base board elemental oxygen protective layer
The production line of product, pipelining in an automated manner, the flexible base board elemental oxygen protective layer product produced, which has, to be produced
The advantages that product large-area uniformity is good, lot stability is good, high yield rate, atomproof oxygen significant effect, is suitable for flexible base board
The production and application of elemental oxygen protective layer.
In order to solve the above-mentioned technical problems, the present invention provides a kind of production line of flexible base board elemental oxygen protective layer, tools
It is standby: for the flexible base board to be fixedly mounted, and to be sent to the fixed installation provisioned systems of preliminary station；For cleaning and drying
Do the cleaning, drying processing system on the flexible base board surface；Activating pretreatment is carried out for the superficial layer to the flexible base board
Activation processing system；The silanization of silanization treatment is carried out for the superficial layer to activated treated the flexible base board
Processing system；For carrying out the stabilizing treatment system of stabilization processes to the flexible base board after silanization treatment；For
Autonomous detection system that the flexible base board detected that treated；For being recycled to the various waste liquids in production process
The Mead-Bauer recovery system of processing；For being driven the transmission system of the flexible base board between each system；With for controlling institute
State the control system of each system and flexible base board movement；Linear array is used between each system.
According to the present invention, function is automatically brought into operation by control system realization, with from main transmission, according to production work
Skill makes flexible base board elemental oxygen protective layer product, need to carry out elemental oxygen protective treatment according to the technological process of production of sizing
Flexible base board merging production line each system in carry out specially treated and autonomous detection, linear array, benefit are used between each system
In between the stable operation of main drive gear and each system special atmosphere carry out specially treated.Therefore, produced according to the invention
Flexible base board elemental oxygen protective layer properties of product it is excellent, be expected to have preferable uniformity, consistency, high yield rate is easy to
Pipelining is suitable for the development of low orbit spacecraft flexible base board elemental oxygen protective layer, can obtain in low orbit spacecraft
Practical application.
Also, in the present invention, being also possible to be also equipped with the fresh air system for transmitting fresh air between each system.By means of
This, can not only ensure the stability of temperature and humidity in production environment, can also dispose the exhaust gas in production process in time.
Also, in the present invention, being also possible to the fixed installation provisioned systems and having size adjustment module.By means of this,
It can be conducive to the flexible base board of various models, increase production line adaptability.
Also, in the present invention, being also possible to the cleaning, drying processing system includes the cleaning using deionized water cleaning
Device and the cleaning device cleaned using ethyl alcohol.By means of this, it can guarantee flexible base under the premise of not damaging flexible base board
The cleaning of plate and without fifth wheel remain.
Also, in the present invention, being also possible to the activation processing system includes ultraviolet irradiation module, the ultraviolet irradiation
Low-pressure quartz mercury lamp, cooling recirculation system and purification filtering system are configured in module.By means of cooling recirculation system, can prevent
The problems such as radiation environment caused by ultraviolet irradiation module Long-Duration Exposure overheats.
Also, in the present invention, being also possible to the silanization treatment system includes and silicon source precursor solution silanization chamber
The dedicated inert protective atmosphere sealed storage tank of body sealing docking.By means of this, it can be achieved that taking liquid and tapping automatically, and taking liquid
And inert atmosphere protection is carried out during tapping.
Also, in the present invention, being also possible to the stabilizing treatment system includes ultraviolet irradiation device and aging strengthening model
Device；Low-pressure quartz mercury lamp, cooling recirculation system and purification filtering system are configured in the ultraviolet irradiation module, by means of cold
But the circulatory system can prevent purple the problems such as irradiating the overheat of radiation environment caused by module Long-Duration Exposure；The aging strengthening model
Device has multi-segment program heating function, and precise control of temperature can be controlled by the PLC of multi-segment program and deviates guarantee heating rate
And the requirement of temperature uniformity.
Also, in the present invention, being also possible to the autonomous detection system is 3D on-line detecting system.It, can be right by means of this
Flexible base board elemental oxygen protective layer product is detected, and guarantees product quality.
Also, in the present invention, being also possible to the Mead-Bauer recovery system and having discarded water recovery device, discarded ethyl alcohol time
Receiving apparatus, the recyclable device of activated solution, silicon source precursor solution recyclable device and other organic cleaning fluids recyclable device.
By means of this, the waste liquid after production can quickly be drained into Mead-Bauer recovery system to wait at professional liquid waste processing company
Reason, does not influence the production of next round and changes the liquid time between different batches flexible base board elemental oxygen protective layer product to shorten, and protect
Card meets the processing requirement of waste liquid.
The present invention may include any of at least two structures disclosed in claims and/or specification and/or attached drawing
Combination.Especially, the present invention includes more than two any combination of every claim of claims.
According to following specific embodiments and attached drawing is referred to, is better understood with above-mentioned and other purposes of the invention, spy
It seeks peace advantage.
Detailed description of the invention
Fig. 1 is the schematic diagram for showing the production line of flexible base board elemental oxygen protective layer of an implementation form according to the present invention；
Fig. 2 is the structural schematic diagram of the fixed frame device equipped with flexible base board of an implementation form according to the present invention；
Fig. 3 is the partial enlarged view for showing the structure of combination of film frame and substrate；
Fig. 4 is the station figure of the preparation device with 3 stations of an implementation form according to the present invention；
Detailed description of the invention:
1 is fixedly mounted provisioned systems；
11 fixed frame devices；
12 install the operating platform；
13 preparation devices；
2 cleaning, drying processing systems；
21a, 21b cleaning module；
22 drying heat treatment modules；
23 first buffered devices；
3 are activated system；
31a, 31b solution immersion treatment module；
32 surface clean modules；
33 buffered modules；
34 ultraviolet irradiation modules；
4 silanization treatment systems；
41 silicon source precursor solution silanization cavitys；
42 surfaces are standing and soaking cleaning device；
43 second buffered devices；
44 dedicated inert protective atmosphere sealed storage tanks；
5 stabilizing treatment systems；
51 ultraviolet irradiation devices；
52 ageing heat treatment devices；
6 autonomous detection systems；
61 3D on-line measuring devices；
611 optical units；
612 online automatic detection units；
613 database preparations and analytical unit；
7 Mead-Bauer recovery systems；
8 transmission systems；
81 mechanical transfer guide rails；
82 mechanical transmission cantilevers；
83 mechanical gripping mechanisms；
9 control systems；
B flexible base board；
100 apparatus for production line.
Specific embodiment
Technical solution of the present invention is described in detail with specific implementation form with reference to the accompanying drawing.It is right in the drawings
Identical or corresponding component is marked with identical appended drawing reference.
Fig. 1 is the schematic diagram for showing the production line of flexible base board elemental oxygen protective layer of an implementation form according to the present invention.
In the implementation form shown in FIG. 1, for purposes of illustration only, by the direction of transfer of the production line of the flexible base board elemental oxygen protective layer
It is set to left and right directions, but without being limited thereto when practical application.
As shown in Figure 1, the production line of the flexible base board elemental oxygen protective layer, has: for the flexible base to be fixedly mounted
Plate B, and it is sent into the fixed installation provisioned systems 1 of preliminary station；Cleaning for cleaning and drying the flexible base board B surface is dried
Dry-cure system 2；The activation processing system 3 of activating pretreatment is carried out for the superficial layer to the flexible base board B；For to warp
The superficial layer of the flexible base board B after activation processing carries out the silanization treatment system 4 of silanization treatment；For to silanization
Treated, and the flexible base board B carries out the stabilizing treatment system 5 of stabilization processes；For treated the flexible base board
The autonomous detection system 6 that B is detected；Mead-Bauer recovery system for being recycled to the various waste liquids in production process
7；For being driven the transmission system 8 of the flexible base board B between each system；With for controlling each system and described soft
Property substrate B movement control system 9；Linear array is used between each system.
In the present invention, function is automatically brought into operation by the realization of control system 9, with from main transmission 8, according to production work
Skill will need to carry out each system of the flexible base board B merging production line of elemental oxygen protective treatment according to the technological process of production of sizing
Carry out specially treated and autonomous detection in 1-9, use linear array between each system, conducive to from the stable operation of main drive gear and
Special atmosphere between each system carries out specially treated.Therefore, flexible base board B elemental oxygen protective layer product produced by the invention
Function admirable is expected to have preferable uniformity, consistency, and high yield rate is easy to pipelining, is suitable for low orbit spacecraft
With the development of flexible base board B elemental oxygen protective layer, practical application can be obtained in low orbit spacecraft.
As shown in Figure 1, using line above-mentioned each system for carrying out various functionalizations between the surface of flexible base board B
Property arrangement, to facilitate automatic operating.Specifically, provisioned systems 1 are fixedly mounted for the fixed installation of flexible base board B and incite somebody to action
Fixed frame equipped with flexible base board B is put into the preliminary station of apparatus for production line 100 to carry out subsequent processing.Preparation is fixedly mounted
System 1 include: fixed flexible base board B fixed frame device 11, for install flexible base board B install the operating platform 12 and will
Flexible base board B in fixed frame device 11 is sent into the preparation device 13 of preliminary station.
Specifically, the combination of flexible base board B and fixed frame device 11, and the surrounding of flexible base board B can be used for and fix
Frame mounting 11 is fixed, and about 11 two sides long side of fixed frame device has the pressing device of adjustable upper-lower compacting position, uses
In fixed flexible base board B.Then, the fixed frame device 11 of flexible base board B and the combination of preparation device 13, preparation dress are fixed with
It sets 13 to match for the structure and 11 size of fixed frame device of similar card slot, guarantees that fixed frame device 11 can be put vertically
Enter in preparation device 13.
In the present invention, fixed frame device 11 has a certain range of size adjusting function, to cope with various sizes
Flexible base board B.In addition, fixed frame device 11 can develop more sets when continuous production.Mechanical gripping mechanism 83 is configured with can be certainly
The photoelectric sensor of dynamic identification fixed frame device 11, in order to which aftermentioned control system 9 and aftermentioned transmission system 8 can be certainly
It is dynamic to identify and position the fixed frame device 11 equipped with flexible base board B to be processed.
Then, by the control of control system 9 via transmission system 8, flexible base board B is sent into cleaning, drying processing system
2.Cleaning, drying processing system 2 be used for flexible base board B carry out surface cleaning processing, successively include two sets of cleaning module 21a,
21b and drying heat treatment module 22.Wherein, described cleaning module 21a, 21b can use spray cleaning module or ultrasonic cleaning module,
But not limited to this, the same or similar module of other function also can be used and be replaced.In the present invention, cleaning device 21a, 21b
It is upper to be configured with automatic liquid in-out unit, temperature automatically controlled unit and liquid filtration, purification functional unit etc..Specifically, cleaning module
The cleaning device 21b of 21a, 21b cleaning device 21a and use ethyl alcohol cleaning for example including use deionized water cleaning, but not
It is limited to this.In addition, can increase by the first buffered device 23 after cleaning, drying processing system 2, settable multiple behaviour thereon
Make station, for flexible base board B after cleaned 2 cleaning treatment of drying and processing system of of short duration turnover storage.
Flexible base board B is transmitted system 8 and is sent into activation processing system 3.Activation processing system 3 is used for flexible base board B table
Surface layer is activated, and successively includes: solution immersion treatment module 31a, 31b, surface clean module 32, buffered module
33 and ultraviolet irradiation module 34.In the present invention, solution immersion treatment module 31a, 31b for example may include alkaline solution activation chamber
Body 31a and acid solution activate cavity 31b.
Wherein, solution activation cavity 31a, solution activation cavity 31b and surface clean module 32 can have automatic liquid in-out
Function and level displaying function, surface clean module 32 can for example have 3 or more cleaning function, but not limited to this.Buffering
Settable multiple operation positions in processing module 33, to carry out of short duration all dumps for flexible base board B after handling soaking and washing
It deposits.For example configurable low-pressure quartz mercury lamp in ultraviolet irradiation module 34, while can also configure cooling recirculation system and purification filtering
System, with prevent radiation environment caused by 34 Long-Duration Exposure of ultraviolet irradiation module overheat the problems such as.The cooling system it is cold
But means are not specifically limited, air-cooled or water cooling.
Flexible base board B subsequently enters silanization treatment system 4.Silanization treatment system 4 is used for at through above-mentioned pre-activated
The superficial layer of flexible base board B after reason carries out silanization treatment.It successively include: silicon source precursor solution silanization cavity 41, table
Face is standing and soaking cleaning device 42 and the second buffered device 43.In the present invention, it is also configured with and silicon source precursor solution silicon
The dedicated inert protective atmosphere sealed storage tank 44 of the sealing docking of alkanisation cavity 41 takes liquid and tapping to realize automatically, and
Liquid and tapping is taken to carry out inert atmosphere protection in the process.Surface be standing and soaking cleaning device 42 for example and can have 3 or more it is clear
Wash function, automatic liquid in-out function and level displaying function.For example settable multiple operation positions of second buffered device 43
To be stored for carrying out of short duration turnover to the flexible base board B after silanization treatment.
Then, flexible base board B enters stabilizing treatment system 5 under the control of control system 9.Stabilizing treatment system 5
It successively include at ultraviolet irradiation device 51 and timeliness heat for carrying out stabilization processes to the flexible base board B after silanization treatment
Manage device 52.In the present invention, for example configurable low-pressure quartz mercury lamp on ultraviolet irradiation device 51, while can also configure cooling system
With purification filtering system, with prevent radiation environment caused by 51 Long-Duration Exposure of ultraviolet irradiation device overheat the problems such as.Timeliness heat
Processing unit 52 can have multi-segment program heating function, for example, 15 sections or more of temperature programming function.
Then, to treated, flexible base board B is detected autonomous detection system 6.Autonomous detection system 6 can be according to flexibility
The use demand of substrate B is specifically equipped with, and is not specially limited.It mainly include being examined to surface topography in the present invention
The 3D on-line measuring device 61 of survey, be used to carry out the flexible base board B after stabilization processes 3 d surface topography it is online from
Main detection.Specifically, 3D on-line measuring device 61 mainly includes optical unit 611, online automatic detection unit 612 and data
It automatically processes and analytical unit 613.
More specifically, high-resolution telecentric lens for example can be used in optical unit 611.Online automatic detection unit 612
It is ensured that flexible base board B is moved on (X-direction and Y-direction are respectively the length and width on horizontal plane) in the x direction and the y direction
High dynamic response.Wherein, device common on the market can be used in portable instrumentation, small and exquisite portable, main to use without installation
In process detect, can be specifically equipped with according to the use demand of flexible base board B, generally mainly include portable surface topography,
Detecting instruments such as surface energy, surface infrared spectrum etc., but not limited to this.
Apparatus for production line 100 is also equipped with Mead-Bauer recovery system 7.Mead-Bauer recovery system 7 is used for generating in production process
Various waste liquids are recycled.In the present invention, Mead-Bauer recovery system 7 for example may include discarded water recovery device, discarded ethyl alcohol
Recyclable device, the recyclable device of activated solution, silicon source precursor solution recyclable device and other organic cleaning fluids recycling dress
It sets, but not limited to this, it can be changed according to specific implementation situation.In addition, the present invention can also according to the production process, to solution into
Integrated treatment again after row classification.
Apparatus for production line 100 is also equipped with the transmission system 8 that the flexible base board B is driven between each system.The transmission
System 8 for example may include mechanical transfer guide rail 81, mechanical transmission cantilever 82, mechanical gripping mechanism 83.In the present invention, transmission system
High-performance aluminum profile for example can be used in 8 Design of Mechanical Structure, and seamless welding for example can be used in mechanical transfer guide rail 81, to guarantee
Pneumatic control for example can be used in its transmission process stability, mechanical gripping mechanism 83, and destruction is generated in mechanical movement to eliminate
The movement hidden danger of board unit independently judge failure and executes accordingly in addition, can also establish failure handling data library to realize
Safeguard procedures action command.
Then illustrate the control system 9 of apparatus for production line 100.In the present invention, control system 9 is mainly by PLC control system
(Programmable Logic Controller；Programmable logic controller (PLC)), network and servo-system composition, according to sizing
The technological process of production will need elemental oxygen protective treatment flexible base board B be placed in apparatus for production line 100 each function system in into
Row specially treated and autonomous detection, to complete technical process control relevant to transmission agency and the conveying of flexible base board B
Control etc..PLC control system above-mentioned all process systems of apparatus for production line 100 can be carried out centralized watch, control, management with
And automatic adjustment etc., conveyer system 8 is controlled by PLC system, the functions such as is automatically brought into operation to realize, and then can realize
Distant place manual operation etc..
In addition, the apparatus for production line 100 of flexible base board elemental oxygen protective layer according to the present invention can also have fresh air system,
On the one hand the stability that can ensure temperature and humidity in production environment, on the other hand can dispose the exhaust gas in production process in time.
An implementation form according to the present invention is illustrated now in conjunction with attached drawing 1 and specific embodiment 1, to be explained further
The present invention.In the present embodiment 1, consider implementing process agents useful for same between influence and simultaneously efficiently use space, using according to
The secondary mode put, but activate and separated with silanization system with ageing heat treatment device and ultraviolet irradiation device, successively match
Be set to: fixed frame device 11 installs the operating platform 12, preparation device 13, cleaning module 21a, cleaning module 21b, drying heat
Processing module 22, alkaline solution activate cavity 31a, acid solution activates cavity 31b, at surface clean module 32, the first buffering
Before managing device 23, buffered module 33, ageing heat treatment device 52, ultraviolet irradiation module 34, ultraviolet irradiation device 51, silicon source
Drive liquid solution silanization cavity 41, surface is standing and soaking cleaning device 42, the second buffered device 43,3D on-line measuring device
61。
In the present embodiment, control system 9 uses PLC system, and transmission system 8 is through to on-line checking dress from preparation device 13
61 are set, and uses the switch of air-channel system control device systems component system, in this implementation form, which can be in ventilation feelings
Case lid is opened by certain air pressure under condition, deflation rear cabinet closes lid.In production process, by what is write in advance according to production technology
Process is pre-entered to control system 9, subsequent start-up control system 9, is controlled transmission system 8 by control system 9 and is passed through
Mechanical gripping mechanism 83 needs the flexible base board B of elemental oxygen protective treatment to be placed in from fixed installation provisioned systems after grabbing wiped clean
In each function system until 1 preliminary station to stabilizing treatment system 5, specially treated is carried out.Since each processing unit is adopted
The mode placed with linear vertical, and 3D on-line measuring device 61 is horizontal positioned mode, so when detecting in general
Need manually slowly to place flexible base board B is horizontal to the detection platform of 3D on-line measuring device 61, by electric platforms into
The autonomous detection of row.Waste liquid after production is delivered to 7 system of devil liquor recovery by pipe-line system (not shown).
The production line of the flexible base board B elemental oxygen protective layer provided according to the present invention, the flexible base board B elemental oxygen of production
Protective layer properties of product are excellent, are expected to have preferable uniformity, consistency, and high yield rate is easy to pipelining, is suitable for
The low orbit spacecraft development of flexible base board B elemental oxygen protective layer, can obtain practical application in low orbit spacecraft.
Under the objective for not departing from essential characteristic of the invention, the present invention can be presented as diversified forms, therefore in the present invention
Implementation form be to be illustrative rather than definitive thereof, limited since the scope of the present invention is defined by the claims rather than by specification,
And all changes fallen in the full scope of equivalents of the range that claim defines or the range that it is defined be understood to include
In detail in the claims.
Claims (9)
1. a kind of production line of flexible base board elemental oxygen protective layer, has:
For the flexible base board to be fixedly mounted, and it is sent to the fixed installation provisioned systems of preliminary station；
For cleaning and drying the cleaning, drying processing system on the flexible base board surface；
The activation processing system of activating pretreatment is carried out for the superficial layer to the flexible base board；
The silanization treatment system of silanization treatment is carried out for the superficial layer to activated treated the flexible base board；
For carrying out the stabilizing treatment system of stabilization processes to the flexible base board after silanization treatment；
The autonomous detection system detected for the flexible base board described to treated；
Mead-Bauer recovery system for being recycled to the various waste liquids in production process；
For being driven the transmission system of the flexible base board between each system；With
For controlling the control system of each system and flexible base board movement；
Linear array is used between each system.
2. the production line of flexible base board elemental oxygen protective layer according to claim 1, which is characterized in that have to described each
The fresh air system of fresh air is transmitted between system.
3. the production line of flexible base board elemental oxygen protective layer according to claim 1, which is characterized in that the fixed installation
Provisioned systems have size adjustment module.
4. the production line of flexible base board elemental oxygen protective layer according to claim 1, which is characterized in that the cleaning, drying
Processing system includes the cleaning device using deionized water cleaning and the cleaning device using ethyl alcohol cleaning.
5. the production line of flexible base board elemental oxygen protective layer according to claim 1, which is characterized in that the activation processing
System includes ultraviolet irradiation module, and low-pressure quartz mercury lamp, cooling recirculation system and purification are configured in the ultraviolet irradiation module
Filtration system.
6. the production line of flexible base board elemental oxygen protective layer according to claim 1, which is characterized in that at the silanization
Reason system includes sealing the dedicated inert protective atmosphere sealed storage tank docked with silicon source precursor solution silanization cavity.
7. the production line of flexible base board elemental oxygen protective layer according to claim 1, which is characterized in that at the stabilisation
Reason system includes ultraviolet irradiation module and ageing heat treatment device；In the ultraviolet irradiation module configured with low-pressure quartz mercury lamp,
Cooling recirculation system and purification filtering system；The ageing heat treatment device has multi-segment program heating function.
8. the production line of flexible base board elemental oxygen protective layer according to claim 1, which is characterized in that the autonomous detection
System is 3D on-line detecting system.
9. the production line of flexible base board elemental oxygen protective layer according to claim 1, which is characterized in that the devil liquor recovery
System has discarded water recovery device, discarded alcohol recovering device, the recyclable device of activated solution, the recycling of silicon source precursor solution
The recyclable device of device and other organic cleaning fluids.
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| CN201710561510.XA CN109244159B (en) | 2017-07-11 | 2017-07-11 | Production line of flexible substrate atomic oxygen protective layer |
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|---|---|---|---|
| CN201710561510.XA CN109244159B (en) | 2017-07-11 | 2017-07-11 | Production line of flexible substrate atomic oxygen protective layer |
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| CN109244159B (en) | 2020-03-17 |
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