CN109239817A - A kind of permeability improvement device of incident electromagnetic wave and the method for adjusting transmissivity using it - Google Patents

A kind of permeability improvement device of incident electromagnetic wave and the method for adjusting transmissivity using it Download PDF

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Publication number
CN109239817A
CN109239817A CN201811375652.8A CN201811375652A CN109239817A CN 109239817 A CN109239817 A CN 109239817A CN 201811375652 A CN201811375652 A CN 201811375652A CN 109239817 A CN109239817 A CN 109239817A
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metal grating
electromagnetic wave
width
hosqt media
bullion
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CN109239817B (en
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梁华伟
李佳奇
李玲
张敏
苏红
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Shenzhen University
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Shenzhen University
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11Anti-reflection coatings
    • G02B1/118Anti-reflection coatings having sub-optical wavelength surface structures designed to provide an enhanced transmittance, e.g. moth-eye structures
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/18Diffraction gratings
    • G02B5/1866Transmission gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q15/00Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
    • H01Q15/02Refracting or diffracting devices, e.g. lens, prism
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/18Diffraction gratings
    • G02B2005/1804Transmission gratings

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)

Abstract

The present invention provides a kind of permeability improvement device of incident electromagnetic wave and the methods for adjusting transmissivity using it, the permeability improvement device includes hosqt media and the reflection for changing electromagnetic wave incident interface, the metal grating of projection coefficient size and phase, the metal grating includes the bullion that several are parallel to each other, bullion described in several is successively equidistantly arranged along the width direction of the hosqt media, the side of the hosqt media is arranged in the metal grating, side where electromagnetic wave from the metal grating is incident, and successively penetrate the metal grating and hosqt media.The permeability improvement device can reduce significantly reflection in the larger range of hosqt media width, increase the transmitance of electromagnetic wave;Meanwhile by the width of adjusting metal grating and period, the transmissivity of electromagnetic wave is adjusted.When specifically used, target transmittance only need to be set, width and the period of suitable metal grating is then found, brings great convenience to practical application.

Description

A kind of permeability improvement device of incident electromagnetic wave and the method for adjusting transmissivity using it
Technical field
The invention belongs to its adjustings of the permeability improvement device and utilization of Electromgnetically-transparent field more particularly to a kind of incident electromagnetic wave The method of transmissivity.
Background technique
Reflection and transmission can occur when different medium surface is transmitted for electromagnetic wave, this is one important in field of optical applications The phenomenon that.
However, in many application processes, due to the presence of insertion loss and Fabry Perot effect, it is often necessary to reduce Reflection of the medium to electromagnetic wave enables the energy of transmission to reach maximum, in order to the transmission etc. of information.Currently, to Jie The antireflective method of matter mainly has 1/4 deielectric-coating of single layer and multilayer film.However, both methods needs to meet particular medium film thickness With the requirement of refractive index.In far infrared, the transmission process of microwave band, need base material that there is biggish refractive index, this It would become hard to find the condition that suitable crude media membrane material meets index matching.The effort of personnel after study proposes to set Meter obtains matching condition needed for corresponding refractive index value meets anti-reflection film with artificial dielectric's structure (surface relief structure), But since its difficulty of processing is larger and there are uneven surface, them will be limited in the application of many optical devices.
Therefore, it is necessary to a kind of antireflective scheme of hosqt media be provided, to solve above-mentioned actual application problem.
Summary of the invention
Technical problem to be solved by the present invention lies in the permeability improvement device for providing a kind of incident electromagnetic wave and utilize its adjusting The method of transmissivity, it is intended to solve the transmission of electromagnetic wave in the medium, it is difficult to which relatively simple realization hosqt media is antireflective to ask Topic.
In order to solve the above technical problems, the invention is realized in this way, a kind of permeability improvement device of incident electromagnetic wave, including base The metal grating of bottom medium and reflection, projection coefficient size and phase for changing electromagnetic wave incident interface, the metal light Grid include the bullion that several are parallel to each other, several described bullions along the hosqt media width direction successively It is equidistantly arranged in the side of the hosqt media, the side where electromagnetic wave from the metal grating is incident, and successively penetrates The metal grating and hosqt media.
Further, the width of the bullion is x, and the center between two neighboring bullion is away from for the metal The period y of grating, wherein y-x >=0.1mm.
Further, the bullion is in rectangular shape.
Further, the material of the hosqt media is any one in silicon, polyethylene or quartz, the metal grating Material be gold, silver, copper or aluminium in any one.
The present invention also provides the sides that a kind of permeability improvement device using the incident electromagnetic wave adjusts electromagnetic wave tansmittivity Method, which comprises
It determines the thickness of hosqt media, and determines that electromagnetic wave penetrates the target transmittance of hosqt media;
The width of metal grating and/or the period of metal grating are adjusted, electromagnetic wave is calculated through the total of hosqt media Transmissivity;
The total transmittance and the target transmittance are compared, when the total transmittance is consistent with target transmittance When, then the period of the width of the metal grating and metal grating determines;When the total transmittance and target transmittance are inconsistent When, then continue the width for adjusting the metal grating and/or the period of metal grating, until the total transmittance and object penetrating Until rate is consistent.
Further, electromagnetic wave transmission is calculated in the period of the width for adjusting metal grating and/or metal grating The total transmittance of hosqt media, comprising:
Obtain the width of the preset metal grating and the period of metal grating;
Using the width of the metal grating and/or the period of metal grating, obtain describedWithSpecific value, And it calculatesWithSpecific value, Using describedWithCalculate the total of electromagnetic wave Penetrate rate
Wherein, the air of metal grating side on hosqt media is defined as 0, hosqt media itself is defined as 1, The air of the hosqt media other side is defined as 2,Reflectivity when electromagnetic wave is propagated from 1 towards 0 is represented,Represent electricity Reflectivity when magnetic wave is propagated from 1 towards 2,Transmissivity when electromagnetic wave is propagated from 0 towards 1 is represented,Represent electromagnetic wave Transmissivity when being propagated from 1 towards 2;K is wave vector, and d is hosqt media thickness, n1For the refractive index of hosqt media itself, n0And n2 It is the refractive index of air itself, and n0=n2
Further, it in the period of the width for adjusting metal grating and/or metal grating, specifically includes:
It determines that the width size of the bullion described in each is constant, increases or reduce in two neighboring bullion The heart away from;
Or, determine that the center of two neighboring bullion is constant away from size, increase or reduce the bar shaped gold described in each The width of category;
Or, increasing the width of the bullion described in each, while increasing or reducing in two neighboring bullion The heart away from;
Or, reducing the width of the bullion described in each, while increasing or reducing in two neighboring bullion The heart away from.
Compared with prior art, the present invention beneficial effect is: a kind of permeability improvement device of incident electromagnetic wave of the invention, By the way that one layer of metal grating is arranged on the surface of hosqt media, so that the side where electromagnetic wave from metal grating is incident, electromagnetism Wave can successively penetrate the metal grating and hosqt media, so as to subtract in the larger range of hosqt media width significantly Small reflection increases the transmitance of electromagnetic wave.It, can meanwhile by the period of the width and metal grating that adjust the metal grating Achieve the effect that adjust electromagnetic wave tansmittivity.Using the permeability improvement device, target transmittance can be set as needed, then find conjunction Suitable metal grating, so that the width of the metal grating and the period of metal grating can satisfy the demand of target transmittance i.e. Can, it brings great convenience to practical application.
Detailed description of the invention
Fig. 1 is that the anti-reflection structural schematic diagram of hosqt media is preset in the preferred embodiment of the present invention;
Fig. 2 is the process for the method that the preferred embodiment of the present invention adjusts electromagnetic wave tansmittivity using the permeability improvement device of Fig. 1 Schematic diagram;
Hosqt media thickness and transmissivity schematic diagram are preset when Fig. 3 is no-raster in the preferred embodiment of the present invention;
Fig. 4 is the schematic diagram that screen periods and raster width variation and transmissivity are preset in the preferred embodiment of the present invention;
Fig. 5 is the schematic diagram that screen periods and raster width variation and reflectivity are preset in the preferred embodiment of the present invention;
Fig. 6 is that screen periods and raster width variation and equivalent incident interface reflectivity are preset in the preferred embodiment of the present invention R01 schematic diagram;
Fig. 7 is that screen periods and raster width variation and equivalent incident interface reflectivity are preset in the preferred embodiment of the present invention R01 phase schematic diagram;
Fig. 8 is that screen periods and raster width variation and equivalent incident interface transmissivity are preset in the preferred embodiment of the present invention T01 schematic diagram;
Fig. 9 is that screen periods and raster width variation and equivalent incident interface transmissivity are preset in the preferred embodiment of the present invention T01 phase schematic diagram;
Figure 10 is to preset screen periods and raster width variation in the preferred embodiment of the present invention to reflect with equivalent incident interface Rate R10 schematic diagram;
Figure 11 is to preset screen periods and raster width variation in the preferred embodiment of the present invention to reflect with equivalent incident interface Rate R10 phase schematic diagram;
Figure 12 is to preset screen periods and raster width variation in the preferred embodiment of the present invention to transmit with equivalent incident interface Rate T10 schematic diagram;
Figure 13 is to preset screen periods and raster width variation in the preferred embodiment of the present invention to transmit with equivalent incident interface Rate T10 phase schematic diagram;
Figure 14 is optical path signal of the electromagnetic wave by the incidence of grating side, when through hosqt media in the preferred embodiment of the present invention Figure.
Specific embodiment
With reference to the attached drawing in the embodiment of the present invention, technical solution in the embodiment of the present invention carries out completely clearly Description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.Based on this hair Embodiment in bright, those skilled in the art's every other embodiment obtained without making creative work, It shall fall within the protection scope of the present invention.
Fig. 1 is please referred to, is a kind of permeability improvement device 100 of incident electromagnetic wave provided in an embodiment of the present invention comprising substrate Medium 1 and metal grating 2.
The metal grating 2 is for changing the reflection at electromagnetic wave incident interface, projection coefficient size and phase comprising if The dry bullion 21 being parallel to each other, bullion 21 described in several along the hosqt media 1 width direction successively Equidistant arrangement.The side of the hosqt media 1 is arranged in the metal grating 2, where electromagnetic wave from the metal grating 2 Side is incident, and successively penetrates the metal grating 2 and hosqt media 1.
In the present embodiment, the width of the bullion 21 is x, the center between two neighboring bullion 21 away from for The period y of the metal grating, wherein y-x >=0.1mm, but it is not specially defined in the numerical value of x and y, as long as guaranteeing that x ratio y is small i.e. It can.The bullion 21 is correspondingly in rectangular shape, naturally it is also possible to be fabricated to other 3D shapes as needed.
In the present embodiment, by the way that metal grating 2 is arranged on hosqt media 1, so as to larger in hosqt media width In the range of reduce reflection significantly, increase the transmitance of electromagnetic wave.Meanwhile width and gold by adjusting the metal grating The period for belonging to grating can reach the effect for adjusting electromagnetic wave tansmittivity.Using the permeability improvement device, it is saturating target can be set as needed Rate is penetrated, suitable metal grating is then found, so that the width of the metal grating and the period of metal grating can satisfy mesh The demand for marking transmissivity, brings great convenience to practical application.
Referring to Fig. 2, the embodiment of the invention also provides a kind of adjustings of permeability improvement device 100 using the incident electromagnetic wave The method of electromagnetic wave tansmittivity, the described method comprises the following steps:
Then step 201, the thickness for determining hosqt media 1 determine electromagnetic wave through hosqt media according to actual needs Target transmittance;
Electromagnetic wave is calculated through substrate in the period of step 202, the width for adjusting metal grating 2 and/or metal grating The total transmittance of medium
Step 203, by the total transmittanceIt is compared with the target transmittance, when the total transmittanceWith mesh When mark transmissivity is consistent, then the period of the width of the metal grating and metal grating determines;When the total transmittanceWith target When transmissivity is inconsistent, then continue the width for adjusting the metal grating and/or the period of metal grating, until the total transmission RateUntil consistent with target transmittance.
In the above-mentioned methods, the step 202, specifically includes:
Obtain the width of the preset metal grating and the period of metal grating;
Using the width of the metal grating and/or the period of metal grating, obtain describedWithSpecific number Value, and calculateWithSpecific value, Using describedWithCalculate the total of electromagnetic wave Penetrate rate
Wherein, the air of metal grating side on hosqt media is defined as 0, hosqt media itself is defined as 1, The air of the hosqt media other side is defined as 2,Reflectivity when electromagnetic wave is propagated from 1 towards 0 is represented,Represent electricity Reflectivity when magnetic wave is propagated from 1 towards 2,Transmissivity when electromagnetic wave is propagated from 0 towards 1 is represented,Represent electromagnetic wave Transmissivity when being propagated from 1 towards 2;K is wave vector, and d is hosqt media thickness, n1For the refractive index of hosqt media itself, n0And n2 It is the refractive index of air itself, and n0=n2
In the above-described embodiments, the mode for adjusting the width of metal grating 2 and/or the period of metal grating 2, specifically includes It is several below:
First, it determines that the width size of the bullion 21 described in each is constant, increases or reduce two neighboring bar shaped The center of metal 21 away from;
Second, it determines that the center of two neighboring bullion 21 is constant away from size, increases or reduce the item described in each The width of shape metal 21;
Third increases the width of the bullion 21 described in each, while increasing or reducing two neighboring bullion 21 center away from;
4th, the width of the bullion 21 described in each is reduced, while increasing or reducing two neighboring bullion 21 center away from.
By way of the period of the above-mentioned several width for adjusting metal grating 2 and/or metal grating 2, it can achieve The purpose for adjusting electromagnetic wave tansmittivity, so that within the scope of certain thickness, one can be found for hosqt media 1 The width of a suitable metal grating 2 and the period of metal grating 2, so that electromagnetic wave penetrates the transmitance of the hosqt media 1 It improves.
Above-mentioned phenomenon is explained below by specific experimental data:
Referring to figure 3., in the preferred embodiment of the present invention when no-raster hosqt media thickness and transmissivity schematic diagram.By In electromagnetic wave, there are Fabry Perot effects in the transmission process of base media materials, so Fig. 3 schematic diagram trend is presented.From It can be seen that, with the variation of hosqt media thickness, electromagnetic wave is also followed up and down through the transmitance of the hosqt media in Fig. 3 It floats.To embody this programme antireflective effect, in a preferred embodiment of the invention, it is lower that default hosqt media thickness is selected as transmitance When thickness value 0.5mm, default hosqt media thickness can be adjusted according to the actual situation.
Referring to figure 4. and Fig. 5, which respectively show preset screen periods and raster width becomes in the preferred embodiment of the present invention Change the relationship with transmissivity and reflectivity, transmissivity adds reflectivity to be equal to 1, and when one of increase, then another reduces.
Fig. 4 and Fig. 5 be using Finite Element Simulation Software comsol5.3 to the present embodiment carry out simulation calculating as a result, During the simulation of this preferred embodiment calculates, with suitable periodic boundary condition, the selection of hosqt media 1 refractive index is 3.42 lossless silicon dielectric material, the metal grating 2 select the metal of refractive index n=-656020-1.02917*10^7i Copper.Analog result output is s parameter (s11dB, s21dB), can pass through R=10^ (s11dB/10), T=10^ (s21dB/10) Obtain reflectivity and transmissivity.It should be noted that in the application, the material selection silicon of the hosqt media 1, the metal light The material selection copper of grid 2, only one of preferable embodiment, but it is not limited to the hosqt media 1 and metal light The specific material of grid 2.As long as the material of the hosqt media 1 can guarantee it is transparent to electromagnetic wave, such as: can be poly- second Alkene, quartz material etc.;The material of the metal grating 2 can also correspondingly select the metal other than copper removal, such as: gold, silver, aluminium Deng.
In the preferred embodiment, incidence wave is collimation wave, and polarization direction is perpendicular to grating length direction, by grating side Incidence, through hosqt media, frequency 0.14THz.In other embodiments, the frequency value for presetting incidence wave can also root It is configured calculating according to actual needs, finds the higher screen periods of corresponding transmissivity and raster width, is not done herein specific Limitation.
In addition, hosqt media transmitance is 0.3096 when no-raster.As shown in Figure 4, transmissivity can in this preferred embodiment With realize hosqt media thickness within the scope of 0.5-2.1mm any thickness it is anti-reflection.Suitable raster width is selected, may be implemented Reach between 0.5-0.6 in any thickness transmissivity, when hosqt media is larger, optimum transmission rate can be close to 1.
In order to be further described the antireflective inherent mechanism of the program, by table on grating and hosqt media in this preferred embodiment Face is equivalent to light incidence interface, to the reflectivity (R01, R10) and transmissivity (T01, T10) and its respective phase at its incident interface Simulation calculating is carried out, accordingly result please refers to Fig. 6-Figure 13.Meanwhile theoretically, to total reflectance in this preferred embodiment, Transmission coefficient is analyzed.Total reflection coefficient, transmission coefficient are electromagnetic wave incident interface and transmissive interface multiple reflections and thoroughly The superposition penetrated:
It should be noted that the increase of hosqt media transmissivity is not the magnetic of electromagnetic wave as shown in analog result Fig. 6-Figure 13 Effect or electrical effect, but since optical grating construction changes reflection, transmission coefficient size and the phase at electromagnetic wave incident interface, so that Reflection reduces, and transmission increases.
In order to illustrate the accuracy and feasibility with transmission coefficient expression formula is reflected in this preferred embodiment, it is presented below The derivation process of expression formula.
It is calculated in order to facilitate the derivation of equation, the initial complex amplitude of the incoming electromagnetic wave field in this preferred embodiment isInitial complex amplitude hereinIt can be arbitrary value.
Figure 14 is please referred to, Figure 14 is that electromagnetic wave is by the incidence of grating side in the preferred embodiment of the present invention, through hosqt media When light path schematic diagram.Work as electromagnetic waveWhen being incident on grating and hosqt media, grating and hosqt media upper surface are equivalent to Light incidence interface.
Therefore:
In formula,
Reflection coefficient:
BecauseTherefore above formula are as follows:
Can similarly transmission coefficient be obtained:
So:
BecauseTherefore above formula are as follows:
By the above analog result it is found that no matter how screen periods change in 0.5-2.1mm, corresponding light can be found Grid width, so that overall permeation rate increases;When hosqt media thickness changes, it also can use this scheme and counted again Calculation obtains corresponding raster width and screen periods, and does not change in it in theory.
In the preferred embodiment, grating it is anti-reflection mainly due to optical grating construction change electromagnetic wave incident interface reflection, thoroughly Coefficient magnitude and phase are penetrated, so that total reflectance, transmission coefficient change.Total reflection, transmission coefficient expression formula are as follows:
Metal grating in the present invention can realize the antireflective effect of hosqt media in a big way, can be by metal light The width of metal grating needed for the period flexible choice of grid, this will bring great convenience to production application.
In conclusion although the present invention has been disclosed above in the preferred embodiment, but above preferred embodiment is not to limit The system present invention, those skilled in the art can make various changes and repair without departing from the spirit and scope of the present invention Change, therefore protection scope of the present invention is subject to the range that claim defines.

Claims (7)

1. a kind of permeability improvement device of incident electromagnetic wave, which is characterized in that including hosqt media and for changing electromagnetic wave incident circle The reflection in face, projection coefficient size and phase metal grating, the metal grating includes the bar shaped gold that several are parallel to each other Belong to, several described bullions are successively equidistantly arranged in the one of the hosqt media along the width direction of the hosqt media Side, the side where electromagnetic wave from the metal grating is incident, and successively penetrates the metal grating and hosqt media.
2. the permeability improvement device of incident electromagnetic wave as described in claim 1, which is characterized in that the width of the bullion is x, Center between two neighboring bullion is away from the period y for the metal grating, wherein y-x >=0.1mm.
3. the permeability improvement device of incident electromagnetic wave as described in claim 1, which is characterized in that the bullion is in cuboid Shape.
4. the permeability improvement device of the incident electromagnetic wave as described in any one of claim 1-3, which is characterized in that the substrate is situated between The material of matter is any one in silicon, polyethylene or quartz, and the material of the metal grating is appointing in gold, silver, copper or aluminium It anticipates one kind.
5. a kind of method that the permeability improvement device using the incident electromagnetic wave as described in claim 1-4 adjusts electromagnetic wave tansmittivity, It is characterized in that, which comprises
It determines the thickness of hosqt media, and determines that electromagnetic wave penetrates the target transmittance of hosqt media;
The width of metal grating and/or the period of metal grating are adjusted, the total transmission that electromagnetic wave penetrates hosqt media is calculated Rate;
The total transmittance and the target transmittance are compared, when the total transmittance is consistent with target transmittance, Then the period of the width of the metal grating and metal grating determines;When the total transmittance and target transmittance are inconsistent, Then continue to adjust width and/or the period of metal grating of the metal grating, until the total transmittance and target transmittance Until consistent.
6. method as claimed in claim 5, which is characterized in that the width and/or metal grating for adjusting metal grating The total transmittance that electromagnetic wave penetrates hosqt media is calculated in period, comprising:
Obtain the width of the preset metal grating and the period of metal grating;
Using the width of the metal grating and/or the period of metal grating, obtain describedWithSpecific value, and count It calculatesWithSpecific value, Using describedWithCalculate the total of electromagnetic wave Penetrate rate
Wherein, the air of metal grating side on hosqt media is defined as 0, hosqt media itself is defined as 1, by base The air of the bottom medium other side is defined as 2,Reflectivity when electromagnetic wave is propagated from 1 towards 0 is represented,Represent electromagnetic wave Reflectivity when being propagated from 1 towards 2,Transmissivity when electromagnetic wave is propagated from 0 towards 1 is represented,Electromagnetic wave is represented from 1 Transmissivity when being propagated towards 2;K is wave vector, and d is hosqt media thickness, n1For the refractive index of hosqt media itself, n0And n2? For the refractive index of air itself, and n0=n2
7. method as claimed in claim 6, which is characterized in that the width and/or metal grating for adjusting metal grating Period specifically includes:
It determines that the width size of the bullion described in each is constant, increases or reduce the center of two neighboring bullion Away from;
Or, determine that the center of two neighboring bullion is constant away from size, increase or reduce the bullion described in each Width;
Or, increase the width of the bullion described in each, at the same increase or reduce the center of two neighboring bullion away from;
Or, reduce the width of the bullion described in each, at the same increase or reduce the center of two neighboring bullion away from.
CN201811375652.8A 2018-11-19 2018-11-19 Anti-reflection device for incident electromagnetic wave and method for adjusting transmissivity by using anti-reflection device Active CN109239817B (en)

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