CN109239137A - A kind of miniature methane transducer and CH_4 detection method - Google Patents
A kind of miniature methane transducer and CH_4 detection method Download PDFInfo
- Publication number
- CN109239137A CN109239137A CN201811084814.2A CN201811084814A CN109239137A CN 109239137 A CN109239137 A CN 109239137A CN 201811084814 A CN201811084814 A CN 201811084814A CN 109239137 A CN109239137 A CN 109239137A
- Authority
- CN
- China
- Prior art keywords
- measuring cell
- heating element
- voltage
- methane
- shaped cantilever
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
A kind of miniature methane transducer and CH_4 detection method are used suitable for CH_4 detection, the further CH_4 detection suitable for underground coal mine.The methane transducer includes a heating element, one or more measuring cells, its heating element is individually heated to hot operation state, does not apply impressed current or voltage with the mutually independent measuring cell of heating element and directly measures voltage for detecting methane gas concentration.The methane transducer processing technology is compatible with CMOS technology.The simple low in energy consumption, high sensitivity of its structure, anti-interference are good, at low cost.
Description
Technical field
The present invention relates to a kind of miniature methane transducer and CH_4 detection methods, especially a kind of to make suitable for underground coal mine
Miniature methane transducer and CH_4 detection method.
Background technique
A kind of miniature methane transducer and preparation method thereof based on single heating element proposed before inventor
(ZL201410605995.4), measuring cell needs to apply electric current at work, then could detect the electricity on measuring cell
Pressure is to detect methane and its concentration.Electric current required for this needs additional circuit to provide, circuit are complicated；It needs to consume certain
Power is to provide current excitation.Also, it due to the otherness between different measuring cells, will be generated when applying identical electric current
Different voltage, consistency is poor, is not easy to measure, and is not easy to batch and calibrates.In addition to this, heating element is also unfavorable for applying
AC signal, even if applying exchange heating signal, can not directly measure on measuring cell to obtain frequency, phase, amplitude these
Exchange transducing signal abundant.
Summary of the invention
Technical problem: the object of the present invention is to provide a kind of structure is simple, using effect is good, do not depend on catalyst based on
Single heating element and with its mutually independent miniature methane transducer that can produce voltage and measuring cell measured directly
And CH_4 detection method.
Technical solution: to realize the above-mentioned technical purpose, miniature methane transducer of the invention, including support, heating element
And one or more mutually independent measuring cells；
The support includes substrate and set isolation oxidation silicon layer on substrate, and isolation oxidation silicon layer is equipped with monocrystalline silicon
Layer；
The heating element and each measuring cell include U-shaped cantilever and two fixations being arranged side by side on the support
End；The fixing end of the heating element and fixing end of measuring cell is mutually independent sets on the support, is not in contact with each other；It is described to add
Thermal element and measuring cell are set on the support by respective two fixing ends, the U-shaped cantilever I and measuring cell of heating element
The both ends of U-shaped cantilever II form two-terminal devices, the U-shaped cantilever I and measuring cell of heating element with two fixing ends respectively
U-shaped cantilever II suspension in air；The monocrystalline silicon layer of the fixing end is process by the monocrystalline silicon layer on support, and with it is solid
The monocrystalline silicon layer of rest part is not connected on the outer support of fixed end, and doped silicon layer is equipped among the monocrystalline silicon layer of fixing end, Gu
Silicon oxide layer can be equipped on the monocrystalline silicon layer of fixed end, electricity draws pad metal and passes through the window of silicon oxide layer and the doping of fixing end
Silicon layer, which is in contact, constitutes Ohmic contact；
The U-shaped cantilever I of the heating element be monocrystalline silicon layer constitute, be process by the monocrystalline silicon layer on support and with add
The monocrystalline silicon layer of two fixing ends of thermal element connects, and the pad metal is drawn from fixing end up on U-shaped cantilever I；
Mutually it is isolated between the heating element and the silicon structure of the silicon structure of measuring cell and each measuring cell,
Heating element, measuring cell silicon structure be also all isolated with other top monocrystalline silicon layers in isolation from oxygen SiClx and be not connected with；
The substrate is silicon or other materials that MEMS technology processing can be used；
It is designed on two support arms of the U-shaped cantilever I of the heating element and the gold that pad metal is extended is drawn by electricity
Belonging to layer, the metal layer development length on two support arms is identical and is no more than the half of support arm lengths,；The U of heating element
Two support arms of shape cantilever I it is of same size, it is identical and all narrow that the metal layer width extended of pad metal is drawn by electricity thereon
In the width of support arm；Two supported side by side arms of the U-shaped cantilever II are of same size；In a branch of the U-shaped cantilever II
Brace, which is equipped with, draws the metal layer that pad metal is extended, the length of of length no more than place support arm by electricity, and width is narrower than
The width of place support arm；
The fixing end is processed by top monocrystalline silicon layer and is formed；Silicon oxide layer is equipped on top monocrystalline silicon layer as needed,
When equipped with silicon oxide layer, it is equipped with electricity on silicon oxide layer and draws pad metal, electricity draws pad metal, passes through the silicon oxide layer
Window contacted with its lower mono-crystalline silicon layer, when not setting silicon oxide layer, on the monocrystalline silicon layer in fixing end directly setting electricity draw
Pad metal；The shape area that electricity draws pad metal is less than fixing end shape area.
The measuring cell is vertically set on heating element two sides, and the U-shaped cantilever of measuring cell is placed in heating element two
The two sides up and down of support arm, between the U-shaped cantilevered distal end outside of the measuring cell and corresponding heating element support arm outside
Distance be 2um to 10um, the metal layer on the midpoint of U-shaped cantilevered distal end and the support arm of heating element of the measuring cell
The end aligns；It is disposed vertically one or a measuring cell is respectively put in two sides up and down, place the identical measuring cell of two structures
When, described two measuring cells are symmetrical, the U-shaped cantilevered distal ends of two measuring cells and corresponding heating about heating element
The distance between element support arm is identical；
When the measuring cell is placed in ipsilateral heating element or the other side, measuring cell and heating element vertically axis
The distance between on the outside of align center above and below line, the U-shaped cantilevered distal end outside of measuring cell and the U-shaped cantilevered distal end of heating element
For 10um to 100um.
A kind of CH_4 detection method of miniature methane transducer, the steps include:
DC current is passed to heating element or applies DC voltage, the current or voltage applied is larger and makes heating unit
The U-shaped cantilevered distal end of part is heated to 550 DEG C or more of high temperature, and then obstructed electric current does not also apply voltage and directly measures measuring cell
Its both end voltage；Using two fixing end both end voltages of the measuring cell in the normal environment of no methane gas as with reference to electricity
Pressure；When concentration of methane gas changes, two fixing end end voltages of measuring cell change；According to the two of measuring cell
The end voltage of fixing end realizes the detection of methane concentration.
A kind of CH_4 detection method of miniature methane transducer, the steps include:
Alternating current or voltage are applied to heating element, the U-shaped cantilevered distal end of heating element is made to be heated to 550 DEG C or more
High temperature, to measuring cell, then obstructed electric current does not also apply voltage and directly measures its both end voltage signal；Concentration of methane gas changes
When change, frequency, phase, the amplitude of two fixing end both end voltage signals of the measuring cell change therewith, pass through inspection
The sensing of methane concentration is realized in the variation for surveying the frequency, phase, amplitude of the terminal voltage signal of two fixing ends of measuring cell；I.e. with
The both end voltage signal of two fixing ends of the measuring cell is as reference signal when not having methane, according to the two of measuring cell
A fixed terminal voltage signal obtains the concentration of methane compared with the reference signal, i.e., with two fixing end electricity of measuring cell
The frequency difference of pressure signal, phase difference value, Magnitude Difference obtain methane concentration.
A kind of CH_4 detection method of miniature methane transducer, the steps include:
Two sides are descended to be symmetrically arranged the identical measuring cell of two structures of A, B on the heating element, on the heating element
Apply DC current, two measuring cells of A, B generate different voltage, and different voltage differences represents different concentration, with no first
The voltage difference of two measuring cells of A, B when alkane is reference, and it is dense to obtain methane according to the voltage difference of two measuring cells of A, B
Degree, the sensing for realizing methane.
A kind of CH_4 detection method of miniature methane transducer, the steps include:
Two sides are descended to be symmetrically arranged the identical measuring cell of two structures of A, B on the heating element, on the heating element
Apply alternating current, the electric voltage frequencies of two measuring cells of A, B, phase are all respectively present difference between amplitude, with no methane
When difference as benchmark, be utilized respectively the respective difference of frequency, phase, amplitude of the voltage of two measuring cells of A, B
Different methane concentrations is represented, to realize that methane senses.
A kind of CH_4 detection method of miniature methane transducer, the steps include:
Single measuring cell is set near heating element, it is identical, square when quickly applying size in short-term in heating element
When to opposite, action time and interval time electric current all the same, the corresponding voltage in the single measuring cell both ends is different, no
Same voltage difference represents different concentration, realizes that methane senses using voltage difference as sensitive signal；I.e. with no methane when institute
The voltage difference of measuring cell is stated as benchmark, methane concentration is obtained according to the voltage difference of measuring cell.
The utility model has the advantages that
1, catalyst and catalytic carrier are not used, due to not using catalyst and catalytic carrier, sensor performance is not urged
The problems such as influence of agent, sensitivity decrease caused by being reduced there is no catalyst activity, poisoning, activation；
2, heating element and measuring cell are mutually indepedent, and without direct electrical connection, only one heating element needs to heat
To high temperature；Measuring cell can produce without impressed current or voltage and output voltage work, reduces the power consumption of sensor.
Advantage: the miniature methane transducer provided by the invention based on single heating element, without catalyst
Realize the detection of low-methoxyl alkane, the present invention can make methane transducer have performance stable, long using silicon as heating material and sensing material
The good advantage of phase stability, and have the shortcomings that anti-poisoning, carbon distribution, activation；The power consumption of methane transducer of the invention is main
It determines that measuring cell does not consume power consumption by the power consumption of the single heating element used, reduces the overall power consumption of sensor.This hair
The measuring cell of bright methane transducer directly generates voltage signal without outer electrical impulse, has preferably reacted methane letter
Breath, methane transducer of the invention can obtain being based on frequency, phase, amplitude when applying exchange heating signal to heating element
Methane sensitive signal, provide transducing signal abundant, and the interference free performance of transducing signal will be improved.
A heating element and measuring cell for methane transducer of the invention is mutually indepedent, and measuring cell detects methane gas
Bulk concentration；Both heating element and measuring cell mutually separate in structure, significantly more efficient to solve use there is no electrical connection
The problem of one element is used as heating element and measuring cell to be unable to accurately control heating, can not heat and measure simultaneously simultaneously.
Measuring cell of the invention does not need additional current excitation, and measuring cell does not consume power, solves the low function of methane sensing
Consumption problem.Measuring cell of the invention can directly generate voltage sensing signal, when applying exchange heating signal on heating element,
The transducing signal that frequency, phase, amplitude are expressed can be directly generated on measuring cell, provide sensitivity abundant for methane sensing
Signal.
Detailed description of the invention
Fig. 1 is the schematic top plan view of miniature methane transducer of the invention.
Fig. 2 is the Section A-A cross-sectional view of the fixing end of heating element and measuring cell of the invention.
In figure: 11- substrate, 12- isolation oxidation silicon layer, 13- monocrystalline silicon layer, 22- pad metal, 23- silicon oxide layer, 100-
Support, 101- heating element, 102- measuring cell, 1001- fixing end, 1012-U shape cantilever I, 1022-U shape cantilever II
Specific embodiment
One embodiment of the present of invention is further described with reference to the accompanying drawing:
As shown in Figure 1, miniature methane transducer of the invention, including support 100, heating element 101 and one or more
A mutually independent measuring cell 102；
The support 100 includes substrate 11 and the isolation oxidation silicon layer 12 that is located on substrate 11, on isolation oxidation silicon layer 12
Side is equipped with monocrystalline silicon layer 13；
The heating element 101 and each measuring cell 102 include the U-shaped cantilever being disposed side by side on support 100 and
Two fixing ends 1001；The fixing end 1001 of the heating element 101 and the fixing end 1001 of measuring cell 102 are mutually independent
It is located on support 100, is not in contact with each other；The heating element 101 and measuring cell 102 pass through respective two fixing ends 1001
It is located on support 100, the both ends difference of the U-shaped cantilever II 1022 of the U-shaped cantilever I 1012 and measuring cell 102 of heating element 101
Two-terminal device is formed with two fixing ends 1001, the U-shaped cantilever I 1012 of heating element 101 and the U-shaped of measuring cell 102 are outstanding
Arm II 1022 suspends in air；The monocrystalline silicon layer 13 of the fixing end 1001 by support 100 monocrystalline silicon layer 13 processing and
At, and be not connected with the monocrystalline silicon layer 13 of rest part on the outer support of fixing end 100, the monocrystalline silicon layer 13 of fixing end 1001
Centre is equipped with doped silicon layer 24, can be equipped with silicon oxide layer 23 on the monocrystalline silicon layer 13 of fixing end 1001, electricity draws pad metal 22
It is in contact by the window of silicon oxide layer 23 with the doped silicon layer 24 of fixing end 1001 and constitutes Ohmic contact；
The fixing end 1001 is formed by the processing of top monocrystalline silicon layer 13；Oxygen is equipped on top monocrystalline silicon layer 13 as needed
SiClx layer 23 when being equipped with silicon oxide layer 23, electricity is equipped on silicon oxide layer 23 and draws pad metal 22, electricity draws pad metal
22, it is contacted by the window of the silicon oxide layer 23 with its lower mono-crystalline silicon layer 13, when not setting silicon oxide layer 23, in fixing end 1001
On monocrystalline silicon layer 13 on directly setting electricity draw pad metal 22；The shape area that electricity draws pad metal 22 is less than fixing end
1001 shape areas；
The U-shaped cantilever I 1012 of the heating element 101 is the composition of monocrystalline silicon layer 13, by the monocrystalline silicon layer 13 on support 100
It is process and is connect with the monocrystalline silicon layer 13 of two fixing ends 1001 of heating element 101, the pad metal 22 is from fixation
It draws until on U-shaped cantilever I 1012 at end 1001；
Between the silicon structure of the silicon structure and each measuring cell 102 of the heating element 101 and measuring cell 102
It is mutually isolated, heating element 101, measuring cell 102 silicon structure also all with other top layer monocrystalline in isolation from oxygen SiClx 12
The isolation of silicon layer 13 is not connected with；The substrate 11 is silicon or other materials that MEMS technology processing can be used；
It is designed on two support arms of the U-shaped cantilever I 1012 of the heating element 101 and is prolonged by electricity extraction pad metal 22
The metal layer of stretching, the metal layer development length on two support arms is identical and is no more than the half of support arm lengths,；Add
Of same size, the gold extended thereon by electricity extraction pad metal 22 of two support arms of the U-shaped cantilever I 1012 of thermal element 101
Category layer is of same size and is all narrower than the width of support arm；Two supported side by side arms of the U-shaped cantilever II 1022 are of same size；?
One support arm of the U-shaped cantilever II 1022, which is equipped with, draws the metal layer that pad metal 22 is extended by electricity, and length does not surpass
The length of support arm where crossing, the width of support arm where width is narrower than.
The measuring cell 102 is vertically set on 101 two sides of heating element, and the U-shaped cantilever 1022 of measuring cell 102 is placed
In the two sides up and down of 101 liang of support arms of heating element, on the outside of 1022 end of U-shaped cantilever of the measuring cell 102 with it is corresponding
It is 2um to 10um the distance between on the outside of 101 support arm of heating element, 1022 end of U-shaped cantilever of the measuring cell 102
Midpoint aligns with the metal layer end on the support arm of heating element 101；It is disposed vertically one or two sides respectively puts one up and down
Measuring cell 102, when placing the identical measuring cell 102 of two structures, described two measuring cells 102 are about heating element
101 be it is symmetrical, between 1022 end of U-shaped cantilever of two measuring cells 102 and corresponding 101 support arm of heating element away from
From identical；
When the measuring cell 102 is placed in ipsilateral heating element 101 or the other side, measuring cell 102 and heating element
101 vertically central axes align centers up and down, the U on the outside of 1022 end of U-shaped cantilever of measuring cell 102 with heating element 101
It is 10um to 100um the distance between on the outside of 1012 end of shape cantilever.
A kind of CH_4 detection method of miniature methane transducer, including following five kinds of methods；
Method (one):
DC current is passed to heating element 101 or applies DC voltage, the current or voltage applied is larger and makes to add
1012 heating tail end of U-shaped cantilever of thermal element 101 is to 550 DEG C or more of high temperature, and then obstructed electric current does not also apply measuring cell 102
Voltage and directly measure its both end voltage；With two fixing ends of the measuring cell 102 in the normal environment of no methane gas
1001 both end voltages are as the reference voltage；When concentration of methane gas changes, two 1001 ends of fixing end electricity of measuring cell 102
Pressure changes；The detection of methane concentration is realized according to the end voltage of the two of measuring cell 102 fixing ends 1001.
Method (two):
Alternating current or voltage are applied to heating element 101, arrive 1012 heating tail end of U-shaped cantilever of heating element 101
550 DEG C or more of high temperature, to measuring cell 102, then obstructed electric current does not also apply voltage and directly measures its both end voltage signal；
When concentration of methane gas changes, frequency, the phase, width of two fixing ends, the 1001 both end voltage signal of the measuring cell 102
Degree changes therewith, frequency, phase, the amplitude of the terminal voltage signal by detecting 102 two fixing ends 1001 of measuring cell
Variation realize methane concentration sensing；The both ends of two fixing ends 1001 of the measuring cell 102 when i.e. with no methane
Voltage signal is as reference signal, according to the two of measuring cell 102 1001 voltage signals of fixing end and the reference signal
Compare the concentration for obtaining methane, i.e., with the frequency difference of two 1001 voltage signals of fixing end of measuring cell 102, phase difference
Value, Magnitude Difference obtain methane concentration；Composition data after voltage data can be measured by the methane environment to various concentration in advance
Then library is compared in actual use to obtaining current methane concentration data, or pass through calibration value when calibration, calibration
Obtained formula or fitting formula calculates current methane concentration according to current test value；
Method (three):
It is symmetrically arranged the identical measuring cell 102 of two structures of A, B in about 101 two sides of heating element, is being heated
Apply DC current on element 101, two measuring cells 102 of A, B generate different voltage, and different voltage differences represents different
The voltage difference of concentration, two measuring cells 102 of A, B when with no methane is reference, according to two measuring cells 102 of A, B
The sensing that voltage difference obtains methane concentration, realizes methane；
Method (four):
It is symmetrically arranged the identical measuring cell 102 of two structures of A, B in about 101 two sides of heating element, is being heated
Apply alternating current on element 101, the electric voltage frequencies of two measuring cells 102 of A, B, phase are all respectively present difference between amplitude
Value, difference when using no methane are utilized respectively frequency, the phase of the voltage of two measuring cells 102 of A, B as benchmark
Position, the respective difference of amplitude represent different methane concentrations, to realize that methane senses.
Method (five):
Single measuring cell 102 is set near heating element 101, it is big when quickly applying in short-term in heating element 101
When small identical, contrary, action time and interval time electric current all the same, single 102 both ends of measuring cell are corresponding
Voltage it is different, different voltage differences represents different concentration, realizes methane sensing using voltage difference as sensitive signal；I.e. with
It is dense to obtain methane according to the voltage difference of measuring cell 102 as benchmark for the voltage difference of the measuring cell 102 when not having methane
Degree.
Claims (8)
1. a kind of miniature methane transducer, it is characterised in that: it includes support (100), heating element (101) and one or more
A mutually independent measuring cell (102)；
The support (100) includes substrate (11) and the isolation oxidation silicon layer (12) that is located on substrate (11), isolation oxidation silicon layer
(12) top is equipped with monocrystalline silicon layer (13)；
The heating element (101) and each measuring cell (102) include the U-shaped cantilever being disposed side by side on support (100)
With two fixing ends (1001)；The fixing end (1001) of the heating element (101) and the fixing end of measuring cell (102)
(1001) mutually independent to be located on support (100), it is not in contact with each other；The heating element (101) and measuring cell (102) are logical
It crosses respective two fixing ends (1001) to be located on support (100), the U-shaped cantilever I (1012) and measurement member of heating element (101)
The both ends of the U-shaped cantilever II (1022) of part (102) form two-terminal device, heating element with two fixing ends (1001) respectively
(101) U-shaped cantilever II (1022) suspension of U-shaped cantilever I (1012) and measuring cell (102) is in air；The fixing end
(1001) monocrystalline silicon layer (13) is process by the monocrystalline silicon layer (13) on support (100), and the outer support with fixing end
(100) monocrystalline silicon layer (13) of rest part is not connected on, and doping is equipped among the monocrystalline silicon layer (13) of fixing end (1001)
Silicon layer (24) can be equipped with silicon oxide layer (23) on the monocrystalline silicon layer (13) of fixing end (1001), and it is logical that electricity draws pad metal (22)
The window of peroxidating silicon layer (23) is in contact with the doped silicon layer (24) of fixing end (1001) and constitutes Ohmic contact；
The U-shaped cantilever I (1012) of the heating element (101) is monocrystalline silicon layer (13) composition, by the monocrystalline silicon on support (100)
Layer (13) is process and connect with the monocrystalline silicon layer (13) of two fixing ends (1001) of heating element (101), the pad
Metal (22) is drawn from fixing end (1001) up on U-shaped cantilever I (1012)；
Between the silicon structure of the silicon structure and each measuring cell (102) of the heating element (101) and measuring cell (102)
Mutually be isolated, heating element (101), measuring cell (102) silicon structure also all with it is other on isolation oxidation silicon layer (12)
Top monocrystalline silicon layer (13) isolation be not connected with；The substrate (11) is silicon or other materials that MEMS technology processing can be used
Material；
It is designed on two support arms of the U-shaped cantilever I (1012) of the heating element (101) and pad metal (22) is drawn by electricity
The metal layer extended, the metal layer development length on two support arms is identical and is no more than the half of support arm lengths,；
Two support arms of the U-shaped cantilever I (1012) of heating element (101) it is of same size, thereon by electricity draw pad metal (22) prolong
The metal layer width of stretching is identical and is all narrower than the width of support arm；Two supported side by side arms of the U-shaped cantilever II (1022)
It is of same size；It is equipped on the support arm of the U-shaped cantilever II (1022) and pad metal (22) are drawn by electricity extends
Metal layer, the length of of length no more than place support arm, the width of support arm where width is narrower than.
2. miniature methane transducer according to claim 1, it is characterised in that: the fixing end (1001) is by top layer monocrystalline
Silicon layer (13) processing is formed；Silicon oxide layer (23) are equipped with as needed on top monocrystalline silicon layer (13), are equipped with silicon oxide layer (23)
When, electricity is equipped on silicon oxide layer (23) and draws pad metal (22), and electricity draws pad metal (22), passes through the silicon oxide layer
(23) window is contacted with its lower mono-crystalline silicon layer (13), monocrystalline silicon when not setting silicon oxide layer (23), on fixing end (1001)
Directly setting electricity draws pad metal (22) on layer (13)；The shape area that electricity draws pad metal (22) is less than fixing end
(1001) shape area.
3. miniature methane transducer according to claim 1, it is characterised in that: the measuring cell (102) is vertically arranged
In heating element (101) two sides, the U-shaped cantilever (1022) of measuring cell (102) is placed in (101) two support arm of heating element
Upper and lower two sides, on the outside of U-shaped cantilever (1022) end of the measuring cell (102) with corresponding heating element (101) support arm
The distance between outside is 2um to 10um, the midpoint of U-shaped cantilever (1022) end of the measuring cell (102) and heating unit
The metal layer end on the support arm of part (101) aligns；It is disposed vertically one or a measuring cell is respectively put in two sides up and down
(102), when placing two measuring cell (102), described two measuring cells (102) about heating element (101) be it is symmetrical,
The distance between U-shaped cantilever (1022) end of two measuring cells (102) and corresponding heating element (101) support arm phase
Together；
When the measuring cell (102) is placed in ipsilateral heating element (101) or the other side, measuring cell (102) and heating unit
Part (101) vertically central axes align center up and down, on the outside of U-shaped cantilever (1022) end of measuring cell (102) and heating unit
It is 10um to 100um the distance between on the outside of U-shaped cantilever (1012) end of part (101).
4. a kind of CH_4 detection method of the miniature methane transducer using miniature methane transducer described in claim 1, special
Sign is:
DC current is passed to heating element (101) or applies DC voltage, the current or voltage applied is larger and makes to heat
U-shaped cantilever (1012) heating tail end of element (101) is to 550 DEG C or more of high temperature, and then obstructed electric current is not also for measuring cell (102)
Apply voltage and directly measures its both end voltage；
Using two fixing end (1001) both end voltages of the measuring cell (102) in the normal environment of no methane gas as reference
Voltage；When concentration of methane gas changes, two fixing ends (1001) end voltage of measuring cell (102) changes；According to
The end voltage of two fixing ends (1001) of measuring cell (102) realizes the detection of methane concentration.
5. a kind of CH_4 detection method of the miniature methane transducer using miniature methane transducer described in claim 1: to adding
Thermal element (101) applies alternating current or voltage, make U-shaped cantilever (1012) heating tail end of heating element (101) to 550 DEG C with
On high temperature, to measuring cell (102), then obstructed electric current does not also apply voltage and directly measures its both end voltage signal；Methane gas
When bulk concentration changes, frequency, phase, the amplitude of two fixing end (1001) both end voltage signals of the measuring cell (102)
It changes therewith, frequency, the phase, width of the terminal voltage signal by detecting (102) two fixing ends (1001) of measuring cell
The sensing of methane concentration is realized in the variation of degree；Two fixing ends (1001) of the measuring cell (102) when i.e. with no methane
Both end voltage signal as reference signal, according to two fixing end (1001) voltage signals of measuring cell (102) with it is described
The comparison of reference signal obtains the concentration of methane, i.e., with the frequency of two fixing end (1001) voltage signals of measuring cell (102)
Rate difference, phase difference value, Magnitude Difference obtain methane concentration.
6. a kind of CH_4 detection method of the miniature methane transducer using miniature methane transducer described in claim 1: adding
Two sides are respectively arranged two measuring cells (102) of A, B to thermal element (101) up and down, apply direct current on heating element (101)
Stream, two measuring cells (102) of A, B generate different voltage, and different voltage differences represents different concentration, when with no methane
A, the voltage difference of two measuring cells (102) of B is reference, obtains first according to the voltage difference of two measuring cells (102) of A, B
Alkane concentration, the sensing for realizing methane.
7. a kind of CH_4 detection method of the miniature methane transducer using miniature methane transducer described in claim 1: adding
Two sides are respectively arranged two measuring cells (102) of A, B to thermal element (101) up and down, apply alternating current on heating element (101)
Stream, the electric voltage frequencies of two measuring cells (102) of A, B, phase are all respectively present difference between amplitude, when with no methane
Difference is utilized respectively the respective difference of frequency, phase, amplitude of the voltage of two measuring cells (102) of described A, B as benchmark
Different methane concentrations is represented, to realize that methane senses.
8. a kind of CH_4 detection method of the miniature methane transducer using miniature methane transducer described in claim 1: adding
Single measuring cell (102) are nearby arranged in thermal element (101), when heating element (101) quickly in short-term apply size it is identical,
When contrary, action time and interval time electric current all the same, the corresponding voltage in single measuring cell (102) both ends
Difference, different voltage differences represent different concentration, realize that methane senses using voltage difference as sensitive signal；I.e. with no first
The voltage difference of the measuring cell (102) obtains methane concentration according to the voltage difference of measuring cell (102) as benchmark when alkane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811084814.2A CN109239137B (en) | 2018-09-17 | 2018-09-17 | Miniature methane sensor and methane detection method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811084814.2A CN109239137B (en) | 2018-09-17 | 2018-09-17 | Miniature methane sensor and methane detection method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109239137A true CN109239137A (en) | 2019-01-18 |
| CN109239137B CN109239137B (en) | 2019-12-06 |
Family
ID=65058883
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811084814.2A Active CN109239137B (en) | 2018-09-17 | 2018-09-17 | Miniature methane sensor and methane detection method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109239137B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112113926A (en) * | 2020-08-21 | 2020-12-22 | 中国计量大学 | Method for reducing measurement error of infrared methane sensor based on improved GWO-SVM |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58103653A (en) * | 1981-12-15 | 1983-06-20 | Matsushita Electric Ind Co Ltd | Gas sensor and its production |
| JPH0196548A (en) * | 1987-10-07 | 1989-04-14 | Sharp Corp | Sensor element |
| JPH0684604A (en) * | 1991-09-19 | 1994-03-25 | Mitsuteru Kimura | Microheater |
| CN102221568A (en) * | 2011-03-30 | 2011-10-19 | 中国矿业大学 | Room temperature gas sensor with double-clamped beam |
| CN102226776A (en) * | 2011-03-30 | 2011-10-26 | 中国矿业大学 | Cantilever room temperature gas sensor |
| CN103472097A (en) * | 2013-09-26 | 2013-12-25 | 中国矿业大学 | Micro gas sensor recoverable for repeated preparation and preparation method thereof |
| CN103499617A (en) * | 2013-09-26 | 2014-01-08 | 中国矿业大学 | Monolithic micro-gas sensor and manufacturing method thereof |
| CN104316574A (en) * | 2014-10-31 | 2015-01-28 | 中国矿业大学 | Methane sensor based on single heating element, preparation method and application |
| CN106644776A (en) * | 2016-10-12 | 2017-05-10 | 安徽工业大学 | Method for detecting drop strength of green pellets under motion state |
-
2018
- 2018-09-17 CN CN201811084814.2A patent/CN109239137B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58103653A (en) * | 1981-12-15 | 1983-06-20 | Matsushita Electric Ind Co Ltd | Gas sensor and its production |
| JPH0196548A (en) * | 1987-10-07 | 1989-04-14 | Sharp Corp | Sensor element |
| JPH0684604A (en) * | 1991-09-19 | 1994-03-25 | Mitsuteru Kimura | Microheater |
| CN102221568A (en) * | 2011-03-30 | 2011-10-19 | 中国矿业大学 | Room temperature gas sensor with double-clamped beam |
| CN102226776A (en) * | 2011-03-30 | 2011-10-26 | 中国矿业大学 | Cantilever room temperature gas sensor |
| CN103472097A (en) * | 2013-09-26 | 2013-12-25 | 中国矿业大学 | Micro gas sensor recoverable for repeated preparation and preparation method thereof |
| CN103499617A (en) * | 2013-09-26 | 2014-01-08 | 中国矿业大学 | Monolithic micro-gas sensor and manufacturing method thereof |
| CN104316574A (en) * | 2014-10-31 | 2015-01-28 | 中国矿业大学 | Methane sensor based on single heating element, preparation method and application |
| CN106644776A (en) * | 2016-10-12 | 2017-05-10 | 安徽工业大学 | Method for detecting drop strength of green pellets under motion state |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112113926A (en) * | 2020-08-21 | 2020-12-22 | 中国计量大学 | Method for reducing measurement error of infrared methane sensor based on improved GWO-SVM |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109239137B (en) | 2019-12-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105928567B (en) | Silicon substrate gas sensitization chip of integrated Temperature Humidity Sensor and preparation method thereof | |
| Dong et al. | Fabrication of a micromachined two-dimensional wind sensor by Au–Au wafer bonding technology | |
| CN105229451A (en) | The hydrogen gas sensor with concentrating function and the hydrogen gas sensor probe wherein used | |
| CN104482971B (en) | A kind of thermal flow rate sensor based on MEMS technology | |
| CN103308223A (en) | Device and method for testing wall shear stress based on flexible heat-sensitive sensors | |
| CN207472439U (en) | A kind of adhesive type temperature sensor | |
| CN104316574B (en) | A kind of methane transducer and preparation method and application based on single heating element heater | |
| CN208847684U (en) | It is a kind of for measuring the sensor of absolute humidity | |
| CN109239137A (en) | A kind of miniature methane transducer and CH_4 detection method | |
| CN111238672B (en) | Superconducting tape dynamic temperature measurement method based on magnetic microscopy | |
| Xu et al. | A high heating efficiency two-beam microhotplate for catalytic gas sensors | |
| CN207742252U (en) | A kind of silver aluminium paste intersection resistance value test device | |
| CN205785343U (en) | The silica-based gas sensitization chip of integrated Temperature Humidity Sensor | |
| CN117471044A (en) | Gas sensor, sensor preparation method and detection method | |
| Xu et al. | Behaviour of a catalytic combustion methane gas sensor working on pulse mode | |
| CN203519540U (en) | Single-chip micro-gas sensor | |
| CN204154676U (en) | A kind of methane transducer based on flip chip bonding encapsulation | |
| CN204154679U (en) | A kind of methane transducer based on single heating element | |
| CN103499617A (en) | Monolithic micro-gas sensor and manufacturing method thereof | |
| CN107449798B (en) | The production method of gas sensor for methane gas detection | |
| CN104316577A (en) | Methane sensor based on flip-chip packaging, as well as preparation method and application thereof | |
| CN201628589U (en) | Temperature measurement acquiring device for annular detected parts | |
| CN202057621U (en) | Device for measuring heat storage coefficients of materials with harmonic wave method based on independent sensor | |
| Xu et al. | A low power catalytic combustion gas sensor based on a suspended membrane microhotplate | |
| CN1936513A (en) | Gas-mass-flow up-down-stream temperature distribution secondary differential measuring method, sensor and flowmeter |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |