CN109216231A - The equipment for being used to form pattern - Google Patents
The equipment for being used to form pattern Download PDFInfo
- Publication number
- CN109216231A CN109216231A CN201810693050.0A CN201810693050A CN109216231A CN 109216231 A CN109216231 A CN 109216231A CN 201810693050 A CN201810693050 A CN 201810693050A CN 109216231 A CN109216231 A CN 109216231A
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- Prior art keywords
- component
- nozzle unit
- form pattern
- mounting hole
- unit
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Coating Apparatus (AREA)
Abstract
The present invention provides a kind of equipment for being used to form pattern.The equipment for being used to form pattern includes: support unit, processing object are placed on support unit；Nozzle unit is placed on support unit so that solution is discharged；Block fixture is placed on support unit and has mounting hole to install nozzle unit；And fixing component, nozzle unit is limited in mounting hole.Therefore, when replacing nozzle, nozzle can be improved on position repeatability.
Description
Technical field
This disclosure relates to a kind of equipment for being used to form pattern, and working as pattern is used to form more particularly to a kind of
The equipment for being used to form pattern of position repeatability can be improved when replacing nozzle.
Background technique
For manufacturing semiconductor, flat-panel monitor (flat panel displays；FPD), printed circuit board (printed
circuit boards；) etc. PCB various facilities include prosthetic device, and the prosthetic device can be by using electrofluid
Dynamics (electrohydrodynamics；EHD) if electrically conductive ink is discharged on substrate to be formed in the form of fine drop
The linear pattern of dry micron (μm) width.
Since the EHD nozzle (hereinafter referred to as " nozzle unit ") of prosthetic device as described above has expendable,
After the repair process for executing pre-determined number, nozzle unit used must be replaced by new nozzle unit.
According to prior art prosthetic device and do not have when replace nozzle unit holding nozzle unit position can weigh
The structure of renaturation.Therefore, the end of the nozzle of replaced new nozzle unit is limited in from the opticator of prosthetic device
Deviate observation area.In addition, the visual zone of optical unit is difficult to the end with the nozzle of nozzle unit after replacing nozzle unit
Portion's matching.
The background technique of the disclosure is disclosed in following patent document.
[existing technical literature]
[patent document]
(patent document 1) KR10-2016-0109631 A
Summary of the invention
The disclosure provides a kind of equipment for being used to form pattern, and the equipment for being used to form pattern can be in replacement nozzle
Shi Gaijin position repeatability.
Accoding to exemplary embodiment, a kind of equipment being used to form pattern, the equipment discharge for being used to form pattern are molten
Liquid is to form pattern, and the equipment for being used to form pattern includes: support unit, processing object are placed on support unit；Spray
Mouth unit is placed on support unit so that solution is discharged；Block fixture is placed on support unit and has mounting hole to install
Nozzle unit；And fixing component, it is configured to for nozzle unit being limited in mounting hole.
In the equipment for being used to form pattern of embodiment according to the present invention, fixing component can be placed in nozzle unit with
On at least one surface in mounting hole surface facing with each other.
In the equipment for being used to form pattern of embodiment according to the present invention, fixing component may include hook shape component, institute
It states hook shape component and is positioned at least one that surround the inner wall of at least part of the external peripheral surface of nozzle unit or mounting hole
Point, and hook shape component can be contacted with the external peripheral surface of the inner wall of mounting hole or nozzle unit with by the position restriction of nozzle unit
In mounting hole.
In the equipment for being used to form pattern of embodiment according to the present invention, fixing component may include hook groove, make described
Hook groove it is recessed be fitted around at least part of the inner wall in hole or the external peripheral surface of nozzle unit at least part so that
Hook shape component must be can be inserted into.
In the equipment for being used to form pattern of embodiment according to the present invention, fixing component may include: coupling slot, from spray
At least one position of the external peripheral surface of mouth unit is recessed；And coupling protrusion, it is installed at least the one of the inner wall of mounting hole
On a position and it is elastically supported so that coupling protrusion can be inserted into coupling slot.
In the equipment for being used to form pattern of embodiment according to the present invention, coupling protrusion can be mounted with nozzle list
The vertically and horizontally upper central axis relative to nozzle unit that the direction of member intersects is spaced apart with towards nozzle unit
It is prominent.
In the equipment for being used to form pattern of embodiment according to the present invention, block fixture may include multiple pieces, described more
A block detachably couples so that one side can be opened relative to mounting hole, and pacifying in multiple pieces relative to mounting hole
It sets on another piece that at side block can be rotatably mounted at the other side.
In the equipment for being used to form pattern of embodiment according to the present invention, block fixture may include: bottom piece is provided with
It is parallel to a surface in the direction for being mounted with nozzle unit；Upper mass upwardly extends in the side for being mounted with nozzle unit, is located at
On one region on one surface of bottom piece；And coverage block, it is rotatably mounted in upper mass so as under
Another region on one surface of portion's block is dismantled, and wherein mounting hole is upward through bottom piece in the side for being mounted with nozzle unit
One surface on upper mass and coverage block each of surface facing with each other.
In the equipment for being used to form pattern of embodiment according to the present invention, one of one surface of bottom piece
Region and another region can be by upwardly extending in the side for being mounted with nozzle unit, and are located on one surface of bottom piece
Region line separates.
In the equipment for being used to form pattern of embodiment according to the present invention, block fixture may include locking component, described
Locking component is installed to be upward through upper mass and coverage block, locking component in the side intersected with the direction for being mounted with nozzle unit
There can be screw thread on the end that it passes through upper mass and be locked to upper mass, and locking component can across a part of coverage block
It across coverage block and slidingly supports, and the screw thread corresponding to the screw thread on the end of locking component may be provided at the two of perforation
It holds on the end far from upper mass, the perforation is defined in coverage block so that locking component passes through.
In the equipment for being used to form pattern of embodiment according to the present invention, nozzle unit may include: jet element, peace
The channel for being placed on support unit and being passed through in a manner of electrohydrodynamics with solution；Pin member is placed in jet element
In channel；And connector component, pin member is connected to supply electric power.
In the equipment for being used to form pattern of embodiment according to the present invention, nozzle unit may include: Rule component, peace
It is filled with and jet element is connected to connector component；And joint component, be placed in Rule component with support pin member to
With the central axial alignment of jet element, wherein pin member can be fixably attached to the inner periphery on joint component and with jet element
Surface is spaced apart.
In the equipment for being used to form pattern of embodiment according to the present invention, nozzle unit may include fixation member, institute
State in the inside that fixation member is inserted into connector component at the side opposite with Rule component relative to connector component and
It is installed on the inside of connector component and has the end contacted with joint component, wherein one end of joint component can be with Rule
The inner surface of component contacts, and the other end of joint component can be spaced apart with the inner circumferential surface of connector component and and fixed part
The end contact of part is to fixed position.
In the equipment for being used to form pattern of embodiment according to the present invention, jet element may include glass and sapphire
At least one of, pin member may include at least one of tungsten, gold, silver and copper conductive material, joint component, connector portion
At least part of part and the fixation member being placed in connector component includes conductive material, and solution may include conductive oil
Ink.
Detailed description of the invention
Being described below for carrying out in conjunction with the accompanying drawings can be more fully understood exemplary embodiment, in the drawing:
Fig. 1 is the schematic diagram of the equipment for being used to form pattern accoding to exemplary embodiment.
Fig. 2 is the schematic diagram of nozzle unit accoding to exemplary embodiment.
Fig. 3 is the side cross-sectional view of nozzle unit accoding to exemplary embodiment.
Fig. 4 is the schematic diagram of nozzle unit and block fixture accoding to exemplary embodiment.
Fig. 5 is the partial view of block fixture accoding to exemplary embodiment.
Fig. 6 be explanation accoding to exemplary embodiment sheared when installing nozzle unit block fixture the case where side view
Cross-sectional view.
Fig. 7 is to illustrate that the auxiliary line A when installing nozzle unit along Fig. 4 accoding to exemplary embodiment is intercepted to line A'
The elevational cross-section figure of the case where block fixture.
Fig. 8 is the auxiliary line A to line A' section when the side in block fixture for illustrating accoding to exemplary embodiment is opened along Fig. 4
The elevational cross-section figure of the case where block fixture taken.
Specific embodiment
Hereinafter, specific embodiment will be described in detail referring to attached drawing.However, the present invention can carry out body in different forms
It is existing, and should not be construed as limited by embodiments described herein.But it theses embodiments are provided so that of the invention will be
It is thorough and complete, and the scope of the present invention will be fully conveyed to those skilled in the art by these embodiments.
In the accompanying drawings, the size of layer and region is exaggerated for clarity purposes.Identical drawing reference numeral refers to identical in the text
Element.
Fig. 1 is the schematic diagram of the equipment for being used to form pattern accoding to exemplary embodiment, and Fig. 2 is according to exemplary implementation
The schematic diagram of the nozzle unit of example, and Fig. 3 is the side cross-sectional view of nozzle unit accoding to exemplary embodiment.
In addition, Fig. 4 is the schematic diagram of nozzle unit accoding to exemplary embodiment and block fixture, Fig. 5 is according to exemplary
The partial view of the block fixture of embodiment, and Fig. 6 is to illustrate being sheared when installing nozzle unit accoding to exemplary embodiment
Block fixture the case where side cross-sectional view.
In addition, Fig. 7 be illustrate accoding to exemplary embodiment when installing nozzle unit along the auxiliary line A of Fig. 4 to line A'
The elevational cross-section figure of the case where block fixture of interception, and Fig. 8 is the side in block fixture illustrated accoding to exemplary embodiment
The elevational cross-section figure of the case where when opening along the block fixture that the auxiliary line A of Fig. 4 to line A' is intercepted.
Hereinafter, exemplary embodiment retouches the facility based on ink repair process and FPD manufacturing field in detail
It states.However, the disclosure can be applied to for various fluent materials to be discharged to be processed by using electrohydrodynamics phenomenon
Object (hereinafter referred to as processing object) on form the various methods and facility of pattern.
Hereinafter, depositing device accoding to exemplary embodiment will be described in detail referring to figs. 1 to Fig. 5.According to example
Property embodiment the equipment for being used to form pattern can be used to form by using electrohydrodynamics phenomenon be discharged solution system
The equipment for the pattern made, and may include: support unit 100, so that processing object 10 is placed thereon；Nozzle unit 200, placement
In on support unit 100 solution to be discharged on processing object；Block fixture 300, mounting hole H1It is defined in described piece of fixture 300
In to allow to install nozzle unit 200, described piece of fixture 300 be placed on support unit 100；And fixing component, by nozzle
Unit 200 is limited to mounting hole H1It is interior.Herein, fixing component may include that hook shape component 241, first couples protrusion 360 and the
Two couple at least one of protrusions 370 and further include at least one of hook groove 321 and coupling slot 252.
In addition, the equipment for being used to form pattern accoding to exemplary embodiment may include: installation unit 400, block fixture 300
It is installed on the installation unit 400；Power supply unit 500 is connected to nozzle unit 200；Lighting unit 610 is placed in support
The light for photographing to the pattern on processing object is generated under unit 100；Optical unit 620, is placed in support unit
It is photographed under 100 with the pattern to processing object 10；And control unit 700, control the operation of components described above.
Processing object 10 can be substrate, carry out or complete to manufacture various electronic components or in substrate over the substrate
The process of conductive pattern is formed on one surface.For example, processing object 10 may include various substrates, in the various substrates
Upper formation predetermined pattern and the various substrates are manufactured by glass material, silicon materials, plastic material etc..Processing object 10 can prop up
It supports on the top surface of support unit 100.
Solution may include the electrically conductive ink for forming linear pattern on the top surface of processing object 10.Conductive ink
It may include ink particle and solvent.Ink particle may include metallic particles, such as gold, silver, platinum, chromium and its alloy or oxide,
And ion can be contained.Solvent be can provide as volatile material, water-soluble material or fat soluble materials.Solution is not limited to institute above
The material of description.For example, solution may include being ejected on processing object 10 by using electrohydrodynamics phenomenon with shape
At the various solution of conductive pattern.
Support unit 100 can be formed to place thereon processing object 10.Support unit 100 may include the microscope carrier to be formed
Glass is processing object 10 to be supported on its top surface.Support unit 100 can have alignment members (not shown) to be used for
It is directed at the position of processing object 10 with the ideal position of its adjacent edges.For increasing the mandril (not shown) of processing object 10
The vacuum chuck (not shown) for being used to support processing object 10 can be placed on the top surface of support unit 100.Support unit
100 can fix and be mounted on platform (not shown), for example, it is mountable on platform so that support unit 100 can exist relative to platform
Front/rear direction, left right to and vertical/horizontal direction on move.
Nozzle unit 200 can be placed in solution is discharged on support unit 100, and be inserted into mounting hole H1In to limit
Mounting hole H1In correspond at least three freedom degrees movement.Herein, nozzle unit 200 can be spaced with support unit 100 upward
It comes placement, but is not certainly limited to this.Indivisible solution can be discharged at the top of processing object 10 in nozzle unit 200
Pattern is formed on surface or repairs the defect for the pattern being formed on the top surface of processing object 10.
Nozzle unit 200 may include: jet element 210, be placed on support unit 100 to face processing object 10 and mention
The channel passed through for solution by electrohydrodynamics phenomenon；Pin member 220 is placed in the channel of jet element 210, with spray
The central axial alignment of nozzle component 210, and electric power is received to serve as electrode；Connector component 250 is connected to pin member 220；Rule
Component 240 is installed so that jet element 210 is connected to connector component 250；Joint component 230 is placed in Rule component 240
In to support pin member 220 so that the central axial alignment of pin member 220 and jet element 210；And fixation member 260,
Be inserted at the side opposite with Rule component 240 relative to the center of connector component 250 in 250 inside of connector component and
It is mounted on the inside of the connector component 250, and there is the end contacted with joint component 230.Herein, central axis can table
Show the central axis on the direction that component extends.For example, the central axis of jet element 210 can be indicated in jet element 210
Central axis on the direction of extension.
Jet element 210 can be placed on support unit 100 to tilt towards processing object 10.Jet element 210 can
With the channel for extending and passing through on 1 in one direction jet element 210 in one direction 1.Solution can be filled into channel.
That is, channel can be the space that the path of solution is discharged along it and is used as receiving solution.The end of jet element 210 can
With taylor cone (taylor cone) shape and with the internal diameter of several microns (μm).Solution can pass through the end of jet element 210
Portion's discharge, and the pressure for solution to be discharged can be generated by electrohydrodynamics phenomenon.Jet element 210 is surplus in addition to end
The internal diameter of remaining part point can be greater than the internal diameter of end, for example, having some tens of pm (μm) bigger than the internal diameter of end or hundreds of microns (μ
M) internal diameter.
Jet element 210 may include at least one of glass and sapphire material.When compared with metal material, glass
Glass material and sapphire material can be easy to process.Therefore, jet element 210 can accurately be configured to required shapes and sizes.It is special
Not, solution outlet can be processed into required size and shape, the solution outlet is the end in channel, is placed in nozzle
The end of component 210.In addition, jet element 210, which can further include, can be processed into solution outlet required size and shape
The various non-conducting materials of shape.
Mountable jet element 210 so that its pass through on 1 in one direction Rule component 240 with Rule component 240
Inside connection.Pin member 220 can be placed in the channel of jet element 210.
Pin member 220 can be placed in the channel of jet element 210, the central axial alignment with channel, and in channel
Circumferential surface is spaced apart.Pin member 220 can be electrically connected to connector component 250 by joint component 230 and fixation member 260,
And electric power is received to serve as electrode.Electric field can be resulted between jet element 210 and processing object 10 by pin member 220, and
Indivisible solution is accurately discharged by the solution outlet of jet element 210 using electric field.This can be described as passing through electric current
Solution is discharged in body dynamics phenomenon.
Pin member 220 can be placed in the channel of jet element 210 and have some tens of pm (μm) to hundreds of microns (μm)
Diameter so that pin member 220 is spaced apart with the inner circumferential surface in channel, and can also extend tens of milliseconds on 1 in one direction
(mm).Pin member 220 can have various cross-sectional shapes, such as annular shape, elliptical shape, rectangular shape, polygonal shape
Deng.It is contemplated that when pin member 220 serves as electrode the feature of electric field and in the channel of jet element 210 except by pin member
Effective cross section region other than 220 regions occupied fully determines the cross-sectional shape and diameter of pin member 220.Pin portion
The end of part 220 can have the shape become narrow gradually and extend near the solution outlet of jet element 210.
A part of pin member 220 may extend into the inside of Rule component 240 and then be installed on 1 in one direction and connects
In head part 230.Pin member 220 is mountable and is fixed to joint component 230, and the central axial alignment with jet element 210.Cause
This, electric field can be resulted from equably uniform power to be applied to the ion in solution under jet element 210, and then accurately be adjusted
The discharge rate of whole solution.
Pin member 220 can be made so that pin member 220 receives electric power to serve as electrode by conductive material.For example,
When the diameter of length and some tens of pm (μm) to hundreds of microns (μm) of the pin member 220 with tens of milliseconds (mm), pin member
220 can be by having the various metal or alloy materials of sufficient hardness to be made so that pin member 220 not because of own wt or solution
Pressure and be bent.Pin member 220 can be manufactured by least one of tungsten, gold, silver, platinum, copper and aluminium conductive material.
Joint component 230 can be inserted into Rule portion from the opposite side of jet element 210 relative to the center of Rule component 240
In part 240, and then fix to support pin member 220.Joint component 230 may have a cylindrical shape, but not limit specifically
In this.Joint component 230 can have diameter so that joint component 230 is contacted with the inner surface of Rule component 240.
Joint component 230 can extend on 1 in one direction, and joint component 230 is towards the side of one end of jet element 210
Edge can be contacted with Rule component 240, and the other end of joint component 230 towards connector component 250 can be with fixation member 260
End thereof contacts.Therefore, joint component 230 can be fixed.
Joint component 230 can be made so that joint component 230 receives electric power from fixation member 260 to incite somebody to action by conductive material
Power transmission is to pin member 220.Herein, conductive material may include various metal or alloy materials.Joint component 230 can by with pin
The manufacture of the identical material of component 220.
Jet element 210 is mountable on Rule component 240 and is supported by Rule component 240.Rule component 240 can
Jet element 210 is connected to connector component 250.Rule component 240, which can extend on 1 in one direction and have, uses nozzle
Hollow rotating main body centered on the central axis of component 210.The inner circumferential surface of the side of Rule component 240 can have correspondence
In the internal diameter and shape of the shape of the external peripheral surface of the outer diameter and jet element 210 of jet element 210.In addition, Rule component
The inner circumferential surface of 240 other side can have the external peripheral surface of outer diameter and joint component 230 corresponding to joint component 230
Shape internal diameter and shape.In addition, the external peripheral surface of the other side of Rule component 240 can have corresponding to connector component
The outer diameter and shape of the shape of the external peripheral surface of 250 internal diameter and connector component 250.Jet element 210 is mountable to Shandong
On the inner circumferential surface of the side of your component 240, and screw thread may be provided at the external peripheral surface of the other side of Rule component 240
On.As a result, connector component 250 can for example be locked to screw thread.
Joint component 230 can be placed in the other side of Rule component 240, and stepped surface or inclined surface as with
The contact surface of joint component 230 may be provided between the inner circumferential surface and the other side of the side of Rule component 240 with fixation
One end of joint component 230.Can provide the contact surface of Rule component 240 as internal diameter from the other side of Rule component 240 to
The inclined surface that side is gradually reduced.Therefore, joint component 230 can with the central axial alignment of jet element 210 and be fixed on it
In position, while one end of joint component 230 is closely attached to the inclined surface of Rule component 240.
Rule component 240 can be manufactured by non-conducting material, such as plastic material.Pin member 220, joint component 230 and
Rule component 240 can with the central axial alignment of jet element 210, and the inside of Rule component 240 can in jet element 210
Portion's connection.Pin member 220 may be electrically connected to joint component 230, and jet element 210 and Rule component 240 can be electrically insulated from each other.
Connector component 250 can be inserted into Rule from the opposite side of jet element 210 relative to the center of Rule component 240
In the external peripheral surface of the other side of component 240 and it is installed on the external peripheral surface of the other side of Rule component 240.Even
Connecing device component 250 can extend on 1 in one direction and have the hollow cylindrical shape for wherein having predetermined space, the predetermined sky
Between the inside of connector component 250 is passed through on 1 in one direction.Screw thread may be provided at the inner circle of one end of connector component 250
So that Rule component 240 is installed on the inner circumferential surface of one end of connector component 250 in perimeter surface.
In connector component 250, in the pre-position being spaced apart with one end towards the other end, inner circumferential surface can
Central axis towards connector component 250 is prominent, and screw thread may be provided on the inner circumferential surface of protrusion.Fixation member
260 can be locked to screw thread, and the screw thread is arranged on the protrusion of the inner circumferential surface of connector component 250.Connector portion
Part 250 and fixation member 260 can be electrically connected to each other by the protrusion of the inner circumferential surface of connector component 250.
Mountable connector component 250 is so that connector component 250 surround Rule portion towards one end of Rule component 240
The external peripheral surface of the other end of part 240, and fixation member 260 is inserted into the other end opposite with one end and is installed on described
On the other end.Herein, the other end of mountable connector component 250 is with the circumferential surface of the side of circular fixation member 260.
At least part of the external peripheral surface of one end of connector component 250 can be made recessed to define predetermined insertion groove
251.The jaw member 510 of power supply unit 500, such as ' Y ' shape or ' U ' shape can be put into insertion groove 251 and be coupled to described insert
Enter slot 251.Herein, width of the insertion groove 251 in one direction on 1 can be with the width phase in jaw member 510 in one direction 1
Together, and therefore, jaw member 510 can be coupled in insertion groove 251 and gapless therebetween.Electric power can pass through power supply unit 500
Jaw member 510 be applied to connector component 250, the jaw member 510, which is integrated to, is defined in the outer of connector component 250
In insertion groove 251 in circumferential surface.Connector component 250 can be manufactured by conductive material, such as various metal or alloy materials.
In addition, connector component 250 can be manufactured by material identical with pin member 220.
Connector component 250 can not have be closely attached to joint component 230 the other end or with the joint component
The structure of 230 another end in contact, to prevent unnecessary power to be applied between connector component 250 and Rule component 240
Screw thread on coupled surface.Therefore, when connector component 250 and Rule component 240 coupled to each other, joint component 230 can not
Interfering conductor component 250 and Rule component 240 in structure.That is, when connector component 250 is installed on Rule component
When on 240, coupled surface that the unnecessary power can be prevented to be applied between connector component 250 and Rule component 240
Screw thread.Therefore, the abrasion of Rule component 240 by relatively soft material manufacture can be effectively prevented.
Joint component 230 is put relative to Rule component 240 and connector component 250 with free state, and passes through fixation
Component 260 is closely attached to Rule component 240 and then fixes position.Due to joint component 230 in structure not by even
The pressing of device component 250 is connect, therefore Rule component 240 and connector component 250 can be connected smoothly each other.Therefore, Shandong can be protected
Connection structure between that component 240 and connector component 250, the connection structure have relatively weak strong due to its material
Degree.Specifically, can contain or prevent Rule component 240 screw thread abrasion.In addition, joint component 230 can be by using even
The male part between device component 250 and fixation member 260 is connect steadily to press and fix, the male part due to its material and
It is relatively securely coupled to each other.That is, can effectively contain or prevent the abrasion of screw thread when coupling spray nozzle unit 200,
And it can also firmly fix joint component 230 and move Rule component 240 to prevent thrust.
Fixation member 260 can pass through the other end of connector component 250 on 1 in one direction and then install.Fixed part
Part 260 may include bar component 261 and head component 262.Bar component 261 can extend on 1 in one direction, and have the company of being inserted into
It connects in device component 250 and is coupled to one end of the inner circumferential surface of connector component 250 and be mounted with the another of head component 262
One end.Screw thread may be disposed on the external peripheral surface of one end of bar component 261.One end of bar component 261, which can have, to be equal to or small
In the outer diameter of the internal diameter of its other end.Therefore, when being closely attached to joint component 230, loading component 261 and Shandong can be prevented
Interference between your component 240.
Fixation member 260 can be positive mobile and backward mobile on 1 in one direction, while one end of loading component 261
External peripheral surface is locked to the protrusion of the inner circumferential surface of connector component 250.Herein, fixation member 260 can be towards connecing
230 forward direction of head part moves so that joint component 230 is closely attached to Rule component 240.Therefore, joint component 230 can
Steadily fix.
At least part that fixation member 260 is placed in connector component 250 can be manufactured by conductive material.Herein, it bears
Mount components 261 can be manufactured by conductive material.Therefore, connector component 250 and joint component 230 can by fixation member 260 that
This electrical connection.Herein, due to coupling part 250 and fixation member 260 can face contact facing with each other, and fixation member 260 and connect
The face contact facing with each other of head part 230, therefore stablizing conductive path can be real between connector component 250 and joint component 230
It is existing.Head component 262 can be manufactured by non-conducting material.
Due to passed through in fixation member 260 in one direction 1 connector component 250 and be aligned with connector component 250 from
And make fixation member 260 be closely attached to joint component 230, therefore when being closely attached, it can accurately control fixation
The state of component 260.That is, fixation member 260 can pass through guiding effect and joint component due to connector component 250
230 accurately contact to prevent the inclination of shotpin component 220.
The block fixture and fixing component of the equipment for being used to form pattern will be described in detail referring to figs. 1 to Fig. 8.
Block fixture 300 can be placed on support unit 100.In detail, can placement block fixture 300 with support unit
100 are spaced apart upward.Mounting hole H1Block fixture 300 be may pass through to install nozzle unit 200.Block fixture 300 may include multiple
Block, the multiple piece detachably couples so that each of multiple pieces of side can be relative to mounting hole H1It beats
It opens.In multiple pieces relative to mounting hole H1It is placed at side block and is rotatably mounted in and be placed at the other side
On another piece.
Block fixture 300 may include: bottom piece 310, setting be parallel to be mounted with nozzle unit 200 direction (such as
On one direction 1) a surface；Upper mass 320 upwardly extends in the side for being mounted with nozzle unit 200 and is placed in lower part
On one region on one surface of block 310；And coverage block 330, be rotatably mounted in upper mass 320 so as to
It is dismantled from another region on one surface of bottom piece 310.Herein, it can integrally provide or bottom piece is separably provided
310 and upper mass 320, and it is then coupled to each other.In addition, it is possible to provide coverage block 330 with remaining block to separate.Coverage block 330 can
It is installed at least one of upper mass 320 and bottom piece 310 by the hinge component 340 that will be described below.
Bottom piece 310 may include the upper body extended on 1 in one direction and the bottom table for being placed in upper body
To tilt sub-body outstanding on the direction intersected with a direction 1 on face.Upper mass 320 and coverage block 330 are mountable
In on the top surface of upper body, and sub-body can be supported by installation unit 400.
Upper mass 320 can be placed on the top surface of the upper body of bottom piece 310 to extend in one direction 1.
Upper mass 320 can be placed on one in the region and another region of the top surface of the upper body of bottom piece 310.
Coverage block 330 can extend on 1 in one direction and be rotatably mounted in the top for covering bottom piece 310 in upper mass 320
Another region of the top surface of main body.
Herein, a region and another region for the top surface of the upper body of bottom piece 310 can be by disposing
There is on the direction of nozzle unit 200 (such as in one direction 1 on) to extend, the region on a surface of bottom piece 310
The region that line (not shown) separates.
Mounting hole H1Can by the direction for being mounted with nozzle unit 200 (such as in one direction 1 on) pass through top
Surface that block 320 and coverage block 330 face each other is defined in a surface of bottom piece 310.Nozzle unit 200 can be one
Mounting hole H is installed on a direction 11On.Mounting hole H1It may be defined as deviating relative to upper mass 320.Mounting hole H1Central axis
It can be placed at the side of upper mass 320.
Block fixture 300 may include hinge component 340, install the hinge component 340 with by the top surface of upper mass 320
It is connected to the top surface of coverage block 330.It rotates when coverage block 330 passes through hinge component 340 to install nozzle unit 200, and
Mounting hole H1A surface open when, coverage block 330 can by upper mass 320 support with prevent nozzle unit 200 separate or
It loses.
Block fixture 300 may include locking component 350, the locking component 350 is installed so that its be mounted with nozzle list
The side that the direction of member 200 intersects is upward through upper mass 320 and coverage block 330.For example, locking component 350 can be described as block
Couple knob.
Locking component 350 allows coverage block 330 to install and is fixed to upper mass 320.Locking component 350 may include: lock
Fixed pole 351, the locking level 351 are placed in mounting hole H1Top and there is one installed across upper mass 320 and coverage block 330
End；And tapered end 352, the tapered end 352 are placed on the other end of locking level 351.Locking level 351 can be divided into across top
Block 320 dispose part and across coverage block 330 dispose part.Screw thread may be disposed at across the portion that upper mass 320 is installed
On the external peripheral surface for the end divided, and screw thread may also be disposed on the inner wall of the perforation of upper mass 320, and locking level 351 can be inserted
Enter into the perforation.Therefore, locking level 351 can be locked to upper mass 320.Locking level passes through the part that coverage block 330 disposes
There can be smooth external peripheral surface and can be slidably supported by perforation, define the perforation across coverage block 330 so that locking
Bar 351 passes through the part that coverage block 330 disposes and passes through from it.
It is defined such that locking level 351 passes through the perforation that the part that coverage block 330 disposes is passed through from it across coverage block 330
Can have the region contacted with upper mass 320 and remaining another region in addition to one region.Herein, one
Region can have the internal diameter of the outer diameter for the end that the part that upper mass 320 is installed is passed through greater than locking level 351.Screw thread may be provided at
On another region of the perforation of coverage block 330, the part that upper mass 320 is installed is passed through corresponding to locking level 351 to be locked to
End screw thread.That is, screw thread may be provided at the both ends of the perforation of coverage block 330 far from the end of upper mass 320.
In order to enable extracting locking level 351 out from the perforation of coverage block 330 towards tapered end 352, locking level 351 is disposed across upper mass 320
The screw thread of end of part have to pass through perforation, while along the screw thread rotation of perforation.
Therefore, in order to enable the rotation of coverage block 330 is to open mounting hole H1Even if discharging locking level 351 and upper mass
It is sealed between 320 perforation, and locking level 351 is extracted out towards tapered end 352, can also pass through the screw thread of the perforation of coverage block 330
Locking level 351 is maintained to be inserted into the situation in the perforation of coverage block 330.That is, the loss of locking level 351 can be prevented.Lock
First 352 may act as the shank of the rotation for locking level 351.
As described above, in the equipment for being used to form pattern accoding to exemplary embodiment, as opening mounting hole H1
When replacing nozzle unit 200, hinge component 340 is provided as the structure that coverage block 330 is connected to upper mass 320.In addition,
Locking component 350 is provided as the structure for dismantling coverage block 330 from upper mass 320.In addition, locking component 350, which can have, to be prevented
The structure fully isolated with coverage block 330 of locking component 350.That is, can prevent in advance when replacing nozzle unit 200
The only loss of coverage block 300 and locking component 350, and block fixture 300 can improve in assembly efficiency.
Block fixture 300 may include electrically connected hole H2.Electrically connected hole H2It may be defined to across upper mass 320 and coverage block
330 towards insertion groove 251 top surface predetermined position, the insertion groove 251 is defined in the connector portion of nozzle unit 200
In part 250, and insertion groove 251 can pass through electrically connected hole H2It is exposed to the upper side of block fixture 300.
The equipment for being used to form pattern may include for nozzle unit 200 to be limited to mounting hole H1Interior fixing component.
Fixing component may be provided in nozzle unit 200 and mounting hole H1On at least one of surface facing with each other.
Fixing component may include hook shape component 241, and the hook shape component is configured to surround the outer circle weekly form of nozzle unit 200
At least part or mounting hole H in face1Inner wall at least part.In this case, hook shape component 241 can be with mounting hole
H1Inner wall or nozzle unit 200 external peripheral surface contact, by the position restriction on nozzle unit 200 in one direction 1
In mounting hole H1It is interior.
In addition, fixing component may include hook groove 321, keep the hook groove 321 recessed to be fitted around hole H1Inner wall extremely
At least part of the external peripheral surface of few a part or nozzle unit 200 is so that can be inserted into hook shape component 241.In this feelings
Under condition, hook shape component 241 be can be plugged into hook groove 321 to install the position restriction on nozzle unit 200 in one direction 1
Hole H1It is interior.
In one exemplary embodiment, hook shape component 241 is prominent to surround from Rule component 240 of nozzle unit 200
The external peripheral surface for the pre-position that the other end is spaced apart to one end, and keep hook groove 321 recessed to be fitted around hole H1It is interior
The predetermined position of wall is to the forming position corresponding to hook shape component 241.When nozzle unit 200 is installed on mounting hole H1When upper,
Hook shape component 241 be can be plugged into hook groove 321 and then be installed to couple.It therefore, can be by nozzle unit 200 in one direction 1
On freedom degree be limited in mounting hole H1It is interior.That is, hook shape component 241 and hook groove 321 may act as in one direction on 1
Reference surface or reference position are the position of nozzle unit 200 to be precisely located when replacing nozzle unit 200 and prevents nozzle
Unit 200 slides on 1 in one direction.
Fixing component may include: coupling slot 252, be recessed into the external peripheral surface of the connector component 250 of nozzle unit 200
At least one position in；And coupling protrusion, it is installed on mounting hole H1Inner wall at least part on and be elastically supported
So that coupling protrusion is inserted into coupling slot 252.Herein, coupling protrusion may include the first coupling protrusion 360 and the second coupling
Protrusion 370.
Coupling slot 252 can be made recessed to be separated from each other in one direction 1, positioned at the outer of connector component 250
Multiple positions on circumferential surface.Mountable first coupling protrusion 360 is to pass through mounting hole H1Inner wall so that first coupling
Protrusion 360 is placed in the first coupling protrusion 360 and is inserted into mounting hole H1Central axis above coupling slot 252 in pre-determined bit
Set place.Herein, the first coupling protrusion 360 is mountable to mounting hole H1Inner wall upper mass side inner wall on so that the first coupling
It closes protrusion 360 to be placed in vertically in face of the pre-position of the top surface of the upper body of bottom piece 310, and can be under
The top surface of the upper body of portion's block 310 is prominent.Second coupling protrusion 370 is mountable to pass through mounting hole H1Inner wall, with
So that the first coupling protrusion 360 is placed in the first coupling protrusion 360 and is inserted into mounting hole H1Central axis above coupling slot 252
The pre-position at middle place.Herein, on the coverage block side inner wall for the inner wall that the second coupling protrusion 370 is mountable to mounting hole H1,
And it can be prominent from coverage block 330 towards upper mass 320.
Coupling protrusion may include bulb stopper, and on the direction intersected with a direction 1 (such as in all vertical direction 3
In horizontal direction 2) it is spaced apart relative to the central axis of nozzle unit 200, and it is also prominent towards nozzle unit 200 and then insert
Enter into coupling slot 252.Herein, the first coupling protrusion 360 may be mounted to and the central axis of nozzle unit 200 in the horizontal direction 2
On in (such as plane (not shown) relative to the central axis perpendicular to nozzle unit 200) in a plane be spaced apart.
In addition, the second coupling protrusion 370 may be mounted to central axis as described above in vertical direction 3 in as described above one
It is spaced apart in a plane.Due to facility structure as described above, coupling protrusion be may be mounted to always from coverage block 330 towards upper
Portion's block 320 pushes nozzle unit 200.
By coupling slot 252 and protrusion can be coupled by nozzle unit 200 in the multiple directions intersected with a direction 1
Freedom degree is limited in mounting hole H1It is interior.That is, can be relative to the multiple directions intersected with a direction 1 in all directions
Pressing and fixed nozzle unit 200, and can fixed nozzle unit 200 external peripheral surface all top surfaces and side surface.
As described above, the equipment for being used to form pattern accoding to exemplary embodiment may include that fixing component is used as general
The freedom degree of nozzle unit 200 is limited to mounting hole H1Interior structure.Therefore, when replacing and installing nozzle unit 200, nozzle
Unit 200 can be inserted into mounting hole H before connecting coverage block 3301Inside in and be fixed to the mounting hole H1Inside with
Prevent nozzle unit 200 because fixing component is rocked.In this case, coverage block 330 can steadily be coupled.Therefore, nozzle list
Member 200 can be installed on block fixture 300 under fixed position and appropriate state always.That is, when replacement nozzle unit 200
When, nozzle unit 200 can be improved on position repeatability, and can prevent the inclination of nozzle unit 200.Therefore, when replacing
When changing nozzle unit 200, the setting time can be reduced.
The remaining component for being used to form the equipment of pattern will sequentially be described referring to figs. 1 to Fig. 5.
Installation unit 400 can be placed on platform (not shown) and in forward/backward direction, left right to and up/down side
It is moveably mounted relatively relative to support unit 100 upwards.Block fixture 300 is mountable on installation unit 400.Installation unit
400, which can accurately be operable so that a few micrometers of upper face that nozzle unit 200 is placed in away from processing object 10, arrives hundreds of microns
At the height of (μm).Jet element 210 can accurately be adjusted relative to the position of processing object 10 by using installation unit 400
It is whole.
Power supply unit 500 may be connected to nozzle unit 200 to apply the voltage for spraying solution.For example, power supply
Unit 500 may make jaw member 510 to be inserted into the electrically connected hole H of block fixture 3002In, and then jaw member 510 is combined
Into the insertion groove 251 of the connector component 250 of nozzle unit 200, and the voltage applied by power supply unit 500 can be via folder
Sheet element 510, insertion groove 251, connector component 250, loading component 261 and joint component 230 are smoothly transferred to pin portion
Part 220.The insertion position of jaw member 510 and coupling position can pass through electrically connected hole H2It precisely specifies.
Predetermined potential difference between nozzle unit 200 and processing object 10 can be generated by power supply unit 500, and therefore, electricity
Field can be generated by potential difference.Ion in solution can be discharged by electric field from jet element 210.Power supply unit 500 can produce DC
Power or AC power.When generating DC power, electrode may be connected to processing object 10.It, can be in predetermined electricity when generating AC power
Sine wave type or pulsed AC power are generated in pressure or frequency range.Power supply unit 500 can control the intensity of applied electric power, frequency
Rate and the magnitude of current are to control the discharge rate and discharge mode of solution.
Lighting unit 610 can be configured to generate for taking the photograph the pattern on the top surface for being formed in processing object 10
The light of shadow.Lighting unit 610 can be placed under support unit 100.Optical unit 620 can be configured to being formed in processing object 10
Top surface on pattern photograph.Lighting unit 610 and optical unit 620 are not certainly limited to this configuration.
Control unit 700 can be configured to control and be used to form removing support unit 100, nozzle unit 200, installing list for pattern
The overall operation of equipment except member 400 and power supply unit 500, so that predetermined pattern is formed accurately in processing object 10
Top surface on.
Control unit 700 may include the hardware such as industrial personal computer and the software for control process, and also comprising display dress
Set and for ease of control input/output device.Control unit 700 is not necessarily to be in form of computers, as long as control unit 700 is filled
Divide ground control equipment.In addition, control unit 700 may include various types of interfaces, as steadily connecting with equipment
PCB。
According to one exemplary embodiment, nozzle unit and block fixture can have the position repeatability for improving nozzle unit
Coupled structure, with when replacing nozzle unit improve nozzle unit position repeatability.Therefore, it can quickly and accurately replace
Nozzle unit is changed, and after replacing nozzle, the solution outlet for being placed in jet element end can be after replacing nozzle accurately
It is placed in the visual zone of optical unit.Therefore, can immediately execute uses the next of new nozzle unit replaced to repair
Journey.It is therefore possible to prevent rigging error when replacement nozzle unit occurs, can reduce the setting time, and entire repair process can be
It is improved in efficiency.
Although having referred to specific embodiment describes depositing device and method, its is without being limited thereto.It should be noted that of the invention
Arrangements and methods disclosed in above embodiments can be combined with each other or it is intersected with each other application and modify in a variety of manners, and these
Modification can be considered within the scope of the invention.Therefore, those skilled in the art will readily appreciate that, is not departing from by appended
In the case where spirit and scope of the invention as defined by the claims, the present invention can be carry out various modifications and be changed.
Claims (14)
1. a kind of equipment for being used to form pattern, the equipment discharge solution for being used to form pattern to form the pattern,
It is characterized in that, the equipment for being used to form pattern includes:
Support unit, processing object are placed on the support unit；
Nozzle unit is placed on the support unit so that the solution is discharged；
Block fixture is placed on the support unit and has mounting hole to install the nozzle unit；And
Fixing component is configured to limit the nozzle unit in the mounting hole.
2. the equipment according to claim 1 for being used to form pattern, wherein the fixing component is placed in the nozzle list
On first at least one surface with mounting hole surface facing with each other.
3. the equipment according to claim 1 for being used to form pattern, wherein the fixing component includes hook shape component, it is described
Hook shape component be positioned to around the nozzle unit external peripheral surface at least part or the mounting hole inner wall extremely
Few a part, and
The hook shape component is contacted with the external peripheral surface of the inner wall of the mounting hole or the nozzle unit to incite somebody to action
The position restriction of the nozzle unit is in the mounting hole.
4. the equipment according to claim 3 for being used to form pattern makes the hook wherein the fixing component includes hook groove
Geosynclinal concave is into the external peripheral surface of at least part or the nozzle unit for surrounding the inner wall of the mounting hole
At least part is so that can be inserted into the hook shape component.
5. the equipment according to claim 1 for being used to form pattern, wherein the fixing component includes:
Coupling slot, it is recessed from least one position of the external peripheral surface of the nozzle unit；And
Protrusion is coupled, is installed at least one position of the inner wall of the mounting hole and is elastically supported so that the coupling
Protrusion can be plugged into the coupling slot.
6. the equipment according to claim 5 for being used to form pattern, wherein the coupling protrusion be mounted with the spray
Central axis on the vertical direction and horizontal direction that the direction of mouth unit intersects relative to the nozzle unit is spaced apart with court
It is prominent to the nozzle unit.
7. the equipment according to claim 1 for being used to form pattern, wherein described piece of fixture includes multiple pieces, it is the multiple
Block detachably couples so that one side can be opened relative to the mounting hole, and
In the multiple piece relative to the mounting hole be placed in a block at side be rotatably mounted in be placed in it is another
On another piece at side.
8. the equipment according to claim 1 for being used to form pattern, wherein described piece of fixture includes:
Bottom piece, setting are parallel to be mounted with a surface in the direction of the nozzle unit；
Upper mass is upwardly extended in the side for being mounted with the nozzle unit, positioned at one surface of the bottom piece
A region on；And
Coverage block is rotatably mounted in the upper mass so as to from another area on one surface of the bottom piece
Domain disassembly,
Wherein the mounting hole is on one surface that the side for being mounted with the nozzle unit is upward through the bottom piece
The upper mass and the coverage block each of surface facing with each other.
9. the equipment according to claim 8 for being used to form pattern, wherein the institute on one surface of the bottom piece
A region and another region are stated by upwardly extending in the side for being mounted with the nozzle unit, and is located at the bottom piece
One surface on region line separate.
10. the equipment according to claim 8 for being used to form pattern, wherein described piece of fixture includes locking component, with
The side for being mounted with the direction intersection of the nozzle unit is upward through described in the upper mass and coverage block installation
Locking component,
The locking component has screw thread on the end that it passes through the upper mass and is locked to the upper mass, and the lock
Determine component to pass through the coverage block across a part of the coverage block and slidingly support, and
Screw thread corresponding to the screw thread on the end of the locking component is set to the both ends of perforation far from described
On the end of portion's block, the perforation is defined in the coverage block so that the locking component passes through.
11. the equipment according to claim 1 for being used to form pattern, wherein the nozzle unit includes:
Jet element, the channel for being placed on the support unit and being passed through in a manner of electrohydrodynamics with the solution；
Pin member is placed in the channel of the jet element；And
Connector component is connected to the pin member to supply electric power.
12. the equipment according to claim 11 for being used to form pattern, wherein the nozzle unit includes:
Rule component is installed so that the jet element is connected to the connector component；And
Joint component is placed in Rule component to support the pin member to the central axis pair with the jet element
Standard,
Wherein the pin member is fixably attached to the inner circumferential surface interval on the joint component and with the jet element
It opens.
13. the equipment according to claim 12 for being used to form pattern, wherein the nozzle unit includes fixation member, institute
It states fixation member and is inserted into the connector portion at the side opposite with Rule component relative to the connector component
In the inside of part and it is installed on the inside of the connector component and has the end contacted with the joint component,
Wherein one end of the joint component is contacted with the inner surface of Rule component, and
The other end of the joint component be spaced apart with the inner circumferential surface of the connector component and with the fixation member
End contact is to fixed position.
14. the equipment according to claim 13 for being used to form pattern, wherein the jet element includes that glass and indigo plant are precious
At least one of stone,
The pin member includes at least one of tungsten, gold, silver and copper conductive material,
The joint component, the connector component and the fixation member being placed in the connector component are at least
A part includes conductive material, and
The solution includes electrically conductive ink.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020170083646A KR101950441B1 (en) | 2017-06-30 | 2017-06-30 | Forming apparatus for pattern |
| KR10-2017-0083646 | 2017-06-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109216231A true CN109216231A (en) | 2019-01-15 |
| CN109216231B CN109216231B (en) | 2021-12-21 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810693050.0A Active CN109216231B (en) | 2017-06-30 | 2018-06-29 | Apparatus for forming pattern |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR101950441B1 (en) |
| CN (1) | CN109216231B (en) |
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|---|---|---|---|---|
| JP2004344774A (en) * | 2003-05-22 | 2004-12-09 | Dainippon Screen Mfg Co Ltd | Substrate treating apparatus |
| CN1849178A (en) * | 2003-08-08 | 2006-10-18 | 夏普株式会社 | Electrostatic suction-type fluid discharging method and device |
| CN101623954A (en) * | 2005-01-31 | 2010-01-13 | 独立行政法人产业技术综合研究所 | Collective transfer ink jet nozzle plate and method for manufacturing the same |
| CN101678373A (en) * | 2007-05-17 | 2010-03-24 | 玛丽皇后与西田学院 | Electrostatic spraying device and method of electrostatic spraying |
| KR20160109631A (en) * | 2015-03-12 | 2016-09-21 | 참엔지니어링(주) | Apparatus and method for forming pattern line |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05154428A (en) * | 1991-12-11 | 1993-06-22 | Toshiba Corp | Dispenser device |
| KR200475780Y1 (en) | 2013-08-08 | 2015-01-02 | 신지현 | Spray nozzle for process of the semiconductor substrate |
| KR101426770B1 (en) | 2014-05-09 | 2014-08-05 | 주식회사 에스피텍 | Jig for touch-pen grip |
-
2017
- 2017-06-30 KR KR1020170083646A patent/KR101950441B1/en active IP Right Grant
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2018
- 2018-06-29 CN CN201810693050.0A patent/CN109216231B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004344774A (en) * | 2003-05-22 | 2004-12-09 | Dainippon Screen Mfg Co Ltd | Substrate treating apparatus |
| CN1849178A (en) * | 2003-08-08 | 2006-10-18 | 夏普株式会社 | Electrostatic suction-type fluid discharging method and device |
| CN101623954A (en) * | 2005-01-31 | 2010-01-13 | 独立行政法人产业技术综合研究所 | Collective transfer ink jet nozzle plate and method for manufacturing the same |
| CN101678373A (en) * | 2007-05-17 | 2010-03-24 | 玛丽皇后与西田学院 | Electrostatic spraying device and method of electrostatic spraying |
| KR20160109631A (en) * | 2015-03-12 | 2016-09-21 | 참엔지니어링(주) | Apparatus and method for forming pattern line |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101950441B1 (en) | 2019-02-20 |
| KR20190003134A (en) | 2019-01-09 |
| CN109216231B (en) | 2021-12-21 |
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