CN109216231B - Apparatus for forming pattern - Google Patents
Apparatus for forming pattern Download PDFInfo
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- CN109216231B CN109216231B CN201810693050.0A CN201810693050A CN109216231B CN 109216231 B CN109216231 B CN 109216231B CN 201810693050 A CN201810693050 A CN 201810693050A CN 109216231 B CN109216231 B CN 109216231B
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- nozzle unit
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Coating Apparatus (AREA)
Abstract
The present invention provides an apparatus for forming a pattern. An apparatus for forming a pattern includes: a supporting unit on which the processing object is placed; a nozzle unit disposed on the support unit to discharge the solution; a block jig disposed on the support unit and having a mounting hole to mount the nozzle unit; and a fixing member that defines the nozzle unit within the mounting hole. Therefore, when the nozzle is replaced, the position repeatability of the nozzle can be improved.
Description
Technical Field
The present disclosure relates to an apparatus for forming a pattern, and more particularly, to an apparatus for forming a pattern capable of improving positional repeatability when a nozzle is replaced, for forming a pattern.
Background
Various facilities for manufacturing semiconductors, Flat Panel Displays (FPDs), Printed Circuit Boards (PCBs), and the like include a repair device capable of forming a line pattern of several micrometers (μm) width by discharging conductive ink onto a substrate in the form of fine droplets using electro-hydrodynamics (EHD).
Since the EHD nozzle (hereinafter, referred to as "nozzle unit") of the above-described repair apparatus is consumable, after a predetermined number of repair processes are performed, the used nozzle unit must be replaced with a new nozzle unit.
The repair apparatus according to the related art does not have a structure for maintaining positional repeatability of the nozzle unit when the nozzle unit is replaced. Therefore, there is a limitation in that the end of the nozzle of the replaced new nozzle unit deviates from the observation region of the optical portion of the repair apparatus. In addition, after the replacement of the nozzle unit, it is difficult for the visual area of the optical unit to match the end of the nozzle unit.
Background art of the present disclosure is disclosed in the following patent documents.
[ Prior art documents ]
[ patent document ]
(patent document 1) KR 10-2016-0109631A
Disclosure of Invention
The present disclosure provides an apparatus for forming a pattern, which is capable of improving position repeatability when a nozzle is replaced.
According to an exemplary embodiment, an apparatus for forming a pattern that discharges a solution to form a pattern, includes: a supporting unit on which the processing object is placed; a nozzle unit disposed on the support unit to discharge the solution; a block jig disposed on the support unit and having a mounting hole to mount the nozzle unit; and a fixing member configured to define the nozzle unit within the mounting hole.
In the apparatus for forming a pattern according to an embodiment of the present invention, the fixing member may be disposed on at least one of surfaces of the nozzle unit and the mounting hole facing each other.
In the apparatus for forming a pattern according to an embodiment of the present invention, the fixing member may include a hook member disposed to surround at least a portion of an outer circumferential surface of the nozzle unit or at least a portion of an inner wall of the mounting hole, and the hook member may contact the inner wall of the mounting hole or the outer circumferential surface of the nozzle unit to define a position of the nozzle unit within the mounting hole.
In the apparatus for forming a pattern according to an embodiment of the present invention, the fixing member may include a hook groove recessed to surround at least a portion of an inner wall of the mounting hole or at least a portion of an outer circumferential surface of the nozzle unit so that the hook member may be inserted.
In an apparatus for forming a pattern according to an embodiment of the present invention, the fixing member may include: a coupling groove recessed from at least one position of an outer circumferential surface of the nozzle unit; and a coupling protrusion installed at least one position of an inner wall of the mounting hole and elastically supported such that the coupling protrusion can be inserted into the coupling groove.
In the apparatus for forming a pattern according to an embodiment of the present invention, the coupling protrusion may be spaced apart in a vertical direction and a horizontal direction crossing a direction in which the nozzle unit is disposed with respect to a central axis of the nozzle unit to protrude toward the nozzle unit.
In an apparatus for forming a pattern according to an embodiment of the present invention, a block jig may include a plurality of blocks detachably coupled to each other such that one side thereof is openable with respect to a mounting hole, and one of the plurality of blocks disposed at one side with respect to the mounting hole may be rotatably mounted on another block at the other side.
In an apparatus for forming a pattern according to an embodiment of the present invention, a block jig may include: a lower block provided with one surface parallel to a direction in which the nozzle unit is disposed; an upper block extending in a direction in which the nozzle unit is disposed, on one region of the one surface of the lower block; and a cover block rotatably mounted on the upper block so as to be detachable from another region of the one surface of the lower block, wherein a mounting hole passes through each of surfaces of the upper block and the cover block facing each other on the one surface of the lower block in a direction in which the nozzle unit is seated.
In the apparatus for forming a pattern according to an embodiment of the present invention, one region and another region of the one surface of the lower block may be separated by a region line extending in a direction in which the nozzle unit is disposed and located on the one surface of the lower block.
In the apparatus for forming patterns according to an embodiment of the present invention, the block jig may include a locking member installed to pass through the upper block and the cover block in a direction crossing a direction in which the nozzle unit is disposed, the locking member may have a thread on an end thereof passing through the upper block and be locked to the upper block, and a portion of the locking member passing through the cover block may pass through the cover block and be slidably supported, and a thread corresponding to the thread on the end of the locking member may be disposed on ends of both ends of a through hole, which is defined in the cover block so that the locking member passes through, away from the upper block.
In an apparatus for forming a pattern according to an embodiment of the present invention, the nozzle unit may include: a nozzle member disposed on the support unit and having a passage through which the solution passes electrohydrodynamically; a pin member disposed in the passage of the nozzle member; and a connector part connected to the pin part to supply power.
In an apparatus for forming a pattern according to an embodiment of the present invention, the nozzle unit may include: a luer part installed to connect the nozzle part to the connector part; and a fitting member disposed within the luer member to support the pin member to align with the central axis of the nozzle member, wherein the pin member is fixably mounted on the fitting member and spaced from the inner circumferential surface of the nozzle member.
In the apparatus for forming a pattern according to an embodiment of the present invention, the nozzle unit may include a fixing member inserted into an interior of the connector part at a side opposite to the luer part with respect to the connector part and mounted on the interior of the connector part and having an end portion contacting the coupling part, wherein one end of the coupling part may contact an inner surface of the luer part and the other end of the coupling part may be spaced apart from an inner circumferential surface of the connector part and contact an end portion of the fixing member to fix the position.
In an apparatus for forming a pattern according to an embodiment of the present invention, the nozzle member may include at least one of glass and sapphire, the pin member may include at least one conductive material of tungsten, gold, silver, and copper, at least a portion of the joint member, the connector member, and the fixing member disposed within the connector member include a conductive material, and the solution may include a conductive ink.
Drawings
Exemplary embodiments may be understood in more detail from the following description taken in conjunction with the accompanying drawings, in which:
fig. 1 is a schematic view of an apparatus for forming a pattern according to an exemplary embodiment.
Fig. 2 is a schematic view of a nozzle unit according to an exemplary embodiment.
FIG. 3 is a side cross-sectional view of a nozzle unit according to an exemplary embodiment.
Fig. 4 is a schematic view of a nozzle unit and a block jig according to an exemplary embodiment.
Fig. 5 is a partial view of a block clamp according to an exemplary embodiment.
Fig. 6 is a side cross-sectional view illustrating a case of a block jig sheared when a nozzle unit is mounted according to an exemplary embodiment.
Fig. 7 is a front cross-sectional view illustrating a condition of a block jig taken along an auxiliary line a to a' of fig. 4 when a nozzle unit is mounted according to an exemplary embodiment.
Fig. 8 is a front cross-sectional view illustrating a condition of the block jig taken along an auxiliary line a to a' of fig. 4 when one side of the block jig is opened according to an exemplary embodiment.
Detailed Description
Hereinafter, specific embodiments will be described in detail with reference to the accompanying drawings. This invention may, however, be embodied in different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In the drawings, the size of layers and regions may be exaggerated for clarity of illustration. Like reference numerals refer to like elements throughout.
Fig. 1 is a schematic view of an apparatus for forming a pattern according to an exemplary embodiment, fig. 2 is a schematic view of a nozzle unit according to an exemplary embodiment, and fig. 3 is a side cross-sectional view of a nozzle unit according to an exemplary embodiment.
In addition, fig. 4 is a schematic view of a nozzle unit and a block jig according to an exemplary embodiment, fig. 5 is a partial view of the block jig according to the exemplary embodiment, and fig. 6 is a side cross-sectional view illustrating a case of the block jig cut at the time of mounting the nozzle unit according to the exemplary embodiment.
In addition, fig. 7 is a front cross-sectional view illustrating a case of the block jig taken along an auxiliary line a to a 'of fig. 4 when the nozzle unit is mounted according to an exemplary embodiment, and fig. 8 is a front cross-sectional view illustrating a case of the block jig taken along an auxiliary line a to a' of fig. 4 when one side of the block jig is opened according to an exemplary embodiment.
Hereinafter, exemplary embodiments will be described in detail based on the ink repair process and facilities in the FPD manufacturing field. However, the present disclosure is applicable to various methods and facilities for discharging various liquid materials by using an electrohydrodynamic phenomenon to form a pattern on an object to be processed (hereinafter, referred to as a processing object).
Hereinafter, a deposition apparatus according to an exemplary embodiment will be described in detail with reference to fig. 1 to 5. An apparatus for forming a pattern according to an exemplary embodiment may be an apparatus for forming a pattern manufactured by discharging a solution using an electrohydrodynamic phenomenon, and may include: a supporting unit 100 on which the processing object 10 is seated; a nozzle unit 200 disposed on the support unit 100 to discharge the solution onto the processing object; block clamp 300, mounting hole H1Defined in the block jig 300 to allow the nozzle unit 200 to be installed, the block jig 300 being seated on the support unit 100; and a fixing member for limiting the nozzle unit 200 in the mounting hole H1And (4) the following steps. Here, the fixing member may include at least one of the hook member 241, the first coupling protrusion 360, and the second coupling protrusion 370 and further include at least one of the hook groove 321 and the coupling groove 252.
In addition, an apparatus for forming a pattern according to an exemplary embodiment may include: a mounting unit 400 to which the block jig 300 is mounted; a power supply unit 500 connected to the nozzle unit 200; an illumination unit 610 disposed under the support unit 100 to generate light for photographing a pattern on the processing object; an optical unit 620 disposed under the support unit 100 to photograph a pattern of the processing object 10; and a control unit 700 controlling the operation of the above-described components.
The processing object 10 may be a substrate on which a process of manufacturing various electronic components or forming a conductive pattern on one surface of the substrate is performed or completed. For example, the processing object 10 may include various substrates on which predetermined patterns are formed and which are manufactured of a glass material, a silicon material, a plastic material, or the like. The processing object 10 may be supported on a top surface of the support unit 100.
The solution may contain conductive ink for forming a line pattern on the top surface of the processing object 10. The conductive ink may comprise ink particles and a solvent. The ink particles may comprise metal particles, such as gold, silver, platinum, chromium, and alloys or oxides thereof, and may contain ions. The solvent may be provided as a volatile material, a water-soluble material, or a fat-soluble material. The solution is not limited to the materials described above. For example, the solution may include various solutions that are sprayed onto the processing object 10 by using an electro-hydrodynamic phenomenon to form a conductive pattern.
The support unit 100 may be formed to place the processing object 10 thereon. The support unit 100 may include a stage glass formed to support the processing object 10 on a top surface thereof. The support unit 100 may have an alignment member (not shown) for aligning the position of the processing object 10 with a desired position near the edge thereof. A lift pin (not shown) for lifting the processing object 10, a vacuum chuck (not shown) for supporting the processing object 10 may be disposed on the top surface of the supporting unit 100. The support unit 100 may be fixed and mounted on a table (not shown), for example, may be mounted on the table such that the support unit 100 may move in a front/rear direction, a left/right direction, and a vertical/horizontal direction with respect to the table.
The nozzle unit 200 may be disposed on the support unit 100 to discharge the solution, and inserted into the mounting hole H1So as to limit the mounting hole H1Corresponding to at least three degrees of freedom of movement. Here, the nozzle unit 200 may be disposed to be spaced apart from the support unit 100 upward, but is not particularly limited thereto. The nozzle unit 200 may discharge a very small amount of solution to form a pattern on the top surface of the processing object 10 or repair a defect of the pattern formed on the top surface of the processing object 10.
The nozzle unit 200 may include: a nozzle part 210 disposed on the support unit 100 to face the processing object 10 and providing a passage through which the solution passes by an electrohydrodynamic phenomenon; a pin member 220 disposed in the passage of the nozzle member 210, aligned with the central axis of the nozzle member 210, and receiving power to function as an electrode; a connector part 250 connected to the pin part 220; a luer part 240 installed to connect the nozzle part 210 to the connector part 250; a coupling member 230 disposed in the luer member 240 to support the pin member 220 such that the pin member 220 is aligned with a central axis of the nozzle member 210; and a fixing member 260 inserted into the interior of the connector member 250 and mounted on the interior of the connector member 250 at a side opposite to the luer member 240 with respect to the center of the connector member 250, and having an end portion contacting the coupling member 230. Here, the central axis may mean a central axis in a direction in which the component extends. For example, the central axis of the nozzle component 210 may represent the central axis in the direction in which the nozzle component 210 extends.
The nozzle part 210 may be disposed on the support unit 100 so as to be inclined toward the processing object 10. The nozzle component 210 may have a passage extending in one direction 1 and passing through the nozzle component 210 in one direction 1. The solution may be filled into the channel. That is, the channel may be a path along which the solution is discharged and serves as a space for receiving the solution. The end of the nozzle member 210 may have a taylor cone (taylor cone) shape and have an inner diameter of several micrometers (μm). The solution may be discharged through the end of the nozzle part 210, and the pressure for discharging the solution may be generated by an electro-hydrodynamic phenomenon. The remaining portion of the nozzle member 210 other than the end portion may have an inner diameter greater than that of the end portion, for example, having an inner diameter greater than that of the end portion by several tens of micrometers (μm) or several hundreds of micrometers (μm).
The nozzle member 210 may comprise at least one material of glass and sapphire. Glass materials and sapphire materials can be easily processed when compared to metal materials. Thus, the nozzle component 210 can be accurately shaped into a desired shape and size. In particular, the solution discharge port, which is an end of the passage, disposed at an end of the nozzle part 210, may be processed into a desired size and shape. In addition, the nozzle part 210 may further include various non-conductive materials capable of processing the solution discharge port into a desired size and shape.
The nozzle component 210 may be mounted so that it passes through luer component 240 in one direction 1 to communicate with the interior of luer component 240. The pin member 220 may be disposed in the passage of the nozzle member 210.
The pin member 220 may be disposed in the passage of the nozzle member 210, aligned with the central axis of the passage, and spaced apart from the inner circumferential surface of the passage. The pin member 220 may be electrically connected to the connector member 250 through the tab member 230 and the fixing member 260, and receive power to function as an electrode. An electric field may be generated between the nozzle member 210 and the processing object 10 by the pin member 220, and a very small amount of solution may be precisely discharged through the solution discharge port of the nozzle member 210 by the electric field. This may be referred to as draining the solution by electrohydrodynamic phenomena.
The pin member 220 may be disposed in a passage of the nozzle member 210 and have a diameter of several tens of micrometers (μm) to several hundreds of micrometers (μm) such that the pin member 220 is spaced apart from an inner circumferential surface of the passage, and may also extend several tens of millimeters (mm) in one direction 1. The pin member 220 may have various cross-sectional shapes such as a ring shape, an oval shape, a rectangular shape, a polygonal shape, and the like. The cross-sectional shape and diameter of the pin member 220 may be sufficiently determined in consideration of the characteristics of the electric field when the pin member 220 functions as an electrode and the effective cross-sectional area within the passage of the nozzle member 210 other than the area occupied by the pin member 220. The end of the pin member 220 may have a tapered shape and extend up to the vicinity of the solution discharge port of the nozzle member 210.
A portion of pin component 220 may extend into the interior of luer component 240 and then be mounted on fitting component 230 in one orientation 1. The pin member 220 can be mounted and secured to the joint member 230 and aligned with the central axis of the nozzle member 210. Accordingly, an electric field can be uniformly generated under the nozzle member 210 to apply a uniform force to the ions within the solution, thereby precisely adjusting the discharge amount of the solution.
The pin member 220 may be made of a conductive material such that the pin member 220 receives power to function as an electrode. For example, when the pin member 220 has a length of several tens of millimeters (mm) and a diameter of several tens of micrometers (μm) to several hundreds of micrometers (μm), the pin member 220 may be manufactured of various metal or alloy materials having sufficient hardness so that the pin member 220 is not bent by its own weight or solution pressure. The pin member 220 may be made of at least one conductive material of tungsten, gold, silver, platinum, copper, and aluminum.
The connector member 230 may be inserted into the luer member 240 from the opposite side of the nozzle member 210 with respect to the center of the luer member 240 and then fixed to support the pin member 220. The joint member 230 may have a cylindrical shape, but is not particularly limited thereto. Fitting component 230 may have a diameter such that fitting component 230 is in contact with the interior surface of luer component 240.
The joint member 230 may extend in one direction 1, and an edge of one end of the joint member 230 toward the nozzle member 210 may contact the luer member 240, and the other end of the joint member 230 toward the connector member 250 may contact one end of the fixing member 260. Thus, the joint member 230 can be fixed.
The tab members 230 can be made of an electrically conductive material such that the tab members 230 receive power from the fixed member 260 to transmit power to the pin members 220. Here, the conductive material may include various metal or alloy materials. The tab component 230 can be made of the same material as the pin component 220.
The nozzle member 210 may be mounted on and supported by a luer member 240. Luer part 240 may connect nozzle part 210 to connector part 250. The luer part 240 may extend in one direction 1 and have a hollow rotating body using the central axis of the nozzle part 210 as a center. The inner circumferential surface of one side of the luer part 240 may have an inner diameter and a shape corresponding to the outer diameter of the nozzle part 210 and the shape of the outer circumferential surface of the nozzle part 210. In addition, the inner circumferential surface of the other side of luer part 240 may have an inner diameter and a shape corresponding to the outer diameter of coupling part 230 and the shape of the outer circumferential surface of coupling part 230. In addition, the outer circumferential surface of the other side of the luer part 240 may have an outer diameter and a shape corresponding to the inner diameter of the connector part 250 and the shape of the outer circumferential surface of the connector part 250. The nozzle part 210 may be mounted on an inner circumferential surface of one side of the luer part 240, and a thread may be provided on an outer circumferential surface of the other side of the luer part 240. As a result, the connector part 250 may, for example, be locked to the thread.
The connector part 250 may be inserted into the outer circumferential surface of the other side of the luer part 240 from the opposite side of the nozzle part 210 with respect to the center of the luer part 240 and mounted on the outer circumferential surface of the other side of the luer part 240. The connector part 250 may extend in one direction 1 and have a hollow cylindrical shape with a predetermined space therein, which passes through the inside of the connector part 250 in one direction 1. Threads may be provided on an inner circumferential surface of one end of the connector part 250 such that the luer part 240 is mounted on the inner circumferential surface of one end of the connector part 250.
In the connector part 250, at a predetermined position spaced apart from one end toward the other end, an inner circumferential surface may protrude toward a central axis of the connector part 250, and a thread may be provided on the inner circumferential surface of the protruding portion. The fixing member 260 may be locked to a thread provided on a protruding portion of the inner circumferential surface of the connector member 250. The connector part 250 and the fixing part 260 may be electrically connected to each other through a protruding portion of an inner circumferential surface of the connector part 250.
The connector part 250 may be installed such that the connector part 250 surrounds the outer circumferential surface of the other end of the luer part 240 toward one end of the luer part 240, and the fixing part 260 is inserted into and installed on the other end opposite to the one end. Here, the other end of the connector part 250 may be installed to surround a circumferential surface of one side of the fixing part 260.
At least a portion of an outer circumferential surface of one end of the connector part 250 may be recessed to define a predetermined insertion groove 251. A power supply unit 500, such as a clip member 510 of a 'Y' shape or a 'U' shape, may be fitted into the insertion groove 251 and coupled to the insertion groove 251. Here, the width of the insertion groove 251 in one direction 1 may be the same as the width of the clip member 510 in one direction 1, and thus, the clip member 510 may be coupled into the insertion groove 251 without a gap therebetween. Power may be applied to the connector part 250 through a clip member 510 of the power supply unit 500, the clip member 510 being coupled to an insertion groove 251 defined in an outer circumferential surface of the connector part 250. Connector component 250 may be fabricated from electrically conductive materials, such as various metals or alloy materials. Additionally, the connector member 250 may be made of the same material as the pin member 220.
The connector part 250 may not have a structure closely attached to or in contact with the other end of the coupling part 230 to prevent unnecessary force from being applied to the thread on the coupling surface between the connector part 250 and the luer part 240. Thus, when connector component 250 and luer component 240 are coupled to one another, fitting component 230 may not structurally interfere with connector component 250 and luer component 240. That is, when connector part 250 is mounted on luer part 240, the unnecessary force may be prevented from being applied to the threads of the coupling surface between connector part 250 and luer part 240. Accordingly, wear of the luer part 240, which is made of a relatively soft material, may be effectively prevented.
The fixing member 260 may pass through the other end of the connector member 250 in one direction 1 and then be installed. The fixed part 260 may include a rod member 261 and a head member 262. The rod member 261 may extend in one direction 1, and has one end inserted into the connector part 250 and coupled to an inner circumferential surface of the connector part 250 and the other end disposed with the head member 262. A thread may be provided on an outer circumferential surface of one end of the rod member 261. One end of the rod member 261 may have an outer diameter equal to or smaller than an inner diameter of the other end thereof. Thus, interference between the load member 261 and the luer part 240 may be prevented when tightly attached to the fitting part 230.
The fixing part 260 may be moved forward and backward in one direction 1 while the outer circumferential surface of one end of the load member 261 is locked to the protruding portion of the inner circumferential surface of the connector part 250. Here, securing component 260 may be positively moved toward fitting component 230 such that fitting component 230 is tightly attached to luer component 240. Therefore, the joint member 230 can be stably fixed.
At least a portion of the securing member 260 disposed within the connector member 250 may be fabricated from an electrically conductive material. Here, the load member 261 may be made of a conductive material. Accordingly, the connector part 250 and the terminal part 230 may be electrically connected to each other through the fixing part 260. Here, since the connection part 250 and the fixing member 260 may be in face-to-face contact with each other, and the fixing member 260 and the joint member 230 are in face-to-face contact with each other, a stable conductive path may be achieved between the connector member 250 and the joint member 230. The head member 262 may be made of a non-conductive material.
Since the fixing part 260 passes through the connector part 250 in one direction 1 and is aligned with the connector part 250 such that the fixing part 260 is closely attached to the joint part 230, when closely attached, the state of the fixing part 260 can be accurately controlled. That is, due to the connector part 250, the fixing part 260 may accurately contact the joint part 230 by a guide effect to prevent the pin part 220 from tilting.
The block jig and the fixing member of the apparatus for forming a pattern will be described in detail with reference to fig. 1 to 8.
The block jig 300 may be disposed on the support unit 100. In detail, the block jig 300 may be disposed to be spaced upward from the support unit 100. Mounting hole H1May pass through the block jig 300 in order to install the nozzle unit 200. The block jig 300 may include a plurality of blocks detachably coupled to each other such that one side of each of the plurality of blocks may be opposite to the mounting hole H1And (4) opening. Relative mounting hole H in multiple blocks1One block disposed at one side is rotatably mounted on another block disposed at the other side.
The block fixture 300 may include: a lower block 310 provided with one surface parallel to a direction (e.g., in one direction 1) in which the nozzle unit 200 is disposed; an upper block 320 extending in a direction in which the nozzle unit 200 is disposed and disposed on one area of the one surface of the lower block 310; and a cover block 330 rotatably mounted on the upper block 320 so as to be detachable from another region of the one surface of the lower block 310. Here, the lower block 310 and the upper block 320 may be integrally provided or may be separately provided, and then coupled to each other. In addition, the covering block 330 may be provided to be separated from the remaining blocks. The cover block 330 may be mounted on at least one of the upper block 320 and the lower block 310 by a hinge member 340, which will be described below.
The lower block 310 may include an upper body extending in one direction 1 and a lower body disposed on a bottom surface of the upper body to protrude obliquely in a direction crossing the one direction 1. The upper block 320 and the cover block 330 may be mounted on the top surface of the upper body, and the lower body may be supported by the mounting unit 400.
The upper block 320 may be disposed on a top surface of an upper body of the lower block 310 to extend in one direction 1. The upper block 320 may be disposed on one of one area and another area of the top surface of the upper body of the lower block 310. The cover block 330 may extend in one direction 1 and be rotatably mounted on the upper block 320 to cover another area of the top surface of the upper body of the lower block 310.
Here, one region and the other region of the top surface of the upper body of the lower block 310 may be regions separated by a region line (not shown) extending in a direction in which the nozzle unit 200 is disposed (e.g., in one direction 1) on one surface of the lower block 310.
Mounting hole H1May be defined in one surface of the lower block 310 by passing through surfaces of the upper block 320 and the cover block 330 facing each other in a direction in which the nozzle unit 200 is disposed (e.g., in one direction 1). The nozzle unit 200 may be mounted to the mounting hole H in one direction 11The above. Mounting hole H1May be defined as offset relative to the upper block 320. Mounting hole H1May be disposed at one side of the upper block 320.
The block clamp 300 may include a hinge member 340, the hinge member 340 being installed to connect the top surface of the upper block 320 to the top surface of the cover block 330. When the cover block 330 is rotated by the hinge member 340 to mount the nozzle unit 200, and the hole H is mounted1The cover block 330 may be supported by the upper block 320 to prevent the nozzle unit 200 from being separated or lost when one surface thereof is opened.
The block jig 300 may include a locking member 350, the locking member 350 being installed to pass through the upper block 320 and the cover block 330 in a direction crossing a direction in which the nozzle unit 200 is disposed. For example, the locking member 350 may be referred to as a block coupling knob.
The locking member 350 may allow the cover block 330 to be mounted and secured to the upper block 320. The locking member 350 may include: a locking lever 351, the locking lever 351 being disposed at the mounting hole H1An upper side and has one end installed through the upper block 320 and the cover block 330; and a lockA head 352, the locking head 352 being disposed on the other end of the locking bar 351. The locking lever 351 may be divided into a portion disposed through the upper block 320 and a portion disposed through the cover block 330. A thread may be provided on an outer circumferential surface of an end of a portion where the upper block 320 is installed through, and a thread may also be provided on an inner wall of a through-hole of the upper block 320, into which the locking lever 351 may be inserted. Thus, the locking bar 351 may be locked to the upper block 320. The portion of the locking lever disposed through the covering block 330 may have a smooth outer circumferential surface and may be slidably supported by a through hole defined through the covering block 330 such that the locking lever 351 passes therethrough through the portion of the covering block 330.
The through-hole defined through the cover block 330 such that the locking lever 351 is disposed through the cover block 330 with a portion passing therethrough may have one area contacting the upper block 320 and another area remaining except the one area. Here, one region may have an inner diameter greater than an outer diameter of an end of a portion where the locking lever 351 is installed through the upper block 320. Threads may be provided on another area of the penetration hole of the cover block 330 to be locked to threads corresponding to an end of a portion where the locking bar 351 is installed through the upper block 320. That is, the screw thread may be provided on both ends of the penetration hole of the cover block 330 remote from the end of the upper block 320. In order to extract the locking lever 351 from the through hole of the cover block 330 toward the lock head 352, the thread of the locking lever 351 passing through the end of the portion where the upper block 320 is seated must pass through the through hole while rotating along the thread of the through hole.
Therefore, in order to rotate the cover block 330 to open the mounting hole H1Even if the locking between the locking rod 351 and the penetration hole of the upper block 320 is released and the locking rod 351 is withdrawn toward the lock head 352, the insertion of the locking rod 351 into the penetration hole of the cover block 330 can be maintained by the screw thread of the penetration hole of the cover block 330. That is, the loss of the locking lever 351 can be prevented. The lock head 352 may act as a handle for locking the rotation of the rod 351.
As described above, in the apparatus for forming a pattern according to the exemplary embodiment, when the mounting hole H is opened1To replace the nozzle unit 200, a hinge member 340 is provided as a connecting member for connecting the cover block 330 toThe structure of the upper block 320. In addition, a locking member 350 is provided as a structure for detaching the cover block 330 from the upper block 320. In addition, the locking member 350 may have a structure that prevents the locking member 350 from being completely separated from the cover block 330. That is, when the nozzle unit 200 is replaced, loss of the cover block 300 and the locking member 350 may be prevented in advance, and the block jig 300 may be improved in assembly efficiency.
The block fixture 300 may include a power connection hole H2. Power connection hole H2May be defined to pass through the upper block 320 and the cover block 330 toward a predetermined position of the top surface of the insertion groove 251 defined in the connector part 250 of the nozzle unit 200, and the insertion groove 251 may pass through the power connection hole H2Exposed to the upper side of the block jig 300.
The apparatus for forming a pattern may include a nozzle unit 200 for defining the mounting hole H1An inner fixing member. The fixing member may be provided at the nozzle unit 200 and the mounting hole H1On at least one of the surfaces facing each other.
The fixing member may include a hook member 241 configured to surround at least a portion of the outer circumferential surface of the nozzle unit 200 or the mounting hole H1At least a portion of the inner wall of (a). In this case, the hook member 241 may be coupled with the mounting hole H1Or the outer circumferential surface of the nozzle unit 200 to define the position of the nozzle unit 200 in one direction 1 to the mounting hole H1And (4) the following steps.
In addition, the fixing member may include a hook groove 321, and the hook groove 321 is recessed to surround the mounting hole H1Or at least a portion of the outer circumferential surface of the nozzle unit 200 so that the hook member 241 can be inserted. In this case, the hook member 241 may be inserted into the hook groove 321 to define the position of the nozzle unit 200 in one direction 1 to the mounting hole H1And (4) the following steps.
In an exemplary embodiment, the hook member 241 protrudes to surround the outer circumferential surface at a predetermined position spaced from the other end to one end of the luer part 240 of the nozzle unit 200, and the hook groove 321 is recessed to surround the mounting hole H1Inner wall of (2)Thus corresponding to the formation position of the hook member 241. When the nozzle unit 200 is mounted in the mounting hole H1In the above, the hook member 241 may be inserted into the hook groove 321 and then installed to be coupled. Therefore, the degree of freedom of the nozzle unit 200 in one direction 1 can be restricted to the mounting hole H1And (4) the following steps. That is, the hook member 241 and the hook groove 321 may serve as a reference surface or a reference position in one direction 1 to accurately position the position of the nozzle unit 200 when replacing the nozzle unit 200 and prevent the nozzle unit 200 from sliding in one direction 1.
The fixing member may include: a coupling groove 252 recessed into at least one position of an outer circumferential surface of the connector part 250 of the nozzle unit 200; and a coupling protrusion mounted in the mounting hole H1Is elastically supported such that the coupling protrusion is inserted into the coupling groove 252. Here, the coupling protrusion may include a first coupling protrusion 360 and a second coupling protrusion 370.
The coupling grooves 252 may be recessed to surround a plurality of locations on the outer circumferential surface of the connector part 250 spaced apart from each other in one direction 1. The first coupling protrusion 360 may be installed to pass through the installation hole H1So that the first coupling protrusion 360 is seated at the position where the first coupling protrusion 360 is inserted into the mounting hole H1At a predetermined position in the coupling groove 252 above the central axis. Here, the first coupling protrusion 360 may be mounted to the mounting hole H1Such that the first coupling protrusion 360 is disposed at a predetermined position vertically facing the top surface of the upper body of the lower block 310, and may protrude toward the top surface of the upper body of the lower block 310. The second coupling protrusion 370 may be installed to pass through the installation hole H1So that the first coupling protrusion 360 is seated at the position where the first coupling protrusion 360 is inserted into the mounting hole H1At a predetermined position in the coupling groove 252 above the central axis. Here, the second coupling protrusion 370 may be mounted on a cover block-side inner wall of the mounting hole H1, and may protrude from the cover block 330 toward the upper block 320.
The coupling protrusion may include a ball plunger, and is spaced apart with respect to a central axis of the nozzle unit 200 in a direction crossing the one direction 1, for example, in all of the vertical and horizontal directions 3 and 2, and also protrudes toward the nozzle unit 200 and then is inserted into the coupling groove 252. Here, the first coupling protrusion 360 may be installed to be spaced apart from the central axis of the nozzle unit 200 in one plane in the horizontal direction 2, for example, with respect to one plane (not shown) perpendicular to the central axis of the nozzle unit 200. In addition, the second coupling protrusion 370 may be installed to be spaced apart from the above-described central axis on one plane described above in the vertical direction 3. Due to the above-described facility structure, the coupling protrusion may be installed to always push the nozzle unit 200 from the cover block 330 toward the upper block 320.
The freedom of the nozzle unit 200 can be restricted to the mounting hole H by the coupling groove 252 and the coupling protrusion in a plurality of directions crossing the one direction 11And (4) the following steps. That is, the nozzle unit 200 may be pressed and fixed in all directions with respect to a plurality of directions crossing one direction 1, and all top and side surfaces of the outer circumferential surface of the nozzle unit 200 may be fixed.
As described above, the apparatus for forming a pattern according to an exemplary embodiment may include a fixing member as a means for defining the degree of freedom of the nozzle unit 200 at the mounting hole H1Inner structure. Therefore, when replacing and installing the nozzle unit 200, the nozzle unit 200 may be inserted into the installation hole H before the cover block 330 is attached1Is fixed to the mounting hole H1To prevent the nozzle unit 200 from being shaken by the fixing member. In this case, the cover block 330 may be stably coupled. Accordingly, the nozzle unit 200 can be always mounted on the block jig 300 in a fixed position and in an appropriate state. That is, when the nozzle unit 200 is replaced, the nozzle unit 200 may be improved in position repeatability, and the inclination of the nozzle unit 200 may be prevented. Therefore, when the nozzle unit 200 is replaced, the setup time can be reduced.
The remaining components of the apparatus for forming a pattern will be described in sequence with reference to fig. 1 to 5.
The mounting unit 400 may be disposed on a stage (not shown) and mounted relatively movably with respect to the support unit 100 in a front/rear direction, a left/right direction, and an upward/downward direction. The block jig 300 may be mounted on the mounting unit 400. The mounting unit 400 may be accurately operated such that the nozzle unit 200 is disposed at a height of several micrometers to several hundreds of micrometers (μm) from the upper surface of the processing object 10. The position of the nozzle member 210 with respect to the processing object 10 can be accurately adjusted by using the mounting unit 400.
The power supply unit 500 may be connected to the nozzle unit 200 to apply a voltage for spraying the solution. For example, the power supply unit 500 may enable the clip member 510 to be inserted into the power connection hole H of the block clip 3002Thereby, the clip member 510 is coupled into the insertion groove 251 of the connector part 250 of the nozzle unit 200, and the voltage applied by the power supply unit 500 can be smoothly transmitted to the pin part 220 via the clip member 510, the insertion groove 251, the connector part 250, the load member 261, and the connector part 230. The insertion position and the coupling position of the clip member 510 can pass through the power connection hole H2Is precisely specified.
A predetermined potential difference between the nozzle unit 200 and the processing object 10 may be generated by the power supply unit 500, and thus, an electric field may be generated by the potential difference. Ions within the solution may be expelled from the nozzle component 210 by the electric field. The power supply unit 500 may generate DC power or AC power. When generating DC power, the electrode may be connected to the processing object 10. When generating AC power, sinusoidal or pulsed AC power may be generated over a predetermined voltage or frequency range. The power supply unit 500 may control the intensity, frequency, and amount of current of the applied power to control the amount and pattern of solution discharge.
The illumination unit 610 may be configured to generate light for photographing a pattern formed on the top surface of the processing object 10. The lighting unit 610 may be disposed under the support unit 100. The optical unit 620 may be configured to photograph a pattern formed on the top surface of the processing object 10. The illumination unit 610 and the optical unit 620 are not particularly limited to this configuration.
The control unit 700 may be configured to control the overall operation of the apparatus for forming a pattern, excluding the support unit 100, the nozzle unit 200, the mounting unit 400, and the power supply unit 500, so that a preset pattern is precisely formed on the top surface of the processing object 10.
The control unit 700 may include hardware such as an industrial personal computer and software for controlling a process, and also include a display device and an input/output device for easy control. The control unit 700 need not be in the form of a computer as long as the control unit 700 adequately controls the apparatus. In addition, the control unit 700 may include various types of interfaces, such as a PCB for smooth connection with the device.
According to an exemplary embodiment, the nozzle unit and the block jig may have a coupling structure for improving positional repeatability of the nozzle unit to improve positional repeatability of the nozzle unit when the nozzle unit is replaced. Therefore, the nozzle unit can be replaced quickly and accurately, and after the nozzle is replaced, the solution discharge port disposed at the end of the nozzle member can be placed accurately in the visual region of the optical unit after the nozzle is replaced. Therefore, the next repair process using the replaced new nozzle unit can be performed immediately. Therefore, assembly errors in replacing the nozzle unit can be prevented, setup time can be reduced, and the entire repair process can be improved in efficiency.
Although the deposition apparatus and method have been described with reference to particular embodiments, they are not limited thereto. It should be noted that the configurations and methods disclosed in the above embodiments of the present invention may be combined with or applied across each other and modified in various forms, and these modifications may be considered to be within the scope of the present invention. Accordingly, it will be readily understood by those skilled in the art that various modifications and changes may be made thereto without departing from the spirit and scope of the present invention as defined by the appended claims.
Claims (12)
1. An apparatus for forming a pattern that discharges a solution to form the pattern, characterized by comprising:
a supporting unit on which a processing object is placed;
a nozzle unit disposed on the support unit to discharge the solution;
a block jig disposed on the support unit and having a mounting hole to mount the nozzle unit; and
a fixing member configured to define the nozzle unit within the mounting hole,
wherein the block jig comprises:
a lower block provided with one surface parallel to a direction in which the nozzle unit is disposed;
an upper block extending in the direction in which the nozzle unit is disposed, on one area of the one surface of the lower block; and
a cover block rotatably mounted on the upper block so as to be detachable from another region of the one surface of the lower block,
wherein the mounting hole passes through a surface of the lower block on the one surface thereof where the upper block and the cover block face each other in a direction in which the nozzle unit is disposed.
2. The apparatus for forming a pattern according to claim 1, wherein the fixing member is disposed on at least one of surfaces of the nozzle unit and the mounting hole facing each other.
3. The apparatus for forming patterns according to claim 1, wherein the fixing member comprises a hook member disposed to surround at least a portion of an outer circumferential surface of the nozzle unit or at least a portion of an inner wall of the mounting hole, and
the hook member is in contact with the inner wall of the mounting hole or the outer circumferential surface of the nozzle unit to define the position of the nozzle unit within the mounting hole.
4. The apparatus for forming patterns according to claim 3, wherein the fixing member includes a hook groove recessed to surround at least a portion of the inner wall of the mounting hole or at least a portion of the outer circumferential surface of the nozzle unit so that the hook member can be inserted.
5. The apparatus for forming a pattern according to claim 1, wherein the fixing member comprises:
a coupling groove recessed to at least one position of an outer circumferential surface of the nozzle unit; and
a coupling protrusion installed on at least one position of an inner wall of the mounting hole and elastically supported such that the coupling protrusion can be inserted into the coupling groove.
6. The apparatus for forming patterns according to claim 5, wherein the coupling protrusion is spaced apart in a vertical direction and a horizontal direction crossing a direction in which the nozzle unit is disposed with respect to a central axis of the nozzle unit to protrude toward the nozzle unit.
7. The apparatus for forming a pattern according to claim 1, wherein the one region and the other region of the top surface of the upper body of the lower block are regions separated by a region line extending in a direction in which the nozzle unit is disposed and located on the one surface of the lower block.
8. The apparatus for forming a pattern according to claim 1, wherein the block jig includes a locking member that is installed through the upper block and the cover block in a direction crossing the direction in which the nozzle unit is disposed,
a screw thread is provided on an outer circumferential surface of an end portion of the locking member passing through the upper block and locked to the upper block, and the locking member passes through the cover block through a portion of the cover block and is slidably supported, and
threads corresponding to the threads on the end of the locking member are provided on ends of both ends of a through hole defined in the cover block to pass the locking member therethrough, the ends being remote from the upper block.
9. The apparatus for forming a pattern according to claim 1, wherein the nozzle unit comprises:
a nozzle member disposed on the support unit and having a passage through which the solution electrohydrodynamically passes;
a pin member disposed in the passage of the nozzle member; and
a connector part connected to the pin part to supply power.
10. The apparatus for forming a pattern according to claim 9, wherein the nozzle unit comprises:
a luer part installed to connect the nozzle part to the connector part; and
a fitting member disposed within the luer member to support the pin member for alignment with a central axis of the nozzle member,
wherein the pin member is fixedly mounted on the joint member and spaced apart from the inner circumferential surface of the nozzle member.
11. The apparatus for forming a pattern according to claim 10, wherein the nozzle unit includes a fixing member that is inserted into and mounted on an interior of the connector member at a side opposite to the luer member with respect to the connector member and that has an end portion that contacts the fitting member,
wherein one end of the fitting part is in contact with an inner surface of the luer part, an
The other end of the joint member is spaced apart from the inner circumferential surface of the connector member and contacts the end of the fixing member to fix the position.
12. The apparatus for forming a pattern of claim 11 wherein the nozzle component comprises at least one of glass and sapphire,
the pin member includes at least one conductive material of tungsten, gold, silver, and copper,
the connector component, and at least a portion of the securing component disposed within the connector component comprise an electrically conductive material, an
The solution includes a conductive ink.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2017-0083646 | 2017-06-30 | ||
| KR1020170083646A KR101950441B1 (en) | 2017-06-30 | 2017-06-30 | Forming apparatus for pattern |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109216231A CN109216231A (en) | 2019-01-15 |
| CN109216231B true CN109216231B (en) | 2021-12-21 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201810693050.0A Active CN109216231B (en) | 2017-06-30 | 2018-06-29 | Apparatus for forming pattern |
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| KR (1) | KR101950441B1 (en) |
| CN (1) | CN109216231B (en) |
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| JP2004344774A (en) * | 2003-05-22 | 2004-12-09 | Dainippon Screen Mfg Co Ltd | Substrate treating apparatus |
| CN1849178A (en) * | 2003-08-08 | 2006-10-18 | 夏普株式会社 | Electrostatic suction-type fluid discharging method and device |
| CN101623954A (en) * | 2005-01-31 | 2010-01-13 | 独立行政法人产业技术综合研究所 | Collective transfer ink jet nozzle plate and method for manufacturing the same |
| CN101678373A (en) * | 2007-05-17 | 2010-03-24 | 玛丽皇后与西田学院 | Electrostatic spraying device and method of electrostatic spraying |
| KR20160109631A (en) * | 2015-03-12 | 2016-09-21 | 참엔지니어링(주) | Apparatus and method for forming pattern line |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05154428A (en) * | 1991-12-11 | 1993-06-22 | Toshiba Corp | Dispenser device |
| KR200475780Y1 (en) * | 2013-08-08 | 2015-01-02 | 신지현 | Spray nozzle for process of the semiconductor substrate |
| KR101426770B1 (en) * | 2014-05-09 | 2014-08-05 | 주식회사 에스피텍 | Jig for touch-pen grip |
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2017
- 2017-06-30 KR KR1020170083646A patent/KR101950441B1/en active IP Right Grant
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2018
- 2018-06-29 CN CN201810693050.0A patent/CN109216231B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004344774A (en) * | 2003-05-22 | 2004-12-09 | Dainippon Screen Mfg Co Ltd | Substrate treating apparatus |
| CN1849178A (en) * | 2003-08-08 | 2006-10-18 | 夏普株式会社 | Electrostatic suction-type fluid discharging method and device |
| CN101623954A (en) * | 2005-01-31 | 2010-01-13 | 独立行政法人产业技术综合研究所 | Collective transfer ink jet nozzle plate and method for manufacturing the same |
| CN101678373A (en) * | 2007-05-17 | 2010-03-24 | 玛丽皇后与西田学院 | Electrostatic spraying device and method of electrostatic spraying |
| KR20160109631A (en) * | 2015-03-12 | 2016-09-21 | 참엔지니어링(주) | Apparatus and method for forming pattern line |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109216231A (en) | 2019-01-15 |
| KR101950441B1 (en) | 2019-02-20 |
| KR20190003134A (en) | 2019-01-09 |
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