TWI716587B - Forming apparatus for pattern line - Google Patents

Abstract

The present invention comprises a nozzle portion located to face to a treated object, a pin portion disposed inside of the nozzle portion, a connector portion connected to the pin portion to supply electric power, and a tap portion supporting the pin portion so as to align to a central axis of the nozzle portion, wherein solution is discharged using Electrohydrodynamics (EHD) phenomenon, and a forming apparatus for pattern line which can enhance the life span of the nozzle portion in forming pattern line is provided.

Description

Pattern line forming equipment

The present invention relates to a pattern line forming device, and in particular to a pattern line forming device that can extend the life of a nozzle portion, the nozzle portion is set to be able to use electrohydrodynamics (Electrohydrodynamics, EHD) phenomenon to discharge solution .

Various electronic products released recently have semiconductor devices for performing various functions. The semiconductor device is in a trend of becoming lighter and thinner, and the line width of the pattern line for connecting each semiconductor device is becoming narrower.

For example, the type of flat panel displays (FPD, LCD), organic light emitting diodes (Organic Light Emitting Diode, OLED) or light emitting diodes (Light Emitting Diode, LED) In the case of Display), the number of primitives realized per unit area becomes larger. Therefore, the circuit devices used to drive these picture elements become smaller, and the line width of the pattern lines used to connect the respective circuit devices becomes narrower.

In addition, as the displays of mobile devices (such as smart phones and laptop computers) become lighter and smaller, they are used to drive the displays of these devices. The pattern lines of the printed circuit board (PCB) are also finely and meticulously formed.

Following the trend, we provide a repair device for various facilities used to manufacture semiconductors, flat panel displays, or printed circuit boards. The repair device discharges conductive ink in the form of fine droplets from nozzles by using electrohydrodynamics (EHD) phenomenon To form pattern lines with a width of several μm. Here, the repair device is provided with a nozzle that uses electrohydrodynamics to discharge conductive ink.

In order to use electrohydrodynamics to discharge a small amount of conductive ink from the nozzle, the nozzle should act as an electrode to form an electric field under the nozzle. Therefore, the nozzle should be made of metal, or at least a metal film should be provided on the outer circumferential surface of the nozzle.

For example, Korean Early Patent Publication No. 10-2010-0027842 discloses a nozzle formed of a conductive material as a member of a patterned device. In addition, Korean Early Patent Publication No. 10-2014-0079288 discloses that a glass material nozzle provided with a metal film at an end portion as a member of a printing device utilizes the phenomenon of electrohydrodynamics.

However, when the nozzle is made of metal, it is difficult to process, so that it is difficult to form an end portion area as small as necessary. Therefore, the nozzle is made of glass, and the outer circumferential surface of the nozzle is coated with a metal film. In this case, it is easy to process the nozzle, so that the end portion area can be formed as small as necessary, and can be uniformly formed under the nozzle by a metal film uniformly applied to the outer circumferential surface of the nozzle electric field.

On the other hand, a nozzle made of glass and coated with a metal film has the following Problem: As the hours of use become longer, the metal film separates from the outer circumferential surface. If the metal film separates from the outer circumferential surface of the nozzle and falls off, the voltage applied to the metal film should be gradually increased to maintain the discharge durability of the nozzle.

However, since it is difficult to accurately control the voltage applied to the metal film to offset the degree of separation of the metal film, it is difficult to form a uniform electric field under the nozzle in practice. Also, even if the voltage applied to the metal film to offset the degree of separation of the metal film is accurately controlled, since the shape of the metal is irregular, it is difficult to form an electric field uniformly under the nozzle in practice. Therefore, there is a problem that as the usage hours become longer, it is difficult to accurately control the discharge amount of the conductive ink.

[Prior Art Literature]

[Patent Document 1] KR 10-2010-0027842 A

[Patent Document 2] KR 10-2014-0079288 A

[Patent Document 3] KR 10-2015-0146080 A

The present invention provides a pattern line forming apparatus capable of extending the life of a nozzle part that is configured to form a pattern line by discharging a solution using an electrohydrodynamic (EHD) phenomenon.

According to an embodiment of the present invention, the pattern line forming apparatus is an apparatus that uses the phenomenon of electrohydrodynamics to discharge a solution. The pattern line forming apparatus includes a nozzle part, Is positioned to face the object to be processed; a pin portion provided in the nozzle portion; and a connector portion electrically connected to the pin portion to supply power.

In an embodiment of the present invention, the pattern line forming apparatus may further include a tap portion capable of supporting the pin portion to be aligned with the center axis of the nozzle portion.

In an embodiment of the present invention, the pattern line forming apparatus may further include: a luer connector part installed to be connected to the nozzle part and the connector part; and a syringe part connected to the nozzle part , Wherein the faucet part may be fixed such that at least a part of the faucet part is inserted into the inside of the luer joint part at an opposite side of the nozzle part with respect to the luer joint part.

In an embodiment of the present invention, the pin part may be fixed to be installed to the faucet part and may be separated from the inner circumferential surface of the nozzle part.

In an embodiment of the present invention, the connector part may be installed at the luer connector part on the opposite side of the nozzle part with respect to the luer connector part, wherein the connector A part of the inner surface of the part contacts the faucet part to be electrically connected to each other.

In an embodiment of the present invention, the faucet part may be fixed in position in one direction and in the other direction intersecting the one direction, and one end of the faucet part contacts the luer connector Part of the inner surface and the other end contacting the inner surface of the connector part.

In an embodiment of the present invention, the syringe part may be in the Luer The joint part is installed at the connector part on the opposite side with respect to the connector part.

In an embodiment of the present invention, the nozzle part, the Luer joint part, the connector part, and the syringe part may be aligned with the center axis of the nozzle part, and the inside of each part may be Connected.

In an embodiment of the present invention, at least one channel may be formed in or on the outer circumferential surface of the faucet part through which the solution passes, and one side of the channel may be connected to the outer circumferential surface. The inside of the nozzle part or the Luer joint part, and the other side of the channel may be connected to the inside of the connector part or the syringe part.

In an embodiment of the present invention, at least one hole may be formed through the faucet part in a direction crossing the central axis of the nozzle part, and the hole is communicated with the passage of the faucet part.

In an embodiment of the present invention, the nozzle part may include at least one of glass and sapphire.

In an embodiment of the present invention, the pin portion may include a conductive material, the conductive material is at least one of tungsten, gold, silver, and copper, and the faucet portion and the connector portion may include conductive material .

In an embodiment of the present invention, the solution may include conductive ink, and the nozzle portion may have a conical tip formed on an end portion, the conical tip having a path formed inside the conical tip, The path can discharge the conductive ink through electrohydrodynamic pressure.

In an embodiment of the present invention, the pin portion may have a tapered tip at an end portion, the tapered tip is located inside a tapered tip formed at the end portion of the nozzle portion, and can extend To the vicinity of the solution discharge port at the tip of the cone.

According to the embodiments of the present invention, the life of the nozzle part that is configured to form pattern lines on various substrates using electrohydrodynamics can be significantly increased, for example, to more than three times the life of the nozzle part of the conventional technology. Therefore, the replacement interval of the nozzle part can be longer than the replacement interval of the nozzle part of the conventional technology, thereby saving the time and cost of replacing the nozzle part in the conventional technology. Also, the nozzle part can be maintained in good condition before being replaced. Therefore, the reliability of the equipment can be improved, and the productivity of the corresponding process and the quality of the products manufactured through the corresponding process can be improved.

The present invention can be applied to an ink repair device using electrohydrodynamic phenomena, for example, during or after the manufacture of a flat panel display, in order to prevent open defects in pattern lines formed on one surface of the substrate. In this case, a pin portion may be provided at the inner center axis of the nozzle portion, and the pin portion may be used as an electrode. Therefore, the device can be constructed more simply than the traditional technology, the pin part can be protected inside the nozzle part, the stable operation of the device can be realized, the electric field can be uniformly formed under the nozzle part, and the trace amount of conductive ink can be discharged accurately .

In order to make the above-mentioned features and advantages of the present invention more comprehensible, the following specific embodiments are described in detail in conjunction with the accompanying drawings.

10: Object being processed

100: Support unit

200: nozzle unit

210: nozzle part

211: Cone tip

220: Pin part

221: tapered tip

230: Syringe part

240: connector part

241: protrusion/inner surface protrusion

250: leading part

251: Channel

252: hole

260: Luer connector part

261: contact surface

270: Distance adjustment part

300: power supply unit

310: Clamping parts

400: Air pressure unit

510: lighting unit

520: optical unit

600: control unit

A, B: Part

Fig. 1 is a schematic diagram showing a pattern line forming apparatus according to an embodiment of the present invention.

Fig. 2 is an enlarged view of a part of a pattern line forming apparatus according to an embodiment of the present invention.

Fig. 3 is an enlarged view of another part of the pattern line forming apparatus according to the embodiment of the present invention.

4(a) and 4(b) are exploded views showing a pattern line forming apparatus according to an embodiment of the present invention.

5 to 8 are schematic diagrams of nozzle parts according to comparative examples in contrast with the present invention.

Fig. 9 is a schematic diagram of a nozzle part according to an embodiment of the present invention.

10 to 12 are schematic diagrams of the formation results of pattern lines according to experimental examples of the present invention.

Hereinafter, certain embodiments of the present invention will be explained in detail with reference to the drawings. However, the present invention is not limited by the embodiments disclosed below, but can be implemented in various mutually different forms. The embodiments of the present invention are provided only to complete the disclosure of the present invention and to facilitate those of ordinary skill in the art to understand the scope of the present invention. On the other hand, the drawings can be enlarged to facilitate the description of the embodiments of the present invention, and the same symbols in the drawings denote the same elements.

In the following, embodiments of the present invention will be described with reference to the ink repair process and ink repair facilities in the field of flat panel display manufacturing. However, the present invention can be applied to various manufacturing processes and facilities that utilize electrohydrodynamic phenomena to discharge various liquid phase materials.

Fig. 1 is a schematic diagram showing a pattern line forming apparatus according to an embodiment of the present invention. 1, a pattern line forming apparatus according to an embodiment of the present invention will be explained.

According to the embodiment of the present invention, the pattern line forming apparatus is an apparatus that uses the phenomenon of electrohydrodynamics to discharge the solution, and the pattern line forming apparatus includes: a supporting unit 100 configured to support the object to be processed 10; and a nozzle unit 200 configured to support At one side of the unit 100, it is formed to be able to spray the solution to form a pattern line; and the power supply unit 300 is connected to the nozzle unit 200 and is set to be able to apply power.

And, the pattern line forming apparatus may further include an air pressure unit 400 formed to be capable of supplying air pressure to the nozzle unit 200; an illumination unit 510, which is provided at the other side of the support unit 100, and is formed to be capable of photographing the pattern line The illumination is generated; and the optical unit 520 is set to one side of the support unit 100 and can take an image of the pattern line. The support unit 100, the nozzle unit 200, the power supply unit 300, the air pressure unit 400, the lighting unit 510, and the optical unit 520 may be controlled by the control unit 600 when they are in operation.

The object to be processed 10 may include electronic devices and various substrates that are being performed on one surface or have been completed on one surface for manufacturing the conductive pattern lines. For example, the processed object 10 may include a glass substrate, a silicon substrate, or a plastic substrate with predetermined pattern lines formed on one surface. The processed object 10 may be supported by the supporting unit 100.

The solution may include conductive ink for forming pattern lines. The conductive ink may include ink particles and a solvent. In addition, the conductive ink may contain metal particles, and may contain ions. The metal particles are gold, silver, platinum, chromium, etc., and alloys or oxides thereof. On the other hand, the solvent may have a volatile material, a water-soluble material, or a fat-soluble material. The solution is not limited to the above-mentioned materials, but may include, for example, various solutions capable of forming conductive pattern lines by being sprayed on a substrate using an electrohydrodynamic phenomenon.

The supporting unit 100 may include a stage glass that is formed to be able to support the processed object 10 at one side (for example, at the upper side). Near the edge of the support unit 100, an alignment member (not shown in the figure) may be provided, which aligns the position of the processed object 10 to a desired position by moving in a horizontal direction. At one surface of the supporting unit 100 (for example, at the upper surface), a lifting pin (not shown in the figure) may be provided to support the processed object 10 by moving in a vertical direction, and a vacuum clamp may be provided The tray (not shown in the figure) can stably support the processed object 10.

The support unit 100 can be fixed in position by being installed at one side of a table (not shown in the figure), and can be installed at the table to be able to be in at least one of a horizontal direction and a vertical direction. Move up.

At one side of the platen, a mounting unit (not shown in the figure) may be provided. The mounting unit may be installed at the platen so as to be movable in at least one of a horizontal direction and a vertical direction, or may be fixed in position by being installed at the platen. At the installation unit, the nozzle unit 200 can be Line installation and support. The mounting unit can operate accurately to place the nozzle unit 200 at a position separated from a surface of the object 10 supported on the support unit 100 by several μm to several hundred μm.

The nozzle unit 200 according to an embodiment of the present invention may be placed at one side of the support unit 100 (for example, at the upper side). The nozzle unit 200 discharges a small amount of solution by utilizing the phenomenon of electrohydrodynamics to accurately form a pattern line with an extremely narrow width on one surface of the object 10 to be processed, or to repair a defect of the pattern line.

2 and 3 are respectively enlarged views of part A and part B shown in FIG. 1. In addition, FIGS. 4(a) and 4(b) are exploded views of a pattern line forming apparatus according to an embodiment of the present invention. Here, FIG. 4(a) is an exploded view showing the nozzle unit of the pattern line forming apparatus according to the embodiment of the present invention, and FIG. 4(b) is a separate view showing only the components of the nozzle unit shown in FIG. 4(a) View of the faucet part and the pin part.

1 to 4(b), the nozzle unit of the pattern line forming apparatus according to the embodiment of the present invention will be explained in detail.

The nozzle unit 200 includes: a nozzle part 210, which is placed to face the object to be processed 10; a pin part 220, which is arranged inside the nozzle part 210, is aligned with the center axis of the nozzle part 210, and is used when power is supplied. And the connector part 240, connected to the pin part 220, and used to supply power.

In addition, the nozzle unit 200 may further include: a tap portion 250, a supporting pin portion 220, so that the pin portion 220 is aligned with the center axis of the nozzle portion 210; a luer joint portion 260 installed to connect the nozzle portion 210 and the connector portion 240 ; Syringe part 230, installed at the connector part 240, connected to the nozzle part 210, It can supply the solution; and the distance adjusting part 270 is formed to be able to finely control the position of the nozzle part 210 in the vertical direction with respect to the processed object 10, for example.

The nozzle part 210 may be provided at the upper side of the support unit 100 and may be placed to face the object 10 to be processed. The nozzle part 210 may extend in one direction (for example, in the longitudinal direction). The nozzle part 210 may have a path inside it. The path may be formed to penetrate the inside of the nozzle part 210 in one direction. The path may be a path through which the solution can pass. The nozzle part 210 may have a conical tip 211 formed at an end part. The cone tip 211 may be formed in a shape in which the outer diameter and the inner diameter become smaller as it approaches the end portion, for example, a shape of a Taylor cone. Here, the path formed in one direction through the inside of the conical tip 211 that can pass the solution through electrohydrodynamic phenomena can be formed with the width of the inner circumferential surface (for example, with an inner diameter less than a few μm). That is, the conical tip 211 has a path formed inside with a predetermined shape and the width of the inner circumferential surface, so that the conductive ink can be discharged by the pressure of electrohydrodynamics. The above-mentioned nozzle part 210 may include a hollow cylinder formed into a thin shape, for example, a capillary tube.

The nozzle part 210 may be made of a material including at least one of glass and sapphire. Therefore, the nozzle part 210 can be smoothly formed into a desired shape and size. Also, the solution discharge port formed at the end of the conical tip 211 (ie, the end of the path through which the solution passes) may be formed in a desired size, for example, a size less than or equal to several μm. Of course, the material of the nozzle part 210 may include various non-conductors other than the above-mentioned materials, and the shape of the non-conductor can be precisely processed to a size less than or equal to several μm.

The nozzle part 210 may be installed at the luer joint part 260 in one direction. The nozzle part 210 and the luer joint part 260 may be in internal communication with each other. The pin part 220 may be placed inside the nozzle part 210.

The pin part 220 may be provided inside the nozzle part 210. The pin part 220 may be electrically connected to the connector part 240 via the faucet part 250, and may be used as an electrode by being applied with power. The pin portion 220 can function as an electrode, and an electric field can be formed between the processed object 10 and the electrode through the pin portion 220. The solutions contained in the nozzle part 210 can be accurately discharged in an extremely small amount by each of the electric fields.

The pin part 220 may be a member shaped as a thin pin, which is formed to have a diameter smaller than the width of the inner circumferential surface of the nozzle part 210 (for example, in a diameter of several μm to several hundred μm) and face in one direction such as Extends about a few mm in length. Here, the cross-sectional shape of the pin portion 220 may be various, such as a circle, an ellipse, a rectangle, a polygon, and the like. For example, the cross-sectional shape of the pin portion 220 can be appropriately selected in view of the following: the shape of the inner circumferential surface of the nozzle portion 210, the nature of the electric field formed by the pin portion 220, and the internal space of the nozzle portion 210 due to the pin portion 220. Effective cross-sectional shape, etc.

The pin portion 220 may be installed in a manner to pass through the faucet portion 250 in one direction (for example, in the longitudinal direction). The pin part 220 may be aligned with the center axis of the nozzle part 210 in the longitudinal direction, and may be separated from the inner circumferential surface of the nozzle part 210. The pin part 220 may be fixed in a position aligned with the center axis of the nozzle part 210. Therefore, an electric field can be uniformly formed under the nozzle part 210, and an equal force can be applied to the ions formed in the solution. Therefore, it can be very accurately controlled The amount of solution discharged.

For example, if the pin portion 220 is bent inside the nozzle portion 210 or contacts the inner circumferential surface of the nozzle portion 210, it is difficult to form an equal electric field, and thus it is impossible to accurately control the solution discharge. On the other hand, in the embodiment of the present invention, since the pin portion 220 is straight and uncurved in one direction through the tap portion 250 so as to align with the central axis of the nozzle portion 210, it can be formed below the nozzle portion 210 Equal electric field, and the solution can be accurately discharged.

The pin portion 220 may have a tapered tip 221 at the end portion. The tapered tip 221 may be placed inside the tapered tip 211 formed at the end portion of the nozzle part 210. The tapered tip 221 may extend in one direction to the vicinity of the solution discharge port of the tapered tip 211 with its diameter gradually becoming smaller. Electric power can be applied to the vicinity of the solution discharge port of the nozzle part 210 through the tapered tip 221. The shape of the outer circumferential surface of the tapered tip 221 may be formed to correspond to the shape of the inner surface of the tapered tip 211, for example, to be the same or similar to the shape of the inner surface of the tapered tip 211. The tapered tip 221 may be separated from the inner surface of the tapered tip 211.

The pin portion 220 may contain at least one of conductive materials capable of forming electrodes by being applied with electric power, for example, various metals or alloys, when formed with a diameter of a few μm or a few hundred μm, have a hardness that can be prevented by their own weight and solution pressure. The degree of bending of a metal or alloy. For example, the pin portion 220 may be made of a metal or alloy including at least one of tungsten, gold, silver, platinum, copper, and aluminum.

On the other hand, the end of the tapered tip 221 of the pin portion 220 may be placed to be separated from the end of the tapered tip 211 of the nozzle portion 210 by 1 mm to 5 mm. by Therefore, the outer circumferential surface of the tapered tip 221 can be separated from the inner surface of the tapered tip 211 by a desired distance. Therefore, when power is applied to the pin portion 220, the solution can be smoothly and accurately discharged through the inside of the cone tip 211.

The syringe part 230 may be installed at the connector part 240 on the opposite side of the luer joint part 260 with respect to the connector part 240. The syringe part 230 is connected to the nozzle part 210 and can supply a solution (for example, conductive ink). The syringe part 230 extends in one direction (for example, in the longitudinal direction), and has a space capable of containing a solution inside. For example, the syringe part 230 may be formed in the shape of a cylinder, and the solution may be stored inside. The injector part 230 may be installed to interconnect the nozzle part 210 and the air pressure unit 400 and may transmit air pressure applied from the air pressure unit 400 to the nozzle part 210. To this end, the syringe part 230 may be connected to the air pressure unit 400 to be supplied with air pressure.

The syringe part 230 may be installed to the connector part 240 and may be connected to the nozzle part 210 through the connector part 240 and the luer joint part 260. Therefore, the syringe part 230 may be made of a material capable of electrical insulation to be electrically insulated from the connector part 240. Here, the syringe part 230 may be formed integrally with the connector part 240.

On the other hand, when the amount of solution required to form the pattern line is greater than the volume of the syringe part 230, the syringe part 230 may be supplied with the solution by being connected to a solution storage unit (not shown in the figure).

Alternatively, when the amount of solution required to form the pattern line is equal to or less than the volume of the nozzle part 210, the syringe part 230 may be in it The state is not filled with solution. In this case, the solution may be provided inside the nozzle part 210. For example, it is possible to provide the solution inside the nozzle part 210 in a manner of pre-injecting the solution inside the nozzle part 210 when assembling the nozzle part 210 or in various other ways.

The connector part 240 may be installed at the luer connector part 260 on the opposite side of the nozzle part 210 with respect to the luer connector part 260. That is, the connector part 240 may be installed to interconnect the syringe part 230 and the luer joint part 260. The connector part 240 may be formed in the shape of a hollow cylinder, and a part of its inner surface protrudes to contact the faucet part 250, whereby the connector part 240 may be electrically connected to the faucet part 250 and may be electrically connected to the pin via the faucet part 250 Part 220. Here, the connector part 240 may make the tap part 250 tightly contact the luer joint part 260 by using the protrusion part (for example, the protrusion part 241) of the inner circumferential surface, whereby the tap part 250 may be further firmly fixed.

The connector part 240 may be formed to extend in one direction, thereby providing a predetermined space for passing inside in one direction. The connector part 240 may be such that one end part facing the Luer joint part 260 encloses the outer circumferential surface of the Luer joint part 260 and the other end part facing the syringe part 230 encloses the outer circumference of the syringe part 230 The surface is installed. Here, the way of installing these parts is not specifically limited.

A part of the outer circumferential surface of the connector part 240 is recessed toward the inside of the connector part 240 to form a predetermined surface (for example, a flat surface). The connector part 240 may be connected to the power supply unit 300 using a flat surface in the outer circumferential surface. power supply The unit 300 may have, for example, a clamping member 310 in the shape of a'U', and the clamping member 310 may be easily connected in a manner of being clamped to the formed flat surface to face the outer circumferential surface of the connector part 240, This allows electricity to be supplied. The connector part 240 may be formed of a conductive material (for example, a material including at least one of various metals and alloys) so as to be able to transmit power applied to the faucet part 250. For example, the connector part may be formed of the same or similar material as that of the pin part 220, but this is not specifically limited.

The faucet part 250 may be fixed such that at least a part thereof is inserted into the interior of the luer connector part 260 on the opposite side of the nozzle part 210 with respect to the luer connector part 260. The faucet part 250 may support the pin part 220 inside the luer joint part 260 so that the pin part 220 is aligned with the center axis of the nozzle part 210 in the longitudinal direction.

The faucet part 250 may be formed into a cylindrical shape, for example, and the shape may be changed in various ways, as long as it can support the inner surface of the faucet part 250 and the position of the faucet part 250 can be fixed to the luer joint part 260 The internal shape is fine. The tap part 250 may be formed with a diameter such that it is in close contact with the inner surface of the luer joint part 260 or may be formed with a diameter that is separated from the inner surface of the luer joint part 260.

The faucet part 250 may extend in one direction. The tap portion 250 may be arranged such that one end portion facing the nozzle portion 210 side can contact the inner surface of the luer joint portion 260 and the other end portion facing the syringe portion 230 side can contact the connector portion 240 The inner surface. Thus, the faucet part 250 is Both directions and in the other direction crossing the one direction can be fixed in position. More specifically, the tap portion 250 may be fixed therein such that the outer circumferential surface of one end portion is in close contact with the contact surface 261 in the inner surface of the other side of the luer joint portion 260, which will be explained later. The other end portion is brought into close contact with the inner surface protrusion 241 of the connector portion 240.

At least one hole 252 may be formed by passing through the faucet part 250 in a direction crossing the one direction. The hole 252 formed through the tap portion 250 can be used as a passage through which the solution inside the luer joint portion 260 can move.

At least one channel 251 through which the solution can pass is formed in or on the outer circumferential surface of the tap portion 250. For example, the channel 251 may include at least one groove or slot formed in one direction along the outer circumferential surface of the faucet part 250. One side of the channel 251 is exposed or opened toward the inside of the nozzle part 210 or the luer part 260 to enable communication therein, and the other side of the channel 251 is exposed or opened toward the inside of the connector part 240 or the syringe part 230 To be able to communicate in it. Here, when the passage 251 is formed in plural, the plural passages 251 may be connected to each other by communicating to the hole 252. That is, the hole 252 formed through the faucet part 250 serves to connect the channels 251, thereby allowing the solution to pass more uniformly.

The faucet portion 250 may be formed of a conductive material (for example, a material including at least one of various metals or alloys) to be able to transmit the power applied from the connector portion 240 to the pin portion 220, and may be similar to or similar to the material of the pin portion 220. The same material is formed.

The nozzle part 210 may be mounted to the luer joint part 260. The luer joint part 260 functions to support the nozzle part 210 and to connect the nozzle part 210 and the connector part 240. The luer joint part 260 may extend in one direction, and the shape of the inner surface of the luer joint part 260 may be rotationally symmetric with the center axis of the nozzle part 210 as the center. One or more stepped portions may be formed at the outer surface of the luer joint portion 260, thereby making it easier to assemble or carry (such as transportation) the equipment.

The luer joint part 260 may be installed to pass the nozzle part 210 at an inner surface on one side thereof. The luer joint part 260 may be installed to be inserted into the connector part 240 at the outer surface of the other side thereof. The faucet part 250 may be placed at the inner surface of the other side of the luer joint part 260. A contact surface 261 may be provided at the inner surface of the other side of the luer joint part 260, and the contact surface 261 closely contacts the end part of one side of the faucet part 250.

Here, the luer joint part 260 may have an inclined surface at the contact surface 261 whose inner diameter becomes narrower in one direction toward the nozzle part 210. The inclined surface of the luer joint part 260 may be formed to be rotationally symmetric with the center axis of the nozzle part 210 as the center. By making the end portion of one side of the faucet part 250 closely contact the inclined surface of the luer joint part 260, the faucet part 250 can be fixed in a position aligned with the center axis of the nozzle part 210.

Alternatively, the luer joint part 260 may have a convex step (not shown in the figure) at the contact surface 261 whose inner diameter becomes narrower in one direction toward the nozzle part 210. The convex step of the luer connector part 260 may be formed to spray The center axis of the mouth portion 210 is rotationally symmetrical. Since the end portion of one side of the faucet part 250 closely contacts the convex step of the luer joint part 260, the faucet part 250 can be fixed in a position aligned with the center axis of the nozzle part 210. On the other hand, the luer connector part 260 may be formed of a non-conductive material (such as plastic).

The nozzle part 210, the luer joint part 260, the connector part 240 and the syringe part may be aligned with the center axis of the nozzle part 210, and the interiors of these parts may communicate with each other. The pin portion 220, the tap portion 250, and the connector portion 240 may be electrically connected to each other through contact. The pin portion 220, the tap portion 250, and the connector portion 240 may be applied with power via the clamping member 310 of the power supply unit 300 that is engaged with the outer circumferential surface of the connector portion 240.

The distance adjusting part 270 may be formed to be able to finely adjust the position of the nozzle part 210 in the horizontal direction relative to the processed object 10, and the specific structure of the distance adjusting part 270 is not specifically limited. For example, the distance adjusting part 270 may be formed of various structures having various motors, gears, or devices with a position accuracy of several μm.

Since the nozzle unit 200 according to the embodiment of the present invention is constructed as described above and does not form a coating film on the outer circumferential surface of the nozzle part as in the conventional technique, the device can be constructed more simply. Also, the pin part 220 having an electrode function may be protected inside the nozzle part 210. Therefore, the equipment can be operated stably, and even if the number of hours of use increases, the solution can be discharged and the formation of an equal electric field can be realized under the condition of applying a small change in voltage or an equal voltage.

1 and 4(b), the power supply unit, air pressure unit, lighting unit, optical unit, and control unit of the pattern line forming apparatus according to the embodiment of the present invention will be explained.

The power supply unit 300 may be connected to the nozzle unit 200 and can apply power to the nozzle unit 200 to spray the solution. For example, the power supply unit 300 may be connected to the connector part 240 of the nozzle unit 200, and the power applied from the power supply unit 300 may be provided to the pin part 220 via the connector part 240 and the tap part 250.

The nozzle unit 200 can have a predetermined potential with respect to the processed object 10 through the power supply unit 300, and the potential difference between the nozzle unit 200 and the processed object 10 can form an electric field. The ions present in the solution may be discharged from the nozzle part 210 through the electric field. The power supply unit 300 may apply DC power or AC power to the nozzle unit 200. For example, if the power supply unit 300 supplies DC power to the nozzle unit 200, the electrode can be connected to the object 10 to be processed. If the power supply unit 300 supplies AC power to the nozzle unit 200, a voltage with a predetermined amplitude and frequency range can be applied to apply AC power such as a sine wave type or a pulse type.

The power supply unit 300 can control the amount of solution and the type of solution discharge by controlling the applied power intensity, frequency, and current amount. For example, the discharge type may include a drip type and a spray type. For example, as the intensity of the power applied by the power supply unit 300 becomes higher, the solution discharged from the nozzle unit 200 may be switched from a drop type to a spray type. Also, when the frequency of the power applied by the power supply unit 300 changes, the amount of solution discharged will change.

The air pressure unit 400 may be connected to the nozzle unit 200 and may provide air pressure to the nozzle unit 200 to assist solution spraying. For example, when provided from the nozzle unit 200 When the intensity of the air pressure changes, the meniscus shape of the solution at the solution discharge port changes, so that the discharge amount of the solution can be adjusted. For example, as the strength of the air pressure becomes larger, the meniscus becomes larger, thereby making the volume of the discharged solution larger.

On the other hand, depending on the nature of the solution discharged from the nozzle unit 200, the intensity of the power supplied to the nozzle unit 200 may be extremely high. In this case, precise control of the discharge amount may become difficult due to stability issues.

Therefore, in the embodiment of the present invention, the air pressure unit 400 may be used to supply a predetermined amount of air pressure to the nozzle unit 200. That is, the air pressure unit 400 uniformly supplies the required amount of air pressure to the nozzle part 210 and the syringe part 230 connected thereto, thereby achieving control of the internal pressure to the required pressure. Since the discharge of the solution can be assisted by the air pressure as described above, the intensity of the power supplied to the nozzle unit 200 can be relatively reduced. As a result, operational stability can be maintained, and the amount of solution discharged can be accurately controlled.

On the other hand, when a nozzle clogging phenomenon occurs, the air pressure unit 400 provides positive pressure to the nozzle portion 210 to reconnect the clogged area of the nozzle portion 210, thereby eliminating the clogged area. Also, when the solution discharge port of the nozzle unit 200 is blocked, the air pressure unit 400 provides negative pressure to the nozzle unit 200, and in this way, the solid phase material hardened at the cone tip of the nozzle part 210 can be inside the nozzle part 210 Collected and resolved and can be removed. By selecting and appropriately using the above methods, the air pressure unit 400 can be used to solve the nozzle clogging problem.

The lighting unit 510 can be formed to be able to photograph the object to be processed 10 A pattern line formed on a side surface produces illumination. The lighting unit 510 may be provided at the other side (for example, at the lower side) of the support unit 100 on the side opposite to the support unit 100 of the object 10 to be processed, and may supply lighting to the side of the object 10 to be processed.

The optical unit 520 may be formed to be able to capture a process in which a pattern line is formed on the object 10 to be processed by the solution discharged from the nozzle unit 200 into an image. The optical unit 520 may be disposed at one side of the supporting unit 100, and may accurately photograph the shape of the pattern line without distortion.

The control unit 600 can be configured to control the entire pattern line forming apparatus (including the support unit 100, the nozzle unit 200, the power supply unit 300, and the air pressure unit 400, etc.) according to the embodiment of the present invention, so as to be on one side of the processed object 10. The predetermined pattern lines are accurately formed on the surface. The control unit 600 may include hardware (for example, an industrial computer) and process control software, and further include a display device and an input/output device for easy control. The control unit 600 does not need to be a certain type of computer (as long as it can be properly controlled), but may include various interfaces (such as a printed circuit board) for smoothly connecting to the device.

On the other hand, a laser beam irradiation unit (not shown in the figure) may be provided in the pattern line forming apparatus according to the embodiment of the present invention. The laser beam irradiation unit can irradiate the laser beam and harden the pattern lines formed on the processed object 10.

5 to 8 are schematic diagrams of a nozzle part according to a comparative example of the present invention, FIG. 9 is a schematic diagram of a nozzle part according to an embodiment of the present invention, and FIGS. 10 to 12 are an experimental example according to the present invention, a pattern line Schematic diagram of the formation result.

Here, FIGS. 5 to 8 are schematic views of the state of the nozzle part according to the passage of time, in which a platinum (Pt) material metal film is deposited on the outer circumferential surface of the glass material nozzle part by a conventional method to provide a comparison with the present invention A comparative example of a pattern line forming apparatus, and then, using the metal film as an electrode to form a pattern line through a nozzle portion.

Figure 5 shows the state of the metal film separated from the nozzle part when the nozzle part is used for 10 to 13 hours, and Figure 6 shows the metal film separated from the nozzle part when the nozzle part is used for 40 to 50 hours status. Also, FIG. 7 shows the state of the metal film separated and peeled off from the nozzle portion when the nozzle portion is used for 98 to 100 hours, and FIG. 8 shows the metal film separated and peeled off from the nozzle portion when the nozzle portion is used for 100 hours to 136 hours. The state of the metal film. As shown in these schematic diagrams, in the conventional case (or in the comparative example), it should be understood that as the usage hours of the nozzle part increase, the phenomenon of separation and fall off becomes more serious.

9 is a schematic diagram showing the state of the nozzle part after about 300 hours of use when the pattern line forming apparatus according to the embodiment of the present invention is used to form a pattern line. In the embodiment of the present invention, as shown in FIG. 9, no metal film is coated on the outer circumferential surface of the nozzle part, thereby maintaining a clean state even if the number of hours of use increases.

Comparing FIG. 5 to FIG. 8 with FIG. 9, it should be understood that the pattern line forming apparatus according to the embodiment of the present invention can increase the life of the nozzle part compared to the conventional nozzle part.

Figures 10 to 12 show a device formed by pattern lines according to an embodiment of the present invention Prepare the result of the pattern line formed. For example, when the discharge voltage is set to about 220V, a conventional processing method for forming pattern lines is applied to the pattern line forming apparatus according to the embodiment of the present invention, and the images are photographed and shown in FIGS. 10 to 12 respectively. The formation lengths of the pattern lines in each of FIGS. 10 to 12 are 80 μm, 100 μm, and 150 μm, and the pattern lines are formed with a uniform length of 2.71 μm and an appropriately required height of about 1800 angstroms to 2900 angstroms. Based on the above, it should be understood that the pattern line forming apparatus according to the embodiment of the present invention can form pattern lines with better wiring capabilities.

It should be noted that the above embodiments of the present invention are only used to illustrate the present invention, not to limit the present invention. Moreover, it should also be noted that the structures and methods provided in the above embodiments of the present invention can be combined with each other or cross-applied to be modified into various forms, and these forms can all belong to the scope of the present invention. Therefore, the present invention can be implemented in various forms different from each other within the scope of the claims and its equivalent technical ideas, and those skilled in the technical field corresponding to the present invention can understand that the technical ideas of the present invention Various embodiments are implemented within the scope.

10‧‧‧Object being processed

100‧‧‧Support unit

200‧‧‧Nozzle unit

210‧‧‧Nozzle part

230‧‧‧Syringe part

240‧‧‧Connector part

260‧‧‧Luer connector part

270‧‧‧Distance adjustment part

300‧‧‧Power unit

310‧‧‧Clamping parts

400‧‧‧Air pressure unit

510‧‧‧Lighting Unit

520‧‧‧Optical Unit

600‧‧‧Control Unit

Part A, B‧‧‧

Claims (10)

A pattern line forming device using electrohydrodynamic phenomena to discharge a solution, comprising: a nozzle part positioned to face an object to be processed; a pin part provided in the nozzle part; a connector part connected to the pin part To supply power; a faucet part to support the pin part to align with the center axis of the nozzle part; and a luer joint part to be installed to be connected to the nozzle part and the connector part, wherein the pin Part is separated from the inner circumferential surface of the nozzle part, and the pin part is protected inside the nozzle part, and the faucet part is fixed so that a part of the faucet part is opposite to the nozzle part. The Luer connector part is inserted into the interior of the Luer connector part at the opposite side, and the connector part is installed on the opposite side of the nozzle part with respect to the Luer connector part. At the luer joint part, a part of the inner surface of the connector part contacts the faucet part, the faucet part is fixed in position, and one end of the faucet part contacts the luer joint part And the other end contacts the inner surface of the connector part. The pattern line forming device described in item 1 of the scope of patent application further includes: a syringe part connected to the nozzle part. The pattern line forming apparatus described in the scope of patent application 2, wherein the pin portion is fixed to be mounted to the tap portion. The pattern line forming apparatus according to the second item of the scope of patent application, wherein the syringe part is installed at the connector part on an opposite side of the luer joint part with respect to the connector part. The pattern line forming device according to the second item of the scope of patent application, wherein at least one channel is formed in or on the outer circumferential surface of the tap portion through which the solution passes, and the channel One side is connected to the inside of the nozzle part or the Luer joint part, and the other side of the channel is connected to the inside of the connector part or the syringe part. The pattern line forming apparatus according to the 5th item of the scope of patent application, wherein at least one hole is formed through the tap portion in a direction intersecting the central axis of the nozzle portion, and the hole communicates with the tap portion Of the channel. The pattern line forming apparatus according to any one of the claims 1 to 6, wherein the nozzle part includes at least one of glass and sapphire. The pattern line forming device according to any one of the scope of the patent application 1 to 6, wherein the pin portion includes a conductive material, the conductive material is at least one of tungsten, gold, silver, and copper, and the The faucet part and the connector part include conductive materials. The pattern line forming apparatus according to any one of the scope of patent application 1 to 6, wherein the solution contains conductive ink, and the nozzle portion has a conical tip formed on an end portion, and the conical tip has A path formed inside the cone tip, and the path can discharge the conductive ink through electrohydrodynamic pressure. The pattern line forming apparatus according to any one of the scope of patent application 1 to 6, wherein the pin portion has a tapered tip at an end portion, and the tapered tip is located at the end of the nozzle The inner part of the conical tip formed at the part.

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