CN109212733A - A kind of light path folded device - Google Patents
A kind of light path folded device Download PDFInfo
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Abstract
The present invention provides a kind of light path folded devices, on the basis of the confocal optical system of light beam input, output end, principal plane reflecting mirror and concave mirror composition, the sub- reflecting mirror of inclination is introduced on focal plane, the angle of reflection for changing incident light beam thereon, to realize multiple reflections of the light beam in confocal optical system；Output beam is able to maintain the optical characteristics of input light beam, and has higher light path volume ratio；Variable light path can be realized by tilting sub- reflecting mirror by rotation；The parallel input of multiple beam can be realized in such a way that input terminal is using fiber array collimator；Fiber array collimator is used in input and output side, and part tail optical fiber optical fiber is made to connect the series connection, it can be achieved that light path, realizes more long light path.
Description
Technical field
The present invention relates to the light path folded device in optical sensing field, more particularly, to other optical is sensed, Yi Jike
The light path folded device of darkening journey.
Background technique
In limited bulk, the multiple reflections of light beam are realized, so that light beam is passed by relatively long light path, such optics device
For part in optical sensing field, sensing and analysis field especially for special gas have important application.
Semiconductor adjustable laser absorption spectroanalysis (hereinafter referred to as TDLAS) and ftir analysis at present
(hereinafter referred to as FTIR) is the technology path of two mainstreams, the former is based primarily upon adjustable laser and carries out spectrum point near infrared band
Analysis, the latter carry out spectrum analysis in mid and far infrared by Fourier transformation using wide spectrum light source.
In order to reach enough detection accuracies, no matter TDLAS or FTIR requires a long light path gas chamber, so that light beam
Enough light paths are transmitted in required analysis gas to enhance absorption line, in order to make the volume of detection instrument instrument acceptable
In range, long light path gas chamber need to use the form of light path folded device, with the multiple reflections light beam as far as possible in limited bulk, with
Reach enough light paths.
It is applied for TDLAS, since the angle of divergence of laser beam is small, industry generallys use Maurice Herriott cell structure
(APPLIED OPTICS/Vol.3, No.4/April 1964), as shown in Figure 1, Maurice Herriott room (100) are had using two
The concave mirror (103,104) of identical focal length f forms reflection cavity, incident direction and position when input terminal (101) input light beam
It sets, (generally take the defocus of 0 < d < 2f or 2f < d < 4f when the distance d of two concave mirrors in the z-direction is met certain condition
Configuration), light beam will finally be exported from output end (102) in two concave mirrors multiple reflections back and forth.Two shown in Fig. 2 table
On concave mirror (203,204), reflection point forms circular spot tracks (201) on the x-y plane.
It is applied for FTIR, since light source needs noncoherent wide range thermal light source, beam divergence angle is big, Maurice Herriott room
Performance cannot be met the requirements, this is because defocus configuration feature necessary to Maurice Herriott room causes, after defocus system multiple reflections
Incoherent light beam divergence angle can not restrain, and industry then generallys use traditional White's cell structure (White, J.U. " Long
Optical Paths of Large Aperture " J.Opt.Soc.Am., Vol.32, pp285-288, May 1942), such as scheme
Shown in 3, White room (300) are made of three concave mirrors with same curvature radius and focal length f, principal reflection mirror (301)
Positioned at side, two secondary mirrors (302,303) are located at principal reflection mirror opposite side, input light beam (304) and output beam
(305) it is located at principal reflection mirror two sides.Two secondary mirrors have certain inclination angle, and principal reflection mirror is set at a distance from two secondary mirrors
It is set to 2f, makes light beam in principal reflection mirror and the multiple reflections imaging back and forth of two secondary mirrors, is finally exported from principal reflection mirror side.
Deviate principal reflection mirror (401) axial line as shown in figure 4, commonly entering light-beam position (404) in track of the hot spot on principal reflection mirror
(402), so that hot spot is distributed on two rows of tracks (403,406), to obtain maximum order of reflection.Output beam position
(405) usually in the other side for arranging track (406) together with input light beam.
Promotion with industry to detection of gas required precision, the requirement to light path gas chamber are also further increased, are needed
Longer light path (20 meters or more or even 100 meters or more) is realized in limited volume, Maurice Herriott room and White room are difficult one
Determine to realize more reflection in volume.There are many improved designs based on Maurice Herriott room and White room, such as Maurice Herriott sheet
People propose with astigmatic lens realize more order of reflection (" Folded Optical Delay Lines ", Appl.Opt.,
Vol.4, No.8, pp883-889,1965), there are problems that astigmatic lens is difficult processing, although subsequent have through rotation one
A astigmatic lens is still high without solving astigmatic lens to reduce requirement on machining accuracy (United States Patent (USP) 5291265,1994)
Processing cost problem；Joel.A.Silver et al. proposition realizes the i.e. more reflections time of intensive hot spot distribution with bicylindrical mirror
Number (United States Patent (USP) 7477377,2009), but due to the non-rotational symmetry property of bicylindrical, light beam no longer has after multiple reflections
There are beam characteristics identical with input light beam, in the application scenarios for needing beam characteristics (beam radius, divergence half-angle etc.) to keep
In can not apply.Although there are also the improvement project based on White room, such as Chinese patent " folding multiple-optical path multichannel gas
Pond " (CN102053063B) uses a corner reflector in White room output end, and reflection output beam is allowed to along backtracking (partially
From one low-angle), light path is doubled, but input/output terminal is too close to needing more to be spatially separating and output and input
Light beam；Meanwhile White room has used the secondary mirror with angle, and after light beam multiple reflections, shadow of the aberration to output beam characteristic
Sound is larger.
Summary of the invention
For industry to light path folded device more long light path, higher light path/volume ratio, and the light beam after long light path transmission
Characteristic still keeps the demand of input state, and the present invention provides a kind of such light path folded devices.
As shown in figure 5, a kind of light path folded device (500) provided by the invention, includes:
One input terminal (501), for inputting light beam；
One output end (502) is used for output beam；
One principal plane reflecting mirror (504)；
One concave mirror (503), have a focal plane (506), the focal plane to the concave mirror away from
From the focal length f that (507) are concave mirror；The focal plane also has an origin (509), be the principal plane reflecting mirror with it is recessed
The intersection point of the system optical axis (508) of face reflecting mirror composition on it.
One sub- reflecting mirror (505) of inclination, is a facet reflection mirror, the method for normal and the principal plane reflecting mirror
Line constitutes tiltangleθ；
The input, output end, principal plane reflecting mirror, the sub- reflecting mirror of inclination are coplanar, positioned at the concave mirror
On focal plane；Light beam is inputted from the input terminal, by the concave mirror, principal plane reflecting mirror and the sub- reflecting mirror of inclination it
Between multiple reflections, finally from the output end export.
From the point of view of optical characteristics, due to using confocal system, on focal plane (506), the radius of light beam and diverging half
Angle will convert between two groups of values, unrelated with concave mirror order of reflection, only related with its parity.If input terminal input light
The radius of beam is A0, divergence half-angle β0, the radius of light beam is A after a concave mirror reflection reaches focal plane1, hair
Scattered angle is partly β1, there is following relationship:
A1=β0·f (1)
β1=A0/f (2)
The radius of light beam is A after concave mirror twice reflects and reaches focal plane2, divergence half-angle β2, can pass through
It is obtained twice using (1) and (2) formula:
A2=β1F=(A0/ f) f=A0 (3)
β2=A1/ f=(β0F)/f=β0 (4)
From (3) and (4), formula be can see, and light beam has restored input light beam after concave mirror reflection twice reaches focal plane
Characteristic (A0, β0), it is readily seen that reflecting by even-times concave mirror, the characteristic of light beam will be identical as input light beam；To surprise
Concave mirror reflects for several times, and the characteristic of light beam will take (1) and (2) obtained radius and divergence half-angle (A1, β1)。
For input light beam chief ray position and angle (optical axis of opposite principal plane reflecting mirror and concave mirror composition)
Transformation can prove be reflected by four concave mirrors in the case where no introducing tilts sub- reflecting mirror (505)
Up to after focal plane, beam primary light line position is overlapped with input light beam chief ray position, and angle and input light beam chief ray angle are closed
It is mirrored into symmetrically in optical axis；Since light-beam position is overlapped with input end position, light beam is no longer reflected by principal plane reflecting mirror, and is led to
Input terminal output is crossed, therefore in the case where no introducing tilts sub- reflecting mirror (505), light beam is at most reflected by concave mirror
Four times, total optical path receives considerable restraint.
The present invention introduces one on the confocal optical system that concave mirror (503) and principal plane reflecting mirror (504) form
The sub- reflecting mirror (505) of a inclination, position deviation from origin (509) certain distance, and it is located at input light beam through concave mirror the
Primary event or third time reflection reach the position of focal plane, therefore change the reflection angle of light beam, thus through concave reflection
After mirror reflection, position of the subsequent even-numbered reflections light beam on focal plane is changed, and odd-times the reflected beams are on focal plane
Position it is constant so that the position of all light beams no longer conflicts with input terminal, realize the multiple reflections of light beam.
It is easy to prove, as shown in Figure 6 a, introduce after tilting sub- reflecting mirror (605), the coke locating for principal plane mirror (604) is flat
On face (606), after concave mirror 1+4n (n=0,1,2,3 ...) secondary reflection, the position of light beam is in the same position, note
For P1(611)；After concave mirror 3+4n (n=0,1,2,3 ...) secondary reflection, the position of light beam is in the same position, note
For P3(613)；After concave mirror 4+4n (n=0,1,2,3 ...) secondary reflection, the position of light beam is P4、P8、P12..., it
With input light-beam position P0Point-blank, it is denoted as L4(610)；It is secondary through concave mirror 2+4n (n=0,1,2,3 ...)
After reflection, the position of light beam is P2、P6、P10..., they are point-blank denoted as L2(612)。
For convenience of description, in Fig. 6 a and Fig. 6 b, tilt sub- reflecting mirror (605) be selected in through concave mirror third time it is anti-
Rear light beam is penetrated in the position P of focal plane3(613), its normal (615) and the normal (614) of principal plane reflecting mirror (604) formation
A vector is made in one tiltangleθ (616), the crest line direction that the plane and focal plane (606) formed along two normals is crossed to form,
Referred to as shift vector Δ P (617), length is defined by the formula:
Δ P=tan (2 θ) f (5)
It is easy to prove to being distributed in L2Upper light-beam position P2、P6、P10..., and it is distributed in L4Light-beam position P0、P4、P8、
P12..., adjacent beams location interval is the Δ P that (5) formula provides that serves as reasons, and L2And L4It is parallel to Δ P.It can see Δ P packet
The tiltangleθ size and Orientation of the sub- reflecting mirror of inclination is contained.
The P known to the property of confocal optical system1(611) and P3It (613) is symmetrically, to be about focal plane origin (609)
Make to tilt sub- reflecting mirror (605) not to P1On light beam interference, tilt sub- reflecting mirror deviate focal plane origin (609) distance it is big
In P1Or P3On beam radius A1, the A known to aforementioned (1) formula1=β0·f；It can be reflected into guarantee to tilt sub- reflecting mirror simultaneously
Up to all beam energies thereon, light passing diameter is greater than P1Or P3On beam diameter 2A1, i.e. 2 β0·f。
To avoid tilting sub- reflecting mirror (605) to L2Or L4The interference of upper light beam, the selection in tiltangleθ direction is so that displacement
The direction of vector Δ P is not in input terminal (601) and P3(613) on line direction, shape forms an angle therewith, by even-times
After concave mirror reflection, the distance on its center to the sub- reflecting mirror boundary of inclination is greater than input light when light beam reaches focal plane
The radius A of beam0, to make with L2Or L4On using beam diameter as the light passing band of width not with tilt sub- reflecting mirror (605) it is Chong Die.
Output end can take in L2Or L4On, it is excellent to be chosen at the L conllinear with input terminal4On, i.e. input light beam is by the concave surface
The position of focal plane is reached after 4 times of positive integer secondary reflections of reflecting mirror, therefore input terminal (601) and output end (602) are in L4(610)
Two sides.The light hole on principal plane reflecting mirror (604) can be taken as input terminal and output end, can also be and reflected in principal plane
Mirror is in L4On the obtained angle of release of two sides corner cut.
The form of light hole and angle of release is suitble to the biggish incoherent input light beam situation of the angle of divergence, and light beam passes through free space
Circulation way input；It is the lesser coherent beam of the angle of divergence for input light beam, such as laser preferably has the fiber optic collimator of tail optical fiber
Device is as light beam input terminal；It brings out and is accordingly preferably the optical fiber collimator output beam with tail optical fiber, light also may be selected and visit
It surveys device and directly receives light beam.
In many applications, it is variable for needing device light path, for this purpose, the present invention also provides a kind of variable light paths
Light path folded device, as shown in fig. 7, in aforementioned concave mirror, principal plane reflecting mirror and the sub- reflecting mirror of inclination and input and output
On the basis of the confocal optical system for holding composition, making to tilt sub- reflecting mirror (705) along inclined direction to rotate, that is, its normal can be changed
(715) size of the tiltangleθ (716) formed with principal plane reflecting mirror normal (714), shaft (718) are reflected in principal plane
In focal plane (706) where mirror (704), and its rotation is driven by a driver (719), tiltangleθ is surveyed by an angle
Measure device (720) measurement.
Tiltangleθ is variable to cause shift vector Δ P (717) variable, as long as the selection of tiltangleθ makes input terminal and output end
Distance be Δ P integral multiple, so that it may make light beam by multiple reflections reach output end, thus reach change total optical path mesh
's.
Driver (719) can be one of Piezoelectric or electromagnetic drive type actuator.Angle measurement unit (720) can
To be the optical angle-measuring device with measurement laser and 4 quadrant detector, the laser which issues is in inclination son reflection
4 quadrant detector is reached after mirror reflection, by obtaining the size of tiltangleθ after 4 quadrant detector light intensity data comparing calculation
The direction and.
Application scenarios are input to light path folded device simultaneously sometimes for the laser of multiple spectral coverages to detect different gas
Component, in prior art using wavelength coupler by the laser coupled of multiple wavelength into a tail optical fiber, then pass through fiber optic collimator
Device input；For the demand that such possible laser for needing multiple spectral coverages inputs simultaneously, the present invention also provides a kind of array is defeated
The light path folded device for entering and exporting, as shown in figure 8, array laser beam passes through the first fiber optic collimator with the first tail optical fiber array
Device array (801) inputs parallel, by the second optical fibre collimator array (802) parallel output with the second tail optical fiber array, or
Person is received parallel using photodetector array (802).Multiple light beams that first optical fibre collimator array (801) inputs parallel are opposite
In optical axis angle having the same, therefore after concave mirror 1+4n (n=0,1,2,3 ...) secondary reflection, the position of light beam
With in P1；After concave mirror 3+4n (n=0,1,2,3 ...) secondary reflection, the position of light beam is the same as in P3；Through concave mirror 4
After+4n (n=0,1,2,3 ...) secondary reflection, the position distribution of light beam is consistent with single input condition on Δ P (817) direction,
But it is unfolded in the first optical fibre collimator array orientation (818)；It is secondary through concave mirror 2+4n (n=0,1,2,3 ...)
After reflection, the light-beam position distribution of the position of light beam and the formation of 4+4n (n=0,1,2,3 ...) secondary reflection is similar, in the direction Δ P
It is unfolded in the first optical fibre collimator array orientation, two groups of light-beam positions are right about the origin (809) on focal plane (806)
Claim distribution.
In order to reach longer light path, the present invention also provides a kind of concatenated device of light path, input terminals shown in Fig. 8
The first optical fibre collimator array, output end for band the first tail optical fiber array are the second optical fiber collimator battle array of band the second tail optical fiber array
On the basis of column, as shown in figure 9, the part tail optical fiber in the first and second tail optical fiber arrays (901,902) is connected by optical fiber, series connection
At the output end of the input terminal of only one input tail optical fiber (903) and only one output tail optical fiber (904), in this way,
Light beam is inputted from input tail optical fiber (903), after light path folded device multiple reflections and concatenated tail optical fiber, repeatedly inputs light path
In folded device, exported until from output tail optical fiber (904).If the first tail optical fiber array has M tail optical fiber, total optical path is individual devices
M times of light path.
Due to the excellent optical characteristics of Reflectance confocal system, in the case where beam divergence angle less (such as coherent light), institute
Stating concave mirror can be used cheap and mature spherical reflector；The feelings of (such as incoherent light) bigger for beam divergence angle
Under condition, non-spherical reflector can be used as concave mirror.
It can see by the analysis of front, light path folded device provided by the invention, output beam is kept and input light beam
Identical beam characteristics (beam radius and divergence half-angle etc.), it can be not only used for the small scene of beam divergence angle, it can also be used to light
The big scene of beam divergence angle；Compared to Maurice Herriott room and White room, due to P1And P3Recycling, under same volume,
Light path folded device provided by the invention can achieve the i.e. longer light path of more order of reflection and higher light path volume
Than；Due to holding of the beam characteristics after concave mirror even-numbered reflections, it is easier to be extended to intensive light beam, make order of reflection and total
Light path further increases；Change total optical path by the angle that rotation tilts sub- reflecting mirror, makes light path variable device in engineering
It is upper to be easier to realize；It is provided by the invention using optical fibre collimator array as the light path folded device of input terminal, eliminate wavelength coupling
The use of clutch may be directly applied to multi-wavelength input, realize the real-time detection to more gas components；It is provided by the invention with light
Fine collimator array is the light path folded device of input and output side, is connected by the optical fiber of tail optical fiber, light path is together in series and is obtained
A bigger light path is obtained, has important value for higher precision detection of gas.
Detailed description of the invention
The schematic diagram of the Maurice Herriott room in the prior art Fig. 1
The reflection point spot tracks figure of the Maurice Herriott room in the prior art Fig. 2
The schematic diagram of the White room in the prior art Fig. 3
The light beam reflection point spot tracks figure of the White room in the prior art Fig. 4
Fig. 5 light path folded device schematic diagram provided by the invention
Distribution and inclination sub- reflecting mirror of Fig. 6 a light path folded device light-beam position provided by the invention on focal plane
Position
Sub- mirror tilt direction explanation is tilted in Fig. 6 b light path folded device provided by the invention
The light path folded device of Fig. 7 variable light path provided by the invention
Fig. 8 input terminal provided by the invention is the light path folded device of optical fibre collimator array
Fig. 9 input and output side provided by the invention is optical fibre collimator array and realizes that the concatenated light path of light path folds
Device
Figure 10 light path folded device embodiment 1 provided by the invention
Figure 11 light path folded device embodiment 2 provided by the invention
Figure 12 light path folded device embodiment 3 provided by the invention
Specific embodiment
[embodiment 1]
As shown in Figure 10, a kind of light path folded device (1000) provided by the invention includes:
One input terminal (1001), for inputting light beam；
One output end (1002) is used for output beam；
One principal plane reflecting mirror (1004)；
One concave mirror (1003) has a focal plane (1006), the focal plane to the concave mirror
Distance (1007) is the focal length f of concave mirror；The focal plane also has an origin (1009), is the principal plane reflecting mirror
The intersection point of the system optical axis (1008) formed with concave mirror on it.
One sub- reflecting mirror (1005) of inclination is a facet reflection mirror, normal and the principal plane reflecting mirror
Normal constitutes tiltangleθ；
The input, output end, principal plane reflecting mirror, the sub- reflecting mirror of inclination are coplanar, positioned at the concave mirror
On focal plane；Light beam is inputted from the input terminal, by the concave mirror, principal plane reflecting mirror and the sub- reflecting mirror of inclination it
Between multiple reflections, finally from the output end export.
Input, output end is the light hole on principal plane reflecting mirror (1004), and light beam passes through free-space propagation mode
It outputs and inputs.
Input light beam is incoherent light, radius A0, divergence half-angle β0.Tilt sub- reflecting mirror (1005) deviation from origin
(1009) distance is taken as 2 β0F, and it is located at the position that input light beam reaches focal plane through concave mirror third time reflection,
Its inclined direction and input are parallel with the line direction of output end, and aperture is taken as 3 β0F, therefore arrival can be covered thereon
2 β of beam diameter0F, and there are certain redundancy apertures；Tilt the line of sub- mirror edge distance input and output end
The shortest distance is 2 times of inputs beam radius, i.e. 2A0.Such arrangement, so that the aperture for tilting sub- reflecting mirror will not be to other light
Beam generates interference.
Since input beam divergence angle is larger, concave mirror uses non-spherical reflector, excellent optical to obtain
Energy.
[embodiment 2]
The present embodiment is similar to Example 1, as shown in figure 11, is with the difference of embodiment 1:
1. input terminal (1101) and output end (1102) are the optical fiber collimator with tail optical fiber, input light beam is coherent light,
The light beam for being input to light path folded device from optical fiber collimator is Gaussian beam, has Gauss waist radius ω and far field diverging half
Angle α, definition beam radius are A0=3 ω, divergence half-angle β0=3 α to cover Gaussian beam overwhelming majority energy, and are obtained with this
The distance for tilting sub- reflecting mirror (1105) deviation from origin (1109) is 6 α f, and aperture is taken as 9 α f；Tilt sub- mirror edge
The line shortest distance of distance input and output end is taken as 6 ω.
2. concave mirror (1103) is taken as spherical reflector.
Taking ω=0.2mm, in the case of f=200mm, α=2.5mrad, the available sub- reflecting mirror deviation from origin of inclination
Distance be about 3mm, aperture is about 4.5mm, and the shortest distance of aperture edge to input and output side line is 1.2mm.
In same adjacent beams distance, the light path that light path folded device provided in this embodiment obtains be Maurice Herriott room and
Twice of light path of White room or more has higher light path volume ratio.
[embodiment 3]
The present embodiment is similar to Example 2, and as shown in figure 12, difference is: making to tilt sub- reflecting mirror (1205) can be along inclining
Tilted direction rotation, i.e., the size of changeable tiltangleθ, shaft (1218) is in the focal plane where principal plane reflecting mirror (1204)
(1206) in, and its rotation is driven by a Piezoelectric driver (1219), tiltangleθ by one with measurement laser and
The optical angle-measuring device (1220) of 4 quadrant detector measures, and the laser which issues is after tilting sub- reflecting mirror reflection
4 quadrant detector is reached, by obtaining the size and Orientation of tiltangleθ after 4 quadrant detector light intensity data comparing calculation.
Tiltangleθ is variable to cause shift vector Δ P variable, and the selection of tiltangleθ makes the distance of input terminal and output end
The integral multiple of Δ P, so that it may make light beam reach output end (1202) from input terminal (1201), to reach the mesh for changing total optical path
's.
[embodiment 4]
The present embodiment is similar to Example 2, and the optical fiber collimator by input and output side shown in Figure 11 with tail optical fiber is replaced
For the optical fibre collimator array with tail optical fiber array, output and input while realizing multiple beam.
[embodiment 5]
The present embodiment is similar to Example 4, and the part tail optical fiber output and input on optical fibre collimator array is passed through optical fiber
Connection is connected into the input terminal of only one input tail optical fiber and the output end of only one output tail optical fiber, in this way, light
Beam after light path folded device multiple reflections and concatenated tail optical fiber, repeatedly inputs light path folder from input tail optical fiber input
In part, exported until from output tail optical fiber.Input optical fibre collimator array has M tail optical fiber, and total optical path is M times of single light path.
Claims (16)
1. a kind of light path folded device, which is characterized in that include:
One input terminal, for inputting light beam；
One output end is used for output beam；
One principal plane reflecting mirror；
One concave mirror, has a focal plane, and the distance of the focal plane to the concave mirror is concave mirror
Focal length f；The focal plane also has an origin, is the optical system light of the principal plane reflecting mirror and concave mirror composition
The intersection point of axis on it；
One sub- reflecting mirror of inclination, is a facet reflection mirror, and the normal composition of normal and the principal plane reflecting mirror is inclined
Bevel angle θ；
The input, output end, principal plane reflecting mirror, the sub- reflecting mirror of inclination are coplanar, and the coke positioned at the concave mirror is flat
On face；Light beam is inputted from the input terminal, by more between the concave mirror, principal plane reflecting mirror and the sub- reflecting mirror of inclination
Secondary reflection is finally exported from the output end.
2. a kind of light path folded device according to claim 1, which is characterized in that the radius of the input light beam is A0, hair
Dissipating half-angle is β0；The distance that the sub- reflector position of the inclination deviates the focal plane origin be greater than input beam divergence half-angle with
The product β of concave mirror focal length0·f。
3. a kind of light path folded device according to claim 2, which is characterized in that the sub- reflector position of inclination is located at
The position that light beam reaches focal plane through the concave mirror for the first time or after third secondary reflection is inputted, light passing diameter is greater than 2
β0·f。
4. a kind of light path folded device according to claim 3, which is characterized in that the sub- mirror tilt angle side of inclination
To selection so that after the reflection of even-times concave mirror, its center is reflected to the inclination is sub when light beam reaches focal plane
The distance on mirror boundary is greater than the radius A of input light beam0。
5. a kind of light path folded device according to claim 1, which is characterized in that the input terminal and output end are described
Light hole or angle of release on principal plane reflecting mirror.
6. a kind of light path folded device according to claim 1, which is characterized in that the output end is selected in input light beam quilt
The position of focal plane is reached after 4 times of positive integer secondary reflections of the concave mirror.
7. a kind of light path folded device according to claim 1, which is characterized in that the input terminal is the with tail optical fiber
One optical fiber collimator, light beam are inputted by first optical fiber collimator；The output end is that the second optical fiber with tail optical fiber is quasi-
Perhaps optical detector output beam is exported by second optical fiber collimator or is directly received by optical detector straight device.
8. a kind of light path folded device according to claim 1, which is characterized in that the sub- reflecting mirror of inclination can incline along it
The rotation of oblique angle direction, also drives its rotation comprising a driver, the size of the tiltangleθ can be changed, thus make light beam from
The total optical path of input terminal to output end is variable.
9. a kind of light path folded device according to claim 8, which is characterized in that the driver be Piezoelectric or
One of electromagnetic drive type actuator.
10. a kind of light path folded device according to claim 8, which is characterized in that it also include an angle measurement unit,
Measure the tiltangleθ of the sub- reflecting mirror of inclination.
11. a kind of light path folded device according to claim 10, which is characterized in that the angle measurement unit is to have
Measure the optical angle-measuring device of laser and 4 quadrant detector.
12. a kind of light path folded device according to claim 1, which is characterized in that the input terminal is with the first tail
First optical fibre collimator array of fibre array, light beam are inputted by first optical fibre collimator array, and relative to the light
Axis angle having the same.
13. a kind of light path folded device according to claim 12, which is characterized in that the output end is with the second tail
Second optical fibre collimator array of fibre array；Output beam is exported by second optical fibre collimator array.
14. a kind of light path folded device according to claim 12, which is characterized in that the output end is optical detector battle array
Column, output beam are directly received by the photodetector array.
15. a kind of light path folded device according to claim 13, which is characterized in that the second tail optical fiber battle array of the output end
Column are connect with the part tail optical fiber in the first tail optical fiber array of the input terminal by optical fiber, only one input tail optical fiber is connected into
The output end of input terminal and only one output tail optical fiber, light beam is inputted from the input tail optical fiber, multiple by light path folded device
It after reflection and concatenated tail optical fiber, repeatedly inputs in light path folded device, is exported until from the output tail optical fiber.
16. any light path folded device described in -15 according to claim 1, which is characterized in that the concave mirror is ball
One of face reflecting mirror or non-spherical reflector.
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| CN201710548550.0A CN109212733B (en) | 2017-07-04 | 2017-07-04 | Optical path folding device |
| PCT/CN2018/089621 WO2019007175A1 (en) | 2017-07-04 | 2018-06-01 | Efficient optical path folding device |
| CN201880000495.4A CN109477953B (en) | 2017-07-04 | 2018-06-01 | Efficient optical path folding device |
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| CN201710548550.0A CN109212733B (en) | 2017-07-04 | 2017-07-04 | Optical path folding device |
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| CN201880000495.4A Active CN109477953B (en) | 2017-07-04 | 2018-06-01 | Efficient optical path folding device |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110108692A (en) * | 2019-04-16 | 2019-08-09 | 徐州旭海光电科技有限公司 | Efficient light path folded device and Raman probe and system |
| CN111148986A (en) * | 2019-12-20 | 2020-05-12 | 徐州旭海光电科技有限公司 | Compact sensing device |
| CN111562237A (en) * | 2020-05-26 | 2020-08-21 | 中国科学院合肥物质科学研究院 | CO based on double-beam cavity enhanced spectroscopy technology2、N2O stable isotope simultaneous detection device and method |
| CN111896475A (en) * | 2020-07-29 | 2020-11-06 | 东北大学秦皇岛分校 | Light path range-extending type photoacoustic cell for photoacoustic spectrum trace gas detection |
| CN113484266A (en) * | 2021-05-28 | 2021-10-08 | 汉威科技集团股份有限公司 | Optical path multiplying device and optical path multiplying gas absorption cell |
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| CN109597192B (en) * | 2018-12-21 | 2024-02-06 | 江苏旭海光电科技有限公司 | High-efficiency optical path folding device and miniaturized high-sensitivity gas sensor |
| CN112649389B (en) * | 2020-12-07 | 2022-03-08 | 珠海格力电器股份有限公司 | Sensor optical path component, gas sensor, measuring method and air conditioning system |
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| CN111896475A (en) * | 2020-07-29 | 2020-11-06 | 东北大学秦皇岛分校 | Light path range-extending type photoacoustic cell for photoacoustic spectrum trace gas detection |
| CN113484266A (en) * | 2021-05-28 | 2021-10-08 | 汉威科技集团股份有限公司 | Optical path multiplying device and optical path multiplying gas absorption cell |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2019007175A1 (en) | 2019-01-10 |
| CN109477953B (en) | 2021-02-19 |
| CN109212733B (en) | 2021-02-05 |
| CN109477953A (en) | 2019-03-15 |
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Address after: No.99, Xuhai Road, Xuzhou Economic and Technological Development Zone, Xuzhou City, Jiangsu Province, 221004 Patentee after: Jiangsu Xuhai Photoelectric Technology Co.,Ltd. Address before: No.99, Xuhai Road, Xuzhou Economic and Technological Development Zone, Xuzhou City, Jiangsu Province, 221004 Patentee before: XUZHOU XUHAI OPTO-ELECTRONIC TECHNOLOGIES Co.,Ltd. |