CN104181146A - Multipulse laser-induced breakdown spectrum on-line detection system - Google Patents
Multipulse laser-induced breakdown spectrum on-line detection system Download PDFInfo
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- CN104181146A CN104181146A CN201310191353.XA CN201310191353A CN104181146A CN 104181146 A CN104181146 A CN 104181146A CN 201310191353 A CN201310191353 A CN 201310191353A CN 104181146 A CN104181146 A CN 104181146A
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Abstract
The invention provides a multipulse laser-induced breakdown spectrum on-line detection system which comprises a pulse laser, an optical-path extending loop device, a second light-path guiding device, a light-path convergence device and a data detection system. The optical-path extending loop device comprises a light-path splitting device, a pulse delay device and a first light-path guiding device. The light-path splitting device is used for dividing pulse laser into first pulse laser and second pulse laser. The pulse delay device is used for increasing optical path of the second pulse laser. The first light-path guiding device is used for changing the light path of the second pulse laser with the increased optical path. The second light-path guiding device is used for changing the light path of the first pulse laser. The light-path convergence device is used for converging the first pulse laser and the second pulse laser with the increased optical path to a same specific light path. A pulse laser is adopted to generate multiple pulse lasers with different optical paths, and the multiple pulse lasers are focused on a same position on a sample to be detected.
Description
Technical field
The present invention relates to laser spectrum detection technique field, be specifically related to a kind of multi-pulse laser induced breakdown spectroscopy on-line detecting system.
Background technology
Laser-induced Breakdown Spectroscopy technology (Laser Induced Breakdown Spectroscopy, LIBS) be a kind of quantitative analysis tech of the emission spectrum based on laser and material interaction generation, the method only needs several micrograms in measuring process, therefore can realize Nondestructive measurement; Without sample pretreatment, can realize the ultimate analysis to any physical state material, make LIBS technology range of application very extensive; LIBS technology is optical technology application, can Measurement and analysis far reaches the sample at tens meters of, and its remote analysis ability is to having very large attractive force in dangerous, hot environment or hostile environment; Use LIBS technology to carry out analysis of components, whole process only needed about ten seconds, and real-time and rapidity are very good; LIBS technology can be carried out quantitative test to trace in material by calibration, and detectability and precision meet application demand completely.
Compare with traditional detection technology, LIBS technology has incomparable technical advantage for online in situ detection, but because the sensitivity for analysis of monopulse LIBS technology is not high, thereby restricted the application in trace element detection field.LIBS is based on high power laser light and matter interaction, produces transient state plasma, and the emission spectrum of plasma is studied, thereby realizes the qualitative analysis of sample composition and quantitative test.But the plasma temperature that monopulse LIBS excites and density are all lower, the intensity of emission spectra of formation is limited, thereby sensitivity for analysis is relatively low.
Dipulse LIBS technology is to utilize the first bundle laser pulses irradiate sample surfaces to produce plasma, the second bundle laser pulses irradiate plasma is launched with enhanced line after a while, realized the distribution optimization to two of material ablation and plasma exciatiaon stages, thereby dipulse LIBS technology can effectively improve signal to noise ratio (S/N ratio), raising sensitivity for analysis.In the open book CN102507511A of Chinese invention patent application, adopted the double-pulse laser emission coefficient being formed by infrared band laser device, ultraviolet band laser device and pulse delay controller, pulse delay controller is connected with ultraviolet band laser device signal with infrared band laser device respectively, for regulating the recurrent interval of two bundle laser of infrared band laser device and ultraviolet band laser device, focus on afterwards the same position on testing sample surface, in order to complete sample ablation and excitation of plasma.But current dipulse LIBS technology is all to adopt two laser instruments, method by power supply control lag realizes dipulse and excites, increased like this cost of system, and respectively to two-way Laser Focusing, very difficult assurance focuses on the same point on testing sample, can not realize the dipulse plasma exciatiaon of maximal efficiency.
Summary of the invention
For above-mentioned prior art, the technical problem to be solved in the present invention is to provide a kind of multi-pulse laser induced breakdown spectroscopy on-line detecting system, this multi-pulse laser induced breakdown spectroscopy on-line detecting system can adopt a pulsed laser to produce a plurality of pulse lasers, and make multi-pulse laser focus on same position on testing sample, reduce costs, and improved sensitivity for analysis.
To achieve these goals, one embodiment of the present of invention provide a kind of multi-pulse laser induced breakdown spectroscopy on-line detecting system, comprising:
Pulsed laser, for generation of pulse laser;
Optical path lengthening loop apparatus, described optical path lengthening loop apparatus comprises light path light-dividing device, pulse delay apparatus and the first light path guidance device, described light path light-dividing device is for being divided into the first pulse laser and the second pulse laser by described pulse laser, described pulse delay apparatus is for increasing the light path of described the second pulse laser, and described the first light path guidance device is for changing the light path of the second pulse laser of described increase light path;
The second light path guidance device, for changing the light path of described the first pulse laser;
Light path is converged device, for the second pulse laser of described the first pulse laser and described increase light path being convergeed to an identical specific light path;
Data detection system, described data detection system comprises focus lamp, spectrometer and computing machine, described focus lamp for by the first pulse laser in described specific light path and the second pulse laser focusing at same position, and process and obtain detecting data by described optical fiber, spectrometer and Computer Analysis.
The present invention adopts a pulsed laser, the pulse laser of launching by an optical path lengthening loop apparatus paired pulses laser instrument is divided into two bundle of pulsed laser, extend the light path of one of them pulse laser, and two bundle of pulsed laser is convergeed in a light path and can realize the object that a pulsed laser is launched the different pulse laser of two-beam journey, the same position at sample by the different pulse laser focusing of two-beam journey, can realize double-pulse laser induced breakdown spectrum on line and detect simultaneously.Reduced the quantity of pulsed laser, and provided cost savings.
Preferably, described light path light-dividing device comprises Transflective mirror, for described pulse laser being reflected into the first pulse laser, becomes the second pulse laser with transmission; Described the first light path guidance device comprises first polaroid identical with the polarization state of described pulse laser; Described the second light path guidance device comprises the first catoptron; Described light path is converged device and is comprised the second polaroid; Described optical path lengthening loop apparatus also comprises quarter wave plate and catoptron, the second pulse laser wherein transmitting from described Transflective mirror is successively through the first polaroid, pulse delay apparatus, quarter wave plate and catoptron, and the second pulse laser after the reflection of the former road of catoptron incides in described specific light path again after described quarter wave plate, pulse delay apparatus, the first polaroid and the second polaroid, described the first pulse laser incides in described specific light path successively after the first catoptron and the second polaroid.Wherein the first catoptron can be plane mirror or concave mirror, the polarization state of the second polaroid can be identical or vertical with the polarization state of pulse laser, when the polarization state of the second polaroid is identical with the polarization state of pulse laser, the second polaroid reflexes to the second pulse laser that increases light path in specific light path, and the first pulse laser is transmitted in specific light path; When the polarization state of the second polaroid and pulse laser is vertical, the second polaroid is transmitted to the second pulse laser that increases light path in specific light path, and the first pulse laser is reflexed in specific light path.
Preferably, Transflective mirror is half-transmitting and half-reflecting mirror.Pulse laser can be divided into the two bundle of pulsed laser that intensity is equal.
Preferably, between described the second polaroid and described focus lamp, be also provided with the second catoptron, described the second catoptron reflexes to the first pulse laser in described specific light path and the second pulse laser on focus lamp.The second catoptron can regulating impulse swash direction of light, and pulse laser can be reflexed on focus lamp.
Preferably, described pulse delay apparatus is two plane mirrors or two concave mirrors, and the distance between described two plane mirrors or two concave mirrors can regulate.By regulating the distance of two catoptrons, the light path can regulating impulse laser increasing.
Preferably, on described plane mirror, there is through hole or groove.Through hole or groove are convenient to pulse laser from through hole or groove incident and reflection.
Preferably, on described concave mirror, there is through hole or groove.Through hole or groove are convenient to pulse laser from through hole or groove incident and reflection.
Preferably, between described the first polaroid and pulse delay apparatus, be also provided with two light paths and adjust catoptron, for adjusting light path.Light path is adjusted catoptron can adjust the incident angle that pulse laser incides pulse delay apparatus, thereby the light path of regulating impulse laser very easily, and can under the prerequisite that does not change the first polaroid, quarter wave plate and catoptron, make pulse laser along identical light path incident and reflection.
Preferably, described pulsed laser is nanosecond laser, picosecond laser or femto-second laser, and the polarization state of described pulse laser is horizontal polarization or vertical polarization.
Preferably, also comprise that the second optical path lengthening loop apparatus and the second light path converge device, described the second optical path lengthening loop apparatus is for being divided into the 3rd pulse laser and the 4th pulse laser by described the first pulse laser, increase the light path of described the 3rd pulse laser, change the light path of the 3rd pulse laser that increases light path, described the second light path guidance device is for changing the light path of described the 4th pulse laser, the second light path is converged device and described light path and is converged device for by described the 4th pulse laser, the 3rd pulse laser of described increase light path and the second pulse laser of described increase light path converge in described specific light path.Two optical path lengthening loop apparatus and light path are converged device and pulse laser can be divided into three bundle of pulsed laser, each self-regulation wherein two pulse lasers light path and three bundle of pulsed laser are converged in identical light path, can realize like this same position that the pulse laser of pulsed laser transmitting is divided into the pulse laser of three different light paths and focuses on sample.
Certainly, can also comprise that N optical path lengthening loop apparatus and N light path converge device, the bundle of pulsed laser that pulsed laser is launched is divided into the pulse laser of N+1 different light paths, and by light path, converges device the pulse laser of N+1 different light paths is merged in same light path.Wherein N is positive integer.Can realize so any multi-pulse laser induced breakdown spectroscopy on-line detecting system.
Accompanying drawing explanation
Referring to accompanying drawing, embodiments of the present invention is further illustrated, wherein:
Fig. 1 is the structural representation of first embodiment of multi-pulse laser induced breakdown spectroscopy on-line detecting system of the present invention.
Fig. 2 is the distressed structure schematic diagram of first embodiment of multi-pulse laser induced breakdown spectroscopy on-line detecting system of the present invention.
Fig. 3 is that the pulse delay apparatus shown in Fig. 1 and two light paths are adjusted the schematic diagram that catoptron is used in combination adjustment light path.
Fig. 4 is that the pulse delay apparatus shown in Fig. 1 and two light paths are adjusted another schematic diagram that catoptron is used in combination adjustment light path.
Fig. 5 is the structural representation of second embodiment of multi-pulse laser induced breakdown spectroscopy on-line detecting system of the present invention.
Fig. 6 is the perspective view of the pulse delay apparatus of multi-pulse laser induced breakdown spectroscopy on-line detecting system of the present invention.
Fig. 7 is the floor map of the pulse delay apparatus of multi-pulse laser induced breakdown spectroscopy on-line detecting system of the present invention.
Embodiment
In order to make object of the present invention, technical scheme and advantage are clearer, and below in conjunction with accompanying drawing, by specific embodiment, the present invention is described in more detail.
Fig. 1 is the structural representation of first embodiment of multi-pulse laser induced breakdown spectroscopy on-line detecting system of the present invention.Be a double-pulse laser induced breakdown spectrum on line detection system as shown in Figure 1, comprise dotted line frame shown in a pulsed laser 1, an optical path lengthening loop apparatus 2(Fig. 1), light path converges dotted line frame shown in device 11, the second light path guidance device 3 and data detection system 4(Fig. 1).Optical path lengthening loop apparatus 2 comprises that Transflective mirror 5, the first polaroid 6, two light paths adjust catoptron 7, pulse delay apparatus 8, quarter wave plate 9, catoptron 10, it is second polaroid 11 that light path is converged device 11, the first polaroid 6 is identical with the polarization state of the second polaroid 11, and identical with the polarization state of pulse laser.Data detection system 4 comprises focus lamp 13, objective table 14, optical fiber 15, spectrometer 16 and computing machine 17.
Pulsed laser 1 is launched hollow arrow shown in pulse laser L(Fig. 1 of vertical polarization), after Transflective mirror 5, be reflected into the 1st pulse laser a and become the 2nd pulse laser b totally 2 pulse lasers with transmission, Transflective mirror 5 can be half-transmitting and half-reflecting mirror, after the light splitting of half-transmitting and half-reflecting mirror 5, the 1st pulse laser a is the same with the intensity of the 2nd pulse laser b.
In the light path of the 2nd pulse laser b, the 2nd pulse laser b is through the first polaroid 6, the polarization state of the first polaroid 6 is identical with the polarization state of the pulse laser that pulsed laser 1 is launched, also be vertical polarization, can make the 2nd pulse laser b can see through the first polaroid 6, the 2nd pulse laser b of vertical polarization incides two light paths and adjusts on catoptron 7, it is plane mirror that light path is adjusted catoptron 7, in order to change the incident direction of the 2nd pulse laser b, the 2nd pulse laser b can be incided on pulse delay apparatus 8, the 2nd pulse laser b at pulse delay apparatus 8 through the back reflective that comes repeatedly, finally from pulse delay apparatus 8 outgoing, therefore increased the light path of the 2nd pulse laser b.From the outgoing beam of pulse delay apparatus 8, incide quarter wave plate 9, after quarter wave plate 9, the 2nd pulse laser b of vertical polarization becomes circularly polarized light, from the light of quarter wave plate 9 outgoing, impinge perpendicularly on catoptron 10, the reflected light of catoptron 10 becomes the 2nd pulse laser b of horizontal polarization again after quarter wave plate 9, the 2nd pulse laser b of horizontal polarization enters to inject in pulse delay apparatus 8, and again in pulse delay apparatus 8 through repeatedly carrying out back reflective, thereby realize the increase for the second time of the light path of the 2nd pulse laser b, finally shining light path adjusts on catoptron 7, by the adjustment of 7 pairs of light paths of two plane mirrors, the 2nd pulse laser b of horizontal polarization is incided on the first polaroid 6 of vertical polarization, the first polaroid 6 reflexes to the second polaroid 11 by the 2nd pulse laser b of horizontal polarization, the second polaroid 11 reflexes to specific light path O upper (filled arrows direction in Fig. 1) by the 2nd pulse laser b of horizontal polarization.
The 1st pulse laser a incides on the second light path guidance device 3, the second light path guidance device 3 reflection the 1st pulse laser a, and it is upper to be transmitted to specific light path O through the second polaroid 11, thereby makes the 1st pulse laser a and increase the 2nd pulse laser b after light path on same specific light path O.In the present embodiment, the second light path guidance device 3 is plane mirror, and in other embodiment, the second light path guidance device 3 can also be curved reflector.
Between the second polaroid 11 and focus lamp 13, be provided with the second catoptron 12, the second catoptron 12 reflexes on focus lamp 13 the 1st pulse laser a on specific light path O and the 2nd pulse laser b priority, by focus lamp 13, to converging of light, make the 1st pulse laser a and the 2nd pulse laser b successively focus on the same position on testing sample on objective table 14, thereby realize dipulse LIBS technology, because the light path of two-way pulse laser process is different, therefore produced temporal delay, two-way pulse laser completes ablation and plasma exciatiaon on sample, form transient high temperature degree high-density plasma, this plasma exciatiaon process produces emission spectrum signal, optical fiber 15 receives plasma light spectrum signal, transfer to spectrometer 16, by corresponding analysis software in the computing machine 17 being connected with spectrometer 16, process and can obtain spectral information and be kept in computing machine 17.
In the embodiment shown in fig. 1, pulse delay apparatus 8 is two plane mirrors, and the distance between two plane mirrors can regulate.By the distance of two plane mirrors in regulating impulse time-delay mechanism 8, get final product the light path of regulating impulse laser.In other embodiment, pulse delay apparatus 8 can also be two concave mirrors.
Fig. 2 is the distressed structure schematic diagram of first embodiment of multi-pulse laser induced breakdown spectroscopy on-line detecting system of the present invention.Itself and Fig. 1 are basic identical, and difference is that the polarization direction of the second polaroid 11 is vertical with the polarization direction of the first polaroid 6, and the second polaroid 11 is horizontal polarization state in the present embodiment.Therefore through optical path lengthening and for the second pulse laser b of horizontal polarization, after by the first polaroid 6 reflections of vertical polarization, incide the second polaroid 11, because the second polaroid 11 is identical with the polarization state that increases the second pulse laser b after light path, therefore the second polaroid 11 is gone up (shown in Fig. 2 filled arrows direction) by transmission the second pulse laser b to specific light path O.Wherein the first pulse laser a of vertical polarization reflexes on the second polaroid 11 through the second light path guidance device 3, and reflexes to specific light path O upper (shown in Fig. 2 filled arrows direction) through the second polaroid 11.Finally, the second polaroid 11 converges in the second pulse laser b of the first pulse laser a and increase light path in same specific light path.In the present embodiment, between the second polaroid 11 and focus lamp 13, can also be provided with catoptron, for pulse laser being reflexed to focus lamp 13.
Fig. 3 and Fig. 4 are that the pulse delay apparatus shown in Fig. 1 and two light paths are adjusted the schematic diagram that catoptron is used in combination adjustment light path.As shown in Figure 3, when the distance of two plane mirrors in pulse delay apparatus 8 increases and pulse laser incides the invariable incident angle of plane mirror, cause the order of reflection of pulse laser in pulse delay apparatus 8 to reduce.Thereby the light path of pulse laser is changed.Fig. 4 and Fig. 3 are basic identical, difference is, the incident angle that pulse laser incides plane mirror reduces, and such two plane mirrors are under identical distance condition, pulse laser can be through repeatedly carrying out back reflective in pulse delay apparatus 8, thereby change the light path of pulse laser.When the light path of regulating impulse laser, can adjust catoptron 7 by two light paths and change the incident angle that incides pulse delay apparatus 8, therefore in use, pulsed laser 1, Transflective mirror 5, the first polaroid 6 and the second polaroid 11 do not need to adjust, and can adjust easily the light path of pulse laser.
In optical path lengthening loop apparatus, if pulse laser light path recruitment after multiple reflections in pulse delay apparatus is Δ l, because pulse laser passes through pulse delay apparatus twice, pulse delay time, Δ t can calculate according to following relational expression so:
Wherein, c is the light velocity.
Fig. 5 is the structural representation of second embodiment of multi-pulse laser induced breakdown spectroscopy on-line detecting system of the present invention.Shown in Fig. 5, be three pulse laser induced breakdown spectral on-line detecting systems, comprise dotted line frame shown in a pulsed laser 1, two optical path lengthening loop apparatus 2 and 22(Fig. 5), two light paths converge dotted line frame shown in device 11 and 211, the second light path guidance device 3 and data detection system 4(Fig. 5).Wherein optical path lengthening loop apparatus 2 comprises that Transflective mirror 5, the first polaroid 6, two light paths adjust catoptron 7, pulse delay apparatus 8, quarter wave plate 9, catoptron 10, wherein to converge device 11 be the second polaroid 11 to light path, it is the 3rd polaroid 211 that light path is converged device 211, the first polaroid 6 is identical with the polarization state of the second polaroid 11, and identical with the polarization state of pulse laser.Optical path lengthening loop apparatus 22 is the same with optical path lengthening loop apparatus 2, comprise that equally Transflective mirror 25, the 4th polaroid 26, two light paths adjust catoptron 27, pulse delay apparatus 28, quarter wave plate 29 and catoptron 210, the 4th polaroid 26 is identical with the polarization state of the 3rd polaroid 211, and identical with the polarization state of pulse laser.The difference of optical path lengthening loop apparatus 22 and optical path lengthening loop apparatus 2 is that pulse delay apparatus 28 comprises two concave mirrors, and in other embodiment, pulse delay apparatus can be both two concave mirrors, can be also two plane mirrors.Data detection system 4 comprises focus lamp 13, objective table 14, optical fiber 15, spectrometer 16 and computing machine 17.
Pulsed laser 1 is launched shown in pulse laser L(Fig. 5 of vertical polarization shown in hollow arrow L), after Transflective mirror 5, be reflected into the 1st pulse laser a, and be transmitted into the 2nd pulse laser b, the 1st pulse laser a is when the Transflective mirror 25 through in optical path lengthening loop apparatus 22, be reflected into the 3rd pulse laser c and be transmitted into the 4th pulse laser a ', the 4th pulse laser a ' is identical with the polarization direction of the 1st pulse laser a, optical path direction is also identical, and difference is that the intensity of the 4th pulse laser a ' is less than the 1st pulse laser a.Like this, two optical path lengthening loop apparatus 2 and 22 the most at last pulse laser L be divided into the 4th pulse laser a ', the 2nd pulse laser b and the 3rd pulse laser c totally three pulse lasers.
In the light path of the 4th pulse laser a ', the 4th pulse laser a ' is reflected to the 3rd polaroid 211, the three polaroids 211 the 4th pulse laser a ' is transmitted to specific light path O upper (filled arrows direction in Fig. 5) after the first catoptron 3.
In the light path of the 2nd pulse laser b, the 2nd pulse laser b is successively through the first polaroid 6, two light paths are adjusted catoptron 7, pulse delay apparatus 8, quarter wave plate 9 and catoptron 10, by adjusting the angle of catoptron 10, the 2nd pulse laser b is impinged perpendicularly on catoptron 10, after catoptron 10 reflections, the 2nd pulse laser b returns according to original optical path, pass through successively quarter wave plate 9, pulse delay apparatus 8, after adjusting catoptron 7, two light paths incide on the first polaroid 6, the 2nd pulse laser b of vertical polarization becomes horizontal polarization direction twice back and forth after quarter wave plate 9, finally by the first polaroid 6 and the second polaroid 11, reflex on specific light path O.The 2nd pulse laser b is after optical path lengthening loop apparatus 2 and the second polaroid 11, and polarization direction changes and light path increases, and finally incides on specific light path O.
In the light path of the 3rd pulse laser c, the 3rd pulse laser c is successively through the first polaroid 26, two light paths are adjusted catoptron 27, pulse delay apparatus 28, quarter wave plate 29 and catoptron 210, by adjusting the angle of catoptron 210, the 3rd pulse laser c is impinged perpendicularly on catoptron 210, after catoptron 210 reflections, the 3rd pulse laser c returns according to original optical path, after quarter wave plate 29, become horizontal polarization direction, again through pulse delay apparatus 28 and two light paths adjustment catoptrons 27, incide on the 4th polaroid 26 afterwards, because the polarization direction of the 4th polaroid 26 and the 3rd polaroid 211 is all identical with the polarization direction of pulse laser L, be vertical polarization, therefore the 3rd pulse laser c is by the first polaroid 26 and the 3rd polaroid 211 reflections, and be reflected to the second polaroid 11, the second polaroid 11 is successively transmitted to the 4th pulse laser a ' and the 3rd pulse laser c on specific light path O.
In other distressed structures of second embodiment of the present invention, the first polaroid 6, the 3rd polaroid 211 is identical with the polarization state of the pulse laser that the 4th polaroid 26 all reflects with pulsed laser, and second polarization state of polaroid 11 and the polarization state of pulse laser are vertical, same as shown in Figure 2 like this, the second polaroid 11 transmissions increase the 2nd pulse laser b of light path, and the 2nd pulse laser b is merged in a light path, the second polaroid 11 reflects the 3rd pulse laser c and the 4th pulse laser a ' simultaneously, and the 3rd pulse laser c and the 4th pulse laser a ' are merged in a light path identical with the 2nd pulse laser b.
In the present embodiment, the pulse laser of pulsed laser transmitting is divided into the 4th pulse laser a ', the 2nd pulse laser b and the 3rd pulse laser c by two optical path lengthening loop apparatus 2 and 22, and optical path lengthening loop apparatus 2 and 22 has increased respectively the light path of the 2nd pulse laser b and the 3rd pulse laser c, and it is adjustable to have realized interpulse period, and last the 4th pulse laser a ', the 2nd pulse laser b and the 3rd pulse laser c are reflected in specific light path O.The second catoptron 12 successively reflexes to the 4th pulse laser a ' in specific light path O, the 2nd pulse laser b and the 3rd pulse laser c on focus lamp 13, by converging of 13 pairs of light of focus lamp, make the 4th pulse laser a ', the 2nd pulse laser b and the 3rd pulse laser c successively focus on the same position on the testing sample on objective table 14, thereby realize three pulse LIBS technology, finally by optical fiber, spectrometer and Computer Analysis, process and obtain detecting data.
Wherein, the light path of the 2nd pulse laser b and the 3rd pulse laser c can change by regulating impulse time-delay mechanism 8 and 28 respectively, gets final product so that the 2nd pulse laser b first incides focus lamp 13, also can be so that the 3rd pulse laser c first incides focus lamp 13.
In order to control the 4th pulse laser a ', the 2nd pulse laser b is the same with the light intensity of the 3rd pulse laser c, Transflective mirror 5 can be 1/3rd transmissions 2/3rds reflections, and Transflective mirror 25 can be half-transmitting and half-reflecting mirror.
Pulse laser L in above-described embodiment is 532nm, single pulse energy 100mJ, pulse width 10ns, repetition frequency 10Hz, polarization direction vertical polarization, in other embodiment, pulse laser L can also be horizontal polarization, and makes the first polaroid 6, the second polaroid 11, the 3rd polaroid 211, the 4th polaroid 26 identical with the polarization direction of pulse laser L.Pulsed laser can be nanosecond laser, picosecond laser or femto-second laser,
Those skilled in the art is known, although just schematically enumerated double-pulse laser induced breakdown spectrum on line detection system and three pulse laser induced breakdown spectral on-line detecting systems in embodiments of the invention, but the present invention is not limited to this, those skilled in the art can be on basis of the present invention, the one or more optical path lengthening loop apparatus of any increase and light path are converged common N the optical path lengthening loop apparatus of device and N light path converged device (N is greater than 0 natural number), pulse laser L is divided into N+1 pulse laser, and increase the wherein light path of N laser pulse, and all N+1 pulse laser is transmitted in a specific light path, thereby realize multi-pulse laser induced breakdown spectroscopy and puncture online system.
Fig. 6 is the perspective view of the pulse delay apparatus of multi-pulse laser induced breakdown spectroscopy on-line detecting system of the present invention.As shown in Figure 6, pulse delay apparatus 8 is two plane mirrors, has separately through hole 81 and 82 on plane mirror, through hole 81,82 incidents for pulse laser and outgoing.For example, 81 incidents of pulse laser via through holes, in pulse delay apparatus 8 through multiple reflections and increase after the light path of pulse laser, finally by through hole 82 outgoing.Certainly, pulse laser also can be from through hole 82 incidents, via through holes 81 outgoing.Those skilled in the art are known, and pulse laser can also be to incide another plane mirror from the edge of one of them plane mirror, after the multiple reflections of two plane mirrors, finally by the edge reflections of another plane mirror, goes out.
Fig. 7 is the floor map of the pulse delay apparatus of multi-pulse laser induced breakdown spectroscopy on-line detecting system of the present invention.Edge at plane mirror has groove 83, is convenient to incident and the outgoing of pulse laser.
In other embodiment, pulse delay apparatus 8 can also be two concave mirrors 28, in two concave mirrors 28, there is separately through hole 81 and 82(not shown), or it is not shown in the edge of concave mirror 28, to have groove 83().
The foregoing is only the schematic embodiment of the present invention, not in order to limit scope of the present invention.Any those skilled in the art, not departing from equivalent variations, modification and the combination of doing under the prerequisite of design of the present invention and principle, all should belong to the scope of protection of the invention.
Claims (10)
1. a multi-pulse laser induced breakdown spectroscopy on-line detecting system, is characterized in that, comprising:
Pulsed laser (1), for generation of pulse laser;
Optical path lengthening loop apparatus (2), described optical path lengthening loop apparatus (2) comprises light path light-dividing device (5), pulse delay apparatus (8) and the first light path guidance device (6), described light path light-dividing device (5) is for being divided into described pulse laser the first pulse laser and the second pulse laser, described pulse delay apparatus (8) is for increasing the light path of described the second pulse laser, and described the first light path guidance device (6) is for changing the light path of the second pulse laser of described increase light path;
The second light path guidance device (3), for changing the light path of described the first pulse laser;
Light path is converged device (11), for the second pulse laser of described the first pulse laser and described increase light path being convergeed to an identical specific light path;
Data detection system (4), described data detection system (4) comprises focus lamp (13), spectrometer (16) and computing machine (17), described focus lamp (13) for by the first pulse laser in described specific light path and the second pulse laser focusing at same position, and obtain detecting data by described spectrometer (16) and computing machine (17) analyzing and processing.
2. multi-pulse laser induced breakdown spectroscopy on-line detecting system according to claim 1, is characterized in that,
Described light path light-dividing device (5) comprises Transflective mirror (5), for described pulse laser being reflected into the first pulse laser, becomes the second pulse laser with transmission;
Described the first light path guidance device (6) comprises first polaroid (6) identical with the polarization state of described pulse laser;
Described the second light path guidance device (3) comprises the first catoptron (3);
Described light path is converged device (11) and is comprised the second polaroid (11);
Described optical path lengthening loop apparatus (2) also comprises quarter wave plate (9) and catoptron (10), the second pulse laser wherein transmitting from described Transflective mirror (5) is successively through the first polaroid (6), pulse delay apparatus (8), quarter wave plate (9) and catoptron (10), and the second pulse laser after catoptron (10) former road reflection passes through described quarter wave plate (9) again, pulse delay apparatus (8), after the first polaroid (6) and the second polaroid (11), incide in described specific light path, described the first pulse laser incides in described specific light path successively after the first catoptron (3) and the second polaroid (11).
3. multi-pulse laser induced breakdown spectroscopy on-line detecting system according to claim 2, is characterized in that, described Transflective mirror (5) is half-transmitting and half-reflecting mirror (5).
4. multi-pulse laser induced breakdown spectroscopy on-line detecting system according to claim 2, it is characterized in that, between described the second polaroid (11) and described focus lamp (13), be also provided with the second catoptron (12), described the second catoptron (12) reflexes to the first pulse laser in described specific light path and the second pulse laser on focus lamp (13).
5. according to the multi-pulse laser induced breakdown spectroscopy on-line detecting system described in claim 1 to 4 any one, it is characterized in that described pulse delay apparatus (8; 28) be two plane mirrors (8) or two concave mirrors (28), the distance between described two plane mirrors (8) or two concave mirrors (28) can regulate.
6. multi-pulse laser induced breakdown spectroscopy on-line detecting system according to claim 5, is characterized in that, described plane mirror has through hole (81 on (8); 82) or groove (83).
7. multi-pulse laser induced breakdown spectroscopy on-line detecting system according to claim 5, is characterized in that, described concave mirror has through hole (81 on (28); 82) or groove (83).
8. multi-pulse laser induced breakdown spectroscopy on-line detecting system according to claim 2, is characterized in that, is also provided with two light paths and adjusts catoptron (7), for adjusting light path between described the first polaroid (6) and pulse delay apparatus (8).
9. according to the multi-pulse laser induced breakdown spectroscopy on-line detecting system described in claim 1 to 4 any one, it is characterized in that, described pulsed laser (1) is nanosecond laser, picosecond laser or femto-second laser, and the polarization state of described pulse laser is horizontal polarization or vertical polarization.
10. multi-pulse laser induced breakdown spectroscopy on-line detecting system according to claim 1, is characterized in that, also comprises:
The second optical path lengthening loop apparatus (22), described the second optical path lengthening loop apparatus (22) is for being divided into described the first pulse laser the 3rd pulse laser and the 4th pulse laser, increase the light path of described the 3rd pulse laser, change the light path of the 3rd pulse laser of described increase light path, described the second light path guidance device (3) is for changing the light path of described the 4th pulse laser;
The second light path is converged device (211), and described the second light path converges device (211) and described light path is converged device (11) for the second pulse laser of the 3rd pulse laser of described the 4th pulse laser, described increase light path and described increase light path is convergeed to described specific light path.
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104849244A (en) * | 2015-05-28 | 2015-08-19 | 中国科学技术大学 | Multi-pulse laser-induced breakdown spectroscopy measuring method and system |
| CN105486676A (en) * | 2015-12-25 | 2016-04-13 | 中国科学院合肥物质科学研究院 | Microwave-assisted laser-induced breakdown spectrum device |
| CN105527274A (en) * | 2016-01-29 | 2016-04-27 | 华中科技大学 | Efficient multipath laser probe analysis system and method |
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Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201449373U (en) * | 2009-07-28 | 2010-05-05 | 华南理工大学 | Photoelectric double-pulse laser induced breakdown spectrometer |
| CN101709956A (en) * | 2009-11-06 | 2010-05-19 | 北京理工大学 | Optical fiber point diffraction phase shifting interferometry of optical plane surface shape |
| CN101762242A (en) * | 2010-01-15 | 2010-06-30 | 北京理工大学 | Absolute interference measurement method for plane shape of optical plane |
| CN202057597U (en) * | 2010-12-30 | 2011-11-30 | 深圳大学 | Fluorescent microscopic imaging system |
| CN102507511A (en) * | 2011-11-07 | 2012-06-20 | 大连理工大学 | On-line in situ detecting device for infrared-ultraviolet double pulse laser induced breakdown spectroscopy |
| CN102735614A (en) * | 2011-04-08 | 2012-10-17 | 中国科学院光电研究院 | Multi-channel parallel laser ultrasonic detection system |
| US20120314214A1 (en) * | 2011-06-07 | 2012-12-13 | Alexander Dennis R | Laser Induced Breakdown Spectroscopy Having Enhanced Signal-to-Noise Ratio |
| CN203324186U (en) * | 2013-06-21 | 2013-12-04 | 中国科学院上海技术物理研究所 | Laser induced breakdown spectroscopy system based on wavelength division multiplexing and time domain overlapping |
-
2013
- 2013-05-22 CN CN201310191353.XA patent/CN104181146A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201449373U (en) * | 2009-07-28 | 2010-05-05 | 华南理工大学 | Photoelectric double-pulse laser induced breakdown spectrometer |
| CN101709956A (en) * | 2009-11-06 | 2010-05-19 | 北京理工大学 | Optical fiber point diffraction phase shifting interferometry of optical plane surface shape |
| CN101762242A (en) * | 2010-01-15 | 2010-06-30 | 北京理工大学 | Absolute interference measurement method for plane shape of optical plane |
| CN202057597U (en) * | 2010-12-30 | 2011-11-30 | 深圳大学 | Fluorescent microscopic imaging system |
| CN102735614A (en) * | 2011-04-08 | 2012-10-17 | 中国科学院光电研究院 | Multi-channel parallel laser ultrasonic detection system |
| US20120314214A1 (en) * | 2011-06-07 | 2012-12-13 | Alexander Dennis R | Laser Induced Breakdown Spectroscopy Having Enhanced Signal-to-Noise Ratio |
| CN102507511A (en) * | 2011-11-07 | 2012-06-20 | 大连理工大学 | On-line in situ detecting device for infrared-ultraviolet double pulse laser induced breakdown spectroscopy |
| CN203324186U (en) * | 2013-06-21 | 2013-12-04 | 中国科学院上海技术物理研究所 | Laser induced breakdown spectroscopy system based on wavelength division multiplexing and time domain overlapping |
Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104849244B (en) * | 2015-05-28 | 2018-11-02 | 中国科学技术大学 | A kind of multi-pulse laser induced breakdown spectroscopy measurement method and system |
| CN104849244A (en) * | 2015-05-28 | 2015-08-19 | 中国科学技术大学 | Multi-pulse laser-induced breakdown spectroscopy measuring method and system |
| CN105486676A (en) * | 2015-12-25 | 2016-04-13 | 中国科学院合肥物质科学研究院 | Microwave-assisted laser-induced breakdown spectrum device |
| US10241339B2 (en) | 2016-01-15 | 2019-03-26 | Boe Technology Group Co., Ltd. | Laser pulse delay system and laser annealing system |
| CN105527274A (en) * | 2016-01-29 | 2016-04-27 | 华中科技大学 | Efficient multipath laser probe analysis system and method |
| CN105527274B (en) * | 2016-01-29 | 2018-01-02 | 华中科技大学 | A kind of efficient multi-path laser probe analysis System and method for |
| CN105651702A (en) * | 2016-03-22 | 2016-06-08 | 派棱环保科技（苏州）有限公司 | Water quality detection method based on film-coated decomposition pool |
| CN105784682B (en) * | 2016-05-10 | 2019-02-15 | 中国科学院光电研究院 | A kind of laser induced breakdown spectroscopy detection device and detection method |
| CN105784682A (en) * | 2016-05-10 | 2016-07-20 | 中国科学院光电研究院 | Detection device and detection method by laser induced breakdown spectroscopy |
| JP2018530736A (en) * | 2016-08-24 | 2018-10-18 | アカデミー オブ オプト−エレクトロニクス，チャイニーズ アカデミー オブ サイエンシズ | Method of detecting steel sample components using multi-pulse laser induced plasma spectrum analyzer |
| WO2018035937A1 (en) * | 2016-08-24 | 2018-03-01 | 中国科学院光电研究院 | Method for detecting composition of steel sample by using multi-pulse laser-induced plasma spectrometer |
| US10712281B2 (en) | 2016-08-24 | 2020-07-14 | Academy Of Opto-Electronics, Chinese Academy Of Sciences | Method for detecting composition of steel sample by using multi-pulse laser-induced plasma spectrometer |
| WO2019007175A1 (en) * | 2017-07-04 | 2019-01-10 | 徐州旭海光电科技有限公司 | Efficient optical path folding device |
| CN109477953A (en) * | 2017-07-04 | 2019-03-15 | 徐州旭海光电科技有限公司 | A kind of efficient light path folded device |
| CN109477953B (en) * | 2017-07-04 | 2021-02-19 | 徐州旭海光电科技有限公司 | Efficient optical path folding device |
| CN108181711A (en) * | 2018-01-16 | 2018-06-19 | 北京工业大学 | Extend the method in chevilled silk service life using double laser beams breakdown spectral relaxation effect |
| CN108760635A (en) * | 2018-06-11 | 2018-11-06 | 长春理工大学 | Highly sensitive effect of fertilizer detection device and detection method |
| CN110632038A (en) * | 2019-10-28 | 2019-12-31 | 中国科学院上海光学精密机械研究所 | Light path time-delay double-pulse LIBS device |
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