CN104039063B - The counterfeit thermal source of high-contrast X-ray based on coding grommet battle array plate - Google Patents
The counterfeit thermal source of high-contrast X-ray based on coding grommet battle array plate Download PDFInfo
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Abstract
A kind of counterfeit thermal source of high-contrast X-ray based on coding grommet battle array plate, including the x-ray generator being placed in radiation protective casing, X-ray transmission modulating system and counterfeit hot X-ray produce system, the hot X-ray of broadband produced by x-ray generator arrives first at the broadband beam-defining jaw of X-ray transmission modulating system through propagating, monochromator is entered after limit bundle, narrow-band X-ray is become after monochromator, after narrow-band beam-defining jaw limit bundle, irradiation produces system to counterfeit hot X-ray, sequentially pass through coding orifice plate and grommet battle array plate, under grommet battle array plate motion controller controls, dynamic X-ray speckle is formed at grommet battle array plate rear, X-ray exit window outgoing on radiation protective casing, it is the counterfeit hot light field of X-ray.The present invention have X-ray wave band be suitable for, high-contrast, high-resolution, high brightness, regulatable feature.
Description
Technical field
The present invention relates to X-ray light source, a kind of high-contrast based on coding grommet battle array plate
The counterfeit thermal source of X-ray, it can be as X-ray light source applications in X-ray intensity correlation imaging field.
Background technology
In intensity correlation imaging applications, an important problem is to need to obtain detectable hot light
?.Coherence time for hot light is short, and existing photo-detector cannot measure the instantaneous of hot light fluctuation
Intensity, Martienssen et al. invented the counterfeit thermal light source of a kind of continuous way and [has seen W. in 1964
Martienssen and E.Spiller,“Coherence and Fluctuations in Light
Beams”,American Journal of Physics32,8(1964)].2006, in order to
The counterfeit thermal light source of continuous way is overcome to be unsatisfactory for the problem such as cross-spectral purity condition of true hot light field, China
Han Shensheng of academy of science's Shanghai optical precision optical machinery institute et al. has invented a kind of high brightness pulsed
Counterfeit thermal light source (patent of invention ZL200710036968.X).This hot light of high brightness pulse type pseudo
The thermal fluctuation of the counterfeit hot light field in source, has the longest coherence time, can be by the photoelectricity of limited passband
Detection system is recorded truly, and is not affected by the passband of the Photodetection system used, full
The cross-spectral purity condition of the true hot light field of foot, can be used for intensity correlation imaging research field.On but
The counterfeit thermal light source stated is to use laser illumination clouded glass to obtain counterfeit hot speckle, is only applicable to visible ray
Wave band, for X-ray, its wave-length coverage, beam properties and object interaction process with
Visible ray all has an essential distinction:
1, X-ray is without the practical coherent source of similar visible light wave range laser instrument, X-ray coherence time
(picosecond magnitude) is far smaller than the response time (nanosecond order) of existing detector；
2, X-ray wavelength is short, has the highest penetrance, does not has suitable spatial alternation modulation element,
Clouded glass scattering effect can not be used to obtain counterfeit hot speckle.
For the These characteristics of X-ray, the analogy rainbow of Shanghai Optics and Precision Mechanics institute, Chinese Academy of Sciences
Et al. invented a kind of regulatable X-ray pseudo-thermal light source (patent of invention number based on microporous membrane
ZL201110148476.6) so that when x-ray source meets the response of existing detector coherence time
Between, it is achieved X-ray hot fluctuation of optical field intensity record.But due to high-penetrability and the partial ocoherence of X-ray,
The counterfeit thermal source of this kind X-ray based on microporous membrane produce X-ray speckle contrast only 0.05,90% with
On incident illumination all become noise back end, intensity correlation image quality is had considerable influence.
Summary of the invention
The technical problem to be solved in the present invention is to overcome the above-mentioned defect in first technology, it is provided that a kind of
The counterfeit thermal source of high-contrast X-ray based on coding grommet battle array, the contrast of the counterfeit thermal source of this X-ray is theoretical
On can reach 1, measured value is 0.96, and coherence time and resolution (speckle measure) controllable,
Have X-band be suitable for, high-contrast, high-resolution, high brightness and regulatable feature, can answer
For X-ray intensity relevance imaging.
The technical solution of the present invention is as follows:
A kind of counterfeit thermal source of high-contrast X-ray based on coding grommet battle array plate, feature is that it is constituted
Produce including the x-ray generator being placed in radiation protective casing, X-ray transmission modulating system and counterfeit hot X-ray
Raw system, described X-ray transmission modulating system is by broadband beam-defining jaw, monochromator and narrow-band
Beam-defining jaw is constituted, and described counterfeit hot X-ray produces system by encoding orifice plate and adjusting frame, metal
Hole battle array plate and motion controller, chassis and guide rail are constituted；Described coding orifice plate is fixed on coding
Orifice plate adjusts on frame, and described grommet battle array plate is fixed on described grommet battle array plate motion controller
On, described coding orifice plate adjusts frame and grommet battle array plate motion controller is fixed on described chassis
On, described chassis is placed on described guide rail, and this chassis can be moved along the X-ray direction of propagation on guide rail
Dynamic, described grommet battle array plate motion controller is to have the grommet battle array plate described in drive vertically
In the translation of the X-ray direction of propagation or the mechanism of rotation, described radiation protective casing has X-ray window；
Along x-ray generator output the X-ray direction of propagation be successively same optical axis broadband beam-defining jaw,
Monochromator, narrow-band beam-defining jaw, coding orifice plate, grommet battle array plate and x light window；
Described grommet battle array plate is the three dimensional structure using high Z metal material to make, and has a large amount of
The cylinder hole of random distribution, its aperture dKong ZhenSpan be 0.01～1 micron, its thickness of slab hKong Zhen
Determined by X-ray wavelength and metal material, meet following relationship:
N=1,2,3 ...
In formula, λ is X-ray wavelength, and δ is the metal material refractive index of air refraction and grommet battle array plate
Difference；
The described coding orifice plate multiple holes by centre bore with around centre bore symmetric arrays are constituted, often
The aperture d of individual single holeNotchMeet following relationship:
dKong Zhen<dNotch≤ W, wherein
In formula, dKong ZhenFor the aperture of the single hole of grommet battle array plate, W is the X that described x-ray generator produces
Light is in the relevant size of coding orifice plate, and λ is X-ray wavelength, DSFor described x-ray generator
Outlet size, L is the distance exporting to described coding orifice plate of x-ray generator, encodes orifice plate
On span ΔNotchMeet following relationship:
In formula, z is described grommet battle array plate to the distance between Imaged samples.
The coding of described coding orifice plate includes three steps:
1) notch single hole aperture dNotchChoose: according to the requirement of resolution R of object to be detected,
The aperture d of the single hole choosing coding orifice plate is calculated by following relationshipNotch:
Wherein
D in formulaSingle speckleSingle speckle measure for sample；
2) notch template die plate is chosen: notch template die plate is the through hole of K × K arrangement, and wherein K can
Take 1,3,5,7 ..., and meet relational expression:
In formula, ΔMinimaFor sample object size to be detected ΔSample, i.e. the minima of sample characteristic physical dimension,
The matrix P of the notch template die plate K row K row of K × K represents, the through hole of the i-th row jth row
The element of the i-th row jth row of corresponding P matrix；
3) coding orifice plate coding: sample characteristic physical dimension ΔSampleCorresponding frequency information position is institute
The annulus of the coding orifice plate distance center position radius r stated, meets relational expression:
Choose the hole intersected with this annulus on the notch template die plate loophole as coding orifice plate, be this
Sample characteristic physical dimension ΔSampleCorresponding coding orifice plate, to detect sample characteristic physical dimension ΔSample
Corresponding frequency information；In matrix P, loophole being designated as 1, remaining is designated as 0, i.e. completes sample
Feature structural dimension parameter ΔSampleCorresponding coding orifice plate coding；Determine different sample characteristic structure chi successively
Very little ΔSampleI coding orifice plate loophole that () is corresponding, obtains the coding of the different coding orifice plate of correspondence
P(i)；Coding orifice plate needed for detecting while two or more sample characteristic physical dimension
Coding P is obtained, i.e. by the union operation of each self-corresponding coding P (i)
P=P (1) ∪ P (2) ∪ P (3) ....
Described x-ray generator is synchrotron radiation X optical generator, X-ray tube or plasma X-ray
Generator.
The hot X-ray of broadband that described x-ray generator produces, through free-space propagation, passes at X-ray
Entering monochromator after limit bundle at the broadband beam-defining jaw of defeated modulating system, monochromator becomes after filtering
Narrow-band X-ray, by outgoing after narrow-band beam-defining jaw limit bundle.Described X-ray transmission modulating system
The narrow-band X-ray produced, penetrating metal hole battle array after the coding orifice plate that counterfeit hot X-ray produces system
Plate, forms X-ray speckle at grommet battle array plate rear diffraction.
Described counterfeit hot X-ray produces the grommet battle array plate motion controller of system, controls grommet battle array
Plate translates in the direction being perpendicular to light path or rotates, thus obtains dynamic X-ray speckle, through X-ray
Being the counterfeit hot light field of X-ray after exit window outgoing, its coherence time is by the translation of grommet battle array plate or rotation
Turn and determine interval time.
The present invention compared with at the first counterfeit thermal light source of technology, the advantage mainly having following several respects:
1, X-ray wave band it is applicable to.The present invention is applicable to produce various conventional X-ray wavelength (< 100KeV)
The counterfeit thermal source of X-ray, overcome the X-ray office without similar visible light wave range laser instrument practicality coherent source
Limit so that X-ray counterfeit thermal source meets the response time of existing detector coherence time, it is achieved that X-ray
The true record of hot fluctuation of optical field intensity, this is the highly important advantage of the present invention, can be used for X-ray intensity
Relevance imaging, and part is only applicable to visual intensity relevance imaging in first technology.
2, high-contrast.The present invention can obtain the counterfeit hot speckle field of X-ray that contrast is 1 in theory,
Far above the X-ray speckle contrast (0.05) obtained in first technology.On the one hand, have due to X-ray
High-penetrability, when first technology uses low Z (Z is atomic number) thin film to produce speckle, 90% with
On the equal transmission of incident illumination become noise back end, speckle contrast is only 0.05, to intensity correlation become
Picture element amount has considerable influence, the present invention to use high Z grommet battle array plate to eliminate the impact of transmission light back end,
Thus improve speckle contrast.On the other hand, laser is completely coherent light, and for synchrotron radiation
For X-ray, X-ray tube, plasma X-ray, the spatial coherence of X-ray derives from free space and passes
Broadcast, be partially coherent light, speckle broadening can be caused in imaging process to obscure, along with image-forming range
Increase, result even in speckle disappear, the present invention by coding orifice plate plate eliminate X-ray part
The impact that coherence causes, the aperture of coding orifice plate is less than relevant size, through the X of coding orifice plate
Light becomes the completely coherent light of similar laser, thus improves speckle contrast.
3, high-resolution.Imaging limiting resolution is determined by wavelength, and the wavelength of X-ray is much smaller than visible
Light, therefore the limiting resolution of X-ray imaging is far above visual light imaging.The present invention is utilized through compiling
The X-ray diffraction effect of code holes plate and grommet battle array plate obtains dynamic speckle field, and adopts in first technology
Laser irradiate clouded glass scattering effect obtain speckle, therefore, the present invention can obtain far in theory
Less than the speckle measure of visible ray speckle, so that utilizing X-ray to carry out high-resolution intensity correlation one-tenth
As being possibly realized.
4, high brightness.The present invention may utilize agitator (one of synchrotron radiation X optical generator), its
Center cone spectrum brightness is up to 1018Ph/s/0.1%BW, thus the highlighted of the counterfeit hot speckle field of X-ray can be provided
Degree.
5, controllable.The present invention produces the coding orifice plate of system by the regulation counterfeit hot X-ray of critical component
Aperture achieve the counterfeit thermal source of X-ray speckle measure regulation and control；By regulating the translation of grommet battle array plate
Or the rotation steps time achieves speckle regulation and control coherence time of the counterfeit thermal source of X-ray.
Accompanying drawing explanation
Fig. 1 is the embodiment of the present invention counterfeit thermal source of high-contrast X-ray based on coding grommet battle array plate
Structural representation, in figure:
1-X optical generator, 2-X optical transport modulating system, 201-broadband beam-defining jaw, 202
-monochromator, 203-narrow-band beam-defining jaw, the counterfeit hot X-ray of 3-produces system, 301-notch
Plate, 302-coding orifice plate adjusts frame, 303-grommet battle array plate, the motion control of 304-grommet battle array plate
Device processed, 305-chassis, 306-guide rail, 4-radiation protective casing, 401-X light exit window.
Fig. 2 is the coding orifice plate schematic diagram of the counterfeit hot X-ray generation system of the embodiment of the present invention, is used for examining
Feature structure (0.5,0.3,0.2 micron bubble) in test sample product, in figure, black hole is loophole,
In figure, circular dashed line represents bubble respective frequencies information position.
Fig. 2 (1) 0.5 micron bubble image checking coding orifice plate, Fig. 2 (2) 0.3 micron bubble
Image checking coding orifice plate, Fig. 2 (3) 0.2 micron bubble image checking coding orifice plate, Fig. 2 (4)
0.5 micron and 0.3 micron bubble image checking coding orifice plate.
Fig. 3 is the grommet battle array plate of the random distribution of the counterfeit hot X-ray generation system of the embodiment of the present invention
Partial cutaway schematic.
Detailed description of the invention
The present invention counterfeit thermal source of high-contrast X-ray based on coding grommet battle array plate, including: X-ray is sent out
Raw device 1, X-ray transmission modulating system 2, counterfeit hot X-ray produces system 3, radiation protective casing 4 and outer
X-ray exit window 401 on shell.Wherein, X-ray transmission modulating system 2 is by broadband beam-defining jaw
201, monochromator 202, narrow-band beam-defining jaw 203 is coaxially constituted, and counterfeit hot X-ray produces system 3
By encoding orifice plate 301 and adjusting frame 302, grommet battle array plate 303 and motion controller 304 thereof,
Chassis 305, guide rail 306 are constituted.The hot X-ray produced by x-ray generator 1 passes through free space
Broadcast, arrive first at X-ray transmission modulating system 2, at broadband beam-defining jaw 201 by limit Shu Houjin
Enter monochromator 202, after monochromator 202 filters, become the hot X-ray of narrow-band, irradiation to counterfeit hot X
Light produces system 3, sequentially passes through the coding orifice plate 301 and grommet battle array being fixed on chassis 305
Plate 303, under the control of grommet battle array plate motion controller 304, at described grommet battle array plate
303 rears form dynamic X-ray speckle, by X-ray exit window 401 outgoing on radiation protective casing 4,
Form the counterfeit hot light field of X-ray.
The feature of the present embodiment is as follows:
1) x-ray generator 1, broadband beam-defining jaw 201, monochromator 202, narrow-band limit Shu Guang
Door screen 203, coding orifice plate 301, grommet battle array plate 303 and X-ray exit window 401 are coaxial.
2) x-ray generator 1 produces the hot X-ray of 12keV, and counterfeit hot X-ray produces the metal of system 3
The three dimensional structure that hole battle array plate 303 is made for Au material, has the cylinder hole of a large amount of random distribution, its
Aperture dKong ZhenTake 1 micron, its hole depth hKong ZhenIt it is 10 microns.
3) spot size of x-ray generator 1 is 10 microns, and the hot spot of x-ray generator 1 is to metal
The distance of hole battle array plate 303 is adjusted to 1 meter by guide rail 306, then the phase at grommet battle array plate 303
Dry a size of 10 microns.Therefore, counterfeit hot X-ray produces the aperture d encoding orifice plate 301 of system 3Notch
Can be taken as 1～10 micron, span ΔNotchIt it is 30 microns.
The hot X-ray produced by x-ray generator 1 is through free-space propagation, at broadband beam-defining jaw
201 restrainted by limit after enter monochromator 202, through monochromator filter after become narrow-band hot X-ray outgoing,
The hot X-ray of narrow-band, in counterfeit hot X-ray produces system 3, sequentially passes through described coding orifice plate 301
With grommet battle array plate 303, form X-ray speckle at grommet battle array plate 303 rear diffraction.
Under the control of grommet battle array plate motion controller 304, grommet battle array plate 303 is being perpendicular to
The direction translation of light path or rotation, its translation or rotational time are spaced apart 1ms, thus obtain relevant
Time is the dynamic X-ray speckle of 1ms, becomes the counterfeit hot light of X-ray after X-ray exit window 401 outgoing
?.
With in sample 0.5 micron, 0.3 micron, 0.2 micron bubble image checking is (in grommet battle array
Detect at plate 303 rear 20cm, resolution 0.25 micron-1As a example by), coding orifice plate 301 encodes
It is described as follows:
Resolution is 0.25 micron-1, then dSingle speckle=4 microns, d can be chosenNotch=5 microns, now
ΔNotch=30 microns, ΔMinimaBe 0.2 micron, then K >=6.6,7 × 7 coding templets can be chosen.
The annulus that frequency information position is distance center 40 microns that 0.5 micron bubble is corresponding at 20cm,
Then shown in coding orifice plate such as Fig. 2 (1).The frequency information position that 0.3 micron bubble is corresponding at 20cm
It is set to the annulus of distance center 67 microns, then shown in coding orifice plate such as Fig. 2 (2).0.2 micron of gas
The annulus that frequency information position is distance center 100 microns that bubble is corresponding at 20cm, then notch
Shown in plate such as Fig. 2 (3).
7 × 7 coding templets can represent with the matrix P of 7 row 7 row, the volume of the i-th row jth row
The element of the i-th row jth row of code holes correspondence P matrix, the loophole of coding orifice plate is designated as 1, its
More than be designated as 0.Therefore, under 7 × 7 coding modes, 0.5,0.3,0.2 micron bubble in sample
The coding of image checking required coding orifice plate is respectively as follows:
To obtain 0.5 micron and 0.3 micron bubble information simultaneously, corresponding coding orifice plate coding
Can be obtained, i.e. by the union operation of P (1) and P (2)
So, shown in corresponding coding orifice plate such as Fig. 2 (4).Detection 0.3 micron and 0.2 micron simultaneously
The coding orifice plate coding of bubble, and the coding orifice plate coding that three kinds of bubbles detect simultaneously all can be accordingly
Analogize and obtain.
The X-ray counterfeit thermal source structure as above of the present invention, functionally can be divided into three parts.
Part I includes x-ray generator 1 and X-ray transmission modulating system 2, for obtaining required height
Brightness narrow-band X-ray.Part II is that counterfeit hot X-ray produces system 3, is to high brightness narrow-band X
Light regulates and controls, thus obtains high-contrast dynamic X-ray speckle field based on coding grommet battle array plate.
Part III is radiation protective casing 4, is used for preventing X-ray from producing radiation leakage.
In sum, the present invention counterfeit thermal source of high-contrast X-ray based on coding grommet battle array plate, tool
Have X-ray wave band to be suitable for, high-contrast, high-resolution, high brightness and regulatable feature.
Claims (3)
1. the counterfeit thermal source of high-contrast X-ray based on coding grommet battle array plate, it is characterised by that it constitutes the x-ray generator (1) including being placed in radiation protective casing (4), X-ray transmission modulating system (2) and counterfeit hot X-ray produce system (3), described X-ray transmission modulating system (2) is by broadband beam-defining jaw (201), monochromator (202) and narrow-band beam-defining jaw (203) are constituted, described counterfeit hot X-ray produces system (3) and by coding orifice plate (301) and adjusts frame (302), grommet battle array plate (303) and motion controller (304) thereof, chassis (305) and guide rail (306) are constituted；Described coding orifice plate (301) is fixed on coding orifice plate and adjusts on frame (302), described grommet battle array plate (303) is fixed in described grommet battle array plate motion controller (304), described coding orifice plate adjusts frame (302) and grommet battle array plate motion controller (304) is fixed on described chassis (305), described chassis (305) is placed on described guide rail (306), this chassis (305) can be moved along the X-ray direction of propagation on guide rail (306), described grommet battle array plate motion controller (304) is being perpendicular to the translation of the X-ray direction of propagation or the mechanism rotated for having grommet battle array plate (303) described in drive, on described radiation protective casing (4), there is X-ray exit window (401)；
It is the broadband beam-defining jaw (201) of same optical axis, monochromator (202), narrow-band beam-defining jaw (203), coding orifice plate (301), grommet battle array plate (303) and X-ray exit window (401) successively along the X-ray direction of propagation that x-ray generator (1) exports；
Described grommet battle array plate (303) is the three dimensional structure using high Z metal material to make, and has the cylinder hole of a large amount of random distribution, its aperture dKong ZhenSpan be 0.01～1 micron, its thickness of slab hKong ZhenDetermined by X-ray wavelength and metal material, meet following relationship:
In formula, λ is X-ray wavelength, and δ is the metal material specific refractivity of air refraction and grommet battle array plate；
The described coding orifice plate (301) multiple holes by centre bore with around centre bore symmetric arrays are constituted, the aperture d of each single holeNotchMeet following relationship:
dKong Zhen＜ dNotch≤ W, wherein
In formula, dKong ZhenFor the aperture of the single hole of grommet battle array plate (303), the X-ray that the x-ray generator (1) that W is described produces is in the relevant size at coding orifice plate (301) place, and λ is X-ray wavelength, DSFor the outlet size of described x-ray generator (1), L is the distance exporting to described coding orifice plate (301) of x-ray generator (1), the span Δ on coding orifice plate (301)NotchMeet following relationship:
In formula, z is described grommet battle array plate (303) to the distance between sample.
The counterfeit thermal source of high-contrast X-ray based on coding grommet battle array plate the most according to claim 1, it is characterised in that the coding of described coding orifice plate (301) includes three steps:
1) notch single hole aperture dNotchChoose: according to the requirement of resolution R of object to be detected, calculate the aperture d of the single hole choosing coding orifice plate by following relationshipNotch:
Wherein
D in formulaSingle speckleSingle speckle measure for sample；
2) notch template die plate is chosen: notch template die plate is the through hole of K × K arrangement, wherein K desirable 1, and 3,5,7 ..., and meet relational expression:
In formula, ΔMinimaFor sample object size to be detected ΔSample, i.e. the minima of sample characteristic physical dimension, the matrix P of the notch template die plate K row K row of K × K represents, the element of the i-th row jth row of the through hole homography P of the i-th row jth row；
3) coding orifice plate coding: sample characteristic physical dimension ΔSampleThe corresponding annulus that frequency information position is described coding orifice plate (301) place distance center position radius r, meets relational expression:
Choose the hole intersected with this annulus on the notch template die plate loophole as coding orifice plate, be this sample characteristic physical dimension ΔSampleCorresponding coding orifice plate, to detect sample characteristic physical dimension ΔSampleCorresponding frequency information；In matrix P, loophole being designated as 1, remaining is designated as 0, i.e. completes sample characteristic physical dimension ΔSampleCorresponding coding orifice plate coding；Determine different sample characteristic physical dimension Δ successivelySampleThe loophole of corresponding coding orifice plate, obtains the coding of the coding orifice plate of correspondence, i.e. matrix P, and remember n sample coding orifice plate be encoded to Q (n)；The coding Q of the coding orifice plate needed for detecting while two or more sample characteristic physical dimensionmoreObtained by the union operation of each self-corresponding coding Q (n), Qmore=Q (1) ∪ Q (2) ∪ Q (3) ..., Q (n) is the coding of the coding orifice plate of n sample, and the matrix element of its i-th row jth row is Q (n) [i, j], then Qmore[i, j]=Q (n) [i, j] ∪ Q (m) [i, j], if being 1 any one of Q (n) [i, j] and Q (m) [i, j], then Qmore[i, j]=1, otherwise Qmore[i, j]=0, wherein Q (m) is the coding encoding orifice plate of m kind sample.
The counterfeit thermal source of high-contrast X-ray based on coding grommet battle array plate the most according to claim 1, it is characterised in that described x-ray generator (1) is synchrotron radiation X optical generator, X-ray tube or plasma x-ray generator.
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| CN108693203A (en) * | 2018-03-30 | 2018-10-23 | 中国科学院上海应用物理研究所 | X-ray Speckle measurement device and method based on synchrotron radiation light source |
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| CN100514011C (en) * | 2007-01-30 | 2009-07-15 | 中国科学院上海光学精密机械研究所 | High-brightness pulse type pseudo-thermal light source |
| CN102325421B (en) * | 2011-05-18 | 2013-08-14 | 中国科学院上海光学精密机械研究所 | Adjustable X-ray pseudo-thermal light source based on microporous film |
| CN102353689B (en) * | 2011-06-03 | 2013-05-08 | 中国科学院上海光学精密机械研究所 | Incoherent X-ray Diffraction Imaging Device |
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