CN111896475A - A photoacoustic cell with extended optical path for photoacoustic spectroscopy trace gas detection - Google Patents

A photoacoustic cell with extended optical path for photoacoustic spectroscopy trace gas detection Download PDF

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CN111896475A
CN111896475A CN202010742006.1A CN202010742006A CN111896475A CN 111896475 A CN111896475 A CN 111896475A CN 202010742006 A CN202010742006 A CN 202010742006A CN 111896475 A CN111896475 A CN 111896475A
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plane
frame
mirror
photoacoustic
concave
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王巧云
张楚
单鹏
李志刚
马振鹤
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Northeastern University Qinhuangdao
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    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
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    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G01N2021/1704—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in gases

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Abstract

一种用于光声光谱微量气体检测的光路增程式光声池，包括框架、凹面反射镜、平面反射镜及麦克风；框架内由左至右依次设有第一光学窗口、第一缓冲腔、圆柱形谐振腔、第二缓冲腔及第二光学窗口；第一缓冲腔顶部的框架上设有进气口；第二缓冲腔顶部的框架上设有出气口；凹面反射镜设在第一光学窗口内，凹面反射镜的反射凹面朝向框架内侧，凹面反射镜的镜体上设有激光入射口；平面反射镜设在第二光学窗口内，平面反射镜的反射平面朝向框架内侧；圆柱形谐振腔中间处顶部的框架上设有麦克风安装槽，麦克风位于麦克风安装槽内；平面反射镜的反射平面上设有至少为一个辅助反射凹面，平面反射镜半径设为R，辅助反射凹面的半径设为r，R＝(4.5～5)r。

Figure 202010742006

An optical path extension photoacoustic cell for detecting trace gases in photoacoustic spectrum, comprising a frame, a concave reflector, a plane reflector and a microphone; a first optical window, a first buffer cavity, a first optical window, a first buffer cavity, a first optical window, a first buffer cavity, a A cylindrical resonant cavity, a second buffer cavity and a second optical window; the frame on the top of the first buffer cavity is provided with an air inlet; the frame on the top of the second buffer cavity is provided with an air outlet; the concave mirror is arranged on the first optical window In the window, the reflective concave surface of the concave mirror faces the inside of the frame, and the mirror body of the concave mirror is provided with a laser entrance; the plane mirror is arranged in the second optical window, and the reflection plane of the plane mirror faces the inside of the frame; the cylindrical resonance There is a microphone installation groove on the top frame in the middle of the cavity, and the microphone is located in the microphone installation groove; at least one auxiliary reflection concave surface is arranged on the reflection plane of the plane reflector, the radius of the plane reflector is set to R, and the radius of the auxiliary reflection concave surface is set to is r, R=(4.5～5)r.

Figure 202010742006

Description

一种用于光声光谱微量气体检测的光路增程式光声池A photoacoustic cell with extended optical path for photoacoustic spectroscopy trace gas detection

技术领域technical field

本发明属于光声光谱微量气体检测技术领域，特别是涉及一种用于光声光谱微量气体检测的光路增程式光声池。The invention belongs to the technical field of photoacoustic spectrum trace gas detection, in particular to an optical path extension photoacoustic cell used for photoacoustic spectrum trace gas detection.

背景技术Background technique

光声光谱微量气体检测技术是基于光热效应的一种高灵敏、低背景、动态范围宽、以及检测过程中对样品无损耗等特点的一种高灵敏气体探测技术，目前已广泛应用于煤矿开采、化工行业、环境检测、生物医疗等领域。Photoacoustic spectroscopy trace gas detection technology is a highly sensitive gas detection technology based on photothermal effect, low background, wide dynamic range, and no sample loss during detection. It has been widely used in coal mining. , chemical industry, environmental testing, biomedical and other fields.

光声池是光声光谱微量气体检测技术的关键零部件，光声信号的检测灵敏度与光声池性能密不可分，传统的光声池想要进一步提升检测灵敏度越发困难。The photoacoustic cell is a key component of the photoacoustic spectroscopy trace gas detection technology. The detection sensitivity of the photoacoustic signal is inseparable from the performance of the photoacoustic cell. It is more difficult for the traditional photoacoustic cell to further improve the detection sensitivity.

发明内容SUMMARY OF THE INVENTION

针对现有技术存在的问题，本发明提供一种用于光声光谱微量气体检测的光路增程式光声池，能够在传统的光声池基本构型基础上有效增加激光的反射次数，进而实现光程量的增加，最终通过增加光程量来实现检测灵敏度的进一步提升。In view of the problems existing in the prior art, the present invention provides an optical path-extended photoacoustic cell for the detection of trace gases in photoacoustic spectroscopy, which can effectively increase the number of laser reflections on the basis of the basic configuration of the traditional photoacoustic cell, thereby realizing The increase in the optical path length can finally achieve a further improvement in detection sensitivity by increasing the optical path length.

为了实现上述目的，本发明采用如下技术方案：一种用于光声光谱微量气体检测的光路增程式光声池，包括框架、凹面反射镜、平面反射镜及麦克风；在所述框架内由左至右依次设有第一光学窗口、第一缓冲腔、圆柱形谐振腔、第二缓冲腔及第二光学窗口；所述第一缓冲腔顶部的框架上开设有进气口；所述第二缓冲腔顶部的框架上开设有出气口；所述凹面反射镜安装在第一光学窗口内，凹面反射镜的反射凹面朝向框架内侧，在凹面反射镜的镜体上开设有激光入射口；所述平面反射镜安装在第二光学窗口内，平面反射镜的反射平面朝向框架内侧；在所述圆柱形谐振腔中间处顶部的框架上开设有麦克风安装槽，所述麦克风位于麦克风安装槽内；在所述平面反射镜的反射平面上设有辅助反射凹面。In order to achieve the above purpose, the present invention adopts the following technical scheme: a photoacoustic cell with extended optical path for detecting trace gas in photoacoustic spectrum, comprising a frame, a concave reflector, a plane reflector and a microphone; A first optical window, a first buffer cavity, a cylindrical resonant cavity, a second buffer cavity and a second optical window are arranged in sequence from the right; an air inlet is provided on the frame on the top of the first buffer cavity; the second The frame on the top of the buffer cavity is provided with an air outlet; the concave mirror is installed in the first optical window, the reflection concave surface of the concave mirror faces the inside of the frame, and the mirror body of the concave mirror is provided with a laser entrance; the The plane mirror is installed in the second optical window, and the reflection plane of the plane mirror faces the inner side of the frame; a microphone installation groove is opened on the frame at the top of the middle of the cylindrical resonant cavity, and the microphone is located in the microphone installation groove; An auxiliary reflection concave surface is arranged on the reflection plane of the plane reflection mirror.

所述辅助反射凹面的数量至少为一个。The number of the auxiliary reflection concave surfaces is at least one.

所述平面反射镜的半径设为R，所述辅助反射凹面的半径设为r，且R＝(4.5～5)r。The radius of the plane mirror is set as R, the radius of the auxiliary reflection concave surface is set as r, and R=(4.5˜5)r.

本发明的有益效果：Beneficial effects of the present invention:

本发明的用于光声光谱微量气体检测的光路增程式光声池，能够在传统的光声池基本构型基础上有效增加激光的反射次数，进而实现光程量的增加，最终通过增加光程量来实现检测灵敏度的进一步提升。The optical path-extended photoacoustic cell for the detection of trace gases in photoacoustic spectrum of the present invention can effectively increase the number of reflections of the laser on the basis of the basic configuration of the traditional photoacoustic cell, thereby realizing the increase of the optical path, and finally by increasing the optical path. range to further improve the detection sensitivity.

附图说明Description of drawings

图1为本发明的一种用于光声光谱微量气体检测的光路增程式光声池的结构示意图；Fig. 1 is the structural representation of a kind of optical path extension photoacoustic cell for photoacoustic spectrum trace gas detection of the present invention;

图2为实施例中凹面反射镜的光斑图；2 is a spot diagram of a concave mirror in an embodiment;

图3为实施例中设有辅助反射凹面的平面反射镜的光斑图；3 is a spot diagram of a flat reflector provided with an auxiliary reflecting concave surface in an embodiment;

图中，1—框架，2—凹面反射镜，3—平面反射镜，4—麦克风，5—第一光学窗口，6—第一缓冲腔，7—圆柱形谐振腔，8—第二缓冲腔，9—第二光学窗口，10—进气口，11—出气口，12—激光入射口，13—麦克风安装槽，14—辅助反射凹面。In the figure, 1-frame, 2-concave mirror, 3-plane mirror, 4-microphone, 5-first optical window, 6-first buffer cavity, 7-cylindrical resonant cavity, 8-second buffer cavity , 9—the second optical window, 10—the air inlet, 11—the air outlet, 12—the laser entrance, 13—the microphone installation slot, and 14—the auxiliary reflection concave surface.

具体实施方式Detailed ways

下面结合附图和具体实施例对本发明做进一步的详细说明。The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

如图1所示，一种用于光声光谱微量气体检测的光路增程式光声池，包括框架1、凹面反射镜2、平面反射镜3及麦克风4；在所述框架1内由左至右依次设有第一光学窗口5、第一缓冲腔6、圆柱形谐振腔7、第二缓冲腔8及第二光学窗口9；所述第一缓冲腔6顶部的框架1上开设有进气口10；所述第二缓冲腔8顶部的框架1上开设有出气口11；所述凹面反射镜2安装在第一光学窗口5内，凹面反射镜2的反射凹面朝向框架1内侧，在凹面反射镜2的镜体上开设有激光入射口12；所述平面反射镜3安装在第二光学窗口9内，平面反射镜3的反射平面朝向框架1内侧；在所述圆柱形谐振腔7中间处顶部的框架1上开设有麦克风安装槽13，所述麦克风4位于麦克风安装槽13内；在所述平面反射镜3的反射平面上设有辅助反射凹面14。As shown in Figure 1, a photoacoustic cell with extended optical path for photoacoustic spectrum trace gas detection includes a frame 1, a concave mirror 2, a flat mirror 3 and a microphone 4; in the frame 1 from left to The right side is provided with a first optical window 5, a first buffer cavity 6, a cylindrical resonant cavity 7, a second buffer cavity 8 and a second optical window 9; the frame 1 at the top of the first buffer cavity 6 is provided with an intake air Port 10; the frame 1 at the top of the second buffer cavity 8 is provided with an air outlet 11; the concave mirror 2 is installed in the first optical window 5, the reflection concave surface of the concave mirror 2 faces the inside of the frame 1, and the concave mirror 2 is located in the concave surface. The mirror body of the mirror 2 is provided with a laser entrance 12; the plane mirror 3 is installed in the second optical window 9, and the reflection plane of the plane mirror 3 faces the inside of the frame 1; in the middle of the cylindrical resonant cavity 7 A microphone mounting slot 13 is opened on the frame 1 at the top of the unit, and the microphone 4 is located in the microphone mounting slot 13 ; an auxiliary reflection concave surface 14 is provided on the reflection plane of the plane reflector 3 .

所述辅助反射凹面14的数量至少为一个。The number of the auxiliary reflection concave surfaces 14 is at least one.

所述平面反射镜3的半径设为R，所述辅助反射凹面14的半径设为r，且R＝(4.5～5)r。The radius of the plane mirror 3 is set as R, the radius of the auxiliary reflection concave surface 14 is set as r, and R=(4.5˜5)r.

下面结合附图说明本发明的一次使用过程：Describe one use process of the present invention below in conjunction with accompanying drawing:

本实施例中，凹面反射镜2的半径为7mm，凹面反射镜2的焦距为250mm，凹面反射镜2的曲率半径为500mm，激光入射口12的半径为1mm，以凹面反射镜2的圆心点为原点建立xyz三维坐标系，凹面反射镜2所在平面位于xyz三维坐标系的xy平面内，凹面反射镜2的中轴线作为xyz三维坐标系的z轴；激光入射口12的中心点在xyz三维坐标系内的坐标为(3，3，0)；凹面反射镜2与平面反射镜3的间距为200mm，即平面反射镜3的圆心点在xyz三维坐标系内的坐标为(0，0，200)；辅助反射凹面14的半径为1.5mm，辅助反射凹面14的焦距为10mm，辅助反射凹面14的曲率半径为20mm；辅助反射凹面14的数量为三个，三个辅助反射凹面14的圆心点在xyz三维坐标系内的坐标依次为(2，3，200)、(-1，-3，200)及(1，0，200)。In this embodiment, the radius of the concave reflecting mirror 2 is 7 mm, the focal length of the concave reflecting mirror 2 is 250 mm, the radius of curvature of the concave reflecting mirror 2 is 500 mm, and the radius of the laser entrance 12 is 1 mm. The xyz three-dimensional coordinate system is established for the origin, the plane where the concave mirror 2 is located is located in the xy plane of the xyz three-dimensional coordinate system, and the central axis of the concave mirror 2 is used as the z-axis of the xyz three-dimensional coordinate system; the center point of the laser entrance 12 is in the xyz three-dimensional coordinate system. The coordinates in the coordinate system are (3, 3, 0); the distance between the concave mirror 2 and the plane mirror 3 is 200mm, that is, the coordinates of the center point of the plane mirror 3 in the xyz three-dimensional coordinate system are (0, 0, 200); the radius of the auxiliary reflection concave surface 14 is 1.5mm, the focal length of the auxiliary reflection concave surface 14 is 10mm, and the curvature radius of the auxiliary reflection concave surface 14 is 20mm; The coordinates of the point in the xyz three-dimensional coordinate system are (2, 3, 200), (-1, -3, 200) and (1, 0, 200) in sequence.

待测气体由进气口10注入，并依次经由第一缓冲腔6、圆柱形谐振腔7及第二缓冲腔8，最后由出气口11排出。启动激光光源，以产生入射光，入射光的波长范围为380nm～2100nm，本实施例中，入射光的波长设定为1532.83nm，将设定好波长的入射光以一定斜率通过激光入射口12射向平面反射镜3，以使入射光在平面反射镜3与凹面反射镜2之间多次反射，每当反射光线进入辅助反射凹面14范围内时，可使光线的反射次数得到提升，最终可使光线在平面反射镜3与凹面反射镜2之间的反射次数得到提升。如图2所示，为凹面反射镜2的光斑图，如图3所示，为设有辅助反射凹面14的平面反射镜3的光斑图，通过两幅光斑图可以看出，光斑密集点十分明显，说明光斑密集点范围内的光线反射次数得到明显提升。The gas to be tested is injected from the air inlet 10 , passes through the first buffer cavity 6 , the cylindrical resonant cavity 7 and the second buffer cavity 8 in sequence, and is finally discharged from the air outlet 11 . Start the laser light source to generate incident light. The wavelength range of the incident light is 380nm to 2100nm. In this embodiment, the wavelength of the incident light is set to 1532.83nm, and the incident light with the set wavelength will pass through the laser entrance 12 with a certain slope. It is directed to the plane mirror 3, so that the incident light is reflected multiple times between the plane mirror 3 and the concave mirror 2. Whenever the reflected light enters the range of the auxiliary reflection concave surface 14, the number of reflections of the light can be improved, and finally The number of times of reflection of light between the plane reflecting mirror 3 and the concave reflecting mirror 2 can be improved. As shown in FIG. 2, it is the light spot diagram of the concave mirror 2. As shown in FIG. 3, it is the light spot diagram of the plane mirror 3 provided with the auxiliary reflecting concave surface 14. It can be seen from the two light spot diagrams that the light spots are very dense. Obviously, it shows that the number of light reflections in the range of dense spots of the light spot has been significantly improved.

实施例中的方案并非用以限制本发明的专利保护范围，凡未脱离本发明所为的等效实施或变更，均包含于本案的专利范围中。The solutions in the embodiments are not intended to limit the scope of the patent protection of the present invention, and all equivalent implementations or modifications that do not depart from the present invention are included in the scope of the patent of this case.

Claims (3)

1.一种用于光声光谱微量气体检测的光路增程式光声池，其特征在于：包括框架、凹面反射镜、平面反射镜及麦克风；在所述框架内由左至右依次设有第一光学窗口、第一缓冲腔、圆柱形谐振腔、第二缓冲腔及第二光学窗口；所述第一缓冲腔顶部的框架上开设有进气口；所述第二缓冲腔顶部的框架上开设有出气口；所述凹面反射镜安装在第一光学窗口内，凹面反射镜的反射凹面朝向框架内侧，在凹面反射镜的镜体上开设有激光入射口；所述平面反射镜安装在第二光学窗口内，平面反射镜的反射平面朝向框架内侧；在所述圆柱形谐振腔中间处顶部的框架上开设有麦克风安装槽，所述麦克风位于麦克风安装槽内；在所述平面反射镜的反射平面上设有辅助反射凹面。1. an optical path extension photoacoustic cell for photoacoustic spectrum trace gas detection, it is characterized in that: comprise frame, concave reflector, plane reflector and microphone; an optical window, a first buffer cavity, a cylindrical resonant cavity, a second buffer cavity and a second optical window; the frame on the top of the first buffer cavity is provided with an air inlet; the frame on the top of the second buffer cavity is provided with an air inlet; An air outlet is provided; the concave mirror is installed in the first optical window, the reflective concave surface of the concave mirror faces the inner side of the frame, and a laser entrance is opened on the mirror body of the concave mirror; the plane mirror is installed on the first optical window. In the two optical windows, the reflection plane of the plane mirror faces the inner side of the frame; a microphone installation slot is opened on the top frame at the middle of the cylindrical resonant cavity, and the microphone is located in the microphone installation slot; An auxiliary reflection concave surface is arranged on the reflection plane. 2.根据权利要求1所述的一种用于光声光谱微量气体检测的光路增程式光声池，其特征在于：所述辅助反射凹面的数量至少为一个。2 . The optical path-extended photoacoustic cell for photoacoustic spectroscopy trace gas detection according to claim 1 , wherein the number of the auxiliary reflecting concave surfaces is at least one. 3 . 3.根据权利要求1所述的一种用于光声光谱微量气体检测的光路增程式光声池，其特征在于：所述平面反射镜的半径设为R，所述辅助反射凹面的半径设为r，且R＝(4.5～5)r。3. The optical path extension photoacoustic cell for photoacoustic spectrum trace gas detection according to claim 1, characterized in that: the radius of the plane reflection mirror is set to R, and the radius of the auxiliary reflection concave surface is set to is r, and R=(4.5～5)r.
CN202010742006.1A 2020-07-29 2020-07-29 A photoacoustic cell with extended optical path for photoacoustic spectroscopy trace gas detection Pending CN111896475A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023168951A1 (en) * 2022-03-07 2023-09-14 汉威科技集团股份有限公司 Reflective optical system for long optical path gas absorption cell

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08191166A (en) * 1995-01-12 1996-07-23 Toshiba Corp Gas laser device
CN101950069A (en) * 2010-08-25 2011-01-19 中国科学院物理研究所 An optical path delay device
CN104931427A (en) * 2015-07-02 2015-09-23 中国科学院合肥物质科学研究院 Opto-acoustic gas detection device based on multiple reflections of optical path
CN205786277U (en) * 2016-04-28 2016-12-07 中钢集团武汉安全环保研究院有限公司 The laser gas detection platform of multiple reflections long light path high temp samples room
CN205826501U (en) * 2016-06-12 2016-12-21 力合科技（湖南）股份有限公司 For improving the device of stability of layout and being provided with the optical detection apparatus of this device
CN106483071A (en) * 2016-12-30 2017-03-08 郑州光力科技股份有限公司 A kind of gas detector and its absorption cell
CN108562546A (en) * 2018-04-10 2018-09-21 大连理工大学 A kind of detecting instrument and method of the miniaturization enhanced Laser Photoacoustic Spectroscopy of multiple reflections formula photoacoustic cell
CN109212733A (en) * 2017-07-04 2019-01-15 徐州旭海光电科技有限公司 A kind of light path folded device
CN209894680U (en) * 2019-04-22 2020-01-03 安徽理工大学 An Enhanced Photoacoustic Cell for Photoacoustic Spectroscopic Detection

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08191166A (en) * 1995-01-12 1996-07-23 Toshiba Corp Gas laser device
CN101950069A (en) * 2010-08-25 2011-01-19 中国科学院物理研究所 An optical path delay device
CN104931427A (en) * 2015-07-02 2015-09-23 中国科学院合肥物质科学研究院 Opto-acoustic gas detection device based on multiple reflections of optical path
CN205786277U (en) * 2016-04-28 2016-12-07 中钢集团武汉安全环保研究院有限公司 The laser gas detection platform of multiple reflections long light path high temp samples room
CN205826501U (en) * 2016-06-12 2016-12-21 力合科技（湖南）股份有限公司 For improving the device of stability of layout and being provided with the optical detection apparatus of this device
CN106483071A (en) * 2016-12-30 2017-03-08 郑州光力科技股份有限公司 A kind of gas detector and its absorption cell
CN109212733A (en) * 2017-07-04 2019-01-15 徐州旭海光电科技有限公司 A kind of light path folded device
CN109477953A (en) * 2017-07-04 2019-03-15 徐州旭海光电科技有限公司 Efficient optical path folding device
CN108562546A (en) * 2018-04-10 2018-09-21 大连理工大学 A kind of detecting instrument and method of the miniaturization enhanced Laser Photoacoustic Spectroscopy of multiple reflections formula photoacoustic cell
CN209894680U (en) * 2019-04-22 2020-01-03 安徽理工大学 An Enhanced Photoacoustic Cell for Photoacoustic Spectroscopic Detection

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023168951A1 (en) * 2022-03-07 2023-09-14 汉威科技集团股份有限公司 Reflective optical system for long optical path gas absorption cell

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