CN109211079B - Quantum tunneling and spherical scattering field composite principle sensing method and device - Google Patents
Quantum tunneling and spherical scattering field composite principle sensing method and device Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
Abstract
A sensing method and a device based on quantum tunneling and spherical scattered field composite principle belong to the precise sensing and measuring technology; the invention adopts quantum tunneling and spherical scattered field composite principle sensing to a conductor measured object, firstly, the relative distance between a composite principle measuring head and a measured object is adjusted to enter a working interval, then, the spherical scattered field principle is adopted to obtain a rough measurement result of an aiming gap, accordingly, the aiming gap between the measured object and a micro measuring ball is directly adjusted to the tunneling working interval, and then, the aiming gap is converted into a sensing signal through the generation of three-dimensional quantum tunneling effect; the invention also provides a composite principle sensing device; the invention effectively considers the characteristics of nanometer resolution, three-dimensional isotropy and non-contact sensing when measuring the measured object of the conductor, and can realize the high resolution measurement of the micro-nano/micro structure with large depth-to-width ratio.
Description
Technical Field
The invention belongs to the technical field of precision sensing and measurement, and mainly relates to a quantum tunneling and spherical scattering field composite principle sensing method and device.
Background
With the increasing level of current precision machining and manufacturing, micro-nano/micro structures with features of large aspect ratio are applied in the field of advanced technology, and sensing methods and sensing probes for precision measurement of the structures become hot spots of current research. The high resolution and aiming precision, three-dimensional isotropy and nondestructive rapid measurement capability are key factors for realizing high-precision measurement of the structure with the large aspect ratio. However, when the existing precision probe and sensing technical scheme is applied to the structure measurement with the feature of large depth-to-width ratio, it is difficult to realize the effective compromise and high precision measurement of nanometer-level high resolution, three-dimensional isotropy, large depth-to-width ratio measurement capability and nondestructive measurement characteristic.
At present, the existing precision measuring head and sensing technical scheme can be divided into three types according to the basic principle: namely, a micro-force contact measurement scheme, a scanning probe scheme, and a focused light probe scheme. The micro-force contact type measurement scheme is difficult to simultaneously obtain the matched in-plane and axial sensitive characteristics perpendicular to the measuring rod, the problems of measuring head attitude error and the like are prominent, real three-dimensional measurement is difficult to realize, and the nondestructive rapid measurement cannot be realized due to the poor dynamic characteristics of force measurement deformation and damage; the scanning probe and the focusing optical probe generally have only one-dimensional sensitivity characteristic, do not have the potential of realizing transverse high resolution, can only realize two-dimensional half-measurement at most by matching with motion scanning, and do not have real three-dimensional measurement capability. Therefore, for the measurement of the structure with a large aspect ratio, a sensing technical scheme with a nanoscale resolution, a real three-dimensional, large aspect ratio measurement capability and a non-contact measurement characteristic is urgently needed.
Aiming at the problem, Harbin Industrial university proposes a sensing measurement method based on the principle of spherical scattering electric field (1.ultra precision 3D binding system based on a spherical capacitive plate. sensors and Actuators A: Physical, 2010; 2. ultra-precise non-contact three-dimensional aiming and measuring sensor based on a spherical capacitive plate, Chinese patent No. ZL 200910072143.2). The technical scheme of the sensing is characterized in that: (1) the principle of a spherical scattering electric field is applied to the metal measuring ball for the first time, so that the metal measuring ball is used as a spherical capacitance plate to realize non-contact measurement, and the measuring head has the capability of quick measurement without damage; (2) the sensing characteristic of the technical scheme is closely related to the diameter of the metal measuring ball, and the sensing resolution is reduced along with the reduction of the diameter of the metal measuring ball; the minimum measuring ball diameter realized by engineering at present is 500 mu m, and the micro-nano-scale large depth-to-width ratio structure cannot be measured at present.
Chongqing university proposes a nano displacement sensor scheme based on tunnel effect (a contact nano displacement sensor based on tunnel effect, Chinese patent No. ZL 201010101154.1). The technical characteristics of the scheme are as follows: (1) the scheme is a micro-force contact type measuring scheme, a measuring head contacts a measured object in the measuring process, vertical height change of the surface of a surface to be measured is transmitted to the distance between a probe and a graphite block through a guide rod, the distance between the probe and the graphite block is used as a sensitive unit for sensing by utilizing a one-dimensional tunnel effect principle, and vertical nano-scale high resolution can be realized; (2) the sensing technical scheme adopts the probe, only has vertical high-resolution measurement capability and basically does not have horizontal measurement capability, namely only has vertical one-dimensional measurement capability but not three-dimensional measurement capability, so that the dimensional parameters and horizontal geometric parameters of the micro structure with the large depth-to-width ratio cannot be measured; (3) because the probe and the tested piece need to be contacted to generate a tunnel effect between the probe and the graphite block, and the risk of scratching the surface to be tested and the probe exists, the contact type sensing technical scheme has poor dynamic characteristics and is difficult to realize quick nondestructive measurement; (4) as with all contact probes, increasing the length of the measuring rod inevitably introduces errors into its deformation of the measuring force, resulting in a loss of accuracy.
A scholars of the university of Irlangen-New England, Germany, proposed a sensing measurement scheme based on the Schottky radiation effect (1.Schottky emission effect in surface topography: Method and application. International Journal of nanomanizing, 2011; electric coupling for dimensional micro-metrology. CIRP Journal of Manufacturing science and Technology, 2008). The technical scheme of the sensing is characterized in that: (1) the scheme adopts the Schottky radiation effect as a sensing principle and is a non-contact sensing principle, and theoretically, nondestructive rapid measurement can be realized; (2) the research literature is a principle preliminary exploration, the measuring head is formed by directly welding a solid metal rod and a metal ball, a complete and specific technical solution is not provided for the measurement of the structure with the large depth-to-width ratio, a technical scheme of a mechanical structure, signal transmission, interference shielding and the like of the measuring head is not provided, and the actual engineering measurement of the structure with the large depth-to-width ratio cannot be realized.
In conclusion, through innovations of the sensing measurement method and the sensing measurement device, a sensing technical scheme which effectively considers the nano-scale high resolution, the three-dimensional isotropy, the large depth-to-width ratio measurement capability and the nondestructive rapid measurement capability of sensing is provided, and the method has great significance for the precise measurement of the micro-nano/micro structure with the large depth-to-width ratio.
Disclosure of Invention
The invention aims to solve the problems existing in the precision measurement of the micro-nano/micro structure with the large depth-to-width ratio in the prior art, and provides a quantum tunneling and spherical scattering field composite principle sensing method and device so as to effectively realize the effective consideration of the sensing nano-grade resolution, the three-dimensional isotropic characteristic, the large depth-to-width ratio and the nondestructive quick measurement capability.
The technical solution of the invention is as follows:
a quantum tunneling and spherical scattered field composite principle sensing method comprises the following steps:
firstly, a measuring head posture adjusting mechanism is adopted to adjust the posture of the composite principle measuring head relative to a measured piece, so that the composite principle measuring head enters an aiming posture; then the measuring driving mechanism is used for driving the composite principle measuring head or the measured piece, and the measuring driving mechanism stops driving after the relative distance between the measuring driving mechanism and the measured piece enters a working interval;
firstly, a spherical scattered field sensing principle is used for sensing to obtain a rough measurement result of the alignment clearance between the measured piece and the micro measuring ball, a measurement driving mechanism is controlled according to the rough measurement result to enable the alignment clearance between the micro measuring ball and the measured piece to directly enter a working interval of a quantum tunneling principle, then, the quantum tunneling sensing principle is used for sensing, a bias electric field generating system is used for generating bias voltage to be loaded between the micro measuring ball and the measured piece to form a bias electric field, then, the three-dimensional quantum tunneling effect is generated between the micro measuring ball and the measured piece through adjustment and control of the bias electric field, and the alignment clearance between the micro measuring ball and the measured piece is converted into a sensing signal;
and thirdly, detecting and processing the sensing signals in the second step by adopting a composite principle signal detection system, and extracting the aiming gap information between the micro-measuring ball and the measured piece by using nano resolution according to a model of the corresponding relation between the aiming gap and the sensing signals so as to realize three-dimensional and nano resolution sensing and measurement.
A quantum tunneling and spherical scattering field composite principle sensing device comprises a composite principle measuring head, a composite principle signal processing system, a measuring head posture adjusting mechanism, an anti-collision safety protection mechanism and a measurement driving mechanism, wherein the composite principle measuring head comprises a micro measuring ball, a signal transmission mechanism, a shielding mechanism, a card installing mechanism, a signal connector, an insulating part and a signal line; the composite principle signal processing system consists of a bias electric field generating system, a composite principle signal detecting system, a current limiting unit, a communication cable and an instrument main control computer, wherein the bias electric field generating system and the composite principle signal detecting system are respectively connected with the instrument main control computer through the communication cable; the signal connector, the current limiting unit, the composite principle signal detection system, the bias electric field generation system and the detected piece of the composite principle measuring head are sequentially connected in series through a signal transmission cable to form a sensing signal detection loop; the composite principle measuring head is assembled on the measuring head posture adjusting mechanism, the measuring head posture adjusting mechanism is fixedly assembled with the anti-collision safety protection mechanism, and the measuring driving mechanism is installed on the anti-collision safety protection mechanism or a measured piece.
The technical innovation and the generated good technical effects of the invention are as follows:
(1) the method realizes precise sensing by the quantum tunneling principle and the composition of a spherical scattering electric field, simultaneously realizes the nanometer resolution and the non-contact measurement capability, and can still ensure the unchanged sensing characteristic of the nanometer resolution when the diameter of the micro-measuring ball is as small as 1 mu m, thereby obviously reducing the minimum measurable size; the nondestructive rapid measurement can be realized by adopting a non-contact measurement mode, the friction, the abrasion and the damage to a piece to be measured are avoided, and the problem that the measurement accuracy and the measurable depth-to-width ratio are restricted by the deformation of the measurement force is avoided; in addition, the composite sensing of two non-contact principles can obviously reduce the time for the measurement driving mechanism to precisely adjust the aiming clearance between the micro measuring ball and the measured piece and enable the aiming clearance to enter a tunneling working interval, can effectively give consideration to high resolution and high efficiency, and ensures the dynamic characteristic of the measuring head;
(2) the sensing technical scheme can realize three-dimensional isotropic characteristic sensing, thereby having three-dimensional measurement capability, not only measuring the shape/morphology characteristics of a micro-nano/micro structure with a large depth-to-width ratio, but also measuring the geometric parameters of vertical depth, transverse dimension and space coordinate, and having the characteristics of isotropy, three-dimensional sub-nano resolution and precision;
(3) aiming at a conductor measured piece, the technical scheme can realize the characteristic of three-dimensional isotropy by adopting a three-dimensional quantum tunneling principle, a spherical scattering field principle and a micrometering sphere structure, thereby solving the problem that the precision is reduced along with the increase of the depth-to-width ratio when the large depth-to-width ratio micro-nano/micro structure of a conductor material is measured by the existing sensing technical scheme, and improving the maximum measurable depth-to-width ratio.
The invention can effectively give consideration to the measurement capability of nanometer resolution, three-dimensional isotropy and large depth-to-width ratio, and provides an effective sensing measurement method and device for the precise measurement of the micro-nano/micro structure with the large depth-to-width ratio.
Drawings
FIG. 1 is a schematic structural diagram of a quantum tunneling and spherical scattered field composite principle sensing device with a measurement driving mechanism installed on an anti-collision safety protection mechanism;
FIG. 2 is a schematic structural diagram of a quantum tunneling and spherical scattered field composite principle sensing device with a measurement driving mechanism installed on a measured piece;
FIG. 3 is a measured distance versus tunneling current.
Description of part numbers in the figures: the device comprises a 1 composite principle measuring head, a 2 composite principle signal processing system, a 3 measuring head posture adjusting mechanism, a 4 anti-collision safety protection mechanism, a 5 measurement driving mechanism, a 6 micro measuring ball, a 7 signal transmission mechanism, an 8 shielding mechanism, a 9 card installing mechanism, a 10 signal connector, a 11 signal transmission cable, a 12 offset electric field generating system, a 13 composite principle signal detection system, a 14 current limiting unit, a 15 measured piece, a 16 communication cable, a 17 instrument main control computer, a 18 insulating part and a 19 signal wire.
Detailed Description
The following detailed description of embodiments of the invention refers to the accompanying drawings.
A quantum tunneling and spherical scattered field composite principle sensing method comprises the following steps:
firstly, a measuring head posture adjusting mechanism is adopted to adjust the posture of the composite principle measuring head relative to a measured piece, so that the composite principle measuring head enters an aiming posture; then the measuring driving mechanism is used for driving the composite principle measuring head or the measured piece, and the measuring driving mechanism stops driving after the relative distance between the measuring driving mechanism and the measured piece enters a working interval;
firstly, a spherical scattered field sensing principle is used for sensing to obtain a rough measurement result of the alignment clearance between the measured piece and the micro measuring ball, a measurement driving mechanism is controlled according to the rough measurement result to enable the alignment clearance between the micro measuring ball and the measured piece to directly enter a working interval of a quantum tunneling principle, then, the quantum tunneling sensing principle is used for sensing, a bias electric field generating system is used for generating bias voltage to be loaded between the micro measuring ball and the measured piece to form a bias electric field, then, the three-dimensional quantum tunneling effect is generated between the micro measuring ball and the measured piece through adjustment and control of the bias electric field, and the alignment clearance between the micro measuring ball and the measured piece is converted into a sensing signal;
and thirdly, detecting and processing the sensing signals in the second step by adopting a composite principle signal detection system, and extracting the aiming gap information between the micro-measuring ball and the measured piece by using nano resolution according to a model of the corresponding relation between the aiming gap and the sensing signals so as to realize three-dimensional and nano resolution sensing and measurement.
A quantum tunneling and spherical scattered field composite principle sensing device comprises a composite principle measuring head 1, a composite principle signal processing system 2, a measuring head posture adjusting mechanism 3, an anti-collision safety protection mechanism 4 and a measurement driving mechanism 5, the composite principle measuring head 1 consists of a micro measuring ball 6, a signal transmission mechanism 7, a shielding mechanism 8, a card assembling mechanism 9, a signal connector 10, an insulating part 18 and a signal wire 19, the micro measuring ball 6 is connected with the lower end of the signal transmission mechanism 7, the upper end of the signal transmission mechanism 7 is connected with the signal connector 10 through a signal wire 19, the main body of the signal transmission mechanism 7 is positioned in the shielding mechanism 8, the shielding mechanism 8 is assembled on the card assembly mechanism 9, an insulating part 18 is assembled in the shielding mechanism 8, the signal connector 10 is connected with the signal transmission cable 11, and the shells of the shielding mechanism 8, the card assembling mechanism 9 and the signal connector 10 are seamlessly connected with the shielding layer of the signal transmission cable 11; the composite principle signal processing system 2 is composed of a bias electric field generating system 12, a composite principle signal detecting system 13, a current limiting unit 14, a communication cable 16 and an instrument main control computer 17, wherein the bias electric field generating system 12 and the composite principle signal detecting system 13 are respectively connected with the instrument main control computer 17 through the communication cable 16; the signal connector 10, the current limiting unit 14, the composite principle signal detection system 13, the bias electric field generation system 12 and the tested piece 15 of the composite principle measuring head 1 are sequentially connected in series through the signal transmission cable 11 to form a sensing signal detection loop; the combined principle measuring head 1 is assembled on the measuring head posture adjusting mechanism 3, the measuring head posture adjusting mechanism 3 and the anti-collision safety protection mechanism 4 are fixedly assembled, and the measuring driving mechanism 5 is installed on the anti-collision safety protection mechanism 4 or a measured piece 15.
The micro measuring ball (6) is made of stainless steel or tungsten carbide materials, and the surface of the ball body is plated with gold or platinum material films.
The diameter of the micro measuring ball (6) is within the range of phi 1 mu m to phi 1 mm.
The measuring head posture adjusting mechanism (3) is of a two-dimensional flexible hinge, a two-dimensional air bearing or an air ball bearing structure.
The shielding mechanism (8) and the signal transmission cable (11) are both of a multi-coaxial structure.
An embodiment of the present invention is given below in conjunction with fig. 1 and 3. Fig. 1 is a schematic structural diagram of a quantum tunneling and spherical scattered field composite principle sensing device of the present invention. In the present embodiment, the measurement driving mechanism 5 drives the composite-principle measuring head 1. The surface to be measured of the measured piece 15 is a small-hole inner cylindrical surface. The micro measuring ball 6 in the measuring head 1 adopts a stainless steel ball and a film with gold-plated material on the surface. The wall thickness of the shielding 8 is 20 μm. The signal transmission mechanism 7 is electrically connected with the micro ball 6 by welding. The shielding mechanism 8 and the signal transmission mechanism 7 are coaxially assembled to form a coaxial structure, the shielding mechanism and the signal transmission mechanism are insulated through an insulating part 18 made of insulating materials, and all parts are reliably insulated and positioned. The shielding mechanism 8 is clamped on the clamping mechanism 9, the clamping mechanism 9 is assembled on the measuring head posture adjusting mechanism 3, and the measuring head posture adjusting mechanism 3 is assembled with the anti-collision safety protection mechanism 4. The measuring head posture adjusting mechanism 3 is of a two-dimensional flexible hinge structure. The anti-collision safety protection mechanism 4 adopts a magnetic type protection mechanism and is fixed on the measurement driving mechanism 5. The measurement drive mechanism 5 has a nano-scale displacement resolution. The bias electric field generating system 12 and the composite principle signal detecting system 13 are connected with an instrument main control computer 17 through a communication cable 16, and the instrument main control computer 17 controls the two.
Firstly, the relative position of the composite principle measuring head 1 and the measured piece 15 is adjusted, the measurement driving mechanism 5 is controlled to drive the composite principle measuring head 1 to enable the micro measuring ball 6 to gradually approach the surface to be measured of the measured piece 15, and the distance between the micro measuring ball and the surface to be measured is gradually reduced until the micro measuring ball enters the range of the aiming gap. When the measured piece 15 is a conductor, a quantum tunneling principle and a spherical scattered field principle are combined for sensing and measuring, at the moment, the spherical scattered field sensing principle is firstly utilized for sensing, a preliminary measurement result of the aiming gap between the measured piece 15 and the micro measuring ball 6 is obtained, the measurement driving mechanism 5 is controlled according to the result, the aiming gap between the micro measuring ball 6 and the measured piece 15 directly enters a working interval of the quantum tunneling principle, at the moment, the bias electric field generating system 12 is adjusted to output a set constant voltage to be loaded between the micro measuring ball 6 and the measured piece 15 to form a bias electric field, a three-dimensional quantum tunneling effect is generated between the micro measuring ball 6 and the measured piece 15 through adjustment and control of the bias electric field, and gap information between the micro measuring ball 6 and the measured piece 15 is converted into a sensing electric signal. And meanwhile, the composite principle signal processing system 2 is monitored, and the electric signal is processed by controlling the composite principle signal detection system 13, so that the aiming gap between the tested piece 15 and the micro measuring ball 6 can be obtained. An actual measurement curve of the normalized measured spacing versus normalized tunneling current is shown in fig. 3, from which a measurement model can be built.
Fig. 2 shows another embodiment of the present invention, in which the measurement driving mechanism 5 drives the object 15. The measured piece 15 is fixed on the measuring driving mechanism 5, and the measured piece 15 is driven by the measuring driving mechanism 5 to approach the micro measuring ball 6 of the measuring head 1 based on the composite principle so as to finish measurement. The composite principle measuring head 1 is fixedly connected with the measuring head posture adjusting mechanism 3 and the anti-collision safety protection mechanism 4, and can be mounted on a Z-axis motion mechanism of the coordinate machine so as to be convenient for measurement.
Claims (5)
1. A quantum tunneling and spherical scattering field composite principle sensing method is characterized in that: the sensing method adopts a quantum tunneling and spherical scattered field composite principle sensing device, and the device comprises a composite principle measuring head (1), a composite principle signal processing system (2), a measuring head posture adjusting mechanism (3), an anti-collision safety protection mechanism (4) and a measurement driving mechanism (5); the combined principle measuring head (1) is composed of a micro measuring ball (6), a signal transmission mechanism (7), a shielding mechanism (8), a clamping mechanism (9), a signal connector (10), an insulating part (18) and a signal wire (19), wherein the micro measuring ball (6) is connected with the lower end of the signal transmission mechanism (7), the upper end of the signal transmission mechanism (7) is connected with the signal connector (10) through the signal wire (19), the main body of the signal transmission mechanism (7) is positioned in the shielding mechanism (8), the shielding mechanism (8) is assembled on the clamping mechanism (9), the insulating part (18) is assembled in the shielding mechanism (8), the signal connector (10) is connected with the signal transmission cable (11), and the shells of the shielding mechanism (8), the clamping mechanism (9) and the signal connector (10) are in seamless connection with a shielding layer of the signal transmission cable (11); the composite principle signal processing system (2) is composed of a bias electric field generating system (12), a composite principle signal detecting system (13), a current limiting unit (14), a communication cable (16) and an instrument main control computer (17), wherein the bias electric field generating system (12) and the composite principle signal detecting system (13) are respectively connected with the instrument main control computer (17) through the communication cable (16); a signal connector (10), a current limiting unit (14), a composite principle signal detection system (13), a bias electric field generation system (12) and a detected piece (15) of the composite principle measuring head (1) are sequentially connected in series through a signal transmission cable (11) to form a sensing signal detection loop; the composite principle measuring head (1) is assembled on the measuring head posture adjusting mechanism (3), the measuring head posture adjusting mechanism (3) is fixedly assembled with the anti-collision safety protection mechanism (4), and the measuring driving mechanism (5) is installed on the anti-collision safety protection mechanism (4) or a measured piece (15);
the method comprises the following steps:
firstly, a measuring head posture adjusting mechanism is adopted to adjust the posture of the composite principle measuring head relative to a measured piece, so that the composite principle measuring head enters an aiming posture; then the measuring driving mechanism is used for driving the composite principle measuring head or the measured piece, and the measuring driving mechanism stops driving after the relative distance between the measuring driving mechanism and the measured piece enters a working interval;
firstly, a spherical scattered field sensing principle is used for sensing to obtain a rough measurement result of the alignment clearance between the measured piece and the micro measuring ball, a measurement driving mechanism is controlled according to the rough measurement result to enable the alignment clearance between the micro measuring ball and the measured piece to directly enter a working interval of a quantum tunneling principle, then, the quantum tunneling sensing principle is used for sensing, a bias electric field generating system is used for generating bias voltage to be loaded between the micro measuring ball and the measured piece to form a bias electric field, then, the three-dimensional quantum tunneling effect is generated between the micro measuring ball and the measured piece through adjustment and control of the bias electric field, and the alignment clearance between the micro measuring ball and the measured piece is converted into a sensing signal;
and thirdly, detecting and processing the sensing signals in the second step by adopting a composite principle signal detection system, and extracting the aiming gap information between the micro-measuring ball and the measured piece by using nano resolution according to a model of the corresponding relation between the aiming gap and the sensing signals so as to realize three-dimensional and nano resolution sensing and measurement.
2. The method of claim 1, wherein: the micro measuring ball (6) is made of stainless steel or tungsten carbide materials, and the surface of the ball body is plated with gold or platinum material films.
3. The method of claim 1, wherein: the diameter of the micro measuring ball (6) isϕ1μm~ϕWithin 1 mm.
4. The method of claim 1, wherein: the measuring head posture adjusting mechanism (3) is of a two-dimensional flexible hinge, a two-dimensional air bearing or an air ball bearing structure.
5. The method of claim 1, wherein: the shielding mechanism (8) and the signal transmission cable (11) are both of a multi-coaxial structure.
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| US7093499B2 (en) * | 2004-12-21 | 2006-08-22 | Delphi Technologies, Inc. | Force sensor, strain sensor and methods for measuring same |
| JP4200147B2 (en) * | 2005-06-09 | 2008-12-24 | Ｔｄｋ株式会社 | Fine structure, cantilever, scanning probe microscope, and method for measuring deformation of fine structure |
| CN101561240B (en) * | 2009-05-31 | 2010-10-20 | 哈尔滨工业大学 | Spherical capacitance pole plate based ultra-precision non-contact type three-dimensional aiming and measuring sensor |
| CN101769711B (en) * | 2010-01-26 | 2012-09-05 | 重庆理工大学 | Tunnel effect based contact type nanometer displacement sensor |
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