CN109205997A - The manufacturing method and glass substrate manufacturing device of glass substrate - Google Patents
The manufacturing method and glass substrate manufacturing device of glass substrate Download PDFInfo
- Publication number
- CN109205997A CN109205997A CN201810690275.0A CN201810690275A CN109205997A CN 109205997 A CN109205997 A CN 109205997A CN 201810690275 A CN201810690275 A CN 201810690275A CN 109205997 A CN109205997 A CN 109205997A
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- China
- Prior art keywords
- pipe
- main body
- electrode
- glass
- flange
- Prior art date
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Classifications
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B7/00—Distributors for the molten glass; Means for taking-off charges of molten glass; Producing the gob, e.g. controlling the gob shape, weight or delivery tact
- C03B7/02—Forehearths, i.e. feeder channels
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B17/00—Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
- C03B17/06—Forming glass sheets
- C03B17/064—Forming glass sheets by the overflow downdraw fusion process; Isopipes therefor
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B5/00—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
- C03B5/16—Special features of the melting process; Auxiliary means specially adapted for glass-melting furnaces
- C03B5/18—Stirring devices; Homogenisation
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B7/00—Distributors for the molten glass; Means for taking-off charges of molten glass; Producing the gob, e.g. controlling the gob shape, weight or delivery tact
- C03B7/02—Forehearths, i.e. feeder channels
- C03B7/06—Means for thermal conditioning or controlling the temperature of the glass
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Glass Melting And Manufacturing (AREA)
Abstract
The present invention relates to a kind of manufacturing method of glass substrate and glass substrate manufacturing devices.The present invention is able to suppress to form deformation, bending, breakage of the pipe of flow path of melten glass etc..In the manufacturing method of glass substrate of the invention, for the flow path of the melten glass formed between the end of calciner and forming device, melten glass processing unit is constituted and making more root canals between the tubes and being connected between the end of calciner.1st pipe includes: pipe main body；And the electrode of Flange-shaped Parts, it is prominent to outside pipe main body, electrified regulation is carried out to pipe main body.End of the electrode of Flange-shaped Parts pipe main body to be arranged in by pipe main body and in a manner of being connected to the 2nd tube grip of the 1st pipe.The electrode of Flange-shaped Parts is at least in the concaveconvex shape for having the recess portion of the protrusion and recess that bloat along the extending direction of flow path adjacent by the part of pipe main body and the 2nd tube grip.In the method, before melting step, carrying out heating to the 1st pipe and the 2nd pipe thermally expands them, makes its deformation using pipe main body and the 2nd tube grip concaveconvex shape, so that the 1st pipe be connected with the 2nd pipe.
Description
Technical field
The present invention relates to a kind of manufacturing method of glass substrate and glass substrate manufacturing devices.
Background technique
When manufacturing glass substrate, glass raw material is melted using calciner and makes melten glass, utilizes clarification thereafter
Pipe clarifies melten glass, and the melten glass after clarification is for example configured to sheet glass using formed body.It is made in calciner
Melten glass be to be sent via transfer tube to finer.
About the transfer tube and finer, it is known to the transfer tube comprising platinum or platinum alloy and finer (patent document
1)。
Herein, in the manufacturing method of glass substrate, calciner, transfer tube and finer are connected, and then ensures clear
After pigging to come by melten glass make sheet glass forming device melten glass flow path, then start glass substrate
Manufacture.At this moment, transfer tube and finer comprising platinum or platinum alloy thermally expand due to being warming up to 1 more than thousand Baidu.In addition, moving
It send pipe and finer is to be fixed between calciner and forming device to be assembled, therefore transfer tube and finer are intended to melting glass
The thermal expansion that the flow direction of glass extends suffers restraints, and applies compression stress to transfer tube and finer.As a result, there is transfer tube
And the situation that finer bending is even damaged.
In addition, in recent years, in order to reduce carrying capacity of environment, using SnO in most cases2It replaces using always as clarifying agent
Make the harmful As of clarifying agent2O3。SnO2It is effective in terms of reducing carrying capacity of environment, but in order to effectively play clarification function, it must
Palpus and As2O3It is higher compared to the temperature of melten glass to be set to.Therefore, in order to which melten glass is heated to high temperature, transfer tube and
The heating temperature of finer is also got higher, and the thermal expansion of transfer tube and finer is bigger than previous.
Therefore, it is increasingly desirable to prevent damaged due to thermal expansion in transfer tube after manufacture starts and finer.
[existing technical literature]
[patent document]
[patent document 1] Japanese patent special table 2008-539162 bulletin
Summary of the invention
[problems to be solved by the invention]
Therefore, the purpose of the present invention is to provide a kind of manufacturing method of glass substrate and glass substrate manufacturing device, energy
Enough pipes for inhibiting the flow path for forming melten glass more specifically have the flow path for forming melten glass and more interconnected
The deformation such as deformation, bending, breakage of the pipe in the melten glass processing unit of pipe, bending, breakage etc..
[technical means to solve problem]
The present invention includes the manufacturing method and glass substrate manufacturing device of the glass substrate of the form of following (1)~(7).
(1) a kind of manufacturing method of glass substrate, it is characterised in that have:
Step is melted, glass raw material is melted using calciner and makes melten glass；
Processing step is handled the melten glass using melten glass processing unit；And
The processed melten glass is configured to sheet glass using forming device by forming step；
For the flow path of the melten glass formed between the end of the calciner and the forming device, the melting glass
Glass processing unit is constituted and being connected more root canals between the pipe and between the end of the calciner；
The 1st pipe in the pipe has:
Pipe main body；
The electrode of Flange-shaped Parts, it is prominent to outside the pipe main body, electrified regulation is carried out to the pipe main body；
The electrode of the Flange-shaped Parts is by the pipe main body and to be connected to the 2nd pipe and the calciner of the 1st pipe
The end of the pipe main body is arranged in the mode of either one or two of described end clamping；
The electrode of the Flange-shaped Parts is at least in by the end of the pipe main body and the 2nd pipe and the calciner
The part of one clamping there is adjacent recessed of recess portion of the protrusion and recess that bloat along the extending direction of the flow path
Convex form；And
Before the melting step, the 1st pipe is heated and makes its thermal expansion, utilizes the pipe main body and institute
The one clamping concaveconvex shape stated in the end of the 2nd pipe and the calciner makes its deformation, thus will be described
One connection in the end of 1st pipe and the 2nd pipe and the calciner.
In the method for (1), before heating the 1st pipe, in the pipe main body and the 2nd pipe and the melting
Gap is provided between one in the end of furnace.
In the method for (1), preferably it is described 1st pipe and it is described 2nd pipe and the calciner the end in
One end respectively abutted is from being cooled externally, by making to enter to by the end positioned at the end by the end
The melten glass in the gap between portion cools and solidifies, to form the flow path.
In the method for (1), when preferably heating 1 pipe, the institute of the 2nd pipe and the calciner is also heated
It states at least one in end.
(2) manufacturing method of glass substrate described according to (1), wherein the melten glass processing unit also has
Configure the heat insulating component around the pipe is respective；
The electrode of the Flange-shaped Parts is by around the 1st heat insulating component and the 2nd pipe around the 1st pipe
The mode of 2 heat insulating components clamping is arranged；
The electrode of the Flange-shaped Parts is in the Flange-shaped Parts clamped by the 1st heat insulating component and the 2nd heat insulating component
The peripheral part of electrode also has the concaveconvex shape；And
When being heated to the 1st pipe, the 1st heat insulating component is heated and makes its thermal expansion, using described
1st heat insulating component and the 2nd heat insulating component clamping are located at the portion of the concaveconvex shape of the peripheral part of the Flange-shaped Parts electrode
Dividing makes its deformation.
(3) manufacturing method of glass substrate described according to (1) or (2), wherein the electrode of the Flange-shaped Parts
The shape repeated on the extending direction of the Flange-shaped Parts electrode with the concaveconvex shape；And
The length of the repetitive unit of the concaveconvex shape of the protrusion and the direction of recess portion arrangement is less than the pipe
The diameter of main body.
(4) manufacturing method of glass substrate described in any one of according to (1) to (3), wherein the flange
The electrode of shape configures in a manner of by the pipe main body and the 2nd tube grip；
Claim respectively by the electrode of the pipe main body, the Flange-shaped Parts, the protrusion, the recess portion, the concaveconvex shape
When for the 1st pipe main body, the electrode of the 1st Flange-shaped Parts, the 1st protrusion, the 1st recess portion, 1 concaveconvex shape,
2nd pipe has:
2nd pipe main body；And
The electrode of 2nd Flange-shaped Parts, it is prominent to outside the 2nd pipe main body；
The electrode of 2nd Flange-shaped Parts is by the electrode of the 2nd pipe main body and the 1st Flange-shaped Parts of the 1st pipe
The end of the 2nd pipe main body is arranged in the mode of clamping；
The electrode of 2nd Flange-shaped Parts is at least in the portion clamped by the electrode of the 2nd pipe main body and the 1st Flange-shaped Parts
Divide 2nd concaveconvex shape adjacent with the 2nd protrusion and second recesses, the 2nd protrusion is bloated to the extending direction of the flow path,
The second recesses are recessed relative to the 2nd protrusion to the 2nd pipe main body side；And
When being heated to the 1st pipe, using described in the clamping of the electrode of the 2nd pipe main body and the 1st Flange-shaped Parts
2nd concaveconvex shape makes its deformation, so that the 1st pipe be connected with the 2nd pipe.
(5) a kind of manufacturing method of glass substrate, it is characterised in that have:
Step is melted, glass raw material is melted using calciner and makes melten glass；
Processing step is handled the melten glass using melten glass processing unit；And
The processed melten glass is configured to sheet glass using forming device by forming step；
For the melten glass that is formed between the end for the treatment trough for being connected to the calciner and the forming device
Flow path, the melten glass processing unit are by making more root canals quilt between the pipe and between the end of the treatment trough
Connection and constitute；
The 1st pipe in the pipe has:
Pipe main body；And
The electrode of Flange-shaped Parts, it is prominent to outside the pipe main body, electrified regulation is carried out to the pipe main body；
The electrode of the Flange-shaped Parts is by the pipe main body and to be connected to the 2nd pipe and the treatment trough of the 1st pipe
The end of the pipe main body is arranged in the mode of either one or two of described end clamping；
The electrode of the Flange-shaped Parts is at least in by the end of the pipe main body and the 2nd pipe and the treatment trough
The part of one clamping there is adjacent recessed of recess portion of the protrusion and recess that bloat along the extending direction of the flow path
Convex form；And
Before the melting step, the 1st pipe is heated and makes its thermal expansion, utilizes the pipe main body and institute
The one clamping concaveconvex shape stated in the end of the 2nd pipe and the treatment trough makes its deformation, thus will be described
One connection in the end of 1st pipe and the 2nd pipe and the treatment trough.
In the method for (5), before heating the 1st pipe, in the pipe main body and the 2nd pipe and the processing
Gap is provided between one in the end of slot.
In the method for (5), preferably it is described 1st pipe and it is described 2nd pipe and the treatment trough the end in
One end respectively abutted is from being cooled externally, by making to enter to by the end positioned at the end by the end
The melten glass in the gap between portion cools and solidifies, to form the flow path.
In the method for (5), when preferably heating 1 pipe, the institute of the 2nd pipe and the treatment trough is also heated
It states at least one in end.
(6) a kind of glass substrate manufacturing device, it is characterised in that have: glass raw material is melted and is made by calciner
Melten glass；
Melten glass processing unit handles the melten glass；And
The processed melten glass is configured to sheet glass by forming device；
It is described molten for the flow path of the melten glass formed between the end of the calciner and the forming device
Melting glass treatment device is constituted and being connected more root canals between the pipe and between the end of the calciner
's；
The 1st pipe in the pipe has:
Pipe main body；And
The electrode of Flange-shaped Parts, it is prominent to outside the pipe main body；
The electrode of the Flange-shaped Parts is by the pipe main body and to be connected to the 2nd pipe and the calciner of the 1st pipe
The end of the pipe main body is arranged in the mode of either one or two of described end clamping；
The electrode of the Flange-shaped Parts is at least in by the end of the pipe main body and the 2nd pipe and the calciner
The part of one clamping there is adjacent recessed of recess portion of the protrusion and recess that bloat along the extending direction of the flow path
Convex form；And
In the state of the 1st pipe thermal expansion, the concaveconvex shape is by the pipe main body and the 2nd pipe and described molten
It solves the one clamping in the end of furnace and deforms, thus by the 1st pipe and the 2nd pipe and the calciner
One connection in the end.
In the device of (6), before thermally expanding the 1st pipe, in the pipe main body and the 2nd pipe and described
Gap is provided between one in the end of calciner.1st pipe is to be heated and thermally expanded in advance.
In the device of (6), preferably it is described 1st pipe and it is described 2nd pipe and the calciner the end in
One end respectively abutted is from being cooled externally, by making to enter to by the end positioned at the end by the end
The melten glass in the gap between portion cools and solidifies, to form the flow path.
In the device of (6), when preferably thermally expanding the 1st pipe, also make the 2nd pipe and the calciner
At least one thermal expansion in the end.
(7) a kind of glass substrate manufacturing device, it is characterised in that have: glass raw material is melted and is made by calciner
Melten glass；
Melten glass processing unit handles the melten glass；And
The processed melten glass is configured to sheet glass by forming device；
In order to form the melting glass between the end for the treatment trough for being connected to the calciner and the forming device
The flow path of glass, the melten glass processing unit be by make more root canals between the pipe and with the end of the treatment trough it
Between be connected and constitute；
The 1st pipe in the pipe has:
Pipe main body；And
The electrode of Flange-shaped Parts, it is prominent to outside the pipe main body；
The electrode of the Flange-shaped Parts is by the pipe main body and to be connected to the 2nd pipe and the treatment trough of the 1st pipe
The end of the pipe main body is arranged in the mode of either one or two of described end clamping；
The electrode of the Flange-shaped Parts is at least in by the end of the pipe main body and the 2nd pipe and the treatment trough
The part of one clamping there is adjacent recessed of recess portion of the protrusion and recess that bloat along the extending direction of the flow path
Convex form；And
In the state of the 1st pipe thermal expansion, the concaveconvex shape is by the pipe main body and the 2nd pipe and the place
It manages the one clamping in the end of slot and deforms, thus by the 1st pipe and the 2nd pipe and the treatment trough
One connection in the end.
In the device of (7), before thermally expanding the 1st pipe, in the pipe main body and the 2nd pipe and described
Gap is provided between one in the end for the treatment of trough.1st pipe is to be heated and thermally expanded in advance.
In the device of (7), preferably it is described 1st pipe and it is described 2nd pipe and the treatment trough the end in
One end respectively abutted is from being cooled externally, by making to enter to by the end positioned at the end by the end
The melten glass in the gap between portion cools and solidifies, to form the flow path.
In the device of (7), when preferably thermally expanding the 1st pipe, also make the 2nd pipe and the treatment trough
At least one thermal expansion in the end.
[The effect of invention]
In accordance with the invention it is possible to inhibit to form deformation, bending, breakage of the pipe of the flow path of melten glass etc., it is more specific next
It says, inhibits the change with the flow path and the pipe in the melten glass processing unit of more root canals interconnected that form melten glass
Shape, bending, breakage etc..
Detailed description of the invention
Fig. 1 is the figure of an example the step of indicating the manufacturing method of the glass substrate of present embodiment.
Fig. 2 is to schematically show an example for carrying out melting step~cutting step device in present embodiment
Figure.
Fig. 3 (a) is the side view for having the pipe before pipe main body and Flange-shaped Parts electrode assembling, is (b) (a) indicated after assembling
Pipe side view.
Fig. 4 (a) is the front view for indicating Flange-shaped Parts electrode shown in Fig. 3, is (b) change case for indicating Flange-shaped Parts electrode
Front view.
Fig. 5 (a) is the side view for indicating another change case of Flange-shaped Parts electrode, is (b) indicate Flange-shaped Parts electrode another
The side view of change case.
Adding when Fig. 6 is group glaze supply pipe and finer in the manufacturing method for illustrate the glass plate of present embodiment
The figure of state before heat.
Fig. 7 is the figure for illustrating the state after the heating of glass supply pipe and finer shown in fig. 6.
The shape before heating when Fig. 8 is group glaze supply pipe and finer in the manufacturing method of the glass plate of change case
The figure of state.
Fig. 9 is the figure for illustrating the state after the heating of glass supply pipe and finer in assembling shown in Fig. 8.
Specific embodiment
Hereinafter, the manufacturing method and glass substrate manufacturing device to the glass substrate of present embodiment are illustrated.
Hereinafter, the manufacturing method of glass substrate of the invention is described in detail.Fig. 1 is the glass for indicating present embodiment
The figure of an example of the step of manufacturing method of glass substrate.
(the whole summary of the manufacturing method of glass substrate)
The manufacturing method of glass substrate mainly has melting step (ST1), clarification steps (ST2), homogenization step
(ST3), supplying step (ST4), forming step (ST5), slow cooling step (ST6) and cutting step (ST7).The system of glass substrate
Making method has the melten glass processing step for handling and (clarifying, homogenize, supplying) specific to melten glass implementation, described
Among step, clarification steps (ST2), homogenization step (ST3), supplying step (ST4) are separately included to be walked in melten glass processing
In rapid.In addition, there are grinding step, grinding steps, clean step, checking step, bale packing step etc., pack lamination in step
Divided glass substrate is transported to the dealer of customer.
Melting step (ST1) is carried out using calciner.In calciner, by putting into glass raw material to being stored in
The liquid level of melten glass in calciner is simultaneously heated and makes melten glass.In turn, from the inside side that calciner is arranged in
Downstream step is passed through melten glass to the outflux 101a of one bottom of wall.
The heating of melten glass about calciner, in addition to being passed through electrically to melten glass itself, self-heating and carry out
Other than the method for heating, it can also auxiliarily bestow and be melted glass raw material by the flame that burner generates.In addition, in glass
Clarifying agent is added in raw material.As clarifying agent, it is known to SnO2、As2O3、Sb2O3Deng, but be not particularly limited.But it just reduces
, it is preferable to use SnO for the aspect of carrying capacity of environment2(tin oxide) is used as clarifying agent.
What clarification steps (ST2) at least carried out in finer.In clarification steps, by making the melting in finer
Glass heating, and make comprising O contained in melten glass2、CO2Or SO2Bubble absorb as caused by the reduction reaction of clarifying agent
O2It is grown, float to the liquid level of melten glass and is released.In turn, in clarification steps, by reducing melten glass
Temperature carries out oxidation reaction by the reduction reaction of clarifying agent reducing substances obtained.As a result, in bubble remaining in melten glass
O2Etc. gas componants be absorbed into melten glass again, bubble disappear.The oxidation reaction as caused by clarifying agent and reduction reaction
It is to be carried out by controlling the temperature of melten glass.In addition, vacuum defoaming mode also can be used in clarification steps, it is to clarify
The space of middle manufacture pipe reduced atmosphere, makes to steep present in melten glass and grows and defoam under reduced atmosphere.At this moment, do not make
With for the aspect of clarifying agent effectively.In addition, using the defecation method that tin oxide is used as to clarifying agent in clarification steps.
In homogenization step (ST3), supplied by using blender stirring process from the piping that finer extends
Melten glass in stirred tank, to carry out homogenizing for glass ingredient.Thereby, it is possible to reduce the glass of the origin cause of formation as striped etc.
The composition of glass is uneven.
In supplying step (ST4), melten glass is supplied to forming device by the piping extended from stirred tank.
In forming device, step (ST5) and slow cooling step (ST6) is formed.
In forming step (ST5), sheet glass is moltened glass into, makes the sheet glass of flowing.Forming be using
Overflow downdraw.
In slow cooling step (ST6), required thickness is become with the sheet glass for shaping and flowing and does not generate internal strain
Mode, and then cooled down in a manner of not generating warpage.
It is specific by cutting into the sheet glass supplied from forming device in disconnecting device in cutting step (ST7)
Length, to obtain the glass substrate of plate.Cut-off glass substrate is cut into certain size in turn, to make
The glass substrate of target size.Thereafter, grinding, the grinding of the end face of glass substrate are carried out, and carries out cleaning for glass substrate, into
And after the abnormal defect such as check for bubble, the glass substrate of passed examination product is packed into final product.
Fig. 2 is to schematically show melting step (ST1)~cutting step (ST7) glass carried out in present embodiment
The figure of an example of substrate manufacturing device.The device is as shown in Fig. 2, mainly have fusing device 100, forming device 200 and cutting
Device 300.Fusing device 100 has calciner 101, finer 102, stirred tank 103 and glass supply pipe 104,105,106.
Glass substrate manufacturing device, which has, implements the melten glass processing unit that specifically handles to melten glass, the finer 102,
Stirred tank 103, glass supply pipe 104,105,106 are separately included in melten glass processing unit.
In fusing device 100 shown in Fig. 2, the investment of glass raw material is carried out using bucket 101d.In finer 102
In, the temperature of melten glass MG is adjusted, the clarification of melten glass MG is carried out using the redox reaction of clarifying agent.Finer
102 are linked to each other to form comprising 1 root canal or by more root canals.In turn, it in stirred tank 103, is stirred using blender 103a
It mixes melten glass MG and it is made to homogenize.In forming device 200, by using the overflow downdraw of formed body 210, by melting
Glass MG formed glass sheet SG.
In addition, in Fig. 2, glass supply pipe 104 is the transfer tube for connecting calciner 101 and finer 102, but glass
The transfer tube that the treatment trough and finer 102 that supply pipe 104 is also possible to that calciner 101 will be connected to connect.As treatment trough,
Such as can enumerate makes the temperature of melten glass MG reduce and make the oxygen when supplying oxygen to melten glass
A part is absorbed into the treatment trough of clarifying agent.
(pipe of melten glass processing unit)
For the flow path of the melten glass formed between the end of calciner 101 and forming device 200, melten glass processing
Device is constituted and making more root canals between the tubes and being connected between the end of calciner 101.It, can as this pipe
To enumerate the finer 102, stirred tank 103, glass supply pipe 104,105,106.These pipes include platinum or platinum alloy, but
It may include and strengthen platinum or reinforcing platinum alloy.Strengthening platinum or strengthening platinum alloy is to disperse Al in platinum or platinum alloy2O3、ZrO2Or
Y2O3Material made of equal metal oxide particles.
In addition, each pipe for constituting finer can also be used as to form melting glass in the case where finer includes more root canals
The pipe of the flow path of glass is enumerated.
At least part pipe in the pipe of melten glass processing unit has: pipe main body and to outside pipe main body it is prominent and right
Pipe main body carries out the electrode of the Flange-shaped Parts of electrified regulation.As this pipe, such as finer 102 and glass supply can be enumerated
Pipe 104,105, but stirred tank 103, glass supply pipe 106 also may include the pipe for having pipe main body and Flange-shaped Parts electrode.
Hereinafter, being illustrated by taking finer 102 as an example as the pipe for having pipe main body and Flange-shaped Parts electrode.
Fig. 3 (a) is the side view for indicating the finer 102 for having before finer main body and Flange-shaped Parts electrode assembling, Fig. 3
It (b) is the side view for indicating the finer 120 of Fig. 3 (a) after assembling.
Finer 102 has: finer main body 102c and electrode 102a, 102b.Electrode 102a, 102b pass through welding etc.
It is mounted on the both ends of the extending direction of finer main body 102c.Wherein, electrode 102a is supplied with being clarified pipe main body 102c and glass
One end of finer main body 102c is set to the mode that pipe 104 clamps.In addition, electrode 102b be clarified pipe main body 102c and
The other end of finer main body 102c is arranged in the mode that glass supply pipe 105 clamps.
Finer main body 102c is with cylindrical shape or angular columnar component.Described the one of finer main body 102c
End and the other end are specifically directed towards the end face of the extending direction of finer main body 102c.
Electrode 102a, 102b are connected with power supply device (not shown), carry out electrified regulation to finer main body 102c.Electrode
102a, 102b have (peripheral side) flange shape outstanding to outside finer main body 102c, are cooled externally from pipe.
In addition, though not shown, but finer 102 be provided with by 102 inner space of finer gas phase and pipe outside
The opening of connection.
Electrode 102a, 102b have concaveconvex shape 124.Concaveconvex shape 124 is the adjacent shape of protrusion 124a and recess portion 124b
Shape.Protrusion 124a is along the extending direction of the flow path of melten glass from the end of finer main body 102c (for finer master in Fig. 3
The extending direction of body 102c) bulging part.Recess portion 124b is to the side finer main body 102c relative to protrusion 124a (along prolonging
Stretch direction) recess part.In example shown in Fig. 3, concaveconvex shape 124 is formed in all parts of electrode 102a, 102b, but
As long as at least formed on the part for being clarified pipe main body 102c and the clamping of glass supply pipe 104,105.
In Fig. 3 later attached drawing, the thickness of the length of the repetitive unit of following bumps, concave-convex difference of height and tabular component
Degree is turgidly indicated to should be readily appreciated that carried out explanation.
Fig. 4 (a) is the front view for indicating electrode 102a shown in Fig. 3, and Fig. 4 (b) is the change case for indicating electrode 102a
Front view.
In example shown in Fig. 3, the concaveconvex shape 124 of electrode 102a, 102b is as represented by Fig. 4 (a) is shown thin straight line
Protrusion 124a maximum prominent position and thick straight line represented by the maximum recessed position of recess portion 124b extend parallel to each other,
The alternately arranged shape in the up and down direction of Fig. 4, but maximum prominent position and maximum recess can also be shown such as Fig. 4 (b)
Position extends radially, the alternately arranged shape in the circumferential direction of electrode 102a, 102b.
In addition, concaveconvex shape 124 is protrusion 124a and the curved waveform of recess portion 124b in the example shown in Fig. 3 (a)
Shape, but it is not limited to this form, such as the zigzag fashion of protrusion 124a and recess portion 124b bending can also be shown such as Fig. 5 (a),
Rectangular wave shape can also be shown such as Fig. 5 (b).Fig. 5 (a) is the side view for indicating another change case of electrode 102a, Fig. 5
It (b) is the side view for indicating the another change case of electrode 102a.
Electrode 102a, 102b with concaveconvex shape 124 are the concave-convexes by showing tabular component the explanation
The mode of shape 124 is implemented such as bending machining and is made.Tabular component is for example comprising platinum or platinum alloy, such as with a thickness of several mm
Left and right.It, can be with protrusion if crimped to concaveconvex shape 124 from the two sides of the thickness direction of electrode 102a, 102b
The mode that the bulging of 124a and the recess of recess portion 124b become smaller is plastically deformed.For example, in the example shown in Fig. 3 (b), it is concave-convex
Shape 124 is held between finer main body 102c and glass supply pipe 104,105, in a manner of extending along up and down direction
Plastic deformation.
More than, there is the example of concaveconvex shape 124 to be illustrated two electrodes 102a, 102b of finer 102, but
Concaveconvex shape 124 can also be positioned only at an electrode.
In addition, being illustrated by taking finer 102 as an example, but this as the pipe for having pipe main body and Flange-shaped Parts electrode
Pipe is not limited to finer 102, such as is also possible to glass supply pipe 104,105.For example, in glass supply pipe 104, with it is molten
In the case that the end of the end connecting side of solution furnace 101 is provided with the electrode with concaveconvex shape, the concaveconvex shape is as described below, quilt
The end of glass supply pipe main body and calciner 101 clamps and deforms.
(assembling of glass substrate manufacturing device)
Secondly, to the assembling of glass substrate manufacturing device, especially calciner 101, glass supply pipe 104 and finer
102 assembling is illustrated.
Fig. 6 is to illustrate glass supply pipe 104 in present embodiment and finer 102 to the figure of the assembling of calciner 101.
In addition, also similarly being handled, therefore to 110 groups of glaze supply pipes 104 for the treatment of trough and finer 102
It omits the description.
Calciner 101 can use the refractory materials such as refractory material brick material to store melten glass MG, with lower slot and upper slot
Mode, built at manufacture scene, the lower slot be provided with to melten glass carry out electrified regulation electrode, the upper slot
Gas phase is heated using burner etc. and forms high-temperature atmosphere.
In contrast, glass supply pipe 104 is made and is moved in factory etc. to manufacture scene.Similarly,
Finer 102 is made and is moved in factory etc. to manufacture scene.At this moment, glass supply pipe 104 and finer 102
Configuration be to consider that heat when glass supply pipe 104, finer 102 are heated to specific temperature (such as 1000 DEG C or more) is swollen
It is swollen, as shown in fig. 6, not supported mutually with the end of the end of calciner 101, the both ends of glass supply pipe 104, finer 102
The mode connect is vacated gap in advance and is configured.Thermal expansion refers to the thermal expansion of the extending direction (length direction) of pipe.In addition, Fig. 6
In, it is configured with electrode 104a, 104b at the both ends of glass supply pipe 104, in the finer opposite with glass supply pipe 104
102 end is configured with electrode 102a.
A part of the bottom and side wall of calciner 101 is indicated in Fig. 6.Not with the electrode 104a of glass supply pipe 104
It is connected to the end of the outflux of the calciner 101, the end of the specifically outflux 101a of the melten glass MG of side wall
There are gaps for the mode of 101b.
Glass supply pipe 104 is coated by high alumina cement 114a, is stacked the heat insulating components such as refractory material brick 114b on the outside.
Transfer pipe unit 114 is formd as a result,.Similarly, finer 102 is coated by high alumina cement 112a, is stacked on the outside resistance to
The heat insulating components 112b such as fiery object brick.Clarification pipe unit 112 is formd as a result,.
Pipe unit 114 and clarification pipe unit 112 are transferred as described above, to utilize the heat as caused by the heating of specific temperature
It is existing that the mode that the end of calciner 101, glass supply pipe 104 and finer 102 is connected to each other is configured at manufacture just now by expansion
?.That is, in the end 101b of the outflux 101a of the melten glass MG of the calciner 101 and electrode 104a of glass supply pipe 104
Between and glass supply pipe 104 electrode 104b and finer 102 electrode 102a between vacate in view of the thermal expansion amount
Gap configured.
In this state, calciner 101, transfer pipe unit 114 and clarification pipe unit 112 be by from outside to not shown
Heating device or the heater electrode (not shown) that is arranged in around glass supply pipe 104 and finer 102 be powered,
To which calciner 101, glass supply pipe 104, finer 102 are heated to specific temperature.At this moment, because glass supply pipe 104,
Thermal expansion caused by finer 102 (the lateral arrow in Fig. 6), the mutual opposite direction of glass supply pipe 104 and finer 102
Electrode 104b, 102a be in contact with each other, gap between electrode 104b and electrode 102a disappears, in turn, electrode 104b and electrode
102a is clamped by glass supply pipe main body 104c and finer main body 102c, the side being crushed with the recess portion and protrusion of concaveconvex shape
Formula deformation, finer 102 and glass supply pipe 104 are connected.In addition, the mutual opposite direction of calciner 101 and glass supply pipe 104
Electrode 101b, 104a be in contact with each other, gap between end 101b and electrode 104a disappears, and in turn, electrode 104a is by end
101b and glass supply pipe main body 104c clamping, deforms in such a way that the recess portion of concaveconvex shape and protrusion are crushed, by end
101b and glass supply pipe 104 connect.
In addition, heat insulating component 114b, 112b can be as described above by from heated glass supply pipes 104, finer
102 thermal conductivity heating.Heat insulating component 114b, 112b can also be arranged on not shown around heat insulating component 114b, 112a
Heater heating.
In the present embodiment, calciner 101, glass supply pipe 104, finer 102 are heated to assemble, but
Glass supply pipe 104 or heating glass supply pipe 104 and finer 102 can be individually heated, the glass supply pipe of thermal expansion is made
The both ends of 104 (the 1st pipes) are connected to the end of calciner 101 and the end of finer 102 (the 2nd pipe) and are assembled.It is described
Heating can as described above individually heat the transfer pipe unit 114 comprising glass supply pipe 104, or can also be to packet
The transfer pipe unit 114 of supply pipe containing glass 104 and the clarification pipe unit 112 comprising finer 102 are heated.
Like this, as shown in fig. 7, the end of calciner 101 and glass supply pipe 104 connect, glass supply pipe 104 and clear
Pigging 102 connects.At this moment, exist between the end 101b of calciner 101 and glass supply pipe main body and the electrode 104a of deformation
Small gap.Similarly, there are small gaps between glass supply pipe main body and finer main body and electrode 104b, 102a of deformation.
After end, glass supply pipe 104 and the finer 102 of calciner 101 connect, calciner 101, transfer tube are being kept
In the state of the condition of high temperature of unit 114 and clarification pipe unit 112, glass raw material is put into calciner 101, utilization is not shown
Burner and electrode melt glass raw material and make melten glass MG.
In this state, outflux 101a is open, and the melten glass MG being held in calciner 101 is opened from outflux 101a
Beginning flows to glass supply pipe 104, and then begins to flow to finer 102.Melten glass MG using setting in glass supply pipe 104 and
The heater (not shown) of finer 102 is for example warming up to 1500~1700 DEG C.Then, melten glass MG passes through the end abutted
When, melten glass MG enters to the gap.Electrode 104a, 104b, 102a are due to becoming flange shape, so being easy outside pipe
Portion is cooling, therefore the melten glass MG for entering to the gap is easily cooled and solidified and filled the gap.Like this, it is formed
From calciner 101 to glass supply pipe 104 and then to the flow path of finer 102, i.e. stream that melten glass MG will not be leaked out
Road.
In the past, assembling calciner, transfer tube, finer method in, such as have with these are heated and when thermally expanding
The mode mutually abutted very close to each otherly considers the thermal expansion of transfer tube, finer, mutually vacates gap before assembling and is matched
The case where setting.But the thermal expansion amount of calciner, transfer tube, finer changes depending on operating conditions such as the temperature of melten glass,
It is difficult to be correctly predicted.It is also difficult to according in view of thermal expansion depending on gap properly configure calciner, transfer tube,
Finer.Therefore, it when practically being assembled, is set before transfer tube, the thermal expansion amount of finer and assembling in most cases
Deviation can be generated by setting between the gap between calciner, transfer tube, finer.It is especially swollen in the heat of transfer tube, finer
Bulk is insufficient and in the case where the gap being arranged before assembling can not be filled up, have a possibility that melten glass leakage, so in order to keep away
Exempt from this state of affairs, is in most cases set to the gap between calciner, transfer tube, finer slightly short.Therefore, transfer tube,
The thermal expansion of finer suffers restraints, and applies compression stress to transfer tube, finer, there is transfer tube, finer deform, are bent,
Even damaged situation.
In the present embodiment, as described above, the concaveconvex shape 124 of electrode 104a, 104b, 102b can be to along flow paths
Direction distortion, so it is contemplated that the deflection (deformation nargin) of these concaveconvex shapes 124, will setting calciner 101,
The heat that gap between glass supply pipe main body 104c, finer main body 102c is set greater than glass supply pipe main body 104c is swollen
The thickness of bulk, the thermal expansion amount of finer main body 102c and the electrode (tabular component) without concaveconvex shape it is total
There is the length of ampleness.Therefore, the thermal expansion that can be avoided glass supply pipe 104, finer 102 suffers restraints and supplies to glass
Pipe 104, finer 102 apply compression stress, are able to suppress the deformation, bending, breakage of glass supply pipe 104 and finer 102
Deng.
End and finer especially as electrode 104b, 102a, in mutual opposite glass supply pipe main body 104c
At the end two of main body 102c in the case where electrode of the configuration with concaveconvex shape 124, total deflection of concaveconvex shape 124 is big,
So the length for further having ampleness can be set in the gap set before assembling, device can be more simply carried out
Assembling.
In the present embodiment, the heat insulating component 114b around glass supply pipe 104 (the 1st heat insulating component) and finer
Heat insulating component 112b (the 2nd heat insulating component) around 102 is configured in a manner of by electrode 102a, 104b clamping therebetween
's.At this moment, the concaveconvex shape 124 of electrode 102a, 104b is also formed in by heat insulating component 114b and heat insulating component 112b clamping
The peripheral part of electrode 102a, 104b, even if so the thermal expansion amount of heat insulating component 114b, 112b are less than glass supply pipe 104, clear
The thermal expansion amount of pigging 102, also can using heat insulating component 114b, 112b holding electrode 104b, 102a concaveconvex shape 124 and
Deform it slightly, thus from electrode 104b, 102a supported on both sides.
If between having between the heat insulating component 114b and heat insulating component 112b positioned at the peripheral part of electrode 104b, 102a
Gap, then for example having melten glass in the case where finer 102, glass supply pipe 104 generate damage because being maintained high temperature
The worry that MG can be leaked out by the gap to outside from the part that finer 102, glass supply pipe 104 are damaged.In this implementation
In mode, it is also provided with concaveconvex shape 124 in the peripheral part of electrode 104b, 102a, by utilizing heat insulating component 114b, 112b from two
Side is supported, and can eliminate the gap of heat insulating component 114b and heat insulating component 112b, prevents the leakage of melten glass MG.
In addition, in order to increase the effect by heat insulating component 114b, 112b from electrode 104b, 102a supported on both sides, it is heat-insulated
Component 114b, 112b clamping electrode 104b, 102a part concaveconvex shape it is also preferred that the repetitive unit of aftermentioned bumps length
Spend the difference of height (concave-convex amplitude) of L (concave-convex period) and bumps at least one be greater than by glass supply pipe main body 104c and
The concaveconvex shape of the part of finer main body 102c clamping.
Electrode 104a, 104b, 102a have concaveconvex shape 124 in electrode preferably as Fig. 3~example shown in fig. 5
Extending direction on the shape that repeats.By this form, can between calciner 101 and glass supply pipe 104 and
It is equably clamped and is deformed between glass supply pipe 104 and finer 102.In contrast, in addition to being held in calciner 101
Other than part between glass supply pipe 104 and the part being held between glass supply pipe 104 and finer 102
The part of electrode 104a, 104b, 102a are if it is even shape, then there have the part of even shape to be described clamped to follow
The mode of the deformation of partial concaveconvex shape deforms, ruptures, the worry of breakage etc..
In the shape that there is concaveconvex shape 124 to repeat by electrode 104a, 104b, 102a, protrusion 124a and recess portion
The length L of the repetitive unit (concave-convex period) of the concaveconvex shape 124 in the direction of 124b arrangement (referring to Fig. 4 (a) and Fig. 4 (b))
The preferably smaller than diameter of the pipe main body provided with electrode.By make repetitive unit length L be less than diameter, can connecting tube that
Hereafter remaining gap between pipe main body and electrode is reduced.0.5 times of length of the diameter of the preferred pipe main body of the length L of repetitive unit
Below degree.
In addition, about concaveconvex shape 124, non-linear shape in duplicate situation, the length L of repetitive unit is that its minimum is long
The average value of degree and maximum length.For example, the example as shown in Fig. 4 (b), the duplicate feelings in the circumferential of concaveconvex shape 124
Under condition, the length L of repetitive unit is the end of the peripheral side of the circumferential lengths and electrode 102a on the end of the inner circumferential side of electrode 102a
On circumferential lengths average value.
The concave-convex height of concaveconvex shape 124 (along the concave-convex difference of height on the extending direction of the flow path of melten glass)
It can suitably set.If concave-convex difference of height (distance of maximum prominent position and maximum recessed position) too small, electrode
The deflection of 104a, 104b, 102a can tail off, and can not increase setting in calciner 101, glass supply pipe main body 104c, clarification
The gap between pipe main body 102c.Therefore, the thermal expansion of glass supply pipe 104, finer 102 suffers restraints and to glass
Supply pipe 104, finer 102 apply compression stress, there is the glass supply pipe 104, deformation of finer 102, bending, even damaged
Situation.On the other hand, it if concave-convex difference of height is excessive, is difficult to that cooling is arranged around electrode 104a, 104b, 102a
Pipe, therefore may not proceed sufficiently the cooling of electrode 104a, 104b, 102a, there is the worry of electrode 104a, 104b, 102a breakage.
In addition, cooling tube by the component of tubulose is connected to the outer peripheral edge of electrode 104a, 104b, 102a annularly surrounded in a manner of
It constitutes, and is connected to refrigerant feedway, passed through in cooling tube by making from refrigerants such as the water that refrigerant feedway supplies, thus
The cooling of electrode that will be contacted with cooling tube.
In addition, electrode 104a when can suitably set double side acting of the crimp force from electrode 104a, 104b, 102a,
The morphotropism (hardness of electrode) of 104b, 102a.The hardness of electrode influences the deflection of electrode 104a, 104b, 102a or mitigates
The buffer function for the power that adjacent pipe mutually compresses, electrode 104a, 104b, 102a generate the durable of damage to high temperature is maintained
Property.It can be considered that these aspects suitably set length L, the difference of height, hardness of electrode 104a, 104b, 102a.Especially from ensuring
For the viewpoint of buffer function, the difference of height of the length L and the bumps, which is respectively set as installation, has the concaveconvex shape
0.05~5% length of the length of the pipe main body of electrode, is preferably set to 0.1~2% length.The hardness of electrode for example can
It is enough to be set by suitably selected material, thickness, shape of tabular component as electrode etc..Wherein, preferred plate structure
0.001~0.5%, preferably the 0.005 of the length with a thickness of the pipe main body for installing the electrode formed by the tabular component of part~
0.3% length.
(change case)
Fig. 8 is the figure for illustrating the assembling change case of glass substrate manufacturing device.Calciner 101 shown in Fig. 8, transfer tube list
Member 114 and the composition for clarifying pipe unit 112 are identical with the composition of the embodiment.Here, it pays close attention to and the embodiment
It does not exist together and is illustrated.
In change case, before heating calciner 101, glass supply pipe 104, finer 102 and in the embodiment
Gap before the assembling of explanation is compared, between an electrode 104a of glass supply pipe 104 and the end 101b of calciner 101,
And glass supply pipe 104 another electrode 104b and finer 102 electrode 102a between be provided with broad gap.
Also, transfer pipe unit 114 and clarification pipe unit 112 have composition that can be mobile relative to calciner 101.Tool
For body, being provided in transfer pipe unit 114 and the clarification respective bottom of pipe unit 112 can be in the ground moving at manufacture scene
Idler wheel 114c and idler wheel 112c.
In the state shown in fig. 8, in calciner 101, transfer pipe unit 114 and clarification pipe unit 112, glass supply pipe
104 and finer 102 be heated to specific temperature (such as 1000 DEG C or more).But the relief width before heating is to add
Remaining degree after hot glass supply pipe 104 and finer 102.Fig. 9 is the glass supply pipe 104 and finer for illustrating change case
The figure of state after 102 heating.In Fig. 9, remaining gap Z1、Z2。
Transfer pipe unit 114 comprising the glass supply pipe 104 thermally expanded by heating is by using driving (not shown)
Mechanism scroll wheel 114c is mobile towards calciner 101, so that electrode 102a and electrode 104b is contacted, electrode 102a and electrode
104b is clarified pipe main body 102c and glass supply pipe main body 104c clamping, the side being crushed with the recess portion and protrusion of concaveconvex shape
Formula deformation, finer 102 and glass supply pipe 104 are connected.In turn, the clarification pipe unit 112 comprising finer 102 pass through through
Not shown driving mechanism scroll wheel 112c is mobile towards glass supply pipe 104, to make end 101b and electrode 104a
Contact, electrode 104a are clamped by calciner 101 and glass supply pipe main body 104c, are crushed with the recess portion and protrusion of concaveconvex shape
Mode deform, by end 101b and electrode 104a connection.
Similarly exist after the end of calciner 101, glass supply pipe 104, finer 102 connect with the embodiment
Melten glass MG is made in calciner 101, begins flow through glass supply pipe 104 and finer 102.Also, in melten glass MG
By calciner 101, when transferring the end of pipe unit 114, clarification pipe unit 112 mutually abutted, melten glass MG is entered to
It is cooled and solidified in existing gap between the end of abutting and fills the gap.Form like this from calciner 101 to
Glass supply pipe 104 and then the flow path that will not be leaked out to the melten glass MG of finer 102.
In change case, without the thermal expansion in view of glass supply pipe 104 and finer 102 in calciner 101, glass
Gap, therefore more enough assemblings for more simply carrying out device are set between the end of glass supply pipe 104 and finer 102.In addition,
In change case, at least glass supply pipe 104 keeps end against each other in the state of abundant thermal expansion due to heating, therefore
In the manufacture of glass substrate, it can be compared with the embodiment and more effectively inhibit glass supply pipe 104 and finer 102
Deformation, bending, breakage etc..
It this concludes the description of the example to 101 groups of glaze supply pipes 104 of calciner and finer 102, but for example assembling
In the case where finer 102, glass supply pipe 105, stirred tank 103, glass supply pipe 106, formed body 210, or assembling includes
In the case where the finer 102 of more root canals, can also similarly it be connected.On the other hand, in assembling finer 102, glass
It, can also when supply pipe 105, stirred tank 103, glass supply pipe 106, formed body 210 or assembling include the finer 102 of more root canals
To use welding or special welding to be attached.
(glass substrate)
The size of the glass substrate manufactured in present embodiment is not particularly limited, such as linear foot cun and crossfoot cun are respectively
500mm~3500mm, 1500mm~3500mm, 1800~3500mm, 2000mm~3500mm, preferably 2000mm~3500mm.
The thickness of glass substrate is, for example, 0.1~1.1mm, the plate of more preferable 0.75mm very thin rectangular shape below,
Such as more preferable 0.55mm or less, even more preferably 0.45mm thickness below.The lower limit value of the thickness of glass substrate is preferred
0.15mm, more preferable 0.25mm.
< glass forms >
As this glass substrate, the glass substrate of glass composition below is illustrated.That is, being formed with manufacturing glass below
The mode of glass substrate modulate the raw material of melten glass.
SiO255~80 moles of %,
Al2O38~20 moles of %,
B2O30~12 mole of %,
0~17 mole of % of RO (total amount of RO MgO, CaO, SrO and BaO).
With regard to reducing for the viewpoint of percent thermal shrinkage, SiO2It is preferred that 60~75 moles of %, further preferred 63~72 moles of %.
Among RO, preferably MgO be 0~10 mole of %, CaO be 0~15 mole of %, SrO be 0~10%, BaO be 0~
10%.
Alternatively, it is also possible to be include at least SiO2、Al2O3、B2O3And RO and molar ratio ((2 × SiO2)+Al2O3)/((2×
B2O3)+RO) and be 4.5 or more glass.Additionally, it is preferred that at least one comprising MgO, CaO, SrO and BaO and molar ratio (BaO+
SrO)/RO is 0.1 or more.
In addition, the B indicated with mole %2O3Containing ratio 2 times and adding up to the containing ratio of mole % RO indicated
30 moles of % are hereinafter, it is preferred that 10~30 moles of %.
In addition, the containing ratio of the alkali metal oxide in the glass substrate of glass composition be also possible to 0 mole of % with
Upper and 0.4 mole of % or less.
In addition, oxide (tin oxide, oxygen of the metal for adding up to the valence mumber comprising 0.05~1.5 mole of % to change in glass
Change iron), it is substantially free of As2O3、Sb2O3And PbO, but it is not necessarily but any.
In addition, the glass substrate as manufactured by present embodiment is it is preferable to use the Boroalumino silicate glasses of alkali-free or containing micro
The glass of alkali.
The glass substrate as manufactured by present embodiment for example preferably comprises the alkali-free glass containing consisting of.
Glass as the glass substrate manufactured by present embodiment forms, such as can enumerate following (with quality % table
Show).
Include SiO2: 50~70% (preferably 57~64%), Al2O3: 5~25% (preferably 12~18%), B2O3: 0~
15% (preferably 6~13%) can also and then arbitrarily include composition as shown below.As the ingredient for arbitrarily including, Ke Yilie
Lift MgO:0~10% (preferably 0.5~4%), CaO:0~20% (preferably 3~7%), SrO:0~20% (preferably 0.5~8%,
More preferable 3~7%), BaO:0~10% (preferably 0~3%, more preferable 0~1%), ZrO2: 0~10% (preferably 0~4%, more
It is preferred that 0~1%).It in turn, more preferably include R'2O: more than 0.10% and 2.0% or less, (wherein, R' is selected from Li, Na and K
It is at least one).
Or preferably comprise SiO2: 50~70% (preferably 55~65%), B2O3: 0~10% (preferably 0~5%, 1.3~
5%), Al2O3: 10~25% (preferably 16~22%), MgO:0~10% (preferably 0.5~4%), CaO:0~20% (preferably 2
~10%, 2~6%), SrO:0~20% (preferably 0~4%, 0.4~3%), BaO:0~15% (preferably 4~11%), RO:5
~20% (preferably 8~20%, 14~19%) (wherein, R is at least one selected from Mg, Ca, Sr and Ba).In turn, more preferably
Include R'2O is more than 0.10% and 2.0% or less (wherein, R' is at least one selected from Li, Na and K).
< Young's modulus >
As the Young's modulus of the glass substrate as manufactured by present embodiment, such as preferred 72GPa or more, more preferably
75GPa or more, even more preferably 77GPa or more.
< strain point >
As the strain rate of the glass substrate as manufactured by present embodiment, such as preferably 650 DEG C or more, more preferable 680
DEG C or more, even more preferably 700 DEG C or more, 720 DEG C or more.
< percent thermal shrinkage >
The percent thermal shrinkage of the glass substrate as manufactured by present embodiment be, for example, 50ppm hereinafter, it is preferred that 40ppm hereinafter,
More preferable 30ppm is hereinafter, even more preferably 20ppm or less.
Manufactured glass substrate is suitable as including glass for flat panel display substrate, curved-surface display in present embodiment
Display glass substrate including device glass substrate, such as to be suitable as glass for liquid crystal display substrate or organic EL aobvious
Show the glass substrate of device.In turn, glass substrate manufactured in present embodiment is adapted for use in making for fine display
It is aobvious with the oxide semiconductor of the oxide semiconductors such as IGZO (Indium Gallium Zinc Oxide, indium gallium zinc oxide)
Show device glass substrate and uses LTPS (Low-Temperature Polycrystalline Silicon, low temperature polycrystalline silicon)
The LTPS display glass substrate of semiconductor.
In addition, glass substrate manufactured in present embodiment can also apply to cover glass, magnetic disk glass, the sun
Battery glass substrate etc..
More than, the manufacturing method of glass substrate manufacturing device and glass substrate of the invention is described in detail, but
The present invention is not limited to the embodiments, naturally it is also possible to be subject to various change without departing from the spirit and scope of the invention
Good or change.
[description of symbols]
100 fusing devices
101 calciners
101a outflux
The end 101b
101d bucket
102 finers
102a, 104a, 104b electrode
103 stirred tanks
103a blender
104,105,106 glass supply pipe
104c pipe extension
112 clarification pipe units
112a, 114a high alumina cement
112b, 114b heat insulating component
114 transfer pipe units
124 concaveconvex shapes
The protrusion 124a
124b recess portion
200 forming devices
210 formed bodies
300 disconnecting devices
Claims (7)
1. a kind of manufacturing method of glass substrate, characterized by comprising:
Step is melted, glass raw material is melted using calciner and makes melten glass；
Processing step is handled the melten glass using melten glass processing unit；And
The processed melten glass is configured to sheet glass using forming device by forming step；
For the flow path of the melten glass formed between the end of the calciner and the forming device, at the melten glass
Reason device is constituted and being connected more root canals between the pipe and between the end of the calciner；
The 1st pipe in the pipe includes:
Pipe main body；And
The electrode of Flange-shaped Parts, it is prominent to outside the pipe main body, electrified regulation is carried out to the pipe main body；
The electrode of the Flange-shaped Parts with by the pipe main body and be connected to the 1st pipe the 2nd pipe and the calciner described in
The end of the pipe main body is arranged in the mode of either one or two of end clamping；
The electrode of the Flange-shaped Parts is at least by the institute in the end of the pipe main body and the 2nd pipe and the calciner
State the concave-convex that the part of a clamping has the recess portion of the protrusion and recess that bloat along the extending direction of the flow path adjacent
Shape；And
Before the melting step, the 1st pipe is heated and makes its thermal expansion, utilizes the pipe main body and described
One clamping concaveconvex shape in the end of 2 pipes and the calciner makes its deformation, thus by the 1st pipe
With one connection in the end of the 2nd pipe and the calciner.
2. the manufacturing method of glass substrate according to claim 1 is matched wherein the melten glass processing unit also has
Set the heat insulating component around the pipe is respective；
The electrode of the Flange-shaped Parts with by the 2nd around the 1st heat insulating component and the 2nd pipe around the 1st pipe every
The mode of hot component clamping is arranged；
The electrode of the Flange-shaped Parts is in the Flange-shaped Parts electrode clamped by the 1st heat insulating component and the 2nd heat insulating component
Peripheral part also there is the concaveconvex shape；And
When being heated to the 1st pipe, the 1st heat insulating component is heated and makes its thermal expansion, using the described 1st every
The part that hot component and the 2nd heat insulating component clamping are located at the concaveconvex shape of the peripheral part of the Flange-shaped Parts electrode makes it
Deformation.
3. the manufacturing method of glass substrate according to claim 1 or 2, wherein the electrode of the Flange-shaped Parts is with described recessed
The shape that convex form repeats on the extending direction of the Flange-shaped Parts electrode；And
The length of the repetitive unit of the concaveconvex shape of the protrusion and the direction of recess portion arrangement is less than the pipe main body
Diameter.
4. the manufacturing method of glass substrate according to any one of claim 1 to 3, wherein the electrode of the Flange-shaped Parts with
It is configured by the mode of the pipe main body and the 2nd tube grip；
The electrode of the pipe main body, the Flange-shaped Parts, the protrusion, the recess portion, the concaveconvex shape are being referred to as the 1st
When pipe main body, the electrode of the 1st Flange-shaped Parts, the 1st protrusion, the 1st recess portion, 1 concaveconvex shape, the 2nd pipe includes:
2nd pipe main body；And
The electrode of 2nd Flange-shaped Parts, it is prominent to outside the 2nd pipe main body；
The electrode of 2nd Flange-shaped Parts by the electrode of the 2nd pipe main body and the 1st Flange-shaped Parts of the 1st pipe to be clamped
Mode the end of the 2nd pipe main body is set；
The electrode of 2nd Flange-shaped Parts at least has in the part clamped by the electrode of the 2nd pipe main body and the 1st Flange-shaped Parts
There is 2nd concaveconvex shape adjacent along the 2nd protrusion of the extending direction bulging of the flow path and the second recesses of recess；And
When heating to the 1st pipe, it is recessed that the described 2nd is clamped using the electrode of the 2nd pipe main body and the 1st Flange-shaped Parts
Convex form makes its deformation, so that the 1st pipe be connected with the 2nd pipe.
5. a kind of manufacturing method of glass substrate, characterized by comprising:
Step is melted, glass raw material is melted using calciner and makes melten glass；
Processing step is handled the melten glass using melten glass processing unit；And
The processed melten glass is configured to sheet glass using forming device by forming step；
For the flow path of the melten glass formed between the end for the treatment trough for being connected to the calciner and the forming device,
The melten glass processing unit is by being connected more root canals between the pipe and between the end of the treatment trough
And constitute；
The 1st pipe in the pipe includes:
Pipe main body；And
The electrode of Flange-shaped Parts, it is prominent to outside the pipe main body, electrified regulation is carried out to the pipe main body；
The electrode of the Flange-shaped Parts with by the pipe main body and be connected to the 1st pipe the 2nd pipe and the treatment trough described in
The end of the pipe main body is arranged in the mode of either one or two of end clamping；
The electrode of the Flange-shaped Parts is at least by the institute in the end of the pipe main body and the 2nd pipe and the treatment trough
State the concave-convex that the part of a clamping has the recess portion of the protrusion and recess that bloat along the extending direction of the flow path adjacent
Shape；And
Before the melting step, the 1st pipe is heated and makes its thermal expansion, utilizes the pipe main body and described
One clamping concaveconvex shape in the end of 2 pipes and the treatment trough makes its deformation, thus by the 1st pipe
With one connection in the end of the 2nd pipe and the treatment trough.
6. a kind of glass substrate manufacturing device, it is characterised in that include: calciner melts glass raw material and makes melting glass
Glass；
Melten glass processing unit handles the melten glass；And
The processed melten glass is configured to sheet glass by forming device；
For the flow path of the melten glass formed between the end of the calciner and the forming device, the melting glass
Glass processing unit is constituted and being connected more root canals between the pipe and between the end of the calciner
's；
The 1st pipe in the pipe includes:
Pipe main body；And
The electrode of Flange-shaped Parts, it is prominent to outside the pipe main body；
The electrode of the Flange-shaped Parts with by the pipe main body and be connected to the 1st pipe the 2nd pipe and the calciner described in
The end of the pipe main body is arranged in the mode of either one or two of end clamping；
The electrode of the Flange-shaped Parts is at least by the institute in the end of the pipe main body and the 2nd pipe and the calciner
State the concave-convex that the part of a clamping has the recess portion of the protrusion and recess that bloat along the extending direction of the flow path adjacent
Shape；And
In the state of the 1st pipe thermal expansion, the concaveconvex shape is by the 1st pipe and the 2nd pipe and the calciner
The end in one clamping and deform, thus will it is described 1st pipe and it is described 2nd pipe and the calciner described in
One connection in end.
7. a kind of glass substrate manufacturing device, it is characterised in that include: glass raw material is melted and makes melting glass by calciner
Glass；
Melten glass processing unit handles the melten glass；And
The processed melten glass is configured to sheet glass by forming device；
For the melten glass that is formed between the end for the treatment trough for being connected to the calciner and the forming device
Flow path, the melten glass processing unit be by make more root canals between the pipe and with the end of the treatment trough it
Between be connected and constitute；
The 1st pipe in the pipe includes:
Pipe main body；And
The electrode of Flange-shaped Parts, it is prominent to outside the pipe main body；
The electrode of the Flange-shaped Parts with by the pipe main body and be connected to the 1st pipe the 2nd pipe and the treatment trough described in
The end of the pipe main body is arranged in the mode of either one or two of end clamping；
The electrode of the Flange-shaped Parts is at least by the institute in the end of the pipe main body and the 2nd pipe and the treatment trough
State the concave-convex that the part of a clamping has the recess portion of the protrusion and recess that bloat along the extending direction of the flow path adjacent
Shape；And
In the state of the 1st pipe thermal expansion, the concaveconvex shape is by the 1st pipe and the 2nd pipe and the treatment trough
The end in one clamping and deform, thus will it is described 1st pipe and it is described 2nd pipe and the treatment trough described in
One connection in end.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017129694 | 2017-06-30 | ||
| JP2017-129694 | 2017-06-30 | ||
| JP2018119666A JP6630782B2 (en) | 2017-06-30 | 2018-06-25 | Glass substrate manufacturing method and glass substrate manufacturing apparatus |
| JP2018-119666 | 2018-06-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109205997A true CN109205997A (en) | 2019-01-15 |
| CN109205997B CN109205997B (en) | 2021-07-09 |
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ID=64989596
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810690275.0A Active CN109205997B (en) | 2017-06-30 | 2018-06-28 | Method for manufacturing glass substrate, and glass substrate manufacturing apparatus |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR102107900B1 (en) |
| CN (1) | CN109205997B (en) |
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| CN113727949A (en) * | 2019-06-17 | 2021-11-30 | 日本电气硝子株式会社 | Glass transfer device |
| CN114873905A (en) * | 2022-05-30 | 2022-08-09 | 彩虹显示器件股份有限公司 | Device and method for managing temperature rise and expansion of substrate glass channel |
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| JP7465864B2 (en) | 2018-09-27 | 2024-04-11 | コーニング インコーポレイテッド | Modular molten glass supply system |
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Also Published As
| Publication number | Publication date |
|---|---|
| KR102107900B1 (en) | 2020-05-08 |
| KR20190003381A (en) | 2019-01-09 |
| CN109205997B (en) | 2021-07-09 |
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