CN109187503A - Postposition is divided pupil confocal laser Raman, LIBS spectrum micro imaging method and device - Google Patents
Postposition is divided pupil confocal laser Raman, LIBS spectrum micro imaging method and device Download PDFInfo
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- CN109187503A CN109187503A CN201811343477.4A CN201811343477A CN109187503A CN 109187503 A CN109187503 A CN 109187503A CN 201811343477 A CN201811343477 A CN 201811343477A CN 109187503 A CN109187503 A CN 109187503A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
- G01N21/718—Laser microanalysis, i.e. with formation of sample plasma
Abstract
Postposition light splitting pupil confocal laser Raman, LIBS spectrum micro imaging method and device disclosed by the invention, belong to confocal microscopic imaging and light spectrum image-forming field of measuring technique.The present invention is by postposition light splitting pupil confocal laser micro-imaging technique in conjunction with Raman, LIBS spectrographic detection technology, the imaging of high-space resolution form is carried out to sample using the small focal beam spot of the postposition light splitting pupil confocal microscope handled through super resolution technology, microscopic spectrum detection is carried out to focal beam spot excitation spectrum (Raman spectrum, induced breakdown spectroscopy) using spectrum investigating system, utilizes the high-space resolution and highly sensitive imaging and detection of the mutual supplement with each other's advantages of the multispectral detection of laser and the complete component information of structure fusion realization sample microcell and structural parameters.The present invention can provide a completely new effective technical way for the fields material composition such as biomedicine, material science and form imaging detection.
Description
Technical field
The invention belongs to confocal microscopic imaging technologies and spectral imaging technology technical field of imaging, and postposition is divided pupil laser
Confocal microscopic imaging technology, Raman spectrum imaging technology are combined with laser induced breakdown spectroscopy imaging technique, after being related to one kind
Set light splitting pupil confocal laser Raman, LIBS spectrum micro imaging method and device, biomedicine, material science, physical chemistry,
The fields such as mineral products, minute manufacturing have wide practical use.
Background technique
The intense pulse laser of laser induced breakdown spectroscopy, which focuses on sample surfaces, can make sample ionization, sample can be excited to produce
Raw plasma can obtain the atom and small molecule element group of sample by the spectrum that detection energy of plasma decline gives off
At information；It can measure the molecule excitation spectrum of sample using laser Raman spectroscopy technology, obtain chemical bond and molecule in sample
Structural information.Laser Raman spectroscopy technology, laser induced breakdown spectroscopy (LIBS) technology are combined and may be implemented to have complementary advantages
It is merged with structure function, realizes a variety of groups of sample using multispectral (the Raman spectrum and laser induced breakdown spectroscopy) integration technology of laser
Divide information detection.
But there are problems following prominent for existing spectrographic detection technology:
1) due to being focused using simple laser come desorption ionization sample, thus its that there are still laser focal beam spots is big, visits
Survey the problems such as spatial resolution is not high；
2) long the time required to Raman spectrum imaging, with respect to sample drifting problem often occurs for focal beam spot axial position；
3) can not micro-raman spectra to sample and complex component carry out in situ measurement, result constrains sample micro-area information
Accurate complete acquisition.
Postposition is divided pupil confocal laser technology and is detected using illumination and the non-line structure altogether of detection optical path, is not only significantly mentioned
The high azimuthal resolution and Focus accuracy of optical path, realizes the high-resolution imaging detection of sample topography, and can effectively inhibit
Backscattering interference, improves spectrographic detection signal-to-noise ratio.
Based on this, the present invention proposes that a kind of postposition is divided pupil confocal laser Raman, LIBS spectrum micro imaging method and dress
It sets, innovation is: pupil confocal laser microtechnic and LR laser raman will be divided with the postposition of high-space resolution ability for the first time
Spectral technique and laser induced breakdown spectroscopy (LIBS) technology Detection Techniques blend, it can be achieved that sample microcell high spatial point
Distinguish the imaging and detection with highly sensitive pattern, component.
A kind of postposition light splitting pupil confocal laser Raman of the present invention, LIBS spectrum micro imaging method and device can be biology doctor
The pattern in the fields such as, material science, physical chemistry, mineral products, minute manufacturing, component imaging detection provide one it is completely new effective
Technological approaches.
Summary of the invention
The purpose of the invention is to improve the spatial resolving power of light spectrum image-forming, inhibit focal beam spot phase in imaging process
Drift to sample proposes that a kind of postposition is divided pupil confocal laser Raman, LIBS spectrum micro imaging method and device, to same
When obtain measurand micro-raman spectra information and component information.The purpose of the present invention is what is be achieved through the following technical solutions.
Postposition of the invention is divided pupil confocal laser Raman, LIBS spectrum micro imaging method, after high-space resolution
The focal beam spot for setting light splitting pupil confocal laser microscopic system carries out axial fixed-focus and imaging to sample, utilizes Raman spectroscopic detection system
The Raman spectrum generated to postposition light splitting pupil confocal laser microscopic system focal beam spot excitation sample of uniting detects, and utilizes laser
Induced breakdown spectroscopy detection system is divided pupil confocal laser microscopic system focal beam spot desorption ionization sample to postposition and generates
Plasma emission spectroscopy is detected, and then then realizes detected sample with analysis is compared by the fusion of detection data information again
The imaging and detection of product microcell high-space resolution and highly sensitive pattern and component, comprising the following steps:
Step 1: light-source system is collimated light beam by collimation lens collimation, collimated light beam passes through compression focal beam spot system
System is reflected through Amici prism transmission, dichroscope A and is focused on sample by measurement object lens；
Step 2: computer control precise three-dimensional working platform is made to drive sample along measuring surface normal direction in measurement object
Mirror foci nearby moves up and down, and sample reflection light is reflected by dichroscope A, after Amici prism reflection, through in postposition pupil
Pupil, detection object lens and relaying amplifying lens are collected, convergence is received after penetrating pin hole by light intensity detector, at light intensity signal
Reason device obtains postposition light splitting pupil confocal laser axial strength curve；
Step 3: can be accurately positioned sample point axial direction using postposition light splitting pupil confocal laser axial strength curve
Elevation information；
Step 4: computer accurately corresponds to object lens according to " extreme point " of postposition light splitting pupil confocal laser axial strength curve
This characteristic of focal beam spot focus, computer control precise three-dimensional working platform drive sample to transport along measuring surface normal direction
It is dynamic, focus on the focal beam spot for measuring object lens on sample；
Step 5: using the Raman spectroscopy detector of Raman spectroscopic detection system to through dichroscope A transmission, dichroscope
The raman spectral signal light beam Raman spectrum that B transmission and Raman-Coupled lens are collected is detected, and corresponding focal beam spot area is measured
The sample chemical key and molecular structure information in domain；
Step 6: changing collimated light beam light illumination mode, the microcell desorption ionization of sample is excited to generate plasma plume；
Step 7: using the LIBS spectral detector of LIBS spectrum investigating system to through dichroscope A transmission, dichroscope
The laser induced breakdown spectroscopy signal beams that B reflection and LIBS coupled lens are collected are detected, and corresponding focal beam spot area is measured
The sample element in domain forms information；
Step 8: the laser focal beam spot position sample that computer measures postposition light splitting pupil confocal laser detection system is high
Spend information, the laser of laser Raman spectroscopy detection system detection focuses the Raman spectral information and LIBS spectrum investigating system of microcell
The laser induced breakdown spectroscopy information that the laser of detection focuses microcell carries out fusion treatment, then obtains the height of focal beam spot microcell
Degree, Raman spectrum and LIBS spectral information；
Step 9: computer control precise three-dimensional working platform makes to measure the next to be measured of object focal point alignment sample
Then region is operated by step 2~step 8, obtain the height and spectral information of next focal zone to be measured；
Measured Step 10: repeating step 9 until all tested points on sample, then using computer into
Row processing obtains sample topographical information and complete component information.In method of the invention, make parallel described in step 1
Beam shaping is annular beam, the annular beam again through Amici prism transmission, dichroscope A reflection, measurement object lens focus on by
Desorption ionization generates plasma plume in sample.
In the method for the invention, the pupil is D type postposition pupil or round postposition pupil；Pupil is collected as D type receipts
Collect pupil or circular collection pupil；D type postposition pupil and D type are collected pupil and are used in conjunction with；Round postposition pupil and circular collection
Pupil is used in conjunction with.
In the methods of the invention, that the object lens of the measurement to different NA can be realized only is handled by computer system software
Match, without carrying out any hardware adjustment to system.
In the methods of the invention, the compression focal beam spot system vector beam generating system and pupil for generating vector beam
Filter substitution.
Postposition light splitting pupil confocal laser Raman, LIBS spectrum micro imaging method and device disclosed by the invention, including produce
The light-source system of raw excitation beam, Amici prism, dichroscope A and the dichroscope A being sequentially placed along light source exit direction
The identical measurement object lens of reflection direction, precision three-dimensional workbench, dichroscope A reflect dichroscope B, the Raman light of opposite direction
Detection system is composed, the postposition light splitting pupil of the LIBS spectral measurement system of dichroscope B reflection direction, Amici prism reflection direction swashs
Light confocal measuring system and computer processing system.
Postposition of the invention is divided pupil confocal laser Raman, LIBS spectrum microscopic imaging device, optional following two mode
It realizes:
Mode one: postposition light splitting pupil confocal laser detecting module is made of relaying amplifying lens, pin hole and light intensity detector,
Wherein pin hole is located in the image planes of relaying amplifying lens.
Mode two: light splitting pupil detecting module is made of relaying amplifying lens and ccd detector, and wherein search coverage is located at
The image plane center of ccd detector.
Device of the present invention, the arrow of the compression focal beam spot system generation vector beam placed along incident light axis direction
Measure light-beam generator and iris filter substitution.
Device of the present invention, light-source system by pulse laser, collector lens, collector lens focal point Optic transmission fiber
Substitution simultaneously, introduces outgoing beam attenuator in laser focusing system, draws in postposition light splitting pupil confocal laser detection system
Enter to detect beam attenuator.
The utility model has the advantages that
1) " extreme point " of pupil confocal laser axial strength curve and the focus of high-acruracy survey object lens are divided by postposition
This characteristic is accurately corresponded to, accurate fixed-focus is realized to sample, is able to suppress existing spectrometer because in long-time light spectrum image-forming
Drifting problem of the focal beam spot with respect to sample；
2) detection for combining laser induced breakdown spectroscopy can overcome existing laser Raman spectroscopy technology can not be to sample member
The deficiency that prime information is detected realizes the excellent of multispectral (Raman spectrum and laser induced breakdown spectroscopy) the component imaging detection of laser
Gesture complementation and structure function fusion, can obtain more comprehensively microcell component information；
3) the preparatory fixed-focus of sample is carried out using " extreme point " of postposition light splitting pupil confocal laser axial strength curve, makes minimum
Focal beam spot focuses on sample surfaces, can be realized sample microcell high-space resolution spectrographic detection and microcell micro-imaging, effectively
Ground plays the potential differentiated between postposition light splitting pupil confocal laser system altitude；
4) using compression focal beam spot technology, it can be improved the spatial resolving power of light spectrum image-forming；
5) signal is obtained due to the method using division focal spot, can be detected on focal plane by changing in image detection system
The parameter of set tiny area is to match the reflectivity of different samples, so as to extend its application field；It can be with
The matching that can realize the object lens of the measurement to different NA values is only handled by computer system software, without again to system
Any hardware adjustment is carried out, the versatility of instrument is advantageously implemented.
Detailed description of the invention
Fig. 1 is that postposition of the present invention is divided pupil confocal laser Raman, LIBS spectrum micro imaging method schematic diagram；
Fig. 2 is that the postposition of the embodiment of the present invention 2 is divided pupil confocal laser Raman, LIBS spectrum micro imaging method and dress
Set schematic diagram；
Fig. 3 is that the postposition of the embodiment of the present invention 3 is divided pupil confocal laser Raman, LIBS spectrum micro imaging method and dress
Set schematic diagram；
Fig. 4 is that postposition is divided pupil confocal laser axial strength curve.
Wherein: 1- light-source system, 2- collimation lens, 3- collimated light beam, 4- compression focal beam spot system, 5- Amici prism,
6- dichroscope A, 7- measure object lens, 8- sample, 9- plasma plume, 10- precision three-dimensional workbench, 11-D type postposition pupil,
12-D type collects pupil, 13- detection object lens, 14- postposition light splitting pupil confocal laser detection system, 15- and relays amplifying lens, 16-
Pin hole, 17- light intensity detector, 18- amplification Airy, 19- search coverage, 20- postposition light splitting pupil confocal laser axial strength are bent
Line, 21- dichroscope B, 22-LIBS spectrographic detection module, 23-LIBS coupled lens, 24-LIBS spectral detector, 25- Raman
Spectrum investigating system, 26- Raman-Coupled lens, 27- Raman spectroscopy detector, 28- raman spectral signal light beam, 29-LIBS light
Spectrum signal light beam, 30- computer, 31- vector optical generator, 32- iris filter, 33- circle postposition pupil, 34- circle are received
Collect pupil, 35-CCD detector, 36- pulse laser, 37- collector lens, 38- Optic transmission fiber, 39- outgoing beam attenuator,
40- detects beam attenuator.
Specific embodiment
Invention is further described in detail with reference to the accompanying drawings and examples.
Embodiment 1
As shown in Figure 1, placing D type postposition on detection 13 pupil plane of object lens collects pupil 11, light-source system 1 selects point light
Source, point light source outgoing excitation beam by collimation lens 2, compression focal beam spot system 4, Amici prism 5, dichroscope A6 with
It after measuring object lens 7, is focused on sample 8, computer 30 controls precision three-dimensional workbench 10 and sample 8 is driven to measure
7 near focal point of object lens moves up and down, and the light through sample reflection passes through D type by dichroscope A6 reflection, the reflection of Amici prism 5
D type in postposition pupil 11 collects pupil 12, detection object lens 13 and relaying amplifying lens 14, converges after penetrating pin hole 16 by light intensity
Detector 17 receives, and obtains postposition light splitting pupil confocal laser axial strength curve 20 by light intensity signal processor；
The axial height of sample 8 can be accurately positioned using postposition light splitting pupil confocal laser axial strength curve 20
Information；
Using Raman spectroscopic detection system 25 to through dichroscope A6 transmission, dichroscope B21 transmission and Raman-Coupled
The raman spectral signal light beam 28 that lens 26 are collected is detected, and the sample chemical key and molecule in corresponding focal beam spot region are measured
Structural information；
Change point light source operating mode, improve illumination intensity, the microcell desorption ionization of excitation sample 8 generates plasma
Body feathers 9；
It is coupled thoroughly through dichroscope A6 transmission, dichroscope B21 reflection and LIBS using 22 Duis of LIBS spectrum investigating system
The LIBS spectral signal light beam 29 that mirror 23 is collected is detected, and the sample element composition information in corresponding focal beam spot region is measured；
The laser that postposition light splitting pupil confocal laser detection system measures is focused micro-raman spectra information, Raman light by computer 30
Raman spectral information, the focusing of 22 exploring laser light of LIBS spectrum investigating system for composing the laser focusing microcell that detection system 25 detects are micro-
The laser induced breakdown spectroscopy information in area obtains height, Raman spectrum and the LIBS spectral information of focal beam spot microcell；
Computer 30, which controls precision three-dimensional workbench 10, to be made to measure next region to be measured that object lens 7 are directed at sample 8,
Then height, Raman spectrum and the LIBS spectral information of next focal zone to be measured are obtained；
Until all tested points on sample 8 are measured, then computer 30 is utilized to carry out data fusion and figure
As reconstruction processing, sample topographical information and complete component information can be obtained.
Embodiment 2
As shown in Fig. 2, compressing focal beam spot in postposition light splitting pupil confocal laser Raman, LIBS spectrum microscopic imaging device
System 4 is substituted by vector beam generating system 31, iris filter 32, and D type in D type postposition pupil 11 collects pupil 12 can be by
Circular collection pupil 34 in round postposition pupil 33 substitutes, and postposition is divided pin hole 16 and light in pupil confocal laser detecting module
Strong detector 17 can be replaced by ccd detector 35, and wherein search coverage is located at the image plane center of ccd detector.
Remaining is identical as the embodiment of embodiment 1.
Embodiment 3
As shown in figure 3, point light source 1 is by pulse in postposition light splitting pupil confocal laser Raman, LIBS spectrum microscopic imaging device
Laser 36, collector lens 37,37 focal point of collector lens Optic transmission fiber 38 substitution simultaneously, introduced in laser focusing system
Outgoing beam attenuator 39 introduces detection beam attenuator 40 in postposition light splitting pupil confocal laser detection system.By emergent light
Beam attenuation device 39 and detection beam attenuator 40 constitute Light intensity regulating system, for focal beam spot and the spy of light intensity detector 17 of decaying
The spot intensity of survey, to adapt to light intensity demand when sample surfaces positioning.
Remaining imaging method and process are same as Example 1.
A specific embodiment of the invention is described in conjunction with attached drawing above, but these explanations cannot be understood to limit
The scope of the present invention.Protection scope of the present invention is limited by appended claims, any in the claims in the present invention base
Change on plinth is all protection scope of the present invention.
Claims (8)
1. postposition is divided pupil confocal laser Raman, LIBS spectrum micro imaging method, it is characterised in that: total using high-space resolution
The focal beam spot of burnt microscopic system carries out axial fixed-focus and imaging to sample (8), using Raman spectroscopic detection system to rear
Set light splitting pupil confocal laser microscopic system focal beam spot excitation sample (8) generate Raman spectrum detected, using swash
Photoinduction breakdown spectral detection system is divided pupil confocal laser microscopic system focal beam spot desorption ionization sample to postposition and generates
Plasma emission spectroscopy detected, then again by the fusion of detection data information and compare analysis then realize it is tested
The imaging and detection of sample (8) microcell high-space resolution and highly sensitive pattern, component, comprising the following steps:
Step 1: light-source system (1) is collimated light beam (3) by collimation lens (2) collimation, collimated light beam (3) is poly- by compression
Burnt spot system (4) reflects through Amici prism transmission (5), dichroscope A (6) and focuses on sample by measurement object lens (7)
(8) on；
Step 2: computer (30) control precision three-dimensional workbench (10) is made to drive sample (8) along measuring surface normal direction
It is moved up and down in measurement object lens (7) near focal point, through sample (8) reflection light by dichroscope A (6) reflection, light splitting
After prism (5) reflection, through collection pupil, detection object lens (13), relaying amplifying lens (15) in postposition pupil, convergence penetrates needle
It is received behind hole (16) by light intensity detector (17), obtains postposition light splitting pupil confocal laser axial strength by light intensity signal processor
Curve (20):
Step 3: can be accurately positioned sample (8) point using postposition light splitting pupil confocal laser axial strength curve (20)
Axial height information；
Step 4: " extreme point " position control of computer (30) according to postposition light splitting pupil confocal laser axial strength curve (20)
Precision three-dimensional workbench (10) drives sample (8) to move along measuring surface normal direction, makes the focal beam spot for measuring object lens (7)
It focuses on sample (8)；
Step 5: using Raman spectroscopic detection system (25) Raman spectroscopy detector (27) to through dichroscope A (6) transmission,
Raman spectral signal light beam (28) Raman spectrum that dichroscope B (21) projection and Raman-Coupled lens (23) are collected is visited
It surveys, measures the sample chemical key and molecular structure information in corresponding focal beam spot region；
Step 6: changing collimated light beam (3) light illumination mode, the microcell desorption ionization of excitation sample (8) generates plasma
Plumage (9)；
Step 7: using LIBS spectrum investigating system (22) LIBS spectral detector (24) to through dichroscope A (6) transmission,
The laser induced breakdown spectroscopy signal beams (29) that dichroscope B (21) reflection and LIBS coupled lens (23) are collected are visited
It surveys, measures sample (8) the element composition information in corresponding focal beam spot region；
Step 8: the laser focal beam spot that computer (30) measures postposition light splitting pupil light splitting pupil confocal laser detection system (14)
The Raman spectral information for the laser focusing microcell that position height of specimen information, laser Raman spectroscopy detection system (22) detect,
The laser of LIBS spectrum investigating system (25) detection focuses the LIBS spectral information of microcell, then obtains the height of focal beam spot microcell
Degree, Raman spectrum and LIBS spectral information；
Step 9: computer (30) control precision three-dimensional workbench (10) makes to measure object lens (7) focus alignment sample (8)
Next region to be measured, is then operated by step 2~step 8, and height, the Raman of next focal zone to be measured are obtained
Spectrum and LIBS spectral information；
Step 10: repetition step 9 is measured until all tested points on sample (8), then computer (30) are utilized
It is handled and obtains sample topographical information and complete component information.
2. postposition according to claim 1 is divided pupil confocal laser Raman, LIBS spectrum micro imaging method, feature exists
In: so that collimated light beam described in step 1 (3) is shaped as annular beam, the annular beam again through Amici prism (5) transmission, two to
Look mirror A (6) reflection, measurement object lens (7) focus on desorption ionization on sample (8) and generate plasma plume (9).
3. postposition according to claim 1 is divided pupil confocal laser Raman, LIBS spectrum micro imaging method, feature exists
In: the postposition pupil is D type postposition pupil (11) or round postposition pupil (33)；Collecting pupil is that D type collects pupil (12)
Or circular collection pupil (34)；D type postposition pupil (11) and D type are collected pupil (12) and are used in conjunction with；Round postposition pupil (33)
It is used in conjunction with circular collection pupil (34).
4. postposition according to claim 1 is divided pupil confocal laser Raman, LIBS spectrum micro imaging method, feature exists
In: compression focal beam spot system (4) vector optical generator (31) and iris filter (32) substitution for generating vector beam.
5. postposition is divided pupil confocal laser Raman, LIBS spectrum microscopic imaging device, it is characterised in that: including generating excitation beam
Light-source system (1), the Amici prism (5), dichroscope A (6) and the dichroscope A that are sequentially placed along light source exit direction
(6) the identical measurement object lens (7) of reflection direction, precision three-dimensional workbench (10), dichroscope A (6) reflect the two of opposite direction
To Look mirror B (21), Raman spectroscopic detection system (25), the LIBS spectral measurement system (22) of dichroscope B (21) reflection direction,
Postposition light splitting pupil confocal laser measuring system (14) of Amici prism (5) reflection direction and computer (30) processing system.
6. postposition according to claim 5 is divided pupil confocal laser Raman, LIBS spectrum microscopic imaging device, feature exists
In: postposition is divided pupil confocal laser detecting module (14) by relaying amplifying lens (15), pin hole (16) and light intensity detector (17)
It constitutes, wherein pin hole (16) is located in the image planes of relaying amplifying lens (15).
7. postposition according to claim 5 is divided pupil confocal laser Raman, LIBS spectrum microscopic imaging device, feature exists
In: postposition is divided pupil confocal laser detecting module (14) and is made of relaying amplifying lens (15) and ccd detector (35), wherein visiting
Survey the image plane center that region is located at ccd detector (35).
8. postposition according to claim 5 is divided pupil confocal laser Raman, LIBS spectrum microscopic imaging device, feature exists
In: light-source system (1) by pulse laser (36), collector lens (37), collector lens (37) focal point Optic transmission fiber (38)
Substitution simultaneously, introduces outgoing beam attenuator (39) in laser focusing system, is divided pupil confocal laser detection system in postposition
Middle introducing detects beam attenuator (40)；Light intensity regulating is constituted by outgoing beam attenuator (39) and detection beam attenuator (40)
System, for the spot intensity of decay focal beam spot and light intensity detector (17) detection, to adapt to light when sample surfaces positioning
Strong strength demand.
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- 2018-11-13 CN CN201811343477.4A patent/CN109187503A/en active Pending
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| DE69117455D1 (en) * | 1990-12-03 | 1996-04-04 | Nikon Corp | Confocal laser scanning microscope with contrast by difference from interference signals |
| US5804813A (en) * | 1996-06-06 | 1998-09-08 | National Science Council Of Republic Of China | Differential confocal microscopy |
| CN103439254A (en) * | 2013-09-06 | 2013-12-11 | 北京理工大学 | Spectroscopic pupil laser confocal Raman spectrum testing method and device |
| CN104677830A (en) * | 2015-03-03 | 2015-06-03 | 北京理工大学 | Spectrophotometric pupil confocal-photoacoustic microimaging device and method |
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