CN109186821A - A kind of contactless micro-vibration and device for pressure measurement - Google Patents
A kind of contactless micro-vibration and device for pressure measurement Download PDFInfo
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- CN109186821A CN109186821A CN201810828368.5A CN201810828368A CN109186821A CN 109186821 A CN109186821 A CN 109186821A CN 201810828368 A CN201810828368 A CN 201810828368A CN 109186821 A CN109186821 A CN 109186821A
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- laser beam
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- 238000009530 blood pressure measurement Methods 0.000 title claims abstract description 11
- 239000013307 optical fiber Substances 0.000 claims abstract description 16
- 230000003287 optical effect Effects 0.000 claims abstract description 15
- 239000000835 fiber Substances 0.000 claims description 33
- 239000011521 glass Substances 0.000 claims description 18
- 230000005540 biological transmission Effects 0.000 claims description 11
- 238000004088 simulation Methods 0.000 claims description 6
- 239000007769 metal material Substances 0.000 claims description 4
- 230000002596 correlated effect Effects 0.000 claims description 3
- 230000008859 change Effects 0.000 abstract description 5
- 238000005259 measurement Methods 0.000 abstract description 4
- 230000000694 effects Effects 0.000 abstract 1
- 230000005284 excitation Effects 0.000 abstract 1
- 239000002775 capsule Substances 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000000875 corresponding effect Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
- G01L1/242—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre
- G01L1/246—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre using integrated gratings, e.g. Bragg gratings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
- G01H9/004—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means using fibre optic sensors
Abstract
The invention discloses a kind of contactless micro-vibration and device for pressure measurement.The laser beam that wide range laser generates enters coupler through incident optical, reach N number of sensor array, reflection laser is exported from the output optical fiber through coupler again, and it is expanded by beam expanding lens and expands laser beam, expanding laser beam, collimated mirror is corrected into collimated laser beam again, FP wavelength demodulation device is directed at collimated excitation beam and carries out Wavelength demodulation, and transmits information to signal processor.When the effect of being under pressure of mass block upper surface or platform to be measured vibrate, the screen periods of sensor will be made to change, to change the central wavelength of its reflection, signal processor real-time resolving goes out the pressure size or Vibration Condition of each sensor.The present invention has many advantages, such as that precision height, electromagnetism interference, dynamic range are big and can realize distributed measurement.
Description
Technical field
The present invention provides a kind of non-contact measurement apparatus more particularly to a kind of non-based on bragg grating to connect
Touch micro-vibration and device for pressure measurement.
Background technique
Contactless vibration/pressure capsule system based on optical system is the mainstream side of non-contact measurement technical field
To, such as such as contactless vibration/pressure capsule system based on principle of optical interference, but the system debug required precision is high,
Have the shortcomings that practical operation requirement is too high.Here propose a kind of contactless micro-vibration based on bragg grating,
Pressure capsule system has many advantages, such as that precision height, electromagnetism interference, dynamic range are big and can realize distributed temperature measuring.
Summary of the invention
The purpose of the present invention is to provide a kind of contactless micro-vibration and device for pressure measurement.
To achieve the goals above the invention adopts the following technical scheme: a kind of contactless micro-vibration and pressure measurement dress
Set, it is characterised in that: including wide range laser, incident optical, coupler, transmission fiber, N number of sensor, N number of platform to be measured,
The output optical fiber, beam expanding lens, collimating mirror, transparent glass, FP wavelength demodulation device and signal processor.
The wide range laser generates a branch of wide range laser beam, laser wavelength range 1100nm~1800nm, laser power
It not less than 1mJ, is arranged such, it is ensured that all reflected wavebands of covering sensor array, outgoing laser beam wavelength are effective enough
Demodulation.
The incident optical, transmission fiber and the output optical fiber are the identical multimode fibre of parameter.
The coupler is 2 × 2 coupler of waveguiding structure.
The sensor is made of mass block, shell, obturator and FBG fiber grating, and the mass block is metal material
Cylindrical body, the shell are cylindrical structure shell of the rigidity compared with strong metal material, and the obturator is elastic obturator, described
FBG fiber grating is the common bragg grating of reflection-type, and reflection laser central wavelength is positively correlated with screen periods.
The obturator is filled in the shell, and the obturator upper surface and mass block lower end surface bonding are tight
Close, the mass block diameter is equal to internal diameter of outer cover, and mass block can be free to slide along the vertical direction inside the shell.
The sensor is placed on platform to be measured.
N number of sensor is arranged using array, realizes distributed micro-vibration, pressure sensing.
The beam expanding lens expands the laser exported in the output optical fiber, increases the radius of outgoing laser beam, by expanding
Beam mirror output laser becomes to expand laser beam.
The collimating mirror is completed to the collimation for expanding laser beam, and diverging is expanded laser beam datum as collimation laser
Beam.
The transparent glass be fixed on simulation it is to be measured spatially, transparent glass end face is parallel.
The FP wavelength demodulation device is the wavelength demodulation device based on Fabry Perot principle of interference, be can be realized to wavelength
High-precision Real-time demodulation, and the wavelength information demodulated is transferred out.
The signal processor receives the wavelength information of FP wavelength demodulation device Real-time demodulation, by by wavelength information and FBG
The comparison of fiber grating parameter calculates pressure/vibration information of each fiber-optic grating sensor.
The wide range laser, incident optical, coupler, transmission fiber, N number of sensor, N number of platform to be measured, emergent light
Fibre, beam expanding lens, collimating mirror and transparent glass are placed in simulation space to be measured.
Further, the variation range of wavelength does not overlap in sensor institute measuring pressure/oscillating region, and is distributed in
In the wave-length coverage of wide range laser, it is arranged such, it is ensured that sensor can calculate each institute's measuring pressure/vibration information and know
Sensor that Chu be corresponding.
Further, the beam expanding lens, collimating mirror and transparent glass position are parallel to each other.
Further, the same sensor cannot measure pressure and vibration simultaneously, synchronization, can only measure pressure or
One-component in vibration.
Working principle of the present invention is as follows:
Wide range laser generates a beam of broad spectrum laser beam, and arrival, which is spread, after incident optical enters 2 × 2 couplers is passing
Sensor array on defeated fibre circuit, each FBG fiber grating are reflected back the laser of a specific wavelength, then through 2 × 2 couplings
It is exported in the output optical fiber after clutch, for shoot laser after beam expanding lens is expanded, formation expands laser beam, expands laser beam warp
After collimating mirror, correction carries out the collimated laser beam exported through transparent glass real-time at collimated laser beam, FP wavelength demodulation device
Wavelength demodulation, and the wavelength information of demodulation is transferred to signal processor.
When the mass block upper surface in sensor, which is under pressure, to be acted on or platform to be measured occur vibration and mass block by
When self inertia generates the obturator in sensor and squeezes or stretch, the screen periods of FBG fiber grating can all occurred
Variation, to change the central wavelength of its reflection.Therefore, signal processor, can be with real-time resolving by the wavelength information of demodulation
The pressure size or Vibration Condition of each FBG fiber-optic grating sensor out.
Because the invention adopts the above technical scheme, have it is following the utility model has the advantages that
One, using FBG fiber grating is based on, have many advantages, such as that precision height, electromagnetism interference, dynamic range are big；
Two, array distribution can be used, realize distributed measurement, while measuring the information of multiple platforms.
Detailed description of the invention
Fig. 1 is principle of the invention figure.
In figure: 1- wide range laser, 2- incident optical, 3- coupler, 4- transmission fiber, 5- sensor, 6- platform to be measured,
7- the output optical fiber, 8- beam expanding lens, 9- expand laser beam, 10- collimating mirror, 11- transparent glass, 12- collimated laser beam, 13-FP wave
Long (FBG) demodulator, 14- signal processor, 15- simulate space to be measured, 51- mass block, 52- metal shell, 53- obturator, 54-FBG
Fiber grating.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in the various embodiments of the present invention described below
Not constituting a conflict with each other can be combined with each other.
Term in the present invention for detailed description is the common knowledge of this field.
A kind of preferred embodiment of contactless micro-vibration and device for pressure measurement, as shown in Figure 1.Including wide range laser
1, incident optical 2, coupler 3, transmission fiber 4, N number of sensor 5, N number of platform 6 to be measured, the output optical fiber 7, beam expanding lens 8, collimation
Mirror 10, transparent glass 11, FP wavelength demodulation device 13 and signal processor 14；
The wide range laser 1 generates a branch of wide range laser beam, laser wavelength range 1100nm~1800nm, laser power
Not less than 1mJ；
The incident optical 2, transmission fiber 4 and the output optical fiber 7 are the identical multimode fibre of parameter；
The coupler 3 is 2 × 2 coupler of waveguiding structure；
The sensor 5 is made of mass block 51, shell 52, obturator 53 and FBG fiber grating 54, the mass block 51
For steel cylinder, the shell 52 is the cylindrical structure shell of steel, and the obturator 53 is silica gel, the FBG optical fiber light
Grid 54 are the common bragg grating of reflection-type, and reflection laser central wavelength is positively correlated with screen periods；
The obturator 53 is filled in the shell 52,53 upper surface of obturator and 51 lower end surface of mass block
Bonding is close, and 51 diameter of mass block is equal to 52 internal diameter of shell, and mass block 51 can the free skating along the vertical direction in shell 52
It is dynamic；
The sensor 5 is placed on platform 6 to be measured；
N number of sensor 5 is arranged using array, realizes distributed micro-vibration, pressure sensing；
The beam expanding lens 8 expands the laser exported in the output optical fiber 7, increases the radius of outgoing laser beam, passes through
Beam expanding lens 8 exports laser and becomes to expand laser beam 9；
The collimating mirror 10 is completed to the collimation for expanding laser beam 9, and the laser beam 9 that expands of diverging is collimated into collimate and swash
Light beam 12；
The transparent glass 11 is fixed on simulation space 15 to be measured, and 11 end face of transparent glass is parallel；
The FP wavelength demodulation device 13 is the wavelength demodulation device based on Fabry Perot principle of interference, be can be realized to wave
Long high-precision Real-time demodulation, and the wavelength information demodulated is transferred out；
The signal processor 14 receives the wavelength information of 13 Real-time demodulation of FP wavelength demodulation device, by by wavelength information with
The comparison of 54 parameter of FBG fiber grating calculates pressure/vibration information of each sensor 5；Further, the sensor 5
The variation range of wavelength does not overlap in institute's measuring pressure/oscillating region, and is distributed in the wave-length coverage of wide range laser 1, such as
Wide range laser source spectral region is 1100nm~1800nm, array is formed by 3 sensors 5, in institute's measuring pressure/vibration level model
In enclosing, the 1st 5 reflection laser wave-length coverage of sensor is 1545nm~1550nm, the 2nd 5 reflection laser wavelength model of sensor
It encloses for 1555nm~1560nm, the 3rd 5 reflection laser wave-length coverage of sensor is 1565nm~1570nm, and wavelength does not overlap,
So that can calculate 5 pressure of sensor/vibration information simultaneously and identify is which sensor 5 when demodulating wavelength.
The wide range laser 1, incident optical 2, coupler 3, transmission fiber 4, N number of sensor 5, N number of platform 6 to be measured,
The output optical fiber 7, beam expanding lens 8, collimating mirror 10 and transparent glass 11 are placed in simulation space 15 to be measured.
Further, beam expanding lens 8, collimating mirror 10 described in this programme and 11 position of transparent glass are parallel to each other.
Further, same sensor 5 described in this programme cannot measure pressure and vibration simultaneously, and synchronization can only be surveyed
Measure the one-component in pressure or vibration.
The working principle of this programme is as follows:
Wide range laser 1 generates a beam of broad spectrum laser beam, reaches and spreads after incident optical 2 enters 2 × 2 couplers 3
5 array of sensor on 4 route of transmission fiber, the FBG fiber grating 5-4 in each sensor 5 be reflected back one it is specific
The laser of wavelength, then exported in the output optical fiber 7 after 2 × 2 couplers 3, shoot laser is after beam expanding lens 8 is expanded, shape
At laser beam 9 is expanded, after expanding the collimated mirror 10 of laser beam 9, correct into collimated laser beam 12,13 pairs of FP wavelength demodulation device through saturating
The collimated laser beam 12 that bright glass 11 exports carries out real-time Wavelength demodulation, and the wavelength information of demodulation is transferred to signal processing
Machine 14.
When 51 upper surface of mass block in sensor 5, which is under pressure, to be acted on or platform to be measured 6 occurs to vibrate and quality
When block 51 is squeezed or stretched since self inertia generates the obturator 53 in sensor 5, it can all make the light of FBG fiber grating 54
Grid cycle changes, to change the central wavelength of its reflection.Therefore, signal processor 14 passes through the wavelength information of demodulation,
The pressure size or Vibration Condition that each sensor 5 can be gone out with real-time resolving, by the surveyed wavelength information of each sensor 5
It is not overlapped, may recognize that information from which sensor.
Assuming that the screen periods of FBG fiber grating 54 are Λ, fiber core refractive index n, bragg wavelength λB, then have relationship
Formula λB=2n Λ.
Assuming that 53 coefficient of elasticity of obturator is τ in sensor 5, and when pressure is F, the screen periods of FBG fiber grating 54
Variation is Δ Λ, then has Δ Λ/Λ=τ F.
It two formulas will combine, obtain: F=Δ λ aboveB/ 2n τ Λ, Δ λBBecome for the central wavelength that FBG fiber grating 54 reflects
Change amount, being generalized to 5 array of sensor has: Fm=Δ λBm/2nτΛm, m represents m-th of sensor 5, that is, passes through the wave of Real-time demodulation
Long message, signal processor 14 can calculate the pressure size of each sensor 5 in 5 array of sensor simultaneously.
Similarly, when platform 6 to be measured generates small vibration displacement S, due to the inertia of mass block 51, it can compress or draw
It stretches obturator 53 and generates deformation, it is assumed that 53 height of obturator is H, then has S/H=Δ Λ/Λ, further calculate, obtain: S=
H·ΔλB/ 2n Λ, being generalized to 5 array of sensor has: Sm=HmΔλBm/2nΛm, m represents m-th of sensor 5, i.e., by real-time
The wavelength information of demodulation, signal processor 14 can calculate real-time micro- vibration of each sensor 5 in 5 array of sensor simultaneously
Dynamic misalignment.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should all include
Within protection scope of the present invention.
Claims (4)
1. a kind of contactless micro-vibration and device for pressure measurement, it is characterised in that: including wide range laser (1), incident optical
(2), coupler (3), transmission fiber (4), N number of sensor (5), N number of platform (6) to be measured, the output optical fiber (7), beam expanding lens (8),
Collimating mirror (10), transparent glass (11), FP wavelength demodulation device (13) and signal processor (14)；
The wide range laser (1) generates a branch of wide range laser beam, and laser wavelength range 1100nm~1800nm, laser power is not
Less than 1mJ；
The incident optical (2), transmission fiber (4) and the output optical fiber (7) are the identical multimode fibre of parameter；
The coupler (3) is 2 × 2 coupler of waveguiding structure；
The sensor (5) is made of mass block (51), shell (52), obturator (53) and FBG fiber grating (54), the matter
Gauge block (51) is metal material cylindrical body, and the shell (52) is cylindrical structure shell of the rigidity compared with strong metal material, described to fill out
Body (53) are filled for elastic obturator, and the FBG fiber grating (54) is the common bragg grating of reflection-type, and reflection swashs
Center wavelength of light is positively correlated with screen periods；
The obturator (53) is filled in the shell (52), under obturator (53) upper surface and the mass block (51)
End face bonding is close, and mass block (51) diameter is equal to shell (52) internal diameter, and mass block (51) can be in shell (52) along perpendicular
Histogram is to free to slide；
The sensor (5) is placed on platform to be measured (6)；
N number of sensor (5) is arranged using array, realizes distributed micro-vibration, pressure sensing；
The beam expanding lens (8) expands the laser exported in the output optical fiber (7), increases the radius of outgoing laser beam, passes through
Beam expanding lens (8) output laser becomes to expand laser beam (9)；
The collimating mirror (10) completes for the laser beam (9) that expands of diverging to be collimated into as collimation the collimation for expanding laser beam (9)
Laser beam (12)；
The transparent glass (11) is fixed on simulation space (15) to be measured, and transparent glass (11) end face is parallel；
The FP wavelength demodulation device (13) is the wavelength demodulation device based on Fabry Perot principle of interference, be can be realized to wavelength
High-precision Real-time demodulation, and the wavelength information demodulated is transferred out；
The signal processor (14) receives the wavelength information of FP wavelength demodulation device (13) Real-time demodulation, by by wavelength information with
The comparison of FBG fiber grating parameter calculates pressure/vibration information of each fiber-optic grating sensor；
The wide range laser (1), incident optical (2), coupler (3), transmission fiber (4), N number of bragg grating sensing
Device (5), N number of platform (6), the output optical fiber (7), beam expanding lens (8), collimating mirror (10) and transparent glass (11) to be measured be placed in simulation to
It surveys in space (15).
2. a kind of contactless micro-vibration according to claim 1 and device for pressure measurement, it is characterised in that: the sensing
The variation range of wavelength does not overlap in device (5) institute measuring pressure/oscillating region, and is distributed in the wavelength model of wide range laser (1)
In enclosing.
3. a kind of contactless micro-vibration according to claim 1 and device for pressure measurement, it is characterised in that: described to expand
Mirror (8), collimating mirror (10) and transparent glass (11) position are parallel to each other.
4. a kind of contactless micro-vibration according to claim 1 and device for pressure measurement, it is characterised in that: described same
Sensor (5) cannot measure pressure and vibration simultaneously, and synchronization can only measure the one-component in pressure or vibration.
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| CN201810828368.5A CN109186821A (en) | 2018-07-25 | 2018-07-25 | A kind of contactless micro-vibration and device for pressure measurement |
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| CN201810828368.5A CN109186821A (en) | 2018-07-25 | 2018-07-25 | A kind of contactless micro-vibration and device for pressure measurement |
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| CN103292891A (en) * | 2013-06-26 | 2013-09-11 | 中国航空工业集团公司北京长城计量测试技术研究所 | Optical fiber type synchronous tunable vibration measurement system |
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