CN108225631A - A kind of optical non-contact pressure sensor - Google Patents
A kind of optical non-contact pressure sensor Download PDFInfo
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- CN108225631A CN108225631A CN201810299454.1A CN201810299454A CN108225631A CN 108225631 A CN108225631 A CN 108225631A CN 201810299454 A CN201810299454 A CN 201810299454A CN 108225631 A CN108225631 A CN 108225631A
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- interference
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- horizontal support
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- 230000003287 optical effect Effects 0.000 title claims abstract description 26
- 230000008859 change Effects 0.000 claims abstract description 9
- 230000000694 effects Effects 0.000 claims abstract description 6
- 239000011159 matrix material Substances 0.000 claims description 10
- 241000931526 Acer campestre Species 0.000 claims description 2
- 238000012545 processing Methods 0.000 claims description 2
- 230000008901 benefit Effects 0.000 abstract description 4
- 238000013461 design Methods 0.000 abstract description 3
- 230000004044 response Effects 0.000 abstract description 2
- 238000001514 detection method Methods 0.000 abstract 1
- 238000005259 measurement Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000006872 improvement Effects 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 241000208340 Araliaceae Species 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 208000027418 Wounds and injury Diseases 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- 208000014674 injury Diseases 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
- G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
The invention discloses a kind of optical non-contact pressure sensors, including the Michelson interference system being made of laser, half-reflecting half mirror, the first speculum, phase compensator, filter lens, the second speculum and movable mirror and horizontal support plate, the first slip strut, the first closed slide, the first spring, the second slip strut, the second closed slide, second spring, fixed horizontal platform, CCD camera, signal processor.Horizontal support plate causes movable mirror to move down under downward pressure effect, the interference fringe variation of the collected Michelson interference system of CCD camera, by carrying out interframe intensity relevant treatment to stripe information, the phase change value of interference fringe is obtained, the phase change information of signal processor real-time resolving interference fringe finally obtains pressure value.Present system design is unique, can achieve the purpose that non-contact detection pressure using simple structure, and has many advantages, such as that precision is high, response is fast and dynamic range is big.
Description
Technical field
The present invention relates to a kind of contactless pressure sensor more particularly to a kind of optical non-contact pressure sensor,
Belong to contactless pressure techniques field.
Background technology
The advantages that due to electromagnetism interference, high-precision, high sensitivity, fibre optical sensor are applied to various more and more widely
The measurement of physical quantity, such as temperature, stress, magnetic field, orientation, vibration.And optical sensor is mainly used in vibration, flow and water
The measurement that prosposition moves, proposes a kind of optical non-contact pressure sensor here.
Invention content
The purpose of the present invention is to provide a kind of optical non-contact pressure sensors.
The present invention uses following technical scheme to achieve these goals：
A kind of optical non-contact pressure sensor, it includes laser, half-reflecting half mirror, the first speculum, phase and mends
Repay plate, filter lens, the second speculum, movable mirror, horizontal support plate, the first slip strut, the first closed slide, first
Spring, second slide strut, the second closed slide, second spring, fixed horizontal platform, CCD camera and signal processor.
Laser, half-reflecting half mirror, the first speculum, phase compensator, filter lens and second in said program is anti-
It penetrates mirror and forms Michelson interference system, the laser optical path by the first speculum is reference path, by phase compensator, filter
The laser optical path of optical lens, the second speculum and movable mirror is signal light path, and the filter lens is to the laser
It generates laser transmittance and is more than 90%, the optical maser wavelength that the laser generates is 380nm to the visible light wave between 760nm
Section.
Further, under downward pressure effect, first slides strut and second slides horizontal support plate in said program
Strut compresses the first spring and is moved downward with second spring, while movable mirror is pushed to move down respectively, leads to CCD phases
The interference fringe of the collected Michelson interference system of machine moves.
Further, the core algorithm that the signal processor handles interference fringe image information in real time is interframe
Intensity related algorithm, the interframe intensity related algorithm first extract the image coefficient matrix of interference image, then to adjacent interference pattern
The coefficient matrix of picture carries out intensity related operation, and the phase change value of every frame interference pattern is obtained by least-squares iteration.
Further, first reflective mirror and movable mirror are specular reflective mirrors or diffuse reflector.
The operation principle of the present invention is as follows：When horizontal support plate is under downward pressure effect, first slides strut and second
Slip strut compresses the first spring and is moved downward with second spring, while movable mirror is pushed to move down respectively, causes
The interference fringe of the collected Michelson interference system of CCD camera moves, by signal processor to stripe information into
Row interframe intensity relevant treatment obtains the phase change value of interference fringe, therefore can be done by signal processor real-time resolving
It relates to the phase change information of striped and calculates the distance that horizontal support plate moves down, it is big so as to further obtain downward pressure
It is small.
Because the present invention uses above technical scheme, has following advantageous effect：
First, for the horizontal support plate in the present invention under downward pressure effect, first, which slides strut and second, slides strut point
It does not compress the first spring to move downward with second spring, while movable mirror is pushed to move down, Michelson interference
Pressure size, is converted into the phase information of interference fringe by the optical path difference of system signal light and reference light, and system design is unique.
2nd, using Michelson's interferometer system, have many advantages, such as that precision is high, response is fast and dynamic range is big.
3rd, system structure design is simple, easily operated, the related improvement that system performance easy to implement improves.
4th, the interframe intensity correlation technique in the present invention is in terms of interference image is handled, not only to the comparison of interference image
Spend it is of less demanding, and with quite high precision and calculating speed.
5th, system is operated in visible wavelength range, not only facilitates optical path adjusting, evades laser in time and human eye is caused
Injury, while when relatively large deviation occurs in system light path, system can be adjusted in time, correction system to the normal work of system
Make.
Description of the drawings
Fig. 1 is principle of the invention figure.
1- lasers in figure, 2- half-reflecting half mirrors, the first speculums of 3-, 4- phase compensators, the second speculums of 5-, 6- filters
Optical lens, 7- movable mirrors, the horizontal support plates of 8-, the slip struts of 9- first, the first closed slides of 10-, the first springs of 11-,
12- second slides strut, and the second closed slides of 13-, 14- second springs, 15 fix horizontal platforms, 16-CCD cameras, at 17- signals
Reason machine, 18- downward pressures.
Specific embodiment
Purpose, technical scheme and advantage to make the embodiment of the present invention are clearer, below in conjunction with the embodiment of the present invention
In attached drawing, the technical solution in the embodiment of the present invention is clearly and completely described, it is clear that described embodiment is
The part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill people
Member's all other embodiments obtained under the premise of creative work is not made, shall fall within the protection scope of the present invention.
The present invention uses a kind of optical non-contact pressure sensor, it is characterised in that：Including laser 1, half-reflection and half-transmission
Mirror 2, the first speculum 3, phase compensator 4, the second speculum 5, filter lens 6, movable mirror 7, horizontal support plate 8,
One, which slides strut 9, the first closed slide 10, the first spring 11, second, slides strut 12, the second closed slide 13, second spring
14th, fixed horizontal platform 15, CCD camera 16, signal processor 17.
Laser 1, half-reflecting half mirror 2, the first speculum 3, phase compensator 4, the second speculum 5 in said program,
Filter lens 6 and movable mirror 7 form Michelson interference system, and the laser optical path by the first speculum 3 is ginseng
Light path is examined, the laser optical path by phase compensator 4, filter lens 6, the second speculum 5 and movable mirror 7 is flashlight
Road.
The filter lens 6 generates the laser 1 laser transmittance and is more than 90%, and what the laser 1 generated swashs
The a length of 380nm of light wave is to the visible light wave range between 760nm.
The first closed slide 10 in said program is mutually parallel with the second closed slide 13, and with the fixed horizontal platform
15 is vertical.
First in said program slides the slip strut 12 of strut 9 and second under pressure can be respectively along described first
10 and second closed slide 13 of closed slide moves straight down.
Horizontal support plate 8 in said program is rigid structure.
The first speculum 3 and the movable mirror 7 of said program are specular reflective mirrors or diffuse reflector.
Movable mirror 7 in said program is horizontally fixed on the horizontal support plate 8.CCD camera 16 acquires in real time
The interference fringe of Michelson interference system, and the interference fringe image information of acquisition is passed into signal processor 17.Signal
Processor 17 carries out interference fringe image information interframe intensity relevant treatment in real time, and the interframe intensity related algorithm principle is such as
Under：
It can be expressed as by 16 collected interference image light distribution of CCD camera：
Wherein M is phase shift number, and N is 16 number of pixels of CCD camera, remaining is the coefficient constant interfered in expression formula.
And CCD camera 16 shoots the equation number established much larger than equation unknown number number, by making following costs
Equation minimizes to obtain the least square solution of equation group.
Further by above-mentioned equation group matrixing, C is defined(1)It is correlation matrix of the size for M × M of interference fringe image,
The movement of phase is correlation matrix II in interference image+Function.Assuming that it is zero that the measurement error of light distribution, which obeys mean value,
Random statistical rule, and, C unrelated with wavefront variable(1)Minimal eigenvalue approximation and light intensity error varianceIt is equal.
By its minimal eigenvalue from C(1)Removal can obtain the correlation matrix C of a noise suppressed in diagonal(ns),
Wherein, it is u to define modulated light wavem=exp (i θm), reference light isIntroduce differential matrix D into
One step reduces equation and unknown number number, establishes interframe intensity correlation technique matrix optimizing model,
C=DC(ns)DT≈VHV+
Wherein,
Least-squares iteration fitting, obtained phase are carried out to the Matrix C that left side is calculated using model on the right side of equation
Change size,
By above-mentioned processing, the phase change value of interference fringe is obtained, therefore can in real time be solved by signal processor 17
It calculates the phase change information of interference fringe and calculates the distance that horizontal support plate 8 moves down, it is downward so as to further obtain
Pressure size.
It these are only the preferred embodiment of the present invention, be not intended to restrict the invention, for those skilled in the art
For member, the invention may be variously modified and varied.Any modification for all within the spirits and principles of the present invention, being made,
Equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
Claims (4)
1. a kind of optical non-contact pressure sensor, it is characterised in that：It includes laser, half-reflecting half mirror, the first reflection
Mirror, phase compensator, filter lens, the second speculum, movable mirror, horizontal support plate, first slide strut, first parallel
Guide rail, the first spring, second slide strut, the second closed slide, second spring, fixed horizontal platform, CCD camera and signal processing
Machine；
The laser, half-reflecting half mirror, the first speculum, phase compensator, filter lens and the second speculum form mikey
The inferior interference system of that is reference path by the laser optical path of the first speculum, by phase compensator, filter lens, second
Speculum and the laser optical path of movable mirror are signal light path, and the filter lens generates laser light to the laser
Rate is more than 90%, and the optical maser wavelength that the laser generates is 380nm to the visible light wave range between 760nm；
First closed slide is mutually parallel with the second closed slide, and vertical with the fixed horizontal platform；
The first slip strut and the second slip strut under pressure can be respectively along first closed slides and second
Closed slide moves straight down；
The horizontal support plate is rigid structure；
The movable mirror is horizontally fixed on the horizontal support plate；
The CCD camera acquires the interference fringe of Michelson interference system in real time, and by the interference fringe image information of acquisition
Pass to signal processor；
The signal processor carries out interference fringe image information interframe intensity relevant treatment in real time, obtains the phase of interference fringe
Position changing value, and further calculate the pressure pressure size acted on horizontal support plate.
2. a kind of optical non-contact pressure sensor according to claim 1, it is characterised in that：The horizontal support plate exists
Under downward pressure effect, the first slip strut with second slides strut, and to compress the first spring respectively downward with second spring
Movement, while movable mirror is pushed to move down, lead to the interference item of the collected Michelson interference system of CCD camera
Line moves.
3. a kind of optical non-contact temp measuring system according to claim 1, it is characterised in that：The signal processor pair
The core algorithm that interference fringe image information is handled in real time be interframe intensity related algorithm, the interframe intensity related algorithm
The image coefficient matrix of interference image is first extracted, then intensity related operation is carried out to the coefficient matrix of adjacent interference image, is passed through
Least-squares iteration obtains the phase change value of every frame interference pattern.
4. a kind of optical non-contact pressure sensor according to claim 1, it is characterised in that：First reflection
Mirror is specular reflective mirrors or diffuse reflector with movable mirror.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810299454.1A CN108225631A (en) | 2018-04-04 | 2018-04-04 | A kind of optical non-contact pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810299454.1A CN108225631A (en) | 2018-04-04 | 2018-04-04 | A kind of optical non-contact pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108225631A true CN108225631A (en) | 2018-06-29 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810299454.1A Withdrawn CN108225631A (en) | 2018-04-04 | 2018-04-04 | A kind of optical non-contact pressure sensor |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109141700A (en) * | 2018-08-17 | 2019-01-04 | 天津大学 | The double light source low coherence interference pressure-temperature measuring systems of Fabry-perot optical fiber and method |
| CN109186821A (en) * | 2018-07-25 | 2019-01-11 | 孝感锐创机械科技有限公司 | A kind of contactless micro-vibration and device for pressure measurement |
-
2018
- 2018-04-04 CN CN201810299454.1A patent/CN108225631A/en not_active Withdrawn
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109186821A (en) * | 2018-07-25 | 2019-01-11 | 孝感锐创机械科技有限公司 | A kind of contactless micro-vibration and device for pressure measurement |
| CN109141700A (en) * | 2018-08-17 | 2019-01-04 | 天津大学 | The double light source low coherence interference pressure-temperature measuring systems of Fabry-perot optical fiber and method |
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Application publication date: 20180629 |