CN109182995B - Control system and method for non-uniform film product coating equipment - Google Patents
Control system and method for non-uniform film product coating equipment Download PDFInfo
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- CN109182995B CN109182995B CN201811223101.XA CN201811223101A CN109182995B CN 109182995 B CN109182995 B CN 109182995B CN 201811223101 A CN201811223101 A CN 201811223101A CN 109182995 B CN109182995 B CN 109182995B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
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- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a coating control system of a non-uniform film product, which comprises an upper computer, a PLC (programmable logic controller) control host, an information acquisition device, a motor servo controller and a sputtering cathode electrical source controller; the information acquisition device is used for detecting the position of the glass substrate on the conveying roller way and the temperature and air pressure information in the process chamber, and the PLC control host is used for receiving the detection information sent by the signal acquisition device; controlling a motor servo controller and a sputtering cathode electrical source controller to work according to the detection information; the motor servo controller is used for sending control signals to the motor and controlling the motor to rotate according to different set speed curves. The motor servo controller controls the motor to rotate according to a set motor rotating speed curve, so that the n conveying rollers corresponding to each layer of film can be independently adjusted and controlled, the speed of the glass substrate under the corresponding sputtering cathode can be adjusted, the thickness of the plated film layer can be controllably changed, and the film coating of the non-uniform film layer product which can be continuously produced in a large area can be realized.
Description
Technical Field
The invention relates to the technical field of glass coating production, in particular to a control system and a method of coating equipment for a non-uniform film product.
Background
At present, the appearance of electronic products becomes an important factor for success of a product, and the appearance color design of the product is also included. Taking the color design of the back plate of the mobile phone shell as an example, at present, only one color can exist on most of the back plates of the mobile phone shell at the same time, and the colors are uniformly distributed. The design facilitates large-scale continuous production of the mobile phone back plate so as to meet the requirement of the market on quantity. However, the design also has limitations, such as relatively monotonous color on the back plate of the mobile phone, serious homogenization and lack of freshness. The existing large-area magnetron sputtering continuous coating line comprises a closed shell, wherein a conveying roller way, a plurality of process chambers and a plurality of molecular pumps are installed in the shell, the process chambers and the molecular pumps are both arranged above the conveying roller way, the number n of conveying rollers corresponding to each process chamber is not less than 2, the number of the conveying rollers in the conveying roller way is integral multiple of n, sputtering cathodes are arranged in the process chambers and used for coating a film on the surface of a base material conveyed to the conveying roller way, and the molecular pumps are used for vacuumizing so as to ensure the vacuum negative pressure atmosphere in the shell. In a section of process chamber, only one motor is used for driving all roller ways, for the uniformity of coating, the maximum use conveying speed is consistent under all cathodes, and the process design causes that the coating color is single and the color uniformity is distributed. In order to enrich the color design of products, improvements in product coating equipment and methods are needed.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a control system of non-uniform film coating equipment, which can realize continuous large-area production of non-uniform film products and has high production efficiency.
In a first aspect, the embodiment of the invention provides a control system of non-uniform film product coating equipment, the non-uniform film product coating equipment comprises a closed shell, a conveying roller way, a plurality of process chambers and a plurality of molecular pumps are installed in the shell, the process chambers and the molecular pumps are both arranged above the conveying roller way, the number n of conveying rollers corresponding to each process chamber is more than or equal to 2, the number of the conveying rollers in the conveying roller way is an integral multiple of n, the conveying rollers in the conveying roller way are grouped, each group comprises n conveying rollers, each group of conveying rollers is correspondingly provided with a motor, each group of conveying rollers are driven by the corresponding motor, and the control system comprises an upper computer, a PLC (programmable logic controller) control host, an information acquisition device, a motor servo controller and a sputtering cathode electrical source controller;
the upper computer is used for monitoring the working condition of the coating equipment and sending a control signal to the PLC control host;
the information acquisition device is used for detecting the position of the glass substrate on the conveying roller way and the temperature and air pressure information in the process cavity and sending the detection information to the PLC control host;
the PLC control host is used for receiving detection information sent by the signal acquisition device;
controlling a motor servo controller and a sputtering cathode electrical source controller to work according to the detection information;
the motor servo controller is used for sending control signals to the motor and controlling the motor to rotate according to different set speed curves;
the motor servo controller is also used for sending a control signal to the molecular pump and controlling the molecular pump to work so that the vacuum degree of the coating equipment is in a preset range;
the sputtering cathode power supply controller is used for controlling the on-off state of a power supply of the sputtering cathode.
Optionally, the control system further includes a process gas release solenoid valve, the process gas release solenoid valve is used for controlling whether to release the process gas, and the PLC control host controls the process gas release solenoid valve to open or close.
Optionally, the control system further comprises a cooling water system motor, the cooling water system motor is used for controlling the water flow condition of the cooling water system, and the motor servo controller sends a control signal to control the operation of the cooling water system motor.
Optionally, the information acquisition device comprises an infrared sensor, the infrared sensor is connected with the PLC control host, and the infrared sensor is used for acquiring the position information of the glass substrate on the conveying roller way.
Optionally, the information acquisition device further comprises a temperature sensor, the temperature sensor is connected with the PLC control host, and the temperature sensor is used for acquiring temperature data in the process chamber.
Optionally, the information acquisition device further comprises an air pressure sensor, the air pressure sensor is connected with the PLC control host, and the air pressure sensor is used for acquiring air pressure data in the process chamber.
Optionally, the information acquisition device further includes a process gas volume flow meter, the process gas volume flow meter is connected to the PLC control host, and the process gas volume flow meter is configured to acquire process gas volume flow data in the process chamber.
In a second aspect, an embodiment of the present invention further provides a method for controlling a coating apparatus for a non-uniform film product, including:
the PLC control host acquires vacuum degree detection information sent by the information acquisition device, acquires preset vacuum degree data of the coating equipment, and sends a control signal for controlling the molecular pump to work to the motor servo controller according to the vacuum degree detection information and the vacuum degree data;
the PLC control host acquires set different rotating speed curve data of a motor driving each group of conveying rollers, and sends a control signal for controlling the rotating speed of the motor to a motor servo controller according to the rotating speed curve data of the motor;
the PLC control host acquires the position of the glass substrate on the conveying roller way, which is sent by the information acquisition device, and sends the sputtering cathode power supply to the sputtering cathode power supply controller to turn on or turn off.
Optionally, the method further comprises: the PLC control host acquires air pressure detection information sent by the information acquisition device, acquires preset process condition data of the coating equipment, and sends opening or closing control signals to the process gas release solenoid valve according to the air pressure detection information and the process condition data.
Optionally, the method further comprises: the PLC control host acquires temperature detection information sent by the information acquisition device, acquires preset temperature data of the process chamber, and sends a control signal to a cooling water system motor according to the temperature detection information and the temperature data.
The invention has the beneficial effects that:
the embodiment provides a control system and a method of non-uniform film product coating equipment, signals are collected through an information collection device and sent to a PLC control host, the PLC control host compares the detection information with relevant data preset by the system, control judgment is made, control signals are sent to a motor servo controller and a sputtering cathode electrical source controller, the motor servo controller controls a motor to rotate according to a set motor rotating speed curve, n conveying rollers corresponding to each film can be independently adjusted and controlled, the speed of a glass substrate under a corresponding sputtering cathode can be adjusted, materials on the sputtering cathode are coated on the glass substrate, the thickness of the coated film can be controllably changed, and the coating of the non-uniform film product which can be continuously produced in a large area is realized.
Drawings
In order to more clearly illustrate the detailed description of the invention or the technical solutions in the prior art, the drawings that are needed in the detailed description of the invention or the prior art will be briefly described below. Throughout the drawings, like elements or portions are generally identified by like reference numerals. In the drawings, elements or portions are not necessarily drawn to scale.
FIG. 1 is a schematic structural diagram of a first embodiment of a control system of a non-uniform film product coating apparatus provided by the present invention;
fig. 2 shows a flowchart of a first embodiment of a control method of a non-uniform film product coating apparatus provided by the present invention.
Detailed Description
Embodiments of the present invention will be described in detail below with reference to the accompanying drawings. The following examples are only for illustrating the technical solutions of the present invention more clearly, and therefore are only examples, and the protection scope of the present invention is not limited thereby.
It is to be noted that, unless otherwise specified, technical or scientific terms used herein shall have the ordinary meaning as understood by those skilled in the art to which the invention pertains.
As shown in fig. 1, a schematic structural diagram of a control system of a non-uniform film product coating apparatus provided by the present invention is shown, the non-uniform film product coating apparatus includes a closed housing, a conveying roller way, a plurality of process chambers and a plurality of molecular pumps are installed in the housing, the process chambers and the molecular pumps are both disposed above the conveying roller way, the number n of conveying rollers corresponding to each process chamber is greater than or equal to 2, the number of conveying rollers in the conveying roller way is an integer multiple of n, the conveying rollers in the conveying roller way are grouped, each group includes n conveying rollers, each group of conveying rollers is correspondingly disposed with a motor, each group of conveying rollers is driven by the correspondingly disposed motor, and the control system includes an upper computer, a PLC control host, an information acquisition device, a motor servo controller and a sputtering cathode electrical source controller;
the upper computer is used for monitoring the working condition of the coating equipment and sending a control signal to the PLC control host;
the information acquisition device is used for detecting the position of the glass substrate on the conveying roller way and the temperature, air pressure and vacuum degree information in the process cavity and sending the detection information to the PLC control host;
the PLC control host is used for receiving detection information sent by the signal acquisition device;
the PLC control host controls the motor servo controller and the sputtering cathode electrical source controller to work according to the detection information;
the motor servo controller is used for sending a control signal to the motor and controlling the rotating speed of the motor;
the motor servo controller is also used for sending a control signal to the molecular pump and controlling the molecular pump to work so that the vacuum degree of the coating equipment is in a preset range;
the sputtering cathode power supply controller is used for controlling the on-off state of the power supply of the sputtering cathode.
The conveying rollers in the conveying roller way are grouped by the non-uniform film product coating equipment, each group comprises n conveying rollers, each group of conveying rollers is correspondingly provided with a motor, each group of conveying rollers is driven by the corresponding motor arranged, the motor is adopted to drive the conveying roller group, and the transmission speed of the conveying rollers can be adjusted by adjusting the rotating speed of the motor. And an upper computer of the control system monitors the working condition of the coating equipment and sends a control signal to the PLC control host according to the monitoring condition. The information acquisition device detects the position information of the glass substrate on the conveying roller way and the temperature, air pressure and vacuum degree information in the process cavity, and sends the detection information to the PLC control host, and the PLC control host controls the motor servo controller and the sputtering cathode electrical source controller to work according to the detection information. The motor servo controller sends a control signal to the motor to control the rotation speed of the motor; the motor servo controller controls the rotating speed of the motor according to the preset rotating speed of the motor. The motor servo controller also sends a control signal to the molecular pump to control the molecular pump to work so that the vacuum degree of the coating equipment is in a preset range; the sputtering cathode electrical source controller automatically controls the power on-off state of the sputtering cathode. In this embodiment, the motor adopts the uniform deceleration direct current control mode, only carries out variable speed control to two-layer silicon nitride for the speed of glass substrate under the sputtering cathode that corresponds is adjustable, and the material on the sputtering cathode is plated on the glass substrate, makes the controllable change of coating thickness appearance of plating. Therefore, the thickness of the film layer is gradually changed on the same glass substrate, and the appearance of the substrate is gradually changed in color.
The embodiment provides a control system of inhomogeneous rete product coating equipment, gather signal transmission and give PLC main control system through information acquisition device, PLC main control system compares according to the relevant data that detection information and system preset, make control judgment, send control signal to motor servo controller and sputtering cathode electrical source controller, motor servo controller is according to the motor speed curve control motor rotation of setting for, make n transfer rollers that each rete corresponds can independently adjust, control, make the speed of glass substrate under the sputtering cathode that corresponds is adjustable, the material on the sputtering cathode is plated on the glass substrate, make the controllable change of film thickness of plating appear, realize the coating film of the inhomogeneous rete product that can continuous large tracts of land produce.
In this embodiment, information acquisition device includes infrared sensor, infrared sensor is connected with PLC host computer, infrared sensor is used for gathering the positional information of glass substrate on the transfer table. The information acquisition device further comprises a temperature sensor, the temperature sensor is connected with the PLC control host, and the temperature sensor is used for acquiring temperature data in the process cavity. The information acquisition device further comprises an air pressure sensor, the air pressure sensor is connected with the PLC control host, and the air pressure sensor is used for acquiring air pressure data in the process cavity. The information acquisition device further comprises a process gas volume flow meter, the process gas volume flow meter is connected with the PLC control host, and the process gas volume flow meter is used for acquiring process gas volume flow data in the process cavity. The control system also comprises a process gas release electromagnetic valve, the process gas release electromagnetic valve is used for controlling whether to release process gas or not, and the process gas release electromagnetic valve is controlled to be opened or closed by the PLC control host. The process gas volumetric flow meter is used for acquiring process gas volumetric flow data in the process chamber. The control system further comprises a cooling water system motor, the cooling water system motor is used for controlling the water flow condition of the cooling water system, and the motor servo controller sends a control signal to control the cooling water system motor to work.
The infrared sensor is arranged on the conveying roller way and used for detecting the movement position of the glass substrate, the infrared sensor transmits the position information of the detected glass substrate to the PLC control host, and the PLC control host controls the sputtering cathode electrical source controller to be turned on or turned off according to the position of the glass substrate to control whether the sputtering cathode sprays materials on the glass substrate. The temperature sensor collects temperature data in the process cavity, the PLC control host judges whether the collected temperature reaches the process condition of the sputtering cathode, and if the collected temperature does not reach the required process condition, the PLC control host controls the motor servo controller to control the cooling water system to cool so that the temperature in the process cavity reaches the specified process condition. The air pressure sensor collects air pressure data in the process cavity, the detected air pressure data is sent to the PLC control host, the PLC control host judges whether the air pressure reaches the required air pressure according to the process conditions of the sputtering cathode, if the air pressure does not reach the corresponding air pressure, the PLC control host controls the process gas release valve to be opened and releases the process gas to enable the air pressure to reach the process conditions, and if the air pressure reaches the corresponding air pressure, the PLC control host controls the process gas release valve to be closed and stops releasing the process gas.
The control system of inhomogeneous rete product coating equipment of this embodiment, rotate according to the speed curve that sets for through motor servo controller control motor, drive the motion of transfer table, adopt infrared sensor to gather the positional information at the transfer table of glass substrate, PLC main control system is according to the accurate control sputtering cathode of glass substrate to glass substrate spray coating material in position, adopt baroceptor and temperature sensor collection process chamber's atmospheric pressure and temperature data, PLC main control system compares with the technological condition parameter according to the data of gathering, and then process gas release valve and cooling water system action, guarantee the technological condition stability in the process chamber, make the uniformity between the product lot provide more favorable assurance.
As shown in fig. 2, a flowchart of a first embodiment of a control method for a non-uniform film product coating apparatus provided in an embodiment of the present invention is shown, where the control method includes:
and S1, the PLC control host acquires the vacuum degree detection information sent by the information acquisition device, acquires preset vacuum degree data of the coating equipment, and sends a control signal for controlling the molecular pump to work to the motor servo controller according to the vacuum degree detection information and the vacuum degree data.
And S2, the PLC control host acquires the air pressure detection information sent by the information acquisition device, acquires preset process condition data of the coating equipment, and sends an opening or closing control signal to the process gas release solenoid valve according to the air pressure detection information and the process condition data.
And S3, the PLC control host acquires the temperature detection information sent by the information acquisition device, acquires preset temperature data of the process chamber, and sends a control signal to a cooling water system motor according to the temperature detection information and the temperature data.
And S4, the PLC control host acquires the set different rotating speed data of the motor for driving each group of conveying rollers, and sends a control signal for controlling the rotating speed of the motor to the motor servo controller according to the rotating speed data of the motor.
And S5, the PLC control host acquires the position of the glass substrate on the conveying roller way, which is sent by the information acquisition device, and sends the sputtering cathode power supply to the sputtering cathode power supply controller to turn on or turn off.
The control method of the non-uniform film product coating apparatus of this embodiment and the control system belong to the same inventive concept, the steps of the method are not limited to the order described in this embodiment, and the specific control process refers to the above embodiments and is not described herein again. The automatic detection and control of the coating equipment for the non-uniform film products are realized through the steps, n conveying rollers below each process chamber share the corresponding motor drive, so that the n conveying rollers corresponding to each film can be independently adjusted and controlled, the speed of the glass substrate under the corresponding sputtering cathode is adjustable, the material on the sputtering cathode is coated on the glass substrate, the thickness of the coated film can be controllably changed, the continuous large-area production of the non-uniform film products is realized, the production efficiency is improved, the sensor is adopted for collecting data, the position of the coating product on a conveying roller way is accurately controlled by the PLC, and the consistency of the product batch is ensured.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention, and they should be construed as being included in the following claims and description.
Claims (10)
1. A control system of non-uniform film product coating equipment is characterized in that the non-uniform film product coating equipment comprises a closed shell, a conveying roller way, a plurality of process chambers and a plurality of molecular pumps are installed in the shell, the process chambers and the molecular pumps are both arranged above the conveying roller way, the number n of conveying rollers corresponding to each process chamber is more than or equal to 2, the number of the conveying rollers in the conveying roller way is an integral multiple of n, the conveying rollers in the conveying roller way are grouped, each group comprises n conveying rollers, each group of conveying rollers is correspondingly provided with a motor, each group of conveying rollers is driven by the corresponding motor, and the control system comprises an upper computer, a PLC (programmable logic controller) control host, an information acquisition device, a motor servo controller and a cathode sputtering power supply controller;
the upper computer is used for monitoring the working condition of the coating equipment and sending a control signal to the PLC control host;
the information acquisition device is used for detecting the position of the glass substrate on the conveying roller way and the temperature and air pressure information in the process cavity and sending the detection information to the PLC control host;
the PLC control host is used for receiving detection information sent by the signal acquisition device;
controlling a motor servo controller and a sputtering cathode electrical source controller to work according to the detection information;
the motor servo controller is used for sending control signals to the motor and controlling the motor to rotate according to different set speed curves; the PLC control host compares the detection information with relevant data preset by the system to make control judgment, the control motor adopts a uniform deceleration direct-current control mode, only two layers of silicon nitride are subjected to variable-speed control, so that the speed of the glass substrate under the corresponding sputtering cathode can be adjusted, and the material on the sputtering cathode is plated on the glass substrate, so that the thickness of the plated film layer is controllably changed;
the motor servo controller is also used for sending a control signal to the molecular pump and controlling the molecular pump to work so that the vacuum degree of the coating equipment is in a preset range;
the sputtering cathode power supply controller is used for controlling the on-off state of a power supply of the sputtering cathode.
2. The control system of non-uniform film product coating equipment as claimed in claim 1, wherein the control system further comprises a process gas release solenoid valve, the process gas release solenoid valve is used for controlling whether to release process gas, and the PLC control host controls the process gas release solenoid valve to open or close.
3. The control system of claim 1, wherein the control system further comprises a cooling water system motor, the cooling water system motor is used for controlling the water flow condition of the cooling water system, and the motor servo controller sends a control signal to control the operation of the cooling water system motor.
4. The control system of the non-uniform film product coating equipment as claimed in claim 1, wherein the information acquisition device comprises an infrared sensor, the infrared sensor is connected with the PLC control host, and the infrared sensor is used for acquiring the position information of the glass substrate on the conveying roller way.
5. The control system of non-uniform film product coating equipment as claimed in claim 4, wherein the information acquisition device further comprises a temperature sensor, the temperature sensor is connected with the PLC control host, and the temperature sensor is used for acquiring temperature data in the process chamber.
6. The control system of non-uniform film product coating equipment as claimed in claim 5, wherein the information acquisition device further comprises an air pressure sensor, the air pressure sensor is connected with the PLC control host, and the air pressure sensor is used for acquiring air pressure data in the process chamber.
7. The control system of non-uniform film product coating equipment as claimed in claim 6, wherein the information collecting device further comprises a process gas volume flow meter, the process gas volume flow meter is connected with the PLC control host, and the process gas volume flow meter is used for collecting process gas volume flow data in the process chamber.
8. A control method of a non-uniform film product coating device is characterized by comprising the following steps:
the PLC control host acquires air pressure detection information sent by the information acquisition device, acquires preset air pressure data of the coating equipment, and sends a control signal for controlling the molecular pump to work to the motor servo controller according to the air pressure detection information and the air pressure data of the process condition;
the PLC control host acquires set different rotating speed curve data of a motor driving each group of conveying rollers, and sends a control signal for controlling the rotating speed of the motor to a motor servo controller according to the rotating speed curve data of the motor; the PLC control host compares the detection information with relevant data preset by the system to make control judgment, the control motor adopts a uniform deceleration direct-current control mode, only two layers of silicon nitride are subjected to variable-speed control, so that the speed of the glass substrate under the corresponding sputtering cathode can be adjusted, and the material on the sputtering cathode is plated on the glass substrate, so that the thickness of the plated film layer is controllably changed;
the PLC control host acquires the position of the glass substrate on the conveying roller way, which is sent by the information acquisition device, and sends the sputtering cathode power supply to the sputtering cathode power supply controller to turn on or turn off.
9. The method for controlling the coating equipment of the non-uniform film product according to claim 8, further comprising: the PLC control host acquires air pressure detection information sent by the information acquisition device, acquires preset process condition data of the coating equipment, and sends opening or closing control signals to the process gas release solenoid valve according to the air pressure detection information and the process condition data.
10. The method for controlling the coating equipment of the non-uniform film product according to claim 8, further comprising: the PLC control host acquires temperature detection information sent by the information acquisition device, acquires preset temperature data of the process chamber, and sends a control signal to a cooling water system motor according to the temperature detection information and the temperature data.
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| CN201811223101.XA CN109182995B (en) | 2018-10-19 | 2018-10-19 | Control system and method for non-uniform film product coating equipment |
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| CN109987857B (en) * | 2019-04-29 | 2021-11-23 | 布勒莱宝光学设备（北京）有限公司 | Novel low-radiation energy-saving film system and preparation method and application thereof |
| CN111443670B (en) * | 2020-04-02 | 2023-03-14 | 蚌埠凯盛工程技术有限公司 | Control method and device for photovoltaic glass coating production line |
| CN112126908B (en) * | 2020-08-31 | 2023-02-03 | 佛山市博顿光电科技有限公司 | Coating control system and coating equipment |
| CN113215548B (en) * | 2021-03-26 | 2023-08-04 | 吴江南玻华东工程玻璃有限公司 | Automatic control system for transmission speed of building glass coating sputtering chamber and execution method |
| CN113355645B (en) * | 2021-05-20 | 2023-12-15 | 湖南宇晶机器股份有限公司 | Crystal control rotation integrated control system based on vacuum coating |
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| DE102010041858B4 (en) * | 2010-10-01 | 2014-10-09 | Von Ardenne Anlagentechnik Gmbh | Method and apparatus for coating thickness control in the coating of substrates in a vacuum |
| US20120024695A1 (en) * | 2011-03-14 | 2012-02-02 | Primestar Solar, Inc. | Systems and methods for high-rate deposition of thin film layers on photovoltaic module substrates |
| CN202181348U (en) * | 2011-07-13 | 2012-04-04 | 戴明光 | Reciprocating type continuous film coating device |
| CN203419853U (en) * | 2013-07-11 | 2014-02-05 | 重庆春江镀膜玻璃有限公司 | Production control system for glass coating |
| CN106544637B (en) * | 2016-10-20 | 2019-01-01 | 江西沃格光电股份有限公司 | Magnetic-controlled sputtering coating equipment |
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