CN109175666B - Welding process of direct-cooling cathode lining with magnet ring - Google Patents
Welding process of direct-cooling cathode lining with magnet ring Download PDFInfo
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- CN109175666B CN109175666B CN201810799732.XA CN201810799732A CN109175666B CN 109175666 B CN109175666 B CN 109175666B CN 201810799732 A CN201810799732 A CN 201810799732A CN 109175666 B CN109175666 B CN 109175666B
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- welding
- bushing
- magnet ring
- cover plate
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/12—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating the heat being generated by friction; Friction welding
- B23K20/122—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating the heat being generated by friction; Friction welding using a non-consumable tool, e.g. friction stir welding
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32458—Vessel
- H01J37/32477—Vessel characterised by the means for protecting vessels or internal parts, e.g. coatings
- H01J37/32495—Means for protecting the vessel against plasma
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Plasma Technology (AREA)
Abstract
A welding process of a direct-cooling cathode lining with a magnet ring comprises the following steps: manufacturing a high-purity aluminum alloy lining main body and a cover plate, manufacturing and installing a permanent magnet ring, and welding the lining main body and the cover plate; the apron cover is tightly on the end of bush main part, and the bush main part flushes with apron equipment back welding seam to carry out twice friction weld, replace original electron beam welding, the welding qualification rate of the product of effectual improvement, greatly reduced the cost, the direct cold cathode bush welding of friction weld technology welded is effectual simultaneously, long service life effectively prevents the erosion of plasma to the magnet ring, reduces the corruption of plasma to reaction chamber, has guaranteed the long-term stability of semiconductor chip production.
Description
Technical Field
The invention relates to the technical field of semiconductor process treatment equipment, in particular to a welding process of a direct-cooling cathode lining with a magnet ring.
Background
Plasma reaction chambers are critical equipment in semiconductor chip processing for processing semiconductor wafers to produce integrated circuits, and vacuum processing chambers are commonly used for etching and chemical vapor deposition of materials onto substrates by energizing an etching gas or a deposition gas in the reaction chamber into a plasma state by applying a radio frequency field. During the plasma etching process, a large amount of active radicals such as C1 radicals and F radicals are generated, and when a semiconductor device is etched, the active radicals also have a corrosive effect on the inner surface of a plasma reaction chamber made of aluminum or aluminum alloy, and the strong corrosion generates a large amount of particles, so that frequent maintenance of production equipment is required. Therefore, in the production process, the direct-cooling cathode bushing with the magnet ring is required to be used for restraining plasma, protecting plasma erosion, reducing the corrosion of the plasma to a reaction chamber, ensuring the sealing of the magnet ring and isolating the magnet ring from the plasma, the existing welding mode is easily influenced by a magnetic field, welding sheets are required to be filled in the welding process, the yield is low, the welding cost is high, and the service life of the direct-cooling cathode bushing is short.
Disclosure of Invention
The invention aims to provide a welding process of a direct-cooling cathode lining with a magnet ring, which solves the technical problems.
In order to achieve the technical purpose and achieve the technical requirements, the invention adopts the technical scheme that: the utility model provides a take welding process of magnet ring's direct-cooled cathode bush which characterized in that: the method comprises the following steps: the manufacturing of the high-purity aluminum alloy lining main body and the cover plate, the manufacturing and the installation of the permanent magnet ring and the welding between the lining main body and the cover plate.
Preferably: the manufacture of the bushing body comprises the steps of,
(a) cutting by using 6061 aluminum alloy with the diameter of 600 mm;
(b) extruding to 300mm in diameter;
(c) cutting to a final size;
(d) heat treatment;
(e) detecting the uniformity of the microstructure;
(f) and (3) processing and forming: the bushing body includes a bushing base; a flange boss is arranged at the left end of the bushing base body; a clamping boss is arranged on the right side of the flange boss and on the outer circle of the bushing base body; the clamping boss is sequentially provided with a first step shaft surface and a second step shaft surface from top to bottom;
the manufacturing of the cover plate comprises the following steps,
(a) the cover plate is made of 6061 aluminum alloy material;
(b) and (3) processing and forming: the cover plate comprises a cover body base cylinder and a cover body sealing cylinder which are arranged from inside to outside; the wall surface of the inner hole of the cover body base cylinder body is in interference fit with the wall surface of the outer circle of the clamping boss right side lining base body; the left end face of the cover body sealing cylinder body is matched with the first stepped shaft face.
Preferably: manufacturing the permanent magnet ring, wherein the permanent magnet ring comprises a circular fixing metal ring with a T-shaped section; the wall surface of the inner hole of the fixed metal ring is in interference fit with the outer wall surface of the second stepped shaft surface; rectangular neodymium iron boron permanent magnet blocks are symmetrically arranged on two sides of the fixed metal ring; 36 neodymium iron boron permanent magnet blocks are uniformly arranged on one side of the fixed metal ring;
and the permanent magnet ring is sleeved on the second stepped shaft surface of the clamping boss through a fixed metal ring.
Preferably: the welding step between the bushing body and the cover plate is as follows,
(a) the cover plate is tightly sleeved on the outer circular surface of the right end of the lining main body, so that the right end surface of the cover body base cylinder body is enabled to be flush with the right end surface of the lining main body, and meanwhile, the upper end surface of the cover body sealing cylinder body is enabled to be flush with the upper end surface of the clamping boss;
(b) performing friction welding on the side circumference of the bushing main body by using a side welding tool, and particularly fixing the assembled direct-cooling cathode bushing on a numerical control dividing head by using the side welding tool, writing a side circumference welding program, and welding from a specified position;
(c) and (3) carrying out friction welding on the end face circumference of the bushing main body by using an end welding tool, specifically fixing the assembled direct-cooling cathode bushing on a numerical control dividing head by using the end welding tool, compiling an end face circumference welding program, and welding from a specified position.
The invention has the beneficial effects; the utility model provides a take welding process of magnet ring's direct cold cathode bush, compares with traditional structure: the apron cover is tightly on the end of bush main part, and the bush main part flushes with apron equipment back welding seam to carry out twice friction weld, replace original electron beam welding, the welding qualification rate of the product of effectual improvement, greatly reduced the cost, the direct cold cathode bush welding of friction weld technology welded is effectual simultaneously, long service life effectively prevents the erosion of plasma to the magnet ring, reduces the corruption of plasma to reaction chamber, has guaranteed the long-term stability of semiconductor chip production.
Drawings
FIG. 1 is a schematic view of the construction of the direct cold cathode liner of the present invention;
FIG. 2 is a schematic view of the construction of the bushing body of the present invention;
FIG. 3 is an enlarged view taken at A in FIG. 2;
FIG. 4 is a schematic structural diagram of the cover plate of the present invention;
FIG. 5 is a schematic view of a permanent magnet ring according to the present invention;
FIG. 6 is an enlarged view at B in FIG. 5;
FIG. 7 is a schematic structural view of a side welding fixture according to the present invention;
FIG. 8 is a cross-sectional view of the side welding fixture of the present invention;
FIG. 9 is a schematic structural view of an end welding fixture of the present invention;
FIG. 10 is a cross-sectional view of an end welding fixture of the present invention;
in the figure: 1. a bushing body; 11. a bushing base; 12. a flange boss; 13. clamping the boss; 131. a first step shaft surface; 132. a second stepped shaft surface; 2. a cover plate; 21. a cover body base cylinder body; 22. the cover body seals the cylinder body; 3. a permanent magnet ring; 31. fixing a metal ring; 32. a neodymium iron boron permanent magnet block; 4. side welding tooling; 5. and (5) end welding tooling.
Detailed Description
In order to make the objects, technical solutions and advantageous technical effects of the present invention clearer, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments;
in the drawings: a welding process of a direct-cooling cathode lining with a magnet ring comprises the following steps: manufacturing a high-purity aluminum alloy lining main body 1 and a cover plate 2, manufacturing and installing a permanent magnet ring 3, and welding the lining main body 1 and the cover plate 2; the cover plate 2 is tightly sleeved on the end of the bushing main body 1, the welding line of the bushing main body 1 is flush with the welding line of the cover plate 2 after assembly, and friction welding is carried out twice to replace original electron beam welding, the welding qualification rate of the product is effectively improved, the cost is greatly reduced, meanwhile, the direct cold cathode bushing welded by the friction welding process is good in welding effect, the service life is long, the erosion of the plasma to the magnet ring is effectively prevented, the corrosion of the plasma to the reaction chamber is reduced, and the long-term stability of the production of the semiconductor chip is ensured.
With reference to fig. 2 and 3, the manufacture of the bushing body comprises the steps of, (a) cutting with 6061 aluminium alloy 600mm in diameter; (b) extruding to 300mm in diameter; (c) cutting to a final size; (d) heat treatment; (e) detecting the uniformity of the microstructure; (f) and (3) processing and forming: the bushing body 1 includes a bushing base 11; a flange boss 12 is arranged at the left end of the bushing base body 11; a clamping boss 13 is arranged on the right side of the flange boss 12 and on the excircle of the lining base body 11; a first step shaft surface 131 and a second step shaft surface 132 are sequentially arranged on the clamping boss 13 from top to bottom; with reference to fig. 1 and 4, the manufacturing of the cover plate includes the steps of (a) using a 6061 aluminum alloy material as a raw material for the cover plate 2; (b) and (3) processing and forming: the cover plate 2 comprises a cover body base cylinder 21 and a cover body sealing cylinder 22 which are arranged from inside to outside; the inner hole wall surface of the cover body base cylinder body 21 is in interference fit with the outer circle wall surface of the lining base body 11 on the right side of the clamping boss 13; the left end surface of the cover body sealing cylinder 22 is matched with the first stepped shaft surface 131; the installation and the dismantlement of apron 2 of being convenient for do benefit to the maintenance and the change in later stage.
With reference to fig. 5 and 6, in the production of the permanent magnet ring 3, the permanent magnet ring 3 includes a circular fixing metal ring 31 having a "T" shaped cross section; the inner wall surface of the fixed metal ring 31 is in interference fit with the outer wall surface of the second stepped shaft surface 132; rectangular neodymium iron boron permanent magnet blocks 32 are symmetrically arranged on two sides of the fixed metal ring 31; 36 neodymium iron boron permanent magnet blocks 32 are uniformly arranged on one side of the fixed metal ring 31; the surface magnetic field of the magnet is about 5400 Gauss, the arrangement is in the direction of surrounding the lining, NS is distributed alternately, 36 magnets are arranged in a circle, the arrangement is in the same polarity along the axial direction of the lining, and the magnetic field can penetrate into the lining to be used for restraining plasma; the permanent magnet ring 3 is mounted, and the permanent magnet ring 3 is sleeved on the second stepped shaft surface 132 of the clamping boss 13 through the fixing metal ring 31; the installation is convenient, and the stability of the permanent magnet ring 3 is strong.
The welding step between the bush main body 1 and the cover plate 2 is as follows, (a) the cover plate 2 is tightly sleeved on the outer circular surface of the right end head of the bush main body 1, the right end surface of the cover body base cylinder body 21 is ensured to be mutually flush with the right end surface of the bush main body 1, and meanwhile, the upper end surface of the cover body sealing cylinder body 22 is ensured to be mutually flush with the upper end surface of the clamping boss 13; the flatness of the outer part of the whole direct-cooling cathode bushing after installation is ensured; (b) with reference to fig. 7 and 8, performing friction welding on the side circumference of the bushing main body 1 by using the side welding tool 4, specifically, fixing the assembled direct-cooling cathode bushing on the numerical control dividing head by using the side welding tool 4, writing a side circumference welding program, and welding from a specified position; the arrangement of the side welding tool 4 ensures the stability of welding, realizes automatic production and ensures the quality of products; (c) with reference to fig. 9 and 10, the end face circumference of the bushing body 1 is friction welded by using the end welding tool 5, specifically including fixing the assembled direct-cooled cathode bushing on the numerical control index head by using the end welding tool 5, writing an end face circumference welding program, and welding from a specified position; the end welding tool 5 ensures the stability of welding, realizes automatic production and ensures the quality of products.
The invention is implemented specifically as follows: all the working surfaces of the manufactured direct-cooling cathode lining are subjected to hard anodic oxidation treatment, and the inner wall of the direct-cooling cathode lining is sprayed with a Y203 coating, so that the corrosion resistance is enhanced.
The foregoing examples are given solely for the purpose of illustrating the invention and are not to be construed as limiting the embodiments, and other variations and modifications in form thereof will be suggested to those skilled in the art upon reading the foregoing description, and it is not necessary or necessary to exhaustively enumerate all embodiments and all such obvious variations and modifications are deemed to be within the scope of the invention.
Claims (3)
1. The utility model provides a take welding process of magnet ring's direct-cooled cathode bush which characterized in that: the method comprises the following steps: manufacturing a high-purity aluminum alloy lining main body (1) and a cover plate (2), manufacturing and installing a permanent magnet ring (3), and welding the lining main body (1) and the cover plate (2); the manufacture of the bushing body comprises the steps of, (a) cutting with 6061 aluminium alloy 600mm in diameter; (b) extruding to 300mm in diameter; (c) cutting to final size; (d) heat treatment; (e) microstructure uniformity testing; (f) processing and forming: the bushing body (1) comprises a bushing base body (11); a flange boss (12) is arranged at the left end of the bushing base body (11); a clamping boss (13) is arranged on the right side of the flange boss (12) and on the excircle of the bushing base body (11); a first stepped shaft surface (131) and a second stepped shaft surface (132) are sequentially arranged on the clamping boss (13) from top to bottom; the manufacturing of the cover plate comprises the steps of, (a) using 6061 aluminum alloy material as raw material for the cover plate (2); (b) and (3) processing and forming: the cover plate (2) comprises a cover body base cylinder body (21) and a cover body sealing cylinder body (22) which are arranged from inside to outside; the inner hole wall surface of the cover body base cylinder body (21) is in interference fit with the outer circle wall surface of the lining base body (11) on the right side of the clamping boss (13); the left end surface of the cover body sealing cylinder body (22) is matched with the first stepped shaft surface (131).
2. The welding process of the direct cooling cathode liner with the magnet ring as claimed in claim 1, wherein: manufacturing the permanent magnet ring (3), wherein the permanent magnet ring (3) comprises a circular fixing metal ring (31) with a T-shaped cross section; the inner hole wall surface of the fixed metal ring (31) is in interference fit with the outer wall surface of the second stepped shaft surface (132); rectangular neodymium iron boron permanent magnet blocks (32) are symmetrically arranged on two sides of the fixed metal ring (31); 36 neodymium iron boron permanent magnet blocks (32) are uniformly arranged on one side of the fixed metal ring (31); and the permanent magnet ring (3) is arranged, and the permanent magnet ring (3) is sleeved on the second stepped shaft surface (132) of the clamping boss (13) through a fixed metal ring (31).
3. The welding process of the direct cooling cathode liner with the magnet ring as claimed in claim 1, wherein: the welding step between the bushing main body (1) and the cover plate (2) is as follows, (a) the cover plate (2) is tightly sleeved on the outer circular surface of the right end of the bushing main body (1) to ensure that the right end surface of the cover body base cylinder body (21) is flush with the right end surface of the bushing main body (1) and ensure that the upper end surface of the cover body sealing cylinder body (22) is flush with the upper end surface of the clamping boss (13); (b) friction welding the side circumference of the bushing main body (1) by using a side welding tool (4), specifically comprising the steps of fixing the assembled direct cold cathode bushing on a numerical control dividing head by using the side welding tool (4), compiling a side circumference welding program and welding from a specified position; and (c) friction welding the end surface circumference of the bushing main body (1) by using an end welding tool (5), and specifically comprises the steps of fixing the assembled direct cold cathode bushing on a numerical control dividing head by using the end welding tool (5), compiling an end surface circumference welding program and welding from a specified position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810799732.XA CN109175666B (en) | 2018-07-20 | 2018-07-20 | Welding process of direct-cooling cathode lining with magnet ring |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810799732.XA CN109175666B (en) | 2018-07-20 | 2018-07-20 | Welding process of direct-cooling cathode lining with magnet ring |
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| Publication Number | Publication Date |
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| CN109175666A CN109175666A (en) | 2019-01-11 |
| CN109175666B true CN109175666B (en) | 2020-08-25 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201810799732.XA Active CN109175666B (en) | 2018-07-20 | 2018-07-20 | Welding process of direct-cooling cathode lining with magnet ring |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105097409A (en) * | 2015-09-06 | 2015-11-25 | 靖江先锋半导体科技有限公司 | Straight cold cathode bush with magnet ring for plasma reaction chamber |
| CN205810505U (en) * | 2016-04-21 | 2016-12-14 | 王煊 | Neodymium-iron-boron iron component for vehicle maintenance service |
| CN206854799U (en) * | 2016-12-29 | 2018-01-09 | 有研亿金新材料有限公司 | Integral type welding tooling |
| CN107761075A (en) * | 2016-08-23 | 2018-03-06 | 朗姆研究公司 | Spin friction welded blank for PECVD heating shower nozzles |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8597462B2 (en) * | 2010-05-21 | 2013-12-03 | Lam Research Corporation | Movable chamber liner plasma confinement screen combination for plasma processing apparatuses |
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2018
- 2018-07-20 CN CN201810799732.XA patent/CN109175666B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105097409A (en) * | 2015-09-06 | 2015-11-25 | 靖江先锋半导体科技有限公司 | Straight cold cathode bush with magnet ring for plasma reaction chamber |
| CN205810505U (en) * | 2016-04-21 | 2016-12-14 | 王煊 | Neodymium-iron-boron iron component for vehicle maintenance service |
| CN107761075A (en) * | 2016-08-23 | 2018-03-06 | 朗姆研究公司 | Spin friction welded blank for PECVD heating shower nozzles |
| CN206854799U (en) * | 2016-12-29 | 2018-01-09 | 有研亿金新材料有限公司 | Integral type welding tooling |
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| CN109175666A (en) | 2019-01-11 |
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Address after: 214500 No. 195, Xingang Avenue, Jingjiang Economic Development Zone, Taizhou City, Jiangsu Province Patentee after: Jiangsu Xianfeng Precision Technology Co.,Ltd. Address before: 214500 No.8 Deyu Road, Chengnan Park, Jingjiang City, Taizhou City, Jiangsu Province Patentee before: JINGJIANG XIANFENG SEMICONDUCTOR TECHNOLOGY CO.,LTD. |
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