CN109175666A - A kind of welding procedure of the direct-cooled cathode bushing of carry magnet ring - Google Patents
A kind of welding procedure of the direct-cooled cathode bushing of carry magnet ring Download PDFInfo
- Publication number
- CN109175666A CN109175666A CN201810799732.XA CN201810799732A CN109175666A CN 109175666 A CN109175666 A CN 109175666A CN 201810799732 A CN201810799732 A CN 201810799732A CN 109175666 A CN109175666 A CN 109175666A
- Authority
- CN
- China
- Prior art keywords
- liner body
- welding
- cover board
- bushing
- direct
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/12—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating the heat being generated by friction; Friction welding
- B23K20/122—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating the heat being generated by friction; Friction welding using a non-consumable tool, e.g. friction stir welding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32458—Vessel
- H01J37/32477—Vessel characterised by the means for protecting vessels or internal parts, e.g. coatings
- H01J37/32495—Means for protecting the vessel against plasma
Abstract
A kind of welding procedure of the direct-cooled cathode bushing of carry magnet ring, comprising the following steps: the welding of the manufacture of high purity aluminum alloy material liner body and cover board --- manufacture and installation of permanent magnetic iron ring --- between liner body and cover board；Cover board is locked on the end of liner body, weld seam flushes after liner body is assembled with cover board, and carry out friction welding twice, instead of original electron beam welding, the solder yield of the product effectively improved, greatly reduce cost, the direct-cooled cathode bushing welding effect of friction welding technological welding simultaneously is good, and long service life effectively prevent erosion of the plasma to magnet ring, corrosion of the plasma to reaction chamber is reduced, ensure that the steady in a long-term of semiconductor chip production.
Description
Technical field
The present invention relates to semiconductor technology processing equipment technical field, in particular to the direct-cooled cathode of a kind of carry magnet ring serves as a contrast
The welding procedure of set.
Background technique
Plasma reaction chamber is the key equipment of semiconductor chip processing, is manufactured for handling semiconductor crystal wafer integrated
The indoor etching gas of reaction chamber or deposition gases are usually excited into plasmoid to make by application radiofrequency field by circuit
It is etched with vacuum processing chamber and materials chemistry is vapor-deposited on substrate.During plasma etching, it can generate a large amount of
C1 base, F base isoreactivity free radical also can be to the plasmas of aluminium and aluminium alloy manufacture when performing etching to semiconductor devices
The inner surface of reaction chamber generates corrosiveness, and this strong erosion produces a large amount of particle, results in the need for frequently tieing up
Protect production equipment.Therefore the direct-cooled cathode bushing constraint plasma with carry magnet ring, protection etc. are just needed in process of production
Ion erosion reduces corrosion of the plasma to reaction chamber, and to guarantee that magnet ring seals, and completely cuts off with plasma, mesh
Preceding welding manner is easy affected by magnetic fields, and welding needs sealing weld piece, and qualification rate is low, and welding cost is high, direct-cooled cathode bushing
Service life it is shorter.
Summary of the invention
It is an object of the present invention to provide a kind of welding procedures of the direct-cooled cathode bushing of carry magnet ring, solve the above technology and ask
Topic.
In order to achieve the above technical purposes, reach above-mentioned technical requirements, the technical scheme adopted by the invention is that: it is a kind of
The welding procedure of the direct-cooled cathode bushing of carry magnet ring, it is characterised in that: the following steps are included: high purity aluminum alloy material bushing
The welding of manufacture --- manufacture and installation of permanent magnetic iron ring --- between liner body and cover board of main body and cover board.
Preferred: the manufacture of the liner body includes the following steps,
(a) it is cut using 6061 aluminium alloys of diameter 600mm；
(b) it is squeezed into diameter 300mm；
(c) final size is cut to；
(d) it is heat-treated；
(e) microstructure detects the uniformity；
(f) machine-shaping: the liner body includes bushing matrix；The left end of the bushing matrix is provided with flange boss；Institute
It states the right side of flange boss, be provided with clamping convex platform in the outer circle of bushing matrix；In the clamping convex platform from top to bottom successively
It is provided with the first ladder axial plane and the second ladder axial plane；
The manufacture of the cover board includes the following steps,
(a) cover board uses 6061 aluminum alloy materials as raw material；
(b) machine-shaping: affiliated cover board includes the lid base cylinder and lid sealed cylinder being arranged from inside to outside；The lid base
It is interference fitted between the outer circle wall surface of bushing matrix on the right side of the inner hole wall surface and clamping convex platform of cylinder；The lid sealed cylinder
Left side is matched with the first ladder axial plane.
Preferred: the manufacture of the permanent magnetic iron ring, the permanent magnetic iron ring include the fixed metal of circle in T-shape section
Circle；It is interference fitted between the inner hole wall surface of the fixed quoit and the outside wall surface of the second ladder axial plane；The fixed quoit
Two sides be symmetrically arranged with rectangle neodymium-iron-boron permanent magnet block；The unilateral side of the fixed quoit is evenly arranged with 36 neodymium iron
Boron permanent-magnet block；
The installation of the permanent magnetic iron ring, the permanent magnetic iron ring are set in the second ladder of clamping convex platform by fixed quoit
On axial plane.
Preferred: the welding step between the liner body and cover board is as follows,
(a) cover board is locked on the periphery of liner body right end, it is ensured that the right side of lid base cylinder and liner body
Right side is mutually flush, while ensuring that the upper surface of lid sealed cylinder and the upper surface of clamping convex platform are mutually flush；
(b) friction welding (FW) is carried out using side surface circumference of the side mounted welder to liner body, specifically including will assemble using side mounted welder
Good direct-cooled cathode bushing is fixed on NC dividing head, writes side surface circumference welding procedure, is welded since designated position
It connects；
(c) friction welding (FW) is carried out using end face circumference of the end mounted welder to liner body, specifically including will assemble using end mounted welder
Good direct-cooled cathode bushing is fixed on NC dividing head, writes end face circumference soldering program, is welded since designated position
It connects.
Beneficial effects of the present invention；A kind of welding procedure of the direct-cooled cathode bushing of carry magnet ring, compared with traditional structure:
Cover board is locked on the end of liner body, and weld seam flushes after liner body is assembled with cover board, and carries out friction welding twice, generation
For original electron beam welding, the solder yield of the product effectively improved greatly reduces cost, while friction welding technological
The direct-cooled cathode bushing welding effect of welding is good, long service life, effectively prevent erosion of the plasma to magnet ring, reduce etc.
Corrosion of the gas ions to reaction chamber ensure that the steady in a long-term of semiconductor chip production.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the direct-cooled cathode bushing of the present invention；
Fig. 2 is the structural schematic diagram of liner body of the present invention；
Fig. 3 is the enlarged drawing in Fig. 2 at A；
Fig. 4 is the structural schematic diagram of cover board of the present invention；
Fig. 5 is the structural schematic diagram of permanent magnetic iron ring of the present invention；
Fig. 6 is the enlarged drawing in Fig. 5 at B；
Fig. 7 is the structural schematic diagram of side mounted welder of the present invention；
Fig. 8 is the cross-sectional view of side mounted welder of the present invention；
Fig. 9 is the structural schematic diagram of end mounted welder of the present invention；
Figure 10 is the cross-sectional view of end mounted welder of the present invention；
In figure: 1. liner bodies；11. bushing matrix；12. flange boss；13. clamping convex platform；131. the first multi-diameter shaft
Face；132. the second ladder axial plane；2. cover board；21. lid base cylinder；22. lid sealed cylinder；3. permanent magnetic iron ring；
31. fixed quoit；32. neodymium-iron-boron permanent magnet block；4. side mounted welder；5. end mounted welder.
Specific embodiment
In order to be more clear goal of the invention of the invention, technical solution and its advantageous effects, below in conjunction with attached drawing
And specific embodiment, the present invention will be described in further detail；
In the accompanying drawings: a kind of welding procedure of the direct-cooled cathode bushing of carry magnet ring, comprising the following steps: high purity aluminum alloy material
The manufacture --- manufacture and installation of permanent magnetic iron ring 3 --- of matter liner body 1 and cover board 2 is between liner body 1 and cover board 2
Welding；Cover board 2 is locked on the end of liner body 1, and weld seam flushes after liner body 1 is assembled with cover board 2, and is rubbed twice
Welding is wiped, instead of original electron beam welding, the solder yield of the product effectively improved greatly reduces cost, simultaneously
The direct-cooled cathode bushing welding effect of friction welding technological welding is good, and long service life effectively prevent plasma to magnet ring
It corrodes, reduces corrosion of the plasma to reaction chamber, ensure that the steady in a long-term of semiconductor chip production.
In conjunction with Fig. 2 and Fig. 3, the manufacture of the liner body includes the following steps, (a) uses 6061 aluminium of diameter 600mm
Alloy cutting；(b) it is squeezed into diameter 300mm；(c) final size is cut to；(d) it is heat-treated；(e) microstructure detection is uniform
Degree；(f) machine-shaping: the liner body 1 includes bushing matrix 11；The left end of the bushing matrix 11 is provided with flange boss
12；The right side of the flange boss 12 is provided with clamping convex platform 13 in the outer circle of bushing matrix 11；In the clamping convex platform 13
It is disposed with the first ladder axial plane 131 and the second ladder axial plane 132 from top to bottom；In conjunction with Fig. 1 and Fig. 4, the system of the cover board
It makes and includes the following steps, (a) described cover board 2 uses 6061 aluminum alloy materials as raw material；(b) machine-shaping: affiliated cover board 2 wraps
Include the lid base cylinder 21 and lid sealed cylinder 22 being arranged from inside to outside；The inner hole wall surface of the lid base cylinder 21 and clamping
It is interference fitted between the outer circle wall surface of 13 right side bushing matrix 11 of boss；The left side of the lid sealed cylinder 22 and the first rank
Terraced axial plane 131 matches；Convenient for the installation and removal of cover board 2, conducive to the maintenance and replacement in later period.
In conjunction with Fig. 5 and Fig. 6, the manufacture of the permanent magnetic iron ring 3, the permanent magnetic iron ring 3 includes the circle in T-shape section
Fixed quoit 31；It is interference fitted between the inner hole wall surface of the fixed quoit 31 and the outside wall surface of the second ladder axial plane 132；
The two sides of the fixed quoit 31 are symmetrically arranged with rectangle neodymium-iron-boron permanent magnet block 32；The list of the fixed quoit 31
Side is evenly arranged with 36 neodymium-iron-boron permanent magnet blocks 32；The Surface field of magnet is about 5400 Gauss, is arranged as surrounding
The direction of bushing, NS are alternately distributed, and arrange 36 within one week, the axial alignment along bushing is identical polar, and two layers totally, magnetic field energy penetrates
Bushing, for constraining plasma；The installation of the permanent magnetic iron ring 3, the permanent magnetic iron ring 3 pass through fixed 31 sets of quoit
It is located on the second ladder axial plane 132 of clamping convex platform 13；It is easy for installation, and the stability of permanent magnetic iron ring 3 is strong.
Welding step between the liner body 1 and cover board 2 is as follows, and (a) cover board 2 is locked in 1 right end of liner body
Periphery on, it is ensured that the right side of lid base cylinder 21 and the right side of liner body 1 are mutually flush, while ensuring that lid is close
The upper surface of sealed tube body 22 and the upper surface of clamping convex platform 13 are mutually flush；Entire direct-cooled cathode bushing outer after ensuring to install
Planarization；(b) Fig. 7 and Fig. 8 is combined, friction welding (FW) is carried out using side surface circumference of the side mounted welder 4 to liner body 1, specifically includes
Assembled direct-cooled cathode bushing is fixed on NC dividing head using side mounted welder 4, write side surface circumference welding procedure, from
Designated position starts to be welded；The setting of side mounted welder 4 ensure that the steady of welding, realizes automated production, ensure that production
The quality of product；(c) Fig. 9 and Figure 10 is combined, carries out friction welding (FW) using end face circumference of the end mounted welder 5 to liner body 1, it is specific to wrap
Include assembled direct-cooled cathode bushing is fixed on NC dividing head using end mounted welder 5, write end face circumference soldering program,
It is welded since designated position；The setting of end mounted welder 5 ensure that the steady of welding, realizes automated production, ensure that
The quality of product.
Specific implementation of the invention: all working surface carries out hard anodic oxygen on the direct-cooled cathode bushing after completing
Change processing, the inner-wall spraying Y203 coating of direct-cooled cathode bushing enhance resistance to corrosion.
Above-described embodiment is only intended to clearly illustrate description made by the present invention, and does not limit the embodiments,
To those of ordinary skill in the art, other various forms of variations or change can also be made on the basis of the above description
Dynamic, there is no necessity and possibility to exhaust all the enbodiments, and the obvious variation or change thus amplified out
It is dynamic to be still in the protection scope of this invention.
Claims (4)
1. a kind of welding procedure of the direct-cooled cathode bushing of carry magnet ring, it is characterised in that: the following steps are included: raffinal closes
Manufacture --- manufacture and installation of permanent magnetic iron ring (3) --- liner body (1) of golden material liner body (1) and cover board (2)
With the welding between cover board (2).
2. a kind of welding procedure of the direct-cooled cathode bushing of carry magnet ring according to claim 1, it is characterised in that: described
The manufacture of liner body includes the following steps,
(a) it is cut using 6061 aluminium alloys of diameter 600mm；
(b) it is squeezed into diameter 300mm；
(c) final size is cut to；
(d) it is heat-treated；
(e) microstructure detects the uniformity；
(f) machine-shaping: the liner body (1) includes bushing matrix (11)；The left end of the bushing matrix (11) is provided with
Flange boss (12)；The right side of the flange boss (12) is provided with clamping convex platform (13) in the outer circle of bushing matrix (11)；
The first ladder axial plane (131) and the second ladder axial plane (132) are disposed on the clamping convex platform (13) from top to bottom；
The manufacture of the cover board includes the following steps,
(a) cover board (2) uses 6061 aluminum alloy materials as raw material；
(b) machine-shaping: affiliated cover board (2) includes the lid base cylinder (21) and lid sealed cylinder being arranged from inside to outside
(22)；On the right side of the inner hole wall surface and clamping convex platform (13) of the lid base cylinder (21) between the outer circle wall surface of bushing matrix (11)
Interference fit；The left side of the lid sealed cylinder (22) is matched with the first ladder axial plane (131).
3. a kind of welding procedure of the direct-cooled cathode bushing of carry magnet ring according to claim 2, it is characterised in that: described
The manufacture of permanent magnetic iron ring (3), the permanent magnetic iron ring (3) include that the circle in T-shape section is fixed quoit (31)；It is described solid
Determine to be interference fitted between the inner hole wall surface of quoit (31) and the outside wall surface of the second ladder axial plane (132)；The fixed quoit
(31) two sides are symmetrically arranged with rectangle neodymium-iron-boron permanent magnet block (32)；The unilateral side of the fixed quoit (31) is uniformly set
It is equipped with 36 neodymium-iron-boron permanent magnet blocks (32)；
The installation of the permanent magnetic iron ring (3), the permanent magnetic iron ring (3) pass through fixed quoit (31) and are set in clamping convex platform
(13) on the second ladder axial plane (132).
4. a kind of welding procedure of the direct-cooled cathode bushing of carry magnet ring according to claim 2, it is characterised in that: described
Welding step between liner body (1) and cover board (2) is as follows,
(a) cover board (2) is locked on the periphery of liner body (1) right end, it is ensured that the right side of lid base cylinder (21) with
The right side of liner body (1) is mutually flush, while ensuring the upper surface and clamping convex platform (13) of lid sealed cylinder (22)
Upper surface is mutually flush；
(b) friction welding (FW) is carried out using the side surface circumference of side mounted welder (4) to liner body (1), specifically included using side mounted welder
(4) assembled direct-cooled cathode bushing is fixed on NC dividing head, writes side surface circumference welding procedure, opened from designated position
Beginning is welded；
(c) friction welding (FW) is carried out using the end face circumference of end mounted welder (5) to liner body (1), specifically included using end mounted welder
(5) assembled direct-cooled cathode bushing is fixed on NC dividing head, writes end face circumference soldering program, opened from designated position
Beginning is welded.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810799732.XA CN109175666B (en) | 2018-07-20 | 2018-07-20 | Welding process of direct-cooling cathode lining with magnet ring |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810799732.XA CN109175666B (en) | 2018-07-20 | 2018-07-20 | Welding process of direct-cooling cathode lining with magnet ring |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109175666A true CN109175666A (en) | 2019-01-11 |
| CN109175666B CN109175666B (en) | 2020-08-25 |
Family
ID=64936451
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810799732.XA Active CN109175666B (en) | 2018-07-20 | 2018-07-20 | Welding process of direct-cooling cathode lining with magnet ring |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109175666B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20140051254A1 (en) * | 2010-05-21 | 2014-02-20 | Lam Research Corporation | Movable chamber liner plasma confinement screen combination for plasma processing apparatuses |
| CN105097409A (en) * | 2015-09-06 | 2015-11-25 | 靖江先锋半导体科技有限公司 | Straight cold cathode bush with magnet ring for plasma reaction chamber |
| CN205810505U (en) * | 2016-04-21 | 2016-12-14 | 王煊 | Neodymium-iron-boron iron component for vehicle maintenance service |
| CN206854799U (en) * | 2016-12-29 | 2018-01-09 | 有研亿金新材料有限公司 | Integral type welding tooling |
| CN107761075A (en) * | 2016-08-23 | 2018-03-06 | 朗姆研究公司 | Spin friction welded blank for PECVD heating shower nozzles |
-
2018
- 2018-07-20 CN CN201810799732.XA patent/CN109175666B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20140051254A1 (en) * | 2010-05-21 | 2014-02-20 | Lam Research Corporation | Movable chamber liner plasma confinement screen combination for plasma processing apparatuses |
| CN105097409A (en) * | 2015-09-06 | 2015-11-25 | 靖江先锋半导体科技有限公司 | Straight cold cathode bush with magnet ring for plasma reaction chamber |
| CN205810505U (en) * | 2016-04-21 | 2016-12-14 | 王煊 | Neodymium-iron-boron iron component for vehicle maintenance service |
| CN107761075A (en) * | 2016-08-23 | 2018-03-06 | 朗姆研究公司 | Spin friction welded blank for PECVD heating shower nozzles |
| CN206854799U (en) * | 2016-12-29 | 2018-01-09 | 有研亿金新材料有限公司 | Integral type welding tooling |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109175666B (en) | 2020-08-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4881015B2 (en) | Corrosion resistant aluminum component with multilayer coating | |
| US6878234B2 (en) | Plasma processing device and exhaust ring | |
| TWI414621B (en) | Sputtering target and sputtering method using the target | |
| TWI448573B (en) | Sputter film forming apparatus | |
| JPH0213026B2 (en) | ||
| JP4945566B2 (en) | Capacitively coupled magnetic neutral plasma sputtering system | |
| KR20070088368A (en) | Cooling block and plasma processing apparatus | |
| KR101344085B1 (en) | Film-forming method and film-forming apparatus | |
| CN104513952B (en) | The preparation method and target material assembly of target material assembly | |
| TWI488988B (en) | Sputter film forming apparatus | |
| JP5186297B2 (en) | Sputtering equipment | |
| CN108274009B (en) | Cr target material repairing method | |
| CN105097409B (en) | Straight cold cathode bush with magnet ring for plasma reaction chamber | |
| CN109175666A (en) | A kind of welding procedure of the direct-cooled cathode bushing of carry magnet ring | |
| US20170213712A1 (en) | Backing Plate Obtained by Diffusion-Bonding Anticorrosive Metal and Mo or Mo Alloy, and Sputtering Target-Backing Plate Assembly Provided with Said Backing Plate | |
| CN204325472U (en) | A kind of vacuum tank for target spraying | |
| JP4713853B2 (en) | Magnetron cathode electrode and sputtering method using magnetron cathode electrode | |
| KR20170105613A (en) | Cathode assembly | |
| JP2013129871A (en) | Magnetron sputtering cathode and sputtering apparatus equipped with the same | |
| KR20170041840A (en) | Target assembly | |
| CN108251810A (en) | A kind of preparation method of corrosion-resistant Sintered NdFeB magnet | |
| JP2000188265A (en) | Sputtering device and method | |
| CN210349769U (en) | Plasma etching reaction chamber with shielding plate | |
| CN210349767U (en) | Plasma etching reaction chamber | |
| CN212375367U (en) | Target ionization cooling bearing mechanism |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 214500 No. 195, Xingang Avenue, Jingjiang Economic Development Zone, Taizhou City, Jiangsu Province Patentee after: Jiangsu Xianfeng Precision Technology Co.,Ltd. Address before: 214500 No.8 Deyu Road, Chengnan Park, Jingjiang City, Taizhou City, Jiangsu Province Patentee before: JINGJIANG XIANFENG SEMICONDUCTOR TECHNOLOGY CO.,LTD. |
|
| CP03 | Change of name, title or address |