CN109168116A - A kind of angular speed closed-loop policy improving MEMS gyro static state and linearity index - Google Patents
A kind of angular speed closed-loop policy improving MEMS gyro static state and linearity index Download PDFInfo
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- CN109168116A CN109168116A CN201810825998.7A CN201810825998A CN109168116A CN 109168116 A CN109168116 A CN 109168116A CN 201810825998 A CN201810825998 A CN 201810825998A CN 109168116 A CN109168116 A CN 109168116A
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/005—Electrostatic transducers using semiconductor materials
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
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- H04R2201/003—Mems transducers or their use
Abstract
The angular speed closed-loop policy of a kind of raising MEMS gyro static state of the present invention and linearity index belongs to sensor control field.The present invention optimizes a kind of MEMS gyro control mode of angular speed closed loop, gyroscope displacement error signal is detected using quadravalence sigma-delta feedforward summing circuit, using comb-tooth-type electrode-feedback pilot angle rate error information, the mechanical non-orthogonal error signal of parallel-plate electrode correction, angular speed error path is using directly-I type controller, mechanical non-orthogonal error signal is using direct-II type controller, in the case where so that MEMS gyro sensed-mode is in zero speed input always, finally the form by closed loop command signal superposition forms closed-loop control, MEMS gyro remains at equilbrium position in sensed-mode, it is always worked on specific operating point using the servo-controlled MEMS gyro of this programme, MEMS gyro entirety static properties, dynamic property is improved.
Description
Technical field
A kind of angular speed closed-loop policy for improving MEMS gyro static state and linearity index of the present invention, belongs to sensor control
Technical field.
Background technique
MEMS gyro is a kind of novel angular rate sensor.The basic principle is that the Coriolis based on mechanical resonant is imitated
It answers, is essentially one kind of mechanical resonator gyroscope, high-precision MEMS gyro has been successfully applied in many application and environments,
But the high-precision of MEMS gyro static state and the contradictory problems of bandwidth are difficult to handle, although MEMS gyro static properties has reached
The precision of rate grade (10-1000 (°)/h), but in terms of dynamic range, it is difficult meet the needs of bandwidth > 70Hz (rate grade),
This is because high-precision MEMS gyro, which generally requires to reduce to drive with the difference Δ f of sensed-mode intrinsic frequency, obtains higher machine
Tool gain, and the half that the mechanical bandwidth of MEMS gyro open loop detection direction is about Δ f, so, high-precision MEMS gyro is to obtain
High mechanical gain just needs to sacrifice the band merit of MEMS gyro, use the mode of angular speed closed loop can be in sensed-mode
Contradictory problems between effective solution MEMS gyro static accuracy and bandwidth.Relative to open loop detection system, make MEMS gyro
Mass block sensed-mode always be in balance in the position that no angular speed inputs.MEMS gyro closed-loop system is in range, mark
The performances such as non-linear factor, constant multiplier symmetry, repeatability, threshold value, resolution ratio and bias instaility are spent all to have obtained greatly
Improvement.This is based on MEMS gyro sensed-mode taxi driver brother formula dynamic balance, MEMS top mainly due to the closed loop detection of MEMS gyro
The mass block of spiral shell always works in the equilbrium position of sensed-mode, greatly reduces the non-linear of capacitance signal；Simultaneously because
Error caused by the structures such as manufacturing deficiency, residual stress is also inhibited.
Summary of the invention
The purpose of the present invention:
For the status that effective open-loop bandwidth is high, bias instaility, the scale linearity are bad of high-precision MEMS gyro,
It is proposed a kind of angular speed closed-loop policy for improving MEMS gyro static state and linearity index.Promoted MEMS gyro bandwidth characteristic and
The dynamic responding speed of MEMS gyro and the bandpass flatness of MEMS gyro, effectively promoted MEMS gyro static accuracy and
Scale factor linearity makes MEMS gyro enter high-precision, performance application technology platform.
Technical solution of the present invention:
A kind of angular speed closed-loop policy improving MEMS gyro static state and linearity index, the method take following step
It is rapid:
1) weak capacitive signal, benefit are detected first with quadravalence feedforward summation type sigma-delta modulator processing circuit
With MEM gyro angular speed dependent phase, the mechanical non-orthogonal dependent phase of MEM gyro demodulate MEM gyro angular speed error signal,
The mechanical non-orthogonal error signal of MEM gyro；
2) two kinds of error signals obtained in step 1 pass through CIC decimation filter, IIR bandpass filter, IIR band resistance filter
After wave device, CIC interpolation filter, low-pass filter, directly-I type controller, directly-II type controller, with straight are entered back into
- I type controller is connect, directly-II type controller is calculating separately MEM gyro angular speed closed-loop control amount, MEM gyro machinery not just
Hand over closed-loop control amount；
3) by summing circuit to MEM gyro angular speed closed-loop control amount, MEM gyro machinery obtained in step 1 not just
It hands over closed-loop control amount to sum, obtained summing signal is added on the electrode of MEMS gyro detection closed loop, to realize MEMS
The displacement closed loop of gyroscope, and using MEM gyro angular speed closed-loop control amount as effective output signal of closed loop gyro.
The method reality based on a kind of quadravalence feedforward summation type sigma-delta modulator framework signal processing circuit
Existing, the circuit includes the capacitive detection circuit of continuous type variable gain, analog low-pass circuit, quantizer circuit:
The capacitive detection circuit of the continuous type variable gain: its function is will be from the capacitor of MEMS gyro sensed-mode
Signal is converted to voltage signal, and the feedback resistance for using PMOS tube technique to be formed provides dc point for differential capacitance detection,
The amplification end of the capacitive detection circuit of continuous type variable gain is controlled using PMOS tube；
Analog low-pass circuit: its function be by the way of passive low-pass filter, by MEM gyro angular speed error signal,
The mechanical non-orthogonal signal errors signal of MEM gyro enters emitter following circuit in a manner of differential signal, to drive subsequent quadravalence to feedover
Summation type sigma-delta modulator framework signal processing circuit；
Quantizer circuit: gradually compare quadravalence feedforward summation type sigma-delta modulator frame using 7 linear comparators
The output signal of structure signal processing circuit exports 7 bit comparison data, and by 3,4,5,6 bit comparison data therein respectively with 1,
2,5,6 compare data and 0,2,4,6 bit comparison data do linear phase and operation, and the phase and operation signal of output are 3 significant figures
According to.
The method takes following steps:
1) reverse side of operational amplifier (1) and operational amplifier (2) in the capacitive detection circuit of continuous type variable gain
Voltage low side between the dc point feedback resistance that is worked by big resistance as amplifier using PMOS tube；
2) quadravalence feedforward summation type sigma-delta modulator, using switched capacitor processing scheme, using MOS
Pipe delay time is respectively formed the timing of switching capacity, the transmitting of timing control signal.
The step 2 uses following steps: first by the 3bit of quadravalence feedforward summation type sigma-delta modulator output
Code stream is converted to 4bit signed number evidence, recycles CIC decimation filter by quadravalence feedforward summation type sigma-delta modulator
The sample rate of the high speed 4bit code stream of output reduces, by the 4bit code stream signal bit stream after reduction by IIR bandpass filter,
IIR bandstop filter, recycles CIC interpolation filter to be translated into high-speed parallel data, and high-speed parallel data carries out zero passage
The phase information of the mechanical non-orthogonal error signal of MEM gyro angular speed error signal, MEM gyro is extracted in comparison operation.
It is further comprising the steps of in the step 2: the mechanical non-orthogonal error of MEM gyro angular speed error signal, MEM gyro
Signal enter directly-I type controller, directly-II type controller, directly-I type controller, directly-II type controller use
The mode of feedforward and feedback summation, so that directly-I type controller, directly-II type controller zero, pole location meet
The demand for control of system forms closed-loop dynamic, static properties.
The present invention have the advantage that and the utility model has the advantages that
1) present invention effectively promotes the zero bias stability characteristic (quality) of MEMS gyro, and the static stability index of MEMS closed loop gyro reaches
To 5.2 °/h, MEMS gyro static accuracy can be effectively promoted.After MEMS gyro angular speed closed-loop control, can greatly it contract
Small MEMS gyro difference frequency after obtaining high mechanical gain, can obtain high static state to improve gyro static mechanical gain
Precision, the bandwidth without losing MEMS gyro, and high-precision quadravalence feedforward summation type sigma-delta demodulator circuit has electricity
Hold and demodulate the advantages such as signal-to-noise ratio is good, and framework is simple, good signal-to-noise ratio advantage can be obtained while the smallest realization expense.
2) present invention also has beneficial outcomes, test result to the scale factor linearity for promoting MEMS gyro
339.3ppm shows the balance position of the MEMS gyro sensor operating point sensed-mode always using angular speed Closed loop Control
It sets, external influence factor is small, strong antijamming capability, and MEMS gyro can obtain higher mechanical dynamic model under minimum displacement
It encloses, the non-ideal factor of capacitance detecting reduces, and to obtain higher scale factor linearity, gyro system is obtained more
Add excellent linearity index.
Detailed description of the invention
Fig. 1 is MEMS gyro angular speed error control scheme；
Fig. 2 is MEMS gyro high-accuracy capacitor detection scheme；
Fig. 3 is CIC decimation filter framework；
Fig. 4 gyro CIC interpolation filter framework；
Fig. 5 variable gain capacitance-voltage conversion circuit；
Fig. 6 modulator summing circuit；
Fig. 7 MEMS gyro angular speed error controller framework；
The mechanical non-orthogonal error controller framework of Fig. 8 MEMS gyro
Wherein, 1 is quadravalence feedforward summation type sigma-delta demodulator circuit, and 2 be low-pass filter, and 3 be lead compensation control
Device processed, 4 be add circuit, and 5 be the pmos pipe circuit that gain controls in capacitance current conversion circuit, and 6 be capacitance current conversion electricity
It is responsible for the pmos pipe circuit of DC feedback in road.
Specific embodiment
The principle of the present invention: MEMS double quality blocks gyro is a kind of novel angular rate sensor.The basic principle is that being based on
Mechanical resonant taxi driver brother's formula stress effect keeps the stability of drive amplitude that is, on MEMS double quality blocks gyro driving direction, is brother
Family name's stress effect provides stable environment, convenient for testing gyro angular speed using coriolis force effect.At this stage mainly using inspection
The mode of mode open loop detection is surveyed, what the present invention mainly introduced is the operating mode of sensed-mode closed loop, utilizes high-accuracy capacitor
Detection pattern is non-orthogonal to the machinery of the sensed-mode of MEMS gyro, angle rate signal carries out error demodulation, by error signal point
Not Jin Ru controller, using control output thermal compensation signal be added to sensed-mode force electrode on, realize sensed-mode taxi driver brother
Formula dynamic balance makes MEMS gyro stabilization of operating point, to obtain higher bias instaility and scale factor linearity index.
A kind of angular speed closed-loop policy improving MEMS gyro static state and linearity index, the method take following step
It is rapid:
1) weak capacitive signal, benefit are detected first with quadravalence feedforward summation type sigma-delta modulator processing circuit
With MEM gyro angular speed dependent phase, the mechanical non-orthogonal dependent phase of MEM gyro demodulate MEM gyro angular speed error signal,
The mechanical non-orthogonal error signal of MEM gyro, as shown in figure 1 shown in 1, quadravalence feedforward summation type sigma-delta modulator processing electricity
Road includes four part such as capacitance current conversion circuit, low-pass filter circuit, analog to digital conversion circuit, sample circuit composition.MEMS top
Spiral shell angular speed error signal enters capacitor demodulation module, wherein capacitance current conversion circuit uses the capacitor of Distinct matrix
Conversion circuit provides direct current as shown in figure 3, capacitance current conversion circuit forms negative-feedback by resistance by pmos pipe for amplifier
Operating point, as shown in Fig. 36.The on-off of the feedback branch of capacitance current conversion circuit is controlled by pmos pipe again, is formed not
Same gain factor is as shown in Fig. 35.Achieve the effect that gain controllable.Error signal is laggard by capacitor conversion circuit
Enter analog to digital conversion circuit link, analog to digital conversion circuit is made of quadravalence feedforward summation type circuit, and the mode of switching capacity forms electricity
Road form, circuit form enter quantizer circuit after summation as shown in Fig. 2, four integrators feedover respectively, and circuit is to switch electricity
The mode of appearance forms coefficient shown in Fig. 2, as shown in figure 4, switching capacity uses C1_S21, C1_S22, C2_S21, C2_S22 tetra-
Kind switching signal completes the coefficients such as a1-a4, c1-c3, b1, b2 in Fig. 2 system diagram so that capacitor circuit in Fig. 4 is shifted
Adjusting, form stable modulator architecture, and there is comparable signal-to-noise characteristic.Error signal subsequently enters quantizer processing
Circuit, quantizer processing circuit gradually compare 7 data using 7 linear comparators, and by 3,4,5,6 and 1,2,5,6
The signal for doing one group of phase and, output respectively with 0,2,4,6 is 3 valid data of 2M rate.Angle rate signal is from Σ Δ tune
After device output processed, digital filtering link is entered in the form of the 3bit code stream of 2M frequency.I.e. 3bit code stream, which is converted to 4bit, symbol
The sample rate of number, the high-speeld code-flow for recycling CIC decimation filter to export modulator reduces, and passes through IIR band logical, IIR
High-speed parallel data is converted the signal to by CIC interpolation filter again after bandstop filter, finally using at low-pass filter
Difference frequency signal is managed, and utilizes Zero-cross comparator, driving phase information is precisely extracted, forms 24 effective error data of 312K；
2) two kinds of error signals obtained in step 1 pass through CIC decimation filter, IIR bandpass filter, IIR band resistance filter
After wave device, CIC interpolation filter, low-pass filter, directly-I type controller, directly-II type controller, with straight are entered back into
- I type controller is connect, directly-II type controller is calculating separately MEM gyro angular speed closed-loop control amount, MEM gyro machinery not just
Closed-loop control amount is handed over, low-pass filter is similar to.Since the coefficient of CIC decimation filter is 1, so there is no multiplication in structure
Device, only uses adder and delayer, and such circuit system can reduce or increase sampling in the case where no multiplier
Rate is well suited for being realized with FPGA and being transplanted to ASIC scheme.The CIC used is extracted, the framework of CIC interpolation filter is Fig. 5, figure
Shown in 6.
3) by summing circuit to MEM gyro angular speed closed-loop control amount, MEM gyro machinery obtained in step 1 not just
It hands over closed-loop control amount to sum, obtained summing signal is added on the electrode of MEMS gyro detection closed loop, to realize MEMS
The displacement closed loop of gyroscope, and using MEM gyro angular speed closed-loop control amount as effective output signal of closed loop gyro.
The method reality based on a kind of quadravalence feedforward summation type sigma-delta modulator framework signal processing circuit
Existing, the circuit includes the capacitive detection circuit of continuous type variable gain, analog low-pass circuit, quantizer circuit:
The capacitive detection circuit of the continuous type variable gain: its function is will be from the capacitor of MEMS gyro sensed-mode
Signal is converted to voltage signal, and the feedback resistance for using PMOS tube technique to be formed provides dc point for differential capacitance detection,
The amplification end of the capacitive detection circuit of continuous type variable gain is controlled using PMOS tube；
Analog low-pass circuit: its function be by the way of passive low-pass filter, by MEM gyro angular speed error signal,
The mechanical non-orthogonal signal errors signal of MEM gyro enters emitter following circuit in a manner of differential signal, to drive subsequent quadravalence to feedover
Summation type sigma-delta modulator framework signal processing circuit；
Quantizer circuit: gradually compare quadravalence feedforward summation type sigma-delta modulator frame using 7 linear comparators
The output signal of structure signal processing circuit exports 7 bit comparison data, and by 3,4,5,6 bit comparison data therein respectively with 1,
2,5,6 compare data and 0,2,4,6 bit comparison data do linear phase and operation, and the phase and operation signal of output are 3 significant figures
According to.
The method takes following steps:
1) reverse side of operational amplifier (1) and operational amplifier (2) in the capacitive detection circuit of continuous type variable gain
Voltage low side between the dc point feedback resistance that is worked by big resistance as amplifier using PMOS tube；
2) quadravalence feedforward summation type sigma-delta modulator, using switched capacitor processing scheme, using MOS
Pipe delay time is respectively formed the timing of switching capacity, the transmitting of timing control signal.
The step 2 uses following steps: first by the 3bit of quadravalence feedforward summation type sigma-delta modulator output
Code stream is converted to 4bit signed number evidence, recycles CIC decimation filter by quadravalence feedforward summation type sigma-delta modulator
The sample rate of the high speed 4bit code stream of output reduces, by the 4bit code stream signal bit stream after reduction by IIR bandpass filter,
IIR bandstop filter, recycles CIC interpolation filter to be translated into high-speed parallel data, and high-speed parallel data carries out zero passage
The phase information of the mechanical non-orthogonal error signal of MEM gyro angular speed error signal, MEM gyro is extracted in comparison operation.
It is further comprising the steps of in the step 2: the mechanical non-orthogonal error of MEM gyro angular speed error signal, MEM gyro
Signal enter directly-I type controller, directly-II type controller, directly-I type controller, directly-II type controller use
The mode of feedforward and feedback summation, so that directly-I type controller, directly-II type controller zero, pole location meet
The demand for control of system forms closed-loop dynamic, static properties.
Embodiment one
MEMS gyro product is added after angular speed closed loop function, and the mechanical non-orthogonal error term of MEMS gyro is in complete warm environment
It can keep stable down, and the angular speed error input of MEMS gyro is also maintained at zero stable input position, that is, uses angle
The MEMS gyro of rate technology of closed loop can become the sensed-mode error term of gyro into being zero, make MEMS gyro in sensed-mode
In equilbrium position.
After the angular speed error term of MEMS gyro is zero, the non-orthogonal error term of machinery of MEMS gyro also levels off to zero,
The constant multiplier coefficient of MEMS gyro is reduced by the influence factor of external environment, and machinery is being not present not just in gyro in external environment
Error term is handed over, the constant multiplier stability characteristic of gyro is greatly enhanced, the MEMS gyro that angular speed closed loop function is added is being
In system application, i.e. flight management system, the property for making full use of the constant multiplier stability of MEMS gyro good in fly bomb aviation attitude system
It can advantage.As shown in Fig. 2, the constant multiplier of MEMS gyro can achieve 400ppm magnitude, meet missile-borne navigation, flight control system
Use.
In this item application, the controller parameter for selecting low frequency characteristic excellent makes MEMS angular speed closed loop gyro
Spectral characteristic is high in low-frequency range passband gain, IF passband gain stabilization, and high band inhibits to make full use of angular speed closed loop than high
The promotion to MEMS gyro performance.
Embodiment two
The Static State Index and dynamic bandwidth of MEMS gyro are the communities of conflict.Angular speed is added in MEMS gyro product
After closed loop function, MEMS gyro can effectively can promote the bandwidth of gyro while promoting static gain, break through bandwidth
Contradiction point between static accuracy, makes the bias instaility test performance of MEMS gyro improve an order of magnitude, MEMS top
The static bias instaility index of spiral shell improves an order of magnitude, can satisfy the use demand of the Tactics-level of 5 °/h, makes MEMS
Gyro in terms of gesture stability, measuring system, positioning and directing application it is more ideal, make MEMS gyro underground trajectory measurement,
The fields such as orbit track measurement fully demonstrate the application advantage of MEMS gyro.
Claims (5)
1. a kind of angular speed closed-loop policy for improving MEMS gyro static state and linearity index, which is characterized in that the method is adopted
Take following steps:
1) weak capacitive signal is detected first with quadravalence feedforward summation type sigma-delta modulator processing circuit, utilizes MEM
The mechanical non-orthogonal dependent phase of gyro angular speed dependent phase, MEM gyro demodulates MEM gyro angular speed error signal, MEM top
The mechanical non-orthogonal error signal of spiral shell；
2) two kinds of error signals obtained in step 1 by CIC decimation filter, IIR bandpass filter, IIR bandstop filter,
After CIC interpolation filter, low-pass filter, directly-I type controller, directly-II type controller, with directly-I type are entered back into
Controller, directly-II type controller calculate separately the mechanical non-orthogonal closed loop of MEM gyro angular speed closed-loop control amount, MEM gyro
Control amount；
3) it non-orthogonal is closed by the way that summing circuit is mechanical to MEM gyro angular speed closed-loop control amount obtained in step 1, MEM gyro
Ring control amount is summed, and obtained summing signal is added on the electrode of MEMS gyro detection closed loop, to realize MEMS gyro
The displacement closed loop of sensed-mode, and using MEM gyro angular speed closed-loop control amount as effective output signal of closed loop gyro.
2. a kind of angular speed closed-loop policy for improving MEMS gyro static state and linearity index according to claim 1,
It is characterized in that, the method reality based on a kind of quadravalence feedforward summation type sigma-delta modulator framework signal processing circuit
Existing, the circuit includes the capacitive detection circuit of continuous type variable gain, analog low-pass circuit, quantizer circuit:
The capacitive detection circuit of the continuous type variable gain: its function is will be from the capacitance signal of MEMS gyro sensed-mode
It is converted to voltage signal, the feedback resistance for using PMOS tube technique to be formed provides dc point for differential capacitance detection, continuously
The amplification end of the capacitive detection circuit of type variable gain is controlled using PMOS tube；
Analog low-pass circuit: its function is by the way of passive low-pass filter, by MEM gyro angular speed error signal, MEM top
The mechanical non-orthogonal signal errors signal of spiral shell enters emitter following circuit in a manner of differential signal, to drive subsequent quadravalence feedforward summation type
Sigma-delta modulator framework signal processing circuit；
Quantizer circuit: gradually compare quadravalence feedforward summation type sigma-delta modulator framework letter using 7 linear comparators
The output signal of number processing circuit, exports 7 bit comparison data, and by 3,4,5,6 bit comparison data therein respectively with 1,2,5,6
Compare data and 0,2,4,6 bit comparison data do linear phase and operation, phase and the operation signal of output are 3 valid data.
3. a kind of angular speed closed-loop policy for improving MEMS gyro static state and linearity index according to claim 2,
It is characterized in that, the method takes following steps:
1) in the capacitive detection circuit of continuous type variable gain the reverse side of operational amplifier (1) and operational amplifier (2) electricity
Force down the dc point feedback resistance to work by big resistance as amplifier between end using PMOS tube；
2) quadravalence feedforward summation type sigma-delta modulator is prolonged using switched capacitor processing scheme using metal-oxide-semiconductor
When the time be respectively formed the timing of switching capacity, the transmitting of timing control signal.
4. a kind of angular speed closed-loop policy for improving MEMS gyro static state and linearity index according to claim 1,
It is characterized in that, the step 2 uses following steps: first by quadravalence feedforward summation type sigma-delta modulator output
3bit code stream is converted to 4bit signed number evidence, recycles CIC decimation filter by quadravalence feedforward summation type sigma-delta tune
The sample rate of the high speed 4bit code stream of device output processed reduces, and the 4bit code stream signal bit stream after reduction is passed through IIR bandpass filtering
Device, IIR bandstop filter recycle CIC interpolation filter to be translated into high-speed parallel data, and high-speed parallel data carried out
The phase information of the mechanical non-orthogonal error signal of MEM gyro angular speed error signal, MEM gyro is extracted in zero balancing operation.
5. a kind of angular speed closed-loop policy for improving MEMS gyro static state and linearity index according to claim 3,
It is characterized in that, it is further comprising the steps of in the step 2: the mechanical non-orthogonal mistake of MEM gyro angular speed error signal, MEM gyro
Difference signal is adopted into directly-I type controller, directly-II type controller, directly-I type controller, directly-II type controller
With the mode of feedforward and feedback summation, so that directly-I type controller, directly-II type controller zero, pole location are expired
The demand for control of pedal system forms closed-loop dynamic, static properties.
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| CN109168116B (en) | 2020-09-22 |
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