CN109166762A - A kind of contact switch for vacuum equipment - Google Patents

A kind of contact switch for vacuum equipment Download PDF

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Publication number
CN109166762A
CN109166762A CN201811097387.1A CN201811097387A CN109166762A CN 109166762 A CN109166762 A CN 109166762A CN 201811097387 A CN201811097387 A CN 201811097387A CN 109166762 A CN109166762 A CN 109166762A
Authority
CN
China
Prior art keywords
flange
switch
elastic slice
vacuum equipment
linkage mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201811097387.1A
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Chinese (zh)
Inventor
王志海
邝斌
周同
陈金良
齐鹏飞
戴春田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhongshan Ruike New Energy Co Ltd
Original Assignee
Zhongshan Ruike New Energy Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhongshan Ruike New Energy Co Ltd filed Critical Zhongshan Ruike New Energy Co Ltd
Priority to CN201811097387.1A priority Critical patent/CN109166762A/en
Publication of CN109166762A publication Critical patent/CN109166762A/en
Pending legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H33/00High-tension or heavy-current switches with arc-extinguishing or arc-preventing means
    • H01H33/60Switches wherein the means for extinguishing or preventing the arc do not include separate means for obtaining or increasing flow of arc-extinguishing fluid
    • H01H33/66Vacuum switches
    • H01H33/666Operating arrangements

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  • High-Tension Arc-Extinguishing Switches Without Spraying Means (AREA)

Abstract

The invention discloses a kind of contact switch for vacuum equipment, comprising: flange, linkage mechanism is equipped on the flange, it is provided with dynamic clamping head and quiet clamping head between the linkage mechanism and flange and the upper surface for making one end protrude from flange, and the force-applied another end motion folded and drive linkage mechanism of the jag are acted on by dynamic clamping head and quiet clamping head;Switch, corresponding linkage mechanism are installed on the lower end surface of flange, correspond to linkage mechanism in the switch and be provided with normally opened cathode elastic slice and anode elastic slice close to one end of flange lower end surface;When work, the jag stress of linkage mechanism can drive another end motion to abut cathode elastic slice or anode elastic slice and be brought into contact with anode elastic slice or cathode elastic slice when pushing.Contact switch of the invention can detecte the movement of vacuum equipment internal motion part or workpiece, be suitable for room temperature and vacuum environment, structure is simple, economical and practical.

Description

A kind of contact switch for vacuum equipment
Technical field
The invention belongs to technical field of vacuum equipment, and in particular to a kind of contact switch in vacuum equipment.
Background technique
Vacuum equipment is widely used in modernization industry production.Detect vacuum equipment internal motion part or workpiece Whether movement is normal particularly significant.Currently, the device of such detection is mostly based on optical principle or electromagnetic induction principle design system It makes, structure is complicated, higher cost, and the difficulty detected under vacuum environment is very big.
Summary of the invention
To solve the above-mentioned problems, the present invention provides a kind of vacuum equipment internal motion part or workpiece of can detecte Movement and the contact switch for being suitable for room temperature and vacuum environment.
The technical solution adopted by the present invention to solve the technical problems is: a kind of contact switch for vacuum equipment, Include:
Flange is equipped with linkage mechanism on the flange, is provided with dynamic clamping head and quiet clamping head between the linkage mechanism and flange And one end is set to protrude from the upper surface of flange by dynamic clamping head and quiet clamping head effect, and the jag is force-applied folds and drive linkage Another end motion of mechanism;
Switch, corresponding linkage mechanism are installed on the lower end surface of flange, correspond to linkage mechanism under flange in the switch One end of end face is provided with normally opened cathode elastic slice and anode elastic slice;
When work, the jag stress of linkage mechanism can drive another end motion to abut cathode elastic slice or anode bullet when pushing Piece is simultaneously brought into contact with anode elastic slice or cathode elastic slice.
Further, sealed set between the linkage mechanism and flange.
Further, vertical installation through-hole is offered on the flange, corresponding, the linkage mechanism packet It includes:
Bellows, the caliber of the bellows are greater than the diameter of installation through-hole and are welded in flange with coating installation through-hole Upper surface;
Plectane is sealed, is welded in the upper end of bellows to be closed the upper end tube nozzle of bellows, the lower end of the sealing plectane Face corresponds to installation through-hole and is provided with universal driving shaft, and the lower end vertical motion of universal driving shaft can be driven when sealing the upper end stress of plectane.
Further, it is described sealing plectane lower end surface and flange between be provided with spring, with formation dynamic clamping head and quiet clamping head.
Further, the upper end of the sealing plectane is provided with roller compressed structure or slidingtype compressed structure.
Further, the upper end of the sealing plectane is provided with support, and the support has a pair of vertical mounting wall, and two Installation axle is provided between mounting wall, the both ends of installation axle are provided with split pin, which is equipped with roller, and the roller is corresponding Installation axle offers inner hole, and rolling bearing or self-lubricating bearing are equipped in the inner hole, thus formed roller compressed structure or Slidingtype compressed structure.
Further, the interlinked mechanism further includes the linear bearing for being installed on flange lower end, the lower end of the universal driving shaft The lower end of linear bearing is extended, and the elongated end is provided with position limiting structure.
Further, the switch includes using switch inner cover made of insulating materials and switch outer cover, in the switch The outside of linear bearing is covered at, the cathode elastic slice and anode elastic slice correspond to universal driving shaft and be installed on switch inner cover, switch Outer cover covers at the outside of switch inner cover.
Further, it switchs inner cover and switchs the bead structures being provided between outer cover for limit, to prevent the two Between relatively rotate.
Further, the lower end of the universal driving shaft is provided with insulation contact, abuts cathode elastic slice or sun by insulation contact Pole elastic slice.
Further, the side of the universal driving shaft lower end offers annular groove, and axis elasticity gear is installed in the annular groove Circle, so as to form position limiting structure.
Further, the upper surface of flange is machined with the mounting groove of annular, in sealing ring is arranged in the mounting groove, to be used for Sealing is kept when on vacuum equipment applied by being installed in flange.
The working principle of the contact switch is as follows: contact switch being mounted on vacuum equipment designated position, in vacuum equipment Touch roller when portion's moving parts or workpiece motion s, the bellows and spring of compression flange, the universal driving shaft on flange is corresponding Ground slides axially along linear bearing, and insulation contact is pressed in above the elastic slice of switch inner cover, connects positive and negative two electrodes, telecommunications Number controller can be passed to, show vacuum equipment internal motion part at this time or workpiece motion s to designated position;Work as vacuum Equipment internal motion part or workpiece leave designated position, and the bellows and spring of flange extend reset under compression, Insulation contact is separated from the elastic slice covered inside the Pass, and positive and negative electrode disengages, and circuit disconnects, and electric signal passes to controller, shows at this time Vacuum equipment internal motion part or workpiece leave designated position.
The beneficial effects of the present invention are: can detecte the movement of vacuum equipment internal motion part or workpiece, it is suitable for Room temperature and vacuum environment, structure is simple, economical and practical.
Detailed description of the invention
Present invention will be further explained below with reference to the attached drawings and examples:
Fig. 1 is overall structure diagram of the invention;
Fig. 2 is cross-sectional view of the invention;
Fig. 3 is structural decomposition diagram of the invention;
Fig. 4 is the first visual angle schematic diagram of flange in the present invention;
Fig. 5 is the second visual angle schematic diagram of flange in the present invention;
Fig. 6 is the structural schematic diagram that inner cover is switched in the present invention.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is A part of the embodiment of the present invention, instead of all the embodiments.The present invention being usually described and illustrated herein in the accompanying drawings is implemented The component of example can be arranged and be designed with a variety of different configurations.Therefore, below to the reality of the invention provided in the accompanying drawings The detailed description for applying example is not intended to limit the range of claimed invention, but is merely representative of selected implementation of the invention Example.
First embodiment
Referring to Fig.1~Fig. 6, the present invention disclose a kind of contact switch for vacuum equipment comprising:
Flange 1 is equipped with linkage mechanism on the flange 1, is provided with elastic reset between the linkage mechanism and flange 1 Part simultaneously makes one end protrude from the upper surface of flange 1 by dynamic clamping head and quiet clamping head effect, and the jag is force-applied folds and drive Another end motion of linkage mechanism;
Switch, corresponding linkage mechanism are installed on the lower end surface of flange 1, correspond to linkage mechanism close to flange 1 in the switch One end of lower end surface is provided with normally opened cathode elastic slice and anode elastic slice;
When work, the jag stress of linkage mechanism can drive another end motion to abut cathode elastic slice or anode bullet when pushing Piece is simultaneously brought into contact with anode elastic slice or cathode elastic slice.
By contact switch in this present embodiment be applied to vacuum equipment on, so, between the linkage mechanism and flange 1 Sealed set.
Specifically, offering vertical installation through-hole on the flange 1, corresponding, the linkage mechanism includes:
Bellows 101, the caliber of the bellows 101 are greater than the diameter of installation through-hole and are welded in coating installation through-hole The upper surface of flange 1;
Plectane 102 is sealed, is welded in the upper end of bellows 101 to be closed the upper end tube nozzle of bellows 101, the sealing circle The lower end surface of plate 102 corresponds to installation through-hole and is provided with universal driving shaft 8, can drive universal driving shaft 8 when sealing the upper end stress of plectane 102 Lower end vertical motion.
In this way, carry out sealing orifice since the upper end of bellows 101 is welded with sealing plectane 102, and lower end welded flange 1, Therefore it can realize the sealing to the installation through-hole on flange 1.And since bellows 101 has certain retractility, justify in sealing 102 stress of plate can still keep sealing when pushing.Also, (the set ripple when the movement travel for sealing plectane 102 is shorter 101 length of pipe is shorter), the reset of sealing plectane 102 can be realized by the material of bellows 101 itself, structural behaviour, such as adopted Bellows 101 made of rubber material can restore length after pressing is shortened with self-resetting.Therefore bellows can be passed through 101 formation dynamic clamping head and quiet clamping heads simultaneously play reset response.
But since under different applicable cases, the material of bellows 101 may be different, that is, there is bellows 101 certainly The deformation recovery capability of body is poor or does not have deformation recovery capability, and also to reinforce resetting mentioned by bellows 101 Job stability, further, it is described sealing plectane 102 lower end surface and flange 1 between be provided with spring 2, with formation Dynamic clamping head and quiet clamping head.
Specifically, the internal diameter of the spring 2 is greater than the diameter of installation through-hole, to coat installation through-hole and abut flange 1 Upper surface, while the outer diameter of spring 2 is adapted to the internal diameter of bellows 101, to realize the coarse localization to spring 2.In this base On plinth, the positioning convex platform being adapted to 2 internal diameter of spring is set in the upper surface of flange 1 and/or the lower end surface of sealing plectane 102 or is determined Position groove is fitted to spring 2 and interior guarantees installation accuracy.
Simultaneously, the interlinked mechanism further includes the linear bearing 3 for being installed on 1 lower end of flange, under the universal driving shaft 8 End extends the lower end of linear bearing 3, and the elongated end is provided with position limiting structure.Spring 2 is in compressive state always, and passes through Position limiting structure prevents 8 prolapse upwards linear bearing 3 of universal driving shaft.
As the first preferred embodiment of the position limiting structure, the side of 8 lower end of universal driving shaft offers annular groove 801, circlip for shaft 4 is installed in the annular groove 801, so as to form position limiting structure.The circlip for shaft 4 uses market The opening clip spring structure of upper known structure, and when being installed in annular groove 801, outer diameter is greater than the outer diameter of universal driving shaft 8, so as to The lower end surface of linear bearing 3 is abutted, realizes limit.
As the second preferred embodiment of the position limiting structure, in the lower end threading of universal driving shaft 8, and installed with this Nut realizes limit by the lower end surface that nut abuts linear bearing.
As the third preferred embodiment of the position limiting structure, radial duct is opened up in the lower end of universal driving shaft 8, is pacified in the inner Retraction pin is filled, to realize limit.
Further, the switch includes using switch inner cover 10 made of insulating materials and switch outer cover 11, described to open Cover 10 covers at the outside of linear bearing 3 inside the Pass, and the cathode elastic slice and anode elastic slice correspond to universal driving shaft 8 and be installed on switch inner cover On 10, switch outer cover 11 covers at the outside of switch inner cover 10.
Specifically, switch inner cover 10 and switch outer cover 11 are the tube structure of upper end opening, and switch inner cover 10 Lower end opens up installation and steps down, and cathode elastic slice and anode elastic slice are respectively arranged in the left and right sides for switching 10 lower end of inner cover, and yin The terminal horizontal of pole elastic slice extends in installation resigning, and the upward bending in end of anode elastic slice re-extends in installation is stepped down simultaneously Positioned at the top of cathode elastic slice end.Meanwhile it switching and corresponding to cathode elastic slice and anode elastic slice is offered for its conducting wire on outer cover 11 The threading hole being pierced by.
In this way, the lower end of universal driving shaft 8, which moves down, abuts anode elastic slice, and pushes anode when sealing the pushing of 102 stress of plectane Elastic slice makes its Contact cathod elastic slice, so as to be formed into a loop, generate corresponding electric signal.The external force suffered by sealing plectane 102 is removed When pin, under the action of spring or spring and bellows 101, sealing plectane 102 is moved up, and drives universal driving shaft 8 to move up, anode bullet Piece is formed by own material and structure to be resetted, to separate in cathode elastic slice, is formed by circuit disconnection, and can generate again Electric signal.
Wherein, for simple installation the considerations of, switch inner cover 10 and switch outer cover 11 pass through bolt in the present embodiment Or screw is fixedly installed in the lower end surface of flange 1.And it switchs and is provided between inner cover 10 and switch outer cover 11 for limit Bead structures, the inside as vertical rib, switch outer cover 11 are arranged on the outside of switch inner cover 10 are correspondingly arranged vertical card slot, fill Timing is inserted into card slot by rib and realizes positioning between the two, can be not only used for threading hole and cathode elastic slice, anode elastic slice Docking, prevented also from relatively rotating between the two.
Cathode elastic slice and anode elastic slice in the present embodiment both can be used metal material and be made and have electric conductivity, can also lead to Setting electroplated layer is crossed to realize electric conductivity, and its practical conducting wire connected is anode or cathode, in practical application Flexibly change, is not limited by the present embodiment.
Further, the lower end of the universal driving shaft 8 is provided with insulation contact 5, and anode bullet is abutted by insulation contact 5 Piece.The insulation contact 5 can be adhered to the lower end of universal driving shaft 8, can also be fixedly mounted by modes such as pin shaft, screw, screw threads In the lower end of universal driving shaft 8.
In view of the contact switch in the present embodiment is mainly used for detecting vacuum equipment internal motion part or workpiece Movement, so the upper end of sealing plectane 102 while being pressurized, may generate phase with detected moving parts or workpiece It to friction, be easy to cause abrasion and influences detection accuracy, while being also easy to damage detected moving parts or workpiece.In view of This, further, the upper end of the sealing plectane 102 is provided with roller compressed structure or slidingtype compressed structure.
Specifically, the upper end of the sealing plectane 102 is provided with support 103, the support 103 has a pair of vertical peace Wall is filled, is plugged with installation axle 12 between two mounting walls, the both ends of installation axle 12 are provided with split pin 9, install in installation axle 12 There is roller 7, the corresponding installation axle 12 of the roller 7 offers inner hole, rolling bearing or self-lubricating bearing are installed in the inner hole, thus Form roller compressed structure or slidingtype compressed structure.
In this way, in detected moving parts or workpiece motion s and when abutting roller 7, roller 7 can follow it to roll or sliding It is dynamic, to avoid or slow down the friction between roller and detected moving parts or workpiece, while the realization linkage that can be pressurized again The elevating movement of axis 8 advantageously ensures that the precision of detection, prolongs the service life, protects detected equipment.
In addition, further, the upper surface of flange 1 is machined with ring in order to guarantee the sealing between flange 1 and vacuum equipment The mounting groove of shape, in sealing ring is arranged in the mounting groove, for the holding when flange 1 is installed on applied vacuum equipment Sealing.The internal diameter of the mounting groove and sealing ring is all larger than bellows 101.Also, the upper surface of flange 1 be provided with in sealing ring The center bearing bracket 6 of diameter adaptation, sealing ring are sheathed on center bearing bracket 6.
In actual use, in opening up the installing port penetrated for bellows 101 on vacuum equipment, flange 1 is pacified by bolt It keeps sealing loaded on vacuum equipment, and by sealing ring, and the equal welded seal of upper and lower side of bellows 101, so the contact The setting of switch will not influence the sealing performance of vacuum equipment.
In addition, universal driving shaft 8 can be both integrally formed with sealing plectane 102, can also be consolidated by way of welding or being threadedly coupled Due to the lower end of sealing plectane 102.And similar, support 103 can also be used such mode and be fixedly installed in sealing plectane 102 upper end.
The working principle of contact switch in the present embodiment is as follows: contact switch is mounted on vacuum equipment designated position, Roller 7, the bellows 101 and spring 2 of compression flange 1, method are touched when vacuum equipment internal motion part or workpiece motion s Correspondingly sliding axially along linear bearing 3, insulation contact 5 are pressed in above the elastic slice of switch inner cover 10 universal driving shaft 8 on orchid 1, Positive and negative two electrodes are connected, electric signal can pass to controller, show vacuum equipment internal motion part or workpiece at this time Move to designated position;When vacuum equipment internal motion part or workpiece leave designated position, 101 He of bellows of flange 1 Spring extends reset under compression, and insulation contact 5 is separated from the elastic slice of cover 10 inside the Pass, and positive and negative electrode disengages, and circuit is disconnected It opens, electric signal passes to controller, shows that vacuum equipment internal motion part or workpiece leave designated position at this time.
So the contact switch in the present embodiment can detecte the movement of vacuum equipment internal motion part or workpiece, Suitable for room temperature and vacuum environment, structure is simple, economical and practical.
Second embodiment
The present embodiment based on first embodiment, main difference is that, it is solid that inner cover 10 is switched in the present embodiment Dingan County is loaded on switch outer cover 11, and switchs the lower end that outer cover 11 is installed on flange 1 by bolt.
3rd embodiment
The present embodiment is, the linkage mechanism in the present embodiment includes based on first embodiment in place of main difference Vertical compression bar similar with the mounting structure of universal driving shaft 8 in first embodiment and the horizontal struts below vertical compression bar, Middle horizontal struts are horizontally slidable, and the upper end of vertical compression bar can be pressurized downslides, setting rack gear and nibble in the left side of vertical compression bar Unify fixed gear, meanwhile, the upper end setting rack gear of horizontal struts simultaneously engages the fixed gear, and is offered in horizontal struts for vertical The resigning mouthful that compression bar passes through.
Corresponding, switch is installed on the left side of horizontal struts.In this way, it is fixed to drive when vertical compression bar is pressurized and glides Gear rotation, and then horizontal struts Slideslip to the left is driven, push switch realizes movement similar with first embodiment, outside It is sliding on vertical compression bar when power cancels, and then horizontal struts is driven to reset.
Above-described embodiment is preferred embodiment of the invention, and the present invention can also have other embodiments.The technology of this field Personnel can also make equivalent deformation or replacement on the premise of without prejudice to spirit of the invention, these equivalent variation or replacement are wrapped It is contained in range set by the claim of this application.

Claims (10)

1. a kind of contact switch for vacuum equipment, characterized by comprising:
Flange (1) is equipped with linkage mechanism on the flange (1), is arranged between the linkage mechanism and flange (1) flexible multiple Position part, which is simultaneously acted on by dynamic clamping head and quiet clamping head, makes one end protrude from the upper surface of flange (1), and the jag is force-applied folds simultaneously Drive another end motion of linkage mechanism;
Switch, corresponding linkage mechanism are installed on the lower end surface of flange (1), correspond to linkage mechanism close to flange (1) in the switch One end of lower end surface is provided with normally opened cathode elastic slice and anode elastic slice;
When work, the jag stress of linkage mechanism can drive another end motion to abut cathode elastic slice or anode elastic slice simultaneously when pushing It is brought into contact with anode elastic slice or cathode elastic slice.
2. a kind of contact switch for vacuum equipment as described in claim 1, which is characterized in that the linkage mechanism and method Sealed set between blue (1).
3. a kind of contact switch for vacuum equipment as claimed in claim 2, it is characterised in that:
Vertical installation through-hole is offered on the flange (1);
The linkage mechanism includes,
Bellows (101), the caliber of the bellows (101) are greater than the diameter of installation through-hole and are welded in coating installation through-hole The upper surface of flange (1);
It seals plectane (102), is welded in the upper end of bellows (101) to be closed the upper end tube nozzle of bellows (101), the sealing The lower end surface of plectane (102) corresponds to installation through-hole and is provided with universal driving shaft (8), can band when sealing the upper end stress of plectane (102) The lower end vertical motion of dynamic universal driving shaft (8).
4. a kind of contact switch for vacuum equipment as claimed in claim 3, which is characterized in that the sealing plectane (102) spring (2) are provided between lower end surface and flange (1), with formation dynamic clamping head and quiet clamping head.
5. a kind of contact switch for vacuum equipment as claimed in claim 3, which is characterized in that the sealing plectane (102) upper end is provided with roller compressed structure or slidingtype compressed structure.
6. a kind of contact switch for vacuum equipment as claimed in claim 5, which is characterized in that the sealing plectane (102) upper end is provided with support (103), and the support (103) has a pair of vertical mounting wall, is arranged between two mounting walls Have installation axle (12), the both ends of installation axle (12) are provided with split pin (9), which is equipped with roller (7), the roller (7) corresponding installation axle (12) offer inner hole, rolling bearing or self-lubricating bearing are equipped in the inner hole, to form roller Compressed structure or slidingtype compressed structure.
7. a kind of contact switch for vacuum equipment as claimed in claim 3, which is characterized in that the interlinked mechanism also wraps The linear bearing (3) for being installed on flange (1) lower end is included, the lower end of the universal driving shaft (8) extends the lower end of linear bearing (3), And the elongated end is provided with position limiting structure.
8. a kind of contact switch for vacuum equipment as claimed in claim 7, which is characterized in that the switch includes using Switch inner cover (10) and switch outer cover (11), switch inner cover (10) made of insulating materials cover at linear bearing (3) Outside, the cathode elastic slice and anode elastic slice correspond to universal driving shaft (8) and are installed on switch inner cover (10), and switch outer cover (11) is provide with In the outside of switch inner cover (10).
9. a kind of contact switch for vacuum equipment as claimed in claim 8, which is characterized in that the universal driving shaft (8) Lower end is provided with insulation contact (5), abuts cathode elastic slice or anode elastic slice by insulation contact (5).
10. a kind of contact switch for vacuum equipment as claimed in claim 7, which is characterized in that under the universal driving shaft (8) The side at end offers annular groove (801), is installed with circlip for shaft (4) in the annular groove (801), so as to form limit knot Structure.
CN201811097387.1A 2018-09-19 2018-09-19 A kind of contact switch for vacuum equipment Pending CN109166762A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201811097387.1A CN109166762A (en) 2018-09-19 2018-09-19 A kind of contact switch for vacuum equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201811097387.1A CN109166762A (en) 2018-09-19 2018-09-19 A kind of contact switch for vacuum equipment

Publications (1)

Publication Number Publication Date
CN109166762A true CN109166762A (en) 2019-01-08

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201811097387.1A Pending CN109166762A (en) 2018-09-19 2018-09-19 A kind of contact switch for vacuum equipment

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05290696A (en) * 1992-04-03 1993-11-05 Yazaki Corp Pressure switch and gas meter
US20100102034A1 (en) * 2007-03-23 2010-04-29 Siemens Aktiengesellschaft Apparatus for Monitoring Vacuum
CN102074407A (en) * 2009-11-24 2011-05-25 松下电工株式会社 Breaker
CN102110544A (en) * 2009-12-25 2011-06-29 中国科学院沈阳科学仪器研制中心有限公司 Device for leading out vacuum signal of moving part position
CN103311048A (en) * 2013-06-21 2013-09-18 无锡中科电气设备有限公司 Direct-acting type sealing device of high-voltage vacuum circuit breaker
CN209045428U (en) * 2018-09-19 2019-06-28 中山瑞科新能源有限公司 A kind of contact switch for vacuum equipment

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05290696A (en) * 1992-04-03 1993-11-05 Yazaki Corp Pressure switch and gas meter
US20100102034A1 (en) * 2007-03-23 2010-04-29 Siemens Aktiengesellschaft Apparatus for Monitoring Vacuum
CN102074407A (en) * 2009-11-24 2011-05-25 松下电工株式会社 Breaker
CN102110544A (en) * 2009-12-25 2011-06-29 中国科学院沈阳科学仪器研制中心有限公司 Device for leading out vacuum signal of moving part position
CN103311048A (en) * 2013-06-21 2013-09-18 无锡中科电气设备有限公司 Direct-acting type sealing device of high-voltage vacuum circuit breaker
CN209045428U (en) * 2018-09-19 2019-06-28 中山瑞科新能源有限公司 A kind of contact switch for vacuum equipment

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