CN209045428U - A kind of contact switch for vacuum equipment - Google Patents
A kind of contact switch for vacuum equipment Download PDFInfo
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- CN209045428U CN209045428U CN201821537349.9U CN201821537349U CN209045428U CN 209045428 U CN209045428 U CN 209045428U CN 201821537349 U CN201821537349 U CN 201821537349U CN 209045428 U CN209045428 U CN 209045428U
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- flange
- switch
- elastic slice
- linkage mechanism
- vacuum equipment
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Abstract
The utility model discloses a kind of contact switch for vacuum equipment, comprising: flange, linkage mechanism is equipped on the flange, it is provided with dynamic clamping head and quiet clamping head between the linkage mechanism and flange and the upper surface for making one end protrude from flange, and the force-applied another end motion folded and drive linkage mechanism of the jag are acted on by dynamic clamping head and quiet clamping head；Switch, corresponding linkage mechanism are installed on the lower end surface of flange, correspond to linkage mechanism in the switch and be provided with normally opened cathode elastic slice and anode elastic slice close to one end of flange lower end surface；When work, the jag stress of linkage mechanism can drive another end motion to abut cathode elastic slice or anode elastic slice and be brought into contact with anode elastic slice or cathode elastic slice when pushing.The contact switch of the utility model can detecte the movement of vacuum equipment internal motion part or workpiece, be suitable for room temperature and vacuum environment, structure is simple, economical and practical.
Description
Technical field
The utility model belongs to technical field of vacuum equipment, and in particular to a kind of contact switch in vacuum equipment.
Background technique
Vacuum equipment is widely used in modernization industry production.Detect vacuum equipment internal motion part or workpiece
Whether movement is normal particularly significant.Currently, the device of such detection is mostly based on optical principle or electromagnetic induction principle design system
It makes, structure is complicated, higher cost, and the difficulty detected under vacuum environment is very big.
Utility model content
To solve the above-mentioned problems, the utility model, which provides one kind, can detecte vacuum equipment internal motion part or work
The movement of part and the contact switch for being suitable for room temperature and vacuum environment.
The technical scheme adopted by the utility model to solve the technical problem is as follows: a kind of contact for vacuum equipment is opened
It closes comprising:
Flange is equipped with linkage mechanism on the flange, is provided with dynamic clamping head and quiet clamping head between the linkage mechanism and flange
And one end is set to protrude from the upper surface of flange by dynamic clamping head and quiet clamping head effect, and the jag is force-applied folds and drive linkage
Another end motion of mechanism；
Switch, corresponding linkage mechanism are installed on the lower end surface of flange, correspond to linkage mechanism under flange in the switch
One end of end face is provided with normally opened cathode elastic slice and anode elastic slice；
When work, the jag stress of linkage mechanism can drive another end motion to abut cathode elastic slice or anode bullet when pushing
Piece is simultaneously brought into contact with anode elastic slice or cathode elastic slice.
Further, sealed set between the linkage mechanism and flange.
Further, vertical installation through-hole is offered on the flange, corresponding, the linkage mechanism packet
It includes:
Bellows, the caliber of the bellows are greater than the diameter of installation through-hole and are welded in flange with coating installation through-hole
Upper surface；
Plectane is sealed, is welded in the upper end of bellows to be closed the upper end tube nozzle of bellows, the lower end of the sealing plectane
Face corresponds to installation through-hole and is provided with universal driving shaft, and the lower end vertical motion of universal driving shaft can be driven when sealing the upper end stress of plectane.
Further, it is described sealing plectane lower end surface and flange between be provided with spring, with formation dynamic clamping head and quiet clamping head.
Further, the upper end of the sealing plectane is provided with roller compressed structure or slidingtype compressed structure.
Further, the upper end of the sealing plectane is provided with support, and the support has a pair of vertical mounting wall, and two
Installation axle is provided between mounting wall, the both ends of installation axle are provided with split pin, which is equipped with roller, and the roller is corresponding
Installation axle offers inner hole, and rolling bearing or self-lubricating bearing are equipped in the inner hole, thus formed roller compressed structure or
Slidingtype compressed structure.
Further, the linkage mechanism further includes the linear bearing for being installed on flange lower end, the lower end of the universal driving shaft
The lower end of linear bearing is extended, and the elongated end is provided with position limiting structure.
Further, the switch includes using switch inner cover made of insulating materials and switch outer cover, in the switch
The outside of linear bearing is covered at, the cathode elastic slice and anode elastic slice correspond to universal driving shaft and be installed on switch inner cover, switch
Outer cover covers at the outside of switch inner cover.
Further, it switchs inner cover and switchs the bead structures being provided between outer cover for limit, to prevent the two
Between relatively rotate.
Further, the lower end of the universal driving shaft is provided with insulation contact, abuts cathode elastic slice or sun by insulation contact
Pole elastic slice.
Further, the side of the universal driving shaft lower end offers annular groove, and axis elasticity gear is installed in the annular groove
Circle, so as to form position limiting structure.
Further, the upper surface of flange is machined with the mounting groove of annular, in sealing ring is arranged in the mounting groove, to be used for
Sealing is kept when on vacuum equipment applied by being installed in flange.
The working principle of the contact switch is as follows: contact switch being mounted on vacuum equipment designated position, in vacuum equipment
Touch roller when portion's moving parts or workpiece motion s, the bellows and spring of compression flange, the universal driving shaft on flange is corresponding
Ground slides axially along linear bearing, and insulation contact is pressed in above the elastic slice of switch inner cover, connects positive and negative two electrodes, telecommunications
Number controller can be passed to, show vacuum equipment internal motion part at this time or workpiece motion s to designated position；Work as vacuum
Equipment internal motion part or workpiece leave designated position, and the bellows and spring of flange extend reset under compression,
Insulation contact is separated from the elastic slice covered inside the Pass, and positive and negative electrode disengages, and circuit disconnects, and electric signal passes to controller, shows at this time
Vacuum equipment internal motion part or workpiece leave designated position.
The beneficial effects of the utility model are: can detecte the movement of vacuum equipment internal motion part or workpiece, fit
For room temperature and vacuum environment, structure is simple, economical and practical.
Detailed description of the invention
The present invention will be further described with reference to the accompanying drawings and examples:
Fig. 1 is the overall structure diagram of the utility model；
Fig. 2 is the cross-sectional view of the utility model；
Fig. 3 is the structural decomposition diagram of the utility model；
Fig. 4 is the first visual angle schematic diagram of flange in the utility model；
Fig. 5 is the second visual angle schematic diagram of flange in the utility model；
Fig. 6 is the structural schematic diagram that inner cover is switched in the utility model.
Specific embodiment
It is practical new below in conjunction with this to keep the objectives, technical solutions, and advantages of the embodiments of the present invention clearer
Attached drawing in type embodiment, the technical scheme in the utility model embodiment is clearly and completely described, it is clear that is retouched
The embodiment stated is the utility model a part of the embodiment, instead of all the embodiments.Usually here in attached drawing description and
The component of the utility model embodiment shown can be arranged and be designed with a variety of different configurations.Therefore, below to attached
The detailed description of the embodiments of the present invention provided in figure is not intended to limit the range of claimed invention,
But it is merely representative of the selected embodiment of the utility model.
First embodiment
Referring to Fig.1~Fig. 6, the utility model disclose a kind of contact switch for vacuum equipment comprising:
Flange 1 is equipped with linkage mechanism on the flange 1, is provided with elastic reset between the linkage mechanism and flange 1
Part simultaneously makes one end protrude from the upper surface of flange 1 by dynamic clamping head and quiet clamping head effect, and the jag is force-applied folds and drive
Another end motion of linkage mechanism；
Switch, corresponding linkage mechanism are installed on the lower end surface of flange 1, correspond to linkage mechanism close to flange 1 in the switch
One end of lower end surface is provided with normally opened cathode elastic slice and anode elastic slice；
When work, the jag stress of linkage mechanism can drive another end motion to abut cathode elastic slice or anode bullet when pushing
Piece is simultaneously brought into contact with anode elastic slice or cathode elastic slice.
By contact switch in this present embodiment be applied to vacuum equipment on, so, between the linkage mechanism and flange 1
Sealed set.
Specifically, offering vertical installation through-hole on the flange 1, corresponding, the linkage mechanism includes:
Bellows 101, the caliber of the bellows 101 are greater than the diameter of installation through-hole and are welded in coating installation through-hole
The upper surface of flange 1；
Plectane 102 is sealed, is welded in the upper end of bellows 101 to be closed the upper end tube nozzle of bellows 101, the sealing
The lower end surface of plectane 102 corresponds to installation through-hole and is provided with universal driving shaft 8, can drive linkage when sealing the upper end stress of plectane 102
The lower end vertical motion of axis 8.
In this way, carry out sealing orifice since the upper end of bellows 101 is welded with sealing plectane 102, and lower end welded flange 1,
Therefore it can realize the sealing to the installation through-hole on flange 1.And since bellows 101 has certain retractility, justify in sealing
102 stress of plate can still keep sealing when pushing.Also, (the set wave when the movement travel for sealing plectane 102 is shorter
101 length of line pipe is shorter), the reset of sealing plectane 102 can be realized by the material of bellows 101 itself, structural behaviour,
The bellows 101 as made of using rubber material can restore length after pressing is shortened with self-resetting.Therefore wave can be passed through
Line pipe 101 forms dynamic clamping head and quiet clamping head and plays reset response.
But since under different applicable cases, the material of bellows 101 may be different, that is, there is bellows 101 certainly
The deformation recovery capability of body is poor or does not have deformation recovery capability, and also to reinforce resetting mentioned by bellows 101
Job stability, further, it is described sealing plectane 102 lower end surface and flange 1 between be provided with spring 2, with formation
Dynamic clamping head and quiet clamping head.
Specifically, the internal diameter of the spring 2 is greater than the diameter of installation through-hole, to coat installation through-hole and abut flange 1
Upper surface, while the outer diameter of spring 2 is adapted to the internal diameter of bellows 101, to realize the coarse localization to spring 2.In this base
On plinth, the positioning convex platform being adapted to 2 internal diameter of spring or fixed is arranged in the upper surface of Yu Falan 1 and/or the lower end surface for sealing plectane 102
Position groove is fitted to spring 2 and interior guarantees installation accuracy.
Simultaneously, the linkage mechanism further includes the linear bearing 3 for being installed on 1 lower end of flange, under the universal driving shaft 8
End extends the lower end of linear bearing 3, and the elongated end is provided with position limiting structure.Spring 2 is in compressive state always, and passes through
Position limiting structure prevents 8 prolapse upwards linear bearing 3 of universal driving shaft.
As the first preferred embodiment of the position limiting structure, the side of 8 lower end of universal driving shaft offers annular groove
801, circlip for shaft 4 is installed in the annular groove 801, so as to form position limiting structure.The circlip for shaft 4 uses market
The opening clip spring structure of upper known structure, and when being installed in annular groove 801, outer diameter is greater than the outer diameter of universal driving shaft 8, so as to
The lower end surface of linear bearing 3 is abutted, realizes limit.
As the second preferred embodiment of the position limiting structure, in the lower end threading of universal driving shaft 8, and installed with this
Nut realizes limit by the lower end surface that nut abuts linear bearing.
As the third preferred embodiment of the position limiting structure, radial duct is opened up in the lower end of universal driving shaft 8, is pacified in the inner
Retraction pin is filled, to realize limit.
Further, the switch includes using switch inner cover 10 made of insulating materials and switch outer cover 11, described to open
Cover 10 covers at the outside of linear bearing 3 inside the Pass, and the cathode elastic slice and anode elastic slice correspond to universal driving shaft 8 and be installed on switch inner cover
On 10, switch outer cover 11 covers at the outside of switch inner cover 10.
Specifically, switch inner cover 10 and switch outer cover 11 are the tube structure of upper end opening, and switch inner cover 10
Lower end opens up installation and steps down, and cathode elastic slice and anode elastic slice are respectively arranged in the left and right sides for switching 10 lower end of inner cover, and yin
The terminal horizontal of pole elastic slice extends in installation resigning, and the upward bending in end of anode elastic slice re-extends in installation is stepped down simultaneously
Positioned at the top of cathode elastic slice end.Meanwhile it switching and corresponding to cathode elastic slice and anode elastic slice is offered for its conducting wire on outer cover 11
The threading hole being pierced by.
In this way, the lower end of universal driving shaft 8, which moves down, abuts anode elastic slice, and pushes anode when sealing the pushing of 102 stress of plectane
Elastic slice makes its Contact cathod elastic slice, so as to be formed into a loop, generate corresponding electric signal.The external force suffered by sealing plectane 102 is removed
When pin, under the action of spring or spring and bellows 101, sealing plectane 102 is moved up, and drives universal driving shaft 8 to move up, anode
Elastic slice is formed by own material and structure to be resetted, to separate in cathode elastic slice, is formed by circuit disconnection, and can produce again
Raw electric signal.
Wherein, for simple installation the considerations of, switch inner cover 10 and switch outer cover 11 pass through bolt in the present embodiment
Or screw is fixedly installed in the lower end surface of flange 1.And it switchs and is provided between inner cover 10 and switch outer cover 11 for limit
Bead structures, the inside as vertical rib, switch outer cover 11 are arranged on the outside of switch inner cover 10 are correspondingly arranged vertical card slot,
The positioning realized between the two is inserted into card slot by rib when assembly, can be not only used for threading hole and cathode elastic slice, anode elastic slice
Docking, prevented also from relatively rotating between the two.
Cathode elastic slice and anode elastic slice in the present embodiment both can be used metal material and be made and have electric conductivity, can also lead to
Setting electroplated layer is crossed to realize electric conductivity, and its practical conducting wire connected is anode or cathode, in practical application Shi Junke
Flexibly change, is not limited by the present embodiment.
Further, the lower end of the universal driving shaft 8 is provided with insulation contact 5, and anode bullet is abutted by insulation contact 5
Piece.The insulation contact 5 can be adhered to the lower end of universal driving shaft 8, can also be fixedly mounted by modes such as pin shaft, screw, screw threads
In the lower end of universal driving shaft 8.
In view of the contact switch in the present embodiment is mainly used for detecting vacuum equipment internal motion part or workpiece
Movement, so the upper end of sealing plectane 102 while being pressurized, may generate phase with detected moving parts or workpiece
It to friction, be easy to cause abrasion and influences detection accuracy, while being also easy to damage detected moving parts or workpiece.In view of
This, further, the upper end of the sealing plectane 102 is provided with roller compressed structure or slidingtype compressed structure.
Specifically, the upper end of the sealing plectane 102 is provided with support 103, the support 103 has a pair of vertical peace
Wall is filled, is plugged with installation axle 12 between two mounting walls, the both ends of installation axle 12 are provided with split pin 9, install in installation axle 12
There is roller 7, the corresponding installation axle 12 of the roller 7 offers inner hole, rolling bearing or self-lubricating bearing are installed in the inner hole, thus
Form roller compressed structure or slidingtype compressed structure.
In this way, in detected moving parts or workpiece motion s and when abutting roller 7, roller 7 can follow it to roll or sliding
It is dynamic, to avoid or slow down the friction between roller and detected moving parts or workpiece, while the realization linkage that can be pressurized again
The elevating movement of axis 8 advantageously ensures that the precision of detection, prolongs the service life, protects detected equipment.
In addition, further, the upper surface of flange 1 is machined with ring in order to guarantee the sealing between flange 1 and vacuum equipment
The mounting groove of shape, in sealing ring is arranged in the mounting groove, for the holding when flange 1 is installed on applied vacuum equipment
Sealing.The internal diameter of the mounting groove and sealing ring is all larger than bellows 101.Also, the upper surface of flange 1 be provided with in sealing ring
The center bearing bracket 6 of diameter adaptation, sealing ring are sheathed on center bearing bracket 6.
In actual use, in opening up the installing port penetrated for bellows 101 on vacuum equipment, flange 1 is pacified by bolt
It keeps sealing loaded on vacuum equipment, and by sealing ring, and the equal welded seal of upper and lower side of bellows 101, so the contact
The setting of switch will not influence the sealing performance of vacuum equipment.
In addition, universal driving shaft 8 can be both integrally formed with sealing plectane 102, can also be consolidated by way of welding or being threadedly coupled
Due to the lower end of sealing plectane 102.And similar, support 103 can also be used such mode and be fixedly installed in sealing plectane
102 upper end.
The working principle of contact switch in the present embodiment is as follows: contact switch is mounted on vacuum equipment designated position,
Roller 7, the bellows 101 and spring 2 of compression flange 1, method are touched when vacuum equipment internal motion part or workpiece motion s
Correspondingly sliding axially along linear bearing 3, insulation contact 5 are pressed in above the elastic slice of switch inner cover 10 universal driving shaft 8 on orchid 1,
Positive and negative two electrodes are connected, electric signal can pass to controller, show vacuum equipment internal motion part or workpiece at this time
Move to designated position；When vacuum equipment internal motion part or workpiece leave designated position, 101 He of bellows of flange 1
Spring extends reset under compression, and insulation contact 5 is separated from the elastic slice of cover 10 inside the Pass, and positive and negative electrode disengages, and circuit is disconnected
It opens, electric signal passes to controller, shows that vacuum equipment internal motion part or workpiece leave designated position at this time.
So the contact switch in the present embodiment can detecte the movement of vacuum equipment internal motion part or workpiece,
Suitable for room temperature and vacuum environment, structure is simple, economical and practical.
Second embodiment
The present embodiment based on first embodiment, main difference is that, it is solid that inner cover 10 is switched in the present embodiment
Dingan County is loaded on switch outer cover 11, and switchs the lower end that outer cover 11 is installed on flange 1 by bolt.
3rd embodiment
The present embodiment is, the linkage mechanism in the present embodiment includes based on first embodiment in place of main difference
Vertical compression bar similar with the mounting structure of universal driving shaft 8 in first embodiment and the horizontal struts below vertical compression bar,
Middle horizontal struts are horizontally slidable, and the upper end of vertical compression bar can be pressurized downslides, setting rack gear and nibble in the left side of vertical compression bar
Unify fixed gear, meanwhile, the upper end setting rack gear of horizontal struts simultaneously engages the fixed gear, and is offered in horizontal struts for vertical
The resigning mouthful that compression bar passes through.
Corresponding, switch is installed on the left side of horizontal struts.In this way, it is fixed to drive when vertical compression bar is pressurized and glides
Gear rotation, and then horizontal struts Slideslip to the left is driven, push switch realizes movement similar with first embodiment, outside
It is sliding on vertical compression bar when power cancels, and then horizontal struts is driven to reset.
Above-described embodiment is the preferred embodiment of the utility model, and the utility model can also have other embodiments.Ability
The technical staff in domain can also make equivalent deformation or replacement without departing from the spirit of the present invention, these equivalent changes
Type or replacement are all contained in range set by the claim of this application.
Claims (10)
1. a kind of contact switch for vacuum equipment, characterized by comprising:
Flange (1) is equipped with linkage mechanism on the flange (1), is arranged between the linkage mechanism and flange (1) flexible multiple
Position part, which is simultaneously acted on by dynamic clamping head and quiet clamping head, makes one end protrude from the upper surface of flange (1), and the jag is force-applied folds simultaneously
Drive another end motion of linkage mechanism；
Switch, corresponding linkage mechanism are installed on the lower end surface of flange (1), correspond to linkage mechanism close to flange (1) in the switch
One end of lower end surface is provided with normally opened cathode elastic slice and anode elastic slice；
When work, the jag stress of linkage mechanism can drive another end motion to abut cathode elastic slice or anode elastic slice simultaneously when pushing
It is brought into contact with anode elastic slice or cathode elastic slice.
2. a kind of contact switch for vacuum equipment as described in claim 1, which is characterized in that the linkage mechanism and method
Sealed set between blue (1).
3. a kind of contact switch for vacuum equipment as claimed in claim 2, it is characterised in that:
Vertical installation through-hole is offered on the flange (1)；
The linkage mechanism includes,
Bellows (101), the caliber of the bellows (101) are greater than the diameter of installation through-hole and are welded in coating installation through-hole
The upper surface of flange (1)；
It seals plectane (102), is welded in the upper end of bellows (101) to be closed the upper end tube nozzle of bellows (101), the sealing
The lower end surface of plectane (102) corresponds to installation through-hole and is provided with universal driving shaft (8), can band when sealing the upper end stress of plectane (102)
The lower end vertical motion of dynamic universal driving shaft (8).
4. a kind of contact switch for vacuum equipment as claimed in claim 3, which is characterized in that the sealing plectane
(102) spring (2) are provided between lower end surface and flange (1), with formation dynamic clamping head and quiet clamping head.
5. a kind of contact switch for vacuum equipment as claimed in claim 3, which is characterized in that the sealing plectane
(102) upper end is provided with roller compressed structure or slidingtype compressed structure.
6. a kind of contact switch for vacuum equipment as claimed in claim 5, which is characterized in that the sealing plectane
(102) upper end is provided with support (103), and the support (103) has a pair of vertical mounting wall, is arranged between two mounting walls
Have installation axle (12), the both ends of installation axle (12) are provided with split pin (9), which is equipped with roller (7), the roller
(7) corresponding installation axle (12) offer inner hole, rolling bearing or self-lubricating bearing are equipped in the inner hole, to form roller
Compressed structure or slidingtype compressed structure.
7. a kind of contact switch for vacuum equipment as claimed in claim 3, which is characterized in that the linkage mechanism also wraps
The linear bearing (3) for being installed on flange (1) lower end is included, the lower end of the universal driving shaft (8) extends the lower end of linear bearing (3),
And the elongated end is provided with position limiting structure.
8. a kind of contact switch for vacuum equipment as claimed in claim 7, which is characterized in that the switch includes using
Switch inner cover (10) and switch outer cover (11), switch inner cover (10) made of insulating materials cover at linear bearing (3)
Outside, the cathode elastic slice and anode elastic slice correspond to universal driving shaft (8) and are installed on switch inner cover (10), and switch outer cover (11) is provide with
In the outside of switch inner cover (10).
9. a kind of contact switch for vacuum equipment as claimed in claim 8, which is characterized in that the universal driving shaft (8)
Lower end is provided with insulation contact (5), abuts cathode elastic slice or anode elastic slice by insulation contact (5).
10. a kind of contact switch for vacuum equipment as claimed in claim 7, which is characterized in that under the universal driving shaft (8)
The side at end offers annular groove (801), is installed with circlip for shaft (4) in the annular groove (801), so as to form limit knot
Structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821537349.9U CN209045428U (en) | 2018-09-19 | 2018-09-19 | A kind of contact switch for vacuum equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821537349.9U CN209045428U (en) | 2018-09-19 | 2018-09-19 | A kind of contact switch for vacuum equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209045428U true CN209045428U (en) | 2019-06-28 |
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ID=67033800
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821537349.9U Active CN209045428U (en) | 2018-09-19 | 2018-09-19 | A kind of contact switch for vacuum equipment |
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| Country | Link |
|---|---|
| CN (1) | CN209045428U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109166762A (en) * | 2018-09-19 | 2019-01-08 | 中山瑞科新能源有限公司 | A kind of contact switch for vacuum equipment |
-
2018
- 2018-09-19 CN CN201821537349.9U patent/CN209045428U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109166762A (en) * | 2018-09-19 | 2019-01-08 | 中山瑞科新能源有限公司 | A kind of contact switch for vacuum equipment |
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