CN103123886B - Sealing device of hot indium sealing - Google Patents

Sealing device of hot indium sealing Download PDF

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Publication number
CN103123886B
CN103123886B CN201210563583.XA CN201210563583A CN103123886B CN 103123886 B CN103123886 B CN 103123886B CN 201210563583 A CN201210563583 A CN 201210563583A CN 103123886 B CN103123886 B CN 103123886B
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sealing
indium
lifting
bearing
magnetic rotation
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CN103123886A (en
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赛小锋
韦永林
刘永安
盛立志
刘哲
赵宝升
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XiAn Institute of Optics and Precision Mechanics of CAS
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XiAn Institute of Optics and Precision Mechanics of CAS
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Abstract

The invention relates to a sealing device of hot indium sealing. The sealing device of the hot indium sealing comprises an indium sealing chamber, wherein an upper sealing part placing device is arranged on the upper portion of the interior of the indium sealing chamber, an object carrying platform is arranged on the lower portion of the interior of the indium sealing chamber, the upper sealing part placing device is used to place an upper sealing part, and the object carrying platform is used to place a lower sealing part. The sealing device of the hot indium sealing further comprises a lifting adjustment component and a magnetic rotating component of the lower sealing part. Due to the fact that the lifting adjustment component and the magnetic rotating component enable a sealing face of the upper sealing part to fully contact with an indium sealing groove of the lower sealing part, an oxide layer of the surface of an indium tin alloy is destroyed to some extent, the shortcoming of sealing air leakage caused by the oxidized and uneven surface of indium and air bubbles is overcome, and rate of finished products is improved.

Description

A kind of hot indium envelope sealing-in device
Technical field
The present invention relates to the vacuum type photoelectric devices such as image intensifier, photodetector, large cathode diameter photomultiplier, camera tube, image converter tube and make field, particularly relate to a kind of hot indium envelope sealing-in device.
Background technology
Since occurring from transfer photocathode method, the sealing-in of photocathode all adopts Indium Cool Pressure Welding technology to realize.This method complex structure, equipment manufacturing cost is high, to high by the assembly fit dimension tolerance precision of sealing-in.In recent years, developed a kind of new method for sealing-Re indium encapsulation technique, it can realize coupling and the unmatched sealing of various material.Hot indium encapsulation technique can successfully be applied to outside image intensifier, also can be used for various photodetector, camera tube, the negative electrode sealing-in of the photoelectric devices such as image converter tube.Existing hot indium encapsulation technique, as long as solder remains on molten state during assembly sealing-in, just can rely on the weight of closure self, solder is filled up weld seam, thus makes solder and sealing surface form the good wetting object reaching sealing.The height of closure is mainly by the telescopic adjustment of bellows, and device without spin, the manufacture method rate of finished products adopting ordinary hot indium encapsulation technique is 6O ~ 80%.
Summary of the invention
For solving the low technical problem of tubulation rate of finished products that existing hot indium seal apparatus causes sealing-in to leak gas to cause due to indium surface oxidation, out-of-flatness and bubble when sealing-in, the invention provides a kind of hot indium envelope sealing-in device.
Technical solution of the present invention is:
A kind of hot indium envelope sealing-in device, comprise indium envelope room, described indium envelope indoor are vacuum state, the top of described indium envelope indoor is provided with closure apparatus for placing, below is provided with article carrying platform, described upper closure apparatus for placing is for placing upper closure, and described article carrying platform (3) is for placing lower closure
Its special character is: the lift adjustment assembly also comprising article carrying platform, and described lift adjustment assembly comprises mounting flange, lifting ring flange, driven elevating mechanism and at least two active lifting mechanisms be symmetricly set on around driven elevating mechanism,
Described mounting flange and the indium indium sealed bottom room seals room flange and is fixedly connected with, and described lifting ring flange to be positioned at below mounting flange and parallel with mounting flange,
Described active lifting mechanism comprises bearing locating piece, lifting screw, screw rod fairlead, handwheel, bearing, described bearing locating piece is fixedly connected with mounting flange bottom surface, described screw rod fairlead is connected with lifting ring flange, the lower end of described lifting screw is fixedly connected with lifting handwheel, lifting bearing locating piece is stretched into through screw rod fairlead in the upper end of described lifting screw, described lifting screw is threaded with screw rod fairlead, described bearing is arranged between the upper end of lifting screw and bearing locating piece
Described driven elevating mechanism comprises bellows, magnetic rotation bar, position-limiting tube, magnetic rotation parts, described sylphon seal is connected between mounting flange and lifting ring flange, the upper end of described position-limiting tube is fixedly connected with lifting ring flange, the lower end of described position-limiting tube is provided with seal plug, the lower end of described magnetic rotation bar is against on seal plug, and its top is fixedly connected with article carrying platform through after position-limiting tube, lifting ring flange, bellows, mounting flange successively; Described magnetic rotation parts comprise the magnetic rotation handle be sleeved on outside position-limiting tube, are positioned at position-limiting tube and are evenly arranged on multiple moving blocks that magnetic rotation bar is connected as a single entity with magnetic rotation bar, be placed with magnet between described adjacent two moving blocks, described magnetic rotation handle is made up of magnet piece and metal derby interval.
Also comprise at least one guiding mechanism, described guiding mechanism comprises fairlead and guide post, described fairlead is fixedly connected with lifting ring flange, and the upper end of described guide post is fixedly connected with mounting flange, and it is interior and be slidably matched with fairlead that its lower end is positioned over fairlead.
Also comprise the upper bearing (metal), lower bearing and the bearing positioning ring that are installed on magnetic rotation bar, described upper bearing (metal) and lower bearing lay respectively at the upper and lower both sides of magnetic rotation block, and described bearing positioning ring is between upper bearing (metal) and position-limiting tube upper surface.
Above-mentioned active lifting mechanism and guiding mechanism interval are arranged.
Beneficial effect of the present invention:
1, the present invention is provided with lift adjustment assembly on hot indium envelope sealing-in device, by lift adjustment assembly, the sealing surface of upper closure is contacted completely with the indium sealing groove of lower closure, destroy the oxide layer on indium stannum alloy surface to a certain extent, overcome the sealing-in gas leakage that indium surface oxidation, out-of-flatness and bubble cause, improve rate of finished products.
2, the present invention is on the basis of the driven elevating mechanism of hot indium envelope sealing-in device, add magnetic rotation parts cleverly, by adjustment magnetic rotation handle, lower closure is rotated, because upper closure maintains static, lower closure does relative motion relative to upper closure, destroy the oxide layer on indium stannum alloy surface further, the sealing surface of upper closure fully contacts with indium tin layer fresh below oxide layer and infiltrates, and rate of finished products can be made to bring up to more than 95%.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Fig. 2 is the whole interior structure diagram of sealing-in device of the present invention;
Fig. 3 is active lifting mechanism structure schematic diagram;
Fig. 4 is guiding mechanism structural representation;
Fig. 5 is rotating mechanism structural representation;
Fig. 6 is the structural representation of magnetic rotation bar of the present invention;
Fig. 7 be magnetic rotation bar of the present invention with moving block and magnet coordinate figure;
Reference numeral is: A-indium envelope room, B-cathode window apparatus for placing, C-cathode window, D-indium sealing groove, E-sealing surface, F-indium envelope room flange; 2-detector shell assembly, 3-article carrying platform, 4-mounting flange, 5-bellows, 6-active lifting mechanism, 61-bearing locating piece, 62-bearing, 63-lifting screw, 64-screw rod fairlead, 65-is elevated handwheel, 7-guiding mechanism, 71-guide post, 72-fairlead, 8-is elevated ring flange, the driven elevating mechanism of 9-, 91-magnetic rotation bar, 92-CF35 flange, 93-upper bearing (metal) locating ring, 94-magnet, 95-upper bearing (metal), 96-position-limiting tube, 97-lower bearing, 98-moving block, 99-seal plug, 10-magnetic rotation handle.
Embodiment
Above closure is the cathode window preparing negative electrode below, and lower closure is detector shell assembly is that the present invention will be described for example.
As Fig. 1, shown in Fig. 2, a kind of hot indium envelope sealing-in device, comprise indium envelope room A, indium envelope indoor are vacuum, the top of indium envelope indoor is provided with closure apparatus for placing B, below is provided with article carrying platform 3, upper closure apparatus for placing B is placed with cathode window C, article carrying platform 3 is placed with detector shell assembly 2, hot indium envelope sealing-in device also comprises the lift adjustment assembly of lower closure, lift adjustment assembly comprises mounting flange 4, lifting ring flange 8, driven elevating mechanism 9 and at least two active lifting mechanisms 6 be symmetricly set on around driven elevating mechanism 9, mounting flange 4 and the indium indium sealed bottom room seals room flange F and is fixedly connected with, lifting ring flange 8 to be positioned at below mounting flange 4 and parallel with mounting flange 4, active lifting mechanism 6 comprises bearing locating piece 61, screw rod 63, screw rod fairlead 64, handwheel 65, bearing 62, bearing locating piece 61 is fixedly connected with mounting flange 4 bottom surface, screw rod fairlead 64 is connected with lifting ring flange 8, the lower end of lifting screw 63 is fixedly connected with lifting handwheel 65, lifting bearing locating piece 61 is stretched into through screw rod fairlead 64 in the upper end of lifting screw 63, lifting screw 63 is threaded with screw rod fairlead 64, is provided with bearing 62 between the upper end of lifting screw 63 and bearing locating piece 61, driven elevating mechanism 9 comprises bellows 5, magnetic rotation bar 91, position-limiting tube 96, bellows 5 is fixed between mounting flange 4 and lifting ring flange 8, the upper end of position-limiting tube 96 is fixedly connected with lifting ring flange 8, the lower end of position-limiting tube 96 is provided with seal plug, the lower end of magnetic rotation bar 91 is against on seal plug, and its top is fixedly connected with article carrying platform 3 through position-limiting tube 96, lifting ring flange 8, bellows 5, mounting flange 4 successively.
In order to improve vacuum seal effect, driven elevating mechanism 9 also comprises magnetic rotation parts, magnetic rotation parts comprise the magnetic rotation handle 10 be sleeved on outside position-limiting tube 96, are positioned at position-limiting tube 96 and are evenly arranged on multiple moving blocks 98 that magnetic rotation bar 91 is connected as a single entity with magnetic rotation bar, be placed with magnet 94 between adjacent two moving blocks 98, magnetic rotation handle 10 is made up of magnet piece and metal derby interval.
In order to the rising being article carrying platform 3 is more steady, between mounting flange 4 and lifting ring flange 8, arrange two guiding mechanisms, active lifting mechanism and guiding mechanism interval are arranged.
Guiding mechanism 7 comprises fairlead 71 and guide post 72, and fairlead 71 is fixedly connected with lifting ring flange 8, and the upper end of guide post 72 is fixedly connected with mounting flange 4, and its lower end is positioned in fairlead 71.
During welding, first sealing-in device mounting flange 4 and indium are sealed room flange F to be connected, and detector shell assembly 2 is arranged on the detector support tube of negative electrode transfer system indium envelope room A, cathode window C lays in the cathodic compartment, after completing a series of detector manufacture craft, under the prerequisite keeping negative electrode transfer system ultra high vacuum and maintenance suitable temperature, the cathode window C making negative electrode in negative electrode make-up room is transferred in the middle of indium envelope room A by magnetic force transmission, the height raising detector shell assembly 2 regulates the adjusting handle 65 of sealing-in device active lifting mechanism simultaneously by both hands, detector shell assembly 2 is made to be elevated to sealing surface E close to cathode window C, move left and right fine setting cathode window C and make it alignment detector shell indium sealing groove D, the position of fixed negative pole window C, then the height continuing to raise detector shell assembly 2 makes cathode window C contact completely with the indium stannum alloy in detector shell indium sealing groove D, now by the magnetic force handle 10 of magnetic force rotary components on adjustment sealing-in device, detector shell assembly 2 is rotated in the angular range of ± 30 °, because cathode window C maintains static, detector shell assembly 2 does relative motion relative to cathode window C, cathode window sealing surface E destroys the oxide layer on indium stannum alloy surface, fully contact with indium tin layer fresh below and infiltrate, complete good sealing-in and the sealing of detector.
In adjustment process, the motion process of lift adjustment assembly and magnetic force rotating parts is as follows:
Rotation and lifting handwheel 65, the spiral escalation thereupon of lifting ring flange 8, the rising of lifting ring flange 8 drives driven elevating mechanism to rise overally, and the magnetic rotation bar 91 of driven elevating mechanism 9 is fixedly connected with article carrying platform 3, thus makes detector shell assembly 2 increase thereupon.Meanwhile, the guide post 72 be fixed on below mounting flange 4 moves along fairlead 71.The height continuing to raise detector shell assembly 2 makes cathode window C contact completely with the indium stannum alloy in detector shell indium sealing groove D, now by rotation magnetic force turning handle 10, magnet in magnetic rotation handle and the magnet be clipped between moving block 98 interact and drive magnetic rotation bar 91 to rotate, because the upper end of magnetic rotation bar 91 is fixedly connected with article carrying platform 3, article carrying platform 3 is thus driven to rotate.Bellows between mounting flange 4 and lifting ring flange 8 can be compressed in uphill process, and its effect is flexible coupling to mounting flange 4 and lifting ring flange 8, can play again the effect of sealing simultaneously.

Claims (4)

1. a hot indium envelope sealing-in device, comprise indium envelope room (A), described indium envelope indoor are vacuum state, the top of described indium envelope indoor is provided with closure apparatus for placing (B), below is provided with article carrying platform (3), described upper closure apparatus for placing (B) is for placing upper closure, and described article carrying platform (3) is for placing lower closure
It is characterized in that: the lift adjustment assembly also comprising article carrying platform, described lift adjustment assembly comprises mounting flange (4), lifting ring flange (8), driven elevating mechanism (9) and at least two active lifting mechanisms (6) be symmetricly set on around driven elevating mechanism (9)
Described mounting flange (4) and the indium indium sealed bottom room seals room flange (F) and is fixedly connected with, described lifting ring flange (8) be positioned at mounting flange (4) below and parallel with mounting flange (4),
Described active lifting mechanism (6) comprises bearing locating piece (61), lifting screw (63), screw rod fairlead (64), handwheel (65), bearing (62), described bearing locating piece (61) is fixedly connected with mounting flange (4) bottom surface, described screw rod fairlead (64) is connected with lifting ring flange (8), the lower end of described lifting screw (63) is fixedly connected with lifting handwheel (65), lifting bearing locating piece (61) is stretched into through screw rod fairlead (64) in the upper end of described lifting screw (63), described lifting screw (63) is threaded with screw rod fairlead (64), described bearing (62) is arranged between the upper end of lifting screw (63) and bearing locating piece (61),
Described driven elevating mechanism (9) comprises bellows (5), magnetic rotation bar (91), position-limiting tube (96), magnetic rotation parts, described bellows (5) is sealedly connected between mounting flange (4) and lifting ring flange (8), the upper end of described position-limiting tube (96) is fixedly connected with lifting ring flange (8), the lower end of described position-limiting tube (96) is provided with seal plug, the lower end of described magnetic rotation bar (91) is against on seal plug, its top is successively through position-limiting tube (96), lifting ring flange (8), bellows (5), mounting flange (4) is fixedly connected with article carrying platform (3) afterwards, described magnetic rotation parts comprise and are sleeved on position-limiting tube (96) magnetic rotation handle (10) outward, are positioned at position-limiting tube (96) and are evenly arranged on multiple moving blocks (98) that the upper and magnetic rotation bar of magnetic rotation bar (91) is connected as a single entity, be placed with magnet (94) between adjacent two moving blocks (98), described magnetic rotation handle (10) is made up of magnet piece and metal derby interval.
2. hot indium envelope sealing-in device according to claim 1, it is characterized in that: also comprise at least one guiding mechanism (7), described guiding mechanism (7) comprises fairlead (72) and guide post (71), described fairlead (72) is fixedly connected with lifting ring flange (8), the upper end of described guide post (71) is fixedly connected with mounting flange (4), and its lower end to be positioned in fairlead (72) and to be slidably matched with fairlead (72).
3. hot indium envelope sealing-in device according to claim 1 and 2, it is characterized in that: also comprise the upper bearing (metal) (95) be installed on magnetic rotation bar (91), lower bearing (97) and bearing positioning ring (93), described upper bearing (metal) (95) and lower bearing (97) lay respectively at moving block (98) both sides up and down, and described bearing positioning ring (93) is positioned between upper bearing (metal) (95) and position-limiting tube (96) upper surface.
4. hot indium envelope sealing-in device according to claim 3, is characterized in that: described active lifting mechanism and guiding mechanism interval are arranged.
CN201210563583.XA 2012-12-21 2012-12-21 Sealing device of hot indium sealing Active CN103123886B (en)

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Application Number Priority Date Filing Date Title
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Publication number Priority date Publication date Assignee Title
CN103693447B (en) * 2013-12-30 2016-06-08 中国科学院西安光学精密机械研究所 A kind of magnetic force transfer device
CN107985364A (en) * 2017-12-26 2018-05-04 上海制驰智能科技有限公司 A kind of steer-drive of omnidirectional running mobile platform
CN115144810B (en) * 2022-08-31 2022-11-15 深圳市睿智通科技有限公司 Intelligent ammeter testing device and method

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EP0108450B1 (en) * 1982-11-02 1987-09-30 Koninklijke Philips Electronics N.V. Method of manufacturing an electron tube
CN1959912A (en) * 2006-10-20 2007-05-09 四川天微电子有限责任公司 Indium seal type luminescent screen, and technique for preparing the display tube of using the luminescent screen
CN201508364U (en) * 2009-06-04 2010-06-16 大连齐维科技发展有限公司 Five-dimensional driver
CN102152318A (en) * 2011-05-04 2011-08-17 中国科学院等离子体物理研究所 Robot drive mechanism used in high temperature vacuum environment
CN203013669U (en) * 2012-12-21 2013-06-19 中国科学院西安光学精密机械研究所 Thermal indium seal sealing device

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JPS62206741A (en) * 1986-03-06 1987-09-11 Sony Corp Indium sealing method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0108450B1 (en) * 1982-11-02 1987-09-30 Koninklijke Philips Electronics N.V. Method of manufacturing an electron tube
CN1959912A (en) * 2006-10-20 2007-05-09 四川天微电子有限责任公司 Indium seal type luminescent screen, and technique for preparing the display tube of using the luminescent screen
CN201508364U (en) * 2009-06-04 2010-06-16 大连齐维科技发展有限公司 Five-dimensional driver
CN102152318A (en) * 2011-05-04 2011-08-17 中国科学院等离子体物理研究所 Robot drive mechanism used in high temperature vacuum environment
CN203013669U (en) * 2012-12-21 2013-06-19 中国科学院西安光学精密机械研究所 Thermal indium seal sealing device

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