CN103123886A - Sealing device of hot indium sealing - Google Patents

Sealing device of hot indium sealing Download PDF

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Publication number
CN103123886A
CN103123886A CN201210563583XA CN201210563583A CN103123886A CN 103123886 A CN103123886 A CN 103123886A CN 201210563583X A CN201210563583X A CN 201210563583XA CN 201210563583 A CN201210563583 A CN 201210563583A CN 103123886 A CN103123886 A CN 103123886A
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China
Prior art keywords
sealing
indium
lifting
bearing
magnetic rotation
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CN201210563583XA
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CN103123886B (en
Inventor
赛小锋
韦永林
刘永安
盛立志
刘哲
赵宝升
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XiAn Institute of Optics and Precision Mechanics of CAS
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XiAn Institute of Optics and Precision Mechanics of CAS
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Abstract

The invention relates to a sealing device of hot indium sealing. The sealing device of the hot indium sealing comprises an indium sealing chamber, wherein an upper sealing part placing device is arranged on the upper portion of the interior of the indium sealing chamber, an object carrying platform is arranged on the lower portion of the interior of the indium sealing chamber, the upper sealing part placing device is used to place an upper sealing part, and the object carrying platform is used to place a lower sealing part. The sealing device of the hot indium sealing further comprises a lifting adjustment component and a magnetic rotating component of the lower sealing part. Due to the fact that the lifting adjustment component and the magnetic rotating component enable a sealing face of the upper sealing part to fully contact with an indium sealing groove of the lower sealing part, an oxide layer of the surface of an indium tin alloy is destroyed to some extent, the shortcoming of sealing air leakage caused by the oxidized and uneven surface of indium and air bubbles is overcome, and rate of finished products is improved.

Description

A kind of hot indium envelope sealing-in device
Technical field
The present invention relates to image intensifier, photodetector, large cathode diameter photomultiplier, camera tube, image converter tube equal vacuum type photoelectric device and make the field, relate in particular to a kind of hot indium envelope sealing-in device.
Background technology
Since shifting the appearance of photocathode method, the sealing-in of photocathode all adopts the Indium Cool Pressure Welding technology to realize.This method complex structure, equipment manufacturing cost is high, to high by the assembly fit dimension tolerance precision of sealing-in.In recent years, developed a kind of new method for sealing-Re indium encapsulation technique, it can realize coupling and the unmatched sealing of various materials.Hot indium encapsulation technique can successfully be applied to outside image intensifier, also can be used for various photodetectors, camera tube, the negative electrode sealing-in of the photoelectric devices such as image converter tube.Existing hot indium encapsulation technique as long as scolder remains on molten state, just can rely on the weight of closure self during the assembly sealing-in, scolder is filled up weld seam, thereby make scolder and sealing surface form the good wetting purpose that reaches sealing.The height of closure mainly by the telescopic adjustment of bellows, installs without spin, and adopting the manufacture method rate of finished products of ordinary hot indium encapsulation technique is 6O~80%.
Summary of the invention
For solve existing hot indium seal apparatus when the sealing-in because indium surface oxidation, out-of-flatness and bubble cause the low technical problem of tubulation rate of finished products that sealing-in gas leakage causes, the invention provides a kind of hot indium envelope sealing-in device.
Technical solution of the present invention is:
A kind of hot indium envelope sealing-in device, comprise that indium seals the chamber, described indium envelope is indoor is vacuum state, the indoor top of described indium envelope is provided with the closure apparatus for placing, the below is provided with article carrying platform, described upper closure apparatus for placing is used for placing upper closure, and described article carrying platform (3) is used for placing lower closure
Its special character is: also comprise the lift adjustment assembly of article carrying platform, described lift adjustment assembly comprises that mounting flange, lifting ring flange, driven elevating mechanism and at least two are symmetricly set on the active lifting mechanism around driven elevating mechanism,
Described mounting flange seals the chamber flange with the indium of bottom, indium envelope chamber and is fixedly connected with, and described lifting ring flange is positioned at mounting flange below and parallel with mounting flange,
described active lifting mechanism comprises the bearing locating piece, lifting screw, the screw rod fairlead, handwheel, bearing, described bearing locating piece is fixedly connected with the mounting flange bottom surface, described screw rod fairlead is connected with the lifting ring flange, the lower end of described lifting screw is fixedly connected with the lifting handwheel, the upper end of described lifting screw is passed the screw rod fairlead and is stretched into lifting bearing locating piece, described lifting screw is threaded with the screw rod fairlead, described bearing is arranged between the upper end and bearing locating piece of lifting screw
Described driven elevating mechanism comprises bellows, magnetic rotation bar, position-limiting tube, magnetic rotation parts, described sylphon seal is connected between mounting flange and lifting ring flange, the upper end of described position-limiting tube is fixedly connected with the lifting ring flange, the lower end of described position-limiting tube is provided with seal plug, the lower end of described magnetic rotation bar is against on seal plug, and its top is fixedly connected with article carrying platform after passing successively position-limiting tube, lifting ring flange, bellows, mounting flange; Described magnetic rotation parts comprise and are sleeved on the outer magnetic rotation handle of position-limiting tube, are positioned at position-limiting tube and evenly are arranged on a plurality of moving blocks that are connected as a single entity with the magnetic rotation bar on the magnetic rotation bar, be placed with magnet between described adjacent two moving blocks, described magnetic rotation handle is comprised of magnet piece and metal derby interval.
Also comprise at least one guiding mechanism, described guiding mechanism comprises fairlead and guide post, described fairlead is fixedly connected with the lifting ring flange, and the upper end of described guide post is fixedly connected with mounting flange, and its lower end is positioned in fairlead and is slidably matched with fairlead.
Also comprise the upper bearing (metal), lower bearing and the bearing positioning ring that are installed on the magnetic rotation bar, described upper bearing (metal) and lower bearing lay respectively at both sides, magnetic rotation piece up and down, and described bearing positioning ring is between upper bearing (metal) and position-limiting tube upper surface.
Above-mentioned active lifting mechanism and guiding mechanism interval setting.
Beneficial effect of the present invention:
1, the present invention is provided with the lift adjustment assembly on hot indium envelope sealing-in device, the sealing surface of upper closure is contacted fully with the indium sealing groove of lower closure, destroyed to a certain extent the oxide layer on indium stannum alloy surface, overcome the sealing-in gas leakage that indium surface oxidation, out-of-flatness and bubble cause, improved rate of finished products.
2, the present invention is on the basis of the driven elevating mechanism of hot indium envelope sealing-in device, the magnetic rotation parts have been added cleverly, by adjusting the magnetic rotation handle, make lower closure rotation, because maintaining static down closure, upper closure does relative motion with respect to upper closure, further destroyed the oxide layer on indium stannum alloy surface, the sealing surface of upper closure fresh indium tin layer below oxide layer fully contacts and infiltrates, and rate of finished products is brought up to more than 95%.
Description of drawings
Fig. 1 is structural representation of the present invention;
Fig. 2 is the whole interior structure diagram of sealing-in device of the present invention;
Fig. 3 is active lifting mechanism structure schematic diagram;
Fig. 4 is the guiding mechanism structural representation;
Fig. 5 is the rotating mechanism structural representation;
Fig. 6 is the structural representation of magnetic rotation bar of the present invention;
Fig. 7 is magnetic rotation bar of the present invention and the figure that coordinates of moving block and magnet;
Reference numeral is: the A-indium seals the chamber, B-cathode window apparatus for placing, and the C-cathode window, D-indium sealing groove, the E-sealing surface, the F-indium seals the chamber flange; 2-detector shell assembly, 3-article carrying platform, 4-mounting flange, the 5-bellows, 6-active lifting mechanism, 61-bearing locating piece, the 62-bearing, 63-lifting screw, 64-screw rod fairlead, 65-lifting handwheel, 7-guiding mechanism, 71-guide post, the 72-fairlead, 8-lifting ring flange, the driven elevating mechanism of 9-, 91-magnetic rotation bar, the 92-CF35 flange, 93-upper bearing (metal) locating ring, 94-magnet, the 95-upper bearing (metal), the 96-position-limiting tube, 97-lower bearing, 98-moving block, the 99-seal plug, 10-magnetic rotation handle.
Embodiment
Below above closure be the cathode window for preparing negative electrode, lower closure is that detector shell assembly is that the present invention will be described for example.
as Fig. 1, shown in Figure 2, a kind of hot indium envelope sealing-in device, comprise indium envelope chamber A, the indium envelope is indoor is vacuum, the indoor top of indium envelope is provided with closure apparatus for placing B, the below is provided with article carrying platform 3, be placed with cathode window C on upper closure apparatus for placing B, be placed with detector shell assembly 2 on article carrying platform 3, hot indium envelope sealing-in device also comprises the lift adjustment assembly of lower closure, the lift adjustment assembly comprises mounting flange 4, lifting ring flange 8, driven elevating mechanism 9 and at least two are symmetricly set on the active lifting mechanism 6 around driven elevating mechanism 9, mounting flange 4 is fixedly connected with the indium envelope chamber flange F of bottom, indium envelope chamber, lifting ring flange 8 is positioned at mounting flange 4 belows and parallel with mounting flange 4, active lifting mechanism 6 comprises bearing locating piece 61, screw rod 63, screw rod fairlead 64, handwheel 65, bearing 62, bearing locating piece 61 is fixedly connected with mounting flange 4 bottom surfaces, screw rod fairlead 64 is connected with lifting ring flange 8, the lower end of lifting screw 63 is fixedly connected with lifting handwheel 65, the upper end of lifting screw 63 is passed screw rod fairlead 64 and is stretched into lifting bearing locating piece 61, lifting screw 63 is threaded with screw rod fairlead 64, is provided with bearing 62 between the upper end of lifting screw 63 and bearing locating piece 61, driven elevating mechanism 9 comprises bellows 5, magnetic rotation bar 91, position-limiting tube 96, bellows 5 is fixed between mounting flange 4 and lifting ring flange 8, the upper end of position-limiting tube 96 is fixedly connected with lifting ring flange 8, the lower end of position-limiting tube 96 is provided with seal plug, the lower end of magnetic rotation bar 91 is against on seal plug, and its top is passed successively position-limiting tube 96, lifting ring flange 8, bellows 5, mounting flange 4 and is fixedly connected with article carrying platform 3.
In order to improve the vacuum seal effect, driven elevating mechanism 9 also comprises the magnetic rotation parts, the magnetic rotation parts comprise and are sleeved on the outer magnetic rotation handle 10 of position-limiting tube 96, are positioned at position-limiting tube 96 and evenly are arranged on a plurality of moving blocks 98 that are connected as a single entity with the magnetic rotation bar on magnetic rotation bar 91, be placed with magnet 94 between adjacent two moving blocks 98, magnetic rotation handle 10 is comprised of magnet piece and metal derby interval.
In order to be that the rising of article carrying platform 3 is more steady, two guiding mechanisms are set between mounting flange 4 and lifting ring flange 8, active lifting mechanism and guiding mechanism interval arrange.
Guiding mechanism 7 comprises fairlead 71 and guide post 72, and fairlead 71 is fixedly connected with lifting ring flange 8, and the upper end of guide post 72 is fixedly connected with mounting flange 4, and its lower end is positioned in fairlead 71.
during welding, at first sealing-in device mounting flange 4 is connected with indium envelope chamber flange F, and detector shell assembly 2 is arranged on the detector support tube of negative electrode transfer system indium envelope chamber A, cathode window C is placed in cathode chamber, after completing a series of detector manufacture craft, keeping negative electrode transfer system ultra high vacuum and keeping under the prerequisite of suitable temperature, the cathode window C that makes negative electrode in the negative electrode make-up room is transferred in the middle of indium envelope chamber A by the magnetic force transmission, the height of rising detector shell assembly 2 is regulated the adjusting handle 65 of sealing-in device active lifting mechanism simultaneously by both hands, make detector shell assembly 2 be elevated to sealing surface E near cathode window C, move left and right fine setting cathode window C and make it alignment detector shell indium sealing groove D, the position of fixed negative pole window C, then the height that continues rising detector shell assembly 2 makes cathode window C contact fully with indium stannum alloy in detector shell indium sealing groove D, this moment is by adjusting the magnetic force handle 10 of magnetic force rotary components on sealing-in device, detector shell assembly 2 is rotated in the angular range of ± 30 °, detector shell assembly 2 does relative motion with respect to cathode window C because cathode window C maintains static, cathode window sealing surface E has destroyed the oxide layer on indium stannum alloy surface, fully contact and infiltrate with following fresh indium tin layer, good sealing-in and the sealing of detector have been completed.
In adjustment process, the motion process of lift adjustment assembly and magnetic force rotating parts is as follows:
Rotation and lifting handwheel 65, lifting ring flange 8 spiral escalation thereupon, the rising of lifting ring flange 8 drives driven elevating mechanism and rises overally, and the magnetic rotation bar 91 of driven elevating mechanism 9 is fixedly connected with article carrying platform 3, thereby makes detector shell assembly 2 rise thereupon.Meanwhile, the guide post 72 that is fixed in mounting flange 4 belows moves along fairlead 71.The height that continues rising detector shell assembly 2 makes cathode window C contact fully with indium stannum alloy in detector shell indium sealing groove D, this moment is by rotation magnetic force turning handle 10, magnet in the magnetic rotation handle and the magnet interaction that is clipped between moving block 98 drive 91 rotations of magnetic rotation bar, because the upper end of magnetic rotation bar 91 is fixedly connected with article carrying platform 3, thereby drive article carrying platform 3 rotations.Bellows between mounting flange 4 and lifting ring flange 8 can be compressed in uphill process, and its effect is that mounting flange 4 and lifting ring flange 8 are flexible coupling, and can play the effect of sealing again simultaneously.

Claims (4)

1. a hot indium seals sealing-in device, comprise that indium seals chamber (A), described indium envelope is indoor is vacuum state, the indoor top of described indium envelope is provided with closure apparatus for placing (B), the below is provided with article carrying platform (3), described upper closure apparatus for placing (B) is used for placing upper closure, and described article carrying platform (3) is used for placing lower closure
It is characterized in that: the lift adjustment assembly that also comprises article carrying platform, described lift adjustment assembly comprises that mounting flange (4), lifting ring flange (8), driven elevating mechanism (9) and at least two are symmetricly set on driven elevating mechanism (9) active lifting mechanism (6) on every side
Described mounting flange (4) is fixedly connected with the indium envelope chamber flange (F) of bottom, indium envelope chamber, and described lifting ring flange (8) is positioned at mounting flange (4) below and parallel with mounting flange (4),
described active lifting mechanism (6) comprises bearing locating piece (61), lifting screw (63), screw rod fairlead (64), handwheel (65), bearing (62), described bearing locating piece (61) is fixedly connected with mounting flange (4) bottom surface, described screw rod fairlead (64) is connected with lifting ring flange (8), the lower end of described lifting screw (63) is fixedly connected with lifting handwheel (65), the upper end of described lifting screw (63) is passed screw rod fairlead (64) and is stretched into lifting bearing locating piece (61), described lifting screw (63) is threaded with screw rod fairlead (64), described bearing (62) is arranged between the upper end and bearing locating piece (61) of lifting screw (63),
described driven elevating mechanism (9) comprises bellows (5), magnetic rotation bar (91), position-limiting tube (96), the magnetic rotation parts, described bellows (5) is sealedly connected between mounting flange (4) and lifting ring flange (8), the upper end of described position-limiting tube (96) is fixedly connected with lifting ring flange (8), the lower end of described position-limiting tube (96) is provided with seal plug, the lower end of described magnetic rotation bar (91) is against on seal plug, position-limiting tube (96) is passed on its top successively, lifting ring flange (8), bellows (5), be fixedly connected with article carrying platform (3) after mounting flange (4), described magnetic rotation parts comprise and are sleeved on the outer magnetic rotation handle (10) of position-limiting tube (96), are positioned at position-limiting tube (96) and evenly are arranged on a plurality of moving blocks (98) that magnetic rotation bar (91) is gone up and the magnetic rotation bar is connected as a single entity, be placed with magnet (94) between described adjacent two moving blocks (98), described magnetic rotation handle (10) is comprised of magnet piece and metal derby interval.
2. hot indium according to claim 1 seals sealing-in device, it is characterized in that: also comprise at least one guiding mechanism (7), described guiding mechanism (7) comprises fairlead (72) and guide post (71), described fairlead (72) is fixedly connected with lifting ring flange (8), the upper end of described guide post (71) is fixedly connected with mounting flange (4), and its lower end is positioned in fairlead (72) and is slidably matched with fairlead (72).
3. hot indium according to claim 1 and 2 seals sealing-in device, it is characterized in that: also comprise the upper bearing (metal) (95), lower bearing (97) and the bearing positioning ring (93) that are installed on magnetic rotation bar (91), described upper bearing (metal) (95) and lower bearing (97) lay respectively at both sides, magnetic rotation piece (98) up and down, and described bearing positioning ring (93) is positioned between upper bearing (metal) (95) and position-limiting tube (96) upper surface.
4. hot indium envelope sealing-in device according to claim 3, is characterized in that: described active lifting mechanism and guiding mechanism interval setting.
CN201210563583.XA 2012-12-21 2012-12-21 Sealing device of hot indium sealing Active CN103123886B (en)

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Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
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CN103123886B CN103123886B (en) 2015-05-27

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103693447A (en) * 2013-12-30 2014-04-02 中国科学院西安光学精密机械研究所 Magnetic force transmission device
CN107985364A (en) * 2017-12-26 2018-05-04 上海制驰智能科技有限公司 A kind of steer-drive of omnidirectional running mobile platform
CN115144810A (en) * 2022-08-31 2022-10-04 深圳市睿智通科技有限公司 Intelligent ammeter testing device and method

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Publication number Priority date Publication date Assignee Title
JPS62206741A (en) * 1986-03-06 1987-09-11 Sony Corp Indium sealing method
EP0108450B1 (en) * 1982-11-02 1987-09-30 Koninklijke Philips Electronics N.V. Method of manufacturing an electron tube
CN1959912A (en) * 2006-10-20 2007-05-09 四川天微电子有限责任公司 Indium seal type luminescent screen, and technique for preparing the display tube of using the luminescent screen
CN201508364U (en) * 2009-06-04 2010-06-16 大连齐维科技发展有限公司 Five-dimensional driver
CN102152318A (en) * 2011-05-04 2011-08-17 中国科学院等离子体物理研究所 Robot drive mechanism used in high temperature vacuum environment
CN203013669U (en) * 2012-12-21 2013-06-19 中国科学院西安光学精密机械研究所 Thermal indium seal sealing device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0108450B1 (en) * 1982-11-02 1987-09-30 Koninklijke Philips Electronics N.V. Method of manufacturing an electron tube
JPS62206741A (en) * 1986-03-06 1987-09-11 Sony Corp Indium sealing method
CN1959912A (en) * 2006-10-20 2007-05-09 四川天微电子有限责任公司 Indium seal type luminescent screen, and technique for preparing the display tube of using the luminescent screen
CN201508364U (en) * 2009-06-04 2010-06-16 大连齐维科技发展有限公司 Five-dimensional driver
CN102152318A (en) * 2011-05-04 2011-08-17 中国科学院等离子体物理研究所 Robot drive mechanism used in high temperature vacuum environment
CN203013669U (en) * 2012-12-21 2013-06-19 中国科学院西安光学精密机械研究所 Thermal indium seal sealing device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103693447A (en) * 2013-12-30 2014-04-02 中国科学院西安光学精密机械研究所 Magnetic force transmission device
CN107985364A (en) * 2017-12-26 2018-05-04 上海制驰智能科技有限公司 A kind of steer-drive of omnidirectional running mobile platform
CN115144810A (en) * 2022-08-31 2022-10-04 深圳市睿智通科技有限公司 Intelligent ammeter testing device and method
CN115144810B (en) * 2022-08-31 2022-11-15 深圳市睿智通科技有限公司 Intelligent ammeter testing device and method

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