CN109164273A - A kind of accelerometer permanent magnet moment-meter - Google Patents
A kind of accelerometer permanent magnet moment-meter Download PDFInfo
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- CN109164273A CN109164273A CN201810818839.4A CN201810818839A CN109164273A CN 109164273 A CN109164273 A CN 109164273A CN 201810818839 A CN201810818839 A CN 201810818839A CN 109164273 A CN109164273 A CN 109164273A
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- permanent magnet
- accelerometer
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- silicon substrate
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/105—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by magnetically sensitive devices
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Abstract
The invention belongs to flexible pendulous accelerometer technical fields, and in particular to a kind of permanent magnet moment-meter of the inertial navigation accelerometer based on silicon substrate coil.Accelerometer permanent magnet moment-meter of the invention includes yoke, permanent magnet, magnetic conduction sheet and silicon substrate coil, and wherein yoke is located at bottommost, and permanent magnet is fixed on yoke, magnetic conduction sheet is fixed on the upper surface of permanent magnet.Permanent magnetism air gap is formed between yoke and magnetic conduction sheet, silicon substrate coil is located inside permanent magnetism air gap, and when permanent magnet moment-meter works, silicon substrate coil is fixed on accelerometer pendulum by coil cushion block.The present invention effectively reduces the thermal stress between accelerometer pendulum and permanent magnet moment-meter coil, while reducing the viscoplasticity of coil using the enameled wire coiling of silicon substrate coil substitution accelerometer permanent magnet moment-meter.Silicon substrate coil has more excellent spatial stability in permanent magnetic circuit, can be obviously improved the constant multiplier stability of accelerometer.
Description
Technical field
The invention belongs to flexible pendulous accelerometer technical fields, and in particular to a kind of inertial navigation accelerometer is with being based on
The permanent magnet moment-meter of silicon substrate coil.
Background technique
Inertial navigation is with the core devices that flexure accelerometers are in inertial navigation set, the temperature of zero-bit and constant multiplier
Degree and time repeatability directly affect the accuracy class of inertial navigation.With being constantly progressive for modern aerospace technology, inertia
Navigation system is higher and higher for accelerometer requirement, and the repeatability of accelerometer constant multiplier, which is promoted, has become acceleration
The horizontal technical bottleneck promoted of meter.For flexible pendulous accelerometer, the stability of torquer is to determine accelerometer scale
The key factor of factor stability.
Torquer consists of two parts, and a part is the permanent magnetic circuit formed using permanent magnet and yoke, and another part is
The conductive coil being fixed on accelerometer pendulum.Promote the stability of torquer, it is necessary to promote the magnetic circuit of permanent magnetic circuit
Stability and torquer coil are in space with the stability of temperature and time.
The coil of accelerometer permanent magnet moment-meter mostly uses enameled wire coiling to form at present, and coiling presentation meets material
Viscoelasticity characteristic, meanwhile, the coefficient of expansion usually differs an amount with the pendulum material such as monocrystalline silicon, quartz of accelerometer etc.
Grade or more.After coil is fixed on accelerometer pendulum, under the action of by temperature, the thermally stressed effect of coil, hair
Raw moderate finite deformation has viscoplasticity due to coil, initial position can not be returned back to after stress deformation, finally makes torquer
Permanent change occurs for coil space position, reduces the repeatability of constant multiplier.In order to promote accelerometer constant multiplier stability,
Common method has, and for accelerometer using the methods of shaped framework coil, these methods can promote accelerometer mark to a certain extent
It is non-linear to spend factor, but effect is very limited.Silicon substrate loop construction is stablized, short but there are winding lengths, and coil resistance is big
Problem, it is also difficult to be directly applied on accelerometer torquer.
Accelerometer torquer coil usually passes through splicing and is fixed on the pendulum of accelerometer, which exists
The positioning problem that consistency is poor, thermal stress is big, can increase a cushion block, control coil position and reduction between coil and pendulum
Thermal stress, but the effect that this structure effect reduces thermal stress between coil and pendulum is still very limited.
Summary of the invention
The object of the present invention is to provide a kind of accelerometer permanent magnet moment-meter, be effectively reduced accelerometer pendulum with forever
Thermal stress between magnetic torquer coil is obviously improved the constant multiplier stability of accelerometer.
Accelerometer permanent magnet moment-meter of the invention includes yoke, permanent magnet, magnetic conduction sheet and silicon substrate coil, wherein yoke
Positioned at bottommost, permanent magnet is fixed on yoke, magnetic conduction sheet is fixed on the upper surface of permanent magnet.It is formed between yoke and magnetic conduction sheet
Permanent magnetism air gap, silicon substrate coil are located inside permanent magnetism air gap, and when permanent magnet moment-meter works, silicon substrate coil is fixed on by coil cushion block
On accelerometer pendulum.
Wherein, the fixed form between silicon substrate coil, coil cushion block and accelerometer pendulum is bonding or glass sintering.
Wherein, coil cushion block is a monocrystalline silicon cushion block with flexible structure, with discharge accelerometer pendulum and coil it
Between thermal stress；The flexible structure can be that rigidity of middle is small, the big support construction of both ends rigidity.
Wherein, in order to increase silicon substrate coil-winding length, torquer coefficient is promoted, the silicon substrate coil can be multilayer heap
Folded helical structure, each layer of the hand of spiral is on the contrary, to increase coil-winding length.
Wherein, in order to reduce the resistance of silicon substrate coil, its electric conductivity is promoted, it can be in the gap filling gold of silicon substrate coil
Belong to or in silicon substrate coil surface metal cladding, metal eutectic fusion can also be carried out in silicon substrate coil surface.
The present invention is effectively reduced and is added using the enameled wire coiling of silicon substrate coil substitution accelerometer permanent magnet moment-meter
Thermal stress between speedometer pendulum and permanent magnet moment-meter coil, while reducing the viscoplasticity of coil.Silicon substrate coil is in permanent magnetism
There is more excellent spatial stability in magnetic circuit, the constant multiplier stability of accelerometer can be obviously improved.
Detailed description of the invention
Fig. 1 is the structural perspective of accelerometer permanent magnet moment-meter and pendulum；
Fig. 2 is the cross-sectional view of the structure of accelerometer permanent magnet moment-meter and pendulum；
Fig. 3 is the sectional view of the coil cushion block in accelerometer permanent magnet moment-meter of the invention；
Fig. 4 is the top view for the silicon substrate coil that accelerometer permanent magnet moment-meter of the invention uses.
In figure:
1- yoke, 2- permanent magnet, 3- magnetic conduction sheet, 4- silicon substrate coil, 5- permanent magnetism air gap, 6- coil cushion block, 7- pendulum, 8- pendulum
Piece flexibility position, 9- silicon substrate coil lead end, the gap 10-
Specific embodiment
Objects, technical solutions and advantages for a clearer understanding of the present invention, with reference to the accompanying drawings and embodiments, to this
Invention is further elaborated.
With reference to Fig. 1 and Fig. 2, it is somebody's turn to do the accelerometer permanent magnet moment-meter based on silicon substrate coil and includes yoke 1, permanent magnet 2, leads
Magnetic sheet 3 and silicon substrate coil 4, wherein yoke 1 is located at the bottommost of the structure, and permanent magnet 2 is fixed on yoke by gluing, etc.
Upper, magnetic conduction sheet 3 is fixed on by gluing, etc. in 2 upper surface of permanent magnet.It is permanent magnetism air gap 5 between yoke 1 and magnetic conduction sheet 3,
Silicon substrate coil is located inside permanent magnetism air gap 5.
Referring to figs. 2 and 3, when the silicon substrate coil permanent magnet moment-meter work of accelerometer, silicon substrate coil 4 is needed to be fixed on pendulum
It on piece 7, is connected between pendulum 7 and silicon substrate coil 4 by coil cushion block 6, connection type can be bonding or glass sintering.
Coil cushion block 6 is that a rigidity of middle is small, and the big support construction of both ends rigidity, the heat for discharging between pendulum and coil is answered
Power.Permanent magnet 2 enters permanent magnetism air gap 5 along the magnetic field that axial charging, yoke 1 and magnetic conduction sheet 3 guide permanent magnet 2 to generate, and forms edge
The radially-arranged magnetic field of magnetic conduction sheet 3.When silicon substrate coil 4 is powered, due to electromagnetic induction, silicon substrate coil 4 will be generated along magnetic conduction sheet 3
Axial active force, the size of active force are as follows:
F=BIL
Wherein B is the magnetic field strength of permanent magnetism air gap 5, and I is the electrical current of silicon substrate coil 4, and L is the conducting wire of silicon substrate coil 4
Length.The torque that pendulum 7 is generated by silicon substrate coil 4 will generate rotation, electric current in silicon substrate coil 4 around pendulum flexibility position 8
Direction determines the Impact direction of silicon substrate coil 4, and by adjusting the size and Orientation of electric current in silicon substrate coil 4, base may be implemented
Square control is applied for pendulum 7 in silicon substrate coil permanent magnet moment-meter.
With reference to Fig. 4, silicon substrate coil 4 is formed by monocrystalline silicon lithography, needs to carry out at surface insulation after processing is completed
Reason.Silicon substrate coil 4 is helical structure, carries out lead energization by two silicon substrate coil lead ends 9.It is long in order to increase winding wire
Silicon substrate coil 4 can be carried out multiple-level stack by degree, to increase coil-winding length, wherein every layer heap folds the spiral shell of silicon substrate coil
It revolves contrary.In order to reduce by 4 resistance of silicon substrate coil, its electric conductivity is promoted, gold can be filled in the gap of silicon substrate coil 10
Belong to or in 4 plating metal on surface layer of silicon substrate coil, metal eutectic fusion can also be carried out on 4 surface of silicon substrate coil.
Claims (7)
1. a kind of accelerometer permanent magnet moment-meter, including yoke (1), permanent magnet (2), magnetic conduction sheet (3) and silicon substrate coil (4),
Wherein yoke (1) is located at the bottommost of the structure, and permanent magnet (2) is fixed on yoke (1), magnetic conduction sheet (3) is fixed in permanent magnetism
Body (2) upper surface.It is permanent magnetism air gap (5) that silicon substrate coil is located at permanent magnetism air gap (5) inside between yoke (1) and magnetic conduction sheet (3),
When permanent magnet moment-meter works, silicon substrate coil (4) is fixed on accelerometer pendulum (7) by coil cushion block (6).
2. accelerometer permanent magnet moment-meter according to claim 1, wherein coil cushion block is the list with flexible structure
Crystal silicon cushion block.
3. accelerometer permanent magnet moment-meter according to claim 2, wherein the flexible structure is that rigidity of middle is small, two
The support construction for holding rigidity big.
4. accelerometer permanent magnet moment-meter according to claim 1, wherein silicon substrate coil (4), coil cushion block (6) and add
Fixed form between speedometer pendulum (7) is bonding or glass sintering.
5. accelerometer permanent magnet moment-meter according to claim 1, wherein the coil is the spiral knot of multiple-level stack
Structure, each layer of the hand of spiral are opposite.
6. accelerometer permanent magnet moment-meter according to claim 1, wherein gold is filled in the gap (10) of silicon substrate coil (4)
Belong to.
7. accelerometer permanent magnet moment-meter according to claim 1, wherein the surface plating of silicon substrate coil (4) is formed with metal
Coating carries out metal eutectic fusion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810818839.4A CN109164273B (en) | 2018-07-24 | 2018-07-24 | Permanent magnetic torquer for accelerometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810818839.4A CN109164273B (en) | 2018-07-24 | 2018-07-24 | Permanent magnetic torquer for accelerometer |
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| CN109164273A true CN109164273A (en) | 2019-01-08 |
| CN109164273B CN109164273B (en) | 2021-04-20 |
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| CN201810818839.4A Active CN109164273B (en) | 2018-07-24 | 2018-07-24 | Permanent magnetic torquer for accelerometer |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110829777A (en) * | 2019-10-18 | 2020-02-21 | 中国航空工业集团公司西安飞行自动控制研究所 | Miniature permanent magnetic torquer with high air gap magnetic field intensity |
| CN112131772A (en) * | 2020-09-29 | 2020-12-25 | 哈尔滨工业大学 | Simulation method of non-magnetic conductive layer applied to static characteristic simulation of magnetic latching relay |
| CN112180121A (en) * | 2020-09-11 | 2021-01-05 | 中国船舶重工集团公司第七0七研究所 | Method for bonding pendulum component of high-stability quartz flexible accelerometer |
| CN112540193A (en) * | 2020-12-25 | 2021-03-23 | 中国电子科技集团公司第二十六研究所 | Quartz flexible acceleration detection mass pendulum capable of isolating interference torque and processing method |
| CN113252944A (en) * | 2021-07-14 | 2021-08-13 | 中国工程物理研究院电子工程研究所 | Quartz flexible accelerometer based on micro torquer and manufacturing method thereof |
| CN113640545A (en) * | 2021-07-13 | 2021-11-12 | 西安航天精密机电研究所 | Equivalent adjustable accelerometer and internal fault rapid positioning method thereof |
| CN113640544A (en) * | 2021-07-13 | 2021-11-12 | 西安航天精密机电研究所 | Moving coil switchable accelerometer and switching method of logic gate switch thereof |
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| JPH0228563A (en) * | 1988-07-19 | 1990-01-30 | Ricoh Co Ltd | Vibration sensor |
| US5191794A (en) * | 1990-12-24 | 1993-03-09 | Litton Systems, Inc. | Integrated accelerometer with resilient limit stops |
| CN101592678A (en) * | 2009-07-03 | 2009-12-02 | 北京航天控制仪器研究所 | A kind of flexible pendulous accelerometer |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110829777A (en) * | 2019-10-18 | 2020-02-21 | 中国航空工业集团公司西安飞行自动控制研究所 | Miniature permanent magnetic torquer with high air gap magnetic field intensity |
| CN110829777B (en) * | 2019-10-18 | 2021-09-14 | 中国航空工业集团公司西安飞行自动控制研究所 | Miniature permanent magnetic torquer with high air gap magnetic field intensity |
| CN112180121A (en) * | 2020-09-11 | 2021-01-05 | 中国船舶重工集团公司第七0七研究所 | Method for bonding pendulum component of high-stability quartz flexible accelerometer |
| CN112131772A (en) * | 2020-09-29 | 2020-12-25 | 哈尔滨工业大学 | Simulation method of non-magnetic conductive layer applied to static characteristic simulation of magnetic latching relay |
| CN112131772B (en) * | 2020-09-29 | 2022-05-10 | 哈尔滨工业大学 | Simulation method of non-magnetic conductive layer applied to static characteristic simulation of magnetic latching relay |
| CN112540193A (en) * | 2020-12-25 | 2021-03-23 | 中国电子科技集团公司第二十六研究所 | Quartz flexible acceleration detection mass pendulum capable of isolating interference torque and processing method |
| CN112540193B (en) * | 2020-12-25 | 2023-04-28 | 中国电子科技集团公司第二十六研究所 | Quartz flexible acceleration detection mass pendulum for isolating disturbance moment and processing method |
| CN113640545A (en) * | 2021-07-13 | 2021-11-12 | 西安航天精密机电研究所 | Equivalent adjustable accelerometer and internal fault rapid positioning method thereof |
| CN113640544A (en) * | 2021-07-13 | 2021-11-12 | 西安航天精密机电研究所 | Moving coil switchable accelerometer and switching method of logic gate switch thereof |
| CN113640544B (en) * | 2021-07-13 | 2023-07-18 | 西安航天精密机电研究所 | Moving-coil switchable accelerometer and switching method of logic gate switch thereof |
| CN113640545B (en) * | 2021-07-13 | 2023-07-18 | 西安航天精密机电研究所 | Equivalent adjustable accelerometer and internal fault quick positioning method thereof |
| CN113252944A (en) * | 2021-07-14 | 2021-08-13 | 中国工程物理研究院电子工程研究所 | Quartz flexible accelerometer based on micro torquer and manufacturing method thereof |
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| CN109164273B (en) | 2021-04-20 |
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