CN109085384A - A kind of high stability quartz flexible accelerometer using Novel swing modular construction - Google Patents
A kind of high stability quartz flexible accelerometer using Novel swing modular construction Download PDFInfo
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- CN109085384A CN109085384A CN201811267887.5A CN201811267887A CN109085384A CN 109085384 A CN109085384 A CN 109085384A CN 201811267887 A CN201811267887 A CN 201811267887A CN 109085384 A CN109085384 A CN 109085384A
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- pendulum
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- isolation ring
- coil rack
- modular construction
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
- G01P15/132—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electromagnetic counterbalancing means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
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Abstract
The present invention relates to a kind of high stability quartz flexible accelerometers using Novel swing modular construction, Novel swing modular construction, including pendulum, torquer coil, coil rack and isolation ring, torquer coil, coil rack and isolation ring are two setting up and down, the upper and lower surfaces of pendulum are co-axially mounted an isolation ring respectively, there is through-hole at isolation ring center, and the through-hole is corresponding with the central through hole position of pendulum；Each isolation ring coaxially connected one is wound with the coil rack of torquer coil thereon, which has axial gap with pendulum.The present invention is by existing quartz flexible accelerometer structure basis, improve pendulum modular construction, respectively increase an isolation ring between coil rack and pendulum at two, so that coil rack is not direct cementing with pendulum, but it is cementing by isolation ring and the two, to reduce coil rack thermal stress bring pendulum problem on deformation, accelerometer bias variation with temperature is reduced, maintains accelerometer output with the stability of temperature.
Description
Technical field
The present invention relates to sensor technical field, especially a kind of quartz that bias high stability is kept in temperature change
Flexure accelerometers are a kind of acceleration analysis elements suitable for high-precision, high stability inertial navigation system.
Background technique
Quartz flexible accelerometer is a kind of sensor of differential capacitance type closed-loop high-precision, Si Tan gloomy by the U.S. earliest
Company succeeds in developing in nineteen seventies, and specific structure has a detailed description in United States Patent (USP) (patent No. 4250757), it
Watch core structure it is as shown in Figure 1 and Figure 2, be current domestic inertial navigation measurement and structure that guidance system generally uses be most simple
High-precision accelerometer.
Quartz accelerometer core sensing element is pendulum component, is twined respectively by a quartz pendulous reed and two torquer coils
It is wound on respective torquer coil rack and constitutes.Two coil racks are symmetrically adhered to following table on quartz pendulous reed by bonding agent
Face.The pendulum tongue upper and lower surface plating golden film of pendulum forms capacitor plate, forms a pair of of capacitor with upper lower magnetic guiding loop surface.
Quartz flexible accelerometer working principle are as follows: when product has along the acceleration effect of sensitive axis direction, due to not having
There is bonding force effect, pendulum keeps original motion state, therefore relatively upper and lower torquer generates displacement, makes two sides capacity plate antenna
Form capacitance difference.Differential capacitance sensor sensitivity generates an electric current proportional to capacitance difference to capacitance difference.Electric current is through servo
On torquer coil, current-carrying torquer coil is produced by the effect of torquer magnetic for load after the processing such as circuit filtering, integral, amplification
A raw electromagnetic force F identical with input acceleration direction, makes flexible pendulum be returned to equilbrium position (two lateral capacitances are equal).This
When torquer coil in torque current reflect the size and Orientation of acceleration, the electric current detected on torquer coil can calculate
Input acceleration realizes the measurement of acceleration.Electricity when product does not have acceleration effect along sensitive axis direction, on torquer coil
Stream reflects bias size.
It calculates and surveys by capacitance detecting principle, the variation of accelerometer bias is mainly drawn by the deformation of upper and lower capacitor plate
Capacitive differential variation is played to generate.
The pendulum component main limitation of the prior art exists:
Quartz pendulous reed is that the fused silica glass of high-quality is process through excessive sequence, and thermal expansion coefficient is 5.4 × 10-7/ DEG C, it is limited to processing technology and cost, the current common material of coil rack is 2A12 aluminium alloy, thermal expansion coefficient is 22 ×
10-6/ DEG C, nearly two orders of magnitude of two kinds of part material coefficient of thermal expansion differences being closely contacted with each other.Part high-precision accelerometer
Coil rack uses material and the higher aluminium oxide ceramics of processing cost, and thermal expansion coefficient is (5~7) × 10-6/ DEG C, two kinds
Part material thermal expansion coefficient also poor an order of magnitude.When leading to temperature change, relative displacement can occur for pendulum and coil rack
Trend causes the generation of pendulum components interior stress, and then generates tensile stress (or compression) on pendulum and coil rack, so that
Pendulum capacitance pole plate face and coil generate distortion or distort the unstable of torque, and capacitive differential or torque current is caused to change, from
And bias is caused to change and drift about, and then influence the temperature stability of accelerometer output.
Summary of the invention
In place of making up the deficiencies in the prior art, provides one kind and be able to maintain in temperature change
The quartz flexible accelerometer of bias high stability.
The purpose of the present invention is what is realized by following technological means:
A kind of high stability quartz flexible accelerometer using Novel swing modular construction, including upper lower magnetic guiding loop component,
Pendulum component and connection ring, upper lower magnetic guiding loop component are made of permanent magnet, magnetic conduction cap and magnetic guiding loop, and upper lower magnetic guiding loop component is equal
For cylinder-shaped cylinder, coaxial mirror image installation, together by connection ring laser seal welding, pendulum component is fixedly mounted with therebetween, special
Sign is: pendulum component includes pendulum, torquer coil, coil rack and isolation ring, and torquer coil, coil rack and isolation ring are
Setting up and down two, the upper and lower surfaces of pendulum are co-axially mounted an isolation ring respectively, and there is through-hole at isolation ring center, should
Through-hole is corresponding with the central through hole position of pendulum；Each isolation ring coaxially connected one is wound with the line of torquer coil thereon
Ring framework, two coil racks have axial gap with pendulum.
Moreover, the coil rack inner periphery and isolation ring outer cylinder surface are connected in one by the way that radial direction is cementing
It rises, isolation ring is fixed together with pendulum by axial cementation method, and coil rack is isolated with pendulum holding.
Moreover, the isolation ring material thermal expansion coefficient is less than the thermal expansion coefficient of coil rack material, with quartzy glass
The thermal expansion coefficient of glass is close or identical.
The advantages and positive effects of the present invention are:
1, the pendulum component in the present invention is identical as the pendulum part dimension and functional parameter of original structure, can meet quartz flexible
The demand of accelerometer.
2, quartz flexible accelerometer designed by the present invention, pendulum modular construction design is reasonable, assembly easy to implement.This hair
Bright is by existing quartz flexible accelerometer structure basis, improving pendulum modular construction: in two coil racks and pendulum
Between respectively increase an isolation ring so that coil rack is not direct cementing with pendulum, but cementing by isolation ring and the two.
3, structure of the invention can reduce coil rack thermal stress bring pendulum problem on deformation.When temperature change, pendulum
Relatively original small one to two orders of magnitude of deformation, reduce accelerometer bias variation with temperature, improve accelerometer output with temperature
The stability of degree meets the needs of systems such as high-precision, high stability inertial navigation are to accelerometer.
4, after using the inventive structure, more original traditional structure accelerometer, bias temperature coefficient reduces a quantity
Grade, can be improved accelerometer output stability.
Detailed description of the invention
Fig. 1 is conventional quartz flexure accelerometers three-dimensional explosive view；
Fig. 2 is the pendulum component two dimension axis cross-sectional view of conventional quartz flexure accelerometers；
Fig. 3 is the pendulum front plan view of conventional quartz flexure accelerometers；
Fig. 4 is the two-dimentional axis cross-sectional view of Novel quartz flexure accelerometers proposed by the present invention；
Fig. 5 is the pendulum component two dimension axis cross-sectional view of Novel quartz flexure accelerometers proposed by the present invention.
In figure: 10. magnetic conduction ring components；11. magnetic guiding loop；12. permanent magnet；13. magnetic conduction cap；20. putting component；21. quartz pendulum
Piece；22. torquer coil；23. coil rack；24. isolation ring；25. radial cementing；26. axial cementing；30. connection ring；31. glue
Knot or welding.
Specific embodiment
With reference to the accompanying drawing in detail narration the embodiment of the present invention, it should be noted that the present embodiment be it is narrative, no
It is restrictive, this does not limit the scope of protection of the present invention.
In place of reformed AHP to facilitate the understanding of the present invention, Fig. 1-Fig. 3 is combined to scratch existing conventional quartz first herein
The structure of property accelerometer is introduced, and particular content is as follows:
Fig. 1 is conventional quartz flexure accelerometers three-dimensional explosive view.It includes upper and lower magnetic conduction ring component 10, pendulum component
20 and connection ring 30.Magnetic guiding loop 11, permanent magnet 12, magnetic conduction cap 13 form magnetic conduction ring component 10.Magnetic conduction ring component 10 uses in pairs
Coaxial mirror image installation, it is cementing by connection ring 30 or welding 31 links together, pendulum portion is fixedly mounted between two magnetic conduction ring components 10
Part 20.
Fig. 2 is the two-dimentional axis cross-sectional view of conventional quartz flexure accelerometers pendulum component 20.It includes pendulum 21, upper and lower torque
Coil 22 and upper and lower coil rack 23.Upper and lower torquer coil 22 and upper and lower coil rack 23 are installed using coaxial mirror image in pairs, are led to
Cementing 26 are crossed to link together with pendulum 21.
Fig. 3 is 21 equal axes axonometric drawing of pendulum of conventional quartz flexure accelerometers.Tongue 211 is put to connect by two flexible beams 212
It is connected in outer mounting ring 213, positive and negative each three boss 214 are arranged in outer mounting ring 213, form axial direction with upper 11 surface of lower magnetic guiding loop
Capacitance gap.It puts 211 upper and lower surfaces plating golden film 215 of tongue and forms capacitor plate, form a pair of of electricity with upper 11 surface of lower magnetic guiding loop
Hold.
Below with reference to Fig. 4 and Fig. 5, quartz flexible accelerometer of the present invention and its pendulum component are made into one by specific implementation
Step is described in detail:
Fig. 4 is that the two-dimentional axis of quartz flexible accelerometer of the present invention cuts open figure.As shown, a kind of high stability quartz flexible
Accelerometer, including upper lower magnetic guiding loop component 10, pendulum component 20 and connection ring 30, upper lower magnetic guiding loop component is by permanent magnet
12, magnetic conduction cap 13 and magnetic guiding loop 11 form, and upper lower magnetic guiding loop component is cylinder-shaped cylinder, and coaxial mirror image installation passes through connection
Together, pendulum component is fixedly mounted with therebetween ring laser seal welding.Novel swing component as shown in Figure 5 is installed in this accelerometer.
Fig. 5 is that the two-dimentional axis of the pendulum component 20 of quartz flexible accelerometer of the present invention cuts open figure.As shown, a kind of Novel swing
Modular construction, including quartz pendulous reed 21, torquer coil 22, coil rack 23 and isolation ring 24, torquer coil, coil rack and every
It is used in pairs from ring, coaxial mirror image installation, pendulum is disposed there between.The upper and lower surfaces of pendulum are co-axially mounted one respectively
A isolation ring (isolation ring and pendulum are fixed together by axial cementing 26 mode), there is through-hole at isolation ring center, the through-hole with
The central through hole position of pendulum is corresponding；Each isolation ring coaxially connected one is wound with the coil rack of torquer coil thereon
(coil rack inner periphery and isolation ring outer cylinder surface are fixed together by radial cementing 25), two coil racks
There is with pendulum axial gap (coil rack is isolated with pendulum holding), the two axial gap is guaranteed by assembly tooling.
Coil rack is isolated with pendulum holding in the present invention, and cementing by isolation ring and the two, isolation ring can reduce
The deformation of coil rack thermal stress bring pendulum.In addition, the heat that isolation ring material thermal expansion coefficient is less than coil rack material is swollen
Swollen coefficient, it is close or identical with the thermal expansion coefficient of quartz glass, while elasticity modulus is larger, can reduce coil rack heat and answer
The deformation that power generates.
Using foregoing invention structure, can reduce accelerometer bias variation with temperature, improve accelerometer output with
The stability of temperature.
It although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
Understand and a variety of variations, modification, replacement are carried out to these embodiments without departing from the principles and spirit of the present invention and become
Type, such as coil rack of the present invention and pendulum isolation method, those skilled in the art according to the present invention can inspire,
To designing multiple isolation structures, therefore, the scope of the present invention is by appended claims and its equivalent limits.
Claims (3)
1. a kind of high stability quartz flexible accelerometer using Novel swing modular construction, including upper lower magnetic guiding loop component, pendulum
Component and connection ring, upper lower magnetic guiding loop component are made of permanent magnet, magnetic conduction cap and magnetic guiding loop, and upper lower magnetic guiding loop component is
Cylinder-shaped cylinder, coaxial mirror image installation, together by connection ring laser seal welding, pendulum component is fixedly mounted with therebetween, feature
Be: pendulum component includes pendulum, torquer coil, coil rack and isolation ring, on torquer coil, coil rack and isolation ring be
Two of lower setting, the upper and lower surfaces of pendulum are co-axially mounted an isolation ring respectively, and there is through-hole at isolation ring center, this is logical
Hole is corresponding with the central through hole position of pendulum；Each isolation ring coaxially connected one is wound with the coil of torquer coil thereon
Skeleton, two coil racks have axial gap with pendulum.
2. a kind of high stability quartz flexible accelerometer using Novel swing modular construction according to claim 1,
Be characterized in that: the coil rack inner periphery is fixed together with isolation ring outer cylinder surface by the way that radial direction is cementing, every
It is fixed together with pendulum by axial cementation method from ring, coil rack is isolated with pendulum holding.
3. a kind of high stability quartz flexible accelerometer using Novel swing modular construction according to claim 1,
Be characterized in that: the isolation ring material thermal expansion coefficient is less than the thermal expansion coefficient of coil rack material, with quartz glass
Thermal expansion coefficient is close or identical.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811267887.5A CN109085384B (en) | 2018-10-29 | 2018-10-29 | High-stability quartz flexible accelerometer adopting novel pendulum component structure |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811267887.5A CN109085384B (en) | 2018-10-29 | 2018-10-29 | High-stability quartz flexible accelerometer adopting novel pendulum component structure |
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| CN109085384A true CN109085384A (en) | 2018-12-25 |
| CN109085384B CN109085384B (en) | 2020-12-15 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110068317A (en) * | 2019-05-17 | 2019-07-30 | 中国船舶重工集团公司第七0七研究所 | A kind of quartz flexible pendulum with position limitation protection structure |
| CN112180121A (en) * | 2020-09-11 | 2021-01-05 | 中国船舶重工集团公司第七0七研究所 | Method for bonding pendulum component of high-stability quartz flexible accelerometer |
| CN113219206A (en) * | 2021-04-14 | 2021-08-06 | 西安航天精密机电研究所 | Graphene accelerometer |
| CN113252944A (en) * | 2021-07-14 | 2021-08-13 | 中国工程物理研究院电子工程研究所 | Quartz flexible accelerometer based on micro torquer and manufacturing method thereof |
| CN114646773A (en) * | 2020-12-18 | 2022-06-21 | 航天科工惯性技术有限公司 | Torque device coil framework and connection method of torque device coil framework and central pendulum |
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| CN202720240U (en) * | 2012-07-13 | 2013-02-06 | 湖北三江航天红峰控制有限公司 | A quartz flexible accelerometer with a novel structure |
| CN203455365U (en) * | 2013-09-09 | 2014-02-26 | 湖北三江航天红峰控制有限公司 | Impact-resistant quartz flexible accelerometer |
| CN204789622U (en) * | 2015-08-17 | 2015-11-18 | 中国电子科技集团公司第二十六研究所 | Anti high watch core structure of strikeing quartzy flexure accelerometer |
| US20160011227A1 (en) * | 2012-10-19 | 2016-01-14 | Honeywell International Inc. | Stress reduction components for sensors |
| CN107703329A (en) * | 2017-09-29 | 2018-02-16 | 中国船舶重工集团公司第七0七研究所 | Vacuum holding structure for high-resolution quartz flexible accelerometer |
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| CN202720240U (en) * | 2012-07-13 | 2013-02-06 | 湖北三江航天红峰控制有限公司 | A quartz flexible accelerometer with a novel structure |
| US20160011227A1 (en) * | 2012-10-19 | 2016-01-14 | Honeywell International Inc. | Stress reduction components for sensors |
| CN203455365U (en) * | 2013-09-09 | 2014-02-26 | 湖北三江航天红峰控制有限公司 | Impact-resistant quartz flexible accelerometer |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110068317A (en) * | 2019-05-17 | 2019-07-30 | 中国船舶重工集团公司第七0七研究所 | A kind of quartz flexible pendulum with position limitation protection structure |
| CN112180121A (en) * | 2020-09-11 | 2021-01-05 | 中国船舶重工集团公司第七0七研究所 | Method for bonding pendulum component of high-stability quartz flexible accelerometer |
| CN114646773A (en) * | 2020-12-18 | 2022-06-21 | 航天科工惯性技术有限公司 | Torque device coil framework and connection method of torque device coil framework and central pendulum |
| CN113219206A (en) * | 2021-04-14 | 2021-08-06 | 西安航天精密机电研究所 | Graphene accelerometer |
| CN113219206B (en) * | 2021-04-14 | 2022-12-16 | 西安航天精密机电研究所 | Graphene accelerometer |
| CN113252944A (en) * | 2021-07-14 | 2021-08-13 | 中国工程物理研究院电子工程研究所 | Quartz flexible accelerometer based on micro torquer and manufacturing method thereof |
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| CN109085384B (en) | 2020-12-15 |
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