CN109085384B - High-stability quartz flexible accelerometer adopting novel pendulum component structure - Google Patents

High-stability quartz flexible accelerometer adopting novel pendulum component structure Download PDF

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Publication number
CN109085384B
CN109085384B CN201811267887.5A CN201811267887A CN109085384B CN 109085384 B CN109085384 B CN 109085384B CN 201811267887 A CN201811267887 A CN 201811267887A CN 109085384 B CN109085384 B CN 109085384B
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coil
pendulum
ring
accelerometer
coil framework
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CN109085384A (en
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聂鲁燕
王鹏辉
李立勇
刘宝凤
高岩
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707th Research Institute of CSIC
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707th Research Institute of CSIC
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/132—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electromagnetic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up

Abstract

The invention relates to a high-stability quartz flexible accelerometer adopting a novel pendulum component structure, which comprises a pendulum piece, a torque coil, a coil framework and isolating rings, wherein the torque coil, the coil framework and the isolating rings are arranged up and down; each isolating ring is coaxially connected with a coil framework which is wound with a torque coil, and the two coil frameworks have axial gaps with the swinging piece. The invention improves the structure of the pendulum part on the basis of the structure of the existing quartz flexible accelerometer, and adds a separation ring between two coil frameworks and the pendulum piece respectively, so that the coil frameworks are not directly cemented with the pendulum piece, but are cemented with the pendulum piece through the separation ring, thereby reducing the problem of the deformation of the pendulum piece caused by the thermal stress of the coil frameworks, reducing the change of the offset value of the accelerometer along with the temperature, and keeping the stability of the output of the accelerometer along with the temperature.

Description

High-stability quartz flexible accelerometer adopting novel pendulum component structure
Technical Field
The invention relates to the technical field of sensors, in particular to a quartz flexible accelerometer capable of keeping high bias value and high stability during temperature change, which is an acceleration measuring element suitable for an inertial navigation system with high precision and high stability.
Background
The quartz flexible accelerometer is a differential capacitance type closed-loop high-precision sensor, which was originally developed by the stan company of the united states of america in the seventies of the twentieth century, and the specific structure is described in detail in the united states patent (patent number 4250757), and the watch core structure of the quartz flexible accelerometer is shown in fig. 1 and fig. 2, and is the simplest high-precision accelerometer with the structure commonly used in the inertial navigation measurement and guidance system in China at present.
The quartz accelerometer core sensitive element is a pendulum component and is formed by respectively winding a quartz pendulum piece and two torquer coils on respective torquer coil frameworks. The two coil frameworks are symmetrically adhered to the upper surface and the lower surface of the quartz pendulous reed through adhesives. The upper and lower surfaces of the swing tongue of the swing sheet are plated with gold films to form capacitor plates, and a pair of capacitors are formed on the capacitor plates and the surfaces of the upper and lower magnetic conduction rings.
The working principle of the quartz flexible accelerometer is as follows: when the product has acceleration along the sensitive axis direction, the swinging sheet keeps the original motion state because of no external force action, so that the upper and lower moment devices generate displacement relatively, and the capacitance difference is formed by the flat capacitors at the two sides. Differential capacitive sensors are sensitive to a capacitance difference and produce a current proportional to the capacitance difference. The current is loaded on the torque coil after being filtered, integrated, amplified and the like by the servo circuit, and the current-carrying torque coil generates an electromagnetic force F with the same direction as the input acceleration under the action of the magnetic field of the torquer, so that the flexible pendulous reed returns to the balance position (the capacitances at the two sides are equal). At the moment, the moment current in the moment coil reflects the magnitude and the direction of the acceleration, and the input acceleration can be calculated by detecting the current on the moment coil, so that the measurement of the acceleration is realized. When the product has no acceleration along the sensitive axis, the current on the moment coil reflects the magnitude of the deviation.
Through calculation and actual measurement of a capacitance detection principle, the bias value change of the accelerometer is mainly generated by the change of a capacitance difference value caused by the deformation of an upper capacitor plate and a lower capacitor plate.
The prior art pendulum members are mainly limited in that:
the quartz pendulous reed is made of high-quality fused quartz glass through multi-step processing, and the coefficient of thermal expansion of the quartz pendulous reed is 5.4 multiplied by 10-7The temperature is limited by the processing technology and the cost, the coil framework is usually made of 2A12 aluminum alloy at present, and the thermal expansion coefficient is 22 multiplied by 10-6The difference in thermal expansion coefficients of two parts materials in close contact with each other is approximately two orders of magnitude. Part of high-precision accelerometer coil frame is made of alumina ceramic with higher material and processing cost, and the thermal expansion coefficient of the alumina ceramic is (5-7) multiplied by 10-6The thermal expansion coefficients of the two part materials are also different by an order of magnitude per DEG C. When the temperature changes, the pendulum piece and the coil framework can generate relative displacement trend to cause the generation of internal stress of the pendulum component, and further tensile stress (or compressive stress) is generated on the pendulum piece and the coil framework, so that the pendulum piece capacitor plate surface and the coil generate distortion or instability of distortion torque to cause capacitance difference or torque current change, and further cause bias value changeAnd drift, which in turn affects the temperature stability of the accelerometer output.
Disclosure of Invention
The invention aims to make up for the defects of the prior art and provides a quartz flexible accelerometer capable of keeping high off-value stability during temperature change.
The purpose of the invention is realized by the following technical means:
the utility model provides an adopt quartzy flexible accelerometer of high stability of novel pendulum part structure, includes upper and lower magnetic conduction ring part, pendulum part and go-between, upper and lower magnetic conduction ring part comprises permanent magnet, magnetic conduction cap and magnetic conduction ring, and upper and lower magnetic conduction ring part is the cylinder, and coaxial mirror image installation is in the same place through go-between laser seal welding, and the pendulum part is adorned between it, its characterized in that admittedly: the pendulum part comprises a pendulum piece, a moment coil, a coil framework and two isolating rings, wherein the moment coil, the coil framework and the isolating rings are arranged up and down; each isolating ring is coaxially connected with a coil framework which is wound with a torque coil, and the two coil frameworks have axial gaps with the swinging piece.
And the inner cylindrical surface of the coil framework is fixedly connected with the outer cylindrical surface of the isolating ring through radial cementation, the isolating ring is fixedly connected with the swinging sheet through axial cementation, and the coil framework is isolated from the swinging sheet.
Moreover, the thermal expansion coefficient of the isolating ring material is smaller than that of the coil framework material and is close to or the same as that of the quartz glass.
The invention has the advantages and positive effects that:
1. the pendulum component in the invention has the same size and functional parameters as those of the pendulum component with the original structure, and can meet the requirements of the quartz flexible accelerometer.
2. The pendulum part of the quartz flexible accelerometer has reasonable structural design and is easy to implement and assemble. The invention improves the structure of the pendulum part on the basis of the structure of the existing quartz flexible accelerometer: and a spacer ring is respectively added between the two coil frameworks and the swinging sheet, so that the coil frameworks are not directly glued with the swinging sheet, but are glued with the two through the spacer rings.
3. The structure of the invention can reduce the problem of the deformation of the swinging sheet caused by the thermal stress of the coil framework. When the temperature changes, the swing sheet deformation is one to two orders of magnitude smaller than the original deformation, the change of the offset value of the accelerometer along with the temperature is reduced, the stability of the output of the accelerometer along with the temperature is improved, and the requirements of systems such as high-precision and high-stability inertial navigation and the like on the accelerometer are met.
4. After the structure is adopted, compared with the accelerometer with the original traditional structure, the offset temperature coefficient is reduced by one order of magnitude, and the output stability of the accelerometer can be improved.
Drawings
FIG. 1 is a three-dimensional exploded view of a conventional quartz flexure accelerometer;
FIG. 2 is a two-dimensional axial cross-sectional view of a pendulum member of a conventional quartz flexure accelerometer;
FIG. 3 is a front plan view of a pendulous reed of a conventional quartz flexure accelerometer;
FIG. 4 is a two-dimensional axial cross-sectional view of a novel quartz flexure accelerometer of the present invention;
fig. 5 is a two-dimensional axial section view of a pendulum component of the novel quartz flexible accelerometer provided by the invention.
In the figure: 10. a magnetically conductive ring member; 11. a magnetic conductive ring; 12. a permanent magnet; 13. a magnetic conducting cap; 20. a pendulum member; 21. a quartz pendulous reed; 22. a torque coil; 23. a coil bobbin; 24. an isolating ring; 25. radially cementing; 26. cementing in the axial direction; 30. a connecting ring; 31. gluing or welding.
Detailed Description
The following detailed description of the embodiments of the present invention is provided in conjunction with the accompanying drawings, which are intended to be illustrative, not limiting, and not limiting.
In order to facilitate understanding of the innovative features of the present invention, the structure of the conventional quartz flexible accelerometer will be described first with reference to fig. 1 to 3, and the following details are provided:
fig. 1 is a three-dimensional exploded view of a conventional quartz flexure accelerometer. It comprises an upper magnetic conductive ring component 10, a lower magnetic conductive ring component 10, a pendulum component 20 and a connecting ring 30. The magnetic conductive ring 11, the permanent magnet 12 and the magnetic conductive cap 13 form a magnetic conductive ring part 10. The magnetic conductive ring parts 10 are installed in pairs by using coaxial mirror images and are connected together through gluing or welding 31 of a connecting ring 30, and the pendulum part 20 is fixedly installed between the two magnetic conductive ring parts 10.
Figure 2 is a two-dimensional axial cross-sectional view of a conventional quartz flexure accelerometer pendulum member 20. It comprises a swing sheet 21, an upper moment coil 22, a lower moment coil 22 and an upper coil framework 23. The upper and lower torque coils 22 and the upper and lower bobbin 23 are mounted in pairs using coaxial mirror images and are connected to the pendulum mass 21 by gluing 26.
Figure 3 is an isometric view of a pendulum mass 21 of a conventional quartz flexure accelerometer. The swing tongue 211 is connected to an outer mounting ring 213 through two flexible beams 212, and the outer mounting ring 213 is provided with three bosses 214 on the front and back sides to form an axial capacitance gap with the surfaces of the upper and lower magnetic conductive rings 11. The upper and lower surfaces of the swing tongue 211 are plated with gold films 215 to form capacitor plates, and a pair of capacitors are formed on the surfaces of the upper and lower magnetic conductive rings 11.
The quartz flexure accelerometer and its pendulum part of the present invention will be further described in detail by the specific implementation with reference to fig. 4 and 5:
figure 4 is a two-dimensional cross-sectional axial view of a quartz flexure accelerometer of the present invention. As shown in the figure, the high-stability quartz flexible accelerometer comprises an upper magnetic conduction ring part and a lower magnetic conduction ring part 10, a pendulum part 20 and a connecting ring 30, wherein the upper magnetic conduction ring part and the lower magnetic conduction ring part are respectively composed of a permanent magnet 12, a magnetic conduction cap 13 and a magnetic conduction ring 11, the upper magnetic conduction ring part and the lower magnetic conduction ring part are respectively cylindrical columns, are coaxially installed in a mirror image mode, are welded together in a laser sealing mode through the connecting ring. The accelerometer is provided with a novel pendulum component as shown in figure 5.
Figure 5 is a two-dimensional cross-sectional axial view of the pendulum member 20 of the quartz flexure accelerometer of the present invention. As shown in the figure, the novel pendulum part structure comprises a quartz pendulum piece 21, a torque coil 22, a coil skeleton 23 and an isolating ring 24, wherein the torque coil, the coil skeleton and the isolating ring are used in pairs and are coaxially installed in a mirror image mode, and the pendulum piece is arranged between the two. The upper surface and the lower surface of the swinging piece are respectively and coaxially provided with a spacer ring (the spacer ring is fixedly connected with the swinging piece in an axial gluing way 26), the center of the spacer ring is provided with a through hole, and the through hole corresponds to the central through hole of the swinging piece; every spacer ring is equal coaxial coupling one and is twined the coil skeleton that has moment coil on it (the cylindrical surface in the coil skeleton links firmly together through radial cementation 25 with the outer cylindrical surface of spacer ring), and these two coil skeletons all have axial clearance (coil skeleton keeps keeping isolation with the pendulum piece) with the pendulum piece, guarantee both axial clearance through assembly fixture.
The coil framework and the swinging sheet are kept isolated, and the isolating ring is cemented with the coil framework and the swinging sheet, so that the deformation of the swinging sheet caused by the thermal stress of the coil framework can be reduced by the isolating ring. In addition, the thermal expansion coefficient of the isolation ring material is smaller than that of the coil framework material, is close to or the same as that of quartz glass, and meanwhile, the elastic modulus is larger, so that deformation generated by thermal stress of the coil framework can be reduced.
By adopting the structure, the change of the bias value of the accelerometer along with the temperature can be reduced, and the stability of the output of the accelerometer along with the temperature is improved.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, such as the bobbin and wobble plate isolation approach described in the present application, and it will be appreciated that many isolation structures can be devised by those skilled in the art based on the teachings of the present invention and that the scope of the invention is therefore defined in the appended claims and their equivalents.

Claims (3)

1. The utility model provides an adopt quartzy flexible accelerometer of high stability of novel pendulum part structure, includes upper and lower magnetic conduction ring part, pendulum part and go-between, upper and lower magnetic conduction ring part comprises permanent magnet, magnetic conduction cap and magnetic conduction ring, and upper and lower magnetic conduction ring part is the cylinder, and coaxial mirror image installation is in the same place through go-between laser seal welding, and the pendulum part is adorned between it, its characterized in that admittedly: the pendulum part comprises a pendulum piece, a moment coil, a coil framework and two isolating rings, wherein the moment coil, the coil framework and the isolating rings are arranged up and down; each isolating ring is coaxially connected with a coil framework which is wound with a torque coil, and the two coil frameworks have axial gaps with the swinging piece.
2. The high stability quartz flexure accelerometer of claim 1, adopting a novel pendulum member structure, wherein: the coil framework is characterized in that the inner cylindrical surface of the coil framework is fixedly connected with the outer cylindrical surface of the isolating ring through radial cementation, the isolating ring is fixedly connected with the swinging sheet through axial cementation, and the coil framework is isolated from the swinging sheet.
3. The high stability quartz flexure accelerometer of claim 1, adopting a novel pendulum member structure, wherein: the thermal expansion coefficient of the isolation ring material is smaller than that of the coil framework material and is close to or the same as that of the quartz glass.
CN201811267887.5A 2018-10-29 2018-10-29 High-stability quartz flexible accelerometer adopting novel pendulum component structure Active CN109085384B (en)

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CN110068317A (en) * 2019-05-17 2019-07-30 中国船舶重工集团公司第七0七研究所 A kind of quartz flexible pendulum with position limitation protection structure
CN112180121A (en) * 2020-09-11 2021-01-05 中国船舶重工集团公司第七0七研究所 Method for bonding pendulum component of high-stability quartz flexible accelerometer
CN114646773A (en) * 2020-12-18 2022-06-21 航天科工惯性技术有限公司 Torque device coil framework and connection method of torque device coil framework and central pendulum
CN113219206B (en) * 2021-04-14 2022-12-16 西安航天精密机电研究所 Graphene accelerometer
CN113252944B (en) * 2021-07-14 2021-09-17 中国工程物理研究院电子工程研究所 Quartz flexible accelerometer based on micro torquer and manufacturing method thereof

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CN202720240U (en) * 2012-07-13 2013-02-06 湖北三江航天红峰控制有限公司 A quartz flexible accelerometer with a novel structure
US9164117B2 (en) * 2012-10-19 2015-10-20 Honeywell International Inc. Stress reduction components for sensors
CN203455365U (en) * 2013-09-09 2014-02-26 湖北三江航天红峰控制有限公司 Impact-resistant quartz flexible accelerometer
CN204789622U (en) * 2015-08-17 2015-11-18 中国电子科技集团公司第二十六研究所 Anti high watch core structure of strikeing quartzy flexure accelerometer
CN107703329B (en) * 2017-09-29 2019-11-26 中国船舶重工集团公司第七0七研究所 Vacuum for high-resolution quartz flexible accelerometer keeps structure

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