CN109161862A - A kind of device and method of plane and the binding of rotary target material solution - Google Patents
A kind of device and method of plane and the binding of rotary target material solution Download PDFInfo
- Publication number
- CN109161862A CN109161862A CN201811294930.7A CN201811294930A CN109161862A CN 109161862 A CN109161862 A CN 109161862A CN 201811294930 A CN201811294930 A CN 201811294930A CN 109161862 A CN109161862 A CN 109161862A
- Authority
- CN
- China
- Prior art keywords
- target material
- oil bath
- rotary target
- indium
- basket
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013077 target material Substances 0.000 title claims abstract description 63
- 238000000034 method Methods 0.000 title claims abstract description 15
- 229910052738 indium Inorganic materials 0.000 claims abstract description 52
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims abstract description 52
- 238000010438 heat treatment Methods 0.000 claims abstract description 26
- 238000005192 partition Methods 0.000 claims abstract description 14
- 229910052751 metal Inorganic materials 0.000 claims abstract description 8
- 239000002184 metal Substances 0.000 claims abstract description 8
- 238000011084 recovery Methods 0.000 claims description 3
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 238000013467 fragmentation Methods 0.000 description 1
- 238000006062 fragmentation reaction Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 239000002893 slag Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacture And Refinement Of Metals (AREA)
Abstract
The present invention relates to the device and methods that a kind of plane and rotary target material solution are bound, including oil bath, heating component, planar targets grid bracket, rotary target material bracket sum aggregate indium basket, the bottom surface of oil bath is to be obliquely installed, the lowest point of oil bath groove bottom is provided with collection indium basket and places groove, the collection indium basket is placed on collection indium basket and places in groove, the heating component is mounted on multiple heating rods in connecting rod by connecting rod and uniformly and forms, heating component is mounted in oil bath, the planar targets grid bracket includes that muti-piece opens foraminate partition thereon, multiple partitions oblique arrangement spaced apart, the two sides of multiple partitions are to be connected by upper connecting rod with lower link, the rotary target material bracket is made of two guide rails and the rotary target material support being slidably mounted on guide rail.The present invention is suitable for unbinding the target using indium metal binding, can carry out batch solution to plane and rotary target material and bind, unbundlings temperature is uniform, and target is intact after unbundlings, unbinds high-efficient.
Description
Technical field
The present invention relates to the device and methods that a kind of plane and rotary target material solution are bound.
Background technique
Magnetron sputtering when in use, needs to weld together target and backboard with target.Generally use indium be solder into
Row soldering.Magnetron sputtering is to the utilization rate of target 80% hereinafter, remaining useless target needs are removed from backboard, in order to target
Recycling and back target reuse, this process cry target solution binding.Solution binding method used at present is, after using
Target (containing backboard) is placed in thermal station, is heated to it, until taking off target from backboard after indium solder dissolves.The method
Due to target uneven heating, the useless target removed is usually fragmentation, and is limited to the area of thermal station, while solving the target of binding
Quantity is few, because one layer of target can only be placed in thermal station.
Chinese patent application 201510360031.2 discloses a kind of target solution binding device, for using conducting resinl to carry out
The target of binding, is unbinded using sweller, the target solution binding device include unbundlings container, slag gathering hopper, strainer, pipeline and
Sweller storage tank.The patent application is the target of chemically unbundlings electrolyte binding, i.e., using sweller dissolution electrolysis
Matter；It is not applicable for the target using indium metal binding.
Summary of the invention
The technical problem to be solved by the present invention is the device and method of a kind of plane and the binding of rotary target material solution is provided, it should
Device and method is suitable for unbinding the target using indium metal binding, can carry out batch unbundlings to plane and rotary target material
Fixed, unbundlings temperature is uniform, and target is intact after unbundlings, and unbundlings are high-efficient, solves above-mentioned problems of the prior art.
The technical solution for solving above-mentioned technical problem is: a kind of device of plane and the binding of rotary target material solution, including oil bath
Slot, heating component, planar targets grid bracket, rotary target material bracket sum aggregate indium basket, the bottom surface of oil bath are to be obliquely installed, oil bath
The lowest point of groove bottom is provided with collection indium basket and places groove, and the collection indium basket is placed on collection indium basket and places in groove, the heating group
Part is mounted on multiple heating rods in connecting rod by connecting rod and uniformly and forms, and heating component is mounted in oil bath, described
Planar targets grid bracket includes that muti-piece opens foraminate partition, multiple partitions oblique arrangement spaced apart, muti-piece thereon
The two sides of partition are to be connected by upper connecting rod with lower link, and the rotary target material bracket is by two guide rails and to be slidably mounted on
Rotary target material support on guide rail is constituted.
Angle β between the oil bath groove bottom and horizontal plane is 1-5 degree.
The collection indium basket is to be made of rectangle basket body with the hand handle for being connected to rectangle basket body upper end, the rectangle basket
Body is placed on collection indium basket and places in groove.
It further include the temperature control box for controlling heating component, temperature control box is arranged on the lateral surface of oil bath.
It is of the invention another solution is that a kind of method of plane and the binding of rotary target material solution, on the device of use is
The device for plane and rotary target material the solution binding stated, comprising the following steps:
(1) the target type selection unbinded as needed needs planar targets grid bracket or rotary target material bracket to be used；
(2) there are two types of modes of operation；Mode one: first need to planar targets grid bracket or rotary target material bracket to be used be put into
In oil bath, then oil bath oil is added into oil bath；Mode two: oil bath oil is first added into oil bath, then will need to be used
Planar targets grid bracket or rotary target material bracket are put into oil bath；
(3) oil bath oil is heated to 170 DEG C~250 DEG C；
(4) the plane or rotary target material and backboard to be unbinded bound with indium metal is placed into together on corresponding bracket, to indium
After dissolving, isolated target and backboard can be taken out respectively；
(5) the indium dissolved is tumbled in collection indium basket due to oil bath inclined bottom surface, collection indium basket is taken out, recovery indium.
Due to the adoption of the above technical scheme, the invention has the following advantages:
1, when unbinding planar targets, muti-piece planar targets interval can be put into planar targets grid bracket while is unbinded.
When unbinding rotary target material, one rotary target material of a rotary target material bracket support, multiple rotary target materials can stack unbundlings；I.e. originally
Invention can carry out batch solution to plane and rotary target material and bind, and unbind high-efficient.
2, the present invention is that target is unbinded by the way of oil bath heating, with it is existing using thermal station unbundlings by the way of compared with, oil
Bathe heating temperature more evenly, target is intact after unbundlings, and it is not easily broken, it is more convenient to collect residual indium.
3, the present invention is the method (oil bath fusing indium metal) with physics, achievees the purpose that unbundlings, suitable for unbundlings indium
The target of metal binding.
With reference to the accompanying drawings and examples to the device and method of a kind of plane of the present invention and the binding of rotary target material solution
Technical characteristic is further described.
Detailed description of the invention
Fig. 1: the device perspective view of plane and rotary target material the solution binding of the present invention.
Fig. 2: the device rearview of plane and rotary target material the solution binding of the present invention.
Fig. 3: the rotary target material bracket perspective view of the present invention.
Fig. 4: the rotary target material bracket left view of the present invention.
Fig. 5: the planar targets grid bracket perspective view of the present invention.
Fig. 6: the planar targets grid bracket main view of the present invention.
Fig. 7: the planar targets grid bracket left view of the present invention.
Fig. 8: the collection indium basket structural schematic diagram of the present invention.
In figure: 1- oil bath, 2- collection indium basket place groove, 3- heating component, 31- connecting rod, 32- heating rod, 4- temperature control
Case, 5- rotary target material bracket, 51- guide rail, 52- rotary target material support, 6- planar targets grid bracket, 61- partition, 62- upper connecting rod,
63- lower link, 7- collection indium basket, 71- rectangle basket body, 72- hand handle.
Specific embodiment
Embodiment 1: a kind of device of plane and the binding of rotary target material solution, as Figure 1-Figure 8, including oil bath 1, heating
Component 3, planar targets grid bracket 6,5 sum aggregate indium basket 7 of rotary target material bracket, the bottom surface of oil bath are to be obliquely installed, oil bath
The lowest point of bottom surface is provided with collection indium basket and places groove 2, and the collection indium basket 7 is placed on collection indium basket and places in groove 2, the heating group
Multiple heating rods 32 that part 3 is mounted in connecting rod by connecting rod 31 and uniformly form, and the heating rod is U-shaped heating tube,
Heating component 3 is mounted in oil bath 1, and the planar targets grid bracket 6 includes that muti-piece opens foraminate partition 61 thereon, more
Block baffle interval certain distance oblique arrangement, the top and bottom of multiple partitions two sides are by upper connecting rod 62 and lower link 63
Connection, the rotary target material bracket 5 are made of two guide rails 51 and the rotary target material support 52 being slidably mounted on guide rail, are rotated
Target material tray 52 can slidably reciprocate on guide rail 51, and the upper surface of rotary target material support is provided with V-shaped groove, and rotary target material bracket can be according to need
It is arranged 1,2,3 or multiple.
In the present embodiment, the angle β between the oil bath groove bottom and horizontal plane is 1-5 degree.As a kind of transformation, angle
The angle of β can according to need adjustment, as long as convenient for collecting indium.
In the present embodiment, the collection indium basket 7 is by rectangle basket body 71 and the hand handle 72 for being connected to rectangle basket body upper end
It constitutes, the rectangle basket body 71 is placed on collection indium basket and places in groove 2.
It further include the temperature control box 4 for controlling heating component in the present embodiment, the lateral surface of oil bath is arranged in temperature control box
On.
Embodiment 2: a kind of method of plane and the binding of rotary target material solution, using plane described in embodiment 1 and rotary target
The device of material solution binding, comprising the following steps:
(1) the target type selection unbinded as needed needs planar targets grid bracket or rotary target material bracket to be used；
(2) there are two types of modes of operation；Mode one: first need to planar targets grid bracket or rotary target material bracket to be used be put into
In oil bath, then oil bath oil is added into oil bath；Mode two: oil bath oil is first added into oil bath, then will need to be used
Planar targets grid bracket or rotary target material bracket are put into oil bath；
(3) oil bath oil is heated to 170 DEG C~250 DEG C；
(4) the plane or rotary target material to be unbinded bound with indium metal and the backboard being pasted together with target are placed into phase
On the bracket answered, after indium dissolves, isolated target and backboard can be taken out respectively；
(5) the indium dissolved is tumbled in collection indium basket due to oil bath inclined bottom surface, collection indium basket is taken out, recovery indium.
In embodiment 2, when unbinding planar targets, one piece of planar targets be placed on from top to bottom adjacent two pieces of partitions it
Between, it leans against on partition, i.e., muti-piece planar targets can be spaced simultaneously is put into planar targets grid bracket.Unbind rotary target material
When, one rotary target material of a rotary target material bracket support, rotary target material is placed in rotary target material support, and multiple rotary target materials can
To stack.
Oil bath oil can be repeated as many times and use in embodiment 2.Oil bath oil selection temperature can be heated to 170 DEG C of oil bath oil i.e.
It can.
Claims (5)
1. the device of a kind of plane and the binding of rotary target material solution, it is characterised in that: including oil bath, heating component, planar targets
Grid bracket, rotary target material bracket sum aggregate indium basket, the bottom surface of oil bath are to be obliquely installed, and the lowest point of oil bath groove bottom is provided with collection
Indium basket places groove, and the collection indium basket is placed on collection indium basket and places in groove, and the heating component is by connecting rod and uniform peace
Multiple heating rods composition in connecting rod, heating component are mounted in oil bath, and the planar targets grid bracket includes
Muti-piece opens foraminate partition, multiple partitions oblique arrangement spaced apart thereon, and the two sides of multiple partitions are by upper
Connecting rod is connected with lower link, and the rotary target material bracket is by two guide rails and the rotary target material support structure being slidably mounted on guide rail
At.
2. the device of a kind of plane and the binding of rotary target material solution according to claim 1, it is characterised in that: the oil bath bottom
Angle β between face and horizontal plane is 1-5 degree.
3. the device of a kind of plane according to claim 1 or claim 2 and the binding of rotary target material solution, it is characterised in that: the collection indium
Basket is to be made of rectangle basket body with the hand handle for being connected to rectangle basket body upper end, and the rectangle basket body is placed on collection indium basket and puts
It sets in groove.
4. the device of a kind of plane according to claim 1 or claim 2 and the binding of rotary target material solution, it is characterised in that: further include using
In the temperature control box of control heating component, temperature control box is arranged on the lateral surface of oil bath.
5. a kind of method of plane and the binding of rotary target material solution, it is characterised in that: the device of use is any one of claim 1-4
The device of the plane and the binding of rotary target material solution, comprising the following steps:
(1) the target type selection unbinded as needed needs planar targets grid bracket or rotary target material bracket to be used；
(2) there are two types of modes of operation；Mode one: first need to planar targets grid bracket or rotary target material bracket to be used be put into
In oil bath, then oil bath oil is added into oil bath；Mode two: oil bath oil is first added into oil bath, then will need to be used
Planar targets grid bracket or rotary target material bracket are put into oil bath；
(3) oil bath oil is heated to 170 DEG C~250 DEG C；
(4) the plane or rotary target material and backboard to be unbinded bound with indium metal is placed into together on corresponding bracket, to indium
After dissolving, isolated target and backboard can be taken out respectively；
(5) the indium dissolved is tumbled in collection indium basket due to oil bath inclined bottom surface, collection indium basket is taken out, recovery indium.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811294930.7A CN109161862A (en) | 2018-11-01 | 2018-11-01 | A kind of device and method of plane and the binding of rotary target material solution |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811294930.7A CN109161862A (en) | 2018-11-01 | 2018-11-01 | A kind of device and method of plane and the binding of rotary target material solution |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109161862A true CN109161862A (en) | 2019-01-08 |
Family
ID=64876528
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811294930.7A Pending CN109161862A (en) | 2018-11-01 | 2018-11-01 | A kind of device and method of plane and the binding of rotary target material solution |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109161862A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109763106A (en) * | 2019-02-28 | 2019-05-17 | 先导薄膜材料（广东）有限公司 | Restorative procedure is tied up in moving back for planar targets |
| CN111607768A (en) * | 2020-06-08 | 2020-09-01 | 福建阿石创新材料股份有限公司 | Planar target material unbinding device and method |
| CN115572951A (en) * | 2022-10-19 | 2023-01-06 | 芜湖映日科技股份有限公司 | Equipment is unbound to rotatory target |
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| CN111607768A (en) * | 2020-06-08 | 2020-09-01 | 福建阿石创新材料股份有限公司 | Planar target material unbinding device and method |
| CN115572951A (en) * | 2022-10-19 | 2023-01-06 | 芜湖映日科技股份有限公司 | Equipment is unbound to rotatory target |
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