CN209081971U - A kind of device of plane and the binding of rotary target material solution - Google Patents
A kind of device of plane and the binding of rotary target material solution Download PDFInfo
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- CN209081971U CN209081971U CN201821795241.XU CN201821795241U CN209081971U CN 209081971 U CN209081971 U CN 209081971U CN 201821795241 U CN201821795241 U CN 201821795241U CN 209081971 U CN209081971 U CN 209081971U
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- target material
- rotary target
- basket
- oil bath
- indium
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Abstract
The utility model relates to the devices that a kind of plane and rotary target material solution are bound, including oil bath, heating component, planar targets grid bracket, rotary target material bracket sum aggregate indium basket, the bottom surface of oil bath is to be obliquely installed, the lowest part of oil bath groove bottom is provided with collection indium basket and places groove, the collection indium basket is placed on collection indium basket and places in groove, the heating component is mounted on multiple heating rods in connecting rod by connecting rod and uniformly and forms, heating component is mounted in oil bath, the planar targets grid bracket includes that muti-piece opens foraminate partition thereon, multiple partitions oblique arrangement spaced apart, the two sides of multiple partitions are to be connected by upper connecting rod with lower link, the rotary target material bracket is made of two guide rails and the rotary target material support being slidably mounted on guide rail.The utility model is suitable for unbinding the target using indium metal binding, can carry out batch solution to plane and rotary target material and bind, unbundlings temperature is uniform, and target is intact after unbundlings, unbinds high-efficient.
Description
Technical field
The utility model relates to the devices that a kind of plane and rotary target material solution are bound.
Background technique
Magnetron sputtering when in use, needs to weld together target and backboard with target.Generally use indium be solder into
Row soldering.Magnetron sputtering is to the utilization rate of target 80% hereinafter, remaining useless target needs are removed from backboard, in order to target
Recycling and back target reuse, this process cry target solution binding.Solution binding method used at present is, after using
Target (containing backboard) is placed in thermal station, is heated to it, until taking off target from backboard after indium solder dissolves.The method
Due to target uneven heating, the useless target removed is usually fragmentation, and is limited to the area of thermal station, while solving the target of binding
Quantity is few, because one layer of target can only be placed in thermal station.
Chinese patent application 201510360031.2 discloses a kind of target solution binding device, for using conducting resinl to carry out
The target of binding, is unbinded using sweller, the target solution binding device include unbundlings container, slag gathering hopper, strainer, pipeline and
Sweller storage tank.The patent application is the target of chemically unbundlings electrolyte binding, i.e., using sweller dissolution electrolysis
Matter；It is not applicable for the target using indium metal binding.
Summary of the invention
Technical problem to be solved by the utility model is: providing the device of a kind of plane and the binding of rotary target material solution, the dress
It sets and is suitable for unbinding the target using indium metal binding, batch solution can be carried out to plane and rotary target material and bound, unbundlings
Temperature is uniform, and target is intact after unbundlings, and unbundlings are high-efficient, solves above-mentioned problems of the prior art.
The technical solution for solving above-mentioned technical problem is: a kind of device of plane and the binding of rotary target material solution, including oil bath
Slot, heating component, planar targets grid bracket, rotary target material bracket sum aggregate indium basket, the bottom surface of oil bath are to be obliquely installed, oil bath
The lowest part of groove bottom is provided with collection indium basket and places groove, and the collection indium basket is placed on collection indium basket and places in groove, the heating group
Part is mounted on multiple heating rods in connecting rod by connecting rod and uniformly and forms, and heating component is mounted in oil bath, described
Planar targets grid bracket includes that muti-piece opens foraminate partition, multiple partitions oblique arrangement spaced apart, muti-piece thereon
The two sides of partition are to be connected by upper connecting rod with lower link, and the rotary target material bracket is by two guide rails and to be slidably mounted on
Rotary target material support on guide rail is constituted.
Angle β between the oil bath groove bottom and horizontal plane is 1-5 degree.
The collection indium basket is to be made of rectangle basket body with the hand handle for being connected to rectangle basket body upper end, the rectangle basket
Body is placed on collection indium basket and places in groove.
It further include the temperature control box for controlling heating component, temperature control box is arranged on the lateral surface of oil bath.
Due to the adoption of the above technical scheme, the utility model has the following beneficial effects:
1, when unbinding planar targets, muti-piece planar targets interval can be put into planar targets grid bracket while is solved
It ties up.When unbinding rotary target material, one rotary target material of a rotary target material bracket support, multiple rotary target materials can stack unbundlings；
I.e. the utility model can carry out batch solution binding to plane and rotary target material, unbind high-efficient.
2, the utility model is that target is unbinded by the way of oil bath heating, with the existing phase by the way of thermal station unbundlings
Than, oil bath heating more uniform temperature, target is intact after unbundlings, not easily broken, and it is more convenient to collect residual indium.
3, the utility model is the method (oil bath fusing indium metal) with physics, achievees the purpose that unbundlings, is suitable for unbundlings
The target bound with indium metal.
With reference to the accompanying drawings and examples to the skill of the device of a kind of plane of the utility model and the binding of rotary target material solution
Art feature is further described.
Detailed description of the invention
Fig. 1: the device perspective view of plane and rotary target material the solution binding of the utility model.
Fig. 2: the device rearview of plane and rotary target material the solution binding of the utility model.
Fig. 3: the rotary target material bracket perspective view of the utility model.
Fig. 4: the rotary target material bracket left view of the utility model.
Fig. 5: the planar targets grid bracket perspective view of the utility model.
Fig. 6: the planar targets grid bracket main view of the utility model.
Fig. 7: the planar targets grid bracket left view of the utility model.
Fig. 8: the collection indium basket structural schematic diagram of the utility model.
In figure: 1- oil bath, 2- collection indium basket place groove, 3- heating component, 31- connecting rod, 32- heating rod, 4- temperature control
Case, 5- rotary target material bracket, 51- guide rail, 52- rotary target material support, 6- planar targets grid bracket, 61- partition, 62- upper connecting rod,
63- lower link, 7- collection indium basket, 71- rectangle basket body, 72- hand handle.
Specific embodiment
Embodiment 1: a kind of device of plane and the binding of rotary target material solution, as Figure 1-Figure 8, including oil bath 1, heating
Component 3, planar targets grid bracket 6,5 sum aggregate indium basket 7 of rotary target material bracket, the bottom surface of oil bath are to be obliquely installed, oil bath
The lowest part of bottom surface is provided with collection indium basket and places groove 2, and the collection indium basket 7 is placed on collection indium basket and places in groove 2, the heating group
Multiple heating rods 32 that part 3 is mounted in connecting rod by connecting rod 31 and uniformly form, and the heating rod is U-shaped heating tube,
Heating component 3 is mounted in oil bath 1, and the planar targets grid bracket 6 includes that muti-piece opens foraminate partition 61 thereon, more
Block baffle interval certain distance oblique arrangement, the top and bottom of multiple partitions two sides are by upper connecting rod 62 and lower link 63
Connection, the rotary target material bracket 5 are made of two guide rails 51 and the rotary target material support 52 being slidably mounted on guide rail, are rotated
Target material tray 52 can slidably reciprocate on guide rail 51, and the upper surface of rotary target material support is provided with V-shaped groove, and rotary target material bracket can be according to need
It is arranged 1,2,3 or multiple.
In the present embodiment, the angle β between the oil bath groove bottom and horizontal plane is 1-5 degree.As a kind of transformation, angle
The angle of β can according to need adjustment, as long as convenient for collecting indium.
In the present embodiment, the collection indium basket 7 is by rectangle basket body 71 and the hand handle 72 for being connected to rectangle basket body upper end
It constitutes, the rectangle basket body 71 is placed on collection indium basket and places in groove 2.
It further include the temperature control box 4 for controlling heating component in the present embodiment, the lateral surface of oil bath is arranged in temperature control box
On.
The method that plane and rotary target material solution are bound using the utility model, comprising the following steps:
(1) the target type selection unbinded as needed needs planar targets grid bracket or rotary target material bracket to be used；
(2) there are two types of modes of operation；Mode one: planar targets grid bracket or rotary target material bracket to be used will first be needed
It is put into oil bath, then oil bath oil is added into oil bath；Mode two: oil bath oil is first added into oil bath, then needs are made
Planar targets grid bracket or rotary target material bracket are put into oil bath；
(3) oil bath oil is heated to 170 DEG C~250 DEG C；
(4) the plane or rotary target material to be unbinded bound with indium metal and the backboard being pasted together with target are placed
Onto corresponding bracket, after indium dissolves, isolated target and backboard can be taken out respectively；
(5) the indium dissolved is tumbled in collection indium basket due to oil bath inclined bottom surface, collection indium basket is taken out, recovery indium.
When unbinding planar targets, one piece of planar targets is placed on from top to bottom between adjacent two pieces of partitions, lean against every
On plate, i.e., muti-piece planar targets can be spaced simultaneously is put into planar targets grid bracket.When unbinding rotary target material, a rotary target
One rotary target material of material bracket support, rotary target material are placed in rotary target material support, and multiple rotary target materials can stack.
Unbundlings process oil bath oil can be repeated as many times and use.Oil bath oil selection temperature can be heated to 170 DEG C of oil bath oil i.e.
It can.
Claims (4)
1. the device of a kind of plane and the binding of rotary target material solution, it is characterised in that: including oil bath, heating component, planar targets
Grid bracket, rotary target material bracket sum aggregate indium basket, the bottom surface of oil bath are to be obliquely installed, and the lowest part of oil bath groove bottom is provided with collection
Indium basket places groove, and the collection indium basket is placed on collection indium basket and places in groove, and the heating component is by connecting rod and uniform peace
Multiple heating rods composition in connecting rod, heating component are mounted in oil bath, and the planar targets grid bracket includes
Muti-piece opens foraminate partition, multiple partitions oblique arrangement spaced apart thereon, and the two sides of multiple partitions are by upper
Connecting rod is connected with lower link, and the rotary target material bracket is by two guide rails and the rotary target material support structure being slidably mounted on guide rail
At.
2. the device of a kind of plane and the binding of rotary target material solution according to claim 1, it is characterised in that: the oil bath bottom
Angle β between face and horizontal plane is 1-5 degree.
3. the device of a kind of plane according to claim 1 or claim 2 and the binding of rotary target material solution, it is characterised in that: the collection indium
Basket is to be made of rectangle basket body with the hand handle for being connected to rectangle basket body upper end, and the rectangle basket body is placed on collection indium basket and puts
It sets in groove.
4. the device of a kind of plane according to claim 1 or claim 2 and the binding of rotary target material solution, it is characterised in that: further include using
In the temperature control box of control heating component, temperature control box is arranged on the lateral surface of oil bath.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821795241.XU CN209081971U (en) | 2018-11-01 | 2018-11-01 | A kind of device of plane and the binding of rotary target material solution |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821795241.XU CN209081971U (en) | 2018-11-01 | 2018-11-01 | A kind of device of plane and the binding of rotary target material solution |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209081971U true CN209081971U (en) | 2019-07-09 |
Family
ID=67122120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821795241.XU Active CN209081971U (en) | 2018-11-01 | 2018-11-01 | A kind of device of plane and the binding of rotary target material solution |
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| CN (1) | CN209081971U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109161862A (en) * | 2018-11-01 | 2019-01-08 | 广西晶联光电材料有限责任公司 | A kind of device and method of plane and the binding of rotary target material solution |
| CN110270730A (en) * | 2019-07-26 | 2019-09-24 | 宁波江丰电子材料股份有限公司 | A kind of pipe target desoldering device and its application method |
-
2018
- 2018-11-01 CN CN201821795241.XU patent/CN209081971U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109161862A (en) * | 2018-11-01 | 2019-01-08 | 广西晶联光电材料有限责任公司 | A kind of device and method of plane and the binding of rotary target material solution |
| CN110270730A (en) * | 2019-07-26 | 2019-09-24 | 宁波江丰电子材料股份有限公司 | A kind of pipe target desoldering device and its application method |
| CN110270730B (en) * | 2019-07-26 | 2021-07-09 | 宁波江丰电子材料股份有限公司 | Tube target welding-off device and using method thereof |
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