CN109161841A - A kind of AlCrN/AlCrSiN super hard nano composite laminated coating and its preparation method and application - Google Patents
A kind of AlCrN/AlCrSiN super hard nano composite laminated coating and its preparation method and application Download PDFInfo
- Publication number
- CN109161841A CN109161841A CN201810842580.7A CN201810842580A CN109161841A CN 109161841 A CN109161841 A CN 109161841A CN 201810842580 A CN201810842580 A CN 201810842580A CN 109161841 A CN109161841 A CN 109161841A
- Authority
- CN
- China
- Prior art keywords
- alcrn
- alcrsin
- nano composite
- layer
- laminated coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention belongs to cutter coat preparation technical field, a kind of AlCrN/AlCrSiN super hard nano composite laminated coating and its preparation method and application is disclosed.The present invention is prepared using pulse arc ion plate technology, and the AlCrN layer for first depositing 0.2~1 μ m-thick in preparation process provides support as the transition zone between coating and matrix for nano-multilayered structures；Nano-multilayered structures are realized by the rotation of workpiece rotating frame；It is Al:18~32at.%, Cr:10~25at.%, Si:1~10at.%, N:45~57at.% that AlCrN middle layer and AlCrSiN middle layer alternating deposit, which form AlCrN/AlCrSiN nano composite multiple layer function composition of layer,.Nano-multilayered structures have refined column crystal size, have good high rigidity, high tenacity, high-wearing feature and high-temperature oxidation resistance, are a kind of cutter coats with applications well prospect.
Description
Technical field
The invention belongs to cutter coat preparation technical field, in particular to a kind of AlCrN/AlCrSiN super hard nano is compound
Laminated coating and its preparation method and application.
Background technique
The development of modern processing manufacturing industry be unable to do without cutting tool, proposes higher harsher requirement to cutter.And it is green
Colour circle is protected, high speed, high-precision and intelligence become pursuing a goal for machining；High intensity, high rigidity, high tenacity, difficult cutting
Equal materials emerge one after another, and have not small challenge to cutter, and hard alloy cutter coating under the new situation has machining
Excellent performance.
AlCrN coating mutually makes it have excellent heat-resisting high temperature resistant property due to forming stable alloy at high temperature, and
And there is excellent mechanical performance, such as high rigidity, high-wearing feature and good chip removal ability, but AlCrN coating has phase
To higher residual stress, residual stress leads to greatly hardness increase and adhesiveness reduces.And there is nanometer by doping Si
The AlCrSiN coating of composite construction is due to existing simultaneously nanocrystal with high rigidity and with the Si of high-fire resistance3N4Amorphous
Body and there is lower residual stress simultaneously with excellent hot properties.By multi-layer structure design, provide preferably remaining
Balance between stress, hardness and fracture toughness prevents crackle diffusion from keeping it more controllable.The AlCrN/AlCrSiN multilayer of preparation
Coating has lower residual stress, and hardness is high, the coating of better wearability and high-temperature oxidation resistant, is suitble in harsh processing
It is used in operating condition.
The method for preparing AlCrN/AlCrSiN nano composite multiple layer cutter coat using pulse arc ion plate technology, also
It has not been reported.
Summary of the invention
In order to overcome shortcoming and defect existing in the prior art, the primary purpose of the present invention is that providing a kind of AlCrN/
AlCrSiN super hard nano composite laminated coating；The coating has high rigidity, high bond strength, excellent high-temperature stability and resistance to
Mill property, depositing coating cutter are suitable for the characteristics of cutting of hardworking material is processed under harsh conditions.
Another object of the present invention is to provide a kind of system of above-mentioned AlCrN/AlCrSiN super hard nano composite laminated coating
Preparation Method, this method is using pulse arc ion plate technology.
A further object of the present invention is to provide a kind of answering for above-mentioned AlCrN/AlCrSiN super hard nano composite laminated coating
With.
The object of the invention is achieved through the following technical solutions:
A kind of AlCrN/AlCrSiN super hard nano composite laminated coating, the coating include from bottom to top substrate matrix,
AlCrN transition zone and AlCrN/AlCrSiN nano composite multiple layer functional layer；AlCrN/AlCrSiN nano composite multiple layer functional layer
It is to be formed by the AlCrN middle layer that modulation ratio is 1:1.5 with AlCrSiN middle layer alternating deposit, modulation period is 10~35nm；
The atom percentage content of each element in AlCrN/AlCrSiN nano composite multiple layer functional layer: Al:18~32at.%, Cr:10
~25at.%, Si:1~10at.%, N:45~57at.%.
The AlCrN transition region thickness is 0.2~1 μm, and AlCrN/AlCrSiN nano composite multiple layer functional layer is with a thickness of 2
~8 μm.
The substrate matrix is WC-Co hard alloy or high-speed steel tool.
The AlCrN/AlCrSiN super hard nano composite laminated coating has nano combined and nano-multilayered structures, and works as
When modulation wavelength is within the scope of nanoscale, there are the super-hardness effect that hardness increases extremely, hardness is greater than 40GPa, belongs to superhard
Coating.
The preparation method of above-mentioned AlCrN/AlCrSiN super hard nano composite laminated coating, including following operating procedure:
(1) substrate pretreatment: by substrate matrix sandblasting polishing treatment, then successively with acetone, alcohol ultrasonic cleaning 10~
30min is packed into vacuum chamber after then being dried with drying oven, is placed on workpiece rotating frame；Heater is opened to be warming up to chamber
300~500 DEG C, by vacuum chamber to vacuum degree 3~6 × 10-3Pa or less；
(2) pulse etches: being passed through the Ar gas of 50~200sccm and the Kr gas of 50~100sccm, setting workpiece rotating frame is inclined
- 650~-1000V is pressed, frequency is 10~240kHz, carries out pulse etching, 10~20min of etch period to matrix surface；
(3) direct current etches: being passed through the Ar gas of 100~300sccm and the Kr gas of 50~100sccm, setting workpiece rotating frame is inclined
- 150~-300V is pressed, set ion ource electric current as 15~30A, to matrix surface progress direct current etching, etch period 20~
50min；
(4) depositing Al CrN transition zone: workpiece rotating frame bias is adjusted to -80~-180V, is passed through the N of 250~400sccm2
Gas lights AlCr target, adjusts air pressure to 1.0~3.0Pa, 300~450 DEG C of vacuum chamber temperature, pulsed arc power supply output is electric
Flow waveform be rectangular wave or sawtooth wave, average pulse 60~90A of electric current of output, frequency: 5~200Hz, duty ratio: 1~
70%, 10~40min of depositing Al CrN transition zone；
(5) depositing Al CrN/AlCrSiN nano composite multiple layer functional layer: being adjusted to -80~-180V for workpiece rotating frame bias,
It is passed through the N of 250~400sccm2Gas, adjusts air pressure to 1~3Pa, 300~450 DEG C of vacuum chamber temperature, light AlCr target and
AlCrSi target, pulsed arc power supply output current wave be rectangular wave or sawtooth wave, average pulse 60~90A of electric current of output,
Frequency: 5~200Hz, duty ratio: 1~70%, 1~4h of sedimentation time are replaced on AlCrN transition zone by work rest revolution
Depositing Al CrN middle layer and AlCrSiN middle layer form AlCrN/AlCrSiN nano composite multiple layer functional layer；
(6) deposition terminates, and closes power supply, after vacuum room temperature is down to 100 DEG C, opens vacuum chamber and takes out sample, cooling
To room temperature, AlCrN/AlCrSiN super hard nano composite laminated coating is formed.
The each element atomic percent of AlCr target described in step (4) and (5) be Al:50~70at.%, Cr:30~
50at.%；The each element atomic percent of AlCrSi target described in step (5) be Cr:25~40at.%, Al:40~
70at.%, Si:5~20at.%.
The speed of the revolution of work rest described in step (5) is 1~5r/min, and revolution drives rotation, revolve revolving speed and rotation
Revolving speed is the relationship of 1:3.
Above-mentioned AlCrN/AlCrSiN super hard nano composite laminated coating is in Tool in Cutting and surface protection coating field
Application.
Compared with prior art, the present invention has the following advantages and beneficial effects:
(1) the pulse arc ion plate technology that uses of the present invention, compares conventional arc ion plating, pulse arc ion plate its
Discharge process is pulsed, intermittent, generates stronger more highdensity plasma, and average current is smaller, prepares
Coating surface bulky grain out is less, morphology is finer and close.
(2) present invention has preferably residual stress, hardness and fracture toughness, prevents crackle by multi-layer structure design
It spreads more controllable.
(3) the AlCrN/AlCrSiN laminated coating cutter of preparation is made using the present invention, there is better wearability and height
Warm inoxidizability is suitble to the cutter used in harsh processing operating condition, can satisfy High-speed machining property more preferable to cutter material
The demand of energy, there is huge market potential and use value.
Detailed description of the invention
Fig. 1 is the pulsed arc precipitation equipment schematic diagram that the present invention uses；
Fig. 2 is the Cross Section Morphology figure of AlCrN/AlCrSiN nano composite multiple layer functional layer of the present invention；
Fig. 3 is AlCrN, AlCrSiN, AlCrN/AlCrSiN nano composite multiple layer functional layer nano impress displacement of the present invention
Load diagram；
Fig. 4 is the XRD diagram of AlCrN, AlCrSiN, AlCrN/AlCrSiN nano composite multiple layer functional layer of the present invention；
Fig. 5 is section after AlCrN/AlCrSiN super hard nano composite laminated coating of the present invention aoxidizes 2 hours at 1100 DEG C
Pattern and corresponding EDS line scanning；
Fig. 6 is friction of the AlCrN/AlCrSiN super hard nano composite laminated coating of the present invention at RT, 600 DEG C and 800 DEG C
Curve graph.
Specific embodiment
Below by embodiment, invention is further described in detail, these embodiments are only used to illustrate the present invention, but
The scope of protection of the present invention is not limited to this.
It is applied in following embodiment using pulse arc ion plate alternating deposit AlCrN/AlCrSiN super hard nano composite multi-layer
Layer schematic diagram as shown in Figure 1, during depositing coating workpiece rotating frame revolution drive rotation rotation, when sample faces arteries and veins
When rushing electric arc AlCr target, one layer of AlCrN middle layer of matrix deposition；When facing AlCrY target, one layer of AlCrSiN middle layer is deposited；
AlCrN middle layer and AlCrSiN middle layer alternating deposit form AlCrN/AlCrSiN nano composite multiple layer functional layer, work rest
Rotation speed speed determines the thickness of every layer of AlCrN layers He AlCrSiN layers.
The each element atomic percent of AlCr target used in embodiment be Al:50~70at.%, Cr:30~
The each element atomic percent of 50at.%, AlCrSi target be Cr:25~40at.%, Al:40~70at.%, Si:5~
20at.%.
Embodiment 1
A kind of AlCrN/AlCrSiN super hard nano composite laminated coating, the coating include from bottom to top substrate matrix,
AlCrN transition zone and AlCrN/AlCrSiN nano composite multiple layer functional layer；The transition zone be attached to WC-Co hard alloy or
On high-speed steel tool substrate matrix, with a thickness of 0.2 μm of AlCrN coating；The AlCrN/AlCrSiN nano composite multiple layer function
Layer is attached on transition zone, with a thickness of 4 μm.The ingredient of the AlCrN/AlCrSiN nano composite multiple layer functional layer is Al:
29at.%, Cr:17at.%, Si:2at.%, N:52at.%；AlCrN/AlCrSiN nano composite multiple layer functional layer is by adjusting
For system than being that the AlCrN middle layer of 1:1.5 is formed with AlCrSiN middle layer alternating deposit, modulation period is 30~35nm.
The preparation method of above-mentioned AlCrN/AlCrSiN super hard nano composite laminated coating is using pulse arc ion plate
Technology, specific step is as follows for coating preparation:
(1) substrate pretreatment: then tool matrix sandblasting polishing treatment is successively cleaned by ultrasonic with acetone, alcohol
15min is packed into vacuum chamber after then being dried with drying oven, is placed on workpiece rotating frame；Heater is opened to be warming up to chamber
500 DEG C, by vacuum chamber to vacuum degree 5.0 × 10-3Pa or less；
(2) pulse etches: being passed through the Ar gas of 200sccm and the Kr gas of 50sccm, workpiece rotating frame bias -1000V, frequency is arranged
Rate is 240kHz, carries out pulse etching, etch period 10min to matrix surface；
(3) direct current etches: it is passed through the Ar gas of 150sccm and the Kr gas of 80sccm, workpiece rotating frame bias -300V is set, if
Determining ion ource electric current is 30A, carries out direct current etching, etch period 30min to matrix surface；
(4) depositing Al CrN transition zone: workpiece rotating frame bias is adjusted to -100V, is passed through the N of 300sccm2Gas lights AlCr
Target adjusts air pressure to 1Pa, and 400 DEG C of vacuum chamber temperature, pulsed arc power supply output current wave is rectangular wave, the arteries and veins of output
Average current 80A is rushed, frequency: 10Hz, duty ratio: 5%, depositing Al CrN transition zone 10min；
(5) workpiece rotating frame revolution revolving speed depositing Al CrN/AlCrSiN nanocomposite laminated coating: is set as 1.5r/
Min, revolution drive rotation, and rotation revolving speed is 4.5r/min, and bias is adjusted to -100V, is passed through the N of 300sccm2Gas adjusts air pressure
To 1Pa, 400 DEG C of vacuum chamber temperature, AlCr target and AlCrSi target are lighted, pulsed arc power supply output current wave is rectangular wave
The average pulse electric current 80A of output, frequency: 10Hz, duty ratio: 5%, sedimentation time 2h are revolved by work rest in AlCrN mistake
It crosses on layer and replaces depositing Al CrN middle layer and AlCrSiN middle layer formation AlCrN/AlCrSiN nano composite multiple layer functional layer；
100 DEG C are down to vacuum room temperature and takes out sample hereinafter, opening vacuum chamber, are cooled to room temperature, it is superhard to form AlCrN/AlCrSiN
Nanocomposite laminated coating.
Fig. 2 is the Cross Section Morphology figure of AlCrN/AlCrSiN of embodiment of the present invention nano composite multiple layer functional layer.From Fig. 2
As can be seen that coating texture's densification and having apparent more layer structures, multilayered structure can improve the mechanical property of coating, prevent
The diffusion of crack arrest line, improves the cutting ability of coated cutting tool.
Embodiment 2
A kind of AlCrN/AlCrSiN super hard nano composite laminated coating, the coating include from bottom to top substrate matrix,
AlCrN transition zone and AlCrN/AlCrSiN nano composite multiple layer functional layer；The transition zone be attached to WC-Co hard alloy or
On high-speed steel tool substrate matrix, with a thickness of 0.3 μm of AlCrN coating；The AlCrN/AlCrSiN nano composite multiple layer function
Layer is attached on transition zone, with a thickness of 3 μm.The ingredient of the AlCrN/AlCrSiN nano composite multiple layer functional layer is Al:
25at.%, Cr:18at.%, Si:3at.%, N:54at.%；AlCrN/AlCrSiN nano composite multiple layer functional layer is by adjusting
For system than being that the AlCrN middle layer of 1:1.5 is formed with AlCrSiN middle layer alternating deposit, modulation period is 27~32nm.
The preparation method of above-mentioned AlCrN/AlCrSiN super hard nano composite laminated coating is using pulse arc ion plate
Technology, specific step is as follows for coating preparation:
(1) substrate pretreatment: then tool matrix sandblasting polishing treatment is successively cleaned by ultrasonic with acetone, alcohol
15min is packed into vacuum chamber after then being dried with drying oven, is placed on workpiece rotating frame；Heater is opened to be warming up to chamber
450 DEG C, by vacuum chamber to vacuum degree 5.0 × 10-3Pa or less；
(2) pulse etches: being passed through the Ar gas of 150sccm and the Kr gas of 80sccm, workpiece rotating frame bias -800V, frequency is arranged
Rate is 200kHz, carries out pulse etching, etch period 15min to matrix surface；
(3) direct current etches: it is passed through the Ar gas of 150sccm and the Kr gas of 100sccm, workpiece rotating frame bias -200V is set, if
Determining ion ource electric current is 25A, carries out direct current etching, etch period 40min to matrix surface.
(4) depositing Al CrN transition zone: workpiece rotating frame bias is adjusted to -120V, is passed through the N of 350sccm2Gas lights AlCr
Target adjusts air pressure to 1Pa, and 400 DEG C of vacuum chamber temperature, pulsed arc power supply output current wave is rectangular wave, the arteries and veins of output
Average current 75A is rushed, frequency: 100Hz, duty ratio: 10%, depositing Al CrN transition zone 13min；
(5) depositing Al CrN/AlCrSiN nanocomposite laminated coating: being set as 2r/min for workpiece rotating frame revolution revolving speed,
Revolution drives rotation, and rotation revolving speed is 6r/min, and bias is adjusted to -120V, is passed through the N of 350sccm2Gas, adjusting air pressure to 1Pa,
400 DEG C of vacuum chamber temperature, AlCr target and AlCrSi target are lighted, pulsed arc power supply output current wave is rectangular wave output
Average pulse electric current 75A, frequency: 100Hz, duty ratio: 10%, sedimentation time 1.5h are revolved by work rest in AlCrN transition
Replace depositing Al CrN middle layer on layer and AlCrSiN middle layer forms AlCrN/AlCrSiN nano composite multiple layer functional layer；To
Vacuum room temperature is down to 100 DEG C and takes out sample hereinafter, opening vacuum chamber, is cooled to room temperature, and forms that AlCrN/AlCrSiN is superhard receives
Rice composite laminated coating.
Fig. 3 is AlCrN, AlCrSiN, AlCrN/AlCrSiN nano composite multiple layer functional layer nano impress displacement of the present invention
Load diagram；The wherein preparation of the preparation process and multilayer Al CrN/AlCrSiN coating of single layer AlCrN coating and AlCrSiN coating
Process conditions are consistent.It can be observed from Fig. 3, the AlCrN/AlCrSiN that under identical load prepared by the embodiment of the present invention
Nanocomposite laminated coating presses people's displacement to be less than AlCrN coating and AlCrSiN coating, learns AlCrN/ prepared by the present invention
The hardness of AlCrSiN nanocomposite laminated coating its hardness ratio AlCrN and AlCrSiN signal layer coating is high, hardness reach 38GPa with
On.
Embodiment 3
A kind of AlCrN/AlCrSiN super hard nano composite laminated coating, the coating include from bottom to top substrate matrix,
AlCrN transition zone and AlCrN/AlCrSiN nano composite multiple layer functional layer；The transition zone be attached to WC-Co hard alloy or
On high-speed steel tool substrate matrix, with a thickness of 0.4 μm of AlCrN coating；The AlCrN/AlCrSiN nano composite multiple layer function
Layer is attached on transition zone, with a thickness of 2 μm.The ingredient of the AlCrN/AlCrSiN nano composite multiple layer functional layer is Al:
23at.%, Cr:14at.%, Si:2at.%, N:56at.%；AlCrN/AlCrSiN nano composite multiple layer functional layer is by adjusting
For system than being that the AlCrN middle layer of 1:1.5 is formed with AlCrSiN middle layer alternating deposit, modulation period is 22~28nm.
The preparation method of above-mentioned AlCrN/AlCrSiN super hard nano composite laminated coating is using pulse arc ion plate
Technology, specific step is as follows for coating preparation:
(1) substrate pretreatment: then tool matrix sandblasting polishing treatment is successively cleaned by ultrasonic with acetone, alcohol
15min is packed into vacuum chamber after then being dried with drying oven, is placed on workpiece rotating frame；Heater is opened to be warming up to chamber
450 DEG C, by vacuum chamber to vacuum degree 5.0 × 10-3Pa or less；
(2) pulse etches: being passed through the Ar gas of 150sccm and the Kr gas of 80sccm, workpiece rotating frame bias -800V, frequency is arranged
Rate is 200kHz, carries out pulse etching, etch period 15min to matrix surface；
(3) direct current etches: it is passed through the Ar gas of 150sccm and the Kr gas of 100sccm, workpiece rotating frame bias -200V is set, if
Determining ion ource electric current is 25A, carries out direct current etching, etch period 40min to matrix surface.
(4) depositing Al CrN transition zone: workpiece rotating frame bias is adjusted to -120V, is passed through the N of 350sccm2Gas lights AlCr
Target adjusts air pressure to 2Pa, and 400 DEG C of vacuum chamber temperature, pulsed arc power supply output current wave is rectangular wave, the arteries and veins of output
Average current 75A is rushed, frequency: 100Hz, duty ratio: 10%, depositing Al CrN transition zone 20min；
(5) depositing Al CrN/AlCrSiN nanocomposite laminated coating: being set as 2r/min for workpiece rotating frame revolution revolving speed,
Revolution drives rotation, and rotation revolving speed is 6r/min, and bias is adjusted to -100V, is passed through the N of 350sccm2Gas, adjust air pressure to
1.5Pa, lights AlCr target and AlCrSi target by 400 DEG C of vacuum chamber temperature, and pulsed arc power supply output current wave is rectangular wave
The average pulse electric current 75A of output, frequency: 100Hz, duty ratio: 10%, sedimentation time 1.5h are existed by work rest revolution
Replace depositing Al CrN middle layer on AlCrN transition zone and AlCrSiN middle layer forms AlCrN/AlCrSiN nano composite multiple layer
Functional layer；100 DEG C are down to vacuum room temperature and takes out sample hereinafter, opening vacuum chamber, are cooled to room temperature, are formed AlCrN/
AlCrSiN super hard nano composite laminated coating.
Fig. 4 is the XRD diagram of AlCrN, AlCrSiN, AlCrN/AlCrSiN nano composite multiple layer functional layer of the present invention；Wherein
The preparation process condition one of the preparation process and multilayer Al CrN/AlCrSiN coating of single layer AlCrN coating and AlCrSiN coating
It causes.Figure 4, it is seen that AlCrN, AlCrSiN coating mainly show the fcc- of (111) (200) (220) three orientations
CrN, and AlCrN/AlCrSiN nanocomposite laminated coating shows single phase cubic and cube wurtzite structure respectively, shows Si
The metastable solubility limit for reducing AlN in CrN is added.It and is discovery Si3N4Diffraction maximum, be shown to be non crystalline structure, can speculate
AlCrSiN nano composite structure by amorphous Si3N4Nanocrystalline (Al, Cr) N is wrapped in constitute；Coherency strain and internal energy
Key effect is played in the relevant and incoherent growth of laminated coating, wherein the relevant growth by template effect can make boundary
Face energy minimizes.
Embodiment 4
A kind of AlCrN/AlCrSiN super hard nano composite laminated coating, the coating include from bottom to top substrate matrix,
AlCrN transition zone and AlCrN/AlCrSiN nano composite multiple layer functional layer；The transition zone be attached to WC-Co hard alloy or
On high-speed steel tool substrate matrix, with a thickness of 0.25 μm of AlCrN coating；The AlCrN/AlCrSiN nano composite multiple layer function
Ergosphere is attached on transition zone, with a thickness of 3 μm.The ingredient of the AlCrN/AlCrSiN nano composite multiple layer functional layer is Al:
24at.%, Cr:19at.%, Si:4at.%, N:53at.%；AlCrN/AlCrSiN nano composite multiple layer functional layer is by adjusting
For system than being that the AlCrN middle layer of 1:1.5 is formed with AlCrSiN middle layer alternating deposit, modulation period is 15~20nm.
The preparation method of above-mentioned AlCrN/AlCrSiN super hard nano composite laminated coating is using pulse arc ion plate
Technology, specific step is as follows for coating preparation:
(1) substrate pretreatment: then tool matrix sandblasting polishing treatment is successively cleaned by ultrasonic with acetone, alcohol
15min is packed into vacuum chamber after then being dried with drying oven, is placed on workpiece rotating frame；Heater is opened to be warming up to chamber
450 DEG C, by vacuum chamber to vacuum degree 5.0 × 10-3Pa or less；
(2) pulse etches: being passed through the Ar gas of 150sccm and the Kr gas of 80sccm, workpiece rotating frame bias -800V, frequency is arranged
Rate is 200kHz, carries out pulse etching, etch period 15min to matrix surface；
(3) direct current etches: it is passed through the Ar gas of 150sccm and the Kr gas of 100sccm, workpiece rotating frame bias -200V is set, if
Determining ion ource electric current is 25A, carries out direct current etching, etch period 40min to matrix surface.
(4) depositing Al CrN transition zone: workpiece rotating frame bias is adjusted to -120V, is passed through the N of 350sccm2Gas lights AlCr
Target adjusts air pressure to 2Pa, and 400 DEG C of vacuum chamber temperature, pulsed arc power supply output current wave is rectangular wave, the arteries and veins of output
Average current 70A is rushed, frequency: 10Hz, duty ratio: 5%, depositing Al CrN transition zone 20min；
(5) depositing Al CrN/AlCrSiN nanocomposite laminated coating: being set as 3r/min for workpiece rotating frame revolution revolving speed,
Revolution drives rotation, and rotation revolving speed is 9r/min, and bias is adjusted to -120V, is passed through the N of 350sccm2Gas, adjusting air pressure to 2Pa,
400 DEG C of vacuum chamber temperature, AlCr target and AlCrSi target are lighted, pulsed arc power supply output current wave is rectangular wave output
Average pulse electric current 70A, frequency: 10Hz, duty ratio: 5%, sedimentation time 2h, through work rest revolution on AlCrN transition zone
Alternating deposit AlCrN middle layer and AlCrSiN middle layer form AlCrN/AlCrSiN nano composite multiple layer functional layer；To vacuum
Room temperature is down to 100 DEG C and takes out sample hereinafter, opening vacuum chamber, is cooled to room temperature, it is multiple to form AlCrN/AlCrSiN super hard nano
Close laminated coating.
Fig. 5 is cut after the present embodiment AlCrN/AlCrSiN super hard nano composite laminated coating aoxidizes 2 hours at 1100 DEG C
Face pattern and corresponding EDS line scanning；Only have from the oxidated layer thickness that can go out after being aoxidized 2 hours at 1100 DEG C in Fig. 5
0.7 μm or so, due to (Al, the Cr) of Surface Creation densification2O3And SiO2Oxidation film blocks the entrance of oxygen, makes it have
Excellent high temperature oxidation resistance.
Embodiment 5
A kind of AlCrN/AlCrSiN super hard nano composite laminated coating, the coating include from bottom to top substrate matrix,
AlCrN transition zone and AlCrN/AlCrSiN nano composite multiple layer functional layer；The transition zone be attached to WC-Co hard alloy or
On high-speed steel tool substrate matrix, with a thickness of 0.6 μm of AlCrN coating；The AlCrN/AlCrSiN nano composite multiple layer function
Layer is attached on transition zone, with a thickness of 4 μm.The ingredient of the AlCrN/AlCrSiN nano composite multiple layer functional layer is Al:
23at.%, Cr:14at.%, Si:8at.%, N:55at.%；AlCrN/AlCrSiN nano composite multiple layer functional layer is by adjusting
For system than being that the AlCrN middle layer of 1:1.5 is formed with AlCrSiN middle layer alternating deposit, modulation period is 18~23nm.
The preparation method of above-mentioned AlCrN/AlCrSiN super hard nano composite laminated coating is using pulse arc ion plate
Technology, specific step is as follows for coating preparation:
(1) substrate pretreatment: then tool matrix sandblasting polishing treatment is successively cleaned by ultrasonic with acetone, alcohol
15min is packed into vacuum chamber after then being dried with drying oven, is placed on workpiece rotating frame；Heater is opened to be warming up to chamber
450 DEG C, by vacuum chamber to vacuum degree 5.0 × 10-3Pa or less；
(2) pulse etches: being passed through the Ar gas of 150sccm and the Kr gas of 80sccm, workpiece rotating frame bias -800V, frequency is arranged
Rate is 200kHz, carries out pulse etching, etch period 15min to matrix surface；
(3) direct current etches: it is passed through the Ar gas of 150sccm and the Kr gas of 100sccm, workpiece rotating frame bias -200V is set, if
Determining ion ource electric current is 25A, carries out direct current etching, etch period 40min to matrix surface.
(4) depositing Al CrN transition zone: workpiece rotating frame bias is adjusted to -120V, is passed through the N of 350sccm2Gas lights AlCr
Target adjusts air pressure to 2Pa, and 400 DEG C of vacuum chamber temperature, pulsed arc power supply output current wave is rectangular wave, the arteries and veins of output
Average current 70A is rushed, frequency: 50Hz, duty ratio: 10%, depositing Al CrN transition zone 30min；
(5) workpiece rotating frame revolution revolving speed depositing Al CrN/AlCrSiN nanocomposite laminated coating: is set as 2.5r/
Min, revolution drive rotation, and rotation revolving speed is 7.5r/min, and bias is adjusted to -120V, is passed through the N of 350sccm2Gas adjusts air pressure
To 2Pa, 400 DEG C of vacuum chamber temperature, AlCr target and AlCrSi target are lighted, pulsed arc power supply output current wave is rectangular wave
The average pulse electric current 80A of output, frequency: 50Hz, duty ratio: 10%, sedimentation time 2.5h are existed by work rest revolution
Replace depositing Al CrN middle layer on AlCrN transition zone and AlCrSiN middle layer forms AlCrN/AlCrSiN nano composite multiple layer
Functional layer；100 DEG C are down to vacuum room temperature and takes out sample hereinafter, opening vacuum chamber, are cooled to room temperature, are formed AlCrN/
AlCrSiN super hard nano composite laminated coating.
Fig. 6 is the present embodiment AlCrN/AlCrSiN super hard nano composite laminated coating rubbing at RT, 600 DEG C and 800 DEG C
Wipe curve graph；As seen from Figure 6, with the raising of friction temperature, coefficient of friction reduces；Have at 800 DEG C compared with low friction system
Number.Show that AlCrN/AlCrSiN coating has preferable anti-attrition wear-resisting property
Embodiment 6
A kind of AlCrN/AlCrSiN super hard nano composite laminated coating, the coating include from bottom to top substrate matrix,
AlCrN transition zone and AlCrN/AlCrSiN nano composite multiple layer functional layer；The transition zone be attached to WC-Co hard alloy or
On high-speed steel tool substrate matrix, with a thickness of 0.5 μm of AlCrN coating；The AlCrN/AlCrSiN nano composite multiple layer function
Layer is attached on transition zone, with a thickness of 5 μm.The ingredient of the AlCrN/AlCrSiN nano composite multiple layer functional layer is Al:
19at.%, Cr:22at.%, Si:8at.%, N:51at.%；AlCrN/AlCrSiN nano composite multiple layer functional layer is by adjusting
For system than being that the AlCrN middle layer of 1:1.5 is formed with AlCrSiN middle layer alternating deposit, modulation period is 10~15nm.
The preparation method of above-mentioned AlCrN/AlCrSiN super hard nano composite laminated coating is using pulse arc ion plate
Technology, specific step is as follows for coating preparation:
(1) substrate pretreatment: then tool matrix sandblasting polishing treatment is successively cleaned by ultrasonic with acetone, alcohol
15min is packed into vacuum chamber after then being dried with drying oven, is placed on workpiece rotating frame；Heater is opened to be warming up to chamber
450 DEG C, by vacuum chamber to vacuum degree 5.0 × 10-3Pa or less；
(2) pulse etches: being passed through the Ar gas of 150sccm and the Kr gas of 80sccm, workpiece rotating frame bias -800V, frequency is arranged
Rate is 200kHz, carries out pulse etching, etch period 15min to matrix surface；
(3) direct current etches: it is passed through the Ar gas of 150sccm and the Kr gas of 100sccm, workpiece rotating frame bias -200V is set, if
Determining ion ource electric current is 25A, carries out direct current etching, etch period 40min to matrix surface.
(4) depositing Al CrN transition zone: workpiece rotating frame bias is adjusted to -150V, is passed through the N of 350sccm2Gas lights AlCr
Target adjusts air pressure to 3Pa, and 350 DEG C of vacuum chamber temperature, pulsed arc power supply output current wave is rectangular wave, the arteries and veins of output
Average current 60A is rushed, frequency: 200Hz, duty ratio: 3%, depositing Al CrN transition zone 40min；
(5) depositing Al CrN/AlCrSiN nanocomposite laminated coating: being set as 4r/min for workpiece rotating frame revolution revolving speed,
Revolution drives rotation, and rotation revolving speed is 12r/min, and bias is adjusted to -150V, is passed through the N of 350sccm2Gas, adjusting air pressure to 3Pa,
350 DEG C of vacuum chamber temperature, AlCr target and AlCrSi target are lighted, pulsed arc power supply output current wave is rectangular wave output
Average pulse electric current 60A, frequency: 200Hz, duty ratio: 3%, sedimentation time 3h are revolved by work rest in AlCrN transition zone
Upper alternately depositing Al CrN middle layer and AlCrSiN middle layer form AlCrN/AlCrSiN nano composite multiple layer functional layer；To true
Empty room temperature is down to 100 DEG C and takes out sample hereinafter, opening vacuum chamber, is cooled to room temperature, forms AlCrN/AlCrSiN super hard nano
Composite laminated coating.Coating testing result shows: scarification detection binding force reaches 70N or more.
The above embodiment is a preferred embodiment of the present invention, but embodiments of the present invention are not by above-described embodiment
Limitation, other any changes, modifications, substitutions, combinations, simplifications made without departing from the spirit and principles of the present invention,
It should be equivalent substitute mode, be included within the scope of the present invention.
Claims (7)
1. a kind of AlCrN/AlCrSiN super hard nano composite laminated coating, it is characterised in that: the coating includes substrate from bottom to top
Matrix, AlCrN transition zone and AlCrN/AlCrSiN nano composite multiple layer functional layer；AlCrN/AlCrSiN nano composite multiple layer function
Ergosphere is to be formed by the AlCrN middle layer that modulation ratio is 1:1.5 with AlCrSiN middle layer alternating deposit, modulation period for 10~
35nm；The atom percentage content of each element in AlCrN/AlCrSiN nano composite multiple layer functional layer: Al:18~32at.%,
Cr:10~25at.%, Si:1~10at.%, N:45~57at.%.
2. a kind of AlCrN/AlCrSiN super hard nano composite laminated coating according to claim 1, it is characterised in that: institute
Stating AlCrN transition region thickness is 0.2~1 μm, and AlCrN/AlCrSiN nano composite multiple layer functional layer is with a thickness of 2~8 μm.
3. a kind of AlCrN/AlCrSiN super hard nano composite laminated coating according to claim 1, it is characterised in that: institute
Stating substrate matrix is WC-Co hard alloy or high-speed steel tool.
4. a kind of preparation method of AlCrN/AlCrSiN super hard nano composite laminated coating according to claim 1, special
Sign is to include following operating procedure:
(1) substrate pretreatment: by substrate matrix sandblasting polishing treatment, then successively with acetone, alcohol ultrasonic cleaning 10~
30min is packed into vacuum chamber after then being dried with drying oven, is placed on workpiece rotating frame；Heater is opened to be warming up to chamber
300~500 DEG C, by vacuum chamber to vacuum degree 3~6 × 10-3Pa or less；
(2) pulse etches: being passed through the Ar gas of 50~200sccm and the Kr gas of 50~100sccm, workpiece rotating frame bias -650 is arranged
~-1000V, frequency are 10~240kHz, carry out pulse etching, 10~20min of etch period to matrix surface；
(3) direct current etches: being passed through the Ar gas of 100~300sccm and the Kr gas of 50~100sccm, workpiece rotating frame bias-is arranged
150~-300V sets ion ource electric current as 15~30A, carries out direct current etching, 20~50min of etch period to matrix surface；
(4) depositing Al CrN transition zone: workpiece rotating frame bias is adjusted to -80~-180V, is passed through the N of 250~400sccm2Gas, point
Combustion AlCr target, adjusting air pressure to 1.0~3.0Pa, 300~450 DEG C of vacuum chamber temperature, pulsed arc power supply output current wave
For rectangular wave or sawtooth wave, average pulse 60~90A of electric current of output, frequency: 5~200Hz, duty ratio: 1~70%, deposition
10~40min of AlCrN transition zone；
(5) depositing Al CrN/AlCrSiN nano composite multiple layer functional layer: workpiece rotating frame bias is adjusted to -80~-180V, is passed through
The N of 250~400sccm2Gas adjusts air pressure to 1~3Pa, 300~450 DEG C of vacuum chamber temperature, lights AlCr target and AlCrSi
Target, pulsed arc power supply output current wave are rectangular wave or sawtooth wave, average pulse 60~90A of electric current of output, frequency: 5
~200Hz, duty ratio: 1~70%, 1~4h of sedimentation time pass through work rest revolution alternating deposit on AlCrN transition zone
AlCrN middle layer and AlCrSiN middle layer form AlCrN/AlCrSiN nano composite multiple layer functional layer；
(6) deposition terminates, and closes power supply, after vacuum room temperature is down to 100 DEG C, opens vacuum chamber and takes out sample, be cooled to room
Temperature forms AlCrN/AlCrSiN super hard nano composite laminated coating.
5. the preparation method according to claim 4, it is characterised in that: each element of AlCr target described in step (4) and (5)
Atomic percent is Al:50~70at.%, Cr:30~50at.%；The each element atomic percent of step (5) the AlCrSi target
Than for Cr:25~40at.%, Al:40~70at.%, Si:5~20at.%.
6. the preparation method according to claim 4, it is characterised in that: the speed of the revolution of work rest described in step (5) is 1
~5r/min, revolution drive rotation, and revolution revolving speed and rotation revolving speed are the relationships of 1:3.
7. a kind of AlCrN/AlCrSiN super hard nano composite laminated coating according to claim 1 is in Tool in Cutting and table
Application in the protective coating field of face.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810842580.7A CN109161841B (en) | 2018-07-27 | 2018-07-27 | AlCrN/AlCrSiN superhard nano composite multilayer coating and preparation method and application thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810842580.7A CN109161841B (en) | 2018-07-27 | 2018-07-27 | AlCrN/AlCrSiN superhard nano composite multilayer coating and preparation method and application thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109161841A true CN109161841A (en) | 2019-01-08 |
| CN109161841B CN109161841B (en) | 2020-07-21 |
Family
ID=64898467
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810842580.7A Active CN109161841B (en) | 2018-07-27 | 2018-07-27 | AlCrN/AlCrSiN superhard nano composite multilayer coating and preparation method and application thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109161841B (en) |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110257771A (en) * | 2019-06-28 | 2019-09-20 | 广州大学 | A kind of c-CrAlSiN hard coat of high Al content and preparation method thereof |
| CN110257772A (en) * | 2019-07-16 | 2019-09-20 | 合肥永信等离子技术有限公司 | A kind of AlTiSiCON superhard coating and preparation method thereof |
| CN110373640A (en) * | 2019-09-05 | 2019-10-25 | 蓬莱市超硬复合材料有限公司 | A kind of preparation method of CrAlXN base PVD coated cemented carbide material |
| CN111519145A (en) * | 2020-05-28 | 2020-08-11 | 宁波迈柯新材料科技有限公司 | AlCrYN/AlCrSiN nano composite gradient coating on surface of die-casting die and preparation method thereof |
| CN113106400A (en) * | 2021-03-19 | 2021-07-13 | 苏州吉恒纳米科技有限公司 | Coating for high-gloss high-speed milling of stainless steel and preparation method thereof |
| CN113667930A (en) * | 2021-08-05 | 2021-11-19 | 东莞市华升真空镀膜科技有限公司 | AlCrSiBNiN nano composite coating and preparation method and application thereof |
| CN114293147A (en) * | 2021-11-16 | 2022-04-08 | 南京航空航天大学 | Nickel-based high-temperature alloy material and preparation method thereof |
| CN114381690A (en) * | 2022-01-11 | 2022-04-22 | 厦门钨业股份有限公司 | CrAlMeN-CrAlN nano multilayer structure coating and preparation method and application thereof |
| CN114959575A (en) * | 2022-05-26 | 2022-08-30 | 安徽工业大学 | Insulating wear-resistant protective coating for thin film sensor, preparation method and application thereof |
| CN115505886A (en) * | 2022-09-23 | 2022-12-23 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | AlCrSiN/AlCrMoSiN nano multilayer composite coating with high hardness and high wear resistance and preparation method thereof |
| WO2023004752A1 (en) * | 2021-07-30 | 2023-02-02 | 湖南泰嘉新材料科技股份有限公司 | Periodic multi-layer structure coating band saw blade, and preparation method therefor and use thereof |
| CN116372206A (en) * | 2023-03-09 | 2023-07-04 | 株洲肯特硬质合金股份有限公司 | Nanometer coating for cutter and coated cutter |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2336382A1 (en) * | 2009-12-04 | 2011-06-22 | Sandvik Intellectual Property AB | Multilayer coated cutting tool |
| CN103132026A (en) * | 2013-03-04 | 2013-06-05 | 常州大学 | Treatment of diabetes mellitus by taking insulin PEGylation derivative as active component |
| CN103757597A (en) * | 2014-02-07 | 2014-04-30 | 上海理工大学 | TiN/CrAlSiN nano composite multilayer coating and preparation method thereof |
| CN104213075A (en) * | 2014-09-22 | 2014-12-17 | 武汉大学 | AlTiSiN-AlCrSiN nanocrystalline-amorphous multilayer composite superhard toughness coating material and manufacturing method |
| CN104441828A (en) * | 2014-12-04 | 2015-03-25 | 马鞍山多晶金属材料科技有限公司 | AlCrSiN film with resistance to seawater corrosion and multilayer compound structure and preparation method of AlCrSiN film |
| CN107075692A (en) * | 2014-11-05 | 2017-08-18 | 瓦尔特公开股份有限公司 | Include the cutting element of multilayer PVD coatings |
| CN107058943A (en) * | 2017-05-10 | 2017-08-18 | 山东大学 | TiCN/CrCN nano-multilayer films and preparation method thereof |
| CN107761063A (en) * | 2017-08-31 | 2018-03-06 | 广东省稀有金属研究所 | A kind of high-temperature oxidation resistant self-lubricating laminated coating and preparation method thereof |
| CN107815643A (en) * | 2017-09-14 | 2018-03-20 | 上海新弧源涂层技术有限公司 | A kind of nano laminated coating for high-temperature service and preparation method thereof |
-
2018
- 2018-07-27 CN CN201810842580.7A patent/CN109161841B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2336382A1 (en) * | 2009-12-04 | 2011-06-22 | Sandvik Intellectual Property AB | Multilayer coated cutting tool |
| CN103132026A (en) * | 2013-03-04 | 2013-06-05 | 常州大学 | Treatment of diabetes mellitus by taking insulin PEGylation derivative as active component |
| CN103757597A (en) * | 2014-02-07 | 2014-04-30 | 上海理工大学 | TiN/CrAlSiN nano composite multilayer coating and preparation method thereof |
| CN104213075A (en) * | 2014-09-22 | 2014-12-17 | 武汉大学 | AlTiSiN-AlCrSiN nanocrystalline-amorphous multilayer composite superhard toughness coating material and manufacturing method |
| CN107075692A (en) * | 2014-11-05 | 2017-08-18 | 瓦尔特公开股份有限公司 | Include the cutting element of multilayer PVD coatings |
| CN104441828A (en) * | 2014-12-04 | 2015-03-25 | 马鞍山多晶金属材料科技有限公司 | AlCrSiN film with resistance to seawater corrosion and multilayer compound structure and preparation method of AlCrSiN film |
| CN107058943A (en) * | 2017-05-10 | 2017-08-18 | 山东大学 | TiCN/CrCN nano-multilayer films and preparation method thereof |
| CN107761063A (en) * | 2017-08-31 | 2018-03-06 | 广东省稀有金属研究所 | A kind of high-temperature oxidation resistant self-lubricating laminated coating and preparation method thereof |
| CN107815643A (en) * | 2017-09-14 | 2018-03-20 | 上海新弧源涂层技术有限公司 | A kind of nano laminated coating for high-temperature service and preparation method thereof |
Non-Patent Citations (2)
| Title |
|---|
| 杨兵等: ""AlTiSiN/AlCrSiN纳米多层复合涂层的结构及性能研究"", 《中南民族大学学报（自然科学版）》 * |
| 樊超等: ""脉冲电弧离子镀中的放电稳定性"", 《纺织高校基础科学学报》 * |
Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110257771A (en) * | 2019-06-28 | 2019-09-20 | 广州大学 | A kind of c-CrAlSiN hard coat of high Al content and preparation method thereof |
| CN110257772A (en) * | 2019-07-16 | 2019-09-20 | 合肥永信等离子技术有限公司 | A kind of AlTiSiCON superhard coating and preparation method thereof |
| CN110257772B (en) * | 2019-07-16 | 2021-11-12 | 合肥永信等离子技术有限公司 | AlTiSiCON superhard coating and preparation method thereof |
| CN110373640A (en) * | 2019-09-05 | 2019-10-25 | 蓬莱市超硬复合材料有限公司 | A kind of preparation method of CrAlXN base PVD coated cemented carbide material |
| CN111519145A (en) * | 2020-05-28 | 2020-08-11 | 宁波迈柯新材料科技有限公司 | AlCrYN/AlCrSiN nano composite gradient coating on surface of die-casting die and preparation method thereof |
| CN113106400A (en) * | 2021-03-19 | 2021-07-13 | 苏州吉恒纳米科技有限公司 | Coating for high-gloss high-speed milling of stainless steel and preparation method thereof |
| WO2023004752A1 (en) * | 2021-07-30 | 2023-02-02 | 湖南泰嘉新材料科技股份有限公司 | Periodic multi-layer structure coating band saw blade, and preparation method therefor and use thereof |
| CN113667930B (en) * | 2021-08-05 | 2022-11-11 | 东莞市华升真空镀膜科技有限公司 | AlCrSiBNiN nano composite coating and preparation method and application thereof |
| CN113667930A (en) * | 2021-08-05 | 2021-11-19 | 东莞市华升真空镀膜科技有限公司 | AlCrSiBNiN nano composite coating and preparation method and application thereof |
| CN114293147A (en) * | 2021-11-16 | 2022-04-08 | 南京航空航天大学 | Nickel-based high-temperature alloy material and preparation method thereof |
| CN114293147B (en) * | 2021-11-16 | 2022-10-11 | 南京航空航天大学 | Nickel-based high-temperature alloy material and preparation method thereof |
| CN114381690A (en) * | 2022-01-11 | 2022-04-22 | 厦门钨业股份有限公司 | CrAlMeN-CrAlN nano multilayer structure coating and preparation method and application thereof |
| CN114381690B (en) * | 2022-01-11 | 2024-03-01 | 厦门钨业股份有限公司 | CrAlMeN-CrAlN nano multilayer structure coating and preparation method and application thereof |
| CN114959575A (en) * | 2022-05-26 | 2022-08-30 | 安徽工业大学 | Insulating wear-resistant protective coating for thin film sensor, preparation method and application thereof |
| CN114959575B (en) * | 2022-05-26 | 2024-01-02 | 安徽工业大学 | Insulating wear-resistant protective coating for film sensor, preparation method and application thereof |
| CN115505886A (en) * | 2022-09-23 | 2022-12-23 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | AlCrSiN/AlCrMoSiN nano multilayer composite coating with high hardness and high wear resistance and preparation method thereof |
| CN115505886B (en) * | 2022-09-23 | 2023-10-24 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | AlCrSiN/AlCrMoSiN nano multilayer composite coating with high hardness and high wear resistance and preparation method thereof |
| CN116372206A (en) * | 2023-03-09 | 2023-07-04 | 株洲肯特硬质合金股份有限公司 | Nanometer coating for cutter and coated cutter |
| CN116372206B (en) * | 2023-03-09 | 2024-03-19 | 株洲肯特硬质合金股份有限公司 | Nanometer coating for cutter and coated cutter |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109161841B (en) | 2020-07-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109161841A (en) | A kind of AlCrN/AlCrSiN super hard nano composite laminated coating and its preparation method and application | |
| CN104928638A (en) | AlCrSiN-based multilayer nanometer composite cutter coating layer and preparation method thereof | |
| CN106086806B (en) | A kind of AlTiCrN high-temperature wear resistant coating and preparation method thereof | |
| WO2017156996A1 (en) | Composite functional cutter coating for cutting titanium alloy and preparation method therefor | |
| CN108754415A (en) | A kind of periodic multilayer nanostructure AlTiN/AlCrSiN hard coats and its preparation method and application | |
| CN109504940A (en) | A kind of AlCrN/AlCrSiNiN coating of periodic nanometer multilayered structure and its preparation method and application | |
| CN108468028B (en) | Periodic multilayer structure AlTiYN/AlCrSiN hard coating and preparation method and application thereof | |
| CN108456843A (en) | A kind of high performance Ti AlSiN nano-composite coatings and its preparation method and application | |
| CN110306190A (en) | A kind of polynary nanometer gradient coating cutter and preparation method thereof | |
| CN106835014A (en) | A kind of multiple elements design hard coat preparation method | |
| CN110578122A (en) | Preparation process of AlTiN/AlTiSiN multilayer nano composite coating | |
| CN109097731A (en) | A kind of AlCrN/AlCrYN multi-component multi-layer coating and its preparation method and application | |
| CN110578123A (en) | High-hardness AlTiN/AlTiSiN multilayer nano composite coating and preparation process thereof | |
| Cao et al. | Sand erosion resistance improvement and damage mechanism of TiAlN coating via the bias-graded voltage in FCVA deposition | |
| CN108251797A (en) | A kind of titanium alloy cutting cutter TiAlN/CrN laminated coatings and preparation method thereof | |
| CN110129741A (en) | A kind of polynary nanometer laminated coating cutter and preparation method thereof | |
| CN110616402B (en) | Multilayer gradient structure coating for cutting tool and preparation method thereof | |
| CN103774096A (en) | Preparation method for anti-oxidation composite hard coating | |
| CN108866481B (en) | Nano composite Al-Ti-V-Cu-N coating and preparation method and application thereof | |
| CN107815643A (en) | A kind of nano laminated coating for high-temperature service and preparation method thereof | |
| CN108559957B (en) | A kind of titanium alloy cutting cutter material and preparation method thereof with PVD coating | |
| CN106756841A (en) | A kind of preparation method of cutter composite coating | |
| CN107177827B (en) | SiNbC/SiNbCN lamination composite coating layer cutter and its preparation process | |
| CN111304612B (en) | CrAlN/AlN nano multilayer coating with high hardness and high oxidation resistance and preparation method thereof | |
| CN111020497B (en) | Periodic multilayer structure AlTiN/AlCrO coating and preparation method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |